ɪn ðɪs pɹˈɑːsɛs ðiːz kˈɑːmpaʊndz, kəmpˈæktᵻd ɪnðə fˈɔːɹm əvən ˈɪŋɡət, ɑːɹ ɪvˈæpɚɹˌeɪɾᵻd ɪn vˈækjuːm baɪ ðə fˈoʊkəst hˈaɪˈɛnɚdʒi ᵻlˈɛktɹɑːn bˈiːm, ænd ðə vˈeɪpɚz ɑːɹ dᵻɹˈɛktli kəndˈɛnst ˌoʊvɚ ðə sˈʌbstɹeɪt.
In this process these compounds, compacted in the form of an ingot, are evaporated in vacuum by the focused high-energy electron beam, and the vapors are directly condensed over the substrate.