ðə dˌɛpəzˈɪʃən ɹˈeɪt ɪn ðɪs pɹˈɑːsɛs kæn biː æz lˈoʊ æz wˈʌn ˌɛnˈɛm pɜː mˈɪnɪt tʊ æz hˈaɪ æz fjˈuː mˈaɪkɹoʊmˌiːɾɚz pɜː mˈɪnɪt.
The deposition rate in this process can be as low as 1 nm per minute to as high as few micrometers per minute.