sˈɜːʔn̩ ɹᵻfɹˈæktɚɹi ˈɑːksaɪdz ænd kˈɑːɹbaɪdz ˌʌndɚɡˈoʊ fɹˌæɡməntˈeɪʃən dˈʊɹɹɪŋ ðɛɹ ɪvˌæpɚɹˈeɪʃən baɪ ðɪ ᵻlˈɛktɹɑːn bˈiːm, ɹɪzˈʌltɪŋ ɪn ɐ stˌoʊɪkɪˈɑːmətɹi ðæt ɪz dˈɪfɹənt fɹʌmðɪ ɪnˈɪʃəl mətˈɪɹiəl.
Certain refractory oxides and carbides undergo fragmentation during their evaporation by the electron beam, resulting in a stoichiometry that is different from the initial material.