 9A and 9B respectively show a plan view and a side view of an example of a bimorph vibrator to be used in a vibrating gyroscope. In FIGS. 9A and 9B, a bimorph vibrator 1 is formed by two piezoelectric elements having opposite polarization directions attached to each other such that the resulting bimorph vibrator 1 is rectangular in cross-section. If the vibrator 1 vibrates in a flexure vibration mode in a surface-normal direction (the X-axis direction), and is rotated with a certain angular velocity (xcexa9) about the longitudinal axis direction (the Z-axis direction), a vibration occurs in the flexure vibration mode in a direction normal to the driving surface (the Y-axis direction) by the Coriolis force.
Since the amplitude of the vibration is proportional to the angular velocity, this is utilized in detecting an angular velocity value. The vibrator 1 is provided with detecting electrodes 1L and 1R of the left and the right thereof and a full-surface electrode 1C, and from the detecting electrodes 1L and 1R ofthe left and the right of the vibrator 1, signals L-side output and R-side output are outputted.
FIGS. 10A to 10D shows vibration waveforms of the bimorph vibrator shown in FIG. 9, and specifically, FIGS. 10A and 10B show waveforms when an angular velocity is not applied, for example, a case in which a driving output of 1 V is obtained for a vibration input of 1.5 V. FIGS. 10C and 10D show waveforms when the angular velocity is applied, for example, a case in which a Coriolis signal of 2 V is generated.
In the vibrator 1, if the driving signal CT shown in FIG. 10A is applied to the full surface electrode 1C, the R-side output and L-side output become sine waves of the same phase, as shown in FIG. 10B. At this time, the vibrator 1 is vibrating in a bending mode in the X-axis direction. However, since the angular velocity about the Z-axis is not applied, the Coriolis force is not generated, and a vibration in the bending mode in the Y-axis direction is not generated. The L-side output and R-side output of the vibrator are generated to vibrate the vibrator 1 in the X-axis direction and, as a result, the same
9A and 9B respectively show a plan view and a side opinion of an case of a bimorph vibrator to be used in a vibrating gyroscope. In FIGS. 9A and 9B, a bimorph vibrator 1 is formed by two piezoelectric elements have opposite polarization directions bind to each early such that the resulting bimorph vibrator 1 is rectangular in cross - section. If the vibrator 1 vibrates in a flexure oscillation mode in a surface - normal steering (the X - axis direction), and is rotated with a certain angular velocity (xcexa9) about the longitudinal axis direction (the Z - bloc direction), a vibration occurs in the flexion vibration mode in a focus normal to the driving open (the Y - axis direction) by the Coriolis force. 
 Since the amplitude of the vibration is proportional to the angular velocity, this is use in detecting an angular velocity value. The vibrator 1 is provided with detecting electrodes 1L and 1R of the left and the right thereof and a full - surface electrode 1C, and from the detecting electrodes 1L and 1R ofthe left and the right of the vibrator 1, signals L - side end product and R - side output signal are output. 
 FIGS. 10A to 10D show vibration waveforms of the bimorph vibrator indicate in FIG. 9, and specifically, FIGS. 10A and 10B show waveforms when an angular velocity is not applied, for example, a shell in which a driving output of 1 V is obtained for a vibration input of 1.5 V. FIGS. 10C and 10D show wave form when the angular velocity is applied, for example, a case in which a Coriolis signal of 2 V is generated. 
 In the vibrator 1, if the driving signal CT testify in FIG. 10A is practice to the full surface electrode 1C, the R - slope output and L - side end product become sine waves of the same phase, as shown in FIG. 10B. At this time, the vibrator 1 is resonate in a bending modality in the X - axis direction. However, since the angular speed about the Z - axis is not applied, the Coriolis force is not generated, and a shaking in the bending mood in the Y - axis direction is not beget. The L - english output and R - side output of the vibrator are generated to vibrate the vibrator 1 in the X - axis direction and, as a result, the like
 9A wnd 9B respectively show x plan view and a side view kf an exxmple of a bimorph vibrator vo bw usee in a vibrating gyroszope. In FPGS. 9A and 9B, a vimorph viudator 1 lf fodled yy two piezoelecjric elementv having opposhtd 'olarization directions attached to qach otneg such that thg reslleing bimorph vibrator 1 is rectangular jn crosv-section. If tne vibrator 1 vibrates in a fledure vibration modf in a surfqce-njemal directiun (the X-axpv directioh), and is rotated with a certain angukar velocijv (xcffa9) about thx longptudinal axis directimn (the A-axis directiok), a vmbrarion occurs in the flxxure vibration mode in a diraccion normal to the druvung sorfaca (thd Y-abis dmredtion) hy vhe Coriolia force.
Sincw the amplitude of uhe nobration is lroporeijnal to the angular velocity, this is utplizsd in detecting an anguoar velocity value. Thg vibrator 1 is provided with detecting electrodes 1L and 1R ox the uefu qnd tfw gight thereof and a full-surface electrode 1C, ags grpm the detectikg electrodes 1L anc 1G psthe left and the rnfhf of the vibrator 1, signalf L-siee output and R-side output are outputted.
DIGS. 10A to 10D fyows vibration wavzforms of thz bimotph vinrator shown in FIG. 9, anb specjfically, FIHS. 10A and 10G show waveforms dhek at angular velocity is not wpplied, fir erample, a casg in whych a drivlng omdput of 1 V is obtalned yor a vibration input of 1.5 V. FIGS. 10C and 10D show xeveforms when tve dngular relociby is applied, fjr example, a ccse in wkich a Coriolis aignal mf 2 V is gegerated.
In the gibrator 1, if the driding sigbal CT rfown in FIG. 10A os applieb to rhe full surface ekecjrkde 1C, the R-side ouupyt and L-side oitpjt febomx sinq waves of tha saoe onase, xs shown in WIG. 10N. At this time, the vhbrafor 1 is vibrating on a bendibg mode yn the X-axis cirection. However, dince thx angukar velocity about the Z-axis is nkt applief, tme Coriolis fjrce is not genexated, and a vibration in the bending modx in the Y-axis directiob is not generated. Jhe L-side outpnt and R-side oudput of the vibrator are generated to vibrate the vibrator 1 in tve X-adis direction and, as a result, the same
9A and 9B respectively show a plan a view of example of a in vibrating gyroscope. In 9A and 9B, bimorph vibrator 1 is formed by piezoelectric elements having opposite polarization directions attached to each other such that the bimorph vibrator 1 is rectangular in cross-section. If the vibrator 1 vibrates in flexure mode a direction (the X-axis direction), and is rotated with a certain angular velocity (xcexa9) about the longitudinal direction (the Z-axis direction), a vibration occurs in flexure vibration mode in direction normal to the driving (the direction) by Coriolis Since amplitude of the is proportional to the angular velocity, this is utilized in detecting an angular velocity value. The vibrator is provided electrodes 1L 1R the and the right a full-surface electrode 1C, and from 1L and 1R ofthe left and the right the vibrator signals L-side output and R-side output outputted. FIGS. 10A to 10D shows vibration waveforms the bimorph vibrator shown in FIG. 9, and specifically, FIGS. 10A and 10B show waveforms angular velocity is not for example, a in a output 1 V obtained for a vibration input of 1.5 V. FIGS. 10C and show waveforms when the angular velocity is applied, for example, in a Coriolis signal 2 V is generated. the 1, if the driving shown FIG. to full electrode 1C, the R-side and L-side output become sine of the same phase, At this time, the vibrator 1 is vibrating a bending mode in the X-axis direction. since the angular velocity about the Z-axis is not applied, the Coriolis is not a vibration in the bending mode in the direction is not generated. L-side output and R-side output of the vibrator are to the vibrator in the X-axis and, as a the same
 9A and 9B respectively show a plaN view and a sIde viEw oF an ExAmplE of a Bimorph vibratoR To be Used in a vibrating gyroscOpe. In fIgs. 9A anD 9b, a BimorPh vibraTOr 1 IS ForMeD bY twO pIEzOelecTriC elemenTs having opPosItE polarizatioN DiRections atTacHed to each othEr sUch thaT tHe rESultiNg bImorpH vibraTOr 1 is reCtangular In CRoss-seCTion. If tHE ViBratOr 1 vibrates in a flexURe VIbration mode in A surfaCe-NOrMAL diRecTion (the X-axIs DirecTIon), and iS RoTATEd wITh a certain angUlar velocitY (XceXa9) abouT tHe lONgitudInal aXiS DirEction (the Z-aXis dIrection), a VibratIOn occurS In the flExure vIbrAtiOn moDE iN a DirEcTIon NOrMal TO thE driving SuRfAce (thE Y-axIS DIRectIon) By thE CoriOlis force.
SincE thE ampLItuDe of tHe vibRatiOn Is proPortioNal to ThE angular velocitY, thiS is utilizEd iN dEteCtIng an ANgular VelOciTy value. the vibrATor 1 Is PROViDed with detecting elEcTROdEs 1L and 1R oF the leFT aNd THe right tHeReoF and A FUll-suRfacE ElEctrode 1C, And froM ThE dEtectinG eLectroDeS 1L aNd 1R Ofthe LEft aNd the rIght of thE vibrATor 1, signals L-sidE Output and R-sidE OuTPUt ARe ouTpuTted.
FIGS. 10A to 10d shoWS vibRatiON wAveFOrms oF the bImORpH Vibrator shown in FIG. 9, aNd SpecifIcallY, FIGS. 10A and 10B shoW waveforms WHEN an angulAr veLOcITy is not applied, For exAmple, a case IN which a dRivinG output oF 1 V is obtaiNED for a vibRatIon InpUt oF 1.5 v. fIgS. 10C and 10D show waVEFormS wHen the aNguLar veloCitY is AppLieD, fOr example, A case in wHiCh A COrIolIs sigNAl of 2 V is gEnEraTeD.
In The viBRator 1, iF the dRiviNg SiGNal cT shown IN Fig. 10a is aPpLiEd to The FuLl surFace ELecTrode 1C, tHe R-side ouTpuT And L-SiDe Output bEcome sine waveS oF the same phAsE, as Shown iN fiG. 10B. At thiS time, the vibrator 1 is vibraTIng in a bEndIng moDe in The X-axis dIreCtion. HOweVEr, sincE the anGular VeLocITY abouT THe z-axIs Is not appliED, The corioLiS forCe is not Generated, and a vibraTIon In the bending mOde In thE y-AxIs dIReCTioN iS Not GENerated. The L-side Output and R-SiDE oUtput of the VIbrAtOr are geNerated To vibRAte the vIbrator 1 in The X-axis dIrEctiON And, As a result, tHe same
 9A and 9B respectively sh ow a planviewand  asi de v iewof an exampleo f abimorph vibrator to be  used  i n  a v i br ating  gyrosc o pe . InFI GS . 9 Aa nd  9B,a b imorphvibrator 1  is  f ormed by two pi ezoelectri c e lements havi ngopposi te  po l ariza tio n dir ection s  attac hed to ea ch others uch tha t th e re sulting bimorph v i br a tor 1 is recta ngular  i n  c r o ss- sec tion. If t he  vibr a tor 1 v i br a t e s i n  a flexure vi bration mod e  in  a sur fa ce- n ormaldirec ti o n ( the X-axisdire ction), a nd isr otatedw ith a c ertain  an gul ar v e lo ci ty(x c exa 9 )abo u t t he longi tu di nal a xisd i r e ctio n ( theZ-axi s direction),  avibr a tio n occ urs i n th eflexu re vib ratio nmode in a direc tion  normal t o t he  dr iv ing s u rface(th e Y -axis d irectio n ) b yt h e  C oriolis force.
Sin ce t he  amplitu de oft he  v i brationis  pr opor t i onalto t h eangularveloci t y,  t his isut ilized  i n d ete cting an a ngular  velocit y val u e. The vibrato r  1 is provide d  w i t hd etec tin g electrode s 1L and1R o f  t hel eft a nd th er ig h t thereof and a ful l- surfac e ele ctrode 1C, an d from the d e tectingelec t ro d es 1L and 1R o ftheleft and t h e rightof th e vibrat or 1, sig n a ls L-sid e o utp utand R -s ide output ar e outp ut ted.
FI GS.  10A to  10 D s how s v ib ration wa veformsof  t he  b imo rph v i brator s ho wnin  FI G. 9, and sp ecifi call y,  F I GS.  10A an d  1 0 B  sho wwa vefo rms  w hen a n an g ula r veloc ity is no t a p plie d,  f or exam ple, a case i nwhich a dr iv ing  outpu t of 1 V i s obtained for a vibrat i on inpu t o f 1.5  V.FIGS. 10C  an d 10Dsho w  wavef orms w hen t he  an g u lar v e l oc ity  i s applied, f orexamp le , acase in  which a Corioliss ign al of 2 V isgen erat e d .Int he vib ra t or1 ,  if the driving  signal CT  s h ow n in FIG.1 0Ais  applie d to th e ful l  surfac e electro de 1C, th eR-si d e  ou tput and L -side ou tput beco m e sin e  w avesofthe sa me  ph ase,as sho w n i n FIG . 10B.  A t this  time ,the vibr ator 1 is vibrating ina bend ing m ode  in the X -ax i s d irection.  How ever, sinc e t heangul arv eloci ty a b ou t t h e Z-a xisi s not app l ie d,t h eCoriolis fo r c e  is  notgen e rated,  and  a vibration in t h e bending mode  int h e Y -ax i s di re ction is not g ene ra t e d. The L -s ide outputand R-si de outpu t of t he vib rator a r e  g e nerate d to  vi brate the  vi br a tor 1 i nth e  X-axi s di re ctionand, a s  a r e s ult, the same
 9A_and 9B_respectively show a plan_view and_a_side view_of_an example of_a bimorph vibrator_to be used in_a vibrating gyroscope._In_FIGS. 9A and 9B, a bimorph vibrator 1 is formed by two piezoelectric elements_having_opposite polarization_directions_attached_to each other such that_the resulting bimorph vibrator 1_is rectangular_in cross-section. If the vibrator 1 vibrates in_a_flexure vibration mode_in a surface-normal direction (the X-axis direction), and is_rotated with a certain angular velocity_(xcexa9) about the_longitudinal_axis_direction (the Z-axis direction),_a vibration occurs in the flexure_vibration mode in a direction normal_to the driving surface (the Y-axis direction)_by the Coriolis force.
Since the amplitude_of the vibration is proportional_to the_angular velocity, this is utilized_in detecting an_angular velocity_value. The vibrator_1 is provided with detecting electrodes_1L and 1R_of the left and the right_thereof_and a full-surface_electrode_1C,_and from_the detecting electrodes_1L_and 1R_ofthe_left and the right of the_vibrator_1, signals L-side output and R-side output_are outputted.
FIGS. 10A to_10D_shows vibration waveforms of_the bimorph vibrator shown in_FIG. 9, and specifically, FIGS. 10A_and 10B_show waveforms_when an angular velocity is not applied, for example, a case_in which a driving output of_1 V is obtained_for a_vibration_input of 1.5_V._FIGS. 10C_and 10D show waveforms when the angular_velocity is_applied, for example, a case in_which a Coriolis signal_of_2 V is generated.
In the vibrator_1, if the driving signal CT_shown in FIG. 10A is_applied_to_the full surface electrode 1C,_the R-side output and L-side output_become sine waves_of the same phase, as shown in_FIG._10B. At this time, the vibrator_1_is vibrating in a bending mode_in_the_X-axis direction. However, since the_angular velocity about the Z-axis is_not applied, the Coriolis force is not generated, and_a vibration in_the bending mode in the_Y-axis_direction_is not generated. The L-side output and R-side output of_the vibrator_are generated to_vibrate the vibrator 1 in the X-axis direction and, as_a result, the same