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[General item] Chip surface inspection , wafer drying equipment [Product name] TME-400R TME-150R [Characteristics] Expression type: TME-400R TME-150R, exposure methods: Proximity system, Resolution: Proximity: 6μmL & S soft contact: 2μmL & S Hard Contact: 0.5μmL & S (depending on conditions.) [Middle item] 
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