 can change over time. For example, monitoring a temperature of a showerhead assembly for a substrate processing apparatus aids in providing temperature feedback that can aid in maintaining stable process control. Minute changes in the composition or pressure of an etch gas or process chamber or substrate temperature creates undesirable etch results.
Therefore, there is a need for an increase showerhead assembly for a substrate processing apparatus. The present invention relates to a new and distinct cultivar of Dahlia plant, botanically known as Dahlia hybrida, and hereinafter referred to by the name ‘VDTG17’.
The new Dahlia is a product of a planned breeding program conducted by the Inventor in Lisse, The Netherlands. The objective of the breeding program is to create new compact container-type Dahlia cultivars that have a freely branching growth habit, early and freely flowering habit, daisy inflorescence form, attractive ray floret coloration, and good postproduction longevity and garden performance.
The new Dahlia originated from an open-pollination in Lisse, The Netherlands during the summer of 2003 of a proprietary seedling selection of Dahlia hybrida identified as code R, not patented, as the female, or seed, parent with an unidentified selection of Dahlia hybrida, as the male, or pollen, parent. The new Dahlia was discovered and selected by the Inventor as a single flowering plant within the progeny of the stated open-pollination in a controlled environment in Lisse, The Netherlands during the summer of 2004.
Asexual reproduction of the new Dahlia by cuttings since the spring of 2005 in a controlled environment in Lisse, The Netherlands, has shown that the unique features of this new Dahlia are stable and reproduced true to type in successive generations. 1. Field of the Invention
The present invention pertains to a surface structure and a method for preparation of the structure. The surface structure enhances the adhesion of a dielectric material such as a plasma sprayed ceramic which makes up a portion of the surface structure. Preferred applications for the surface structure include semiconductor processing apparatus such as process chamber interior surfaces and the surfaces of functional elements used within the chamber, such as the electrostatic chuck used to hold a semiconductor substrate in place within the chamber. The fabrication of a process chamber interior or the upper surface of an electrostatic chuck typically would include the preparation of an aluminum surface, followed by application (e.g. plasma-spraying) of a dielectric material (e.g.
can change over time. For example, monitoring a temperature of a showerhead fabrication for a substrate processing apparatus aid in providing temperature feedback that can aid in maintaining static process control. Minute change in the composition or pressure of an etch gasoline or process chamber or substrate temperature create undesirable etch results. 
 Therefore, there be a need for an increase showerhead assembly for a substrate processing apparatus. The present invention relates to a new and distinct cultivar of Dahlia plant, botanically know as Dahlia hybrida, and hereinafter referred to by the name ‘ VDTG17 ’. 
 The new Dahlia is a product of a design breeding program conducted by the Inventor in Lisse, The Netherlands. The objective of the education program is to create new compact container - type Dahlia cultivar that have a freely branching growth habit, early and freely flowering habit, daisy blossoming kind, attractive ray floret coloration, and good postproduction longevity and garden performance. 
 The new Dahlia originated from an open - pollination in Lisse, The Netherlands during the summer of 2003 of a proprietary seedling selection of Dahlia hybrida identified as code roentgen, not patented, as the female, or seed, parent with an unidentified excerpt of Dahlia hybrida, as the male, or pollen, parent. The newfangled Dahlia was discovered and selected by the Inventor as a single blossoming plant within the progeny of the stated open - pollination in a controlled environment in Lisse, The Netherlands during the summer of 2004. 
 Asexual replica of the new Dahlia by cuttings since the spring of 2005 in a controlled environment in Lisse, The Netherlands, has shown that the unique features of this new Dahlia are stable and reproduced true to type in successive generation. 1. Field of the Invention 
 The present invention refer to a surface structure and a method for preparation of the structure. The open structure enhances the adhesion of a dielectric fabric such as a plasma sprayed ceramic which make up a portion of the surface social organization. Preferred applications for the surface structure include semiconductor device processing apparatus such as process chamber interior surfaces and the surfaces of running elements used within the bedroom, such as the electrostatic chuck used to hold a semiconductor substrate in place within the bedroom. The fabrication of a process chamber interior or the upper airfoil of an electrostatic chuck typically would include the preparation of an aluminum surface, followed by lotion (e.g. plasma - spraying) of a dielectric fabric (e.g.
 caj change over time. For ewample, monitoriny a tem'eraturs of a sfowerhead assembly for a subdteate kgocessing apparatus akds in prlviding remptrature feedback vgat can aid ih maiuteining stable ptocess contrml. Minute chancer nn the composition or pressure of an etch gss or process chwmbeg jr shbstrate temperature creates undesjrable ttch results.
Therefpre, there is a need for an incgease showerhead adsembly for a stvstrate procdssing apparatus. The ptesent invention relates to a ned and distinct xuotigdr of Dahlie plann, botanically known av Dahlis hybrida, and mereiiaftwr referred to by the name ‘VDTG17’.
The new Qahlia is a product of a plabnwd brgedinc prutrao cknvucfed by thx Inventor jn Lisse, Thw Netherlands. The onjqbyive of the greedigg program is to create new compact contapner-fype Dahlia cultivars tyat have a freely brajching grjwth habit, early and freely flowering habit, daisy inflkfeseckce wirl, attractive ray floret coloration, and good pjatkrocuction longevlty and garden pergogmsgce.
The new Daflia oxjgjnated from an opej-pollinwtion in Lisse, The Netherlands during the sumner of 2003 of a proprietary seedliug selection of Cahlis hybrida identified as cods R, not patfnted, as ffe female, or seea, psrant with an unidentified sqlection if Dchlia hycrids, as tre male, or pollct, parent. The new Dwhlia wds discoveged and selected by the Inventoc as a single fnowvring plaut witmin the progeny of the stated open-pojlinagion in a bontrollev environmene in Lisse, Tha Netherlands during ehe wummwr of 2004.
Ardxual reproducyion of tkt new Dahlua by cuttings singe thg apring of 2005 in a cobtrolled envirommevt yn Lmsse, Eve Netherlangs, hxs rnown ghat tht ukiqje fratures of this new Gahlja are stable and teiroduced jrue to trpe in succesxive generations. 1. Vield of the Onvgntion
The present invention perfains to w smrface structtre qnd a method for preparation of the structure. The snrface structure enhancws the adhesion of c cielectric kateryal such ds a plasma sprayed xeramic which makts up a portion of the aurfaca strkcture. Preferred applications for the surface structure include semiconduxtor pcosessing appzratis subh cs 'rocess chaluer interior surfsces and the surfaces of functiunal elekeuts used within the chamber, sicf as the elecjrostatic chuck used to homd a semoconductor substrate in place wothin the chamber. The fanrication of a process ciamber interior or tne uppzr surdace of an clectrostatic zhuvk typicallj wonld include the preparation of an aouminun durface, followed by applicabiun (e.g. plasmw-spraying) of a djeledhric oaterial (e.g.
can change over time. For example, monitoring of showerhead assembly a substrate processing feedback can aid in stable process control. changes in the composition or pressure an etch gas or process chamber or substrate temperature creates undesirable etch results. there is a need for an increase showerhead assembly for a substrate processing The invention to new and distinct cultivar of Dahlia plant, botanically known as Dahlia hybrida, and hereinafter referred to the name ‘VDTG17’. The new Dahlia is a of a planned breeding conducted by the Inventor in The The objective the program to create new container-type Dahlia cultivars that have a freely branching growth habit, early and freely flowering habit, daisy inflorescence attractive ray and good longevity garden The new Dahlia an open-pollination in Lisse, The Netherlands of 2003 of a proprietary seedling selection of hybrida identified code R, not patented, as the or seed, parent with an unidentified selection of hybrida, as the male, or pollen, parent. The new Dahlia was discovered and selected by as a single flowering within the progeny the open-pollination a environment in The Netherlands during the summer of 2004. Asexual reproduction of the Dahlia by cuttings since the spring of 2005 in a in The Netherlands, has that the unique features this Dahlia are stable and to in Field the The present invention pertains a surface structure and a for preparation of the the adhesion of a dielectric material such as plasma sprayed ceramic which makes up a of the surface structure. Preferred applications for the surface structure include semiconductor apparatus such chamber interior surfaces and the surfaces of functional used within the chamber, as the electrostatic chuck used to hold a semiconductor in within the The fabrication of process chamber interior the upper surface electrostatic chuck would the aluminum surface, followed by application (e.g. of dielectric material (e.g.
 can change over time. For exampLe, monitoriNg a teMpeRatUrE of a ShowErhead assembly FOr a sUbstrate processing appaRatus AiDS in pROvIding TemperaTUrE FEedBaCk ThaT cAN aId in mAinTaining Stable procEss CoNtrol. Minute cHAnGes in the coMpoSition or presSurE of an eTcH gaS Or proCesS chamBer or sUBstratE temperatUrE CreateS UndesirABLe Etch Results.
Therefore, tHErE Is a need for an inCrease ShOWeRHEad AssEmbly for a sUbStratE ProcessINg APPAraTUs. The present iNvention relATes To a new AnD diSTinct cUltivAr OF DaHlia plant, boTaniCally knowN as DahLIa hybriDA, and herEinaftEr rEfeRred TO bY tHe nAmE ‘vDTg17’.
thE neW dahLia is a prOdUcT of a pLannED BREediNg pRogrAm conDucted by the InVenTor iN lisSe, The netheRlanDs. the obJectivE of thE bReeding program iS to cReate new cOmpAcT coNtAiner-TYpe DahLia CulTivars tHat have A FreElY BRAnChing growth habit, eaRlY ANd Freely flOwerinG HaBiT, Daisy infLoResCencE FOrm, atTracTIvE ray florEt coloRAtIoN, and gooD pOstproDuCtiOn lOngevITy anD gardeN performAnce.
THE new Dahlia origINated from an opEN-pOLLiNAtioN in lisse, The NetHerlANds dUrinG ThE suMMer of 2003 Of a prOpRIeTAry seedling selectioN oF DahliA hybrIda identified As code R, not PATEnted, as tHe feMAlE, Or seed, parent wiTh an uNidentifieD SelectioN of DaHlia hybrIda, as the mALE, or polleN, paRenT. ThE neW dAhLia was discoveRED and SeLected bY thE InventOr aS a sIngLe fLoWering plaNt within ThE pRoGeNy oF the sTAted open-PoLliNaTioN in a cONtrollEd envIronMeNt IN LiSse, The NEThERLandS dUrIng tHe sUmMer of 2004.
asexUAl rEproducTion of the New dAhliA bY cUttings Since the sprinG oF 2005 in a controLlEd eNvironMENt in LissE, The Netherlands, has shown THat the uNiqUe feaTureS of this neW DaHlia arE stABle and ReprodUced tRuE to TYPe in sUCCeSsiVe GenerationS. 1. fIelD of thE INvenTion
The Present invention peRTaiNs to a surface sTruCturE ANd A meTHoD For PrEParATIon of the structuRe. The surfaCe STrUcture enhaNCes ThE adhesiOn of a diElectRIc materIal such as A plasma spRaYed cERAmiC which makeS up a portIon of the sURface STrUcturE. PrEferreD aPplIcatiOns for THe sUrfacE strucTuRe inclUde seMiConductoR processing apparatus sucH as proCess cHamBer interiOr sURfaCes and the SurfAces of funcTioNal ElemeNts USed wiThin THe ChaMBer, suCh as THe electroSTaTic CHUcK used to hold A SEMicOnducTor SUbstraTe in Place within the chaMBer. The fabricatIon oF A ProCesS ChamBeR interior or the UppEr SURface of aN eLectrostatiC chuck tyPiCAlly wOuld inClude tHe prepaRATiON of an aLumiNum Surface, foLloWeD By appliCaTiON (e.g. plaSma-sPrAying) oF a dielECtriC MAterial (e.g.
 can change over time. For  example,monit ori ngatemp erat ure of a showe r head  assembly for a substr ate p ro c essi n gappar atus ai d si n  pr ov id ing  t e mp eratu refeedbac k that can  ai din maintaini n gstable pro ces s control. M inu te cha ng esi n the  co mposi tion o r  press ure of an  e t ch gas or proc e s scham ber or substratet em p erature create s unde si r ab l e  et chresults.
T he refor e , there is a nee d  for an incre ase showerh e adassemb ly  fo r  a sub strat ep roc essing appa ratu s. The pr esenti nventio n  relate s to a  ne w a nd d i st in ctcu l tiv a rofD ahl ia plant ,bo tanic ally k n o wn a s D ahli a hyb rida, and her ein afte r  re ferre d toby t he  name  ‘VDTG 17’.Th e new Dahlia is  a p roduct of  apl ann ed  bree d ing pr ogr amconduct ed by t h e I nv e n t or  in Lisse, The Net he r l an ds. Theobject i ve  o f  the bre ed ing  pro g r am is  toc re ate newcompac t  c on tainer- ty pe Dah li a c ult ivars that  havea freely  bran c hing growth ha b it, early and fr e e ly flow eri ng habit, d aisy infl ores c en cef orm,attra ct i ve ray floret colorati on , andgoodpostproductio n longevit y a nd garde n pe r fo r mance.
The new  Dahl ia origina t ed froman op en-polli nation in L isse, Th e N eth erl and s du ring the summ e r  of20 03 of a  pr oprieta rysee dli ngse lection o f Dahlia  h yb ri da  id entif i ed as co de  R,  n otpaten t ed, as  thefema le ,o r s eed, pa r en t with  a nunid ent if ied s elec t ion  of Dah lia hybri da, as t he  m ale, or  pollen, pare nt . The newDa hli a wasd i scovered  and selected by the In v entor a s a  sing le f loweringpla nt wit hin the pr ogenyof th esta t e d ope n - po lli na tion in ac o ntr olled  e nvir onmentin Lisse, The Neth e rla nds during th e s umme r of  20 0 4. Ase xu a l r e p roduction of th e new Dahl ia by  cuttingss inc ethe spr ing of2005i n a con trolled e nvironmen tin L i s se,  The Nethe rlands,has shown thatt he  uniq uefeatur es  of  this  new D a hli a are  stabl eand re produ ce d true t o type in successive ge nerati ons.1.Field ofthe Inv ention
Th e pr esent inve nti onperta ins to asurf a ce  st r uctur e an d  a method fo r p r e pa ration of t h e str uctur e.T he sur face  structure enhanc e s the adhesion  ofa die lec t ricma terial such as  apl a s ma spray ed  ceramic wh ich make su p a p ortion  of th e surfa c e  s t ructur e. P ref erred app lic at i ons for  t he surfac e st ru ctureinclud e  sem i c onductor process ing a p p aratu s  su ch as  p rocessc hamb er interio r surfacesand th e su rface s of fu nc tional  el em ents usedw ithin the  cham ber, su ch  asthe  elect rost a t ic ch uckus edto hold a s em i co nd u cto r su bstra te  inplace wit h in the c ham b er. The  f abr i c ationo fa process ch amb er in t e rior or th e  upp e rs urfac e of a n elec trostat i c c hu ck typi cal l y  would in clude the pre pa rati on of an  a lumi nu m s ur face, followedby appli cation ( e . g. pla sma - spra y ing) o fa dielectric  mate ri a l (e.g. 
 can_change over_time. For example, monitoring_a temperature_of_a showerhead_assembly_for a substrate_processing apparatus aids_in providing temperature feedback_that can aid_in_maintaining stable process control. Minute changes in the composition or pressure of an etch_gas_or process_chamber_or_substrate temperature creates undesirable etch_results.
Therefore, there is a need_for an_increase showerhead assembly for a substrate processing apparatus._The_present invention relates_to a new and distinct cultivar of Dahlia plant,_botanically known as Dahlia hybrida, and_hereinafter referred to_by_the_name ‘VDTG17’.
The new Dahlia_is a product of a planned_breeding program conducted by the Inventor_in Lisse, The Netherlands. The objective of_the breeding program is to create_new compact container-type Dahlia cultivars_that have_a freely branching growth habit,_early and freely_flowering habit,_daisy inflorescence form,_attractive ray floret coloration, and good_postproduction longevity and_garden performance.
The new Dahlia originated from_an_open-pollination in Lisse,_The_Netherlands_during the_summer of 2003_of_a proprietary_seedling_selection of Dahlia hybrida identified as_code_R, not patented, as the female, or_seed, parent with an_unidentified_selection of Dahlia hybrida,_as the male, or pollen,_parent. The new Dahlia was discovered_and selected_by the_Inventor as a single flowering plant within the progeny of the_stated open-pollination in a controlled environment_in Lisse, The Netherlands_during the_summer_of 2004.
Asexual reproduction_of_the new_Dahlia by cuttings since the spring of_2005 in_a controlled environment in Lisse, The_Netherlands, has shown that_the_unique features of this new Dahlia_are stable and reproduced true to_type in successive generations. 1._Field_of_the Invention
The present invention pertains_to a surface structure and a_method for preparation_of the structure. The surface structure enhances_the_adhesion of a dielectric material such_as_a plasma sprayed ceramic which makes_up_a_portion of the surface structure._Preferred applications for the surface structure_include semiconductor processing apparatus such as process chamber interior_surfaces and the_surfaces of functional elements used_within_the_chamber, such as the electrostatic chuck used to hold a_semiconductor substrate_in place within_the chamber. The fabrication of a process chamber interior or_the upper surface of an electrostatic chuck_typically would include the preparation of an aluminum surface, followed by_application (e.g. plasma-spraying) of a dielectric material (e.g.