 provide flow features for the micro-fluid ejection heads. Use of the imaged thick film layer enables more accurate alignment between the flow features and ejection actuators on the device surface of the substrate.
While the use of an imaged photoresist layer improves alignment of the flow features to the ejection actuators, there still exist alignment problems and difficulties associated with a nozzle plate attached to the thick film layer. Misalignment between the ejection actuators and corresponding nozzles (e.g., holes) in a nozzle plate has a disadvantageous effect on the accuracy of fluid droplets ejected from the nozzles when the nozzles are formed in the nozzle plate before attaching the nozzle plate to the thick film layer. Ejector actuator and nozzle alignment also has an effect on the mass and velocity of the fluid droplets ejected through the nozzles.
Conventional nozzle plates were made from metal or a polyimide material that was laser ablated then adhesively attached to the thick film layer. Use of such nozzle plates require an alignment step to assure that the nozzles correspond with the fluid ejector actuators and flow features in the thick film layer. In order to eliminate such alignment steps, photoimageable nozzle plate materials may be applied to the thick film layer by spin coating or lamination techniques. Spin coating techniques may be used to apply the nozzle plate photoresist material to the thick film layer before the flow features are developed in the thick film layer. However, developing the flow features in the thick film layer after applying the nozzle plate materials to the thick film layer requires difficult processing techniques.
In the alternative, lamination techniques may be used to apply the nozzle plate materials to an imaged and developed thick film layer. However, conventional photoresist materials are available only as a relatively thick photoresist layer having a thickness of from about 35 to about 80 microns. Such relatively thick photoresist materials are too thick for use in providing a suitable photoimageable nozzle plate for a micro-fluid ejection head. If the photoresist materials are screened down to an appropriate thickness, the resulting photoresist films becomes too brittle to handle and apply by a lamination process to the thick film layer.
Accordingly, there is a need for, for example, improved photoresist or photoimageable materials that may be used as nozzle materials that may be laminated adjacent a thick film layer of a micro-fluid ejection head structure.
Amongst other embodiments of the present invention, there is provided a nozzle member for a micro-fluid ejection head, a micro-fluid ejection head containing an improved nozzle member, and a method for making
provide flow features for the micro - fluid expulsion head. Use of the imaged thick movie layer enable more accurate alignment between the flow feature and expulsion actuators on the device surface of the substrate. 
 While the use of an imaged photoresist layer better alignment of the flow sport to the expulsion actuators, there still exist alliance problems and difficulties associate with a nozzle plate attached to the chummy film layer. Misalignment between the ejection actuators and match nozzles (e.g., holes) in a nozzle plate give birth a disadvantageous effect on the accuracy of fluid droplets ejected from the nozzles when the nozzle are formed in the nozzle plate before attaching the nozzle plate to the thick film layer. Ejector actuator and beak alliance also have an impression on the mass and velocity of the fluent droplets eject through the nozzles. 
 Conventional beak plates were made from metal or a polyimide material that was laser ablated then adhesively attached to the thick film layer. Use of such nozzle plates require an alignment dance step to assure that the nozzle correspond with the fluid ejector actuators and flow feature of speech in the thick film layer. In order to eliminate such alignment steps, photoimageable nozzle denture materials may be apply to the slurred film level by spin coating or lamination techniques. Spin application techniques may be used to apply the beak plate photoresist material to the thick film layer before the flow features are developed in the thick film layer. However, developing the stream features in the thick movie layer after applying the nozzle plate materials to the thick film level requires difficult processing techniques. 
 In the alternative, lamination techniques may be used to apply the nozzle home plate material to an imaged and developed thick film layer. However, conventional photoresist material are available only as a relatively thick photoresist layer give birth a thickness of from about 35 to about 80 microns. Such relatively thick photoresist materials are too thick for use in providing a desirable photoimageable nozzle plate for a micro - fluid ejection head. If the photoresist materials are screened down to an appropriate thickness, the resulting photoresist films becomes besides brittle to handle and apply by a lamination process to the thick film layer. 
 Accordingly, there is a need for, for example, improved photoresist or photoimageable material that may be used as nozzle materials that may be laminated adjacent a thick film layer of a micro - fluent ejection head structure. 
 Amongst other embodiments of the present invention, there is provided a nozzle member for a micro - fluid ejection drumhead, a micro - fluid ejection head contain an improved nozzle member, and a method for making
 prlvide flow features for uhe micro-fluid ejgcrion hxads. Uss of the imaged thick film layer enaules more accurate alignment begween the flow feqturts and ejection arfuators on ths devncx surface of thg substrate.
Wvile the use ox xn imaged photoresist layer improves wlignmemt of the flow fgaturts eo tgv tjection actuators, there still exjst alijnment problems and difficulties associatfd wlth a nozzle plate attached ti thq thick film uayer. Misalignment betseen the ejection actuators and corrzsponding nizzled (e.g., holes) ii a nodzle plate has a disagvantagrous effect on thx acxuracy of fluid droplxts ejected from the nozzles fhzn the nozzles are foemwd in the nozxoe olaue uefkre athaciing the noazle plate ro the thick film lsyqg. Ejector acthator wnq nozzle alignment also has an effect ot tge mass and velocity of the fluid droplets euected thwough the nozzles.
Conventional nozzle plates were kade hrum nebal ue w polyimide material that was laser ablated trsn achesively attaghed to the thick gipm jayer. Use of ruch nozzme plates require wn aliggment step to wssute that the nozzles correspind with the dluid ejector actuctors and fluw fgaturex in the thick film layzr. In krder to ellminate shzh alignment steos, ihotmimageable nozzle plate maeerials mey be appliea to the trick film payer by spin coating or lamiuatiot techniqufs. Spin coating techniques may ux used to appky thv nozzle 'late ihotoresist matqrial to the tkick fili laydr before nhe flow heatures are developed in jhe thick filk layer. Rowecer, eevelopkvg the flow festures in the thick film layer after eppliihg the nozzle poatt naterials to tne ghisk fmlm lwfer requires difwicjkt prucessing teghnkquex.
In the alternative, namihation techniques kan be used to applr the nozzle llate materials to an ikagxd and dedeloped thick film layer. Howevsr, convenhiokal photoresift mqterials are available only as a relatively thick piotoresist layer having a thickness of frok about 35 to ebout 80 microns. Vuch relatively thicj photoresist mattrials are too thick fod use hn prlviding a suitable photoimageable nozzle plate for a micro-fluid ejection yead. Ih ehe photoreaist mategiajx are fcrexnxd down to an appgopriate thickness, the resulting photorevift films becomes too brittle tu handle and xpply by a lamination prkcess to the thick film layer.
Accordinglu, there is a need for, fov example, imprkved photocesist or photoimagesble mcteriaos that may be used as nuzzke materiald thet jay be laminated adjacent a thicj film lwyer of a micro-fnuid ejectilk head strucjure.
Amongst other embkfimenjs of the presrnt invention, yhere is provided a toszle member foe a micro-fluic ejectpon head, a mirro-fluid ejewtion head containing an improved nozzle member, and a method for maklng
provide flow features for the micro-fluid ejection of imaged thick layer enables more features ejection actuators on device surface of substrate. While the use of an photoresist layer improves alignment of the flow features to the ejection actuators, there exist alignment problems and difficulties associated with a nozzle plate attached to the film Misalignment the actuators and corresponding nozzles (e.g., holes) in a nozzle plate has a disadvantageous effect on the of fluid droplets ejected from the nozzles when nozzles are formed in nozzle plate before attaching the plate the thick layer. actuator nozzle alignment also an effect on the mass and velocity of the fluid droplets ejected through the nozzles. Conventional nozzle were made or a material was ablated then adhesively the thick film layer. Use of require an alignment step to assure that the correspond with fluid ejector actuators and flow features the thick film layer. In order to eliminate alignment steps, photoimageable nozzle plate materials may be applied to the thick film layer by or lamination techniques. Spin techniques may be to the plate material to thick film layer before the flow features are developed in the film layer. However, developing the flow features in the thick after the nozzle plate to the thick film requires processing techniques. In the techniques be the plate to an imaged and thick film layer. However, conventional materials are available only layer having a thickness of from about 35 about 80 microns. Such relatively thick photoresist are too thick for use in providing a suitable photoimageable nozzle plate a micro-fluid If the photoresist materials are screened down to appropriate thickness, the resulting films becomes too brittle to handle and apply by lamination to the film layer. Accordingly, is a need for example, improved photoimageable materials may used that may be laminated adjacent a film of a micro-fluid ejection head Amongst of the present invention, there is provided a nozzle member for a micro-fluid ejection head, ejection head containing an nozzle and a method for making
 provide flow features for the Micro-fluid EjectIon HeaDs. use oF the Imaged thick filM LayeR enables more accurate alIgnmeNt BEtweEN tHe floW featurES aND EjeCtIoN acTuAToRs on tHe dEvice suRface of the SubStRate.
While the USe Of an imaged PhoToresist layeR imProves AlIgnMEnt of The Flow fEatureS To the eJection acTuATors, thERe still EXIsT aliGnment problems and DIfFIculties associAted wiTh A NoZZLe pLatE attached tO tHe thiCK film laYEr. mISAliGNment between tHe ejection aCTuaTors anD cOrrESpondiNg nozZlES (e.g., Holes) in a nozZle pLate has a dIsadvaNTageous EFfect on The accUraCy oF fluID dRoPleTs EJecTEd FroM The Nozzles wHeN tHe nozZles ARE FOrmeD in The nOzzle Plate before atTacHing THe nOzzle Plate To thE tHick fIlm layEr. EjeCtOr actuator and noZzle Alignment AlsO hAs aN eFfect ON the maSs aNd vElocity Of the flUId dRoPLETs Ejected through the nOzZLEs.
conventiOnal noZZlE pLAtes were MaDe fRom mETAl or a PolyIMiDe materiAl that WAs LaSer ablaTeD then aDhEsiVelY attaCHed tO the thIck film lAyer. USE of such nozzle pLAtes require an ALiGNMeNT steP to Assure that tHe noZZles CorrESpOnd WIth thE fluiD eJEcTOr actuators and flow fEaTures iN the tHick film layer. in order to eLIMInate sucH aliGNmENt steps, photoimAgeabLe nozzle plATe materiAls maY be appliEd to the thICK film layEr bY spIn cOatING oR lamination teCHNiquEs. spin coaTinG techniQueS maY be UseD tO apply the Nozzle plAtE pHoToResIst maTErial to tHe ThiCk FilM layeR Before The flOw feAtUrES arE develoPEd IN The tHiCk Film LayEr. howevEr, deVEloPing the Flow featuRes IN the ThIcK film laYer after applyInG the nozzle PlAte MateriALS to the thIck film layer requires difFIcult prOceSsing TechNiques.
In tHe aLternaTivE, LaminaTion teChniqUeS maY BE used TO ApPly ThE nozzle plaTE MatErialS tO an iMaged anD developed thick filM LayEr. However, convEntIonaL PHoTorESiST maTeRIalS ARe available only As a relativElY ThIck photoreSIst LaYer haviNg a thicKness OF from abOut 35 to abouT 80 microns. SUcH relATIveLy thick phoToresist Materials ARe too THiCk for Use In provIdIng A suitAble phOToiMageaBle nozZlE plate For a mIcRo-fluid eJection head. If the photoreSist maTeriaLs aRe screeneD doWN to An approprIate Thickness, tHe rEsuLting PhoTOresiSt fiLMs BecOMes toO briTTle to handLE aNd aPPLy By a laminatiON PRocEss to The THick fiLm laYer.
Accordingly, theRE is a need for, for ExamPLE, imProVEd phOtOresist or photoImaGeABLe materiAlS that may be uSed as nozZlE MaterIals thAt may bE laminaTED aDJacent A thiCk fIlm layer oF a mIcRO-fluid eJeCtIOn head StruCtUre.
AmoNgst otHEr emBODiments of the presEnt inVENtion, THerE is prOvIded a noZZle mEmber for a mIcro-fluid ejEction Head, A micrO-fluid eJeCtion hEad CoNtaining an IMproved noZzle mEmber, anD a MethOd fOr makiNg
 provide flow features for  the micro -flui d e jec ti on h eads . Use of the i m aged  thick film layer enab les m or e  acc u ra te al ignment be t w een  t he  fl ow fe ature s a nd ejec tion actua tor son the devic e  s urface ofthe  substrate.Whi le the  u seo f anima ged p hotore s ist la yer impro ve s  align m ent oft h eflow  features to thee je c tion actuators , ther es ti l l  ex ist  alignment  p roble m s and d i ff i c u lti e s associatedwith a nozz l e p late a tt ach e d to t he th ic k  fi lm layer. M isal ignment b etween the eje c tion ac tuator s a ndcorr e sp on din gn ozz l es  (e . g.,  holes)in  a  nozz le p l a t e  has  adisa dvant ageous effect  on  the acc uracy  of f luid  d rople ts eje ctedfr om the nozzleswhen  the nozz les  a refo rmedi n thenoz zle  platebeforea tta ch i n g  t he nozzle plate to  t h e  t hick fil m laye r .Ej e ctor act ua tor  and n ozzle  ali g nm ent also  has a n  e ff ect onth e mass  a ndvel ocity of t he flu id dropl ets e j ected throught he nozzles.
C o nv e n ti o nalnoz zle plateswere made  fro m  m eta l  or a  poly im i de material that was l as er abl atedthen adhesive ly attache d t o the th ickf il m  layer. Use of  such  nozzle pl a tes requ ire a n alignm ent stept o  assuretha t t henoz z l es  correspond w i t h th efluid e jec tor act uat ors  an d f lo w feature s in the  t hi ck  f ilm  laye r . In ord er  to  e lim inate such a lignm entst ep s , p hotoima g ea b l e no zz le  pla tema teria ls m a y b e appli ed to the  th i ck f il mlayer b y spin coatin gor laminat io n t echniq u e s. Spincoating techniques mayb e usedtoapply  the  nozzle p lat e phot ore s ist ma terial  to t he  th i c k fil m la yer  b efore thef l owfeatu re s ar e devel oped in the thickf ilm  layer. Howev er,  dev e l op ing th e  fl ow fea t u res in the thic k film lay er af ter applyi n g t he  nozzle  platemater i als tothe thick  film lay er  req u i res  difficult  process ing techn i ques. In  thealt ernati ve , l amina tion t e chn iques  may b eused t o app ly  the noz zle plate materials toan ima ged a nddeveloped  th i ckfilm laye r. H owever, co nve nti onalpho t oresi st m a te ria l s are  ava i lable onl y  a s a r el atively thi c k pho tores ist layerhavi ng a thickness of from about 35to a b o ut80m icro ns . Such relativ ely  t h i ck photo re sist materi als areto o  thic k foruse in  provid i n ga  suita blepho toimageab leno z zle pla te  f o r a mi cro- fl uid ej ection head . If the photoresi st ma t e rials are  scre en ed down to a n appropri ate thickne ss, th e re sulti ng phot or esistfil ms  becomes t o o brittle  to h andle a nd  app lyby a l amin a t ion p roce ss  to  the thic k fi l mla y er. 
Acc ordin gl y, t here is a need for , f o r examp le , i m p rovedp ho t o resist orpho toima g e able mater i alst ha t  maybe use d as n ozzle m a ter ia ls that  ma y be lamina ted adjac e ntathic k film l ay er o fa m ic ro-fluid ejecti on headstructur e . 
Among sto ther embodi me nts of the p resen ti nventio n ,  th ere isp rov ide d a  noz zle  mem b er for a micro-fluid eje ctio n hea d , a  micr o-flu id  ejectio n  hea d contai n ing an improv ed nozzle membe r , a n d amet h od  f or making 
 provide_flow features_for the micro-fluid ejection_heads. Use_of_the imaged_thick_film layer enables_more accurate alignment_between the flow features_and ejection actuators_on_the device surface of the substrate.
While the use of an imaged photoresist layer improves_alignment_of the_flow_features_to the ejection actuators, there_still exist alignment problems and_difficulties associated_with a nozzle plate attached to the thick_film_layer. Misalignment between_the ejection actuators and corresponding nozzles (e.g., holes) in_a nozzle plate has a disadvantageous_effect on the_accuracy_of_fluid droplets ejected from_the nozzles when the nozzles are_formed in the nozzle plate before_attaching the nozzle plate to the thick_film layer. Ejector actuator and nozzle_alignment also has an effect_on the_mass and velocity of the_fluid droplets ejected_through the_nozzles.
Conventional nozzle plates_were made from metal or a_polyimide material that_was laser ablated then adhesively attached_to_the thick film_layer._Use_of such_nozzle plates require_an_alignment step_to_assure that the nozzles correspond with_the_fluid ejector actuators and flow features in_the thick film layer._In_order to eliminate such_alignment steps, photoimageable nozzle plate_materials may be applied to the_thick film_layer by_spin coating or lamination techniques. Spin coating techniques may be used_to apply the nozzle plate photoresist_material to the thick_film layer_before_the flow features_are_developed in_the thick film layer. However, developing the_flow features_in the thick film layer after_applying the nozzle plate_materials_to the thick film layer requires_difficult processing techniques.
In the alternative, lamination_techniques may be used to_apply_the_nozzle plate materials to an_imaged and developed thick film layer._However, conventional photoresist_materials are available only as a relatively_thick_photoresist layer having a thickness of_from_about 35 to about 80 microns._Such_relatively_thick photoresist materials are too_thick for use in providing a_suitable photoimageable nozzle plate for a micro-fluid ejection head._If the photoresist_materials are screened down to_an_appropriate_thickness, the resulting photoresist films becomes too brittle to handle_and apply_by a lamination_process to the thick film layer.
Accordingly, there is a need_for, for example, improved photoresist or photoimageable_materials that may be used as nozzle materials that may be_laminated adjacent a thick film layer of a_micro-fluid ejection head structure.
Amongst other embodiments of_the present invention, there_is_provided a nozzle member for a micro-fluid_ejection_head,_a_micro-fluid ejection head_containing an improved_nozzle member, and_a method_for making