ɪn sˌiːvˌiːdˈiː, ðə fˈɪlm ɡɹˈoʊθ tˈeɪks plˈeɪs æt hˈaɪ tˈɛmpɹɪtʃɚz, lˈiːdɪŋ tə ðə fɔːɹmˈeɪʃən ʌv kɚɹˈoʊsɪv ɡˈæʃəs pɹˈɑːdʌkts, ænd ɪt mˈeɪ lˈiːv ɪmpjˈʊɹɹᵻɾiz ɪnðə fˈɪlm.
In CVD, the film growth takes place at high temperatures, leading to the formation of corrosive gaseous products, and it may leave impurities in the film.