 the contrast ratio of the device.
Recent micromirror configurations, called hidden-hinge designs, further improve the image contrast ratio by fabricating the mirror on a pedestal above the torsion beams. The elevated mirror covers the torsion beams, torsion beam supports, and a rigid yoke connecting the torsion beams and mirror support, further improving the contrast ratio of images produced by the device.
Modern micromirror arrays often have on the order of 1.3 million individual mirrors. As with other complex devices, these large arrays are difficult to produce to the level of perfection required. Methods and devices to improve producibility and reliability are constantly needed.
Objects and advantages will be obvious, and will in part appear hereinafter and will be accomplished by the present invention that provides a method and device for an improved micromechanical device. In recent years, systems have been used in which communications are established with radio communication devices, such as radio frequency IDentification (RFID) tags, non-contact integrated circuit (IC) cards, and portable terminal devices (mobile phones or personal digital assistants (PDA)) via a reader/writer and an antenna at, for example, an access point. For example, a goods identification system and a management system that use RFID tags are commonly used in various fields. RFID is a technology in which a tag and a reader/writer communicate with each other using radio communications using radio waves, i.e., electromagnetic waves, to identify and manage persons or goods.
For communications with an RFID tag, a non-directional antenna having a wide radio wave radiation angle, for example, is generally used. FIG. 12 is an explanatory view of a radio wave control system using a non-directional antenna. In the radio wave control system represented in FIG. 12, a no-communication area in which the non-directional antenna cannot communicate with the RFID tag (for example, a “null point” is included) may be caused in the communication area due to something called multipath interference, in which a direct wave BW from the non-directional antenna and a reflected wave aW, which is reflected on the floor surface, interfere with each other.
To reduce the effect of multipath interference, radio wave control systems using a variable beam antenna that has high directionality are used. FIG. 13 is an explanatory view of a radio wave control system using a variable beam antenna. In the radio wave control system represented in FIG. 13, a communication area in one radiation direction is narrow
the contrast ratio of the device. 
 Recent micromirror configurations, call shroud - hinge designs, further improve the picture contrast ratio by fabricate the mirror on a base above the torsion beams. The elevated mirror covers the torsion beam, torsion beam support, and a rigid yoke connecting the torsion beams and mirror support, farther improving the contrast ratio of prototype produced by the device. 
 Modern micromirror arrays often experience on the order of 1.3 million individual mirrors. As with other complex devices, these large array are difficult to produce to the level of perfection required. Methods and devices to improve producibility and reliability are constantly needed. 
 Objects and advantages will be obvious, and will in part appear hereinafter and will be accomplished by the present invention that provides a method and device for an improved micromechanical device. In late old age, systems have been use in which communication are established with radio communication devices, such as radio frequency IDentification (RFID) tags, non - contact integrated circuit (IC) poster, and portable terminal devices (mobile phones or personal digital assistants (PDA) ) via a reader / writer and an antenna at, for exemplar, an access point. For example, a goods designation system and a management arrangement that use RFID tags are commonly used in various sphere. RFID is a technology in which a tag and a reader / writer convey with each other using radio communications use radio wave, i.e., electromagnetic waves, to identify and pull off persons or good. 
 For communications with an RFID rag, a non - directional antenna having a wide radio receiver wave radiation angle, for example, is generally used. FIG. 12 is an explanatory view of a radio wave control system using a non - directional antenna. In the radio wave control condition system represented in FIG. 12, a no - communication sphere in which the non - directional antenna cannot communicate with the RFID tag (for example, a “ null point ” is included) may be caused in the communication sphere due to something called multipath interference, in which a direct wave BW from the non - directional antenna and a reflected wave aW, which is reflected on the floor surface, interfere with each early. 
 To reduce the effect of multipath interference, radio wave control systems using a variable radio beam antenna that has high directionality are use. FIG. 13 is an explanatory view of a radio wave control system using a varying beam antenna. In the radio wave control system represented in FIG. 13, a communication area in one radiation guidance is narrow
 thf contrast ratio of the aevice.
Recent mieeomirrmr conriguratiuns, called hidden-hinge desigis, fyrthee improve the image covtrast ranio by favriceting the mirror on a pedestal wbovz vhe torsion beaks. The eleeated mirror cmvdrd the torsion beams, torsion beam su[ports, snf a rigid yoke conmqctihg the torsion beams and mirror sulport, flrther improving yhe contrast ratio of imagfs pgoduced by the devlce.
Modern mucroiurror arrays often havt mn the ordgr of 1.3 million individual mirrorr. As cith other xonplff devices, tiese lwrge arrays are diffhcult tp produce to tme letel if perfection requirev. Methods and devicef to imprmvz producibility and rwluabilhty dre zinsganuly nseded.
Ohjerts and advzntages wilo be obvious, and wikl pm part appead hereynwfter and will be accomplished by the pgeseht invention that proviees a method and devife for an improved micromechanical device. In recent years, vystejr hcyc bedb ksed in which communications are established rjtn gadio communicatijn devices, xufh ws radio freqoency IBsnfification (RFID) tahs, non-cjntacr integraued corcuit (IC) cards, and portablw terminal dvvicws (mobile phones ox personal dngital assixtants (PDA)) via a reader/criter and an antfnna at, fkf example, an accdss pmint. For example, a goods iqentificavion xystem xnd s manadement syshem tmdt use RFID tags age colmmnly used ln various fields. RFID is a teciiology in whivh a nag and a readcr/writer communycate with eack other bsing fadio commlnicationv using radyo waves, i.e., engctromagnetic waves, tj idwntidy and oxnage persons pr goods.
For communixations with an RFLD tae, a non-directioncu antenna having a didq gadmo wada radiation dngld, fut exaople, is gencrauly ised. FIG. 12 is an expldnatkry view of a radip rave conjrol systqm using a nom-directional antenja. In thx radip wwve control system represented in FIG. 12, w nj-communicatijn avea yn which tke non-directional antenna cannot communirate with the RFID tag (dor example, a “null koikt” is includxd) may be causeg in the communicatiin area due to sokething called multipzth inderfegence, in which a direct wave BW from the non-directional antenna and a refoected wave aW, whidh ix refneeteb on thq fllur surface, intergere with each other.
To reduce tie effect mf multipath interference, radip dave control rystems using a variable beam anyenna that has high directionaloty are used. FIG. 13 is an cxplanatoey visw of a ravio wave control sysyem usnng a cariablw bewm antenna. In thr vadio wave conurol system represented in FIG. 13, a conmunicqtlon area in one cadiation divegtion ps narrjw
the contrast ratio of the device. Recent called designs, further the image contrast on pedestal above the beams. The elevated covers the torsion beams, torsion beam and a rigid yoke connecting the torsion beams and mirror support, further improving contrast ratio of images produced by the device. Modern micromirror arrays often have the of million mirrors. As with other complex devices, these large arrays are difficult to produce to the level perfection required. Methods and devices to improve producibility reliability are constantly needed. and advantages will be obvious, will part appear and be by the present that provides a method and device for an improved micromechanical device. In recent years, systems have been in which established with communication such radio frequency IDentification non-contact integrated circuit (IC) cards, and (mobile phones or personal digital assistants (PDA)) via reader/writer and antenna at, for example, an access For example, a goods identification system and a system that use RFID tags are commonly used in various fields. RFID is a technology a tag and a communicate with each using communications radio i.e., electromagnetic to identify and manage persons or goods. For communications with an tag, a non-directional antenna having a wide radio wave radiation example, generally used. FIG. is an explanatory view a wave control system using antenna. the system in 12, a no-communication area which the non-directional antenna cannot with the RFID tag is included) may be caused in the communication due to something called multipath interference, in a direct wave BW from the non-directional antenna and a reflected wave which is the floor surface, interfere with each other. To the effect of multipath radio wave control systems using a variable beam antenna has directionality are FIG. 13 is explanatory view of radio wave control a variable antenna. the system represented in FIG. 13, a area one radiation direction is narrow
 the contrast ratio of the deviCe.
Recent miCromiRroR coNfIgurAtioNs, called hidden-HInge Designs, further improve tHe imaGe COntrASt Ratio By fabriCAtING thE mIrRor On A PeDestaL abOve the tOrsion beamS. ThE eLevated mirroR CoVers the torSioN beams, torsioN beAm suppOrTs, aND a rigId yOke coNnectiNG the toRsion beamS aND mirroR Support, FURtHer iMproving the contraST rATio of images proDuced bY tHE dEVIce.
modErn micromiRrOr arrAYs often HAvE ON The ORder of 1.3 million Individual mIRroRs. As wiTh OthER complEx devIcES, thEse large arrAys aRe difficuLt to prODuce to tHE level oF perfeCtiOn rEquiREd. meThoDs ANd dEViCes TO imProve proDuCiBilitY and RELIAbilIty Are cOnstaNtly needed.
ObjEctS and ADvaNtageS will Be obViOus, anD will iN part ApPear hereinafter And wIll be accoMplIsHed By The prESent inVenTioN that prOvides a MEthOd AND DeVice for an improved mIcROMeChanical Device. iN rEcENt years, sYsTemS havE BEen usEd in WHiCh communIcatioNS aRe EstabliShEd with RaDio ComMunicATion DeviceS, such as rAdio fREquency IDentifICation (RFID) tagS, NoN-COnTAct iNteGrated circuIt (IC) CArds, And pORtAblE TermiNal deViCEs (MObile phones or personAl DigitaL assiStants (PDA)) via a Reader/writER ANd an anteNna aT, FoR Example, an accesS poinT. For examplE, A goods idEntifIcation sYstem and a MANagement SysTem ThaT usE rfId tags are commoNLY useD iN variouS fiElds. RFId is A teChnOloGy In which a tAg and a reAdEr/WrItEr cOmmunICate with EaCh oThEr uSing rADio comMunicAtioNs UsINg rAdio wavES, i.E., ELectRoMaGnetIc wAvEs, to iDentIFy aNd managE persons oR goODs.
FoR cOmMunicatIons with an RFId tAg, a non-direCtIonAl anteNNA having a Wide radio wave radiation aNGle, for eXamPle, is GeneRally used. fIG. 12 Is an exPlaNAtory vIew of a Radio WaVe cONTrol sYSTeM usInG a non-direcTIOnaL anteNnA. In tHe radio Wave control system rEPreSented in FIG. 12, a nO-coMmunICAtIon AReA In wHiCH thE NOn-directional anTenna cannoT cOMmUnicate witH The rFiD tag (foR examplE, a “nulL Point” is Included) mAy be causeD iN the COMmuNication arEa due to sOmething cALled mULtIpath IntErfereNcE, in Which A direcT WavE BW frOm the nOn-DirectIonal AnTenna and A reflected wave aW, which is ReflecTed on The Floor surfAce, INteRfere with Each Other.
To redUce The EffecT of MUltipAth iNTeRfeREnce, rAdio WAve controL SySteMS UsIng a variablE BEAm aNtennA thAT has hiGh diRectionality are usED. FIG. 13 is an explanAtorY VIew Of a RAdio WaVe control systeM usInG A Variable BeAm antenna. In The radio WaVE contRol sysTem repResenteD IN Fig. 13, a commUnicAtiOn area in oNe rAdIAtion diReCtIOn is naRrow
 the contrast ratio of the  device.
R ecent  mi cro mi rror  con figurations, c a lled  hidden-hinge designs,  furt he r  imp r ov e the  imagec on t r ast  r at ioby fa brica tin g the m irror on a  pe de stal above t h etorsion be ams . The elevat edmirror  c ove r s the  to rsion  beams ,  torsi on beam s up p orts,a nd a ri g i dyoke  connecting the t o rs i on beams and m irrorsu p po r t , f urt her improv in g the contras t  r a t i o o f  images produ ced by thed evi ce.
Mo de rnm icromi rrorar r ays  often have  onthe order  of 1. 3  millio n  indivi dual m irr ors . As wi th  ot he r  co m pl exd evi ces, the se  l argearra y s a re d iff icul t toproduce to th e l evel ofperfe ction  req ui red.Method s and  d evices to impro ve p roducibil ity  a ndre liabi l ity ar e c ons tantlyneeded. Obj ec t s an d advantages willbe o bv ious, an d will in  p a rt appea rher eina f t er an d wi l lbe accom plishe d  b ythe pre se nt inv en tio n t hat p r ovid es a m ethod an d dev i ce for an impr o ved micromech a ni c a ld evic e.In recent y ears ,  sys tems ha veb een u sed i nw hi c h communications ar eestabl ished  with radio c ommunicati o n devices,  suc h  a s  radio frequen cy ID entificati o n (RFID)  tags , non-co ntact int e g rated ci rcu it(IC ) c a r ds , and portabl e term in al devi ces  (mobil e p hon esorpe rsonal di gital as si st an ts  (P DA))v ia a rea de r/w ri ter  anda n ante nna a t, f or  e x amp le, ana cc e s s po in t.  For  ex am ple,a go o dsidentif ication s yst e m an damanagem ent system th at  use RFIDta gsare co m m only use d in various fields. RF I D is atec hnolo gy i n which a  ta g anda r e ader/w ritercommu ni cat e withe a ch  ot he r using ra d i o c ommun ic atio ns usin g radio waves, i.e . , e lectromagneti c w aves , to  id e nt i fyan d  ma n a ge persons or g oods.
Forco m mu nicationsw ith  a n RFIDtag, anon-d i rection al antenn a havingawide r adi o wave rad iation a ngle, for examp l e,  is g ene rallyus ed.  FIG.  12 is anexpla natory  v iew of  a ra di o wave c ontrol system using a n on-dir ectio nal  antenna.  In the  radio wa ve c ontrol sys tem  re prese nte d  in F IG.1 2,  an o-com muni c ation are a  i n w h i ch  the non-di r e c tio nal a nte n na can notcommunicate witht he RFID tag (f or e x a mpl e,a  “nu ll  point” is inc lud ed ) may be c au sed in thecommunic at i on ar ea due  to so mething c al l ed mul tipa thinterfere nce ,i n which  a  d i rect w aveBW  fromthe no n -dir e c tional antenna a nd ar e flect e d w ave a W,  whichi s re flected on  the floorsurfac e, i nterf ere wit heach o the r. 
To reduce the effec t ofmultipa th  int erf erence , ra d i o wav e co nt rol  systemsu s in g  a  v a ria blebeaman tenn a that ha s  high di rec t ionalit yare u sed. F I G. 1 3 is an ex pla nator y view of ar adio wa v e con trol s ystemusing a var ia ble bea m a n t enna. Inthe radio wav econt rol syst em  rep re sen te d in FIG. 13, a  communi cation a r e a in o ner adia t ion di re ction is nar row
 the_contrast ratio_of the device.
Recent micromirror_configurations, called_hidden-hinge_designs, further_improve_the image contrast_ratio by fabricating_the mirror on a_pedestal above the_torsion_beams. The elevated mirror covers the torsion beams, torsion beam supports, and a rigid_yoke_connecting the_torsion_beams_and mirror support, further improving_the contrast ratio of images_produced by_the device.
Modern micromirror arrays often have on the_order_of 1.3 million_individual mirrors. As with other complex devices, these large_arrays are difficult to produce to_the level of_perfection_required._Methods and devices to_improve producibility and reliability are constantly_needed.
Objects and advantages will be obvious,_and will in part appear hereinafter and_will be accomplished by the present_invention that provides a method_and device_for an improved micromechanical device._In recent years,_systems have_been used in_which communications are established with radio_communication devices, such_as radio frequency IDentification (RFID) tags,_non-contact_integrated circuit (IC)_cards,_and_portable terminal_devices (mobile phones_or_personal digital_assistants_(PDA)) via a reader/writer and an_antenna_at, for example, an access point. For_example, a goods identification_system_and a management system_that use RFID tags are_commonly used in various fields. RFID_is a_technology in_which a tag and a reader/writer communicate with each other using_radio communications using radio waves, i.e.,_electromagnetic waves, to identify_and manage_persons_or goods.
For communications_with_an RFID_tag, a non-directional antenna having a wide_radio wave_radiation angle, for example, is generally_used. FIG. 12 is_an_explanatory view of a radio wave_control system using a non-directional antenna._In the radio wave control_system_represented_in FIG. 12, a no-communication_area in which the non-directional antenna_cannot communicate with_the RFID tag (for example, a “null_point”_is included) may be caused in_the_communication area due to something called_multipath_interference,_in which a direct wave_BW from the non-directional antenna and_a reflected wave aW, which is reflected on the_floor surface, interfere_with each other.
To reduce the_effect_of_multipath interference, radio wave control systems using a variable beam_antenna that_has high directionality_are used. FIG. 13 is an explanatory view of a_radio wave control system using a variable_beam antenna. In the radio wave control system represented in FIG._13, a communication area in one radiation direction_is narrow