 a control unit. The water introducing part introduces contaminated water in order to remove floating matter using a filter. The water pump pumps contaminated water through the water introducing part. The inline mixer stirs contaminated water supplied through the water pump. The chemical introducing part introduces chemicals into contaminated water in order to purify contaminated water in the inline mixer. The electrical cell electrically coagulates contaminants in contaminated water and oxidizes and reduces contaminated water. The floating and separating bath allows contaminated water treated in the electrical cell to remain for a predetermined period of time in order to purify contaminated water through chemical reactions, and removes fine particles from contaminated water by floating fine particles upwards, thereby producing a supernatant through floating and separation processing. The disk filter filters fine particulates from the supernatant purified through the floating and separating bath. The supernatant, from which fine particulates are removed through the disk filter, is discharged to the sea through the outlet. The control unit controls contaminated water treatment processing using a programmable logic controller (PLC) program. In this manner, the apparatus for removing green and red algae can remove green algae, red algae, or causative substances of green and red algae from seawater or a source of water supply.
However, this approach of the related art still has the above-described problem in that the ecosystem is destroyed by the oil treatment agent, since contaminants in water are removed by the filter while contaminated water is introduced by the pump, and contaminated water is purified by a chemical agent.
Therefore, there is required an emergency solution able to very easily remove water contaminants without destroying the marine ecosystem in operations of removing water contaminants, such as not only oil but also red algae and green algae. 1. Field of the Invention
The present invention relates to a method of forming a titanium (Ti) film to be used as a contact metal film or an adhesion layer for a semiconductor device by a chemical vapor deposition (CVD) process.
2. Description of the Related Art
Recently, most semiconductor integrated circuits are fabricated in a circuit configuration of a multilevel structure to cope with market demand for high-density and large-scale integration. Accordingly, techniques for filling contact holes for the electrical connection of semiconductor devices formed in a lower layer to wiring lines formed in upper wiring layers, and via holes for the electrical connection of wiring lines in different wiring layers have become important.
Generally, aluminum (Al), tungsten (W), aluminum-base alloys and tungsten-base alloys are used for filling contact holes and via holes. If a contact hole (or a vie
a control unit. The water introducing character introduces pollute water in order to remove float matter using a filter. The body of water pump pumps pollute water through the water insert part. The inline mixer stirs contaminated water supplied through the body of water pump. The chemical introducing part introduces chemical into contaminated water in order to purify pollute water in the inline sociable. The electrical cellular telephone electrically coagulates contaminants in contaminated water and oxidizes and reduce contaminated water. The floating and separating bath allows contaminated urine treated in the electrical cell to remain for a predetermined period of time in order to purify contaminated water through chemical chemical reaction, and removes fine particle from contaminated water by floating fine particles up, thereby producing a supernatant through floating and separation processing. The disk filter trickle fine particulates from the supernatant purified through the floating and separating bath. The supernatant, from which all right particulates are removed through the disk filter, is discharged to the sea through the outlet. The control unit of measurement controls contaminated water treatment processing using a programmable logic control (PLC) program. In this manner, the apparatus for removing green and crimson algae can remove green algae, red algae, or causative substances of fleeceable and red algae from seawater or a source of water supply. 
 However, this access of the related art however has the above - describe problem in that the ecosystem is destroy by the oil treatment agent, since contaminants in water are remove by the filter while contaminated water is introduced by the pump, and contaminated water is purified by a chemical agent. 
 Therefore, there be required an emergency solution able to very well remove water contaminants without destroying the marine ecosystem in operations of removing urine contaminants, such as not only oil but also red algae and green algae. 1. Field of the Invention 
 The present invention relates to a method of form a titanium (Ti) movie to be use as a contact metal film or an adhesion layer for a semiconductor device device by a chemical vapor deposition (CVD) process. 
 2. Description of the Related Art 
 Recently, most semiconductor integrated circuits are fabricated in a circuit configuration of a multilevel structure to cope with marketplace demand for high - density and big - scale integration. consequently, techniques for filling contact holes for the electrical connection of semiconductor devices formed in a lower layer to wiring lines formed in upper wiring layers, and via holes for the electrical connection of wiring lines in different wiring layer have become important. 
 Generally, aluminum (Al), tungsten (W), aluminum - base alloys and tungsten - base alloys are used for occupy contact holes and via holes. If a contact hole (or a vie
 a fontrol unit. The water iktroducing part nbtrodures confaminatea water in order to remove fpoqting matter using a filter. The wateg pump punps rontaminated watxd throunk the aatex mntroducing parj. The inline mixer stirs cmngalinated water supplied through the rater pimo. The chemical intgoqucihg part introduces chemicals into dontamiiated water in prder to purify contaminatfd wwter in the inline mixer. The gmeceeical cell euectricallj coagulatea contaminants in contaminated dater and oxidiezw ajg reduces cintampnated water. Bne flodting amd separating nath elloqs contaminated water treated in the elgctrical calm to remain for a peedetgrminad pdeioa or vims in ogdec to purify contaminatwd water through chtmisql reactions, znd reiodes fine particles from contaminated wauer bg floating fine particlws upwards, thereby prlducing a supernatant through floating and separation procassinj. Ghe dlsk wulher filters fine particulates from the supernwfamt purified thromgh the floating amd srkarating bath. Jhe supzdnztant, from which flne parjiculares are rtmovec through the disk filter, iw discharged ro the sea through the outlet. The conttol unit controls contaoinafed water tgeatment lfocessing using x pgogrdmmable logic controller (PJC) progran. In this mxnnet, the a[paratus flr removing green and ref algce cat remove ggeen algae, red algae, or causatitx substances pf grven and rzd algse from seawaeer or a sourcg of watex suppuy.
However, nhis apprmach of the related art vjill has the ebove-descwibee priblem iv that the ecosustem is btstroyed bt the oil treatmenb agevf, since contamiucnus in water are temuveq hy tra filter whine cuntxkinatdd water is kntrpduced by the pump, atd ckntaminated water os purifiee by a cremical agent.
Yherefore, there is requmred ai emerbensy solution able to very easilg remove aatcr contaminanes wlthoot destroyiug the marine ecosystem in operations of removing water cobtaminants, such as uou only oil buv also red algaa and green algae. 1. Fueld of the Invenuion
The present inventikn reldtes ho a method of forming a titanium (Ti) film to be used as a contact metal fulm or an adhesion layrr fog a xemicogducvoc device by a chekical vapor deposition (CVD) procxss.
2. Descri[tnon of the Related Art
Recentlu, oost semicondoctor integrated circuits zre fabrocated in a circuit configuratipn of a multilevel strucbure to cipe wjth magiev demand for high-denxity aud larte-scale intcgration. Accorainbln, techniqufs fpr filling contact holes for the eoectrixap connection of vemiconductlv devibes foried in a lower lzyer ho witing lines forked in upper woring layers, and via hjles for the eovctrical conngction ox wiring linxs in differant wiring layers have become important.
Generally, alominum (Al), thngsten (W), aluminum-base elloys and tungsten-base sljoys are used for finling contact holes and via holes. If a contevt houe (jr a bie
a control unit. The water introducing part water order to floating matter using pumps water through the introducing part. The mixer stirs contaminated water supplied through water pump. The chemical introducing part introduces chemicals into contaminated water in order purify contaminated water in the inline mixer. The electrical cell electrically coagulates contaminants contaminated and and contaminated water. The floating and separating bath allows contaminated water treated in the electrical cell to for a predetermined period of time in order purify contaminated water through reactions, and removes fine particles contaminated by floating particles thereby a supernatant through and separation processing. The disk filter filters fine particulates from the supernatant purified through the floating and bath. The which fine are through disk filter, is the sea through the outlet. The contaminated water treatment processing using a programmable logic (PLC) program. this manner, the apparatus for removing and red algae can remove green algae, red or causative substances of green and red algae from seawater or a source of water this approach of the art still has above-described in the is destroyed the oil treatment agent, since contaminants in water are removed by filter while contaminated water is introduced by the pump, and is by a chemical Therefore, there is required emergency able to very easily contaminants destroying in of water contaminants, such as only oil but also red and green algae. 1. present invention relates to a method of forming titanium (Ti) film to be used as contact metal film or an adhesion layer for a semiconductor device by chemical vapor process. 2. Description of the Related Art Recently, semiconductor integrated circuits are in a circuit configuration of a multilevel structure to with demand for and large-scale integration. techniques for filling holes for the of semiconductor formed a wiring lines formed in upper wiring and holes for the electrical connection wiring different wiring layers have become important. Generally, aluminum (Al), tungsten (W), aluminum-base alloys and tungsten-base used for filling contact and holes. If a contact hole (or a vie
 a control unit. The water introDucing part IntroDucEs cOnTamiNateD water in order tO RemoVe floating matter using a FilteR. THE watER pUmp puMps contAMiNATed WaTeR thRoUGh The waTer IntroduCing part. ThE inLiNe mixer stirs COnTaminated wAteR supplied thrOugH the waTeR puMP. The cHemIcal iNtroduCIng parT introducEs CHemicaLS into coNTAmInatEd water in order to pURiFY contaminated wAter in ThE InLINe mIxeR. The electrIcAl celL ElectriCAlLY COagULates contaminAnts in contaMInaTed watEr And OXidizeS and rEdUCes ContaminateD watEr. The floaTing anD SeparatINg bath aLlows cOntAmiNateD WaTeR trEaTEd iN ThE elECtrIcal cell To ReMain fOr a pREDETermIneD perIod of Time in order to PurIfy cONtaMinatEd watEr thRoUgh chEmical ReactIoNs, and removes finE parTicles froM coNtAmiNaTed waTEr by flOatIng Fine parTicles uPWarDs, THEReBy producing a supernAtANT tHrough flOating ANd SePAration pRoCesSing. tHE disk FiltER fIlters fiNe partICuLaTes from ThE superNaTanT puRifieD ThroUgh the Floating And sePArating bath. The SUpernatant, froM WhICH fINe paRtiCulates are rEmovED thrOugh THe DisK FilteR, is diScHArGEd to the sea through thE oUtlet. THe conTrol unit contrOls contamiNATEd water tReatMEnT Processing usinG a proGrammable lOGic contrOller (pLC) progrAm. In this mANNer, the apParAtuS foR reMOViNg green and red ALGae cAn Remove gReeN algae, rEd aLgaE, or CauSaTive substAnces of gReEn AnD rEd aLgae fROm seawatEr Or a SoUrcE of waTEr suppLy.
HowEver, ThIs APprOach of tHE rELAted ArT sTill Has ThE abovE-desCRibEd problEm in that tHe eCOsysTeM iS destroYed by the oil trEaTment agent, SiNce ContamINAnts in waTer are removed by the filteR While coNtaMinatEd waTer is intrOduCed by tHe pUMp, and cOntamiNated WaTer IS PurifIED bY a cHeMical agent.
tHEreFore, tHeRe is RequireD an emergency solutiON abLe to very easilY reMove WATeR coNTaMInaNtS WitHOUt destroying the Marine ecosYsTEm In operatioNS of ReMoving wAter conTaminANts, such As not only Oil but alsO rEd alGAE anD green algaE. 1. Field of The InventIOn
The PReSent iNveNtion rElAteS to a mEthod oF ForMing a TitaniUm (ti) film To be uSeD as a contAct metal film or an adhesioN layer For a sEmiConductor DevICe bY a chemicaL vapOr depositiOn (CvD) pRocesS.
2. DeSCriptIon oF ThE ReLAted ARt
ReCEntly, most SEmIcoNDUcTor integratED CIrcUits aRe fABricatEd in A circuit configuraTIon of a multilevEl stRUCtuRe tO Cope WiTh market demand For HiGH-Density aNd Large-scale iNtegratiOn. aCcordIngly, tEchniqUes for fILLiNG contaCt hoLes For the eleCtrIcAL connecTiOn OF semicOnduCtOr deviCes forMEd in A LOwer layer to wirinG lineS FOrmed IN upPer wiRiNg layerS, And vIa holes for The electricAl connEctiOn of wIring liNeS in difFerEnT wiring layERs have becOme imPortant.
geNeraLly, AluminUm (Al), TUNgsteN (W), alUmInuM-base alloYS AnD TuNgSTen-Base AlloyS aRe usEd for fillINg contacT hoLEs and viA hOleS. iF a contACt HOLe (or a vie
 a control unit. The water  introduci ng pa rtint ro duce s co ntaminated wat e r in  order to remove float ing m at t er u s in g a f ilter.T he w ate rpu mppu m ps  cont ami nated w ater throu ghth e water intr o du cing part.  Th e inline mix erstirsco nta m inate d w atersuppli e d thro ugh the w at e r pump .  The ch e m ic al i ntroducing part i n tr o duces chemical s into  c o nt a m ina ted  water inor der t o  purify co n t a min a ted water inthe inlinem ixe r. The  e lec t ricalcellel e ctr ically coag ulat es contam inants in cont a minated  water  an d o xidi z es  a ndre d uce s  c ont a min ated wat er .The f loat i n g andsep arat ing b ath allows co nta mina t edwater  trea tedin  theelectr icalce ll to remain fo r apredeterm ine dper io d oft ime in  or der  to pur ify con t ami na t e d  w ater through chemi ca l re actions,  and r e mo ve s  fine pa rt icl es f r o m con tami n at ed water  by fl o at in g finepa rticle supw ard s, th e reby  produ cing a s upern a tant through f l oating and se p ar a t io n  pro ces sing. The d iskf ilte r fi l te rsf ine p artic ul a te s  from the supernata nt  purif ied t hrough the fl oating and s e parating  bat h .T he supernatant , fro m which fi n e partic ulate s are re moved thr o u gh the d isk  fi lte r,i s  d ischarged tot h e se athrough  th e outle t.The  co ntr ol  unit con trols co nt am in at edwater treatmen tpro ce ssi ng us i ng a p rogra mmab le  l o gic  contro l le r (PLC )pr ogra m.In  this  man n er,  the ap paratus f orr emov in ggreen a nd red algaeca n remove g re enalgae, r ed algae , or causative substanc e s of gr een  andredalgae fro m s eawate r o r  a sou rce of  wate rsup p l y.
Ho w e ve r,th is approac h ofthe r el ated  art st ill has the above- d esc ribed problem  in  tha t th e e c os y ste mi s d e s troyed by the o il treatme nt ag ent, since con ta minants  in wat er ar e  remove d by thefilter wh il e co n t ami nated wate r is int roduced b y  thep um p, an d c ontami na ted  wate r is p u rif ied b y a ch em ical a gent. 
T herefore , there is required anemerge ncy s olu tion able  to ver y easilyremo ve water c ont ami nants  wi t houtdest r oy ing the m arin e  ecosyste m  i n o p e ra tions of re m o v ing  wate r c o ntamin ants , such as not onl y  oil but alsoreda l gae  an d  gre en  algae. 1. Fie ldof t he Inven ti on
The pres ent inve nt i on re latesto a m ethod o f fo r ming a  tit ani um (Ti) f ilm  t o  be use das a cont actme tal fi lm ora n ad h e sion layer for a  semi c o nduct o r d evice  b y a che m ical  vapor dep osition (CV D) pro cess .
2.Descrip ti on ofthe  R elated Art Recently,  most  semico nd ucto r i ntegra tedc i rcuit s ar efab ricated i n ac ir cu i t c onfi gurat io n of  a multil e vel stru ctu r e to co pe  wi t h  marke t  d e m and for hi gh- densi t y  and large - scal e  i n tegra tion.Accord ingly,t ech ni ques fo r f i l ling cont act holes for  t he e lectrica lconn ec tio nof semiconducto r device s formed i n a lo wer laye r  to wi ri ng lines for med i nu pper wi r i nglayers, and  vi a h oles  fo r th e  electrical connection o f wi ringl ine s indiffe re nt wirin g  lay ers have become import ant.
Generally, alu m inum  (A l ),  t ungsten ( W), alumi num- bas e al loy s an d tung s ten- b as e al loys a re u se dfor filli ng  contac t  hol e s a nd v ia ho le s. If  a cont act hole  (oravie
 a_control unit._The water introducing part_introduces contaminated_water_in order_to_remove floating matter_using a filter._The water pump pumps_contaminated water through_the_water introducing part. The inline mixer stirs contaminated water supplied through the water pump._The_chemical introducing_part_introduces_chemicals into contaminated water in_order to purify contaminated water_in the_inline mixer. The electrical cell electrically coagulates contaminants_in_contaminated water and_oxidizes and reduces contaminated water. The floating and separating_bath allows contaminated water treated in_the electrical cell_to_remain_for a predetermined period_of time in order to purify_contaminated water through chemical reactions, and_removes fine particles from contaminated water by_floating fine particles upwards, thereby producing_a supernatant through floating and_separation processing._The disk filter filters fine_particulates from the_supernatant purified_through the floating_and separating bath. The supernatant, from_which fine particulates_are removed through the disk filter,_is_discharged to the_sea_through_the outlet._The control unit_controls_contaminated water_treatment_processing using a programmable logic controller_(PLC)_program. In this manner, the apparatus for_removing green and red_algae_can remove green algae,_red algae, or causative substances_of green and red algae from_seawater or_a source_of water supply.
However, this approach of the related art still has_the above-described problem in that the_ecosystem is destroyed by_the oil_treatment_agent, since contaminants_in_water are_removed by the filter while contaminated water_is introduced_by the pump, and contaminated water_is purified by a_chemical_agent.
Therefore, there is required an emergency_solution able to very easily remove_water contaminants without destroying the_marine_ecosystem_in operations of removing water_contaminants, such as not only oil_but also red_algae and green algae. 1. Field of_the_Invention
The present invention relates to a_method_of forming a titanium (Ti) film_to_be_used as a contact metal_film or an adhesion layer for_a semiconductor device by a chemical vapor deposition (CVD)_process.
2. Description of_the Related Art
Recently, most semiconductor_integrated_circuits_are fabricated in a circuit configuration of a multilevel structure_to cope_with market demand_for high-density and large-scale integration. Accordingly, techniques for filling contact_holes for the electrical connection of semiconductor_devices formed in a lower layer to wiring lines formed in_upper wiring layers, and via holes for the_electrical connection of wiring lines in different_wiring layers have become_important.
Generally,_aluminum (Al), tungsten (W), aluminum-base alloys and_tungsten-base_alloys_are_used for filling_contact holes and_via holes. If_a contact_hole (or a_vie