There are a couple of fluorinated parylenes commercially available, parylene AF-4 (generic name, aliphatic fluorination 4 atoms) [parylene SF (AF-4, Kisco product), parylene HT (AF-4, SCS product)] and parylene VT-4 (generic name, per-flourinated aromatic ring) [also Parylene CF (Kisco product) or sometimes called just F].
Most recently, the concerns over the bromine by-product has been addressed by a unique route to parylene AF-4, where heavy phenoxy leaving groups are utilized [REF].