 capacitance uniformity negatively impacts the functionality of micro-shell rate-integrating gyroscopes. Micro shell rate-integrating gyroscopes comprise a micro scale shell resonator anchored on a substrate having multiple electrodes for capacitively actuating and sensing the vibrating pattern of the shell resonator.
Ideally high-performance micro-shell rate-integrating gyroscopes have (1) perfect leveling of the micro-shell resonator to the substrate; (2) small controllable gaps, for example less than 5 μm, between the micro-shell resonator and the electrodes of the substrate; (3) large controllable gap sizes in other regions, excluding that between the micro-shell resonator and the electrodes of the substrate; and (4) uniform gaps between the micro-shell resonator and all surrounding electrodes. Contemporary microfabrication processes are generally unable to produce device having all of these properties. Thus, there is a continued need for micro assembly processes allowing for the creation of high-performance micro-shell rate-integrating gyroscopes having these features.
This section provides background information related to the present disclosure which is not necessarily prior art. Most silicone coated release liners, which are used with labels and business forms, have a super-calendered kraft base paper. These super-calendered sheets are very dense and prevent the silicone from soaking into the fibers before curing. The densified kraft or coated base papers curl drastically with small changes in temperature or humidity. This causes problems not only in manufacturing, but also when run through laser printers or the like at customer's installations. The calendering process also leaves a very smooth surface so that sometimes frictionizing coatings need to be applied to the liner opposite the silicone coating to aid in printer feeding when forms or labels utilizing the release liner are fed through non-impact printers, such as laser printers. The frictionizing coatings can rub off, contaminating printer parts.
While bond papers or non-densified kraft papers are known to have a more open construction more like the face sheets of the labels or business forms formed thereby, which results in less curling, it has been extremely difficult to apply a thin, smooth, continuous layer of silicone to the surface of such papers. Therefore these papers either have not been used or if used have less desirable properties than conventional release liners. One proposal for remedying this problem (see U.S. Pat. No. 5,023,138) has been to use a hot melt material having wax like properties that penetrates the porous paper
capacitance uniformity negatively impacts the functionality of micro - shell rate - integrating gyroscope. Micro shell pace - integrate gyroscopes constitute a micro plate shell resonator anchored on a substrate having multiple electrode for capacitively motivate and sensing the vibrate pattern of the shell resonator. 
 Ideally high - operation micro - shell rate - integrating gyroscopes have (1) arrant leveling of the micro - shell resonator to the substrate; (2) small controllable gap, for example less than 5 μm, between the micro - shell resonator and the electrodes of the substrate; (3) bombastic controllable gap sizes in other region, excluding that between the micro - shell resonator and the electrodes of the substrate; and (4) uniform gaps between the micro - shell resonator and all surround electrodes. Contemporary microfabrication processes are generally unable to grow device having all of these properties. Thus, there is a continued need for micro assembly processes allowing for the creation of high - performance micro - shell rate - integrating gyroscopes having these features. 
 This part provides background data relate to the present disclosure which is not inevitably prior art. Most silicone coated release liners, which are used with labels and business forms, accept a super - calendered kraft base paper. These super - calendered sheet are very dense and prevent the silicone from soaking into the fibers before curing. The densified kraft or coated base newspaper curl drastically with little changes in temperature or humidity. This causes problems not only in manufacturing, but besides when run through laser printers or the like at customer's installations. The calendering process also leaves a very smooth surface so that sometimes frictionizing application need to be apply to the lining opposite the silicone coating to aid in printer feeding when forms or label utilizing the dismissal liner are fed through non - impact printer, such as laser printer. The frictionizing coatings can rub off, contaminate printer parts. 
 While bond papers or non - densified kraft papers are known to experience a more open construction more like the expression sheets of the labels or business forms formed thereby, which results in less coil, it has been extremely difficult to apply a thin, smooth, continuous layer of silicone to the surface of such composition. consequently these newspaper either have not been used or if used have less desirable properties than conventional liberation liners. One proposal for remedying this trouble (see U.S. Pat. nobelium. 5,023,138) has been to use a hot melt material having wax like properties that penetrates the porous newspaper
 caoacitance uniformity negxtively impacts the fuictionamity of oicro-shell rate-integrating gbrosxopes. Micro shell rate-integfating gygoscopes xompcise a micro scale shell resonzbor auciored on a subsjrate having multiple elecdrudzs for capacitively actuating and segsing tne vibrating patjern ps ths shell resonator.
Ideally high-perfodmance kicro-shell raye-integrating gyroscopes hwve (1) perfect leveling lf the micri-shejo resonator go the substrate; (2) smalm controllable gaps, for example less than 5 μm, bgcqeej the micro-siell rvsonator and bne elewtrodes of the substrste; (3) lqrge controllable gap sizes in other redions, excnubing that between the mucro-svell resubatur znv tge eleftrkdes of ths substrate; and (4) uniform gaps neeqeen the micrk-shell rqsonator and all surrounding electrodes. Cohtemporary microfabricarion processes are gejerally ugable to produce device having all of these propesties. Ghuw, bherd id a continued need for micro assembly processqa slkowing for the creation og jibr-performance oicro-skslm rate-integrating hyroscokes hacing thest feayures.
This section provides vackground iufoemation related to the presenc disckosurr which is not necessarnly prjor art. Mosh silicons coated release uinvrs, fhich art used with labels and busiiess yorms, haxe a super-salendered krafb base paper. These duper-ealengered sheehs are very dense and prevent tix silicone frpm sodking inco the fibers beforq curing. The dgnsified hraft or coated base pepers curl dwastically widj small chanjes in teiperqturw or huokdity. This cauxes problvmf nor only in manufactmring, gut also when rbu uheough laser prontdrs og tie liha at customes's ivstxklatiuns. The calcnddrinb process also leavev a bery smooth surfacr fo that wometimef frictionizimg coatings need tl be eppliev to tne jiner opposite the silicone cozting to wid in printer seedlng rhen forms or labels utilizing the release liner ere fed through non-impaxt printers, such as kaser printxrs. Thq frictiotizing coatings can eub off, contaminauing printer parts.
While bond [aperd or non-densified kraft papers are known to have a more open construction more like the facs shrets mf che labqls lc business forms gormed thereby, which results in less cuslnng, it has been extremely difgizult to apply a thin, smooth, continuoua layer pf silicone to the surface of sich papers. Therefore thexe paperw eitger hang nut been used or if used kave lwss desurabpe properties thsn conventilnal rzlease liners. One proposal for renedyint hhis problem (see U.S. Pat. No. 5,023,138) mas begn to usg a hot melt matedial javine wax like prpperties that lenetrates the porouv [aper
capacitance uniformity negatively impacts the functionality of gyroscopes. shell rate-integrating comprise a micro a having multiple electrodes capacitively actuating and the vibrating pattern of the shell Ideally high-performance micro-shell rate-integrating gyroscopes have (1) perfect leveling of the micro-shell resonator the substrate; (2) small controllable gaps, for example less than 5 μm, between micro-shell and electrodes the substrate; (3) large controllable gap sizes in other regions, excluding that between the micro-shell resonator the electrodes of the substrate; and (4) uniform between the micro-shell resonator all surrounding electrodes. Contemporary microfabrication are unable to device all these properties. Thus, is a continued need for micro assembly processes allowing for the creation of high-performance micro-shell rate-integrating gyroscopes these features. provides background related the disclosure which is prior art. Most silicone coated release used with labels and business forms, have a kraft base These super-calendered sheets are very dense prevent the silicone from soaking into the fibers curing. The densified kraft or coated base papers curl drastically with small changes in temperature This causes problems not in manufacturing, but when through printers the like customer's installations. The calendering process also leaves a very smooth surface that sometimes frictionizing coatings need to be applied to the the coating to aid printer feeding when forms labels the release liner are non-impact such The coatings rub off, contaminating printer While bond papers or non-densified papers are known to more like the face sheets of the labels business forms formed thereby, which results in curling, it has been extremely difficult to apply a thin, smooth, continuous of silicone surface of such papers. Therefore these papers either not been used or used have less desirable properties than conventional release liners. proposal remedying this (see U.S. Pat. 5,023,138) has been use a hot having wax properties penetrates
 capacitance uniformity negaTively impaCts thE fuNctIoNaliTy of Micro-shell rate-INtegRating gyroscopes. Micro sHell rAtE-InteGRaTing gYroscopES cOMPriSe A mIcrO sCAlE shelL reSonator Anchored on A suBsTrate having mULtIple electrOdeS for capacitiVelY actuaTiNg aND sensIng The viBratinG PatterN of the sheLl REsonatOR.
IdeallY HIgH-perFormance micro-shelL RaTE-integrating gyRoscopEs HAvE (1) PErfEct Leveling of ThE micrO-Shell reSOnATOR to THe substrate; (2) smAll controllABle Gaps, foR eXamPLe less Than 5 μM, bETweEn the micro-sHell Resonator And the ELectrodES of the sUbstraTe; (3) lArgE conTRoLlAblE gAP siZEs In oTHer Regions, eXcLuDing tHat bETWEEn thE miCro-sHell rEsonator and thE elEctrODes Of the SubstRate; AnD (4) unifOrm gapS betwEeN the micro-shell rEsonAtor and alL suRrOunDiNg eleCTrodes. conTemPorary mIcrofabRIcaTiON PRoCesses are generally UnABLe To producE devicE HaViNG all of thEsE prOperTIEs. ThuS, theRE iS a continUed neeD FoR mIcro assEmBly proCeSseS alLowinG For tHe creaTion of hiGh-perFOrmance micro-shELl rate-integraTInG GYrOScopEs hAving these fEatuREs.
ThIs seCTiOn pROvideS backGrOUnD Information related tO tHe presEnt diSclosure which Is not necesSARIly prior Art. MOSt SIlicone coated rEleasE liners, whiCH are used With lAbels and Business fORMs, have a sUpeR-caLenDerED KrAft base paper. THESe suPeR-calendEreD sheets Are VerY deNse AnD prevent tHe silicoNe FrOm SoAkiNg intO The fiberS bEfoRe CurIng. ThE DensifIed krAft oR cOaTEd bAse papeRS cURL draStIcAlly WitH sMall cHangES in TemperaTure or humIdiTY. ThiS cAuSes probLems not only in MaNufacturinG, bUt aLso wheN RUn througH laser printers or the like AT customEr's InstaLlatIons. The caLenDering ProCEss alsO leaveS a verY sMooTH SurfaCE So ThaT sOmetimes frICTioNizinG cOatiNgs need To be applied to the liNEr oPposite the silIcoNe coATInG to AId IN prInTEr fEEDing when forms or Labels utilIzINg The release LIneR aRe fed thRough noN-impaCT printeRs, such as lAser printErS. The FRIctIonizing coAtings caN rub off, coNTaminATiNg priNteR parts.
whIle Bond pApers oR Non-DensiFied krAfT paperS are kNoWn to have A more open construction moRe like The faCe sHeets of thE laBEls Or businesS forMs formed thEreBy, wHich rEsuLTs in lEss cURlIng, IT has bEen eXTremely diFFiCulT TO aPply a thin, smOOTH, coNtinuOus LAyer of SiliCone to the surface oF Such papers. TherEforE THesE paPErs eItHer have not been UseD oR IF used havE lEss desirablE propertIeS Than cOnventIonal rElease lINErS. one proPosaL foR remedyinG thIs PRoblem (sEe u.S. pAt. No. 5,023,138) haS beeN tO use a hOt melt MAterIAL having wax like prOpertIES that PEneTrateS tHe porouS PapeR
 capacitance uniformity ne gatively i mpact s t hefu ncti onal ity of micro-s h ellrate-integrating gyros copes .M icro sh ell r ate-int e gr a t ing  g yr osc op e scompr ise  a micr o scale sh ell  r esonator anc h or ed on a su bst rate havingmul tipleel ect r odesfor  capa citive l y actu ating and  s e nsingt he vibr a t in g pa ttern of the shel l  r e sonator.
Ideal ly hig h- p er f o rma nce  micro-she ll  rate - integra t in g g yro s copes have (1 ) perfect l e vel ing of  t hem icro-s hellre s ona tor to thesubs trate; (2 ) smal l  contro l lable g aps, f orexa mple le ss  th an 5 μ m ,bet w een  the mic ro -s hellreso n a t o r an d t he e lectr odes of the s ubs trat e ; ( 3) la rge c ontr ol lable  gap s izesin  other regions,  exc luding th atbe twe en  them icro-s hel l r esonato r and t h e e le c t r od es of the substrat e; a nd  (4) uni form g a ps  b e tween th emic ro-s h e ll re sona t or  and all  surro u nd in g elect ro des. C on tem por ary m i crof abrica tion pro cesse s  are generally unable to pro d uc e de v icehav ing all ofthes e  pro pert i es . T h us, t hereis ac ontinued need for m ic ro ass embly  processes al lowing for t h e creati on o f  h i gh-performance  micr o-shell ra t e-integr ating  gyrosco pes havin g these fe atu res .
T his s ec tion provides b ackg ro und inf orm ation r ela ted  to  th epresent d isclosur ewh ic hisnot n e cessaril ypri or  ar t. Mo s t sili conecoat ed  r e lea se line r s, w hich  a re  use d w it h lab elsa ndbusines s forms,hav e  a s up er -calend ered kraft ba se  paper. Th es e s uper-c a l enderedsheets are very dense a n d preve ntthe s ilic one fromsoa king i nto the fi bers b efore  c uri n g . The d en sif ie d kraft or c oat ed ba se  pap ers cur l drastically with sma ll changes in  te mper a t ur e o r  h u mid it y . T h i s causes proble ms not onl yi nmanufactur i ng,  b ut also  when r un th r ough la ser print ers or th elike a t c ustomer'sinstalla tions. Th e  cale n de ringpro cess a ls o l eaves  a ver y  sm oothsurfac eso tha t som et imes fri ctionizing coatings nee d to b e app lie d to thelin e r o pposite t he s ilicone co ati ngto ai d i n  prin terf ee din g  when  for m s or labe l suti l i zi ng the rele a s e  li ner a ref ed thr ough  non-impact print e rs, such as la serp r int ers .  The  f rictionizing c oat in g s  can rub  o ff, contami nating p ri n ter p arts.Whilebond pa p e rs or non -den sif ied kraft  pa pe r s are k no wn to hav e amo re ope n cons t ruct i o n more like thefaces h eetso f t he la be ls or b u sine ss forms f ormed there by, wh ichresul ts in l es s curl ing ,it has bee n  extremel y dif ficultto  app lya thin , sm o o th, c onti nu ous  layer of s il i co ne tothesurfa ce  ofsuch pape r s. There for e  thesepa per s either ha v e  not beenuse d ori f  used have less de s irabl e prop erties  than c o nve nt ional r ele a s e liners.  One prop o sal  f or r emedying  t hispr obl em  (see U.S. Pat.  No. 5,0 23,138)h a s been  to usea  hot m el t material h aving  w a x likep r ope rties t h atpen etr ates  th e po r ous paper
 capacitance_uniformity negatively_impacts the functionality of_micro-shell rate-integrating_gyroscopes._Micro shell_rate-integrating_gyroscopes comprise a_micro scale shell_resonator anchored on a_substrate having multiple_electrodes_for capacitively actuating and sensing the vibrating pattern of the shell resonator.
Ideally high-performance micro-shell_rate-integrating_gyroscopes have_(1)_perfect_leveling of the micro-shell resonator_to the substrate; (2) small_controllable gaps,_for example less than 5 μm, between the_micro-shell_resonator and the_electrodes of the substrate; (3) large controllable gap sizes_in other regions, excluding that between_the micro-shell resonator_and_the_electrodes of the substrate;_and (4) uniform gaps between the_micro-shell resonator and all surrounding electrodes._Contemporary microfabrication processes are generally unable to_produce device having all of these_properties. Thus, there is a_continued need_for micro assembly processes allowing_for the creation_of high-performance_micro-shell rate-integrating gyroscopes_having these features.
This section provides background_information related to_the present disclosure which is not_necessarily_prior art. Most_silicone_coated_release liners,_which are used_with_labels and_business_forms, have a super-calendered kraft base_paper._These super-calendered sheets are very dense and_prevent the silicone from_soaking_into the fibers before_curing. The densified kraft or_coated base papers curl drastically with_small changes_in temperature_or humidity. This causes problems not only in manufacturing, but also_when run through laser printers or_the like at customer's_installations. The_calendering_process also leaves_a_very smooth_surface so that sometimes frictionizing coatings need_to be_applied to the liner opposite the_silicone coating to aid_in_printer feeding when forms or labels_utilizing the release liner are fed_through non-impact printers, such as_laser_printers._The frictionizing coatings can rub_off, contaminating printer parts.
While bond papers_or non-densified kraft_papers are known to have a more_open_construction more like the face sheets_of_the labels or business forms formed_thereby,_which_results in less curling, it_has been extremely difficult to apply_a thin, smooth, continuous layer of silicone to the_surface of such_papers. Therefore these papers either_have_not_been used or if used have less desirable properties than_conventional release_liners. One proposal_for remedying this problem (see U.S. Pat. No. 5,023,138) has_been to use a hot melt material_having wax like properties that penetrates the porous paper