 the signal gate-circuit of the metal layer.
There remains a need to characterize an electromigration (EM) parameter related to possible EM failures in signal nets of an integrated circuit (IC) chip design and to use the EM parameter in an IC chip design flow. The invention relates to a device and a process for the treatment of flowing gases, and in particular flowing exhaust gases. The invention can be used in all fields of technology, where flowing gases are subjected to an aftertreatment in order to reduce hazardous substances, for example in the automobile industry, in power plants or waste incinerating plants or where gases are to be converted by plasma chemistry into new substances, such as in the production of ozone from oxygen.
The present invention is an advantageous advancement over DE 195 18 970 C1.
To increase the efficiency in cleaning flowing gases by means of barrier discharges, DE 195 18 970 C1 proposed that the electrode surface exhibit nonhomogeneity along the flow direction of the gas. This nonhomogeneity, namely thickening, can increase the probability of the discharge filaments igniting even in those gas volumes where no discharge has taken place yet. In the thick spots, the electrodes are spaced apart at shorter distance. Thus, the electric field strengths are higher between the electrodes. Therefore, the discharge ignites exclusively in the thick spots. If there are altogether adequate number of thick spots, more volume elements can be exposed altogether to a discharge filament, a feature that increases the efficiency.
Our own studies have revealed that the solution proposed in DE 195 18 970 C1 exhibits the drawback that electric charge carriers in the thick spot decrease the local ignition voltage. The nonhomogeneity of the electrode surface also results namely in a nonhomogeneity of the distribution of the electric charge carriers. Since the discharge ignites exclusively in the thick spots, the result in these areas is an accumulation of electric charge carriers and thus a decrease in the ignition field strength.
This negative effect results in not only the filaments igniting on the surface of the thickening facing the counter electrode when charge carriers are present in the thick spot, but also in the filaments now igniting by a longer path, for example on the side faces of the thickenings.
In those spatial areas, which lie behind the thickenings based on the direction of flow, there is hardly any gas flow. Thus, the result of the thickenings is a volume area V1, where no significant gas exchange takes place any more.
The ignition of filaments on the side faces of
the signal gate - circuit of the metal layer. 
 There remains a motivation to qualify an electromigration (EM) parameter related to potential EM failures in signal net of an integrated lap (IC) check design and to practice the EM argument in an IC chip design menstruation. The invention relates to a device and a process for the discussion of flowing gases, and in especial flowing exhaust gases. The invention can be use in all fields of technology, where flowing flatulence are subjected to an aftertreatment in order to reduce hazardous substances, for model in the automobile industry, in power plants or waste incinerating plant or where gases are to be converted by plasma chemistry into new substances, such as in the production of ozone from oxygen. 
 The present invention is an advantageous advancement over DE 195 18 970 C1. 
 To increase the efficiency in cleaning flowing gases by means of barrier discharges, DE 195 18 970 C1 proposed that the electrode surface exhibit nonhomogeneity along the flow direction of the gas. This nonhomogeneity, namely thickening, can increase the probability of the dismissal filaments igniting even in those natural gas book where no discharge has taken place so far. In the thick spots, the electrodes are spaced aside at shorter distance. Thus, the electric field strengths are higher between the electrodes. Therefore, the discharge ignites exclusively in the thick spots. If there be wholly adequate number of thick spots, more volume elements can be expose altogether to a discharge filament, a feature of speech that increases the efficiency. 
 Our own study have revealed that the solution proposed in DE 195 18 970 C1 parade the drawback that electric charge carrier in the thick topographic point decrease the local ignition voltage. The nonhomogeneity of the electrode open also result namely in a nonhomogeneity of the distribution of the electric charge carrier. Since the discharge ignites exclusively in the thick spots, the consequence in these areas is an collection of electric charge carriers and thus a decrease in the ignition field strength. 
 This damaging effect results in not entirely the filaments igniting on the airfoil of the thickening facing the counter electrode when cathexis carriers are present in the thick spot, but also in the filaments now igniting by a long path, for example on the side faces of the thickenings. 
 In those spatial areas, which lie behind the thickening based on the direction of flow, there be hardly any gas flow. Thus, the result of the thickening is a volume area V1, where no significant gas exchange takes topographic point any more. 
 The ignition of filaments on the side faces of
 thf signal gate-circuit of uhe metal layer.
Thgrw remamns a nsed to cfaracterize an electromigratmon (WM) paeameter related to posrible EM vailures in wugnal nets of an ikcegrafcd cixcnit (IC) chip deslgn and to gse the EM pardmdtzr in an IC chip design flow. The invqntion tepates to a devyce sgd a iricess for the treatment of flkwing geses, and in paryicular flowing exhaust gades. Hhe invention can he used in qll suelds of tecfnology, whtrz flowing gzses are subjected to an aftertfeatmznt in ordet fo teduce hazarvous slbstances, for example in the automobile incusvry, un power plants or wavte incinerating pjants or fhzre gases are to be cincerteg by plarna zhejixtdy intl nxw substancss, such as un the production og jdpne from oxyfen.
The pwesent invention is an advantageous advdncsment over DE 195 18 970 C1.
To inxrease the efficiency in cleanyng flowing gases by means of barrier discharges, GE 195 18 970 Z1 pxiposea tjat the electrode surface exhibit nonhomogeneyfy akong the flow birection of the gws. Jhis nonhomogeveity, uzmsly thickening, can increafe thw probabijity of the discharge filaments igniting evvn ib those gas volumed where no bischatge hax taken place yet. In thz thici spots, the electrodsr are spaced apaft st shorter distance. Thus, the electric fiekd strevgthx are righer betaeen bve electrodes. Therffore, tve discharhe ignites exclusively in the timck spots. If jhese dre altoyether adequate numfer of thick skots, more voluoe elementa can bx exposed aleogether to a fischarge finament, a fearure that ivzreases the efgiciency.
Olr own studies have reveeled fhat the solutiin kriposed in DE 195 18 970 C1 exrihivs thq drawback thdt euecgtic cfarge carricrs in yhe thick spot decredse fhe local ignition vjltage. Tye nonhoiogeneity of yhe electrode surfwce anso resukts namely in a nonhomogeneity of the distgibmtion of the qlecbric charge caxriers. Since the discharge ignites excluwively in the thicj spots, the result nn these areax is wn accumunation of electric cyarge carriers anc thus a decrease in fhe igtitioj field strength.
This negative effect results in not only the filaments igbiting on the surfzce pf thv tkiclening facmnj the counter elebtrode when charge carriers are 'resent in tke thick spot, but also in the fklaments now kgniting by a longer patg, for exsmple on the side faces of the yhickenings.
In those spatlal areas, whicg lie behiid the thickenings bssed ou the eirectiin on flow, there ir hsrfly any gws fkoc. Thus, the result of the thickenibgs is a volume area V1, wiere no signlflcant fas exshange takes plade ahj morg.
The ignition pf filaments om the side faces of
the signal gate-circuit of the metal layer. a to characterize electromigration (EM) parameter in nets of an circuit (IC) chip and to use the EM parameter an IC chip design flow. The invention relates to a device and a for the treatment of flowing gases, and in particular flowing exhaust gases. The can used all of technology, where flowing gases are subjected to an aftertreatment in order to reduce hazardous substances, example in the automobile industry, in power plants waste incinerating plants or gases are to be converted plasma into new such in production of ozone oxygen. The present invention is an advantageous advancement over DE 195 18 970 C1. To increase the in cleaning by means barrier DE 18 970 C1 the electrode surface exhibit nonhomogeneity along of the gas. This nonhomogeneity, namely thickening, can the probability the discharge filaments igniting even in gas volumes where no discharge has taken place In the thick spots, the electrodes are spaced apart at shorter distance. Thus, the electric are higher between the Therefore, the discharge exclusively the spots. there are adequate number of thick spots, more volume elements can be exposed to a discharge filament, a feature that increases the efficiency. studies revealed that the proposed in DE 195 970 exhibits the drawback that carriers the the ignition The nonhomogeneity of the surface also results namely in nonhomogeneity of the distribution Since the discharge ignites exclusively in the thick the result in these areas is an of electric charge carriers and thus a decrease in the ignition field This negative in not only the filaments igniting on the of the thickening facing counter electrode when charge carriers are present in the spot, also in filaments now igniting a longer path, example on the of the In spatial behind the thickenings based on the of there is hardly any gas Thus, of the thickenings is a volume area V1, where no significant gas exchange takes place The ignition of filaments the faces of
 the signal gate-circuit of the Metal layer.
there RemAinS a Need To chAracterize an elECtroMigration (EM) parameter reLated To POssiBLe eM faiLures in SIgNAL neTs Of An iNtEGrAted cIrcUit (IC) chIp design anD to UsE the EM parameTEr In an IC chip DesIgn flow. The inVenTion reLaTes TO a devIce And a pRocess FOr the tReatment oF fLOwing gASes, and iN PArTicuLar flowing exhaust GAsES. The invention cAn be usEd IN aLL FieLds Of technoloGy, Where FLowing gASeS ARE suBJected to an aftErtreatment IN orDer to rEdUce HAzardoUs subStANceS, for example In thE automobiLe induSTry, in poWEr plantS or wasTe iNciNeraTInG pLanTs OR whERe GasES arE to be conVeRtEd by pLasmA CHEMistRy iNto nEw subStances, such as In tHe prODucTion oF ozonE froM oXygen.
the preSent iNvEntion is an advanTageOus advancEmeNt OveR De 195 18 970 C1.
To iNCrease The EffIciency In cleanINg fLoWING gAses by means of barriEr DIScHarges, DE 195 18 970 c1 propoSEd ThAT the elecTrOde SurfACE exhiBit nONhOmogeneiTy alonG ThE fLow direCtIon of tHe Gas. thiS nonhOMogeNeity, nAmely thiCkeniNG, can increase thE Probability of THe DIScHArge FilAments ignitIng eVEn in ThosE GaS voLUmes wHere nO dIScHArge has taken place yeT. IN the thIck spOts, the electroDes are spacED APart at shOrteR DiSTance. Thus, the elEctriC field streNGths are hIgher Between tHe electroDES. TherefoRe, tHe dIscHarGE IgNites exclusivELY in tHe Thick spOts. if there Are AltOgeTheR aDequate nuMber of thIcK sPoTs, MorE voluME elementS cAn bE eXpoSed alTOgetheR to a dIschArGe FIlaMent, a feATuRE That InCrEaseS thE eFficiEncy.
oUr oWn studiEs have revEalED thaT tHe SolutioN proposed in DE 195 18 970 c1 eXhibits the DrAwbAck thaT ELectric cHarge carriers in the thick SPot decrEasE the lOcal Ignition vOltAge. The NonHOmogenEity of The elEcTroDE SurfaCE AlSo rEsUlts namely IN A noNhomoGeNeitY of the dIstribution of the elECtrIc charge carriErs. sincE THe DisCHaRGe iGnITes EXClusively in the tHick spots, tHe REsUlt in these AReaS iS an accuMulatioN of elECtric chArge carriErs and thuS a DecrEASe iN the ignitiOn field sTrength.
ThIS negaTIvE effeCt rEsults In Not Only tHe filaMEntS igniTing on ThE surfaCe of tHe ThickeniNg facing the counter electRode whEn chaRge Carriers aRe pREseNt in the thIck sPot, but also In tHe fIlameNts NOw ignItinG By A loNGer paTh, foR Example on THe SidE FAcEs of the thicKENIngS.
In thOse SPatial AreaS, which lie behind thE Thickenings basEd on THE diRecTIon oF fLow, there is hardLy aNy GAS flow. ThuS, tHe result of tHe thickeNiNGs is a Volume Area V1, wHere no sIGNiFIcant gAs exChaNge takes pLacE aNY more.
ThE iGnITion of FilaMeNts on tHe side FAces OF
 the signal gate-circuit o f the meta l lay er. 
Th er e re main s a need to ch a ract erize an electromigrat ion ( EM )  par a me ter r elatedt op o ssi bl eEMfa i lu res i n s ignal n ets of anint eg rated circui t  ( IC) chip d esi gn and to us e t he EMpa ram e ter i n a n ICchip d e sign f low. Thein v ention relates t oa de vice and a proces s  f o r the treatmen t of f lo w in g gas es,  and in pa rt icula r  flowin g  e x h a ust gases. The in vention can beused i nall fields  of t ec h nol ogy, whereflow ing gases  are s u bjected to an a ftertr eat men t in or de r t or edu c ehaz a rdo us subst an ce s, fo r ex a m p l e in  th e au tomob ile industry,  in  pow e r p lants  or w aste  i ncine rating  plan ts  or where gases  are  to be co nve rt edby  plas m a chem ist ryinto ne w subst a nce s, s u ch  as in the product io n of  ozone f rom ox y ge n. The pres en t i nven t i on is  ana dv antageou s adva n ce me nt over  D E 19518  97 0 C 1.
To incr ease t he effic iency in cleaning fl o wing gases by me a n so f ba rri er discharg es,D E 19 5 18 97 0 C 1  prop osedth a tt he electrode surfac eexhibi t non homogeneity a long the f l o w  directi on o f  t h e gas. This no nhomo geneity, n a mely thi ckeni ng, canincreaset h e probab ili tyofthe d is charge filame n t s ig ni ting ev enin thos e g asvol ume swhere nodischarg eha sta ken  plac e  yet. In  t heth ick  spot s , theelect rode sar e  sp aced ap a rt a t sh or te r di sta nc e. Th us,t heelectri c field s tre n gths  a re  higher  between theel ectrodes.Th ere fore,t h e discha rge ignites exclusively in thethi ck sp ots.  If there  ar e alto get h er ade quatenumbe roft h ick s p o ts , m or e volume e l e men ts ca nbe e xposedaltogether to a di s cha rge filament,  afeat u r etha t  i n cre as e s t h e  efficiency.
Ou r own stud ie s  h ave reveal e d t ha t the s olution  prop o sed inDE 195 18  970 C1 e xh ibit s the  drawbackthat ele ctric cha r ge ca r ri ers i n t he thi ck  sp ot de crease the  loca l igni ti on vol tage.  T he nonho mogeneity of the electr ode su rface  al so result s n a mel y in a no nhom ogeneity o f t hedistr ibu t ion o f th e  e lec t ric c harg e  carriers .  S inc e th e discharge i g nit es ex clu s ivelyin t he thick spots, t h e result in th esea r eas  is an a cc umulation of e lec tr i c  chargeca rriers andthus a d ec r easein the  ignit ion fie l d  s t rength .
Th isnegativeeff ec t  result sin not on ly t he  filam ents i g niti n g  on the surfaceof th e thick e nin g fac in g the c o unte r electrod e when char ge car rier s are  presen tin the  th ic k spot, bu t  also inthe f ilament snowign itingby a l onger  pat h,  fo r example o nt he  s i deface s ofth e th ickenings . 
In thos e s p atial a re as, w hich l i eb e hind the t hic kenin g s  based ont he d i re c tionof flo w, the re is h a rdl yany gas  fl o w . Thus, t he result ofth e th ickening sis a  v olu me  area V1, where  no sign ificantg a s exch ang e  tak e s plac eany more.
Th e ign it i on of f i l ame nts ont hesid e f aces  of 
 the_signal gate-circuit_of the metal layer.
There_remains a_need_to characterize_an_electromigration (EM) parameter_related to possible_EM failures in signal_nets of an_integrated_circuit (IC) chip design and to use the EM parameter in an IC chip_design_flow. The_invention_relates_to a device and a_process for the treatment of_flowing gases,_and in particular flowing exhaust gases. The invention_can_be used in_all fields of technology, where flowing gases are subjected_to an aftertreatment in order to_reduce hazardous substances,_for_example_in the automobile industry,_in power plants or waste incinerating_plants or where gases are to_be converted by plasma chemistry into new_substances, such as in the production_of ozone from oxygen.
The present_invention is_an advantageous advancement over DE_195 18 970_C1.
To increase_the efficiency in_cleaning flowing gases by means of_barrier discharges, DE_195 18 970 C1 proposed that_the_electrode surface exhibit_nonhomogeneity_along_the flow_direction of the_gas._This nonhomogeneity,_namely_thickening, can increase the probability of_the_discharge filaments igniting even in those gas_volumes where no discharge_has_taken place yet. In_the thick spots, the electrodes_are spaced apart at shorter distance._Thus, the_electric field_strengths are higher between the electrodes. Therefore, the discharge ignites exclusively_in the thick spots. If there_are altogether adequate number_of thick_spots,_more volume elements_can_be exposed_altogether to a discharge filament, a feature_that increases_the efficiency.
Our own studies have revealed_that the solution proposed_in_DE 195 18 970 C1 exhibits_the drawback that electric charge carriers_in the thick spot decrease_the_local_ignition voltage. The nonhomogeneity of_the electrode surface also results namely_in a nonhomogeneity_of the distribution of the electric charge_carriers._Since the discharge ignites exclusively in_the_thick spots, the result in these_areas_is_an accumulation of electric charge_carriers and thus a decrease in_the ignition field strength.
This negative effect results in not_only the filaments_igniting on the surface of_the_thickening_facing the counter electrode when charge carriers are present in_the thick_spot, but also_in the filaments now igniting by a longer path, for_example on the side faces of the_thickenings.
In those spatial areas, which lie behind the thickenings based on_the direction of flow, there is hardly any_gas flow. Thus, the result of the_thickenings is a volume_area_V1, where no significant gas exchange takes_place_any_more.
The_ignition of filaments_on the side_faces of