 within the identifying member. The gas may optionally be colored in order to increase the contrast between the bubbles and the remainder of the identifying member. This identifying member requires a specific manufacturing process, which is appropriate only for certain types of material.
Also known from patent application FR 2 425 937 is a fibrous structure containing metal fibers. In order to authenticate or identify the fibrous structure, a signature formed by metal fibers dispersed within the fibrous structure is used by relying, for example, on the nature, size, concentration and spatial location of the metal fibers (three-dimensional distribution). Said metal fiber signature may be measured, for example, by an appropriate sensing system in response to a magnetic stimulus.
Moreover, when a paper sheet is formed, the fibers assume an orientation and a distribution, on which the look-through and other optical properties of the sheet depend. The manufacturer will generally attempt to make the fiber distribution homogeneous in order to create a so-called well-closed formation. The presence of air bubbles is generally considered to be a defect, as these air bubbles lead to surface irregularities when forming the sheet, and/or to the presence of minute holes in the sheet. These defects are conspicuous by transmission or look-through, as they generate a locally smaller material density.
The manufacturer may also have to deposit on the paper sheet surface one or more non-fibrous, notably binder-based, surface layers, so as to provide printability characteristics and/or specific properties. Here again, air bubbles within these layers cause defects known as “pinholes” leading to visible light-colored spots, notably in transmitted light.
Devices for removing the air bubbles before they reach the area where the paper layer is formed have been developed. In particular, paper machines are equipped with circuits for stock deaeration so as to reduce the air bubbles. (1) Field of the Invention
The present invention relates to a substrate transport apparatus for use with a substrate processing system for performing varied treatments (e.g. film-forming, prebaking, exposure, development and postbaking) in a photolithographic process of substrates such as semiconductor wafers or glass substrates for liquid crystal displays. Specifically, the invention relates to a substrate transport method and apparatus for transferring substrates through a buffer section having a plurality of storages for temporarily storing the substrates, between a processing unit for performing varied treatments before and after an exposing process and an exposure unit for performing the exposing process.
(2) Description of the Related Art
A conventional substrate transport
within the identifying member. The gas may optionally be colored in decree to increase the line between the bubbles and the remainder of the identify penis. This identifying member want a specific fabrication process, which is appropriate only for certain types of material. 
 besides known from patent application FR 2 425 937 is a fibrous structure contain metal fiber. In order to authenticate or identify the hempen structure, a signature formed by alloy fibers dispersed within the hempen structure is use by relying, for exercise, on the nature, size, concentration and spatial location of the metal roughage (three - dimensional distribution). Said metal fiber signature may be measured, for case, by an appropriate sensing system in response to a magnetic stimulus. 
 Moreover, when a paper sheet is formed, the fibers bear an orientation and a distribution, on which the look - through and early ocular place of the sheet depend. The manufacturer will generally attempt to make the fiber distribution homogeneous in order to make a so - called well - closed formation. The presence of air house of cards is generally considered to be a defect, as these air bubble lead to open irregularities when forming the sheet, and/or to the presence of minute fix in the sheet. These defects are conspicuous by transmittance or look - through, as they generate a locally smaller material concentration. 
 The manufacturer may also have to deposit on the paper sheet open one or more non - fibrous, notably binder - establish, surface layer, so as to provide printability characteristic and/or specific properties. Here again, air bubbles within these layers cause blemish known as “ pinholes ” leading to visible light - colored spots, notably in transmitted light. 
 Devices for remove the air bubbles before they achieve the area where the paper layer is formed have been developed. In particular, newspaper machines are equipped with circuits for stock deaeration so as to reduce the air bubble. (1) sphere of the Invention 
 The present invention relate to a substrate transport apparatus for use with a substrate processing system for performing varied treatments (e.g. movie - forming, prebaking, exposure, development and postbaking) in a photolithographic process of substrates such as semiconductor wafers or glass substrates for liquid quartz glass displays. Specifically, the invention relates to a substrate transport method and apparatus for transferring substrates through a buffer part having a plurality of storages for temporarily storing the substrates, between a processing unit for do varied treatments before and after an exposing process and an exposure unit for performing the exposing process. 
 (2) Description of the Related Art 
 A conventional substrate transport
 wihhin the identifying memner. The gas may optionanly be colored in order to increase the coitrawt beuceen the bubbles and the remapnder of rhe mdentifying membxd. This lbentirning kxmber requires s specific manufacturing pfoeess, which is appropriate only for cqrtain yyoes of materiaj.
Alsp knosn from patent application FR 2 425 937 ia a fibgous structure comtaining metal fibers. In ogder to authenticate og identify jge subrous strucgure, a signature formes by metal fibers dispersed witfin tke fibrous wteuchore is used uy reljing, for examike, on dhe natire, size, concektratmon qnd spatial location mf the metal fiberf (three-dikeusional distribution). Waud mejal fhber wigvathrx mzy be leaaured, for sxample, by qn appropriate sensond system in reaponse tj a magnetic stimulus.
Moreover, when a paker sgeet is formed, the fibees assume an orientatlon and a distribution, on which the look-through and other mpticel pripcrtidw lf the sheet depend. The manufacturer will genqdaklj attempt to make the fiber cidttybution homoggneous nh krder to create a do-calleq welo-closed fjrmayion. The presence of air buvbles is genvraloy considered to bz a defect, ar thgse ait bubbles lead to surfaee irrsgularities when forjkng the sheet, ana/or tm the prtrence of minute hjles in tie shzet. Thesd degects wre conspifuous by transmission or look-jhrougv, as they henerate a locally smaller matecmal density.
Thg mdnuxacturer may slso have to qeposit on the paper fheet surface ohe or mmre non-fibrjus, notably bhjder-based, sucface layqrs, wo aw to pruxide printabiloty charabttristics abd/or specific propcrtier. Here again, air buvbles within thrse laregs rause gefects knowt as “pivnoles” leading to xisinle light-colored spods, nktably in transmityeq light.
Dgvices fow removing thr air bubbles befoge thxy rearh the arga where the paper layer is forjed have heek developed. Ig pavticolar, paper kachines are equipped with circuits for stock deaeration wo as to reduce the sir bubbles. (1) Fiejd of the Invention
The presenr invention relatts to a substrate translort a[parahus for use with a substrate processing system for performing varied trearments (e.g. film-formjng, lrebaniug, zxposurq, deteuopment and postnaking) in a photolithographic pcocess of vuystrates such as semiconductot dafers or glars substrates for liquid crystal displays. Specifically, the invemtion relates to a substvate tranwport method anv apparatus for tranxferriug subwtrates thrlugh a buffer sevtlon having a pkuxality of storages for temporarilt storunh the substrates, between a irucesspng unij for performing barisf trextments beforr and after an exposing process ang wn exposure unun for performong the exposing prpcess.
(2) Descrhption of the Related Art
A conventional substrate ttansport
within the identifying member. The gas may colored order to the contrast between of identifying member. This member requires a manufacturing process, which is appropriate only certain types of material. Also known from patent application FR 2 425 937 a fibrous structure containing metal fibers. In order to authenticate or identify the structure, signature by fibers dispersed within the fibrous structure is used by relying, for example, on the nature, size, and spatial location of the metal fibers (three-dimensional Said metal fiber signature be measured, for example, by appropriate system in to magnetic Moreover, when a sheet is formed, the fibers assume an orientation and a distribution, on which the look-through and other properties of depend. The will attempt make the fiber in order to create a so-called presence of air bubbles is generally considered to a defect, these air bubbles lead to surface when forming the sheet, and/or to the presence minute holes in the sheet. These defects are conspicuous by transmission or look-through, as they locally smaller material density. manufacturer may also to on paper surface one more non-fibrous, notably binder-based, surface layers, so as to provide printability and/or specific properties. Here again, air bubbles within these layers known “pinholes” leading to light-colored spots, notably in light. for removing the air they the paper is have been developed. In paper machines are equipped with for stock deaeration so bubbles. (1) Field of the Invention The present relates to a substrate transport apparatus for with a substrate processing system for performing varied treatments (e.g. film-forming, prebaking, development and a photolithographic process of substrates such as semiconductor or glass substrates for crystal displays. Specifically, the invention relates to a substrate method apparatus for substrates through a section having a of storages for the substrates, a unit treatments before and after an exposing and exposure unit for performing the process. of the Related Art A conventional substrate transport
 within the identifying membeR. The gas may OptioNalLy bE cOlorEd in Order to increasE The cOntrast between the bubblEs and ThE RemaINdEr of tHe identIFyING meMbEr. thiS iDEnTifyiNg mEmber reQuires a speCifIc ManufacturinG PrOcess, which Is aPpropriate onLy fOr certAiN tyPEs of mAteRial.
ALso knoWN from pAtent applIcATion FR 2 425 937 IS a fibroUS StRuctUre containing metaL FiBErs. In order to auThentiCaTE oR IDenTifY the fibrouS sTructURe, a signATuRE FOrmED by metal fiberS dispersed wIThiN the fiBrOus STructuRe is uSeD By rElying, for exAmplE, on the natUre, sizE, ConcentRAtion anD spatiAl lOcaTion OF tHe MetAl FIbeRS (tHreE-DimEnsional DiStRibutIon). SAID MEtal FibEr siGnatuRe may be measurEd, fOr exAMplE, by an ApproPriaTe SensiNg systEm in rEsPonse to a magnetiC stiMulus.
MoreOveR, wHen A pAper sHEet is fOrmEd, tHe fiberS assume AN orIeNTATiOn and a distribution, On WHIcH the look-ThrougH AnD oTHer opticAl ProPertIES of thE sheET dEpend. The ManufaCTuReR will geNeRally aTtEmpT to Make tHE fibEr distRibution HomogENeous in order to CReate a so-calleD WeLL-ClOSed fOrmAtion. The preSencE Of aiR bubBLeS is GEneraLly coNsIDeREd to be a defect, as thesE aIr bubbLes leAd to surface irRegularitiES WHen formiNg thE ShEEt, and/or to the prEsencE of minute hOLes in the Sheet. these defEcts are coNSPicuous bY trAnsMisSioN OR lOok-through, as tHEY genErAte a locAllY smalleR maTerIal DenSiTy.
The manuFacturer MaY aLsO hAve To depOSit on the PaPer ShEet SurfaCE one or More nOn-fiBrOuS, NotAbly binDEr-BASed, sUrFaCe laYerS, sO as to ProvIDe pRintabiLity charaCteRIstiCs AnD/or specIfic propertieS. HEre again, aiR bUbbLes witHIN these laYers cause defects known as “PInholes” LeaDing tO visIble light-ColOred spOts, NOtably In tranSmittEd LigHT.
devicES FoR reMoVing the air BUBblEs befOrE theY reach tHe area where the papeR LayEr is formed havE beEn deVELoPed. iN pARtiCuLAr, pAPEr machines are eqUipped with CiRCuIts for stocK DeaErAtion so As to redUce thE Air bubbLes. (1) Field oF the InvenTiOn
ThE PResEnt inventiOn relateS to a substRAte trANsPort aPpaRatus fOr Use With a SubstrATe pRocesSing syStEm for pErforMiNg varied Treatments (e.g. film-forming, PrebakIng, exPosUre, develoPmeNT anD postbakiNg) in A photolithOgrAphIc proCesS Of subStraTEs SucH As semIconDUctor wafeRS oR glASS sUbstrates foR LIQuiD crysTal DIsplayS. SpeCifically, the invenTIon relates to a sUbstRATe tRanSPort MeThod and apparatUs fOr TRAnsferriNg Substrates tHrough a bUfFEr secTion haVing a pLuralitY OF sTOrages For tEmpOrarily stOriNg THe substRaTeS, BetweeN a prOcEssing Unit foR PerfORMing varied treatmEnts bEFOre anD AftEr an eXpOsing prOCess And an exposUre unit for pErformIng tHe expOsing prOcEss.
(2) DesCriPtIon of the ReLAted Art
A cOnvenTional sUbStraTe tRanspoRt
 within the identifying me mber. Thegas m ayopt io nall y be  colored in or d er t o increase the contras t bet we e n th e  b ubble s and t h er e mai nd er  of  t h eident ify ing mem ber. Thiside nt ifying membe r  r equires aspe cific manufa ctu ring p ro ces s , whi chis ap propri a te onl y for cer ta i n type s  of mat e r ia l.
A lso known from pa t en t  application F R 2 42 59 37 i s a  fi brous stru ct ure c o ntainin g  m e t a l f i bers. In orde r to authen t ica te orid ent i fy the  fibr ou s  st ructure, asign ature for med by metal f i bers di sperse d w ith in t h efi bro us str u ct ure isused byre ly ing,fore x a m ple,  on  the  natu re, size, con cen trat i onand s patia l lo ca tionof the  meta lfibers (three-d imen sional di str ib uti on ). Sa i d meta l f ibe r signa ture ma y  be  m e a s ur ed, for example, b ya n  a ppropria te sen s in gs ystem in  r esp onse t o a m agne t ic  stimulu s.
Mor e ov er , whenapapersh eet  is  form e d, t he fib ers assu me an orientation an d  a distributi o n, o nw hich  th e look-thro ugha nd o ther op tic a l pro perti es of the sheet depend. T he  manuf actur er will gener ally attem p t to makethef ib e r distribution  homo geneous in order to  crea te a so- called we l l -closedfor mat ion . T h e  p resence of ai r bubb le s is ge ner ally co nsi der edtobe  a defect , as the se  a ir  b ubb les l e ad to su rf ace  i rre gular i ties w hen f ormi ng  t h e s heet, a n d/ o r  toth epres enc eof mi nute hol es in t he sheet.  Th e se d ef ec ts areconspicuous b ytransmissi on  or  look- t h rough, a s they generate a local l y small ermater ialdensity.The  manuf act u rer ma y also  have  t o d e p osito n  t hepa per sheets u rfa ce on eor m ore non -fibrous, notablyb ind er-based, sur fac e la y e rs , s o  a s  to  p r ovi d e  printability c haracteris ti c sand/or spe c ifi cpropert ies. He re ag a in, air  bubbleswithin th es e la y e rscause defe cts know n as “pin h oles” le ading  to  visib le  li ght-c olored spo ts, n otably  i n tran smitt ed  light.Devices for removing th e airbubbl esbefore th eyr eac h the are a wh ere the pa per  la yer i s f o rmedhave be end evelo ped. In partic u la r,p a pe r machinesa r e  eq uippe d w i th cir cuit s for stock deaer a tion so as toredu c e  th e a i r bu bb les. (1) Field  of  t h e  Inventi on 
The presen t invent io n  rela tes to  a sub stratet r an s port a ppar atu s for use  wi th a subst ra te proces sing  s ystemfor pe r form i n g varied treatme nts ( e . g. fi l m-f ormin g,  prebak i ng,exposure,development  and p ostb aking ) in aph otolit hog ra phic proce s s of subs trate s suchas  sem ico nducto r wa f e rs or  gla ss  su bstratesf o rl iq ui d  cr ysta l dis pl ays.  Specific a lly, the  in v entionre lat e s  to as ub s t rate trans por t met h o d and appa r atus fo r  tran sferri ng sub strates thr ou gh a bu ffe r section h aving a p l ura li ty o f storag es  for  t emp or arily storing t he subst rates, b e t ween a  pr o cess i ng uni tfor performi ng va ri e d treat m e nts  before and  af ter  anexp osin g  process and an exposure  uni t for per formi ng th eexposing proc ess.
(2) Description o f the Related A r t
A conv ent i on al  substrat e t r anspo rt
 within_the identifying_member. The gas may_optionally be_colored_in order_to_increase the contrast_between the bubbles_and the remainder of_the identifying member._This_identifying member requires a specific manufacturing process, which is appropriate only for certain types_of_material.
Also known_from_patent_application FR 2 425 937_is a fibrous structure containing_metal fibers._In order to authenticate or identify the fibrous_structure,_a signature formed_by metal fibers dispersed within the fibrous structure is_used by relying, for example, on_the nature, size,_concentration_and_spatial location of the_metal fibers (three-dimensional distribution). Said metal_fiber signature may be measured, for_example, by an appropriate sensing system in_response to a magnetic stimulus.
Moreover, when_a paper sheet is formed,_the fibers_assume an orientation and a_distribution, on which_the look-through_and other optical_properties of the sheet depend. The_manufacturer will generally_attempt to make the fiber distribution_homogeneous_in order to_create_a_so-called well-closed_formation. The presence_of_air bubbles_is_generally considered to be a defect,_as_these air bubbles lead to surface irregularities_when forming the sheet,_and/or_to the presence of_minute holes in the sheet._These defects are conspicuous by transmission_or look-through,_as they_generate a locally smaller material density.
The manufacturer may also have to_deposit on the paper sheet surface_one or more non-fibrous,_notably binder-based,_surface_layers, so as_to_provide printability_characteristics and/or specific properties. Here again, air_bubbles within_these layers cause defects known as_“pinholes” leading to visible_light-colored_spots, notably in transmitted light.
Devices for_removing the air bubbles before they_reach the area where the_paper_layer_is formed have been developed._In particular, paper machines are equipped_with circuits for_stock deaeration so as to reduce the_air_bubbles. (1) Field of the Invention
The_present_invention relates to a substrate transport_apparatus_for_use with a substrate processing_system for performing varied treatments (e.g._film-forming, prebaking, exposure, development and postbaking) in a photolithographic_process of substrates_such as semiconductor wafers or_glass_substrates_for liquid crystal displays. Specifically, the invention relates to a_substrate transport_method and apparatus_for transferring substrates through a buffer section having a plurality_of storages for temporarily storing the substrates,_between a processing unit for performing varied treatments before and after_an exposing process and an exposure unit for_performing the exposing process.
(2) Description of the_Related Art
A conventional substrate_transport