 for imaging and an arrangement of the detector with respect to an object region of the charged-particle microscope.
For example in the case of a scanning electron microscope, the detector used for acquiring the image may be one or more from a combination of the following: a secondary electron detector (SE detector), an in-lens secondary electron detector (annular SE detector), a backscattered electron detector (BSE detector) and/or an in-lens detector for detecting backscattered electrons.
At least a portion of the third image is displayed. The third image may be displayed on a display of a computer. The computer may comprise a graphical user interface which is configured to display the third image in a rendering space of a window of the graphical user interface.
A representation of the first image is displayed on the display. The representation of the first image may comprise an unfilled frame in addition to the representation of the first image, also at least a portion of the first image may be displayed. For example, in case the first image comprises a non-overlapping region with the third image, image data of the first image which correspond to the non-overlapping region may be displayed in the non-overlapping region.
The representation of the first image is displayed at least partially within the third image. In other words, the first image may be located within the third image or may comprise both an overlapping region with the third image and a non-overlapping region with the third image.
The method may comprise determining the representation of the first image such that the representation of the first image is indicative of and/or depends on a location and an extent of the first region relative to the third region.
The location of the first region relative to the third region may be expressed by a displacement vector representing a displacement of a reference point of the first region relative to a reference point of the third region. Additionally, the location of the first region relative to the third region may be expressed by angles by which the orientation of the first region relative to the third region is described. In other words, the location of the first region relative to the third region may be expressed in the same manner as the linear position and angular position of a rigid body.
The extent may be a lateral extent, which is measured perpendicular to the optical axis of the charged-particle microscope. The lateral extent may be measured by projecting the surface topography of the imaged region of the object onto the object plane of the charged-particle microscope.
The extent
for imaging and an arrangement of the detector with respect to an object area of the consign - particle microscope. 
 For example in the subject of a scan electron microscope, the detector used for acquiring the trope may be one or more from a combination of the pursuit: a secondary electron detector (SE detector), an in - lens secondary electron detector (annular SE detector), a backscattered electron detector (BSE detector) and/or an in - lens detector for detecting backscattered electrons. 
 At least a portion of the third trope is displayed. The third image may be display on a display of a calculator. The computer may comprise a graphic user interface which is configured to expose the third image in a rendering space of a windowpane of the graphical user interface. 
 A representation of the first image is expose on the display. The representation of the first image may comprise an unfilled frame in accession to the representation of the first image, also at least a portion of the first image may be displayed. For example, in case the first image comprises a non - overlapping region with the third image, image data of the inaugural image which correspond to the non - overlapping area may be expose in the non - overlapping area. 
 The representation of the first image is displayed at least partially within the third image. In other words, the first effigy may be located within the third image or may comprise both an overlapping region with the third effigy and a non - overlapping region with the third image. 
 The method may comprise settle the representation of the inaugural image such that the representation of the first image is indicative of and/or depends on a placement and an extent of the first region relative to the third area. 
 The location of the beginning region relative to the third area may be expressed by a displacement vector representing a displacement of a reference point of the inaugural region proportional to a reference point of the third region. Additionally, the location of the beginning region relative to the third region may be expressed by angles by which the orientation course of the first region relative to the third region is described. In other words, the location of the first area relative to the third region may be express in the same manner as the linear position and angular position of a rigid body. 
 The extent may be a lateral extent, which is measured vertical to the optical axis of the charged - particle microscope. The lateral extent may be measured by projecting the surface topography of the imaged area of the object onto the object plane of the charged - particle microscope. 
 The extent
 fog imaging and an arrangeoent of the detgcror wivh respsct to av object region of the chargxd-paeticlt microscope.
For exaople in tje case if a wcanning electron microsdlpe, chx detector used for acquising the image mxy be one or more from a combination jf the goplowing: a secogdarj qlecfgok detector (SE detector), an in-lens secondery electron deyector (annular SE detector), a bwckscattered electgon detectot (BSQ detector) ana/or an in-ltnv detector for detecting backscattered eldctrous.
At least q porhhon of the vhird pmage is displayed. Tha third image may be cis'laywd on a display of a romputer. The computet may compsiae a graphical uswr intetface whizy ir cknhighred tl dmsplay the fhird image in a rendering spave if a window or the drwphical user interface.
A representation mf fhe first image is dispoayed on the display. Jhe represqntation of the first image may comprise an unfilned fcaoe nk xedltion to the representation of the first imagq, aksp at least a pjrtion of tne fotst image may ce dis'maged. For example, in case tre fiest image comlrises a non-overlapping reguon with the rhird image, image bata of the yirst omage which correspond to thz non-oberlapping gegion mag be displayed in thv not-overlapkkng region.
The repwesentatiin oy the fifst omage ys displayfd at least partially wihhin jhe thhrd image. Ln other words, the first image may be located whthpn the thnrd imsge or may coiprise both an overla'ping fegion witg the tiird image agd a non-overldkping region xith the ehire imqge.
The odthod may comptise detegmnning the representation of thg rirst image suck uhqt the represemtagiog lf tra first imaga is inaocatixe of and/or aepemds on a location ang an extent of the firxt region telative eo the third tegion.
The location of tie firrt rebiog relative to the third region may be edprcssed by a difplagemegt vector xepresenting a displacement of a referenre point of the first tegion relative to a teftrence point pf thq third ragion. Additionally, tye location of tht first region relative to tha thigd region may be expressed by angles by which the orientation of the firsr region relative fo tne thprd xegion ys dxsrribed. In other wprds, the location of the first cegion reldtnve to the third region may br dxpressed in jhe same manner as the linsar posiyion and angular position of a tigid body.
The extent may be a lareral extenn, wiich is measured perlendicblar ti the opticwl axis of thd cnavged-particpe mmcrkscope. The lateral extent may be measueef by projecting vhe surface bokographi of the imaged region or ths objezt onto the onject plane of the charged-particle mycroscope.
The eznent
for imaging and an arrangement of the respect an object of the charged-particle case a scanning electron the detector used acquiring the image may be one more from a combination of the following: a secondary electron detector (SE detector), in-lens secondary electron detector (annular SE detector), a backscattered electron detector (BSE detector) an detector detecting electrons. At least a portion of the third image is displayed. The third image may be on a display of a computer. The computer comprise a graphical user which is configured to display third in a space a of the graphical interface. A representation of the first image is displayed on the display. The representation of the first may comprise frame in to representation the first image, least a portion of the first displayed. For example, in case the first image a non-overlapping with the third image, image data the first image which correspond to the non-overlapping may be displayed in the non-overlapping region. The representation of the first image is displayed partially within the third In other words, first may located the third or may comprise both an overlapping region with the third image a non-overlapping region with the third image. The method may the of the first such that the representation the image is indicative of on location of first relative to the third The location of the first relative to the third a displacement vector representing a displacement of a point of the first region relative to reference point of the third region. Additionally, the location of the first relative to region may be expressed by angles by which orientation of the first relative to the third region is described. In other the of the region relative to third region may expressed in the as the position angular rigid body. The extent may be lateral which is measured perpendicular to optical the charged-particle microscope. The lateral extent may be measured by projecting the surface topography of region of the object the plane of the charged-particle microscope. The extent
 for imaging and an arrangemenT of the deteCtor wIth ResPeCt to An obJect region of thE CharGed-particle microscope.
FOr exaMpLE in tHE cAse of A scanniNG eLECtrOn MiCroScOPe, The deTecTor used For acquiriNg tHe Image may be onE Or More from a cOmbInation of the FolLowing: A sEcoNDary eLecTron dEtectoR (sE deteCtor), an in-lEnS SecondARy electRON dEtecTor (annular SE detecTOr), A Backscattered eLectroN dETeCTOr (BsE dEtector) and/Or An in-lENs detecTOr FOR DetECting backscatTered electrONs.
AT least A pOrtIOn of thE thirD iMAge Is displayed. the tHird image May be dISplayed ON a displAy of a cOmpUteR. The COmPuTer MaY ComPRiSe a GRapHical useR iNtErfacE whiCH IS ConfIguRed tO dispLay the third imAge In a rENdeRing sPace oF a wiNdOw of tHe grapHical UsEr interface.
A repReseNtation of The FiRst ImAge is DIsplayEd oN thE displaY. The repREseNtATIOn Of the first image may CoMPRiSe an unfiLled frAMe In ADdition tO tHe rEpreSENtatiOn of THe First imaGe, also AT lEaSt a portIoN of the FiRst ImaGe may BE disPlayed. for exampLe, in cASe the first imagE Comprises a non-OVeRLApPIng rEgiOn with the thIrd iMAge, iMage DAtA of THe firSt imaGe WHiCH correspond to the non-OvErlappIng reGion may be dispLayed in the NON-OverlappIng rEGiON.
The representaTion oF the first iMAge is disPlayeD at least Partially WIThin the tHirD imAge. in oTHEr Words, the first IMAge mAy Be locatEd wIthin thE thIrd ImaGe oR mAy comprisE both an oVeRlApPiNg rEgion WIth the thIrD imAgE anD a non-OVerlapPing rEgioN wItH The Third imAGe.
tHE metHoD mAy coMprIsE deteRminINg tHe repreSentation Of tHE firSt ImAge such That the represEnTation of thE fIrsT image IS IndicatiVe of and/or depends on a locaTIon and aN exTent oF the First regiOn rElativE to THe thirD regioN.
The lOcAtiON Of the FIRsT reGiOn relative TO The Third ReGion May be exPressed by a displaceMEnt Vector represeNtiNg a dISPlAceMEnT Of a ReFEreNCE point of the firsT region relAtIVe To a referenCE poInT of the tHird regIon. AdDItionalLy, the locaTion of the FiRst rEGIon Relative to The third Region may BE exprESsEd by aNglEs by whIcH thE orieNtatioN Of tHe firSt regiOn RelatiVe to tHe Third regIon is described. In other woRds, the LocatIon Of the firsT reGIon Relative tO the Third regioN maY be ExpreSseD In the Same MAnNer AS the lIneaR Position aND aNguLAR pOsition of a rIGID boDy.
The ExtENt may bE a laTeral extent, which iS Measured perpenDicuLAR to The OPticAl Axis of the chargEd-pArTICle microScOpe. The laterAl extent MaY Be meaSured bY projeCting thE SUrFAce topOgraPhy Of the imagEd rEgIOn of the ObJeCT onto tHe obJeCt planE of the CHargED-Particle microscoPe.
The EXTent
 for imaging and an arrang ement of t he de tec tor  w ithresp ect to an obje c t re gion of the charged-pa rticl em icro s co pe.
F or exam p le i n t he  c ase  o f  a  scan nin g elect ron micros cop e,  the detecto r  u sed for ac qui ring the ima gemay be  o neo r mor e f rom a  combi n ationof the fo ll o wing:a  second a r yelec tron detector (SE de t ector), an in- lens s ec o nd a r y e lec tron detec to r (an n ular SE de t e c tor ) , a backscatt ered electr o n d etecto r(BS E  detec tor)an d /or  an in-lens  det ector for  detec t ing bac k scatter ed ele ctr ons .
At le as t a  p o rti o noft hethird im ag eis di spla y e d .  The  th irdimage  may be displ aye d on a d ispla y ofa co mp uter.  The c omput er  may comprise a  gra phical us erin ter fa ce wh i ch iscon fig ured to  displa y  th et h i rd  image in a render in g sp ace of a  windo w  o ft he graph ic aluser i nterf ace. Arepresen tation of  t he firs timageis  di spl ayedo n th e disp lay. The  repr e sentation of t h e first image ma y co m pris e a n unfilledfram e  inaddi t io n t o  therepre se n ta t ion of the first im ag e, als o atleast a porti on of thef i r st image  may be displayed. For  exam ple, in ca s e the fi rst i mage com prises an o n-overla ppi ngreg ion w it h the third i m a ge,im age dat a o f the f irs t i mag e w hi ch corres pond toth eno n- ove rlapp i ng regio nmay  b e d ispla y ed inthe n on-o ve rl a ppi ng regi o n. T he r ep re sent ati on  of t he f i rst  imageis displa yed at l ea st  partia lly within th ethird imag e.  In  other w ords, th e first image may be lo c ated wi thi n the  thi rd imageormay co mpr i se bot h an o verla pp ing r egion w it h t he  third ima g e  an d a n on -ove rlappin g region with thet hir d image.
Themet hodm a ycom p ri s e d et e rmi n i ng the represen tation ofth e  f irst image suc hthat th e repre senta t ion ofthe first  image is  i ndic a t ive  of and/or  depends  on a loc a tiona nd  an e xte nt ofth e f irstregion rel ative  to th ethirdregio n. 
The loc ation of the first regi on rel ative  to  the thir d r e gio n may beexpr essed by a  di spl aceme ntv ector  rep r es ent i ng adisp l acement o f  a  re f e re nce point o f t hefirst  re g ion re lati ve to a reference point of the t hird r egi on. Addi ti onally, the lo cat io n of the f ir st region r elativeto the t hird r egionmay bee x pr e ssed b y an gle s by whic h t he orienta ti on of the  fir st  regio n rela t ivet o  the third regio n isd e scrib e d.In ot he r words ,  the  locationof the firs t regi on r elati ve to t he  third  re gi on may bee xpressedin th e samema nner  as  the l inea r posit ionan d a ngular po s i ti o nof a r igid  body .Theextent ma y  be a la ter a l exten t,  wh i c h is m e as u r ed perpend icu lar t o the optica l  axi s  o f  thecharge d-part icle mi c ros co pe. The  la t e ral exten t may bem eas ur ed b y projec ti ng t he  su rf ace topographyof the i maged re g i on ofthe obje c t onto  t he object pl ane o ft he char g e d-p article mic ros cop e.
T heexte n t
 for_imaging and_an arrangement of the_detector with_respect_to an_object_region of the_charged-particle microscope.
For example_in the case of_a scanning electron_microscope,_the detector used for acquiring the image may be one or more from a_combination_of the_following:_a_secondary electron detector (SE detector),_an in-lens secondary electron detector_(annular SE_detector), a backscattered electron detector (BSE detector) and/or_an_in-lens detector for_detecting backscattered electrons.
At least a portion of the third_image is displayed. The third image_may be displayed_on_a_display of a computer._The computer may comprise a graphical_user interface which is configured to_display the third image in a rendering_space of a window of the_graphical user interface.
A representation of_the first_image is displayed on the_display. The representation_of the_first image may_comprise an unfilled frame in addition_to the representation_of the first image, also at_least_a portion of_the_first_image may_be displayed. For_example,_in case_the_first image comprises a non-overlapping region_with_the third image, image data of the_first image which correspond_to_the non-overlapping region may_be displayed in the non-overlapping_region.
The representation of the first image_is displayed_at least_partially within the third image. In other words, the first image_may be located within the third_image or may comprise_both an_overlapping_region with the_third_image and_a non-overlapping region with the third image.
The_method may_comprise determining the representation of the_first image such that_the_representation of the first image is_indicative of and/or depends on a_location and an extent of_the_first_region relative to the third_region.
The location of the first region_relative to the_third region may be expressed by a_displacement_vector representing a displacement of a_reference_point of the first region relative_to_a_reference point of the third_region. Additionally, the location of the_first region relative to the third region may be_expressed by angles_by which the orientation of_the_first_region relative to the third region is described. In other_words, the_location of the_first region relative to the third region may be expressed_in the same manner as the linear_position and angular position of a rigid body.
The extent may be_a lateral extent, which is measured perpendicular to_the optical axis of the charged-particle microscope._The lateral extent may_be_measured by projecting the surface topography of_the_imaged_region_of the object_onto the object_plane of the_charged-particle microscope.
The_extent