 Ti films are also formed on the vessel wall. For the purpose of removing such undesirable Ti films, in-situ cleaning is executed regularly. However, the conventional plasma cleaning methods can not remove the Ti films at a satisfactory etch rate.
The present invention has been made in view of the above and it is therefore an object of the present invention to provide a method of forming a Ti film by CVD, capable of forming a Ti film in minute holes formed in an insulating film in a satisfactory step coverage without deteriorating the morphology of a TiSix interfacial layer formed between the Ti film and a Si base.
The second object of the present invention is to provide a method of removing films formed on a vessel wall or the like at a satisfactory etch rate. The invention relates to a method for the quantification of tumor cells in a body fluid, in which firstly the sample to be examined is subjected to a process for the enrichment or depletion of tumor cells and a reaction is carried out on the enriched or depleted tumor cells in which the mRNA encoding the catalytic subunit of the telomerase is specifically amplified, and subsequently the amount of amplified nucleic acid is determined quantitatively, and to test kits suitable therefor.
Virtually all solid malignant tumors have the potential to form metastases. The metastasis process comprises the spread of malignant cells as micrometastases, usually via the blood or lymph to remote organs and the development of autonomous secondary tumors. The extent of metastasis determines the prognosis of an oncosis.
The requirements of tumor prevention or aftercare programs are to diagnose primary tumors or a recurrence or a metastasis early, even before metastases become clinically manifest. This aim cannot yet be satisfactorily met with the available instrumental techniques; in particular, there is still a diagnostic gray zone between the detection of circulating tumor cells and incipient formation of metastases in organs. Early diagnosis of circulating malignant cells, for example in peripheral blood of a patient undergoing tumor aftercare, would make it possible to introduce immunomodulating therapy or polychemotherapy, which is possibly curative, at an early date, that is to say even before organ metastasis becomes manifest. Quantification of the tumor cells in peripheral blood before and after the therapy represents an important control in such cases.
The life span of eukaryotic cells is, according to the telomer hypothesis, determined by the length of the termini of the chromosomal DNA, the telomers. Thus, according to this theory, telomers have the function of a mitotic clock. Because of the replication mechanism of the DNA polymerases, the telomers
Ti films are also formed on the vessel wall. For the function of get rid of such undesirable Ti films, in - situ cleaning is executed regularly. However, the conventional plasma cleaning method acting cannot remove the Ti films at a satisfactory etch pace. 
 The present invention has been made in view of the above and it is therefore an aim of the present invention to leave a method of shape a Ti film by CVD, capable of imprint a Ti movie in minute holes form in an insulating film in a satisfactory step coverage without deteriorate the morphology of a TiSix interfacial layer formed between the Ti film and a Si nucleotide. 
 The second object of the present invention is to provide a method of removing movie formed on a vessel wall or the like at a satisfactory etch rate. The invention relates to a method for the quantification of tumor cell in a body fluid, in which firstly the sample to be examined is subjected to a process for the enrichment or depletion of tumor cells and a reaction is carried out on the enriched or depleted tumor cells in which the mRNA encoding the catalytic subunit of the telomerase is specifically amplified, and subsequently the amount of amplified nucleic acid is determine quantitatively, and to test kits desirable therefor. 
 about all solid malignant tumors have the potential to imprint metastases. The metastasis process comprises the spread of malignant cell as micrometastases, usually via the blood or lymph to remote organs and the development of autonomous secondary tumor. The extent of metastasis determines the prognosis of an oncosis. 
 The requirements of tumor prevention or aftercare programs are to diagnose primary tumors or a recurrence or a metastasis early, even before metastases become clinically apparent. This purpose cannot yet be satisfactorily met with the available instrumental techniques; in especial, there is still a diagnostic gray zone between the signal detection of circulating tumor cell and incipient formation of metastases in electric organ. Early diagnosis of circulating malignant cell, for example in peripheral blood of a patient undergo tumor aftercare, would make it possible to introduce immunomodulating therapy or polychemotherapy, which is possibly curative, at an early date, that is to say even before electric organ metastasis becomes apparent. Quantification of the tumor cells in peripheral blood before and after the therapy represent an important command in such cases. 
 The life span of eukaryotic cells is, according to the telomer hypothesis, determined by the length of the termini of the chromosomal DNA, the telomers. therefore, according to this theory, telomers hold the function of a mitotic clock. Because of the replication mechanism of the DNA polymerases, the telomers
 Ti films are also formed ok the vessel wall. For tie purpkse of rdmoving such undesirable Ti hilmw, in-sutu cleaning is executdd regulagly. Howevwr, tie conventional 'masma cleaninf metkovs can not remoye the Ti fhlms at a sativfxccory etch rate.
The present invention ras beem lade in view os tht afove and it is therefore an object of fhe prevent inventiom to provide a method of flrmijg a Ti film by CVF, capable od fowning a Ti fium in minuue holes forjed in an insulating film in a ratisyactory stek doggrage withouv detegiorating the morpholmgy of s TiSix interfsciel lqyer formed between tie Ti film and a Si fase.
The sacknd object of the peesenj invantiub ir tk 'robide a mevhod of remkving films formed on a vessel wwol or the liks at a swtisfactory etch rate. The invention reldtea to a method for the qyantification of tumot cells in a body fluid, in which firstly the sample to be efaminxd is smbjezref to a process for the enrichment or depletiog og numor cells and a reaction ix fattied out on thg enricksd or depleted tumor cells yn whuch the mWNA rncoding the catalytic sububit of the tvlomwrase is specificaply amplifizd, and subsrquently the amount of cmplifjed nucleic acid is sdtermined quantigatpvelf, and to test kits suitablq therefoc.
Virtbally alu sokid majignant tulors mdve the potential ho fotm metdstases. Thf metastasis process comprises vie spread of kanigtant celjs as micrometastafes, usually vic the bljod of lymph to remote organs and the developmajt of autonokous secjndaey tymors. Tfd extent of meyastasis bttermines rhe prognosis of ak oncuais.
The requiremzutw of tumor prevrntkon og ahtercwse programs dre go aoagnore primary bumurs pr a recurrence or a metzstasis early, even bcfore metqstases fecome clinicslly manifest. This aim rannot yet ne fatisfactorily met with the avzilable ijstvumental techgiqucs; ig particulcr, there is still a diagnostic gray zone between the detecrion of circulating uumor cells aid incypient fosmation of metastasew in organs. Early diagnosis of circulafing mdlignwnt cells, for example in peripheral blood of a patient undergoing tumor adtercace, would make it lossitlz tp intrjducx mmmunomodulating nherapy or polychemotherapy, whici is possitlv curative, at an early date, tnag is to say exen before organ metastaais becokes manifest. Quantification of yhe tumor cells in peripmeral bloid berore and ahter the therapy reptesentv an umportabt clntrol in sucf csscs.
The life spai oy eukaryotic cells is, according ti the repomer hypothesis, determined ny the lengtr of the termini of fje chtomosomal DNA, yhe telomers. Tnus, according to thiv eheory, telomerw have the fumction mf a mitotic clock. Becagse of the replication mechanism of the DNA polymerzses, the uelomers
Ti films are also formed on the For purpose of such undesirable Ti regularly. the conventional plasma methods can not the Ti films at a satisfactory rate. The present invention has been made in view of the above and is therefore an object of the present invention to provide a method of a film CVD, of forming a Ti film in minute holes formed in an insulating film in a satisfactory coverage without deteriorating the morphology of a TiSix layer formed between the film and a Si base. second of the invention to a method of films formed on a vessel wall or the like at a satisfactory etch rate. The invention relates a method quantification of cells a fluid, in which sample to be examined is subjected for the enrichment or depletion of tumor cells a reaction carried out on the enriched or tumor cells in which the mRNA encoding the subunit of the telomerase is specifically amplified, and subsequently the amount of amplified nucleic acid quantitatively, and to test suitable therefor. Virtually solid tumors the to form The metastasis process comprises the spread of malignant cells as micrometastases, via the blood or lymph to remote organs and the autonomous tumors. The extent metastasis determines the prognosis an The requirements of tumor aftercare are tumors a or a metastasis early, before metastases become clinically manifest. aim cannot yet be instrumental techniques; in particular, there is still a gray zone between the detection of circulating cells and incipient formation of metastases in organs. Early diagnosis of circulating cells, for peripheral blood of a patient undergoing tumor aftercare, make it possible to immunomodulating therapy or polychemotherapy, which is possibly curative, at early that is say even before metastasis becomes manifest. of the tumor peripheral blood and the important control in such cases. The span eukaryotic cells is, according to telomer by the length of the termini of the chromosomal DNA, the telomers. Thus, according to telomers have the function a clock. Because of the replication mechanism of the DNA polymerases, the telomers
 Ti films are also formed on the Vessel wall. for thE puRpoSe Of reMoviNg such undesiraBLe Ti Films, in-situ cleaning is eXecutEd REgulARlY. HoweVer, the cONvENTioNaL pLasMa CLeAning MetHods can Not remove tHe TI fIlms at a satisFAcTory etch raTe.
THe present invEntIon has BeEn mADe in vIew Of the Above aND it is tHerefore aN oBJect of THe preseNT InVentIon to provide a methOD oF Forming a Ti film By CVD, cApABlE OF foRmiNg a Ti film iN mInute HOles forMEd IN AN inSUlating film in A satisfactoRY stEp coveRaGe wIThout dEteriOrATinG the morpholOgy oF a TiSix inTerfacIAl layer FOrmed beTween tHe TI fiLm anD A SI bAse.
thE SecONd ObjECt oF the presEnT iNventIon iS TO PRoviDe a MethOd of rEmoving films fOrmEd on A VesSel waLl or tHe liKe At a saTisfacTory eTcH rate. The inventiOn reLates to a mEthOd For ThE quanTIficatIon Of tUmor celLs in a boDY flUiD, IN WhIch firstly the samplE tO BE eXamined iS subjeCTeD tO A process FoR thE enrICHment Or dePLeTion of tuMor celLS aNd A reactiOn Is carrIeD ouT on The enRIcheD or depLeted tumOr celLS in which the mRNa Encoding the caTAlYTIc SUbunIt oF the telomerAse iS SpecIficALlY amPLifieD, and sUbSEqUEntly the amount of ampLiFied nuCleic Acid is determiNed quantitATIVely, and tO tesT KiTS suitable thereFor.
ViRtually all SOlid maliGnant Tumors haVe the poteNTIal to forM meTasTasEs. THE MeTastasis proceSS CompRiSes the sPreAd of malIgnAnt CelLs aS mIcrometasTases, usuAlLy ViA tHe bLood oR Lymph to rEmOte OrGanS and tHE develOpmenT of aUtOnOMouS secondARy TUMors. thE eXtenT of MeTastaSis dETerMines thE prognosiS of AN oncOsIs.
the requIrements of tumOr Prevention Or AftErcare PROgrams arE to diagnose primary tumorS Or a recuRreNce or A metAstasis eaRly, Even beForE MetastAses beCome cLiNicALLy manIFEsT. ThIs Aim cannot yET Be sAtisfAcToriLy met wiTh the available instRUmeNtal techniqueS; in PartICUlAr, tHErE Is sTiLL a dIAGnostic gray zone Between the DeTEcTion of circULatInG tumor cElls and IncipIEnt formAtion of meTastases iN oRganS. eArlY diagnosis Of circulAting maliGNant cELlS, for eXamPle in pErIphEral bLood of A PatIent uNdergoInG tumor AfterCaRe, would mAke it possible to introducE immunOmoduLatIng therapY or POlyChemotherApy, wHich is possIblY cuRativE, at AN earlY datE, ThAt iS To say Even BEfore orgaN MeTasTASiS becomes manIFESt. QUantiFicATion of The tUmor cells in periphERal blood before And aFTEr tHe tHErapY rEpresents an impOrtAnT COntrol in SuCh cases.
The lIfe span oF eUKaryoTic celLs is, acCording TO ThE TelomeR hypOthEsis, deterMinEd BY the lenGtH oF The terMini Of The chrOmosomAL DNA, THE telomers. Thus, accOrdinG TO this THeoRy, telOmErs have THe fuNction of a mItotic clock. becausE of tHe repLicatioN mEchaniSm oF tHe DNA polymERases, the tElomeRs
 Ti films are also formedon the ves sel w all . F or  the  pur pose of removi n g su ch undesirable Ti film s, in -s i tu c l ea ningis exec u te d reg ul ar ly.  H o we ver,the  conven tional pla sma  c leaning meth o ds  can not r emo ve the Ti fi lms  at asa tis f actor y e tch r ate.
T h e pres ent inven ti o n hasb een mad e in  vie w of the above an d  i t  is thereforean obj ec t  o f the  pr esent inve nt ion t o  provid e  a m e tho d  of forming a  Ti film by CVD , capa bl e o f  formi ng aTi fil m in minute  hol es formed  in an insulat i ng film  in asat isf acto r yst epco v era g ewit h out  deterio ra ti ng th e mo r p h o logy  of  a T iSixinterfacial l aye r fo r med  betw een t he T ifilmand aSi ba se .
The second ob ject  of the p res en t i nv entio n  is to  pr ovi de a me thod of rem ov i n g  f ilms formed on a v es s e lwall orthe li k eat a satisf ac tor y et c h  rate . Th e  i nvention  relat e sto  a meth od  for t he  qu ant ifica t ionof tum or cells  in a body fluid, in which firstly th e sa m pletobe examined  iss ubje cted to  ap roces s for  t h ee nrichment or deplet io n of t umorcells and a r eaction is c a rried ou t on th e  enriched or d eplet ed tumor c e lls in w hichthe mRNA  encoding t he catal yti c s ubu nit o fthe telomeras e is s pe cifical lyamplifi ed,  an d s ubs eq uently th e amount  o fam pl ifi ed nu c leic aci disde ter mined quanti tativ ely,  a nd totest ki t ss u itab le  t here for .Virtu ally all  solidmalignant  tu m orsha ve  the po tential to fo rm  metastase s.  Th e meta s t asis pro cess comprises the spre a d of ma lig nantcell s as micr ome tastas es, usuall y viathe b lo odo r  lymp h to  re mo te organsa n d t he de ve lopm ent ofautonomous seconda r y t umors. The ex ten t of m et ast a si s  de te r min e s  the prognosisof an onco si s .The requir e men ts  of tum or prev entio n  or aft ercare pr ograms ar eto d i a gno se primary  tumorsor a recu r rence or  a me tas tasisea rly , eve n befo r e m etast ases b ec ome cl inica ll y manife st. This aim cannot yet  be sa tisfa cto rily metwit h  th e availab le i nstrumenta l t ech nique s;i n par ticu l ar , t h ere i s st i ll a diag n os tic g ra y zone betw e e n  th e det ect i on ofcirc ulating tumor cel l s and incipien t fo r m ati ono f me ta stases in orga ns.  E a r ly diagn os is of circu lating m al i gnant  cells , forexample i np eriphe ralblo od of a p ati en t  underg oi ng tumorafte rc are, w ould m a ke i t possible to intr oduce i mmuno m odu latin gtherapy or p olychemoth erapy, whic h is p ossi bly c urative ,at anear ly  date, tha t  is to sa y eve n befor eorga n m etasta sisb e comes  man if est . Quantif i c at i on  o f  th e tu mor c el ls i n periphe r al blood  be f ore and  a fte r the th e ra p y  represent s a n imp o r tant contr o l in su c h cas es.
Th e life  span o f  eu ka ryoticcel l s  is, acco rding tot hete lome r hypoth es is,de ter mi ned by the leng th of th e termin i of the  ch r omos o mal DN A,  the telomer s. Th us ,  accord i n g t o thist heo ry,  te lome rshave the function of a mitoti c cl ock.B eca use o f the  r eplicati o n me chanismo f the DNA pol ymerases, the t e lom e rs
 Ti_films are_also formed on the_vessel wall._For_the purpose_of_removing such undesirable_Ti films, in-situ_cleaning is executed regularly._However, the conventional_plasma_cleaning methods can not remove the Ti films at a satisfactory etch rate.
The present_invention_has been_made_in_view of the above and_it is therefore an object_of the_present invention to provide a method of forming_a_Ti film by_CVD, capable of forming a Ti film in minute_holes formed in an insulating film_in a satisfactory_step_coverage_without deteriorating the morphology_of a TiSix interfacial layer formed_between the Ti film and a_Si base.
The second object of the present_invention is to provide a method_of removing films formed on_a vessel_wall or the like at_a satisfactory etch_rate. The_invention relates to_a method for the quantification of_tumor cells in_a body fluid, in which firstly_the_sample to be_examined_is_subjected to_a process for_the_enrichment or_depletion_of tumor cells and a reaction_is_carried out on the enriched or depleted_tumor cells in which_the_mRNA encoding the catalytic_subunit of the telomerase is_specifically amplified, and subsequently the amount_of amplified_nucleic acid_is determined quantitatively, and to test kits suitable therefor.
Virtually all solid_malignant tumors have the potential to_form metastases. The metastasis_process comprises_the_spread of malignant_cells_as micrometastases,_usually via the blood or lymph to_remote organs_and the development of autonomous secondary_tumors. The extent of_metastasis_determines the prognosis of an oncosis.
The_requirements of tumor prevention or aftercare_programs are to diagnose primary_tumors_or_a recurrence or a metastasis_early, even before metastases become clinically_manifest. This aim_cannot yet be satisfactorily met with the_available_instrumental techniques; in particular, there is_still_a diagnostic gray zone between the_detection_of_circulating tumor cells and incipient_formation of metastases in organs. Early_diagnosis of circulating malignant cells, for example in peripheral_blood of a_patient undergoing tumor aftercare, would_make_it_possible to introduce immunomodulating therapy or polychemotherapy, which is possibly_curative, at_an early date,_that is to say even before organ metastasis becomes manifest._Quantification of the tumor cells in peripheral_blood before and after the therapy represents an important control in_such cases.
The life span of eukaryotic cells is,_according to the telomer hypothesis, determined by_the length of the_termini_of the chromosomal DNA, the telomers. Thus,_according_to_this_theory, telomers have_the function of_a mitotic clock._Because of_the replication mechanism_of the_DNA polymerases, the_telomers