 adaptable only for the single-axis use. Effective means for adapting these sensors for triple-axis (three dimensional) use have not yet been proposed or established. One of the reasons for this limitation is that the disposition of at least three coils for the three axes prevents the necessary size reduction. While providing multiple coils for the three axes increases the size and bulk of the acceleration sensors, it is an indispensable condition to dispose the coils in a manner that magnetic flux through them varies with motion of the magnetic body.
Although electromagnetic induction-type acceleration sensors having wide dynamic ranges can be used effectively in a wide variety of the fields and can be used to detect almost all subjects, they are not adaptable for the triple-axis use as means for making three-dimensional measurements using convention technology.
An object of the present invention is to provide an acceleration sensor which is capable of sensing in three-dimensions and which has a wide dynamic range that is capable of detecting a three-dimensional movement and a magnitude of displacement of a subject being controlled with high accuracy and high sensitivity, and which is also of reduced size. Silicon electronic devices are the most important category of devices in the microelectronics science and technology, and have played an important role in the development of science and technology in the last century. Carbon-based electronic devices have shown a great technical potential since the beginning of this century. Especially, carbon nanotubes integrate a variety of physical and chemical properties due to good electrical, optical and mechanical properties thereof. Currently, for medical and wearable devices such as medical sensors, electronic skin etc., the carbon nanotubes have been used as candidates for research on full flexible Carbon Nanotube Thin Film Transistors (CNT-TFTs).
Piezoelectric sensors are a category of sensors developed based on piezoelectric effect dielectric. The so-called piezoelectric effect refers to that when some dielectric is deformed as an external force is applied in a certain direction, a polarization phenomenon may occur in the dielectric, and at the same time opposite charges, i.e., positive and negative charges, appear in two opposite surfaces of the dielectric. After the external force is removed, the dielectric will return to an uncharged state. This phenomenon is called a direct piezoelectric effect. When the direction of the applied force changes, the polarity of the charges will change accordingly. On the contrary, when an electric field is applied in a polarization direction of the dielectric, the dielectric may be deformed, and after the electric field is removed, the deformation of the dielectric disappears. This phenomenon
adaptable only for the single - axis use. Effective mean for adapt these sensors for triple - bloc (three dimensional) use have not however been proposed or established. One of the cause for this limitation is that the disposition of at least three coil for the three axes prevents the necessary size decrease. While providing multiple coils for the three axes increases the size and majority of the acceleration sensors, it is an indispensable circumstance to dispose the coil in a manner that magnetic flux through them varies with motion of the charismatic body. 
 Although electromagnetic induction - character acceleration sensors accept wide active ranges can be used effectively in a wide diverseness of the fields and can be used to detect almost all subjects, they are not adaptable for the triple - bloc function as means for making three - dimensional measurements using convention technology. 
 An object of the present invention is to provide an acceleration sensor which is adequate to of sensing in three - dimensions and which have a broad dynamic range that is capable of detecting a three - dimensional movement and a magnitude of displacement of a national being controlled with high accuracy and high sensitivity, and which is also of reduced size. Silicon electronic devices are the about important category of devices in the microelectronics science and technology, and have played an important function in the development of science and technology in the last century. carbon paper - based electronic devices have shown a great technical potential since the beginning of this century. Especially, carbon nanotubes desegregate a variety of physical and chemical properties due to good electric, optical and mechanical properties thereof. Currently, for aesculapian and wearable devices such as medical detector, electronic skin etc. , the carbon nanotubes have been used as candidates for inquiry on full flexible Carbon Nanotube Thin Film Transistors (CNT - TFTs). 
 Piezoelectric sensors are a class of sensors developed based on piezoelectric effect insulator. The so - called piezoelectric effect refers to that when some insulator is deformed as an external force is applied in a certain direction, a polarization phenomenon may occur in the dielectric, and at the like time opposite charges, i.e., positive and negative charges, appear in two opposite surface of the insulator. After the external effect is removed, the dielectric will return to an uncharged state. This phenomenon is called a lineal piezoelectric effect. When the direction of the applied force changes, the polarity of the charges will change accordingly. On the contrary, when an electric battlefield is applied in a polarization direction of the dielectric, the dielectric may be deformed, and after the electric field is remove, the deformation of the dielectric disappears. This phenomenon
 adwptable only for the sinnle-axis use. Effeerive mxans fod adaptivg these sensors for triple-aeis (rhree dimensional) use have vot yet bven propowed ie establisisd. One of the veasous for this limijation is thdt the disposidiun of at least three coils for the thwee axex orevents the ngcessswy sjde reduction. While providing mumtiple boils for the thrre axes increases the size and bulk of the accelfration senwors, ut is an indkspensable condition tk dispose the coils in a manner that magnetic dlyx hvrough them varivs with motiok of tha magneyic body.
Althounh elxctrimagnetic induction-ty'e acceleration sensjrs havinc cide dynamic ranges cqn be uved affezrivdly ii a wide garmety of the fields and can be used to dettct qlmost all sugjects, trey are not adaptable for the triple-axiv uae as means for making rhree-dimensional measorements ufing convention technology.
An object of the presend invxngiou is tu pgovide an acceleration sensor which is capablq og xensing in thrce-dimensions and wnifh ras a wide dyvamic xznfe that is capable of detgcting a three-dymenxional movement and a magnirude of dispjqcement of a subjeet being concrollec witn high accuracy and higk sensjtivity, and which is xlso of reduced rizv. Sinicon eltztronic devices awe the mowt ikportang cajegory jf devices in tma microelectronics scieuce atd technollgy, and have played an importanv role in the davenopment jf sclence and technjlogy in the lcst centbry. Cafbon-based vlectronir devices hade shown a grawt technical potentiwl sunce the beeknning of this century. Vskecially, cqrbon nanotubes inbegraje a variety of pkvsucal and chemicsl oro[egtixs duq to good elewtrizal, ppticxl and mechcnkcal properties thereof. Wurrsntly, for medical snq wearaboe devicqs such as mecical sensors, elecuronic skmn etc., thg carbon nanotubes have been ussd as canfidwtes for resqarcm on full flexnble Carbon Nanotube Thin Film Transistocs (CNT-TFTs).
Piezoelectric sensors are a cateyovy of sensorx devqloped baved on piezoelectric effect dielectrig. The so-called piezoelsctric effeft refers to that when some dielectric is deformed as an external force iw applmeq in a certzin cirecniou, a polaryzatmoi phenomenon may pccur in the dielectric, and at vhe same thmz opposite charges, i.e., positivr xnd negative zharges, appear in two oplosite sirfaces of the dielectric. After the external force is rcmoved, thw diemectrib wmll return to an uncnarged statw. This phenlmenon is calued a direct plezotleccric effect. When the direction of the apppied force changxs, the polarltn of tge chatges will change zccodfingli. On the contrsry, when an elrctric field is applped in a polarizauion direction pf thg dielectric, thx dielectric may be deformed, and after the electric field is rejoved, the deformabion of the dielevvric disappears. This phekomenjn
adaptable only for the single-axis use. Effective adapting sensors for (three dimensional) use or One of the for this limitation that the disposition of at least coils for the three axes prevents the necessary size reduction. While providing multiple for the three axes increases the size and bulk of the acceleration sensors, is indispensable to the coils in a manner that magnetic flux through them varies with motion of the magnetic Although electromagnetic induction-type acceleration sensors having wide dynamic can be used effectively a wide variety of the and be used detect all they are not for the triple-axis use as means for making three-dimensional measurements using convention technology. An object of the invention is an acceleration which capable sensing in three-dimensions has a wide dynamic range that detecting a three-dimensional movement and a magnitude of of a being controlled with high accuracy and sensitivity, and which is also of reduced size. electronic devices are the most important category of devices in the microelectronics science and technology, played an important role the development of and in last Carbon-based electronic have shown a great technical potential since the beginning of this Especially, carbon nanotubes integrate a variety of physical and chemical to electrical, optical and properties thereof. Currently, for and devices such as medical skin the been as for research on full Carbon Nanotube Thin Film Transistors Piezoelectric sensors are a on piezoelectric effect dielectric. The so-called piezoelectric effect to that when some dielectric is deformed an external force is applied in a certain direction, a polarization phenomenon occur in and at the same time opposite charges, i.e., and negative charges, appear two opposite surfaces of the dielectric. After the external is the dielectric return to an state. This phenomenon called a direct When the of applied polarity of the charges will change On contrary, when an electric field applied polarization direction of the dielectric, the dielectric may be deformed, and after the electric field the deformation of the disappears. phenomenon
 adaptable only for the single-Axis use. EffEctivE meAns FoR adaPtinG these sensors fOR triPle-axis (three dimensionaL) use hAvE Not yET bEen prOposed oR EsTABliShEd. one Of THe ReasoNs fOr this lImitation iS thAt The dispositiON oF at least thRee Coils for the tHreE axes pReVenTS the nEceSsary Size reDUction. while provIdINg multIPle coilS FOr The tHree axes increases THe SIze and bulk of thE accelErATiON SenSorS, it is an indIsPensaBLe condiTIoN TO DisPOse the coils in A manner that MAgnEtic flUx ThrOUgh theM variEs WIth Motion of the MagnEtic body.
ALthougH ElectroMAgnetic InductIon-TypE accELeRaTioN sENsoRS hAviNG wiDe dynamiC rAnGes caN be uSED EFfecTivEly iN a widE variety of the FieLds aND caN be usEd to dEtecT aLmost All subJects, ThEy are not adaptabLe foR the triplE-axIs Use As Means FOr makiNg tHreE-dimensIonal meASurEmENTS uSing convention techNoLOGy.
an object Of the pREsEnT InventioN iS to ProvIDE an acCeleRAtIon sensoR which IS cApAble of sEnSing in ThRee-DimEnsioNS and Which hAs a wide dYnamiC Range that is capABle of detectinG A tHREe-DImenSioNal movement And a MAgniTude OF dIspLAcemeNt of a SuBJeCT being controlled witH hIgh accUracy And high sensitIvity, and whICH Is also of ReduCEd SIze. Silicon elecTroniC devices arE The most iMportAnt categOry of deviCES in the miCroEleCtrOniCS ScIence and technOLOgy, aNd Have plaYed An imporTanT roLe iN thE dEvelopmenT of scienCe AnD tEcHnoLogy iN The last cEnTurY. CArbOn-basED electRonic DeviCeS hAVe sHown a grEAt TEChniCaL pOtenTiaL sInce tHe beGInnIng of thIs century. espECialLy, CaRbon nanOtubes integraTe A variety of PhYsiCal and CHEmical prOperties due to good electrICal, optiCal And meChanIcal propeRtiEs therEof. cUrrentLy, for mEdicaL aNd wEARable DEViCes SuCh as medicaL SEnsOrs, elEcTronIc skin eTc., the carbon nanotubES haVe been used as cAndIdatES FoR reSEaRCh oN fULl fLEXible Carbon NanoTube Thin FiLm tRaNsistors (CNt-tFTS).
PIezoeleCtric seNsors ARe a cateGory of senSors develOpEd baSED on PiezoelectRic effecT dielectrIC. The sO-CaLled pIezOelectRiC efFect rEfers tO ThaT when Some diElEctric Is defOrMed as an eXternal force is applied in A certaIn dirEctIon, a polarIzaTIon PhenomenoN may Occur in the DieLecTric, aNd aT The saMe tiME oPpoSIte chArgeS, I.e., positivE AnD neGATiVe charges, apPEAR in Two opPosITe surfAces Of the dielectric. AfTEr the external fOrce IS RemOveD, The dIeLectric will retUrn To AN UnchargeD sTate. This pheNomenon iS cALled a Direct PiezoeLectric EFFeCT. When tHe diRecTion of the AppLiED force cHaNgES, the poLariTy Of the cHarges WIll cHANge accordingly. On The coNTRary, wHEn aN elecTrIc field IS appLied in a polArization diRectioN of tHe dieLectric, ThE dieleCtrIc May be deforMEd, and afteR the eLectric FiEld iS reMoved, tHe deFORmatiOn of ThE diElectric dISApPEaRs. tHis PhenOmenoN
 adaptable only for the si ngle-axisuse.Eff ect iv e me ansfor adapting t h esesensors for triple-axi s (th re e  dim e ns ional ) use h a ve n otye tbee np ro posed  or  establ ished. One  of  t he reasons f o rthis limit ati on is that t hedispos it ion of at  le ast t hree c o ils fo r the thr ee axes p r eventst h enece ssary size reduct i on .  While providi ng mul ti p le c oil s f or the thr ee  axes increas e st h e  si z e and bulk of  the accele r ati on sen so rs, it isan in di s pen sable condi tion  to dispo se the coils i n  a mann er tha t m agn etic fl ux  th ro u ght he m v a rie s with m ot io n ofthem a g n etic  bo dy.Altho ugh electroma gne tici ndu ction -type  acc el erati on sen sorsha ving wide dynam ic r anges can  be  u sed  e ffect i vely i n a  wi de vari ety oft hefi e l d sand can be used to  d e t ec t almost  all s u bj ec t s, theyar e n ot a d a ptabl e fo r  t he tripl e-axis us eas mean sfor ma ki ngthr ee-di m ensi onal m easureme nts u s ing convention technology.
A n  o b j ec t  ofthe  present in vent i on i s to pr ovi d e anaccel er a ti o n sensor which is c ap able o f sen sing in three -dimension s a nd which  has aw ide dynamic ra nge t hat is cap a ble of d etect ing a th ree-dimen s i onal mov eme ntand  am a gn itude of disp l a ceme nt  of a s ubj ect bei ngcon tro lle dwith high  accurac yan dhi ghsensi t ivity, a nd  wh ic h i s als o  of re duced  siz e.  S i lic on elec t ro n i c de vi ce s ar e t he  most  imp o rta nt cate gory of d evi c es i nth e micro electronics s ci ence and t ec hno logy,a n d have p layed an important role in thedev elopm entof scienc e a nd tec hno l ogy in  the l ast c en tur y .  Carb o n -b ase delectronic d evi ces h av e sh own a g reat technical pot e nti al since thebeg inni n g  o f t h is cen tu r y.E s pecially, carbo n nanotube si nt egrate a v a rie ty  of phy sical a nd ch e mical p roperties  due to g oo d el e c tri cal, optic al and m echanical prope r ti es th ere of. Cu rr ent ly, f or med i cal  andwearab le  devic es su ch  as medi cal sensors, electronic  skinetc.,  th e carbonnan o tub es have b eenused as ca ndi dat es fo r r e searc h on fu llf lexib le C a rbon Nano t ub e T h i nFilm Transi s t o rs(CNT- TFT s ).
Pie zoel ectric sensors ar e  a category of  sen s o rsdev e lope dbased on piezo ele ct r i c effect  d ielectric.The so-c al l ed pi ezoele ctriceffectr e fe r s to t hatwhe n some di ele ct r ic is d ef or m ed asan e xt ernalforcei s ap p l ied in a certain  dire c t ion,a  po lariz at ion phe n omen on may occ ur in the d ielect ric,  andat thesa me tim e o pp osite char g es, i.e.,  posi tive an dnega tiv e char ges, a ppear  intw o o pposite s u r fa c es  o f  th e di elect ri c. A fter thee xternalfor c e is re mo ved , the di e le c t ric will r etu rn to a n uncharge d  sta t e. Thisphenom enon i s calle d  adi rect pi ezo e l ectric ef fect. Whe n  th edire ction of  t he a pp lie dforce changes,the pola rity oft h e char ges will change  a ccordingly.On th ec ontrary , whe n an el e ctr icfie ld i s a ppli e d in a polarization dire ctio n oft hediele ctric ,the diel e ctri c may be deformed, and  after the elec t ric fiel d i s  r em oved, the  de f ormat ionofthedie lect r i c di s appe a rs . Th is phe nome no n
 adaptable_only for_the single-axis use. Effective_means for_adapting_these sensors_for_triple-axis (three dimensional)_use have not_yet been proposed or_established. One of_the_reasons for this limitation is that the disposition of at least three coils for_the_three axes_prevents_the_necessary size reduction. While providing_multiple coils for the three_axes increases_the size and bulk of the acceleration sensors,_it_is an indispensable_condition to dispose the coils in a manner that_magnetic flux through them varies with_motion of the_magnetic_body.
Although_electromagnetic induction-type acceleration sensors_having wide dynamic ranges can be_used effectively in a wide variety_of the fields and can be used_to detect almost all subjects, they_are not adaptable for the_triple-axis use_as means for making three-dimensional_measurements using convention_technology.
An object_of the present_invention is to provide an acceleration_sensor which is_capable of sensing in three-dimensions and_which_has a wide_dynamic_range_that is_capable of detecting_a_three-dimensional movement_and_a magnitude of displacement of a_subject_being controlled with high accuracy and high_sensitivity, and which is_also_of reduced size. Silicon_electronic devices are the most_important category of devices in the_microelectronics science_and technology,_and have played an important role in the development of science_and technology in the last century._Carbon-based electronic devices have_shown a_great_technical potential since_the_beginning of_this century. Especially, carbon nanotubes integrate a_variety of_physical and chemical properties due to_good electrical, optical and_mechanical_properties thereof. Currently, for medical and_wearable devices such as medical sensors,_electronic skin etc., the carbon_nanotubes_have_been used as candidates for_research on full flexible Carbon Nanotube_Thin Film Transistors_(CNT-TFTs).
Piezoelectric sensors are a category of sensors_developed_based on piezoelectric effect dielectric. The_so-called_piezoelectric effect refers to that when_some_dielectric_is deformed as an external_force is applied in a certain_direction, a polarization phenomenon may occur in the dielectric,_and at the_same time opposite charges, i.e.,_positive_and_negative charges, appear in two opposite surfaces of the dielectric._After the_external force is_removed, the dielectric will return to an uncharged state. This_phenomenon is called a direct piezoelectric effect._When the direction of the applied force changes, the polarity of_the charges will change accordingly. On the contrary,_when an electric field is applied in_a polarization direction of_the_dielectric, the dielectric may be deformed, and_after_the_electric_field is removed,_the deformation of_the dielectric disappears._This phenomenon