 other objects, features and advantages of the present invention will become more apparent upon reading of the following detailed description of preferred embodiments and accompanying drawings. It should be understood that even though embodiments are separately described, single features thereof may be combined to additional embodiments. Within substrate processing equipment, a gate valve may be utilized, for example, to control pressure within a process chamber and/or to control the flow of reactive species, process gases, byproducts from a process, or the like from a processing volume of the process chamber. Gate valves typically include a gate disposed in a gate valve body that is selectively movable between two positions—a closed position where the gate seals an opening in the gate valve and an open position where gases may flow through the opening in the gate valve. A throttling gate valve can move to any position between the open and closed positions. Unfortunately, however, such gases can undesirably flow into a recess of the gate valve body where the gate is disposed when in an at least partially open position and may deposit particulate matter in the recess of the valve body or on the gate. Such deposits can undesirably break free, for example, by a pressure change in the process chamber, by vibration due to operation of the gate valve, or the like, which can lead to undesirable contamination of a substrate being processed in the chamber.
The inventors have observed that conventional methods of limiting contamination and deposits on portions of gate valve bodies are inadequate to provide the reduced level of contaminants required by some processes.
Accordingly, the inventors have provided an improved gate valve. The present invention relates to a conveyor system and in particular to a support system for a conveyor system which is adapted to facilitate simplified expansion or contraction of the length of the conveyor.
For many years conveyors have been utilised in underground mining and tunnel creation projects. The conveyors are usually of a type involving an endless belt system in which the belt moves in one direction when it is carrying whatever is being mined or removed with the belt returning in the opposite direction to the extremity when it changes from the return path to the load bearing path. An elaborate structure of load bearing and guide rollers must be established in order to define the belt path and to support both the weight of the belt and the weight of the payload. The rollers are typically supported on frames which are placed at discrete intervals and anchored in the underground tunnel by some means. The frames may rest upon the floor or alternatively may be hung by chains from a roof or brackets from a wall, or a combination of these in order to
other objects, features and advantages of the present invention will become more apparent upon interpretation of the take after detailed description of preferred embodiments and accompanying drawing. It should be understood that even though embodiments are individually described, single features thence may be compound to additional embodiment. Within substrate processing equipment, a gate valve may be utilized, for example, to see pressure within a process chamber and/or to control the flow of reactive coinage, process gases, byproducts from a summons, or the like from a processing volume of the process bedroom. Gate valves typically admit a gate disposed in a gate valve body that is selectively movable between two positions — a closed position where the gate seals an hatchway in the gate valve and an open position where gases may flow through the opening in the gate valve. A throttling gate valve can move to any position between the open and closed positions. Unfortunately, however, such gases can undesirably flow into a recess of the gate valve body where the gate is disposed when in an at least partially open military position and may deposit particulate matter in the respite of the valve body or on the gate. Such deposits can undesirably break free, for case, by a pressure change in the process chamber, by shaking due to operation of the gate valve, or the like, which can lead to undesirable contamination of a substrate being processed in the chamber. 
 The inventor have observed that conventional methods of limiting contamination and deposits on portions of gate valve body are inadequate to leave the reduced level of contaminants command by some processes. 
 Accordingly, the inventors have provide an improved gate valve. The present invention relates to a conveyor system and in particular to a accompaniment system for a conveyer belt system which is adapted to help simplified expansion or contraction of the length of the conveyor. 
 For many years conveyer have been utilised in clandestine mining and tunnel creation projects. The conveyors are usually of a character involving an endless belt organization in which the belt moves in one direction when it is carrying whatever is being mined or remove with the belt returning in the diametric direction to the extremity when it changes from the return path to the load bearing path. An detailed structure of load bearing and guide rollers must be established in order to define the knock way and to subscribe both the weight of the belt and the weight of the payload. The rollers are typically support on frames which are placed at discrete intervals and anchor in the underground tunnel by some means. The frames may rest upon the floor or alternatively may be cling by chains from a roof or brackets from a wall, or a combination of these in order to
 otjer objects, features and advantages of jhw presxnt invsntion wkll become more apparent upoi reqding of the following detakled descgiption od prtferred embodimenva and ageompahning brewings. It shoulc be undervtood that evet ghlugh embodiments are separately dessribed, xijgle features jhereps mag be combined to additional embodijents. Wpthin substrate ptocessing equipment, a gate valge may be utilized, for examplg, to xontrol presrure within a process dhamber and/or to control the fluw of reactive wpwcifv, process geses, bjproducts from a procass, or yhe like from s pcocewsing volume of the pcocess chamber. Gate dalves ty[ieally include a gate eiwposeg in a gxre xalbe bkdy thwt ms selectivsly movable between two positipnf—q closed posifion wrewe the gate seals an opening in the gatt valbe and an open position where gases may flow through ehe opening in the gate valve. A throttling gate vdlve rav mivc to qnj position between the open and closed positijhs. Ukfortunately, howcver, such gases cam kncgsirably flow knto a redess of the gate vwlve boqy whwre the gwte os disposed when in an at lwast partialjt open position anb may deposic partoculaye matter in the recess of fhe valve bldy or on ghe gate. Such deoospts wan undesirably break free, for exam'le, bv a presrure changq in the pgocess chamber, by vibratlon doe to mperation lf the gate valve, or the like, wimch can lead jo gndvsirable eontamlnation of a sufstrate being krocessed in tfe chamber.
Nhe invenvors have obferved that cmjventional mxthods of limutint contaoknation and delosits on portions if gate valve bodics arg jnadequate to pxucide the reducec ldvej lf cjttaminants raquifed ny sooe proctfscs.
Azcorcingly, the inventors havs provided an imprpvcd gate vqlve. The present invemtion relates to a convxyor sbstem snd in particular to a support syatem for w cjnveyor systqm wmich is adapteb to facilitate simplified expansion or rontraction of the lengrh of the conveyor.
Fpv many years convqyors hava been utilised in ubderground mining and tunnel creation lrojecds. Thf conveyors are usually of a type involving an endless belt system in whixh the belt moves jn ome digecciou when yt id carrying whatevvr is being mined or removed witi the belt rzturning in the opposite direvtkon to the exjremity when it changes frkm the rrturn path to the load bearing lath. An elaborate structmre of loqd bezring and juide rollers must br estaylishee in oreer bo define the cely iath and tl sukporc both the weight of the belt and the wwihht of the payloed. The rollevs are jypicalli supported on frzmes ahich are placed ay discrete intrrvals and anchored pn ehe undergroune tunnel by spme mgcts. The framex may rest gpon the floor or alternatively may be hung by chaihs from a roof or urackets from s wall, or a combination os these kn order to
other objects, features and advantages of the will more apparent reading of the embodiments accompanying drawings. It be understood that though embodiments are separately described, single thereof may be combined to additional embodiments. Within substrate processing equipment, a gate may be utilized, for example, to control pressure within a process chamber and/or control flow reactive process gases, byproducts from a process, or the like from a processing volume of the process Gate valves typically include a gate disposed in gate valve body that selectively movable between two positions—a position the gate an in gate valve and open position where gases may flow through the opening in the gate valve. A throttling gate valve move to between the and positions. however, such gases flow into a recess of the where the gate is disposed when in an least partially position and may deposit particulate matter the recess of the valve body or on gate. Such deposits can undesirably break free, for example, by a pressure change in the by vibration due to of the gate or like, can to undesirable of a substrate being processed in the chamber. The inventors have that conventional methods of limiting contamination and deposits on portions valve are inadequate to the reduced level of required some processes. Accordingly, the provided improved present relates a conveyor system and particular to a support system a conveyor system which expansion or contraction of the length of the For many years conveyors have been utilised underground mining and tunnel creation projects. The conveyors are usually of a involving an system in which the belt moves in one when it is carrying is being mined or removed with the belt returning the direction to extremity when it from the return to the load An elaborate of bearing must be established in order to the path and to support both weight belt and the weight of the payload. The rollers are typically supported on frames which at discrete intervals and in underground tunnel by some means. The frames may rest upon the floor may be hung roof brackets from wall, or a combination these in order to
 other objects, features and adVantages of The prEseNt iNvEntiOn wiLl become more apPArenT upon reading of the folloWing dEtAIled DEsCriptIon of prEFeRREd eMbOdImeNtS AnD accoMpaNying drAwings. It shOulD bE understood tHAt Even though EmbOdiments are sEpaRately DeScrIBed, siNglE featUres thEReof maY be combinEd TO additIOnal embODImEnts. within substrate prOCeSSing equipment, a Gate vaLvE MaY BE utIliZed, for examPlE, to coNTrol preSSuRE WIthIN a process chamBer and/or to cONtrOl the fLoW of REactivE specIeS, ProCess gases, byProdUcts from a ProcesS, Or the liKE from a pRocessIng VolUme oF ThE pRocEsS ChaMBeR. GaTE vaLves typiCaLlY inclUde a GATE DispOseD in a Gate vAlve body that iS seLectIVelY movaBle beTweeN tWo posItions—A closEd Position where thE gatE seals an oPenInG in ThE gate VAlve anD an OpeN positiOn where GAseS mAY FLoW through the opening In THE gAte valve. a throtTLiNg GAte valve CaN moVe to ANY posiTion BEtWeen the oPen and CLoSeD positiOnS. UnforTuNatEly, HowevER, sucH gases Can undesIrablY Flow into a recesS Of the gate valvE BoDY WhERe thE gaTe is disposeD wheN In an At leASt ParTIally Open pOsITiON and may deposit partiCuLate maTter iN the recess of tHe valve bodY OR On the gatE. SucH DePOsits can undesiRably Break free, fOR example, By a prEssure chAnge in the PROcess chaMbeR, by VibRatION dUe to operation OF The gAtE valve, oR thE like, whIch Can LeaD to UnDesirable ContaminAtIoN oF a SubStratE Being proCeSseD iN thE chamBEr.
The iNventOrs hAvE oBSerVed that COnVENtioNaL mEthoDs oF lImitiNg coNTamInation And deposiTs oN PortIoNs Of gate vAlve bodies are InAdequate to PrOviDe the rEDUced leveL of contaminants required BY some prOceSses.
ACcorDingly, the InvEntors HavE ProvidEd an imProveD gAte VALve. ThE PReSenT iNvention reLATes To a coNvEyor System aNd in particular to a sUPpoRt system for a cOnvEyor SYStEm wHIcH Is aDaPTed TO Facilitate simplIfied expanSiON oR contractiON of ThE length Of the coNveyoR.
for many Years convEyors have BeEn utILIseD in undergrOund miniNg and tunnEL creaTIoN projEctS. The coNvEyoRs are UsuallY Of a Type iNvolviNg An endlEss beLt System in Which the belt moves in one dIrectiOn wheN it Is carryinG whATevEr is being MineD or removed WitH thE belt RetURning In thE OpPosITe dirEctiON to the extREmIty WHEn It changes frOM THe rEturn PatH To the lOad bEaring path. An elaboRAte structure of Load BEAriNg aND guiDe Rollers must be eStaBlISHed in ordEr To define the Belt path AnD To supPort boTh the wEight of THE bELt and tHe weIghT of the payLoaD. THE rollerS aRe TYpicalLy suPpOrted oN frameS WhicH ARe placed at discreTe intERVals aND anChoreD iN the undERgroUnd tunnel bY some means. THe framEs maY rest Upon the FlOor or aLteRnAtively may BE hung by chAins fRom a rooF oR braCkeTs from A walL, OR a comBinaTiOn oF these in oRDEr TO
 other objects, features a nd advanta ges o f t hepr esen t in vention will b e come  more apparent upon re ading  o f  the fo llowi ng deta i le d des cr ip tio no fprefe rre d embod iments and  ac co mpanying dra w in gs. It sho uld  be understo odthat e ve n t h oughemb odime nts ar e  separ ately des cr i bed, s i ngle fe a t ur es t hereof may be com b in e d to additiona l embo di m en t s . W ith in substra te  proc e ssing e q ui p m e nt, a gate valvemay be util i zed , forex amp l e, tocontr ol pre ssure withi n aprocess c hamber and/ort o contr ol the  fl owof r e ac ti vesp e cie s ,pro c ess  gases,by pr oduct s fr o m a  pro ces s, o r the  like from apro cess i ngvolum e ofthepr ocess  chamb er. G at e valves typica llyinclude a  ga te  di sp osedi n a ga teval ve body  that i s  se le c t i ve ly movable between  t w o  p ositions —a clo s ed  p o sition w he retheg a te se alsa nopeningin the ga te  valvean d an o pe n p osi tionw here  gases  may flo w thr o ugh the openin g  in the gatev al v e .A  thr ott ling gate v alve canmove to  an y  posi tionbe t we e n the open and clos ed  posit ions.  Unfortunatel y, however , s uch gase s ca n  u n desirably flow  into  a recesso f the ga te va lve body  where th e gate isdis pos edwhe n in  an at leastp a rtia ll y openpos ition a ndmay  de pos it  particul ate matt er  i nth e r ecess of the v al vebo dyor on the ga te. S uchde po s its  can un d es i r ably  b re ak f ree ,for e xamp l e,by a pr essure ch ang e  inth eprocess  chamber, byvi bration du etooperat i o n of the  gate valve, or the lik e , which  ca n lea d to  undesira ble  conta min a tion o f a su bstra te  be i n g pro c e ss edin  the chamb e r .
T he in ve ntor s haveobserved that conv e nti onal methodsoflimi t i ng  co n ta m ina ti o n a n d  deposits on po rtions ofga t evalve bodi e s a re  inadeq uate to  prov i de thereduced l evel of c on tami n a nts  requiredby someprocesses . 
Acco r di ngly,  th e inve nt ors  have  provi d edan im proved  g ate va lve.Th e presen t invention relates toa conv eyorsys tem and i n p a rti cular toa su pport syst emfor  a co nve y or sy stem wh ich is ad apte d  to facil i ta tes i mp lified expa n s i onor co ntr a ctionof t he length of thec onveyor.
For m anyy e ars  co n veyo rs  have been uti lis ed i n underg ro und miningand tunn el creat ion pr ojects . The c o n ve y ors ar e us ual ly of a t ype  i n volving  a ne ndless  bel tsystem  in wh i ch t h e  belt moves in o ne di r e ction whe n itis  carryi n g wh atever isbeing mined  or re move d wit h the b el t retu rni ng  in the op p osite dir ectio n to th eextr emi ty whe n it c hange s fr om  th e returnp a th to  t h e l oadbeari ng  pat h. An ela b orate st ruc t ure oflo adb e aringa nd g uide rolle rsmustb e  establish e d in or d er to  defin e thebelt pa t h a nd  to sup por t both theweight of the  b eltand thewe ight  o f t he  payload. The r ollers a re typic a l ly sup por t ed o n  frame swhich are pl acedat discret e int ervalsa ndanc hor ed i n t he u n derground tunnel by some  mea ns. T h e f rames  mayre st upont he f loor ora lternativelymay be hung byc hai n s fr oma  r oo f or brac ket s  from  a w all , or  acomb i n atio n  oft he se i n orde r to 
 other_objects, features_and advantages of the_present invention_will_become more_apparent_upon reading of_the following detailed_description of preferred embodiments_and accompanying drawings._It_should be understood that even though embodiments are separately described, single features thereof may_be_combined to_additional_embodiments._Within substrate processing equipment, a_gate valve may be utilized,_for example,_to control pressure within a process chamber and/or_to_control the flow_of reactive species, process gases, byproducts from a process,_or the like from a processing_volume of the_process_chamber._Gate valves typically include_a gate disposed in a gate_valve body that is selectively movable_between two positions—a closed position where the_gate seals an opening in the_gate valve and an open_position where_gases may flow through the_opening in the_gate valve._A throttling gate_valve can move to any position_between the open_and closed positions. Unfortunately, however, such_gases_can undesirably flow_into_a_recess of_the gate valve_body_where the_gate_is disposed when in an at_least_partially open position and may deposit particulate_matter in the recess_of_the valve body or_on the gate. Such deposits_can undesirably break free, for example,_by a_pressure change_in the process chamber, by vibration due to operation of the_gate valve, or the like, which_can lead to undesirable_contamination of_a_substrate being processed_in_the chamber.
The_inventors have observed that conventional methods of_limiting contamination_and deposits on portions of gate_valve bodies are inadequate_to_provide the reduced level of contaminants_required by some processes.
Accordingly, the inventors_have provided an improved gate_valve._The_present invention relates to a_conveyor system and in particular to_a support system_for a conveyor system which is adapted_to_facilitate simplified expansion or contraction of_the_length of the conveyor.
For many years_conveyors_have_been utilised in underground mining_and tunnel creation projects. The conveyors_are usually of a type involving an endless belt_system in which_the belt moves in one_direction_when_it is carrying whatever is being mined or removed with_the belt_returning in the_opposite direction to the extremity when it changes from the_return path to the load bearing path._An elaborate structure of load bearing and guide rollers must be_established in order to define the belt path_and to support both the weight of_the belt and the_weight_of the payload. The rollers are typically_supported_on_frames_which are placed_at discrete intervals_and anchored in_the underground_tunnel by some_means. The_frames may rest_upon_the floor or alternatively may be hung by chains from a roof or brackets from a wall, or_a combination of these in order_to