 invention provides for an improved electromagnetic radiation detector having an electrostatic chopping device and associated arrays incorporating a plurality of detectors and/or chopping devices. An electrostatically activated MEMS chopping device is provided that provides reliability, efficiency, noise reduction and temperature fluctuation compensation capabilities to the associated electromagnetic radiation detectors.
An electromagnetic radiation detector having an electrostatic MEMS chopping device according to the present invention comprises a detector material element, typically a pyroelectric or bolometer material element, and first and second electrodes in electrical contact with the detector material element and electrically isolated from one another. Additionally, the chopper device will incorporate a flexible film actuator overlying the detector material layer and moveable relative thereto. The flexible film actuator will typically include an electrode element and a biasing element such that the actuator remains in a fully curled, open state absent electrostatic voltage and moves to a fully uncurled, closed state upon the application of electrostatic voltage. Typically, the detector material element will be supported by a support surface, such as a microelectronic substrate or the like.
In one embodiment of the invention the flexible film actuator is fabricated directly on the detector or the pixels of a focal plane array having a fixed portion of the actuator attached to the underlying surface and a distal portion that is released from the underlying surface. The electrode element in the flexible film actuator and one of the electrodes associated with the detector material element interact to provide the electrostatic voltage necessary to move the flexible film actuator.
In an alternate embodiment of the invention a transparent substrate having a transparent electrode element are supported by a support structure, such as a microelectronic substrate and raised above the detector/pixel element. In this embodiment the flexible film actuator is supported by and attached to the transparent substrate. The transparent substrate and the transparent electrode are transparent to the electromagnetic radiation that is being transmitted to the detector, typically IR radiation. This embodiment of the invention reduces the effect of signal interference between the actuator drive voltage and the radiation detector output signal due to increased space between the electrodes in the flexible film actuator and the electrodes in the detector/pixel. Additionally, the transparent substrate and the resulting air gap between the transparent substrate and the detector/pixel provide for additional insulation.
In an alternate embodiment of the present invention, the electromagnetic radiation detector having an electrostatically driven MEMS chopper device is defined by a substrate, a thermal isolation bridge disposed on the substrate, a first electrode layer disposed on the thermal isolation bridge, a detector material layer overlying the thermal isolation bridge and in electrical contact with the first electrode layer and a
invention provides for an improved electromagnetic radiation detector having an electrostatic chopping device and associated array incorporate a plurality of detectors and/or chopping device. An electrostatically activated MEMS chopping device is put up that put up reliability, efficiency, randomness decrease and temperature fluctuation compensation capability to the associated electromagnetic radiation detector. 
 An electromagnetic radiation detector having an electrostatic MEMS chopping device according to the present invention consist a detector material element, typically a pyroelectric or bolometer material chemical element, and first and second electrodes in electrical liaison with the detector material component and electrically isolated from one another. Additionally, the chopper device will incorporate a flexible movie actuator overlying the detector material layer and moveable relative thereto. The flexible film actuator will typically include an electrode element and a biasing element such that the actuator remains in a fully curled, open state absent electrostatic electric potential and affect to a fully uncurl, close department of state upon the application of electrostatic voltage. Typically, the detector material element will be supported by a support surface, such as a microelectronic substrate or the alike. 
 In one embodiment of the invention the flexible film actuator is fabricated directly on the detector or the pixels of a focal airplane array having a fixed portion of the actuator attached to the underlying surface and a distal portion that is turn from the implicit in surface. The electrode element in the flexible movie actuator and one of the electrodes associated with the detector material element interact to provide the electrostatic voltage necessary to move the flexible film actuator. 
 In an alternate shape of the invention a transparent substrate having a transparent electrode element are supported by a documentation structure, such as a microelectronic substrate and raise above the detector / pixel element. In this shape the flexible film actuator is digest by and attached to the transparent substrate. The guileless substrate and the crystalline electrode are transparent to the electromagnetic radiotherapy that is being transmitted to the detector, typically IR radiation. This embodiment of the invention reduces the effect of signal intervention between the actuator drive voltage and the radiotherapy detector output signal due to increased distance between the electrodes in the flexible film actuator and the electrodes in the detector / pixel. Additionally, the transparent substrate and the resulting air gap between the transparent substrate and the detector / pixel provide for extra insulation. 
 In an alternate embodiment of the present invention, the electromagnetic radiation sickness detector having an electrostatically driven MEMS chopper device is defined by a substrate, a thermal isolation bridge disposed on the substrate, a first electrode level disposed on the thermal isolation bridge, a detector material layer overlying the thermal isolation bridge and in electrical contact with the first electrode layer and a
 ingention provides for an lmproved electromagnetir radiafion detdctor having an electrostatir chippint device and associatea arrays pncorporaring q pluralitb of detcetors wnd/ox rhopping devicex. An electsostatically awtkvcted MEMS chopping device is provideq that lrlvides reliabijity, qffidpekcy, noise reduction and temperathre flubtuation compensayion capabilities to the adsoclated electromagnehic radiatiin dqrectors.
An eldctromagneuie radiation detector having an electrostatkc MEKS choppint eevlwe accordinj to tre present iknention comprixes a detector maveriql element, typically e pyroelectric or bojometer mdtzrial element, and firwt and vecotd euwctfodts mn slectrlcam contact sith the derector material elekegn and electridally ysjlated from one another. Additionally, tht cholper device will incorpirate a flexible film actuator overlying the detector material layer and moveabne remxtirc gyegeto. The flexible film actuator will typicallr imckude an electrjde element ajd w biasing eleoent sbdh that the actuator remainf in q fully ctrlec, open state absent electrowtatic voltaye qnd moves to a fulpy uncurled, cloxed syate upon the applicatiun or electrostwtic voltzee. Typically, the denectmr material element will bq supportxd by a suppurt xurfacq, such as w micvmelectronic substrwte ot the nike.
In one embodiment of the invention thx flexible fikm acnuator is fabrlcated directly on the detectpr or tke pixdls of a fkcal plene array hading a fixed [lrtion of thx actuatow atrachwd to tfd underlying sirface anb a dustal portion that is deleased from tkt ubderlying surfave. Ghe epertrodq element in dhe wleboble wilm acubatif anc one of the electroges zssociated with thr qetector materiaj element intrract to provide tje elxctrosvatic foljage necessary to move the flexjble film acbuator.
In an ajterkate embodimenc of the invention a transparent substrave having a transparenj electrode element ate xupported bb a su[port strgcture, such as a miceoelectronic subsurate and raised above fhe dedectog/pixel element. In this embodiment the flexible film actuator is supported by anv wttached to the tranvpcreut subseratx. Vhe transparent slbstrate and the transparent elertrode are txansparent to the electromagnrtkc radiation jhat is being transmitted fo the drtector, typically IR radiation. Yhis embodiment of the ikvention eeducss the effxct of signal interfrrence betwwen the actmator drive voutabe and the gadietikn detector output signal due to increqsfd space between the electrlaes ih the slexible film acfuatkg and the electrodrs in the detevtor/pixel. Additionalny, the transparebn substrate amd thg resulting air gap betweet the transparent substrate and the detector/pixel ptovide for zdditionak insulation.
Im an alternate embodimekt of the prerent inventimn, the electromagnetic radiation detector hefing xn vlectrkstatically dgiven MEMS chopper device is definvd by q substrate, a thermal jsolatipn bridye disposed on the slbstrzta, a firsc eudctrode mayer dispmsed on the thermal isolation bridge, a detector material layer overlying the thermal isolwtion bridge xnd in electrical cuntact with the first electrode layer and a
invention provides for an improved electromagnetic radiation an chopping device associated arrays incorporating chopping An electrostatically activated chopping device is that provides reliability, efficiency, noise reduction temperature fluctuation compensation capabilities to the associated electromagnetic radiation detectors. An electromagnetic radiation having an electrostatic MEMS chopping device according to the present invention comprises a material typically pyroelectric bolometer material element, and first and second electrodes in electrical contact with the detector material element electrically isolated from one another. Additionally, the chopper will incorporate a flexible actuator overlying the detector material and relative thereto. flexible actuator typically include an element and a biasing element such that the actuator remains in a fully curled, open state absent voltage and a fully closed upon application of electrostatic the detector material element will be support surface, such as a microelectronic substrate or like. In embodiment of the invention the flexible actuator is fabricated directly on the detector or pixels of a focal plane array having a fixed portion of the actuator attached to surface and a distal that is released the surface. electrode in the film actuator and one of the electrodes associated with the detector element interact to provide the electrostatic voltage necessary to move film In an alternate of the invention a substrate a transparent electrode element by support a substrate raised above the detector/pixel In this embodiment the flexible actuator is supported by substrate. The transparent substrate and the transparent electrode transparent to the electromagnetic radiation that is transmitted to the detector, typically IR radiation. This embodiment of the invention the effect interference between the actuator drive voltage and the detector output signal due increased space between the electrodes in the flexible film and electrodes in detector/pixel. Additionally, the substrate and the air gap between substrate and detector/pixel for an alternate embodiment of the present the radiation detector having an electrostatically MEMS is defined by a substrate, a thermal isolation bridge disposed on the substrate, a first disposed on the thermal bridge, detector material layer overlying the thermal isolation bridge and in electrical contact first electrode layer
 invention provides for an impRoved electRomagNetIc rAdIatiOn deTector having an ELectRostatic chopping device And asSoCIateD ArRays iNcorporATiNG A plUrAlIty Of DEtEctorS anD/or chopPing deviceS. An ElEctrostaticaLLy Activated MeMS Chopping deviCe iS proviDeD thAT provIdeS reliAbilitY, EfficiEncy, noise ReDUction ANd tempeRATuRe flUctuation compensaTIoN Capabilities to The assOcIAtED EleCtrOmagnetic rAdIatioN DetectoRS.
AN ELEctROmagnetic radiAtion detectOR haVing an ElEctROstatiC MEMS ChOPpiNg device accOrdiNg to the prEsent iNVention COmpriseS a deteCtoR maTeriAL eLeMenT, tYPicALlY a pYRoeLectric oR bOlOmeteR matERIAL eleMenT, and First And second elecTroDes iN EleCtricAl conTact WiTh the DetectOr matErIal element and elEctrIcally isoLatEd FroM oNe anoTHer. AddItiOnaLly, the cHopper dEVicE wILL InCorporate a flexible FiLM AcTuator ovErlyinG ThE dETector maTeRiaL layER And moVeabLE rElative tHereto. tHe FlExible fIlM actuaToR wiLl tYpicaLLy inClude aN electroDe eleMEnt and a biasing ELement such thaT ThE ACtUAtor RemAins in a fullY curLEd, opEn stATe AbsENt eleCtrosTaTIc VOltage and moves to a fuLlY uncurLed, clOsed state upon The applicaTION of electRostATiC Voltage. TypicalLy, the Detector maTErial eleMent wIll be supPorted by a SUPport surFacE, suCh aS a mICRoElectronic subSTRate Or The like.
in oNe embodImeNt oF thE inVeNtion the fLexible fIlM aCtUaTor Is fabRIcated diReCtlY oN thE deteCTor or tHe pixEls oF a FoCAl pLane arrAY hAVIng a FiXeD porTioN oF the aCtuaTOr aTtached To the undeRlyINg suRfAcE and a diStal portion thAt Is released FrOm tHe undeRLYing surfAce. The electrode element iN The flexIblE film ActuAtor and onE of The eleCtrODes assOciateD with ThE deTECtor mATErIal ElEment interACT to ProviDe The eLectrosTatic voltage necessARy tO move the flexiBle Film ACTuAtoR.
in AN alTeRNatE EMbodiment of the iNvention a tRaNSpArent substRAte HaVing a trAnspareNt eleCTrode elEment are sUpported bY a SuppORT stRucture, sucH as a micrOelectronIC subsTRaTe and RaiSed aboVe The DetecTor/pixEL elEment. in this EmBodimeNt the FlExible fiLm actuator is supported by And attAched To tHe transpaRenT SubStrate. The TranSparent subStrAte And thE trANsparEnt eLEcTroDE are tRansPArent to thE ElEctROMaGnetic radiaTION thAt is bEinG TransmItteD to the detector, typICally IR radiatiOn. ThIS EmbOdiMEnt oF tHe invention redUceS tHE Effect of SiGnal interfeRence betWeEN the aCtuatoR drive Voltage AND tHE radiaTion DetEctor outpUt sIgNAl due to InCrEAsed spAce bEtWeen thE electROdes IN The flexible film aCtuatOR And thE EleCtrodEs In the deTEctoR/pixel. AddiTionally, the TranspArenT subsTrate anD tHe resuLtiNg Air gap betwEEn the tranSpareNt substRaTe anD thE detecTor/pIXEl proVide FoR adDitional iNSUlATiOn.
iN an AlteRnate EmBodiMent of the PResent inVenTIon, the eLeCtrOMAgnetiC RaDIAtion detecTor HavinG AN electrostATicaLLy DRiven mEMS chOpper dEvice is DEfiNeD by a subStrATE, a thermal Isolation BRidGe DispOsed on thE sUbstRaTe, a FiRst electrode layEr disposEd on the tHERmal isOlaTIon bRIdge, a dEtEctor materiaL layeR oVErlying THE thErmal isOLatIon BriDge aNd iN eleCTrical contact with the firsT eleCtrodE LayEr and A
 invention provides for an  improvedelect rom agn et ic r adia tion detectorh avin g an electrostatic cho pping  d e vice an d ass ociated ar r a ysin co rpo ra t in g a p lur ality o f detector s a nd /or chopping de vices. Anele ctrostatical lyactiva te d M E MS ch opp ing d evicei s prov ided that  p r ovides reliabi l i ty , ef ficiency, noise r e du c tion and tempe rature  f l uc t u ati oncompensati on  capa b ilities to t h e a s sociated elec tromagnetic rad iation  d ete c tors.An el ec t rom agnetic rad iati on detect or hav i ng an e l ectrost atic M EMS  ch oppi n gde vic ea cco r di ngt o t he prese nt  i nvent ionc o m p rise s a  det ector  material ele men t, t y pic allya pyr oele ct ric o r bolo meter  m aterial element , an d first a ndse con delect r odes i n e lec tricalcontact wit ht h e  d etector material e le m e nt  and ele ctrica l ly  i s olated f ro m o ne a n o ther.  Add i ti onally,the ch o pp er  device  w ill in co rpo rat e a f l exib le fil m actuat or ov e rlying the det e ctor material la y e ra nd m ove able relati ve t h eret o. T h efle x iblefilmac t ua t or will typically i nc lude a n ele ctrode elemen t and a bi a s i ng eleme nt s u ch that the actua tor r emains ina  fully c urled , open s tate abse n t  electro sta tic  vo lta g e  a nd moves to a f ully  u ncurled , c losed s tat e u pon  th eapplicati on of el ec tr os ta tic  volt a ge. Typi ca lly ,the  dete c tor ma teria l el em en t  wi ll be s u pp o r tedby  a  sup por tsurfa ce,s uch  as a m icroelect ron i c su bs tr ate orthe like.
Inon e embodime nt  of  the i n v ention t he flexible film actuat o r is fa bri cated  dir ectly onthe  detec tor or the  pixel s ofafoc a l  plan e ar ray  h aving a fi x e d p ortio nof t he actu ator attached to t h e u nderlying sur fac e an d adis t al por ti o n t h a t is released f rom the un de r ly ing surfac e . T he  electr ode ele menti n the f lexible f ilm actua to r an d one  of the el ectrodes  associat e d wit h  t he de tec tor ma te ria l ele ment i n ter act t o prov id e theelect ro static v oltage necessary to mov e theflexi ble  film act uat o r.In an alt erna te embodim ent  of  theinv e ntion  a t r an spa r ent s ubst r ate havin g  a  tr a n sp arent elect r o d e e lemen t a r e supp orte d by a support st r ucture, such a s am i cro ele c tron ic  substrate and  ra is e d  above t he  detector/p ixel ele me n t. In  thisembodi ment th e fl e xiblefilm  ac tuator is  su pp o rted by  a nd attach ed t othe tr anspar e nt s u b strate. The tran spare n t  subs t rat e and  t he tran s pare nt electro de are tran sparen t to  theelectro ma gnetic  ra di ation that is beingtrans mittedto  the  de tector , ty p i cally  IRra dia tion. Thi s em b od im e ntof t he in ve ntio n reduces the effe cto f signa lint e r ferenc e  b e t ween the a ctu atord r ive voltag e  and th e  radi ationdetect or outp u t s ig nal due  to i ncreasedspace bet w een  t he e lectrode sin t he  fl ex ible film actua tor andthe elec t r odes i n t h e de t ector/ pi xel. Additio nally ,t he tran s p are nt subs t rat e a ndtheres ulti n g air gap between the tr ansp arent sub strat e and  t he detec t or/p ixel pro v ide for addit ional insulatio n .
I n  analt e rn at e embodim ent of th e pr ese nt i nve ntio n ,  the elec t ro magn etic r adia ti on  detector  h aving a n  ele c tro stat icall ydr i ve n MEMSchopperdevic eis define d  by a s ubst ra te, a thermal  isolation b ri dgedispos e d o n t h e  substrate,a first el ect rode layer  d isp o sed  on t he thermal is ola ti o n b ridg e,  a det ector ma terial  lay e r  over lying  the  ther mal is ola tio n br id ge a n d in el ectrical con t ac t withthe f irst  el ec t r ode layer and a
 invention_provides for_an improved electromagnetic radiation_detector having_an_electrostatic chopping_device_and associated arrays_incorporating a plurality_of detectors and/or chopping_devices. An electrostatically_activated_MEMS chopping device is provided that provides reliability, efficiency, noise reduction and temperature fluctuation_compensation_capabilities to_the_associated_electromagnetic radiation detectors.
An electromagnetic radiation_detector having an electrostatic MEMS_chopping device_according to the present invention comprises a detector_material_element, typically a_pyroelectric or bolometer material element, and first and second_electrodes in electrical contact with the_detector material element_and_electrically_isolated from one another._Additionally, the chopper device will incorporate_a flexible film actuator overlying the_detector material layer and moveable relative thereto._The flexible film actuator will typically_include an electrode element and_a biasing_element such that the actuator_remains in a_fully curled,_open state absent_electrostatic voltage and moves to a_fully uncurled, closed_state upon the application of electrostatic_voltage._Typically, the detector_material_element_will be_supported by a_support_surface, such_as_a microelectronic substrate or the like.
In_one_embodiment of the invention the flexible film_actuator is fabricated directly_on_the detector or the_pixels of a focal plane_array having a fixed portion of_the actuator_attached to_the underlying surface and a distal portion that is released from_the underlying surface. The electrode element_in the flexible film_actuator and_one_of the electrodes_associated_with the_detector material element interact to provide the_electrostatic voltage_necessary to move the flexible film_actuator.
In an alternate embodiment_of_the invention a transparent substrate having_a transparent electrode element are supported_by a support structure, such_as_a_microelectronic substrate and raised above_the detector/pixel element. In this embodiment_the flexible film_actuator is supported by and attached to_the_transparent substrate. The transparent substrate and_the_transparent electrode are transparent to the_electromagnetic_radiation_that is being transmitted to_the detector, typically IR radiation. This_embodiment of the invention reduces the effect of signal_interference between the_actuator drive voltage and the_radiation_detector_output signal due to increased space between the electrodes in_the flexible_film actuator and_the electrodes in the detector/pixel. Additionally, the transparent substrate and_the resulting air gap between the transparent_substrate and the detector/pixel provide for additional insulation.
In an alternate embodiment_of the present invention, the electromagnetic radiation detector_having an electrostatically driven MEMS chopper device_is defined by a_substrate,_a thermal isolation bridge disposed on the_substrate,_a_first_electrode layer disposed_on the thermal_isolation bridge, a_detector material_layer overlying the_thermal isolation_bridge and in_electrical_contact with the first electrode layer and a