tˈʌŋsʔn̩ sˈɪlɪsˌaɪd ɪz ˈɔːlsoʊ ʌv vˈæljuː təwˈɔːɹdz jˈuːs ɪn mˌaɪkɹoʊɪlˌɛktɹoʊmᵻkˈænɪkəl sˈɪstəmz, wˌɛɹ ɪɾ ɪz mˈoʊstli ɐplˈaɪd æz θˈɪn fˈɪlmz fɔːɹ fˌæbɹɪkˈeɪʃən ʌv mˈaɪkɹoʊskˌeɪl sˈɜːkɪts.
Tungsten silicide is also of value towards use in microelectromechanical systems, where it is mostly applied as thin films for fabrication of microscale circuits.