The LTO tube came back up today and after an initial coat (6000A?) needed a test run. RUN 1: Coated additional 45 min with LTO400 to help stabilize dep rate. Then three runs with 11 wafers each in metal and nonmetal boats, loaded every other slot: RUN 2 LTO400 for 00:04:45. All bare Si test wfs. Metal boat = 890A or 134A/min Nonmetal boat = 826A or 131A/min Particles barely visible RUN 3 LTO400 for 00:05:30. Metal boat = 1124A or 219A/min Nonmetal boat = 954A, or 185.73 A/min Particles, but very small RUN 4 LTO400 for 00:05:20 Metal boat = 1117AA or 209A/min Nometal boat = 966A or 193.2A/min More particles. Still smaller and fewer than before tube clean but becoming more of a problem.