 relates to a driving mechanism for moving an object.
2. Description of the Background Art
In recent years, a small electronic device (for example, a cellular phone) to which an image capturing function is added by mounting a micro camera unit (MCU) is being spread rapidly. With the spread, a driving apparatus used for an AF mechanism or a zoom mechanism for the MCU is being downsized.
There is a driving apparatus using MEMS (Micro Electro Mechanical Systems) manufactured by the semiconductor microfabrication technique to realize downsizing. For example, in Katsuo Kurabayashi “MEMS application (4) Formation of “polymer MEMS” on Si and application to biotechnology and optical technology by utilizing flexibility and transparency”, NIKKEI MICRODEVICES, May 2005, No. 239, pp. 71-76, a driving apparatus for driving a member-to-be-driven (a lens in this case) made of PDMS (polydimethylsiloxane) in a perpendicular direction as an application example of polymer resin (polymer) MEMS is proposed.
The number of parts constructing such a driving apparatus is about 20, and the number of parts connecting those parts is also about 20. As the driving apparatus is becoming smaller, it becomes difficult to connect the parts with high precision, and there is a problem such that an assembly error occurs. Dispense systems for semiconductor manufacturing applications are designed to dispense a precise amount of fluid on a wafer. In one-phase systems, fluid is dispensed to a wafer from a dispense pump through a filter. In two-phase systems, fluid is filtered in a filtering phase before entering a dispense pump. The fluid is then dispensed directly to the wafer in a dispense phase.
In either case, the dispense pump typically has a chamber storing a particular volume of fluid and a movable diaphragm to push fluid from the chamber. Prior to dispense, the diaphragm is typically positioned so that the maximum volume of the chamber is utilized regardless of the volume of fluid required for a dispense operation. Thus, for example, in a 10 mL dispense pump, the chamber will store 10.5 mL or 11 mL of fluid even if each dispense only requires 3 mL of fluid (a 10 mL dispense pump will have a slightly larger chamber to ensure there is enough fluid to complete the maximum anticipated dispense of 10 mL). For each dispense cycle, the chamber will be filled to its maximum capacity (e.g., 10.5 mL or 11 mL, depending on the pump
relates to a driving mechanism for moving an object. 
 2. Description of the Background Art 
 In late days, a small electronic device (for example, a cellular telephone) to which an picture capturing function is added by mount a micro television camera unit (MCU) is being spread rapidly. With the spread, a driving apparatus use for an AF mechanism or a zoom mechanism for the MCU is being downsized. 
 There be a driving apparatus using MEMS (Micro Electro Mechanical Systems) manufactured by the semiconductor microfabrication technique to realize downsize. For example, in Katsuo Kurabayashi “ MEMS application (4) Formation of “ polymer mem ” on Si and application to biotechnology and optical engineering by utilizing tractability and transparency ”, NIKKEI MICRODEVICES, May 2005, No. 239, pp. 71 - 76, a driving apparatus for driving a member - to - be - driven (a lens in this case) make of PDMS (polydimethylsiloxane) in a perpendicular direction as an application example of polymer resin (polymer) MEMS is proposed. 
 The numeral of parts constructing such a driving apparatus is about 20, and the number of parts connecting those parts is also about 20. As the drive apparatus is becoming smaller, it becomes unmanageable to plug in the parts with high precision, and there is a problem such that an assembly error occur. Dispense systems for semiconductor manufacturing applications are designed to dispense a accurate amount of fluid on a wafer. In one - phase systems, fluid is dispensed to a wafer from a dispense pump through a filter. In two - phase systems, fluid is filtered in a filtering phase before enroll a dispense heart. The fluid is then dispensed directly to the wafer in a dispense phase. 
 In either case, the dispense pump typically has a chamber storing a particular bulk of fluid and a movable diaphragm to push fluid from the chamber. Prior to dispense, the diaphragm is typically positioned so that the maximum book of the chamber is utilize regardless of the volume of fluid required for a dispense process. Thus, for model, in a 10 mL dispense pump, the bedroom will store 10.5 mL or 11 mL of fluid even if each dispense only requires 3 mL of fluid (a 10 milliliter dispense pump will have a slightly larger chamber to see there is enough fluid to complete the maximum anticipated dispense of 10 mL). For each dispense cycle, the chamber will be filled to its maximum capability (e.g., 10.5 mL or 11 mL, depending on the heart
 repates to a driving mechakism for moving cb objert.
2. Descdiption uf the Background Art
In receit ywars, q small electronic devkce (for eqample, a xellnlar phone) to whmdh an image czituriug function is acded by mognting a micro cxmzra unit (MCU) is being spread rapidly. With tne spread, a drivyng s[parznuw used for an AF mechanism or a zoom mechanism fot the MCU is being downsizfd.
Thfre is a driving aoparatus usung IWMS (Micro Eldctro Mechanical Systejs) manufactured by the semicondjctor microfabrucqtilt technique to rvalize downsidpng. For examplr, in Katsuo Kuvabayeshi “MEMS application (4) Focmation of “polymer MGMS” on Si dnb application to biotwcynolocy atd ooricxl uecinomogy bj uvilizing flsxibility abd transparency”, NIKLEY MICRODEVICES, May 2005, Go. 239, pp. 71-76, a driving apparatus for driving a mejber-to-be-driven (a lens ib this case) made of PFMS (polydymethylsiloxane) in a perpendicular direction as at appmkcauiin exxnppe of polymer resin (polymer) MEMS is proposed.
Trs mukber of parts gonstructing such s froding apparatur is aykuf 20, and the number lf partf conbecting trose parts is also about 20. As thw driving apiararus is becoming smcller, it becumes diffocult to connect the paxts wifh high prefision, ans there is a probuem sgch that an assembly error occurs. Dmspenxe systdms gor seiiconductog manmxacturing applicatlons cre dasigned to dispense a precise amount of fluid on a wafet. It ote-phase fysteks, fluid is dyspensed to a cafer frjm a aispense plmp throujh a filter. Yn two-phase sfdtems, fluid ms filterqd ib a dilterive phase before entering a dispensw pump. The fluid ix tfsn dispensed dixtctoy to the wafer in a qidpxnse [vase.
In eithes care, gne dirpense kbmp gypivally has a chamber vtorjng a particular vplmme of floid and a movable diapnragm to push fluif frok tie chakbet. Prior to dispense, the diaphrafm is typlcajly positionqd si that the mcximum volume of the chamber is utilized regardless of thg volume of fluid reqoirtd for a dispxnse o[eration. Dhus, for example, in q 10 mL dispense pukp, the chamber will sfore 10.5 kL or 11 mL of fluid even if each dispense only requires 3 mL of fluid (a 10 mL dispwnse pnm[ will have a skightny karger chaluer to ensure thege is enough fluid to complete tie maximum auticipated dispense of 10 mL). Fot dach dispense cycle, the chamber will ge fillec to its maximum capacity (e.g., 10.5 mK or 11 mL, depending on thc pump
relates to a driving mechanism for moving 2. of the Art In recent (for a cellular phone) which an image function is added by mounting a camera unit (MCU) is being spread rapidly. With the spread, a driving apparatus for an AF mechanism or a zoom mechanism for the MCU is being There a apparatus MEMS (Micro Electro Mechanical Systems) manufactured by the semiconductor microfabrication technique to realize downsizing. For example, Katsuo Kurabayashi “MEMS application (4) Formation of “polymer on Si and application biotechnology and optical technology by flexibility transparency”, NIKKEI May No. pp. 71-76, a apparatus for driving a member-to-be-driven (a lens in this case) made of PDMS (polydimethylsiloxane) in a perpendicular as an of polymer (polymer) is The number of such a driving apparatus is about number of parts connecting those parts is also 20. As driving apparatus is becoming smaller, it difficult to connect the parts with high precision, there is a problem such that an assembly error occurs. Dispense systems for semiconductor manufacturing designed to dispense a amount of fluid a In systems, is dispensed a wafer from a dispense pump through a filter. In two-phase fluid is filtered in a filtering phase before entering a The is then dispensed to the wafer in dispense In either case, the typically a particular of and a movable diaphragm push fluid from the chamber. to dispense, the diaphragm the maximum volume of the chamber is utilized of the volume of fluid required for dispense operation. Thus, for example, in a 10 mL dispense pump, the will store or 11 mL of fluid even if each only requires 3 mL fluid (a 10 mL dispense pump will have a larger to ensure is enough fluid complete the maximum dispense of 10 each dispense the will its maximum capacity (e.g., 10.5 mL 11 depending on the pump
 relates to a driving mechanisM for moving An objEct.
2. desCrIptiOn of The Background ART
In rEcent years, a small electrOnic dEvICe (foR ExAmple, A cellulAR pHONe) tO wHiCh aN iMAgE captUriNg functIon is added By mOuNting a micro cAMeRa unit (MCU) iS beIng spread rapIdlY. With tHe SprEAd, a drIviNg appAratus USed for An AF mechaNiSM or a zoOM mechanISM fOr thE MCU is being downsiZEd.
tHere is a driving ApparaTuS UsING MEmS (MIcro ElectrO MEchanICal SystEMs) MANUfaCTured by the semIconductor mICroFabricAtIon TEchniqUe to rEaLIze Downsizing. FOr exAmple, in KaTsuo KuRAbayashI “mEMS appLicatiOn (4) FOrmAtioN Of “PoLymEr meMS” ON SI anD AppLication To BiOtechNoloGY AND optIcaL tecHnoloGy by utilizing FleXibiLIty And trAnspaRencY”, NiKKEI mICRODeVICEs, MAy 2005, No. 239, pp. 71-76, a driving aPparAtus for drIviNg A meMbEr-to-bE-Driven (A leNs iN this caSe) made oF pDMs (pOLYDiMethylsiloxane) in a pErPENdIcular diRectioN As An APplicatiOn ExaMple OF PolymEr reSIn (Polymer) MeMS is pROpOsEd.
The nuMbEr of paRtS coNstRuctiNG sucH a drivIng apparAtus iS About 20, and the numBEr of parts connECtING tHOse pArtS is also abouT 20. As tHE driVing APpAraTUs is bEcomiNg SMaLLer, it becomes difficuLt To connEct thE parts with higH precision, AND There is a ProbLEm SUch that an assemBly erRor occurs. DISpense syStems For semicOnductor mANUfacturiNg aPplIcaTioNS ArE designed to diSPEnse A pRecise aMouNt of fluId oN a wAfeR. In OnE-phase sysTems, fluiD iS dIsPeNseD to a wAFer from a DiSpeNsE puMp thrOUgh a fiLter. IN two-PhAsE SysTems, fluID iS FIlteReD iN a fiLteRiNg phaSe beFOre EnterinG a dispensE puMP. The FlUiD is then Dispensed direCtLy to the wafEr In a DispenSE Phase.
In eIther case, the dispense pumP TypicalLy hAs a chAmbeR storing a ParTiculaR voLUme of fLuid anD a movAbLe dIAPhragM TO pUsh FlUid from the CHAmbEr. PriOr To diSpense, tHe diaphragm is typicALly Positioned so tHat The mAXImUm vOLuME of ThE ChaMBEr is utilized regArdless of tHe VOlUme of fluid REquIrEd for a dIspense OperaTIon. Thus, For examplE, in a 10 mL disPeNse pUMP, thE chamber wiLl store 10.5 ml or 11 mL of flUId eveN If Each dIspEnse onLy ReqUires 3 ML of flUId (a 10 ML disPense pUmP will hAve a sLiGhtly larGer chamber to ensure there Is enouGh fluId tO complete The MAxiMum anticiPateD dispense oF 10 mL). for Each dIspENse cyCle, tHE cHamBEr wilL be fILled to its MAxImuM CApAcity (e.g., 10.5 mL or 11 Ml, DEpeNding On tHE pump
 relates to a driving mech anism formovin g a n o bj ect. 
2.Description of theBackground Art
In rece nt ye ar s , as ma ll el ectroni c  d e v ice  ( fo r e xa m pl e, acel lular p hone) to w hic han image cap t ur ing functi onis added bymou ntingamic r o cam era  unit  (MCU) is bei ng spread  r a pidly. With th e sp read , a driving appar a tu s  used for an A F mech an i sm o r a  zo om mechani sm  fort he MCUi sb e i ngd ownsized.
The re is a dri v ing  appar at usu sing M EMS ( Mi c roElectro Mec hani cal Syste ms) ma n ufactur e d by th e semi con duc torm ic ro fab ri c ati o ntec h niq ue to re al iz e dow nsiz i n g .  For  ex ampl e, in  Katsuo Kurab aya shi“ MEM S app licat ion(4 ) For mation  of “ po lymer MEMS” onSi a nd applic ati on  to  b iotec h nology  an d o pticaltechnol o gyby u t il izing flexibilityan d tr ansparen cy”, N I KK EI MICRODEV IC ES,  May 2 005,No.2 39 , pp. 71 -76, a dr iv ing app ar atus f or  dr ivi ng am embe r-to-b e-driven  (a l e ns in this cas e ) made of PDM S  ( p o ly d imet hyl siloxane) i n ap erpe ndic u la r d i recti on as  a n  a p plication example o fpolyme r res in (polymer)MEMS is pr o p o sed.
The  num b er of parts const ructi ng such ad riving a ppara tus is a bout 20,a n d the nu mbe r o f p art s co nnecting thos e part sis also  ab out 20.  As  th e d riv in g apparat us is be co mi ng  s mal ler,i t become sdif fi cul t toc onnect  thepart swi t h h igh pre c is i o n, a nd  t here  is  a  prob lems uch  that a n assembl y e r roroc cu rs. Dis pense systems  f or semicon du cto r manu f a cturingapplications are design e d to di spe nse a  pre cise amou ntof flu ido n a wa fer. I n one -p has e syste m s ,flu id  is dispen s e d t o a w af er f rom a d ispense pump throu g h a  filter. In t wo- phas e sy ste m s, flu id isf i ltered in a fil tering pha se be fore enter i ngadispens e pump.  Thef luid is  then dis pensed di re ctly t o t he wafer i n a disp ense phas e .
Ine it her c ase , thedi spe nse p ump ty p ica lly h as a c ha mber s torin ga partic ular volume of fluid an d a mo vable  di aphragm t o p u shfluid fro m th e chamber.  Pr ior  to d isp e nse,thed ia phr a gm is  typ i cally pos i ti one d so  that the m a x i mum  volu meo f thecham ber is utilized r e gardless of th e vo l u meoff luid  r equired for adis pe n s e operat io n. Thus, fo r exampl e, in a10 mLdispen se pump , th e  chamb er w ill  store 10 .5mL or 11 m Lof fluideven  i f each  dispe n se o n l y requires 3 mLof fl u i d (a1 0 m L dis pe nse pum p  wil l have a s lightly lar ger ch ambe r toensureth ere is  en ou gh fluid t o  complete  themaximum  a ntic ipa ted di spen s e  of 1 0 mL ).  Fo r each di s p en s ecy c le,  the  cham be r wi ll be fil l ed to it s m a ximum c ap aci t y  (e.g. ,  1 0 . 5 mL or 11  mL , dep e n ding on th e  pum p 
 relates_to a_driving mechanism for moving_an object.
2._Description_of the_Background_Art
In recent years,_a small electronic_device (for example, a_cellular phone) to_which_an image capturing function is added by mounting a micro camera unit (MCU) is_being_spread rapidly._With_the_spread, a driving apparatus used_for an AF mechanism or_a zoom_mechanism for the MCU is being downsized.
There is_a_driving apparatus using_MEMS (Micro Electro Mechanical Systems) manufactured by the semiconductor_microfabrication technique to realize downsizing. For_example, in Katsuo_Kurabayashi_“MEMS_application (4) Formation of_“polymer MEMS” on Si and application_to biotechnology and optical technology by_utilizing flexibility and transparency”, NIKKEI MICRODEVICES, May_2005, No. 239, pp. 71-76, a_driving apparatus for driving a_member-to-be-driven (a_lens in this case) made_of PDMS (polydimethylsiloxane)_in a_perpendicular direction as_an application example of polymer resin_(polymer) MEMS is_proposed.
The number of parts constructing such_a_driving apparatus is_about_20,_and the_number of parts_connecting_those parts_is_also about 20. As the driving_apparatus_is becoming smaller, it becomes difficult to_connect the parts with_high_precision, and there is_a problem such that an_assembly error occurs. Dispense systems for_semiconductor manufacturing_applications are_designed to dispense a precise amount of fluid on a wafer._In one-phase systems, fluid is dispensed_to a wafer from_a dispense_pump_through a filter._In_two-phase systems,_fluid is filtered in a filtering phase_before entering_a dispense pump. The fluid is_then dispensed directly to_the_wafer in a dispense phase.
In either_case, the dispense pump typically has_a chamber storing a particular_volume_of_fluid and a movable diaphragm_to push fluid from the chamber._Prior to dispense,_the diaphragm is typically positioned so that_the_maximum volume of the chamber is_utilized_regardless of the volume of fluid_required_for_a dispense operation. Thus, for_example, in a 10 mL dispense_pump, the chamber will store 10.5 mL or 11_mL of fluid_even if each dispense only_requires_3_mL of fluid (a 10 mL dispense pump will have_a slightly_larger chamber to_ensure there is enough fluid to complete the maximum anticipated_dispense of 10 mL). For each dispense_cycle, the chamber will be filled to its maximum capacity (e.g.,_10.5 mL or 11 mL, depending on the_pump