daa81a6b_nford_Nanofabrication_Facility__Notes
[Parameter] Pulse [Notes] 
This command is for pulsing a precursor line. It requires an ALD valve number and the amount of time you want the valve open in seconds. The fastest these valves can fire is roughly .015 seconds, so note that even if you define a shorter time that is likely the valve open time you will get. (NOTE: when writing a recipe the time in seconds needs a digit to the left of the decimal place; thus you should use "0.015" instead of ".015" for the minimum duration pulse.)
Fiji2 — Stanford Nanofabrication Facility
Notes