The nearby town of Beth Zacharia is said to have existed in Roman times [REF].
In 1517, Az-Zakariyya was incorporated into the Ottoman Empire with the rest of Palestine, and in 1596 the village appeared in the Ottoman tax registers listed as Zakariyya al-Battikh under the administration of the nahiya ("subdistrict") of Quds (Jerusalem), part of the Sanjak of Quds.