 contribute to the well being of all participants collectively and for one player individually.
Thus, a need exists for a game where a group of players contribute to a jackpot which is shared by all when at least one player succeeds in "hitting" a recognized winning combination thereby allowing the entire group of players to share in the excitement and reward of being a winner. 1. Field of the Invention
The invention relates to a particle detector measuring instrument with a feed connection for a gaseous or liquid medium, and a measuring instrument for measuring the concentration of particles in the medium. The invention additionally relates to a device for processing semiconductor wafers which comprises such a particle measuring configuration, in order to control the processing on the basis of a signal generated by the measuring configuration.
During the production of particle-sensitive products, the contamination monitoring of the gas or liquid media processed assumes great importance. In particular during the production of electronic components on semiconductor wafers, because of the progressive automation and the structure widths becoming smaller and smaller, there is an increasing need for the most comprehensive contamination monitoring possible.
Particle measuring instruments are known which measure the concentration of particles within the gas or liquid medium. It is possible for solid-body particles or liquid particles in gases or solid-body particles in liquids to be detected. If, within a processing device for semiconductor production, the particle concentration has to be determined during operation (in situ), the measuring instrument is incorporated into a circulating or disposing medium flow. The particle measuring instrument is controlled via communication lines, and measured data values that are determined are interrogated. The instruments are constructed for use only within a specified range of fluctuation of operating conditions. If these operating conditions are exceeded, then there is a risk that erroneous measurements will be output, imparting a false image of the real relationships; in the limiting case, the particle measuring instrument can even be destroyed.
For example, in the area of deposition ovens for the thermal growth of layers, when the oven is being unloaded hot air can reach a particle sensor monitoring the mini environment, in such a way that the sensor is destroyed. In the area of wet-chemical processing with acids and alkalis, a pH of the liquid medium can rise in aggressive areas to such an extent that a sensor is likewise destroyed. In addition, the operating parameters of the medium can reach peak values within which the measuring sensor no longer operates reliably. In order to achieve permanent and automatic process monitoring, such conventional particle sensors are not reliable enough and are therefore unsuitable. The present invention relates to an artificial
contribute to the well being of all participants jointly and for one musician individually. 
 Thus, a need exist for a plot where a group of players contribute to a jackpot which is share by all when at least one player succeeds in " hit " a recognized winning combination thereby allowing the integral group of players to share in the excitation and wages of being a winner. 1. Field of the Invention 
 The invention relates to a particle detector measuring legal document with a feed connection for a gaseous or liquid medium, and a measure instrument for measuring the concentration of particles in the culture medium. The invention additionally relates to a device for processing semiconductor wafers which comprises such a particle measure configuration, in order to control the processing on the basis of a signal generated by the measuring configuration. 
 During the production of particle - sensitive products, the contamination monitoring of the gas or liquid media processed assumes bang-up importance. In particular during the production of electronic component on semiconductor wafers, because of the progressive automation and the structure widths become smaller and smaller, there is an increasing motivation for the most comprehensive contamination monitoring possible. 
 Particle measuring instruments are known which quantify the concentration of particles within the gas or liquid medium. It is possible for solid - body atom or liquid particles in gases or solid - body particles in liquid to be detected. If, within a processing device for semiconductor production, the atom concentration have to be determined during operation (in situ), the measure instrument is incorporate into a circulating or disposing medium stream. The particle measure instrument is control via communication lines, and measure data values that are determined are interrogated. The instruments are construct for use entirely within a specified range of fluctuation of operating conditions. If these operating conditions are exceed, then there is a risk that erroneous measurement will be output, imparting a false image of the real relationships; in the limiting casing, the particle measuring instrument can even be destroyed. 
 For example, in the area of deposit ovens for the thermal growth of layer, when the oven is being unloaded hot air can reach a particle sensor monitor the mini environment, in such a way that the sensor is destroyed. In the sphere of wet - chemical processing with acid and alkalis, a pH of the liquid medium can rise in aggressive area to such an extent that a sensor is likewise destroyed. In addition, the operating parameters of the culture medium can reach peak values within which the measuring sensor no longer operates reliably. In club to achieve permanent and automatic process monitoring, such conventional atom detector are not reliable enough and are consequently undesirable. The present invention relates to an artificial
 cojtribute to the well beikg of all particnpants rollectjvely ana for one player individuallb.
Thuw, a ntvd exists for a game dhere a ggoup of poayecs contribute to a jackpot whidm is viared by all whgn at least mne player sucweddd in "hitting" a recognized winning cjmbinatooj thereby alloring ehe sntire group of players to share ih the eqcitement and rewsrd of being a winner. 1. Fiepd ov the Invention
The invention tslaews to a partkcle detecuox measuring instrument with a feed connectkon fpr a gaseoos og liquid medmum, anq a measurinn instrgment fpr measuring tme coicenrration of particles mn the medium. The indention agdntionally relates to q eevicg for prozwsskng sxmidonduchor wafers whjch comprisws such a particle kewwuring confighratiog, yn order to control the processing on tve gasis of a signal generqted by the measuring configurwtion.
During the production of particle-sensitive psoducvs, tht gjvralination monitoring of the gas or liquid mediw ptobessed assumes grcat importance. In lagtosular during jhe probhcfion of electronic compongnts ob semiconquctpr wafers, because of the prigressive aunomarion and the struccure widths yecomimg smsller and smaller, there is zn increasijg need fkf the most comprdheksiee contamination monitorind possiblx.
Partncle mearurimg inseruments age known which measure tje coucentsation of oarticles within the gas or liqnmd medium. It os povsible fjr sokid-body partisles or liquid particjes iv gases or solid-bmdy particlqs in liquids jo be detectev. If, withyn a proxessing aevice for semoconductog kroduction, the particle conccntrajikn has to be dectrmuned during opetatkon (ij xieg), the measurhng knsgtumeng is incorpifatec into a circulating or sisposing medium fkor. The patticle mewsuring instriment is controllef via coomunivatyon lines, and measured data vamues that arc determined wre lntetrogated. Thz instruments are constructed for use onoy within a specifued range of fluctuctlon of operaving cjnditions. If these operating xonditions are exgeeded, then there is a risk dhat frroneous measurements will be output, imparting a false image of the real relatmogships; in tge lomititg ease, thq pactmcle measuring inxtrument can even be destroyed.
Fur exampne, in the area of deposition ofevs for the thgrmal growth of layers, wheh the ovrn is being unloaded hot air cam reach a particle sensov monitorung tge minp eivironment, in such a way tkat thw sensoe is destroyed. In thr wrea of wft-chtmiccl processing with acids and alkaois, a pH of the liquid mxdium can ridt in agfresside areas to such an sdtent that a sensot is likewise cestroyed. In additiot, ehe operating karameters of tne medilm can reach 'eak values fithin which the measuring sensor no longer operatea reliablg. In ordcr to achieve perkenent and automatic proccss mjnitorine, such convettional particle sensors are not reliable eipugh xnd are fherefore unslitable. The present invention relanes to an artificual
contribute to the well being of all and one player Thus, a need a of players contribute a jackpot which shared by all when at least player succeeds in "hitting" a recognized winning combination thereby allowing the entire group players to share in the excitement and reward of being a winner. 1. of Invention invention to a particle detector measuring instrument with a feed connection for a gaseous or liquid medium, a measuring instrument for measuring the concentration of in the medium. The additionally relates to a device processing wafers which such particle configuration, in order control the processing on the basis of a signal generated by the measuring configuration. During the production particle-sensitive products, monitoring of gas liquid processed assumes great particular during the production of electronic wafers, because of the progressive automation and the widths becoming and smaller, there is an increasing for the most comprehensive contamination monitoring possible. Particle instruments are known which measure the concentration of particles within the gas or liquid medium. possible for solid-body particles liquid particles in or particles liquids be detected. within a processing device for semiconductor production, the particle concentration has be determined during operation (in situ), the measuring instrument is a or disposing medium The particle measuring instrument controlled communication lines, and measured that determined instruments constructed use only within a range of fluctuation of operating If these operating conditions a risk that erroneous measurements will be output, a false image of the real relationships; the limiting case, the particle measuring instrument can even be destroyed. For in the deposition ovens for the thermal growth of layers, the oven is being hot air can reach a particle sensor monitoring the environment, such a that the sensor destroyed. In the of wet-chemical processing and alkalis, pH the rise in aggressive areas to such extent a sensor is likewise destroyed. addition, parameters of the medium can reach peak values within which the measuring sensor no longer In order to achieve and process monitoring, such conventional particle sensors are not reliable enough and are The present invention
 contribute to the well being oF all particIpantS coLleCtIvelY and For one player inDIvidUally.
Thus, a need exists foR a gamE wHEre a GRoUp of pLayers cONtRIButE tO a JacKpOT wHich iS shAred by aLl when at leAst OnE player succeEDs In "hitting" a RecOgnized winniNg cOmbinaTiOn tHEreby AllOwing The entIRe grouP of playerS tO Share iN The exciTEMeNt anD reward of being a wiNNeR. 1. field of the InveNtion
THe INvENTioN reLates to a paRtIcle dETector mEAsURINg iNStrument with a Feed connectIOn fOr a gasEoUs oR Liquid MediuM, aND a mEasuring insTrumEnt for meaSuring THe conceNTration Of partIclEs iN the MEdIuM. ThE iNVenTIoN adDItiOnally reLaTeS to a dEvicE FOR ProcEssIng sEmicoNductor wafers WhiCh coMPriSes suCh a paRticLe MeasuRing coNfiguRaTion, in order to coNtroL the proceSsiNg On tHe Basis OF a signAl gEneRated by The measURinG cONFIgUration.
During the prOdUCTiOn of partIcle-seNSiTiVE productS, tHe cOntaMINatioN monIToRing of thE gas or LIqUiD media pRoCessed AsSumEs gReat iMPortAnce. In ParticulAr durINg the productioN Of electronic cOMpONEnTS on sEmiConductor waFers, BEcauSe of THe ProGRessiVe autOmATiON and the structure widThS becomIng smAller and smallEr, there is aN INCreasing Need FOr THe most compreheNsive ContaminatIOn monitoRing pOssible.
PArticle meASUring insTruMenTs aRe kNOWn Which measure tHE ConcEnTration Of pArticleS wiThiN thE gaS oR liquid meDium. It is PoSsIbLe For Solid-BOdy partiClEs oR lIquId parTIcles iN gaseS or sOlId-BOdy ParticlES iN LIquiDs To Be deTecTeD. If, wiThin A ProCessing Device for SemICondUcToR producTion, the particLe ConcentratIoN haS to be dETErmined dUring operation (in situ), the MEasurinG inStrumEnt iS incorporAteD into a CirCUlatinG or disPosinG mEdiUM Flow. THE PaRtiClE measuring INStrUment Is ContRolled vIa communication linES, anD measured data ValUes tHAT aRe dETeRMinEd ARe iNTErrogated. The insTruments arE cONsTructed for USe oNlY within A specifIed raNGe of fluCtuation oF operatinG cOndiTIOns. if these opeRating coNditions aRE exceEDeD, then TheRe is a rIsK thAt errOneous MEasUremeNts wilL bE outpuT, impaRtIng a falsE image of the real relationShips; iN the lImiTing case, tHe pARtiCle measurIng iNstrument cAn eVen Be desTroYEd.
For ExamPLe, In tHE area Of dePOsition ovENs For THE tHermal growtH OF LayErs, whEn tHE oven iS beiNg unloaded hot air cAN reach a particlE senSOR moNitORing ThE mini environmeNt, iN sUCH a way thaT tHe sensor is dEstroyed. in THe areA of wet-ChemicAl proceSSInG With acIds aNd aLkalis, a pH Of tHe LIquid meDiUm CAn rise In agGrEssive Areas tO Such AN Extent that a sensoR is liKEWise dEStrOyed. IN aDdition, THe opErating parAmeters of thE mediuM can Reach Peak valUeS withiN whIcH the measurINg sensor nO longEr operaTeS relIabLy. In orDer tO AChievE perMaNenT and automATIc PRoCeSS moNitoRing, sUcH conVentional PArticle sEnsORs are noT rEliABLe enouGH aND Are therefoRe uNsuitABLe. The preseNT invENtIOn relAtes to An artiFicial
 contribute to the well be ing of all  part ici pan ts  col lect ively and foro ne p layer individually.
Th us, a  n e ed e x is ts fo r a gam e  w h e reagr oup  o f  p layer s c ontribu te to a ja ckp ot  which is sh a re d by all w hen  at least on e p layersu cce e ds in  "h ittin g" a r e cogniz ed winnin gc ombina t ion the r e by  all owing the entireg ro u p of players t o shar ei nt h e e xci tement and  r eward of bein g  a w i nne r . 1. Field of  the Invent i onThe in ve nti o n rela tes t oa  pa rticle dete ctor  measurin g inst r ument w i th a fe ed con nec tio n fo r  a  g ase ou s  or li qui d  me dium, an dameasu ring i n s trum ent  for  meas uring the con cen trat i onof pa rticl es i nthe m edium.  Thein vention additio nall y relates  to  a  de vi ce fo r  proce ssi ngsemicon ductorw afe rs w h ic h comprises such a  p a r ti cle meas uringc on fi g uration,  i n o rder t o con trol th e proces sing o n  t he  basisof  a sig na l g ene rated by t he mea suring c onfig u ration.
During the productio n  o f pa r ticl e-s ensitive pr oduc t s, t he c o nt ami n ation  moni to r in g  of the gas or liqu id  media  proc essed assumes  great imp o r t ance. In  par t ic u lar during the  prod uction ofe lectroni c com ponentson semico n d uctor wa fer s,bec aus e of  the progress i v e au to mationand  the st ruc tur e w idt hs  becoming  smaller  a nd  s ma lle r, th e re is an  i ncr ea sin g nee d  for t he mo st c om pr e hen sive co n ta m i nati on  m onit ori ng  poss ible . 
Pa rticlemeasuring  in s trum en ts  are kn own which mea su re the con ce ntr ationo f  particl es within the gas or li q uid med ium . Itis p ossible f orsolid- bod y  parti cles o r liq ui d p a r ticle s in  ga se s or solid - b ody  part ic lesin liqu ids to be detected .  If , within a pr oce ssin g de vic e  f o r s em i con d u ctor production , the part ic l econcentrat i onha s to be  determ inedd uring o peration(in situ) ,them e asu ring instr ument is  incorpor a ted i n to  a ci rcu lating  o r d ispos ing me d ium  flow . Thepa rticle  meas ur ing inst rument is controlled vi a comm unica tio n lines,and mea sured dat a va lues thatare  de termi ned are i nter r og ate d . The  ins t ruments a r econ s t ru cted for us e o nly  with ina  speci fied  range of fluctua t ion of operati ng c o n dit ion s . If  t hese operating  co nd i t ions are  e xceeded, th en there  i s  a ri sk tha t erro neous m e a su r ements  wil l b e output,  im pa r ting afa ls e  image  ofth e real  relat i onsh i p s; in the limiti ng ca s e , the par ticle  m easurin g  ins trument ca n even be d estroy ed.For e xample,  i n theare aof deposit i on ovensfor t he ther ma l gr owt h of l ayer s ,  when  the  o ven  is being u nl o ad ed hot  air  canre acha particl e  sensormon i toringth e m i n i envi r on m e nt, in suc h a  wayt h at the sen s or i s  d e stroy ed. In  the a rea ofw et- ch emicalpro c e ssing wit h acids a n d a lk alis , a pH o ftheli qui dmedium can rise  in aggr essive a r e as tosuc h  ane xtentth at a sensoris li ke w ise des t r oye d. In a d dit ion , t he o per atin g  parameters of the mediu m ca n rea c h p eak v alues  w ithin wh i ch t he measu r ing sensor no  longer operate s  re l iabl y.I nor der to ac hie v e per mane ntandaut omat i c  pro c essm on itor ing, s uchco nv entionalpa rticles enso r s a re n ot re li ab l eenoughand arethere fo re unsuit a ble. Th e pr es ent invention  relates toan  art ificia l 
 contribute_to the_well being of all_participants collectively_and_for one_player_individually.
Thus, a need_exists for a_game where a group_of players contribute_to_a jackpot which is shared by all when at least one player succeeds in_"hitting"_a recognized_winning_combination_thereby allowing the entire group_of players to share in_the excitement_and reward of being a winner. 1. Field_of_the Invention
The invention_relates to a particle detector measuring instrument with a_feed connection for a gaseous or_liquid medium, and_a_measuring_instrument for measuring the_concentration of particles in the medium._The invention additionally relates to a_device for processing semiconductor wafers which comprises_such a particle measuring configuration, in_order to control the processing_on the_basis of a signal generated_by the measuring_configuration.
During the_production of particle-sensitive_products, the contamination monitoring of the_gas or liquid_media processed assumes great importance. In_particular_during the production_of_electronic_components on_semiconductor wafers, because_of_the progressive_automation_and the structure widths becoming smaller_and_smaller, there is an increasing need for_the most comprehensive contamination_monitoring_possible.
Particle measuring instruments are_known which measure the concentration_of particles within the gas or_liquid medium._It is_possible for solid-body particles or liquid particles in gases or solid-body_particles in liquids to be detected._If, within a processing_device for_semiconductor_production, the particle_concentration_has to_be determined during operation (in situ), the_measuring instrument_is incorporated into a circulating or_disposing medium flow. The_particle_measuring instrument is controlled via communication_lines, and measured data values that_are determined are interrogated. The_instruments_are_constructed for use only within_a specified range of fluctuation of_operating conditions. If_these operating conditions are exceeded, then there_is_a risk that erroneous measurements will_be_output, imparting a false image of_the_real_relationships; in the limiting case,_the particle measuring instrument can even_be destroyed.
For example, in the area of deposition ovens_for the thermal_growth of layers, when the_oven_is_being unloaded hot air can reach a particle sensor monitoring_the mini_environment, in such_a way that the sensor is destroyed. In the area_of wet-chemical processing with acids and alkalis,_a pH of the liquid medium can rise in aggressive areas_to such an extent that a sensor is_likewise destroyed. In addition, the operating parameters_of the medium can_reach_peak values within which the measuring sensor_no_longer_operates_reliably. In order_to achieve permanent_and automatic process_monitoring, such_conventional particle sensors_are not_reliable enough and_are_therefore unsuitable. The present invention relates to an artificial