ðiːz kˈɑːmpaʊndz kæn biː dᵻpˈɑːzɪɾᵻd ɔnðə sˈʌbstɹeɪt ˈiːðɚ baɪ ɹɪˈæktɪv ɪvˌæpɚɹˈeɪʃən ɔːɹ baɪ kˈoʊɪvˌæpɚɹˈeɪʃən.
These compounds can be deposited on the substrate either by reactive evaporation or by co-evaporation.