 Grimbergen entitled “ENDPOINT DETECTION FOR PHOTOMASK ETCHING”. As mentioned above, there is the problem of selecting the appropriate metrology tools that will work for a semiconductor application or range of applications using the aforementioned techniques. Furthermore, there is a need to optimize the selection of wavelength or wavelengths, specific optical metrology tools, and algorithms for extraction of etch stage measurement to meet measurement monitoring objectives. Moreover, in an integrated metrology fabrication cluster, there is a need to complete etch measurement monitoring in real-time and extraction of etch stage data to meet targeted time ranges. In other etching applications, there is also a need to ensure the repeatability and reproducibility of the extracted etch stage data from the etch stage measurements.
The present invention is directed to minimizing the effects of one or more of the problems discussed above. With increased requirement for throughput, decreasing size of the structures, and requirement for lower cost of ownership, there is greater need to optimize design of etch stage measurement systems to meet one or more etch stage measurement objectives. The invention relates to a blowing nozzle for transporting a flexible thread, comprising a supply channel for the thread to be transported, the exit end of the channel being surrounded by an annular gap which upstream communicates with means for supplying a flowing pressurized fluid, and in the downstream direction merges with a mixing tube extending substantially as an extension of the supply channel for the thread.
Similar blowing nozzles are generally known. They are e.g. applied to pneumatic weaving machines for sucking in the weft threads by means of pressurized air and entering them into the weaving shed.
Due to all kinds of causes which may be found in the thread itself as well as exteriorly, the head of a thread transported by means of such a blowing nozzle will not always continue after leaving the exit end, along a fixed path (e.g. along the axis of the mixing tube) but variously deviates therefrom. This constitutes an important disadvantage in all those cases in which the thread, after leaving the blowing nozzle, must remain within a narrowly delimited area in order to have the further transport of the thread occur without disturbances. E.g. in a pneumatic weaving machine the head of the thread must be supplied within the cross-section of a tunnel formed in the weaving shed (by means of the reedlamellae or of lamellae especially serving this purpose). A deviation of the optimum path of movement of the thread may e.g. result in that the head of the
Grimbergen entitled “ ENDPOINT DETECTION FOR PHOTOMASK ETCHING ”. As mentioned above, there be the trouble of selecting the appropriate metrology tools that will make for a semiconductor device application or range of applications practice the aforementioned techniques. Furthermore, there is a motivation to optimize the selection of wavelength or wavelengths, specific ocular metrology tools, and algorithms for origin of etch stage measurement to meet measurement monitoring objectives. Moreover, in an integrated metrology fabrication cluster, there embody a need to complete etch measurement monitoring in real - prison term and extraction of etch stage data to meet target time range. In other etching applications, there be also a need to ensure the repeatability and reproducibility of the extracted etch stage datum from the etch phase measurements. 
 The present invention is directed to minimizing the effects of one or more of the problems discussed above. With increased requirement for throughput, decreasing size of the structure, and requirement for lower price of possession, there be greater need to optimize invention of etch stage measurement systems to meet one or more etch stage measurement aim. The invention relates to a blowing nozzle for transporting a flexible thread, incorporate a supply channel for the thread to be transported, the passing end of the groove being surrounded by an annular gap which upstream communicates with means for supplying a menstruate pressurized fluid, and in the downstream direction merges with a mixing pipe extending substantially as an extension of the supply duct for the thread. 
 Similar botch nozzles are generally known. They are for example applied to pneumatic weaving machines for suck in the weft threads by means of pressurized air travel and entering them into the weaving shed. 
 Due to all kind of causes which may be found in the thread itself equally well as exteriorly, the head of a thread transported by means of such a blow nozzle will not always continue after leave the exit end, along a fixed path (e.g. along the axis of the mix tube) but variously deviates therefrom. This constitutes an important disadvantage in all those cases in which the thread, after leaving the blow nozzle, must remain within a narrowly delimited area in order to have the further transport of the thread happen without disturbances. E.g. in a pneumatic weaving machine the head of the thread must be supplied within the cross - section of a tunnel formed in the weaving shed (by means of the reedlamellae or of gill especially serving this purpose). A deviation of the optimum path of movement of the ribbon may e.g. result in that the head of the
 Grlmbergen entitled “ENDPOIKT DETECTION FOR PHOTOMESK ETCGING”. As oentioned above, there is the peoblen of selecting the appfopriate letrologt toios that will work njr a demieoiductor applicajion or ranga of applicatimnr bsing the aforementioned techniques. Surtherkoge, there is a geed eo olninize the selection of wavelenfth or xavelengths, spevific optical metrology tolls, wnd algorithms for extraction of qrch stage mexsurement uo meet measorement monitoring objectives. Mofeovex, in an intgyeatfg metrology fabrpcation clustcg, there is a nred to completc etci meqsurement monitoring mn real-time and extrwction of ecch stage data to meer rargejed thme fqngds. Jn ofher ehchmng applicafions, there is also a need to tnstgr the repeatzbilitr wnd reproducibility of the extracted etbh sfage data from the etch stage measurements.
Thg present ynvention is directed to minimizing the effects ox one ur nove ow tje problems discussed above. With increased rezhitekent for throunhput, decreasing sozf ps the structutes, and resuirement for loweg cost jf owbership, trere is greater need to optimizw design of vtch stage measurement systems to meej one pr more etch stage measbremenf objectived. The invsvtion relates to a nlofing nozeue for transportigg a flexmble chread, cumprosing w supply cjannel for the thread to be ttansposted, the edit end of the channel being succounded by an atnunar gap chich mpstream communycates with mecns for fupplhing a flosing prxssurized fltid, and in tha downstream virection mertes qith a okxing tube extrnding suyftanrially as an extenxiov of the supply ekabnel for the thteaa.
Siiipac blorhng nozzles dre eendtally known. Ukey xre r.g. applied to pneumadic seaving machines fpr sucking in the reft threads ny means of pressugized aic and rntgring them into the weaving shes.
Due to apl hinds of caufes qhich may be found in the thread itself as well as xxteriorly, the head of q thread transporteb ny means of xuch w blowing nozzle will not alwqys continue aftev leaving the exit end, along a fided path (e.g. along the axis of the mixing tube) but variously deviates therwfrom. Vhys constitufes sn imiorcanc disaddantegx in all those caxes in which the thread, after lxaving the bjowing nozzle, must remain wiyhkn a narrowly delimited area in order to have the further transport of the tnread occur without distmrbances. W.g. in a pneljavic weaving machine yhe hecd of rhe thrwad lust be supplked wlthin the frosx-szction of a tunnel formed in the qeavint dhed (by means of the reedlaltllae ot of lamgllae especially aervjjg thks purpose). A ceviation of tne optimum path of mmvqment of the tygead may e.g. rgsult in that the heed of the
Grimbergen entitled “ENDPOINT DETECTION FOR PHOTOMASK ETCHING”. above, is the of selecting the work a semiconductor application range of applications the aforementioned techniques. Furthermore, there is need to optimize the selection of wavelength or wavelengths, specific optical metrology tools, algorithms for extraction of etch stage measurement to meet measurement monitoring objectives. Moreover, an metrology cluster, is a need to complete etch measurement monitoring in real-time and extraction of etch stage data meet targeted time ranges. In other etching applications, is also a need ensure the repeatability and reproducibility the etch stage from etch measurements. The present is directed to minimizing the effects of one or more of the problems discussed above. With increased for throughput, of the and for cost of ownership, greater need to optimize design of systems to meet one or more etch stage objectives. The relates to a blowing nozzle for a flexible thread, comprising a supply channel for thread to be transported, the exit end of the channel being surrounded by an annular upstream communicates with means supplying a flowing fluid, in downstream merges with mixing tube extending substantially as an extension of the supply channel the thread. Similar blowing nozzles are generally known. They are to weaving machines for in the weft threads means pressurized air and entering the shed. kinds causes may be found in thread itself as well as the head of a such a blowing nozzle will not always continue leaving the exit end, along a fixed (e.g. along the axis of the mixing tube) but variously deviates therefrom. constitutes an in all those cases in which the thread, leaving the blowing nozzle, remain within a narrowly delimited area in order to the transport of thread occur without E.g. in a weaving machine the the thread be within a tunnel formed in the weaving (by of the reedlamellae or of especially purpose). A deviation of the optimum path of movement of the thread may e.g. result the head of the
 Grimbergen entitled “ENDPOINt DETECTION fOR PHoTOmASk EtCHInG”. As Mentioned above, THere Is the problem of selectinG the aPpROpriATe MetroLogy tooLS tHAT wiLl WoRk fOr A SeMiconDucTor applIcation or rAngE oF applicationS UsIng the aforEmeNtioned technIquEs. FurtHeRmoRE, therE is A need To optiMIze the Selection Of WAvelenGTh or wavELEnGths, Specific optical meTRoLOgy tools, and algOrithmS fOR eXTRacTioN of etch staGe MeasuREment to MEeT MEAsuREment monitoriNg objectiveS. morEover, iN aN inTEgrateD metrOlOGy fAbrication cLustEr, there is A need tO CompletE Etch meaSuremeNt mOniToriNG iN rEal-TiME anD ExTraCTioN of etch sTaGe Data tO meeT TARGeteD tiMe raNges. IN other etching AppLicaTIonS, therE is alSo a nEeD to enSure thE repeAtAbility and reproDuciBility of tHe eXtRacTeD etch STage daTa fRom The etch Stage meASurEmENTS.
THe present invention Is DIReCted to miNimiziNG tHe EFfects of OnE or More OF The prObleMS dIscussed Above. WITh InCreased ReQuiremEnT foR thRoughPUt, deCreasiNg size of The stRUctures, and requIRement for loweR CoST Of OWnerShiP, there is greAter NEed tO optIMiZe dESign oF etch StAGe MEasurement systems to MeEt one oR more Etch stage measUrement objECTIves. The iNvenTIoN Relates to a blowIng noZzle for traNSporting A flexIble threAd, comprisING a supply ChaNneL foR thE THrEad to be transpORTed, tHe Exit end Of tHe channEl bEinG suRroUnDed by an anNular gap WhIcH uPsTreAm comMUnicates WiTh mEaNs fOr supPLying a FlowiNg prEsSuRIzeD fluid, aND iN THe doWnStReam DirEcTion mErgeS WitH a mixinG tube exteNdiNG subStAnTially aS an extension oF tHe supply chAnNel For the THRead.
SimiLar blowing nozzles are genERally knOwn. they aRe e.g. Applied to PneUmatic WeaVIng macHines fOr sucKiNg iN THe wefT THrEadS bY means of prESSurIzed aIr And eNtering Them into the weaving SHed.
due to all kinds Of cAuseS WHiCh mAY bE FouNd IN thE THread itself as weLl as exteriOrLY, tHe head of a tHReaD tRansporTed by meAns of SUch a bloWing nozzlE will not aLwAys cONTinUe after leaVing the eXit end, aloNG a fixED pAth (e.g. AloNg the aXiS of The miXing tuBE) buT variOusly dEvIates tHerefRoM. This conStitutes an important disaDvantaGe in aLl tHose cases In wHIch The thread, AfteR leaving thE blOwiNg nozZle, MUst reMain WItHin A NarroWly dELimited arEA iN orDER tO have the furTHER trAnspoRt oF The thrEad oCcur without disturBAnces. E.g. in a pneuMatiC WEavIng MAchiNe The head of the thReaD mUST be supplIeD within the cRoss-sectIoN Of a tuNnel foRmed in The weavING sHEd (by meAns oF thE reedlameLlaE oR Of lamelLaE eSPecialLy seRvIng thiS purpoSE). A deVIAtion of the optimuM path OF MovemENt oF the tHrEad may e.G. ResuLt in that thE head of the
 Grimbergen entitled “ENDP OINT DETEC TIONFOR  PH OT OMAS K ET CHING”. As men t ione d above, there is theprobl em of s e le cting  the ap p ro p r iat eme tro lo g ytools  th at will  work fora s em iconductor a p pl ication or  ra nge of appli cat ions u si ngt he af ore menti oned t e chniqu es. Furth er m ore, t h ere isa ne ed t o optimize the se l ec t ion of wavelen gth or  w a ve l e ngt hs,  specificop tical metrolo g yt o o ls, and algorithm s for extra c tio n of e tc h s t age me asure me n t t o meet meas urem ent monit oringo bjectiv e s. More over,inaninte g ra te d m et r olo g yfab r ica tion clu st er , the re i s a need  to  com plete  etch measure men t mo n ito ringin re al-t im e and  extra ction  o f etch stage da ta t o meet ta rge te d t im e ran g es. In  ot her  etchin g appli c ati on s , th ere is also a need  t o en sure the  repea t ab il i ty and r ep rod ucib i l ity o f th e  e xtracted  etchs ta ge  data f ro m theet chsta ge me a sure ments. 
The pre senti nvention is di r ected to mini m iz i n gt he e ffe cts of oneor m o re o f th e  p rob l ems d iscus se d  a b ove. With increased  r equire mentfor throughpu t, decreas i n g  size of  the st r uctures, and r equir ement forl ower cos t ofownershi p, therei s  greater  ne edtoopt i m iz e design of e t c h st ag e measu rem ent sys tem s t o m eet  o ne or mor e etch s ta ge  m ea sur ement objectiv es . T he  in venti o n rela tes t o abl ow i ngnozzlef or t rans po rt inga f le xible  thr e ad,  compri sing a su ppl y  cha nn el  for th e thread to b etransporte d,  th e exit e nd of th e channel being surroun d ed by a n a nnula r ga p which u pst ream c omm u nicate s with  mean sfor s upply i n ga f lo wing press u r ize d flu id , an d in th e downstream direc t ion  merges witha m ixin g tu bee xt e ndi ng sub s t antially as anextensionof th e supply c h ann el  for th e threa d.
Si m ilar bl owing noz zles arege nera l l y k nown. They  are e.g . applied to pn e um aticwea ving m ac hin es fo r suck i ngin th e weft  t hreads  by m ea ns of pr essurized air and enter ing th em in tothe weavi ngs hed .
Due toallkinds of c aus eswhich  ma y  be f ound in  th e  thre ad i t self as w e ll  as e xt eriorly, th e h ead  of a  th r ead tr ansp orted by means of such a blowing  noz z l e w ill notal ways continueaft er l eaving t he  exit end,along afi x ed pa th (e. g. alo ng thea x is of the  mix ing  tube) bu t v ar i ously d ev ia t es the refr om . This  const i tute s an important dis advan t a ge in all  thos ecases i n  whi ch the thr ead, afterleavin g th e blo wing no zz le, mu stre main withi n  a narrow ly de limited  a reainorderto h a v e the  fur th ertransport o ft he  t h rea d oc cur w it hout  disturba n ces. E.g . i n  a pneu ma tic w eaving ma c h ine the he adof th e thread mus t  bes up p liedwithin  the c ross-se c tio nof a tu nne l formed in  the weav i ngsh ed ( by means  o f th eree dl amellae or of l amellaeespecial l y  servi ngt hisp urpose ).  A deviation  of t he optimum p ath  of mov e men t o f t he t hre ad m a y e.g. result in that th e he ad of the 
 Grimbergen_entitled “ENDPOINT_DETECTION FOR PHOTOMASK ETCHING”._As mentioned_above,_there is_the_problem of selecting_the appropriate metrology_tools that will work_for a semiconductor_application_or range of applications using the aforementioned techniques. Furthermore, there is a need to_optimize_the selection_of_wavelength_or wavelengths, specific optical metrology_tools, and algorithms for extraction_of etch_stage measurement to meet measurement monitoring objectives. Moreover,_in_an integrated metrology_fabrication cluster, there is a need to complete etch_measurement monitoring in real-time and extraction_of etch stage_data_to_meet targeted time ranges._In other etching applications, there is_also a need to ensure the_repeatability and reproducibility of the extracted etch_stage data from the etch stage_measurements.
The present invention is directed_to minimizing_the effects of one or_more of the_problems discussed_above. With increased_requirement for throughput, decreasing size of_the structures, and_requirement for lower cost of ownership,_there_is greater need_to_optimize_design of_etch stage measurement_systems_to meet_one_or more etch stage measurement objectives._The_invention relates to a blowing nozzle for_transporting a flexible thread,_comprising_a supply channel for_the thread to be transported,_the exit end of the channel_being surrounded_by an_annular gap which upstream communicates with means for supplying a flowing_pressurized fluid, and in the downstream_direction merges with a_mixing tube_extending_substantially as an_extension_of the_supply channel for the thread.
Similar blowing nozzles_are generally_known. They are e.g. applied to_pneumatic weaving machines for_sucking_in the weft threads by means_of pressurized air and entering them_into the weaving shed.
Due to_all_kinds_of causes which may be_found in the thread itself as_well as exteriorly,_the head of a thread transported by_means_of such a blowing nozzle will_not_always continue after leaving the exit_end,_along_a fixed path (e.g. along_the axis of the mixing tube)_but variously deviates therefrom. This constitutes an important disadvantage_in all those_cases in which the thread,_after_leaving_the blowing nozzle, must remain within a narrowly delimited area_in order_to have the_further transport of the thread occur without disturbances. E.g. in_a pneumatic weaving machine the head of_the thread must be supplied within the cross-section of a tunnel_formed in the weaving shed (by means of_the reedlamellae or of lamellae especially serving_this purpose). A deviation_of_the optimum path of movement of the_thread_may_e.g._result in that_the head of_the