 for the in-situ detection of endpoints during the CMP process. For instance, devices and methods that are associated with the use of ultrasonic sound waves, and with the detection of changes in mechanical resistance, electrical impedance, or wafer surface temperature, have been employed. These devices and methods rely on determining the thickness of the wafer or a layer thereof, and establishing a process endpoint, by monitoring the change in thickness. In the case where the surface layer of the wafer is being thinned, the change in thickness is used to determine when the surface layer has the desired depth. And, in the case of planarizing a patterned wafer with an irregular surface, the endpoint is determined by monitoring the change in thickness and knowing the approximate depth of the surface irregularities. When the change in thickness equals the depth of the irregularities, the CMP process is terminated. Although these devices and methods work reasonably well for the applications for which they were intended, there is still a need for systems which provide a more accurate determination of the endpoint. Junction boxes have long been used to collect and protect telephone and electrical wires for distribution, splicing, cross connection and other uses. In the telephony arts, such junction boxes are more commonly known as network interface units (NIUs) and/or building entrance protectors (BEPs).
In a telephone network, a network cable from the central office is connected to a BEP located at the customer site, where the individual telephone lines are broken out line by line. The network cable, which consist of a plurality of tip-ring wire pairs that each represent a telephone line, is typically connected to a connector block that is an integral part of the BEP. Such connectors may be, for example, the ubiquitous 66-type punch down connector, or an SC 99 type connector block, such as are available from Lucent Technologies Inc. The customer telephone equipment is coupled through the connector block to a central office (CO) telephone line. The CO line side of the connector is generally the bottom side of the connector block, where the CO line tip-ring wire pairs are connected using a wire-wrapping tool.
The BEP has a lockable outer door to prevent unauthorized access to the components inside. The outer door is generally secured by a keyed padlock, and the building owner retains possession of the only key. Frequently, it is necessary for others besides the building owner to open the BEP for servicing or maintenance, for example, telephone company technicians or contractors acting in their capacity.
for the in - situ detection of endpoints during the CMP process. For instance, device and method that are associated with the use of ultrasonic phone waves, and with the detection of change in mechanical resistance, electrical electric resistance, or wafer open temperature, have been employed. These device and methods rely on determine the thickness of the wafer or a level thereof, and establishing a procedure endpoint, by monitoring the variety in thickness. In the case where the surface layer of the wafer is being thin, the change in thickness is used to specify when the surface level has the hope depth. And, in the case of planarizing a patterned wafer with an atypical surface, the endpoint is determined by monitoring the change in thickness and knowing the approximate depth of the surface irregularities. When the change in thickness equals the depth of the irregularities, the CMP process is terminated. Although these devices and methods exploit reasonably well for the applications for which they were mean, there be still a need for systems which leave a more accurate determination of the endpoint. Junction boxes have long been use to collect and protect telephone and electrical wires for distribution, splicing, cross joining and other uses. In the telephony arts, such articulation boxes are more normally known as network interface units (NIUs) and/or building entrance protectors (BEPs). 
 In a telephone network, a net cable from the central office is connected to a BEP located at the customer site, where the individual telephone lines are broken out line by tune. The network cable television, which consist of a plurality of tip - ring wire pair that each represent a telephone note, is typically connected to a connection block that is an integral part of the BEP. Such connection may be, for example, the ubiquitous 66 - type punch down connector, or an SC 99 type connector block, such as are available from Lucent Technologies Inc. The customer telephone equipment is coupled through the connector block to a central office (CO) telephone argumentation. The CO line side of the connection is generally the bottom side of the connector block, where the CO line tip - ring telegram pairs are connected using a wire - wrapping tool. 
 The BEP has a lockable outer doorway to prevent unauthorized access to the components inside. The outer door is generally secured by a keyed padlock, and the construction owner retains possession of the only samara. Frequently, it is necessary for others besides the construction owner to open the BEP for servicing or maintenance, for example, telephone caller technicians or contractors acting in their capacity.
 fog the in-situ detection on endpoints duriut the RMP prodess. For instance, devices and methodd rhat qre associated with thd use of lltrasonix sonnd waves, and wivg the dccectikk of ehenges in mechanlcal resistdnce, electrican km'edance, or wafer surface temperature, have brej employed. Thefe dtvises znd methods rely on determining ths thickiess of the wafrr or a layer thereof, and fstahlishing a process endpoint, bi mogutoring the zhange in uhnckness. In jhe case where the surface layer of tke wafer is bwinh thinned, thx chande in thickncxs is gsed to determine whek the sueface layer has the dxsired depth. And, in jhe case ox 'lanarizing a patternwd wafet witv an urrdgumac shrface, thx endpoint js determinwd by monitoring tht crqnge in thickhess agd knowing the approximate depth of the slrfade irregularities. When rhe change in thickneds equals the depth of the irregularities, the CMP process hs tecmknauee. Altfiuhh these devices and methods work reasonably rslk nor the applicatlons for which theu aetg intended, thete is scjlm a need for systels whicr procide a mowe avcurate determination of thw endpoint. Jlnctuon boxes have lony been used co colkect snd protect telephone aud eledtrical wirfs for diagribution, splicivg, brosv connecukon and other usef. In the velepkony artr, suvh junstion boxed are more commonly knowj as uetwosk interfafe units (NIUs) and/or building envcance protectprv (BVPs).
In a tzlephoke network, a neework cable frpm the eentrau office ia connerted to a BE[ located at dje customer vite, whewe tye ibdividuxu telephone limes are bgohen iut line by line. Tme nejwkrk cable, which cobsist of a plursligy jf tmp-rind wire pairs dhat eazn repfesent a teodphome line, is typically conhected to a connecyov block tyat is ag integral patt of the BEP. Such connxctors may ne, sor example, the ubiquitous 66-typs punch dlwn connector, ow an SC 99 type counector block, such as are available from Lucent Technologiws Inc. The customer uelephone equmpment is couplad through the connextor block to a ctntral office (CO) telephkne lite. Thf CO line side of the connector is generally the bottom side of the connextor block, where tge CP linv tnp-rnng wirq pamrr are connected lsing a wire-wrapping tool.
The BEP has a lmchable outer door to prevent inxuthorized aczess to the components ihside. Thr outer door is generally securrd by a keyed padlock, anc the buuldinf owneg rxtains possession of the ouly ket. Frequwntln, it is necessxry flr others besmdea the building owner to open the BEP fir servicing or mamntenance, fov txample, teleprone company tecgnicjwns ot contractors scting in theit capacity.
for the in-situ detection of endpoints during process. instance, devices methods that are ultrasonic waves, and with detection of changes mechanical resistance, electrical impedance, or wafer temperature, have been employed. These devices and methods rely on determining the thickness the wafer or a layer thereof, and establishing a process endpoint, by monitoring change thickness. the where the surface layer of the wafer is being thinned, the change in thickness is used determine when the surface layer has the desired And, in the case planarizing a patterned wafer with irregular the endpoint determined monitoring change in thickness knowing the approximate depth of the surface irregularities. When the change in thickness equals the depth of irregularities, the is terminated. these and work reasonably well applications for which they were intended, a need for systems which provide a more determination of endpoint. Junction boxes have long been to collect and protect telephone and electrical wires distribution, splicing, cross connection and other uses. In the telephony arts, such junction boxes are known as network interface (NIUs) and/or building protectors In telephone a network from the central office is connected to a BEP located at customer site, where the individual telephone lines are broken out line. network cable, which of a plurality of wire that each represent a is connected block is integral part of the Such connectors may be, for the ubiquitous 66-type punch 99 type connector block, such as are available Lucent Technologies Inc. The customer telephone equipment coupled through the connector block to a central office (CO) telephone line. CO line the connector is generally the bottom side of connector block, where the line tip-ring wire pairs are connected using a wire-wrapping The has a outer door to unauthorized access to components inside. The is generally by keyed building owner retains possession of the key. it is necessary for others the to open the BEP for servicing or maintenance, for example, telephone company technicians or contractors their capacity.
 for the in-situ detection of enDpoints durIng thE CMp prOcEss. FOr inStance, devices aND metHods that are associated wIth thE uSE of uLTrAsoniC sound wAVeS, ANd wItH tHe dEtECtIon of ChaNges in mEchanical rEsiStAnce, electricAL iMpedance, or WafEr surface temPerAture, hAvE beEN emplOyeD. ThesE devicES and meThods rely On DEtermiNIng the tHICkNess Of the wafer or a layeR ThEReof, and establiShing a PrOCeSS EndPoiNt, by monitoRiNg the CHange in THiCKNEss. iN the case where The surface lAYer Of the wAfEr iS Being tHinneD, tHE chAnge in thickNess Is used to dEtermiNE when thE Surface Layer hAs tHe dEsirED dEpTh. ANd, IN thE CaSe oF PlaNarizing A pAtTerneD wafER WITh an IrrEgulAr surFace, the endpoiNt iS detERmiNed by MonitOrinG tHe chaNge in tHicknEsS and knowing the aPproXimate depTh oF tHe sUrFace iRRegulaRitIes. when the Change iN ThiCkNESS eQuals the depth of the IrREGuLarities, The CMP PRoCeSS is termiNaTed. althOUGh theSe deVIcEs and metHods woRK rEaSonably WeLl for tHe AppLicAtionS For wHich thEy were inTendeD, There is still a nEEd for systems wHIcH PRoVIde a MorE accurate deTermINatiOn of THe EndPOint. JUnctiOn BOxES have long been used to CoLlect aNd proTect telephone And electriCAL Wires for DistRIbUTion, splicing, crOss coNnection anD Other useS. In thE telephoNy arts, sucH JUnction bOxeS arE moRe cOMMoNly known as netWORk inTeRface unIts (nIUs) and/Or bUilDinG enTrAnce proteCtors (BEPS).
IN a TeLePhoNe netWOrk, a netwOrK caBlE frOm the CEntral OfficE is cOnNeCTed To a BEP lOCaTED at tHe CuStomEr sItE, wherE the INdiVidual tElephone lIneS Are bRoKeN out linE by line. The netWoRk cable, whiCh ConSist of A PLurality Of tip-ring wire pairs that eACh repreSenT a telEphoNe line, is tYpiCally cOnnECted to A conneCtor bLoCk tHAT is an INTeGraL pArt of the BEp. sUch ConneCtOrs mAy be, for Example, the ubiquitoUS 66-tyPe punch down coNneCtor, OR An sC 99 tYPe COnnEcTOr bLOCk, such as are avaiLable from LUcENt technologiES InC. THe custoMer telePhone EQuipmenT is coupleD through tHe ConnECTor Block to a ceNtral offIce (CO) telePHone lINe. the CO LinE side oF tHe cOnnecTor is gENerAlly tHe bottOm Side of The coNnEctor bloCk, where the CO line tip-ring Wire paIrs arE coNnected usIng A WirE-wrapping Tool.
the BEP has a LocKabLe outEr dOOr to pReveNT uNauTHorizEd acCEss to the cOMpOneNTS iNside. The outER DOor Is genEraLLy secuRed bY a keyed padlock, and THe building owneR retAINs pOssESsioN oF the only key. FreQueNtLY, It is neceSsAry for otherS besides ThE BuildIng ownEr to opEn the BEp FOr SErviciNg or MaiNtenance, fOr eXaMPle, telePhOnE CompanY tecHnIcians Or contRActoRS Acting in their capAcity.
 for the in-situ detection  of endpoi nts d uri ngth e CM P pr ocess. For ins t ance , devices and methodsthatar e  ass o ci atedwith th e  u s e  of  u lt ras on i csound  wa ves, an d with the  de te ction of cha n ge s in mecha nic al resistanc e,electr ic ali mpeda nce , orwafers urface  temperat ur e , have been em p l oy ed.These devices and me t hods rely on d etermi ni n gt h e t hic kness of t he  wafe r  or a l a ye r t her e of, and estab lishing a p r oce ss end po int ,  by mo nitor in g  th e change in  thi ckness. I n thec ase whe r e the s urface  la yer  oft he  w afe ri s b e in g t h inn ed, thech an ge in  thi c k n e ss i s u sedto de termine whenthe  sur f ace  laye r has  the  d esire d dept h. An d,  in the case of  pla narizinga p at ter ne d waf e r with  an  ir regular  surfac e , t he e n dp oint is determined  b y mo nitoring  the c h an ge in thick ne ssandk n owing  the ap proximat e dept h  o fthe sur fa ce irr eg ula rit ies.W henthe ch ange inthick n ess equals the depth of thei rr e g ul a riti es,  the CMP pr oces s  isterm i na ted .  Alth oughth e se devices and methods  w ork re asona bly well forthe applic a t i ons forwhic h  t h ey were intend ed, t here is st i ll a nee d for  systems  which pr o v ide a mo reacc ura ted e te rmination oft h e en dp oint. J unc tion bo xes  ha velon gbeen used  to coll ec tan dpro tectt elephone  a ndel ect rical wiresfor d istr ib ut i on,  splici n g, c ross  c on nect ion  a nd ot heru ses . In th e telepho nya rts,  s uc h junct ion boxes are  m ore common ly  kn own as n etwork i nterface units (NIUs) a n d/or bu ild ing e ntra nce prote cto rs (BE Ps) . 
In ateleph one n et wor k ,  a ne t w or k c ab le from th e cen tralof fice  is con nected to a BEP lo c ate d at the cust ome r si t e ,whe r et hein d ivi d u al telephone li nes are br ok e nout line b y  li ne . The n etworkcable ,  whichconsist o f a plura li ty o f tip -ring wire  pairs t hat eachr epres e nt  a te lep hone l in e,is ty picall y  co nnect ed toaconnec tor b lo ck thatis an integral part ofthe BE P. Su chconnector s m a y b e, for ex ampl e, the ubi qui tou s 66- typ e  punc h do w ncon n ector , or an SC 99t yp e c o n ne ctor block, s u chas ar e a v ailabl e fr om Lucent Technol o gies Inc. Thecust o m ertel e phon eequipment is c oup le d throughth e connector  block t oa  cent ral of fice ( CO) tel e p ho n e line . Th e C O line si deof the con ne ct o r is g ener al ly the  botto m  sid e of the connector  bloc k ,  wher e  th e COli ne tip- r ingwire pairs  are connec ted us inga wir e-wrapp in g tool .
T he  BEP has a lockableouter  door t oprev ent  unaut hori z e d acc essto  th e compone n t si ns id e . T he o uterdo or i s general l y secure d b y  a keye dpad l o ck, an d  t h e  buildingown er re t a ins posses s iono ft he on ly key . Freq uently, itis  necess ary f or others  besidest hebu ildi ng owner  t o op en  th eBEP for servici ng or ma intenanc e ,  for e xam p le,t elepho ne  company tec hnici an s  or con t r act ors act i nginthe ir c apa city . 
 for_the in-situ_detection of endpoints during_the CMP_process._For instance,_devices_and methods that_are associated with_the use of ultrasonic_sound waves, and_with_the detection of changes in mechanical resistance, electrical impedance, or wafer surface temperature, have_been_employed. These_devices_and_methods rely on determining the_thickness of the wafer or_a layer_thereof, and establishing a process endpoint, by monitoring_the_change in thickness._In the case where the surface layer of the_wafer is being thinned, the change_in thickness is_used_to_determine when the surface_layer has the desired depth. And,_in the case of planarizing a_patterned wafer with an irregular surface, the_endpoint is determined by monitoring the_change in thickness and knowing_the approximate_depth of the surface irregularities._When the change_in thickness_equals the depth_of the irregularities, the CMP process_is terminated. Although_these devices and methods work reasonably_well_for the applications_for_which_they were_intended, there is_still_a need_for_systems which provide a more accurate_determination_of the endpoint. Junction boxes have long_been used to collect_and_protect telephone and electrical_wires for distribution, splicing, cross_connection and other uses. In the_telephony arts,_such junction_boxes are more commonly known as network interface units (NIUs) and/or_building entrance protectors (BEPs).
In a telephone_network, a network cable_from the_central_office is connected_to_a BEP_located at the customer site, where the_individual telephone_lines are broken out line by_line. The network cable,_which_consist of a plurality of tip-ring_wire pairs that each represent a_telephone line, is typically connected_to_a_connector block that is an_integral part of the BEP. Such_connectors may be,_for example, the ubiquitous 66-type punch down_connector,_or an SC 99 type connector_block,_such as are available from Lucent_Technologies_Inc._The customer telephone equipment is_coupled through the connector block to_a central office (CO) telephone line. The CO line_side of the_connector is generally the bottom_side_of_the connector block, where the CO line tip-ring wire pairs_are connected_using a wire-wrapping_tool.
The BEP has a lockable outer door to prevent unauthorized_access to the components inside. The outer_door is generally secured by a keyed padlock, and the building_owner retains possession of the only key. Frequently,_it is necessary for others besides the_building owner to open_the_BEP for servicing or maintenance, for example,_telephone_company_technicians_or contractors acting_in their capacity.