.
For this reason, a manufacturing apparatus which readily fails may be used in processing and fail during processing of a product, resulting in a defective product or prolonging the manufacturing term.
The prior art does not consider the failure probability of a manufacturing apparatus in maintenance for preventing any failure of a semiconductor manufacturing apparatus. Maintenance may be done even for a manufacturing apparatus with a low failure probability. To the contrary, no maintenance may be done even for many manufacturing apparatuses having high failure probabilities on the line, generating many failures at once.
Maintenances of a semiconductor manufacturing apparatus are classified into two: scheduled maintenance such as uniform periodic maintenance or predictive maintenance performed while monitoring the operation state of the apparatus; and post-failure maintenance performed every time a failure occurs.
To manage maintenance components used in post-failure maintenance, necessary components and necessary numbers of them are prepared in advance by the experience and skills of a person in charge.
In scheduled maintenance, components which should be prepared are obtained in accordance with maintenance contents, and can be prepared in advance to a certain degree. However, in advanced preparation for maintenance components upon occurrence of a sporadic failure, it is very difficult to predict a necessary component and its necessary amount.
To achieve successful inventory of maintenance components, even components which are rarely used must be excessively prepared, and many components become wasteful.
Management depending on the experience and skills of a person in charge may make a certain unexpected component unavailable due to limited personal skills, and the apparatus may have to be stopped for a long time until the component arrives.
A long-time stop of the apparatus on the manufacturing line leads to a long manufacturing term and a stop of production owing to the idle apparatus, posing a serious fault. To minimize the stop time of the apparatus, the apparatus must be immediately recovered even if it fails and stops. The repair skill is required even for an accidental failure, whereas it is also important to ensure a necessary amount of maintenance components, as needed.
However, it is conventionally very difficult to determine necessary components and their necessary amounts without the skills and experience of a person in charge, and manage maintenance components less in excessive inventory without making some component unavailable.
The prior art also suffers a problem about the maintenance time of the semiconductor manufacturing apparatus. Under the present circumstances, each portion of the semiconductor manufacturing apparatus is maintained periodically or upon occurrence of a failure, as described above. In periodic maintenance, a portion which hardly fails may be maintained to redundantly stop the apparatus. To the contrary, it is too late
. 
 For this reason, a manufacturing apparatus which readily fails may be use in processing and fail during processing of a merchandise, resulting in a defective product or prolong the manufacturing term. 
 The anterior art does not consider the failure probability of a manufacture apparatus in maintenance for preventing any bankruptcy of a semiconductor manufacturing apparatus. Maintenance may be done even for a manufacturing apparatus with a broken failure probability. To the reverse, no maintenance may be suffice even for many fabrication apparatuses having high bankruptcy probabilities on the line, generating many failures at once. 
 Maintenances of a semiconductor device manufacturing apparatus are classify into two: scheduled maintenance such as uniform periodic alimony or predictive maintenance performed while monitoring the operation state of the apparatus; and post - failure sustenance performed every time a failure occurs. 
 To manage maintenance components used in post - failure maintenance, necessary components and necessary number of them are prepared in advance by the experience and skill of a person in cathexis. 
 In scheduled maintenance, components which should be prepare are obtained in accordance with maintenance contents, and can be prepare in advance to a certain degree. However, in advanced preparation for maintenance part upon occurrence of a sporadic failure, it is very difficult to predict a necessary part and its necessary amount. 
 To achieve successful armory of sustenance components, even components which are rarely used must be excessively prepared, and many component become wasteful. 
 Management depending on the experience and skills of a person in cathexis may make a certain unexpected component unavailable due to circumscribed personal skills, and the apparatus may have to be stopped for a long time until the part arrives. 
 A long - time stop of the apparatus on the fabrication line leads to a retentive manufacturing term and a diaphragm of production owe to the idle apparatus, model a serious fault. To minimize the stop time of the apparatus, the apparatus must be immediately recover even if it fails and stops. The haunt skill is required even for an accidental failure, whereas it is also important to ensure a necessary amount of maintenance component, as needed. 
 However, it is conventionally very difficult to determine necessary components and their necessary amounts without the skills and experience of a person in charge, and oversee care components less in excessive inventory without making some component unavailable. 
 The prior art besides suffers a problem about the maintenance time of the semiconductor manufacturing apparatus. Under the present circumstances, each portion of the semiconductor manufacturing apparatus is uphold periodically or upon occurrence of a failure, as described above. In periodic maintenance, a portion which barely fails may be maintained to redundantly stop the apparatus. To the contrary, it is too late
.
For this reason, a manufactuving apparatus wkuch reedily fzils may be used in processing and feil eurint processing of a prodjct, resulning in a deftctive product or prolonglug ths manbfecturing term.
Thg prior art goes not consigef che failure probability of a manufaceuring spoaratus in maigtensgce ror preventing any failure of a sejicondubtor manufacturinb apparatus. Maintenance maj be done even for a mwnufacturint ap[qratus with x low faillxe probabiljty. To the contrary, no maintenavce mcy be done grwn vmr many mannfactuging apparatuses havitg high failure probanilitmes in the line, generatinj many failures at ogce.
Maintetauces of a semiconductir manuxactgrine apoarztns zre clwssmfied into fwo: schedulwd maintenance such af uniform perikdic mwigtenance or predictive maintenance perfmrmsd while monitoring the operation state of tje apparaeus; and post-failure maintenance performed every thme a waiouve ozxugs.
To manage maintenance components used in poff-fsikure maintenange, necessary compomejtx and necessari numbexa kf them are preparfd in aqvancw by the txperoence and skills of a persob in charge.
Iu sxheduled maintenanee, componentr whoch snould be prepared are oytaines in accordwnce with oaintenance contdntx, dnd can be prepared in advwnce to a cercain degfee. Nowevew, in advanfed pvaparation for mainhenanee cokponents uoon occurrence of a sporadic famkure, it is vgry dixficult co precict a necesswry component cnd its uecessxry amount.
No achievx successful inventory of laintenance romponentf, evwn cimponengr which are rately used must be ezcessively preparev, ana many componentw btcime wasteful.
Mamagdmegt dxpendytg on the ex[eridncd and rkills of a oerspn in charge may maka a dertain unexpected cjmponent unavailwble due to lomited personal skllls, end thx appatatos may have to be stopped for a long timf uktil the compjnenb artives.
A long-cime stop of the apparatus on the manufarturing line leads to a long manufacturing uerm and a stpp of productimn owing to the idle apparatus, posing a serious fault. To mjnimiza the stop time of the apparatus, the apparatus must be immediately recovered ecen if it fails ans stpps. Tve xepair fkilp is required evem for an accidental failure, wheceas it is ajso important to ensure a neversary amount uf maintenance componenta, as neeced.
However, it is conventionally very difficult to deterkine necwssarg componenvs and their necessaty amobnts wuthout rhe dkills and exoeroekce of a pfrsoi iu charge, and manage maintenance cimponebtd less in excessmve inventorn dithoot makind some component unabwilabue.
The prior att also sufferx a problem about thv mwintenance timt of the semicomductor manufacturiig apparatus. Under the present circumstances, each portion of thg semicondudtor manmfacturing apparajud is maintained periodlcallr or upov occurrence of a failure, as described above. In periodir maingenwnce, z portion whibh hardly fails may be maintained no redyndantly stip the appadatus. Tp ehe clntrary, it is too lwte
. For this reason, a manufacturing apparatus fails be used processing and fail resulting a defective product prolonging the manufacturing The prior art does not consider failure probability of a manufacturing apparatus in maintenance for preventing any failure of semiconductor manufacturing apparatus. Maintenance may be done even for a manufacturing apparatus with low probability. the no maintenance may be done even for many manufacturing apparatuses having high failure probabilities on the generating many failures at once. Maintenances of a manufacturing apparatus are classified two: scheduled maintenance such as periodic or predictive performed monitoring operation state of apparatus; and post-failure maintenance performed every time a failure occurs. To manage maintenance components used in post-failure necessary components numbers of are in by the experience of a person in charge. In which should be prepared are obtained in accordance maintenance contents, can be prepared in advance to certain degree. However, in advanced preparation for maintenance upon occurrence of a sporadic failure, it is very difficult to predict a necessary component necessary amount. To achieve inventory of maintenance even which rarely must be prepared, and many components become wasteful. Management depending on the experience skills of a person in charge may make a certain unavailable to limited personal and the apparatus may to stopped for a long the arrives. of apparatus the manufacturing line leads a long manufacturing term and stop of production owing a serious fault. To minimize the stop time the apparatus, the apparatus must be immediately even if it fails and stops. The repair skill is required even an accidental it is also important to ensure a necessary of maintenance components, as However, it is conventionally very difficult to determine necessary and necessary amounts the skills and of a person charge, and manage less in inventory making The prior art also suffers a about maintenance time of the semiconductor apparatus. present circumstances, each portion of the semiconductor manufacturing apparatus is maintained periodically or upon occurrence failure, as described above. periodic a portion which hardly fails may be maintained to redundantly stop the the contrary, it
.
For this reason, a manufacturiNg apparatuS whicH reAdiLy FailS may Be used in procesSIng aNd fail during processing Of a prOdUCt, reSUlTing iN a defecTIvE PRodUcT oR prOlONgIng thE maNufactuRing term.
ThE prIoR art does not cONsIder the faiLurE probability Of a ManufaCtUriNG appaRatUs in mAintenANce for PreventinG aNY failuRE of a semICOnDuctOr manufacturing apPArATus. Maintenance May be dOnE EvEN For A maNufacturinG aPparaTUs with a LOw FAILurE Probability. To The contrary, NO maIntenaNcE maY Be done Even fOr MAny ManufacturiNg apParatuses Having HIgh failURe probaBilitiEs oN thE linE, GeNeRatInG ManY FaIluREs aT once.
MaiNtEnAnces Of a sEMICOnduCtoR manUfactUring apparatuS arE claSSifIed inTo two: ScheDuLed maIntenaNce suCh As uniform periodIc maIntenance Or pReDicTiVe maiNTenancE peRfoRmed whiLe monitORinG tHE OPeRation state of the apPaRATuS; and post-FailurE MaInTEnance peRfOrmEd evERY time A faiLUrE occurs.
TO managE MaInTenance CoMponenTs UseD in Post-fAIlurE maintEnance, neCessaRY components and NEcessary numbeRS oF THeM Are pRepAred in advanCe by THe exPeriENcE anD SkillS of a pErSOn IN charge.
In scheduled mAiNtenanCe, comPonents which sHould be prePAREd are obtAineD In ACcordance with mAinteNance conteNTs, and can Be prePared in aDvance to a CERtain degRee. howEveR, in ADVaNced preparatiON For mAiNtenancE coMponentS upOn oCcuRreNcE of a sporaDic failuRe, It Is VeRy dIfficULt to predIcT a nEcEssAry coMPonent And itS necEsSaRY amOunt.
To aCHiEVE sucCeSsFul iNveNtOry of MainTEnaNce compOnents, eveN coMPoneNtS wHich are Rarely used musT bE excessiveLy PrePared, aND Many compOnents become wasteful.
ManAGement dEpeNding On thE experienCe aNd skilLs oF A persoN in chaRge maY mAke A CErtaiN UNeXpeCtEd componenT UNavAilabLe Due tO limiteD personal skills, and THe aPparatus may haVe tO be sTOPpEd fOR a LOng TiME unTIL the component arRives.
A long-TiME sTop of the apPAraTuS on the mAnufactUring LIne leadS to a long mAnufacturInG terM ANd a Stop of prodUction owIng to the iDLe appARaTus, poSinG a seriOuS faUlt. To MinimiZE thE stop Time of ThE apparAtus, tHe ApparatuS must be immediately recovEred evEn if iT faIls and stoPs. THE rePair skill Is reQuired even For An aCcideNtaL FailuRe, whEReAs iT Is alsO impORtant to enSUrE a nECEsSary amount oF MAIntEnancE coMPonentS, as nEeded.
However, it is cONventionally veRy diFFIcuLt tO DeteRmIne necessary coMpoNeNTS and theiR nEcessary amoUnts withOuT The skIlls anD experIence of A PErSOn in chArge, And Manage maiNteNaNCe compoNeNtS Less in ExceSsIve invEntory WIthoUT Making some componEnt unAVAilabLE.
ThE prioR aRt also sUFferS a problem aBout the mainTenancE timE of thE semicoNdUctor mAnuFaCturing appARatus. UndeR the pResent cIrCumsTanCes, eacH porTIOn of tHe seMiConDuctor manUFAcTUrInG AppAratUs is mAiNtaiNed periodICally or uPon OCcurrenCe Of a FAIlure, aS DeSCRibed above. in pEriodIC MaintenancE, A porTIoN Which Hardly Fails mAy be maiNTaiNeD to reduNdaNTLy stop the Apparatus. tO thE cOntrAry, it is tOo Late
.
For this reason, a manuf acturing a ppara tus  wh ic h re adil y fails may be used  in processing and fai l dur in g  pro c es singof a pr o du c t , r es ul tin gi na def ect ive pro duct or pr olo ng ing the manu f ac turing ter m.The prior ar t d oes no tcon s iderthe  fail ure pr o babili ty of a m an u factur i ng appa r a tu s in  maintenance forp re v enting any fai lure o fa  s e m ico ndu ctor manuf ac turin g  appara t us . M ain t enance may be  done evenf ora manu fa ctu r ing ap parat us wit h a low fai lure  probabil ity. T o  the co n trary,no mai nte nan ce m a ybe  do ne eve n  f orm any  manufac tu ri ng ap para t u s e s ha vin g hi gh fa ilure probabi lit ieso n t he li ne, g ener at ing m any fa ilure sat once.
Mainte nanc es of a s emi co ndu ct or ma n ufactu rin g a pparatu s are c l ass if i e d  i nto two: scheduled  m a i nt enance s uch as un if o rm perio di c m aint e n anceor p r ed ictive m ainten a nc eperform ed  while  m oni tor ing t h e op eratio n stateof th e  apparatus; an d  post-failure ma i n te n ance  pe rformed eve ry t i me a  fai l ur e o c curs. 
To m an a ge maintenance compone nt s used  in p ost-failure m aintenance , n ecessary  com p on e nts and necess ary n umbers oft hem areprepa red in a dvance by t he exper ien ceand  sk i l ls  of a personi n  cha rg e.
In s che duled m ain ten anc e,co mponentswhich sh ou ld  b epre pared are obta in edin  ac corda n ce wit h mai nten an ce con tents,a nd c an b epr epar edin  adva ncet o a  certai n degree.  Ho w ever ,in  advanc ed preparatio nfor mainte na nce  compo n e nts upon  occurrence of a sporad i c failu re,  it i s ve ry diffic ult  to pr edi c t a ne cessar y com po nen t and i t s  n ece ss ary amount . Toachie ve  suc cessful  inventory of main t ena nce component s,even c om pon e nt s  wh ic h  ar e rarely used mus t be exces si v el y prepared ,  an dmany co mponent s bec o me wast eful.
Man agement d ep endi n g  on  the exper ience an d skillso f a p e rs on in  ch arge m ay  ma ke acertai n  un expec ted co mp onentunava il able due  to limited personal sk ills,and t heapparatus  ma y  ha ve to bestop ped for alon g t ime u nti l  thecomp o ne nta rrive s.
A long-time st opo f  t he apparatu s o n t he ma nuf a cturin g li ne leads to a lon g  manufacturing  ter m and  as topof  production ow ing  t o the idle  a pparatus, p osing ase r iousfault.  To mi nimizet h es top ti me o f t he appara tus ,t he appa ra tu s  mustbe i mm ediate ly rec o vere d even if it fails  ands t ops.T herepai rskill i s  req uired even  for an acc identa l fa ilure , where as  it is  al so  important to ensure  a ne cessary  a moun t o f main tena n c e com pone nt s,as needed . Ho w ev er ,  it  isconve nt iona lly veryd ifficult  to determi ne  ne c e ssaryc om p o nents andthe ir ne c e ssary amou n ts w i th o ut th e skil ls and  experi e nce  o f a per son i n charge,  and mana g e m ai nten ance com po nent sles sin excessive in ventorywithoutm a king s ome comp o nent u na vailable.
Th e pri or art als o suf fers ap rob lem  ab outthe  mai n tenance time of the semi cond uctor man ufact uring  a pparatus .  Und er the p r esent circums tances, each po r tio n  ofthe se mi conductor  ma n ufact urin g a ppar atu s is m aint a ined pe riod ically  orup on  occurren ce  of a f a ilur e , a s de scrib ed  a b ov e. In p eriodicmaint en ance, a p o rtion w hich  h ardly fails m ay be mainta in ed t o redu n dan tly s top the appa ratus. Tothe  contrary,  i t i s  to o lat e
.
For this_reason, a_manufacturing apparatus which readily_fails may_be_used in_processing_and fail during_processing of a_product, resulting in a_defective product or_prolonging_the manufacturing term.
The prior art does not consider the failure probability of a manufacturing_apparatus_in maintenance_for_preventing_any failure of a semiconductor_manufacturing apparatus. Maintenance may be_done even_for a manufacturing apparatus with a low failure_probability._To the contrary,_no maintenance may be done even for many manufacturing_apparatuses having high failure probabilities on_the line, generating_many_failures_at once.
Maintenances of a_semiconductor manufacturing apparatus are classified into_two: scheduled maintenance such as uniform_periodic maintenance or predictive maintenance performed while_monitoring the operation state of the_apparatus; and post-failure maintenance performed_every time_a failure occurs.
To manage maintenance_components used in_post-failure maintenance,_necessary components and_necessary numbers of them are prepared_in advance by_the experience and skills of a_person_in charge.
In scheduled_maintenance,_components_which should_be prepared are_obtained_in accordance_with_maintenance contents, and can be prepared_in_advance to a certain degree. However, in_advanced preparation for maintenance_components_upon occurrence of a_sporadic failure, it is very_difficult to predict a necessary component_and its_necessary amount.
To_achieve successful inventory of maintenance components, even components which are rarely_used must be excessively prepared, and_many components become wasteful.
Management_depending on_the_experience and skills_of_a person_in charge may make a certain unexpected_component unavailable_due to limited personal skills, and_the apparatus may have_to_be stopped for a long time_until the component arrives.
A long-time stop_of the apparatus on the_manufacturing_line_leads to a long manufacturing_term and a stop of production_owing to the_idle apparatus, posing a serious fault. To_minimize_the stop time of the apparatus,_the_apparatus must be immediately recovered even_if_it_fails and stops. The repair_skill is required even for an_accidental failure, whereas it is also important to ensure_a necessary amount_of maintenance components, as needed.
However,_it_is_conventionally very difficult to determine necessary components and their necessary_amounts without_the skills and_experience of a person in charge, and manage maintenance components_less in excessive inventory without making some_component unavailable.
The prior art also suffers a problem about the maintenance_time of the semiconductor manufacturing apparatus. Under the_present circumstances, each portion of the semiconductor_manufacturing apparatus is maintained_periodically_or upon occurrence of a failure, as_described_above._In_periodic maintenance, a_portion which hardly_fails may be_maintained to_redundantly stop the_apparatus. To_the contrary, it_is_too late