daa81a6b_nford_Nanofabrication_Facility__Notes
[Parameter] Flow [Notes] 
This controls the flow of through a number of MFC. The plasma process gases are controlled by these MFCs as are the carrier gases. It is defined in sccm. It is not recommended to adjust the standard flow values in recipes. The MFCs for H2, N2, and O2 additionally have a hard off state and should be set to zero and then closed. This is already established in all recipes on the tool.
Fiji2 — Stanford Nanofabrication Facility
Notes