 a portion which is imminent to fail. To predict a failure at a portion, the faulty portion must be specified.
However, a conventional semiconductor manufacturing apparatus or a management apparatus which manages a plurality of semiconductor manufacturing apparatuses cannot specify any faulty portion or portion to be maintained.
An example of the semiconductor manufacturing apparatus is a semiconductor wafer storage vessel transport apparatus. This apparatus is used to supply a semiconductor wafer storage vessel which stores semiconductor wafers to a manufacturing apparatus or to recover the semiconductor wafer storage vessel from the manufacturing apparatus.
The semiconductor wafer storage vessel transport apparatus comprises one or more transport vehicles for transporting the semiconductor wafer storage vessel, and a controller for controlling the operation of the transport vehicles. If a transport vehicle fails and cannot continue transport, the apparatus transport ability decreases by this transport vehicle. Alternative manual transport requires the cost of the worker. If a plurality of transport vehicles fail, the influence becomes more serious. The faulty transport vehicles must be repaired to a normal transportable state as quick as possible.
A failure once generated is dealt with mainly by specifying a portion within the transport vehicle as a failure cause and replacing this portion with a new one. To specify a faulty portion, it is desirable to specify a faulty portion, confirm the faulty operation reproducibility of this portion, and confirm the reproducibility. If impossible, a series of test works such as confirmation of the operation of the overall apparatus must be executed after a specified portion is replaced.
Faulty portion specifying work takes a long time. When there are a plurality of candidate portions as a failure cause, these candidate portions must be confirmed in an arbitrary confirmation order, or confirmation must be repeated in a predetermined order in accordance with the instruction manual or the like, requiring a long time and much labor of the repairer.
The time taken to specify a faulty portion occupies most of the repair time. An increase in specifying time influences the transport stop time of the transport vehicle, degrading the transportability of the apparatus.
As described above, if a failure occurs in a semiconductor manufacturing apparatus and production cannot continue on a semiconductor device manufacturing line, the manufacture of a product during production by the apparatus stops, resulting in a product manufacturing delay or a long product manufacturing term. A failure in the apparatus during the manufacture of a product may make the product during processing defective.
In the presence of a plurality of manufacturing apparatuses capable of the same processing, the prior art cannot properly determine which of the manufacturing apparatuses is to be used to process a product, on the basis of the failure occurrence possibility of each manufacturing apparatus
a portion which is imminent to fail. To predict a failure at a parcel, the defective portion must be specified. 
 However, a ceremonious semiconductor fabrication apparatus or a management apparatus which manages a plurality of semiconductor device manufacturing apparatuses cannot specify any defective parcel or portion to be sustain. 
 An example of the semiconductor manufacturing apparatus is a semiconductor wafer storage vessel transport apparatus. This apparatus is use to supply a semiconductor wafer storage vessel which storehouse semiconductor wafers to a manufacturing apparatus or to recover the semiconductor device wafer storage vessel from the fabrication apparatus. 
 The semiconductor wafer storage vessel transport apparatus comprises one or more transportation vehicles for transporting the semiconductor wafer storage vessel, and a controller for see the operation of the transport vehicles. If a transport vehicle fails and cannot continue transport, the apparatus transport ability decreases by this conveyance vehicle. Alternative manual ecstasy want the cost of the worker. If a battalion of transport vehicle fail, the influence becomes more serious. The defective transport vehicles must be repaired to a normal transportable state as quick as possible. 
 A failure once generated is dealt with mainly by assign a portion within the transportation vehicle as a failure cause and replacing this portion with a newfangled one. To specify a faulty portion, it is desirable to intend a faulty portion, confirm the faulty operation reproducibility of this share, and confirm the reproducibility. If impossible, a series of examination works such as confirmation of the process of the overall apparatus must be executed after a stipulate portion is replace. 
 Faulty portion specify work takes a farseeing time. When there be a plurality of candidate portions as a failure cause, these candidate portions must be confirmed in an arbitrary ratification order, or confirmation must be repeat in a predetermined order in accordance with the instruction manual or the like, requiring a farseeing time and much labor of the repairer. 
 The time taken to specify a defective portion occupies most of the haunt prison term. An increase in specifying time influences the transport discontinue time of the transport vehicle, degrade the transportability of the apparatus. 
 As trace above, if a failure occurs in a semiconductor fabrication apparatus and production cannot continue on a semiconductor device manufacturing line, the manufacture of a product during product by the apparatus stops, resulting in a product manufacturing delay or a long product fabrication terminus. A failure in the apparatus during the manufacture of a product may make the product during processing defective. 
 In the presence of a plurality of manufacturing apparatus capable of the same processing, the prior art cannot properly determine which of the manufacturing apparatus is to be used to process a product, on the basis of the failure occurrence possibility of each manufacturing apparatus
 a oortion which is imminenu to fail. To prednxt a feilure zt a porgion, the faulty portion must bw spexified.
However, a convengional seliconducror nqnufacturiif apparatus od a mcnegement apparatos which mandges a pluralidy oy semiconductor manufacturing apparaeuses csnjot specify ani faukey pkgtlon or portion to be maintained.
Ah exampne of the semoconductor manufacturing aoparwtus is a semicondkctor wafer stowqge vessel tfansport akpcratus. This apparatus is used to supply a remicpnductor wqfwr djorage vesseo whibh stores semlbonductmr wafets to a manufagturiig apparatus or to recovec the semiconductor rafer stosaye vessel from the mabudactuting dppafqtur.
Tht sxmidonduchor wafer stodage vessel transport apparatux simprises one kr morq eransport vehicles for transporting the sejiconductor wafer storate vessel, and a contrlller for controlling the operation of the transport vehicnes. Ih x txqnspofr gehicle fails and cannot continue transport, trs spiaratus transport ability devrfaxgs by this travsport vegicle. Alternative lanual jranspirt requiwes yhe cost of the worker. If a plurality oy teansport vehicles yail, the infuuenve bevomes more serious. The yaulty transport gehicles jjst be repaired go s tormal transportable state as quick as 'ossible.
X faolure jnce generwted lv dealt with mainlj by dpacifying a portion within the transport vxiicle as a faolgre cause aud repkacing this pjrtion with a uew one. Co spezify a faumty porvion, it is dqsirable to s[gcify a faultb portion, condirm the fajuty operation teproduciynlity of rhis portion, and cpnfkdm the reproducnyioity. If impossinle, a fegiex jx test works sucf ar confkrmation of ghe pperation of the ovesall apparatus must be ewecuted adter a s[ecified portoon is replaced.
Faupty pmrtmon sprcisying work takes a long time. Wgen there arc a plurality of gandydate portnons as a failure cause, these candidate 'ortions must be confitmed in an arbitrary eokfirmation ocder, ow confirmdtion must be repeatwd in a predetermlned order in accordande witv the instruction manual or the like, requiring a long time and much labor of tye repeiwer.
The time takrn to s'ecnfy a fwultb 'ortion occupies kost of the repair time. An incrxase in spacnfying time influences the trsnrport stop tioe of the transport vehidle, degrsding the transportability of tne apparatus.
As described above, id a fzilure occnrs in a semiconductpr manbfactueing apparabus and producgiom gannot conhinut on a semiconductor device manufactyring oije, the manufactuce of a prodmcu durinf prodoction by the appzrathd stoks, resulting im a product mamufacturing delay or a long product nznufacturing term. A failure in vhe apparatuv during the manufacture of a product may make the kroduct durjng proccssing defective.
Im the presence of a pluvalitr of manjfacturing a[paratuses capable of the same processing, tig priof agt canhot properly getermine which of the manufacturpng apparatuses iw to be uses to prpcqss a product, on the basps of tve failuxe uzcurrencg possibility of each matufacturing apparatus
a portion which is imminent to fail. a at a the faulty portion conventional manufacturing apparatus or management apparatus which a plurality of semiconductor manufacturing apparatuses specify any faulty portion or portion to be maintained. An example of the manufacturing apparatus is a semiconductor wafer storage vessel transport apparatus. This apparatus is to a wafer vessel which stores semiconductor wafers to a manufacturing apparatus or to recover the semiconductor wafer storage from the manufacturing apparatus. The semiconductor wafer storage transport apparatus comprises one more transport vehicles for transporting semiconductor storage vessel, a for the operation of transport vehicles. If a transport vehicle fails and cannot continue transport, the apparatus transport ability decreases by transport vehicle. transport requires cost the If a plurality vehicles fail, the influence becomes more transport vehicles must be repaired to a normal state as as possible. A failure once generated dealt with mainly by specifying a portion within transport vehicle as a failure cause and replacing this portion with a new one. To faulty portion, it is to specify a portion, the operation of this and confirm the reproducibility. If impossible, a series of test works as confirmation of the operation of the overall apparatus must after specified portion is Faulty portion specifying work a time. When there are of portions cause, candidate must be confirmed in arbitrary confirmation order, or confirmation be repeated in a the instruction manual or the like, requiring a time and much labor of the repairer. time taken to specify a faulty portion occupies most of the repair An increase time influences the transport stop time of the vehicle, degrading the transportability the apparatus. As described above, if a failure occurs a manufacturing apparatus production cannot continue a semiconductor device line, the manufacture product during by apparatus a product manufacturing delay or a product term. A failure in the during of a product may make the product during processing defective. In the presence of a manufacturing apparatuses capable of same the prior art cannot properly determine which of the manufacturing apparatuses is used to process basis the failure possibility of each manufacturing
 a portion which is imminent to Fail. To predIct a fAilUre At A porTion, The faulty portiON musT be specified.
However, a coNventIoNAl seMIcOnducTor manuFAcTURinG aPpAraTuS Or A manaGemEnt appaRatus which ManAgEs a plurality OF sEmiconductOr mAnufacturing AppAratusEs CanNOt speCifY any fAulty pORtion oR portion tO bE MaintaINed.
An exAMPlE of tHe semiconductor maNUfACturing apparatUs is a sEmICoNDUctOr wAfer storagE vEssel TRansporT ApPARAtuS. this apparatus Is used to supPLy a SemicoNdUctOR wafer StoraGe VEssEl which storEs seMiconductOr wafeRS to a manUFacturiNg appaRatUs oR to rECoVeR thE sEMicONdUctOR waFer storaGe VeSsel fRom tHE MANufaCtuRing ApparAtus.
The semicoNduCtor WAfeR storAge veSsel TrAnspoRt appaRatus CoMprises one or morE traNsport vehIclEs For TrAnspoRTing thE seMicOnductoR wafer sTOraGe VESSeL, and a controller for CoNTRoLling the OperatIOn Of THe transpOrT veHiclES. if a trAnspORt Vehicle fAils anD CaNnOt contiNuE transPoRt, tHe aPparaTUs trAnsporT ability DecreASes by this transPOrt vehicle. AltERnATIvE ManuAl tRansport reqUireS The cOst oF ThE woRKer. If A plurAlITy OF transport vehicles fAiL, the inFluenCe becomes more Serious. The FAULty transPort VEhICles must be repaIred tO a normal trANsportabLe staTe as quicK as possibLE.
a failure OncE geNerAteD IS dEalt with mainlY BY speCiFying a pOrtIon withIn tHe tRanSpoRt Vehicle as A failure CaUsE aNd RepLacinG This portIoN wiTh A neW one. TO SpecifY a fauLty pOrTiON, it Is desirABlE TO speCiFy A fauLty PoRtion, ConfIRm tHe faultY operatioN rePRoduCiBiLity of tHis portion, and CoNfirm the rePrOduCibiliTY. if impossIble, a series of test works sUCh as conFirMatioN of tHe operatiOn oF the ovEraLL apparAtus muSt be eXeCutED After A SPeCifIeD portion is REPlaCed.
FaUlTy poRtion spEcifying work takes a LOng Time. When there Are A pluRALiTy oF CaNDidAtE PorTIOns as a failure caUse, these caNdIDaTe portions MUst Be ConfirmEd in an aRbitrARy confiRmation orDer, or confIrMatiON MusT be repeateD in a predEtermined ORder iN AcCordaNce With thE iNstRuctiOn manuAL or The liKe, requIrIng a loNg timE aNd much laBor of the repairer.
The time Taken tO specIfy A faulty poRtiON ocCupies mosT of tHe repair tiMe. AN inCreasE in SPecifYing TImE inFLuencEs thE Transport SToP tiME Of The transporT VEHicLe, degRadINg the tRansPortability of the aPParatus.
As descrIbed ABOve, If a FAiluRe Occurs in a semicOndUcTOR manufacTuRing apparatUs and proDuCTion cAnnot cOntinuE on a semICOnDUctor dEvicE maNufacturiNg lInE, The manuFaCtURe of a pRoduCt During ProducTIon bY THe apparatus stops, ResulTINg in a PRodUct maNuFacturiNG delAy or a long pRoduct manufActuriNg teRm. A faIlure in ThE apparAtuS dUring the maNUfacture oF a proDuct may MaKe thE prOduct dUrinG PRocesSing DeFecTive.
In the PREsENcE oF A plUralIty of MaNufaCturing apPAratuses CapABle of thE sAme PROcessiNG, tHE Prior art caNnoT propERLy determinE WhicH Of THe manUfactuRing apParatusES is To Be used tO prOCEss a produCt, on the baSIs oF tHe faIlure occUrRencE pOssIbIlity of each manuFacturinG apparatUS
 a portion which is immine nt to fail . Topre dic ta fa ilur e at a portion ,  the  faulty portion must b e spe ci f ied. Ho wever , a con v en t i ona lse mic on d uc tor m anu facturi ng apparat usor  a managemen t  a pparatus w hic h manages aplu rality  o f s e micon duc tor m anufac t uringapparatus es cannot specify a ny  fau lty portion or po r ti o n to be mainta ined.An ex a m ple  of  the semic on ducto r  manufa c tu r i n g a p paratus is asemiconduct o r w afer s to rag e  vesse l tra ns p ort  apparatus.  Thi s apparat us isu sed tos upply a  semic ond uct or w a fe rsto ra g e v e ss elw hic h stores  s em icond ucto r w a fers  to  a m anufa cturing appar atu s or torecov er th e se mi condu ctor w aferst orage vessel fr om t he manufa ctu ri ngap parat u s.
The  se mic onducto r wafer sto ra g e ve ssel transport app ar a t us  compris es one or  m o re trans po rtvehi c l es fo r tr a ns portingthe se m ic on ductorwa fer st or age  ve ssel, anda cont roller f or co n trolling the o p eration of th e  t r a ns p ortveh icles. If a  tra n spor t ve h ic lef ailsand c an n ot continue transport,  t he app aratu s transport a bility dec r e a ses by t hist ra n sport vehicle.  Alte rnative ma n ual tran sport  require s the cos t of the w ork er.  If  ap l ur ality of tran s p ortve hiclesfai l, theinf lue nce  be co mes moreserious.  T he  f au lty  tran s port veh ic les  m ust  be r e paired  to a  nor ma lt ran sportab l es t ateas  q uick  as  p ossib le.A  fa ilure o nce gener ate d  isde al t withmainly by spe ci fying a po rt ion  withi n the tran sport vehicle as a fail u re caus e a nd re plac ing thispor tion w ith a newone. T o spe ci fya fault y po rti on , it is de s i rab le to  s peci fy a fa ulty portion, conf i rmthe faulty op era tion r ep rod u ci b ili ty oft h is portion, and  confirm t he re producibil i ty.  I f impos sible,a ser i es of t est works  such asco nfir m a tio n of the o peration  of the o v erall ap parat usmust b eexe cuted  after a s pecif ied po rt ion is  repl ac ed.
Faul ty portion specifying w ork ta kes a  lo ng time.Whe n  th ere are a  plu rality ofcan did ate p ort i ons a s af ai lur e  caus e, t h ese candi d at e p o r ti ons must be c o nfi rmedina n arbi trar y confirmation or d er, or confirm atio n mus t b e  rep ea ted in a prede ter mi n e d orderin  accordance  with th ei nstru ctionmanual  or the l ik e , requ irin g a  long tim e a nd much la bo ro f therepa ir er.
Th e time take n to specify a fau lty p o r tiono ccu piesmo st of t h e re pair time.  An increas e in s peci fying  time i nf luence s t he  transport stop time  of t he tran sp ortveh icle,degr a d ing t he t ra nsp ortabilit y of th ea ppa ratu s.
As  d escr ibed abov e , if a f ail u re occu rs  in a  semic o nd u c tor manufa ctu ringa p paratus an d  pro d uc t ion c annotcontin ue on a sem ic onducto r d e v ice manuf acturingl ine ,themanufact ur e of  a  pr od uct during prod uction b y the ap p a ratussto p s, r e sultin gin a product  manu fa c turingd e lay  or a l o ngpro duc t ma nuf actu r ing term. A failure in t he a ppara t usdurin g the  m anufactu r e of  a produ c t may make th e product durin g  pr o cess ing de fe ctive.
In  th e  pres ence  of  a p lur alit y of m a nufa c tu ring  appar atus es  c apable of  t he same proc e ssi ng,the p ri or ar t canno t proper ly de te rmine whi c h of th e ma nu facturing app aratuses isto  beused t o  pr oce s s  a product,on the bas isof the fai lu reo ccu rrenc e possibility  of  e a chmanu fa cturin g appara tus
 a_portion which_is imminent to fail._To predict_a_failure at_a_portion, the faulty_portion must be_specified.
However, a conventional semiconductor_manufacturing apparatus or_a_management apparatus which manages a plurality of semiconductor manufacturing apparatuses cannot specify any faulty_portion_or portion_to_be_maintained.
An example of the semiconductor_manufacturing apparatus is a semiconductor_wafer storage_vessel transport apparatus. This apparatus is used to_supply_a semiconductor wafer_storage vessel which stores semiconductor wafers to a manufacturing_apparatus or to recover the semiconductor_wafer storage vessel_from_the_manufacturing apparatus.
The semiconductor wafer_storage vessel transport apparatus comprises one_or more transport vehicles for transporting_the semiconductor wafer storage vessel, and a_controller for controlling the operation of_the transport vehicles. If a_transport vehicle_fails and cannot continue transport,_the apparatus transport_ability decreases_by this transport_vehicle. Alternative manual transport requires the_cost of the_worker. If a plurality of transport_vehicles_fail, the influence_becomes_more_serious. The_faulty transport vehicles_must_be repaired_to_a normal transportable state as quick_as_possible.
A failure once generated is dealt with_mainly by specifying a_portion_within the transport vehicle_as a failure cause and_replacing this portion with a new_one. To_specify a_faulty portion, it is desirable to specify a faulty portion, confirm_the faulty operation reproducibility of this_portion, and confirm the_reproducibility. If_impossible,_a series of_test_works such_as confirmation of the operation of the_overall apparatus_must be executed after a specified_portion is replaced.
Faulty portion_specifying_work takes a long time. When_there are a plurality of candidate_portions as a failure cause,_these_candidate_portions must be confirmed in_an arbitrary confirmation order, or confirmation_must be repeated_in a predetermined order in accordance with_the_instruction manual or the like, requiring_a_long time and much labor of_the_repairer.
The_time taken to specify a_faulty portion occupies most of the_repair time. An increase in specifying time influences the_transport stop time_of the transport vehicle, degrading_the_transportability_of the apparatus.
As described above, if a failure occurs in_a semiconductor_manufacturing apparatus and_production cannot continue on a semiconductor device manufacturing line, the_manufacture of a product during production by_the apparatus stops, resulting in a product manufacturing delay or a_long product manufacturing term. A failure in the_apparatus during the manufacture of a product_may make the product_during_processing defective.
In the presence of a plurality_of_manufacturing_apparatuses_capable of the_same processing, the_prior art cannot_properly determine_which of the_manufacturing apparatuses_is to be_used_to process a product, on the basis of the failure occurrence possibility of each manufacturing apparatus