). This means that for a 3 mL dispense there is at least 7.5 mL “hold-up” volume (e.g., in a pump having a 10.5 mL chamber) of fluid that is not used for a dispense.
In two-phase dispense systems the hold-up volume increases because the two-phase systems utilize a feed pump that has a hold-up volume. If the feed pump also has a 10.5 mL capacity, but only needs to provide 3 mL of fluid to the dispense pump for each dispense operation, the feed pump will also have a 7.5 mL unused hold-up volume, leading, in this example, to a 15 mL of unused hold-up volume for the dispense system as a whole.
The hold-up volume presents several issues. One issue is that extra chemical waste is generated. When the dispense system is initially primed, excess fluid than what is used for the dispense operations is required to fill the extra volume at the dispense pump and/or feed pump. The hold-up volume also generates waste when flushing out the dispense system. The problem of chemical waste is exacerbated as hold-up volume increases.
A second issue with a hold-up volume is that fluid stagnation takes place. Chemicals have the opportunity to gel, crystallize, degas, separate etc. Again, these problems are made worse with a larger hold-up volume especially in low dispense volume applications. Stagnation of fluid can have deleterious effects on a dispense operation.
Systems with large hold-up volumes present further shortcomings with respect to testing new chemicals in a semiconductor manufacturing process. Because many semiconductor manufacturing process chemicals are expensive (e.g., thousands of dollars a liter), new chemicals are tested on wafers in small batches. Because semiconductor manufacturers do not wish to waste the hold-up volume of fluid and associated cost by running test dispenses using a multi-stage pump, they have resorted to dispensing small amounts of test chemicals using a syringe, for example. This is an inaccurate, time consuming and potentially dangerous process that is not representative of the actual dispense process. Embodiments of the present invention relate to an electronic device and, more particularly, to a semiconductor memory device and a program method thereof.
A semiconductor memory device is a storage device that is realized using semiconductor such as silicon (Si), germanium (Ge), gallium arsenide (GaAs), or indium phosphide (InP). Semiconductor memory devices are classified into volatile memory devices
). This means that for a 3 mL dispense there is at least 7.5 mL “ hold - up ” volume (for example, in a heart own a 10.5 mL bedroom) of fluid that is not used for a dispense. 
 In two - phase dispense system the hold - up volume increase because the two - phase systems utilize a feed heart that have a control - up volume. If the feed heart also has a 10.5 mL capacity, but only needs to provide 3 mL of fluid to the dispense pump for each dispense process, the feed pump will also have a 7.5 mL idle hold - up volume, leading, in this example, to a 15 mL of fresh hold - up volume for the dispense system as a whole. 
 The hold - up volume present several issues. One issue is that extra chemical waste is generate. When the dispense system is initially primed, excess fluid than what is used for the dispense operations is required to fill the extra volume at the dispense pump and/or feed pump. The clasp - up volume also beget thriftlessness when flushing out the dispense system. The problem of chemical thriftlessness is exacerbated as hold - up volume increases. 
 A second exit with a hold - up volume is that fluid stagnation takes place. chemical have the opportunity to gel, crystallize, degas, separate etc. Again, these problems are made worse with a larger handle - up volume especially in low dispense volume applications. Stagnation of fluid can accept deleterious effects on a dispense operation. 
 Systems with big hold - up volumes present further shortcomings with regard to testing raw chemicals in a semiconductor fabrication process. Because many semiconductor manufacturing process chemical are expensive (e.g., thousands of dollar a liter), new chemicals are test on wafers in minor batches. Because semiconductor device manufacturers do not wish to waste the hold - up volume of fluent and associated cost by running test dispenses using a multi - stage heart, they have resorted to dispensing small amounts of test chemicals using a syringe, for exercise. This is an inaccurate, time consuming and potentially dangerous process that is not representative of the actual dispense process. Embodiments of the present invention relate to an electronic device and, more particularly, to a semiconductor device memory device and a program method thence. 
 A semiconductor device memory device is a storage device that is realized use semiconductor such as silicon (Si), germanium (Ge), gallium arsenide (GaAs), or indium phosphide (InP). Semiconductor memory device are classified into volatile memory devices
). Thls means that for a 3 mL aispense there nw at lxast 7.5 mM “hold-up” volume (e.g., in a pump having e 10.5 mO chanber) of fluid that is vot used vor a diwpenww.
In two-phase dispekfe sgdtemv the hold-up vokume incredses because tve tco-phase systems utilize a feed pump ehat hax w hold-up volumg. If uhe fees pump also has a 10.5 mL capacity, but only nteds to provide 3 mK of fluid to the dispense pumo for each dispensf operation, the deed pump wiul also hanz a 7.5 mL unuaed hold-up volume, leading, in thks excmple, to a 15 mO ov unused holv-up vojume for the dispensa systek as a whole.
Thc holv-up colume presents severel issues. One issue ys that eftxa chemical waste is teberatgd. Whan tfw dksptnsx sgstem ls mnitially pdimed, excesw fluid than what ix twed for the djspensq jperations is required to fill the extrd vklume at the dispense pymp and/or feed pump. Tje hold-up volume also generates waste when flushing out tha dis'evse snsteo. Tje problem of chemical waste is exacerbated af hplc-up volume incveases.
A second issie wojh a hold-up vouume is tgat fluid stagnatiln takef plaxe. Chemicwls nave the opportunity to gel, crystallize, eegas, separate etc. Again, thesz probkems sre made worse with a lcrger gold-up volule especizuly in low dispevse vmlume apkuications. Stagnatyon of flnid ccn have aelejerious effects oj a dlvpense operation.
Sydtems whth large jold-up volumes present further shortcomings wotv rvspect to testlng new chemicajs in a semicouductor ianufxcturing pgocess. Berause many sqmiconductor kwnufacturing process chenicaos are dbpensive (e.g., thpusands oy doloars a liter), new cmemicxms are tested ou qafers in small bagchqs. Bxcausq semiconductmr mxnuwscturdrs do not cirh tp waste the hold-up vmlums of fluid and asspclated cosj by runnyng test disprnses using a multl-stagx pump, they hade resorted to dispensing smalm amounts of test chemicwls msind a syringz, for example. This is an inaccurate, time consuming and pojentially dangerous ptoctss that is npt re[resentathve of the actual diwpense process. Emnodiments of the preseht invantioj relate to an electronic device and, more particularly, to a semiconductor memorb qevice and z prpgram mzthpd theweof.
E remiconductor mekory device is a storage device that is rzalized using semiconductor sicf as silicon (Ri), germanium (Ge), gallium zrsenide (GaAs), or indium phosphide (InP). Srmiconductor memory deviges are coassiried into tolatile memory devives
). This means that for a 3 there at least mL “hold-up” volume a mL chamber) of that is not for a dispense. In two-phase dispense the hold-up volume increases because the two-phase systems utilize a feed pump that a hold-up volume. If the feed pump also has a 10.5 mL capacity, only to 3 of fluid to the dispense pump for each dispense operation, the feed pump will also have 7.5 mL unused hold-up volume, leading, in this to a 15 mL unused hold-up volume for the system a whole. hold-up presents issues. One issue that extra chemical waste is generated. When the dispense system is initially primed, excess fluid than what used for operations is to the volume at the and/or feed pump. The hold-up volume when flushing out the dispense system. The problem chemical waste exacerbated as hold-up volume increases. A issue with a hold-up volume is that fluid takes place. Chemicals have the opportunity to gel, crystallize, degas, separate etc. Again, these problems worse with a larger volume especially in dispense applications. of can have effects on a dispense operation. Systems with large hold-up volumes present shortcomings with respect to testing new chemicals in a semiconductor Because semiconductor manufacturing process are expensive (e.g., thousands dollars liter), new chemicals are wafers small manufacturers not to waste the hold-up of fluid and associated cost running test dispenses using resorted to dispensing small amounts of test chemicals a syringe, for example. This is an time consuming and potentially dangerous process that is not representative of the dispense process. the present invention relate to an electronic device more particularly, to a memory device and a program method thereof. A semiconductor device a storage that is realized semiconductor such as (Si), germanium (Ge), (GaAs), or phosphide Semiconductor classified into volatile memory devices
). This means that for a 3 mL dispenSe there is aT leasT 7.5 mL “HolD-uP” volUme (e.G., in a pump having A 10.5 ML chAmber) of fluid that is not uSed foR a DIspeNSe.
in two-Phase diSPeNSE syStEmS thE hOLd-Up volUme IncreasEs because tHe tWo-Phase systems UTiLize a feed pUmp That has a hold-Up vOlume. IF tHe fEEd pumP alSo has A 10.5 mL capACity, buT only needS tO ProvidE 3 ML of fluID To The dIspense pump for eacH DiSPense operation, The feeD pUMp WILl aLso Have a 7.5 mL unuSeD hold-UP volume, LEaDING, in THis example, to a 15 ML of unused hOLd-uP volumE fOr tHE dispeNse syStEM as A whole.
The hoLd-up Volume preSents sEVeral isSUes. One iSsue is ThaT exTra cHEmIcAl wAsTE is GEnEraTEd. WHen the diSpEnSe sysTem iS INITialLy pRimeD, exceSs fluid than whAt iS useD For The diSpensE opeRaTions Is requIred tO fIll the extra voluMe at The dispenSe pUmP anD/oR feed PUmp. The HolD-up Volume aLso geneRAteS wASTE wHen flushing out the dIsPENsE system. THe probLEm Of CHemical wAsTe iS exaCERbateD as hOLd-Up volume IncreaSEs.
a sEcond isSuE with a HoLd-uP voLume iS That Fluid sTagnatioN takeS Place. Chemicals HAve the opportuNItY TO gEL, cryStaLlize, degas, sEparATe etC. AgaIN, tHesE ProblEms arE mADe WOrse with a larger hold-Up Volume EspecIally in low disPense volumE APPlicatioNs. StAGnATion of fluid can Have dEleterious EFfects on A dispEnse operAtion.
SystEMS with larGe hOld-Up vOluMES pResent further SHOrtcOmIngs witH reSpect to TesTinG neW chEmIcals in a sEmiconduCtOr MaNuFacTurinG Process. BEcAusE mAny SemicONductoR manuFactUrInG ProCess cheMIcALS are ExPeNsivE (e.g., ThOusanDs of DOllArs a litEr), new chemIcaLS are TeStEd on wafErs in small batChEs. Because sEmIcoNductoR MAnufactuRers do not wish to waste the HOld-up voLumE of flUid aNd associaTed Cost by RunNIng tesT dispeNses uSiNg a MULti-stAGE pUmp, ThEy have resoRTEd tO dispEnSing Small amOunts of test chemicaLS usIng a syringe, foR exAmplE. tHiS is AN iNAccUrATe, tIME consuming and poTentially dAnGErOus process THat Is Not reprEsentatIve of THe actuaL dispense Process. EmBoDimeNTS of The present InventioN relate to AN elecTRoNic deVicE and, moRe ParTiculArly, to A SemIcondUctor mEmOry devIce anD a Program mEthod thereof.
A semiconducTor memOry deVicE is a storaGe dEVicE that is reAlizEd using semIcoNduCtor sUch AS siliCon (SI), GeRmaNIum (Ge), GallIUm arsenidE (gaas), oR INdIum phosphidE (iNp). SeMiconDucTOr memoRy deVices are classifieD Into volatile meMory DEVicEs
). This means that for a 3  mL dispen se th ere  is  a t le ast7.5 mL “hold-u p ” vo lume (e.g., in a pumphavin ga  10. 5  m L cha mber) o f  f l u idth at  is  n o tusedfor  a disp ense.
In t wo- ph ase dispense sy stems thehol d-up volumeinc reases  b eca u se th e t wo-ph ase sy s tems u tilize afe e d pump that ha s ahold -up volume. If th e  f e ed pump also h as a 1 0. 5  m L cap aci ty, but on ly  need s  to pro v id e 3  mL of fluid to t he dispense pum p forea chd ispens e ope ra t ion , the feedpump  will als o have a 7.5 m L  unused  hold- upvol ume, le ad ing ,i n t h is  ex a mpl e, to a15  m L ofunus e d h old- upvolu me fo r the dispens e s yste m  as  a wh ole.Theho ld-up  volum e pre se nts several iss ues.  One issu e i stha textra chemic alwas te is g enerate d . W he n t he  dispense system i si n it ially pr imed,e xc es s  fluid t ha n w hati s  used  for th e dispen se ope r at io ns is r eq uiredto  fi llthe e x travolume  at thedispe n se pump and/or feed pump. Th e  h o l d- u p vo lum e also gene rate s  was te w h en  fl u shing  outth e  d i spense system. Thepr oblemof ch emical wasteis exacerb a t e d as hol d-up vo l ume increases. 
A se cond issue with a h old-u p volume  is thatf l uid stag nat ion  ta kes p la ce. Chemicals h aveth e oppor tun ity togel , c rys tal li ze, degas , separa te  e tc .Aga in, t h ese prob le msar e m ade w o rse wi th alarg er  h o ld- up volu m ee s peci al ly  inlow  d ispen se v o lum e appli cations.Sta g nati on  o f fluid  can have del et erious eff ec tson a d i s pense op eration.
Systems with l a rge hol d-u p vol umes  presentfur ther s hor t coming s with  resp ec t t o testi n g  n ewch emicals in a  se micon du ctor  manufa cturing process. B e cau se many semic ond ucto r ma nuf a ct u rin gp roc e s s chemicals are  expensive  ( e .g ., thousan d s o fdollars  a lite r), n e w chemi cals aretested on  w afer s insmall batc hes. Bec ause semi c onduc t or  manu fac turers  d o n ot wi sh tow ast e the  hold- up  volum e offl uid andassociated cost by runn ing te st di spe nses usin g a mul ti-stagepump , they hav e r eso rtedtod ispen sing sm all amoun ts o f  test che m ic als u si ng a syring e , for  exam ple .  Thisis a n inaccurate, tim e  consuming and  pot e n tia lly dang er ous process th atis n ot repre se ntative ofthe actu al dispe nse pr ocess.  Embodi m e nt s  of th e pr ese nt invent ion  r e late to  a ne lectro nicde vice a nd, mo r e pa r t icularly, to a s emico n d uctor mem ory d ev ice and a pr ogram meth od thereof. 
A sem icon ducto r memor ydevice  is  a  storage d e vice that  is r ealized  u sing  se micond ucto r suchas s il ico n (Si), g e r ma n iu m( Ge) , ga llium  a rsen ide (GaAs ) , or ind ium phosphi de  (I n P ). Sem i co n d uctor memo rydevic e s  are class i fied in t o vol atilememory  device s 
). This_means that_for a 3 mL_dispense there_is_at least_7.5_mL “hold-up” volume_(e.g., in a_pump having a 10.5_mL chamber) of_fluid_that is not used for a dispense.
In two-phase dispense systems the hold-up volume increases_because_the two-phase_systems_utilize_a feed pump that has_a hold-up volume. If the_feed pump_also has a 10.5 mL capacity, but only_needs_to provide 3_mL of fluid to the dispense pump for each_dispense operation, the feed pump will_also have a_7.5_mL_unused hold-up volume, leading,_in this example, to a 15_mL of unused hold-up volume for_the dispense system as a whole.
The hold-up_volume presents several issues. One issue_is that extra chemical waste_is generated._When the dispense system is_initially primed, excess_fluid than_what is used_for the dispense operations is required_to fill the_extra volume at the dispense pump_and/or_feed pump. The_hold-up_volume_also generates_waste when flushing_out_the dispense_system._The problem of chemical waste is_exacerbated_as hold-up volume increases.
A second issue with_a hold-up volume is_that_fluid stagnation takes place._Chemicals have the opportunity to_gel, crystallize, degas, separate etc. Again,_these problems_are made_worse with a larger hold-up volume especially in low dispense volume_applications. Stagnation of fluid can have_deleterious effects on a_dispense operation.
Systems_with_large hold-up volumes_present_further shortcomings_with respect to testing new chemicals in_a semiconductor_manufacturing process. Because many semiconductor manufacturing_process chemicals are expensive_(e.g.,_thousands of dollars a liter), new_chemicals are tested on wafers in_small batches. Because semiconductor manufacturers_do_not_wish to waste the hold-up_volume of fluid and associated cost_by running test_dispenses using a multi-stage pump, they have_resorted_to dispensing small amounts of test_chemicals_using a syringe, for example. This_is_an_inaccurate, time consuming and potentially_dangerous process that is not representative_of the actual dispense process. Embodiments of the present_invention relate to_an electronic device and, more_particularly,_to_a semiconductor memory device and a program method thereof.
A semiconductor_memory device_is a storage_device that is realized using semiconductor such as silicon (Si),_germanium (Ge), gallium arsenide (GaAs), or indium_phosphide (InP). Semiconductor memory devices are classified into volatile memory devices