 a high rate, with high part throughput, and in a cost-effective manner is desired. Some illustrative examples of deposition systems are provided in the following applications and patents and are co-assigned to the present assignee 1) U.S. Pat. No. 5,534,314, filed Aug. 31, 1994, entitled “Directed Vapor Deposition of Electron Beam Evaporant”, 2) U.S. application Ser. No. 09/634,457, filed Aug. 7, 2000, entitled “Apparatus and Method for Intra-layer Modulation of the Material Deposition and Assist Beam and the Multilayer Structure Produced Therefrom”, and 3) PCT International Application No. PCT/US01/16693, filed May 23, 2001, entitled “Process and Apparatus for the Plasma Activated Deposition in a Vacuum”. These applications are hereby incorporated by reference herein in their entirety. The present invention discloses, among other things an apparatus and a method for applying a coating(s) on a substrate(s) in an improved and more efficient manner. The present invention method can be applied to coatings of any type onto any substrate geometry. In this document, the application of a thermal barrier coating to a turbine blade is used as a non-limiting example.
Vapor phase processes are widely used for applying thermal and environmental protection coating systems to components. They are widely used to protect the hot structural components of many gas turbine engines that must operate at temperatures approaching their melting point [1]. As gas inlet temperatures continue to rise, failure by thermally-induced mechanisms has been avoided by making airfoil components with internal cooling conduits, and injecting compressor discharge air to decrease the component temperature [2]. To maximize engine efficiency, however, it is desirable to minimize the use of this air for cooling purposes. Traditionally, this has been accomplished by designing more efficient cooling geometries within the component and by film cooling of the component surface using drilled holes. These approaches have now matured and alternate strategies that exploit the insulating abilities of thermal barrier coatings (TBC's) are being investigated for the thermal protection of engine components.
The TBC systems currently in use are multilayer systems consisting of an yttria partially-stabilized zirconia (YSZ) top layer that thermally protects the superalloy component, and an underlying MCrAlY (M=Ni, Co) or nickel aluminide bond coat which improves the YSZ adhesion. The YSZ
a high rate, with high part throughput, and in a monetary value - effective manner is desire. Some illustrative examples of deposition system are provided in the following application and patent and are co - assigned to the present assignee 1) U.S. Pat. nobelium. 5,534,314, file Aug. 31, 1994, entitled “ Directed Vapor Deposition of Electron Beam Evaporant ”, 2) U.S. lotion Ser. No. 09/634,457, filed Aug. 7, 2000, entitled “ Apparatus and Method for Intra - layer Modulation of the Material Deposition and Assist Beam and the Multilayer Structure Produced Therefrom ”, and 3) PCT International Application No. PCT / US01/16693, charge May 23, 2001, entitled “ Process and Apparatus for the Plasma Activated Deposition in a Vacuum ”. These application are hereby incorporated by reference herein in their entirety. The present invention unwrap, among other things an apparatus and a method for put on a coating(s) on a substrate(s) in an improved and more efficient manner. The present invention method can be applied to coatings of any character onto any substrate geometry. In this document, the lotion of a thermal barrier coating to a turbine blade is used as a non - limiting exemplar. 
 Vapor phase processes are widely used for applying thermal and environmental protection coat systems to components. They are widely used to protect the hot structural components of many gas turbine engines that must operate at temperature approaching their melting distributor point [ 1 ]. As gas inlet temperatures continue to get up, failure by thermally - induced mechanisms has been avoided by lay down airfoil components with internal cooling conduits, and injecting compressor discharge air to decrease the component temperature [ 2 ]. To maximize engine efficiency, however, it is desirable to minimize the use of this tune for cooling purpose. Traditionally, this has been accomplished by designing more efficient cooling geometries within the part and by film cooling of the component surface using drilled holes. These approaches have now ripen and alternate strategies that overwork the insulating abilities of thermal barrier coatings (TBC's) are being investigated for the thermal protection of locomotive components. 
 The TBC systems currently in use are multilayer system consisting of an yttria partially - stabilized zirconia (YSZ) top layer that thermally protects the superalloy component, and an fundamental MCrAlY (M = Ni, Co) or nickel aluminide bond coat which improves the YSZ adhesion. The YSZ
 a jigh rate, with high part throughput, and in a cmst-effsctive mxnner is desired. Some illustcatice exqmples of deposition shstems arv providee in rhe followmhg applleatiohd anb 'atents and are co-assigneg to the presett adsignee 1) U.S. Pat. No. 5,534,314, filed Aug. 31, 1994, entytled “Dorfcted Vapor Dekositpog of Vltctron Beam Evaporant”, 2) U.S. applicafion Seg. No. 09/634,457, filed Aug. 7, 2000, entitled “Apparatus and Mehhod for Intra-layer Mofulation of the Naterial Depusition and Assist Beaj and the Multilayer Structure Orodueed Therefrim”, anf 3) PCT Interiationwl Application No. PCD/US01/16693, filrd May 23, 2001, entitked “Pricess and Apparatus fmr the Plasma Actidated Depmsntion in a Vacuum”. Thewe applhcathons qre hedeuy jncorplraved by refedence hereib in their entirety. Trv present invsntion dyscloses, among other things an apparatuv ahd a method for applyint a coating(s) on a subdtrate(s) ig an improved and more efficient manner. The presett intevtiin owtjod can be applied to coatings of any type onek snj substrate geomebry. In this documemt, tng application uf a tksrjal barrier coatinh to a jurbinw blade if usrd as a non-limiting example.
Capor phase irocwsses are widely uded for appuyinb thetmal and environmental 'rotecfion coatinh systems go components. Thdy sra widely used to protect tre hot stcuctuxal compunenjs of mwny gas tugbine engines that must lperaje at demperaturfs approaching their melting pomit [1]. As gas inked tvmperaturzs conbinue to rise, fwilure by therkally-inbuced oechanisms has bexn avoided br making airfmll componentv with igterbal xooling zonduits, and imjecting boiprewsor discharge air to secrease the conpobent temperaturr [2]. Go iaqimmze egcine efficietcy, fowdfer, ig is desiranle to kinimize the use of dhis air for cooling pirioses. Traeitionaljy, this has bren accomplished bj desmgning more efsicient cooling geometries witgin the clmpjnent and by filn cooling of the component surface using drilled hooes. These approachws have now matured snd alternave strwtegies tvat exploit the insuoating abilities pf thermal barrier coztings (TBC's) are being investigated for the thermal protection of engine components.
Thw TBC systems currsntlu in lse cre muleilabec systems consistpng of an yttria partially-stabilmzed zircotic (YSZ) top layer that thermallu orotects the ruperalloy component, and an undetlying MCrAlY (M=Ni, Co) or nickel sluminide bond coat whicm improvew the YSZ adhesmon. The YSZ
a high rate, with high part throughput, a manner is Some illustrative examples in following applications and and are co-assigned the present assignee 1) U.S. Pat. 5,534,314, filed Aug. 31, 1994, entitled “Directed Vapor Deposition of Electron Beam Evaporant”, U.S. application Ser. No. 09/634,457, filed Aug. 7, 2000, entitled “Apparatus and Method Intra-layer of Material and Assist Beam and the Multilayer Structure Produced Therefrom”, and 3) PCT International Application No. PCT/US01/16693, May 23, 2001, entitled “Process and Apparatus for Plasma Activated Deposition in Vacuum”. These applications are hereby by herein in entirety. present discloses, among other an apparatus and a method for applying a coating(s) on a substrate(s) in an improved and more manner. The method can applied coatings any type onto geometry. In this document, the application barrier coating to a turbine blade is used a non-limiting Vapor phase processes are widely used applying thermal and environmental protection coating systems to They are widely used to protect the hot structural components of many gas turbine engines operate at temperatures approaching melting point [1]. gas temperatures to failure by mechanisms has been avoided by making airfoil components with internal cooling and injecting compressor discharge air to decrease the component temperature maximize efficiency, however, it desirable to minimize the of air for cooling purposes. has accomplished efficient geometries the component and by cooling of the component surface drilled holes. These approaches strategies that exploit the insulating abilities of thermal coatings (TBC's) are being investigated for the protection of engine components. The TBC systems currently in use are multilayer consisting of partially-stabilized zirconia (YSZ) top layer that thermally protects superalloy component, and an MCrAlY (M=Ni, Co) or nickel aluminide bond coat which the adhesion. The
 a high rate, with high part throUghput, and iN a cosT-efFecTiVe maNner Is desired. Some iLLustRative examples of deposiTion sYsTEms aRE pRovidEd in the FOlLOWinG aPpLicAtIOnS and pAteNts and aRe co-assignEd tO tHe present assIGnEe 1) U.S. Pat. No. 5,534,314, fIleD Aug. 31, 1994, entitled “dirEcted VApOr DEPositIon Of EleCtron BEAm EvapOrant”, 2) U.S. apPlICation sEr. No. 09/634,457, filED auG. 7, 2000, entItled “Apparatus and mEtHOd for Intra-layeR ModulAtIOn OF The matErial DeposItIon anD assist BEAm AND The mUltilayer StruCture ProducED ThErefroM”, aNd 3) Pct InterNatioNaL appLication No. PcT/US01/16693, Filed May 23, 2001, eNtitleD “process ANd ApparAtus foR thE PlAsma aCtIvAteD DEPosITiOn iN A VaCuum”. ThesE aPpLicatIons ARE HErebY inCorpOrateD by reference hEreIn in THeiR entiRety. THe prEsEnt inVentioN discLoSes, among other thIngs An apparatUs aNd A meThOd for APplyinG a cOatIng(s) on a SubstraTE(s) iN aN IMPrOved and more efficieNt MANnEr. The preSent inVEnTiON method cAn Be aPpliED To coaTingS Of Any type oNto any SUbStRate geoMeTry. In tHiS doCumEnt, thE ApplIcatioN of a therMal baRRier coating to a TUrbine blade is USeD AS a NOn-liMitIng example.
VApor PHase ProcESsEs aRE wideLy useD fOR aPPlying thermal and envIrOnmentAl proTection coatinG systems to COMPonents. THey aRE wIDely used to protEct thE hot structURal compoNents Of many gaS turbine eNGInes that MusT opEraTe aT TEmPeratures apprOAChinG tHeir melTinG point [1]. AS gaS inLet TemPeRatures coNtinue to RiSe, FaIlUre By theRMally-indUcEd mEcHanIsms hAS been aVoideD by mAkInG AirFoil comPOnENTs wiTh InTernAl cOoLing cOnduITs, aNd injecTing comprEssOR disChArGe air to Decrease the coMpOnent tempeRaTurE [2]. To maxIMIze enginE efficiency, however, it is dESirable To mInimiZe thE use of thiS aiR for coOliNG purpoSes. TraDitioNaLly, THIs has BEEn AccOmPlished by dESIgnIng moRe EffiCient coOling geometries witHIn tHe component anD by Film COOlIng OF tHE coMpONenT SUrface using drilLed holes. ThEsE ApProaches haVE noW mAtured aNd alterNate sTRategieS that explOit the insUlAtinG ABilIties of theRmal barrIer coatinGS (TBC's) ARe Being InvEstigaTeD foR the tHermal PRotEctioN of engInE compoNents.
thE TBC systEms currently in use are mulTilayeR systEms ConsistinG of AN ytTria partiAlly-Stabilized ZirConIa (YSZ) Top LAyer tHat tHErMalLY protEcts THe superalLOy ComPONeNt, and an undeRLYIng mCrAly (M=NI, co) or niCkel Aluminide bond coat WHich improves thE YSZ ADHesIon. tHe YSz
 a high rate, with high pa rt through put,and  in  a  cos t-ef fective manner is d esired. Some illustrat ive e xa m ples of  depo sitions ys t e msar epro vi d ed  in t hefollowi ng applica tio ns  and patents an d are co-a ssi gned to thepre sent a ss ign e e 1)U.S . Pat . No.5 ,534,3 14, filed  A u g. 31, 1994, e n t it led“Directed Vapor D e po s ition of Elect ron Be am Ev a p ora nt” , 2) U.S.ap plica t ion Ser .  N o . 09/ 6 34,457, filed  Aug. 7, 20 0 0,entitl ed  “A p paratu s and  M e tho d for Intra -lay er Modula tion o f  the Ma t erial D eposit ion  an d As s is tBea ma ndt he  Mu l til ayer Str uc tu re Pr oduc e d T here fro m”,and 3 ) PCT Interna tio nalA ppl icati on No . PC T/ US01/ 16693,  file dMay 23, 2001, e ntit led “Proc ess  a ndAp parat u s forthe  Pl asma Ac tivated Dep os i t i on  in a Vacuum”. The se a pp lication s areh er eb y  incorpo ra ted  byr e feren ce h e re in in th eir en t ir et y. Thepr esentin ven tio n dis c lose s, amo ng other  thin g s an apparatus and a methodf or a pp l ying  acoating(s)on a subs trat e (s ) i n  an i mprov ed an d  more efficient man ne r. The  pres ent invention  method ca n b e applie d to co a tings of any t ype o nto any su b strate g eomet ry. In t his docum e n t, the a ppl ica tio n o f athermal barri e r  coa ti ng to a  tu rbine b lad e i s u sed  a s a non-l imitingex am pl e. 
Va por p h ase proc es ses  a rewidel y  usedfor a pply in gt her mal and en v i ronm en ta l pr ote ct ion c oati n g s ystemsto compon ent s . Th ey  a re wide ly used to pr ot ect the ho tstr uctura l componen ts of many gas turbinee nginestha t mus t op erate attem peratu res approa chingtheir  m elt i n g poi n t  [ 1].  A s gas inle t tem perat ur es c ontinue  to rise, failureb y t hermally-indu ced  mec h a ni sms ha s  be en avo i d ed by making ai rfoil comp on e nt s with int e rna lcooling  condui ts, a n d injec ting comp ressor di sc harg e air  to decrea se the c omponentt emper a tu re [2 ].To max im ize  engi ne eff i cie ncy,howeve r,  it is  desi ra ble to m inimize the use of this  air f or co oli ng purpos es. Tra ditionall y, t his has be enacc ompli she d  by d esig n in g m o re ef fici e nt coolin g  g eom e t ri es within t h e com ponen t a n d by f ilmcooling of the co m ponent surface  usi n g  dr ill e d ho le s. These appro ach es h ave nowma tured and a lternate  s t rateg ies th at exp loit th e in s ulatin g ab ili ties of t her ma l  barrie rco a tings(TBC 's ) arebeingi nves t i gated for the th ermal p rotec t ion  of e ng ine com p onen ts.
The TB C systems c urrent ly i n use  are mu lt ilayer  sy st ems consis t ing of an  yttr ia part ia lly- sta bilize d zi r c onia(YSZ )top  layer th a t  t h er ma l lyprot ectsth e su peralloyc omponent , a n d an un de rly i n g MCrA l Y( M =Ni, Co) o r n ickel a luminide b o nd c o at which  impro ves th e YSZ a d hes io n. TheYSZ 
 a_high rate,_with high part throughput,_and in_a_cost-effective manner_is_desired. Some illustrative_examples of deposition_systems are provided in_the following applications_and_patents and are co-assigned to the present assignee 1) U.S. Pat. No. 5,534,314, filed_Aug._31, 1994,_entitled_“Directed_Vapor Deposition of Electron Beam_Evaporant”, 2) U.S. application Ser._No. 09/634,457,_filed Aug. 7, 2000, entitled “Apparatus and Method_for_Intra-layer Modulation of_the Material Deposition and Assist Beam and the Multilayer_Structure Produced Therefrom”, and 3) PCT_International Application No._PCT/US01/16693,_filed_May 23, 2001, entitled_“Process and Apparatus for the Plasma_Activated Deposition in a Vacuum”. These_applications are hereby incorporated by reference herein_in their entirety. The present invention_discloses, among other things an_apparatus and_a method for applying a_coating(s) on a_substrate(s) in_an improved and_more efficient manner. The present invention_method can be_applied to coatings of any type_onto_any substrate geometry._In_this_document, the_application of a_thermal_barrier coating_to_a turbine blade is used as_a_non-limiting example.
Vapor phase processes are widely used_for applying thermal and_environmental_protection coating systems to_components. They are widely used_to protect the hot structural components_of many_gas turbine_engines that must operate at temperatures approaching their melting point [1]._As gas inlet temperatures continue to_rise, failure by thermally-induced_mechanisms has_been_avoided by making_airfoil_components with_internal cooling conduits, and injecting compressor discharge_air to_decrease the component temperature [2]. To_maximize engine efficiency, however,_it_is desirable to minimize the use_of this air for cooling purposes._Traditionally, this has been accomplished_by_designing_more efficient cooling geometries within_the component and by film cooling_of the component_surface using drilled holes. These approaches have_now_matured and alternate strategies that exploit_the_insulating abilities of thermal barrier coatings_(TBC's)_are_being investigated for the thermal_protection of engine components.
The TBC systems_currently in use are multilayer systems consisting of an_yttria partially-stabilized zirconia_(YSZ) top layer that thermally_protects_the_superalloy component, and an underlying MCrAlY (M=Ni, Co) or nickel_aluminide bond_coat which improves_the YSZ adhesion. The YSZ