daa81a6b_nford_Nanofabrication_Facility__Notes
[Parameter] Heater [Notes] 
Each heater has an unique item number and a value given in degrees Celsius. Do not overheat precursors (all precursors should be below 115C and some should not be heated at all - consult with quality circle if unsure). The reaction chamber should always be hotter than the manifold which should always be hotter than the precursor lines. The upper limits on temperature are protected by setpoints internal to the system.
Fiji2 — Stanford Nanofabrication Facility
Notes