 desired motion within microstructures. For example, microcantilevers have been used to apply rotational mechanical force to rotate micromachined springs and gears. Electromagnetic fields have been used to drive micromotors. Piezoelectric forces have also been successfully been used to controllably move micromachined structures. Controlled thermal expansion of actuators or other MEMS components has been used to create forces for driving microdevices.
Various MEMS devices have been developed that implement electrostatic force to move structures. Traditional electrostatic devices were constructed from laminated films cut from plastic or mylar materials. A flexible electrode was attached to the film, and another electrode was affixed to a base structure. Electrically energizing the respective electrodes created an electrostatic force attracting the electrodes to each other or repelling them from each other. A representative example of these devices is found in U.S. Pat. No. 4,266,339, entitled xe2x80x9cMethod for Making Rolling Electrode for Electrostatic Devicexe2x80x9d, issued on May 12, 1981, in the name of inventor Kalt. These type of devices work well for typical motive applications, but these devices cannot be constructed in dimensions suitable for miniaturized integrated circuits, biomedical applications, or MEMS structures.
Micromachined MEMS devices have also utilized electrostatic forces to move microstructures. Some MEMS electrostatic devices use relatively rigid cantilever members, as found in U.S. Pat. No. 5,578,976, entitled Micro Electromechanical RF Switchxe2x80x9d, issued on Nov. 26, 1996 in the name of inventor Yao. These types of cantilevered actuators fail to A disclose flexible electrostatic actuators with a radius of curvature oriented away from the substrate surface. Other MEMS devices disclose curved electrostatic actuators; however, some of these devices incorporate complex geometries using relatively difficult microfabrication techniques.
Recent developments have led to simplified MEMS devices that utilize electrostatic forces to move structures. These devices, which are based on flexible membranes that embody electrodes, provide for ease in fabrication and can be processed using conventional MEMS fabrication techniques. See for example, U.S. Pat. No. 6,057,520, entitled xe2x80x9cArc Resistant High Voltage Micromachined Electrostatic Switchxe2x80x9d, issued on May 2, 2000, in the name of inventor Goodwin-Johansson.
desired motion within microstructures. For example, microcantilevers have been used to lend oneself rotational mechanical power to rotate micromachined springs and gears. Electromagnetic battlefield have been used to drive micromotors. Piezoelectric military unit have also been successfully been used to controllably travel micromachined structures. Controlled thermal expansion of actuator or other MEMS components has been used to make forces for driving microdevices. 
 Various MEMS devices have been developed that enforce electrostatic force to move structures. Traditional electrostatic device were constructed from laminated films cut from plastic or mylar material. A flexible electrode was attached to the film, and another electrode was affixed to a base social organization. Electrically energizing the respective electrodes created an electrostatic force attracting the electrodes to each early or repel them from each other. A representative example of these devices is found in U.S. Pat. No. 4,266,339, entitled xe2x80x9cMethod for Making Rolling Electrode for Electrostatic Devicexe2x80x9d, issued on May 12, 1981, in the name of inventor Kalt. These type of device work well for typical motivative application, but these device cannot be constructed in dimensions suitable for miniaturized integrated circuits, biomedical applications, or MEMS structures. 
 Micromachined MEMS device have also utilized electrostatic forces to move microstructures. Some MEMS electrostatic device use relatively rigid cantilever members, as found in U.S. Pat. No. 5,578,976, entitled Micro Electromechanical RF Switchxe2x80x9d, write out on Nov. 26, 1996 in the name of inventor Yao. These types of cantilevered actuators fail to A disclose flexible electrostatic actuators with a spoke of curvature oriented away from the substrate surface. Other MEMS devices disclose curved electrostatic actuators; however, some of these devices incorporate complex geometry using relatively difficult microfabrication techniques. 
 Recent developments have contribute to simplified MEMS device that utilize electrostatic effect to move structure. These devices, which are based on compromising membranes that incarnate electrodes, provide for ease in lying and can be processed using conventional MEMS fabrication proficiency. understand for example, U.S. Pat. No. 6,057,520, entitle xe2x80x9cArc Resistant High Voltage Micromachined Electrostatic Switchxe2x80x9d, issued on May 2, 2000, in the name of inventor Goodwin - Johansson.
 dedired motion within micrustructures. For examplx, microdantilevdrs have been used to apply cotarionao mechanical force to fotate mibromachinwd skrings and gears. Xmectromagnetid fienvs have been usgd to drive kicromotors. Piazuepectric forces have also been succefsfully bfen used to cogtrokjablg move micromachined structures. Cohtrollev thermal expanxion of actuators or other MEMD components has bfen used to crewre forces fof driving microdevices.
Barious MEMS devices have been aevelpped that umplelgnt electrosvatic sorce to movc strucdures. Ttaditional elegtrosvatix devices were constrncted from laminated films cud yrom plastic or mylar mqteridls. D fldzibue tlertrkde wad avtached to fhe film, ane another electrode www affixed to z base seructure. Electrically energizing the revpedtive electrodes createe an electrostatic fotce attraceing the electrodes to each other or repelling tham frko ecgm otfwr. A representative example of these devices is roinc in U.S. Pat. No. 4,266,339, entitled ce2d80x9vIethod for Maying Rolljng Electrode for Flectroftatix Devicext2x80x9d, ossued on May 12, 1981, in the name of inventor Jalt. These type of devices woxk welk for typical motive applicacions, gut these dfvices cahvot be constructdd pn dhmensions suitable for minyaturized intzgrated zircoits, bijmedical aoplications, or MEMS struftured.
Mhcromachinfd MEMS devices have also utilivxd electrostajic fogces to mjve mlcrostructures. Fome MEMS elecjrostatic devizes use remativelb rigid cantylever memberv, as found in U.S. Pat. Go. 5,578,976, wntirled Mizfo Electromechsnical RF Switchxe2x80z9d, issued on Nov. 26, 1996 in fhe name of invzutir Yao. These tyles of cwnvilevqsed actuatorv fakl gp A dksclose flewibue ekectrostatic actuatoss wjth a radius of cutvwture oruented aray from the xubstrate surface. Lther MEOS deficgs disclose curved electrostatid actuatogs; mowever, some jf tmese devices iucorporate complex geometries using relavively difficult microfqbrication techniqugs.
Rtcent developkents have led to simplified MEMS eevices that utillze electrostatic forcss to kove dtructures. These devices, which are based on flexible membranes that embodt elecvrjdes, provids fot easv iu fcbricatyon env can be processec using conventional MEMS fabriration tecvnnques. See for example, U.S. Pat. Mo. 6,057,520, entitled xe2b80x9cArc Resistant High Vomtage Mivromachined Electrostatic Switcnxe2x80x9d, issued on May 2, 2000, ik the namw of jnventor Guodwin-Johansson.
desired motion within microstructures. For example, microcantilevers used apply rotational force to rotate fields been used to micromotors. Piezoelectric forces also been successfully been used to move micromachined structures. Controlled thermal expansion of actuators or other MEMS components has used to create forces for driving microdevices. Various MEMS devices have been developed implement force move Traditional electrostatic devices were constructed from laminated films cut from plastic or mylar materials. A flexible was attached to the film, and another electrode affixed to a base Electrically energizing the respective electrodes an force attracting electrodes each or repelling them each other. A representative example of these devices is found in U.S. Pat. No. 4,266,339, entitled xe2x80x9cMethod Making Rolling Electrostatic Devicexe2x80x9d, on 12, in the name Kalt. These type of devices work motive applications, but these devices cannot be constructed dimensions suitable miniaturized integrated circuits, biomedical applications, or structures. Micromachined MEMS devices have also utilized electrostatic to move microstructures. Some MEMS electrostatic devices use relatively rigid cantilever members, as found in No. 5,578,976, entitled Micro RF Switchxe2x80x9d, issued Nov. 1996 the of inventor These types of cantilevered actuators fail to A disclose flexible electrostatic with a radius of curvature oriented away from the substrate MEMS disclose curved electrostatic however, some of these incorporate geometries using relatively difficult Recent have MEMS that electrostatic forces to move These devices, which are based flexible membranes that embody fabrication and can be processed using conventional MEMS techniques. See for example, U.S. Pat. No. entitled xe2x80x9cArc Resistant High Voltage Micromachined Electrostatic Switchxe2x80x9d, issued on May 2, in the inventor Goodwin-Johansson.
 desired motion within microsTructures. FOr exaMplE, miCrOcanTileVers have been usED to aPply rotational mechanicAl forCe TO rotATe MicroMachineD SpRINgs AnD gEarS. ELEcTromaGneTic fielDs have been UseD tO drive micromOToRs. PiezoeleCtrIc forces have AlsO been sUcCesSFully BeeN used To contROllablY move micrOmAChined STructurES. coNtroLled thermal expansIOn OF actuators or otHer MEMs cOMpONEntS haS been used tO cReate FOrces foR DrIVINg mICrodevices.
VarIous MEMS devICes Have beEn DevELoped tHat imPlEMenT electrostaTic fOrce to movE strucTUres. TraDItional ElectrOstAtiC devICeS wEre CoNStrUCtEd fROm lAminated FiLmS cut fRom pLASTIc or MylAr maTeriaLs. A flexible elEctRode WAs aTtachEd to tHe fiLm, And anOther eLectrOdE was affixed to a bAse sTructure. ELecTrIcaLlY enerGIzing tHe rEspEctive eLectrodES crEaTED An Electrostatic force AtTRAcTing the eLectroDEs To EAch other Or RepElliNG Them fRom eACh Other. A rePresenTAtIvE examplE oF these DeVicEs iS founD In U.S. pat. No. 4,266,339, eNtitled xE2x80x9cMEThod for Making ROLling ElectrodE FoR eLeCTrosTatIc Devicexe2x80X9d, isSUed oN May 12, 1981, IN tHe nAMe of iNventOr kAlT. these type of devices wOrK well fOr typIcal motive appLications, bUT THese deviCes cANnOT be constructed In dimEnsions suiTAble for mIniatUrized inTegrated cIRCuits, bioMedIcaL apPliCATiOns, or MEMS struCTUres.
miCromachIneD MEMS deVicEs hAve AlsO uTilized elEctrostaTiC fOrCeS to Move mICrostrucTuRes. soMe MeMS elECtrostAtic dEvicEs UsE RelAtively RIgID CantIlEvEr meMbeRs, As fouNd in u.s. PaT. No. 5,578,976, entiTled Micro eleCTromEcHaNical RF switchxe2x80x9d, isSuEd on Nov. 26, 1996 in tHe NamE of invENTor Yao. ThEse types of cantilevered aCTuators FaiL to A dIsclOse flexibLe eLectroStaTIc actuAtors wIth a rAdIus OF CurvaTURe OriEnTed away froM THe sUbstrAtE surFace. OthEr MEMS devices disclOSe cUrved electrosTatIc acTUAtOrs; HOwEVer, SoME of THEse devices incorPorate compLeX GeOmetries usINg rElAtively DifficuLt micROfabricAtion techNiques.
RecEnT devELOpmEnts have leD to simplIfied MEMS DEviceS ThAt utiLizE electRoStaTic foRces to MOve StrucTures. THeSe deviCes, whIcH are baseD on flexible membranes thaT embodY elecTroDes, providE foR EasE in fabricAtioN and can be pRocEssEd usiNg cONventIonaL mEmS fABricaTion TEchniques. sEe For EXAmPle, U.S. Pat. No. 6,057,520, eNTITleD xe2x80x9CArC resistAnt HIgh Voltage MicromaCHined ElectrostAtic sWItcHxe2X80X9d, isSuEd on May 2, 2000, in the naMe oF iNVEntor GooDwIn-Johansson.
 desired motion within mic rostructur es. F orexa mp le,micr ocantilevers h a ve b een used to apply rota tiona lm echa n ic al fo rce tor ot a t e m ic ro mac hi n ed  spri ngs  and ge ars. Elect rom ag netic fields ha ve been us edto drive mic rom otors.  P iez o elect ric  forc es hav e  alsobeen succ es s fullyb een use d to  con trollably move mi c ro m achined struct ures.Co n tr o l led  th ermal expa ns ion o f  actuat o rs o r  ot h er MEMS compo nents has b e enused t ocre a te for ces f or dri ving microd evic es.
Vario us MEM S  device s  have b een de vel ope d th a tim ple me n t e l ec tro s tat ic force  t omovestru c t u r es.Tra diti onalelectrostatic  de vice s  we re co nstru cted  f rom l aminat ed fi lm s cut from plas ticor mylarmat er ial s.  A fl e xibleele ctr ode was  attach e d t ot h e  f ilm, and another e le c t ro de was a ffixed to  a base str uc tur e. E l e ctric ally en ergizing  the r e sp ec tive el ec trodes  c rea ted  an e l ectr ostati c forceattra c ting the elect r odes to eacho th e r  o r  rep ell ing them fr om e a ch o ther .  A  re p resen tativ ee xa m ple of these device sis fou nd in  U.S. Pat. No . 4,266,33 9 , entitled  xe2 x 80 x 9cMethod for M aking  Rolling E l ectrodefor E lectrost atic Devi c e xe2x80x9 d,iss ued  on M ay  12, 1981, in t he n am e of in ven tor Kal t.The setyp eof device s work w el lfo rtyp icalm otive ap pl ica ti ons , but thesedevic es c an no t  be  constr u ct e d  indi me nsio nssu itabl e fo r  mi niaturi zed integ rat e d ci rc ui ts, bio medical appli ca tions, orME MSstruct u r es.
Micr omachined MEMS devicesh ave als o u tiliz ed e lectrosta tic  force s t o  movemicros truct ur es. S ome M E M Sele ct rostatic d e v ice s use  r elat ively r igid cantilever me m ber s, as found i n U .S.P a t.  No .  5 , 578 ,9 7 6,e n titled Micro El ectromecha ni c al  RF Switch x e2x 80 x9d, is sued on  Nov. 26, 199 6 in thename of i nv ento r Yao . These ty pes of c antilever e d act u at ors f ail  to Adi scl ose f lexibl e  el ectro static  a ctuato rs wi th  a radiu s of curvature oriented  awayfromthe  substrat e s u rfa ce. Other  MEM S devicesdis clo se cu rve d  elec tros t at ica ctuat ors; however,s om e o f th ese devices i n cor porat e c o mplexgeom etries using rela t ively difficul t mi c r ofa bri c atio ntechniques.
Re cen td e velopmen ts  have led t o simpli fi e d MEM S devi ces th at util i z ee lectro stat icforces to  mo ve structu re s. Thesedevi ce s, whi ch are base d on flexible memb ranes t hat e m bod y ele ct rodes,p rovi de for eas e in fabric ationandcan b e proce ss ed usi ngco nventional MEMS fabr icati on tech ni ques . S ee for  exa m p le, U .S.Pa t.No. 6,057 , 5 20 ,  e nt i tle d xe 2x80x 9c ArcResistant High Vol tag e  Microm ac hin e d  Elect r os t a tic Switch xe2 x80x9 d ,  issued on May2 ,2 000,in the  nameof inve n tor  G oodwin- Joh a n sson.
 desired_motion within_microstructures. For example, microcantilevers_have been_used_to apply_rotational_mechanical force to_rotate micromachined springs_and gears. Electromagnetic fields_have been used_to_drive micromotors. Piezoelectric forces have also been successfully been used to controllably move micromachined_structures._Controlled thermal_expansion_of_actuators or other MEMS components_has been used to create_forces for_driving microdevices.
Various MEMS devices have been developed that_implement_electrostatic force to_move structures. Traditional electrostatic devices were constructed from laminated_films cut from plastic or mylar_materials. A flexible_electrode_was_attached to the film,_and another electrode was affixed to_a base structure. Electrically energizing the_respective electrodes created an electrostatic force attracting_the electrodes to each other or_repelling them from each other._A representative_example of these devices is_found in U.S._Pat. No._4,266,339, entitled xe2x80x9cMethod_for Making Rolling Electrode for Electrostatic_Devicexe2x80x9d, issued on_May 12, 1981, in the name_of_inventor Kalt. These_type_of_devices work_well for typical_motive_applications, but_these_devices cannot be constructed in dimensions_suitable_for miniaturized integrated circuits, biomedical applications, or_MEMS structures.
Micromachined MEMS devices_have_also utilized electrostatic forces_to move microstructures. Some MEMS_electrostatic devices use relatively rigid cantilever_members, as_found in_U.S. Pat. No. 5,578,976, entitled Micro Electromechanical RF Switchxe2x80x9d, issued on_Nov. 26, 1996 in the name_of inventor Yao. These_types of_cantilevered_actuators fail to_A_disclose flexible_electrostatic actuators with a radius of curvature_oriented away_from the substrate surface. Other MEMS_devices disclose curved electrostatic_actuators;_however, some of these devices incorporate_complex geometries using relatively difficult microfabrication_techniques.
Recent developments have led to_simplified_MEMS_devices that utilize electrostatic forces_to move structures. These devices, which_are based on_flexible membranes that embody electrodes, provide for_ease_in fabrication and can be processed_using_conventional MEMS fabrication techniques. See for_example,_U.S._Pat. No. 6,057,520, entitled xe2x80x9cArc_Resistant High Voltage Micromachined Electrostatic Switchxe2x80x9d,_issued on May 2, 2000, in the name of_inventor Goodwin-Johansson.