right)^2 -\frac{\partial^2 \zeta}{\partial x^2}\frac{\partial^2 \zeta}{\partial y^2},$$ where the linear operator $\mathcal{D}^4$ is defined by $$\mathcal{D}^4 \equiv S_{11} \frac{\partial^4}{\partial y^4} + (2 S_{12} + S_{66}) \frac{\partial^4}{\partial x^2 \partial y^2} +  S_{22} \frac{\partial^4}{\partial x^4}
-2 S_{16}\frac{\partial^4}{\partial x \partial y^3} - 2 S_{26} \frac{\partial^4}{\partial x^3 \partial y}$$ and simplified using the symmetry property $S_{ij}=S_{ji}$. Eq.  is an anisotropic generalization of Equation (14.7) in [@landau_lifshitz]\[p. 53\], to which it reduces in the isotropic case.

Contact forces at the wafer–substrate interface\[app:contact\_force\]
=====================================================================

Consider a rectangular volume covering the wafer over its whole thickness $d$ in $z$-direction but small in the transverse directions $x$ and $y$. Due to the curved substrate, the surface of the wafer is only approximately aligned with the $xy$-plane and thus the total force acting on the volume element has a small component in $z$ which has to be cancelled by the surface force $P$.

Let an edge of the volume parallel to $z$ be located at $(x,y)$. Now the normal force acting on the face defined by edges at $(x,y)$ and $(x,y + \Delta y)$, where $\Delta y$ is the side length of the volume in $y$-direction, is $$F_{x,n} = - d \sin \phi_x \sigma_{xx} \Delta y$$ where $\phi_x$ is the inclination of the wafer with respect to the $xy$-plane along $x$. The sign is a result of the outward normal of the face pointing in the negative $x$-direction. Since $\sin \phi_x \approx \partial \zeta / \partial x$, the normal force on the opposite face defined by the edges at $(x+\Delta x, y)$ and $(x+\Delta x, y+\Delta y)$, where $\Delta x$ is the side length
right)^2 -\frac{\partial^2 \zeta}{\partial x^2}\frac{\partial^2 \zeta}{\partial y^2},$$ where the linear operator $ \mathcal{D}^4 $ is defined by $ $ \mathcal{D}^4 \equiv S_{11 } \frac{\partial^4}{\partial y^4 } + (2 S_{12 } + S_{66 }) \frac{\partial^4}{\partial x^2 \partial y^2 } +   S_{22 } \frac{\partial^4}{\partial x^4 } 
 -2 S_{16}\frac{\partial^4}{\partial x \partial y^3 } - 2 S_{26 } \frac{\partial^4}{\partial x^3 \partial y}$$ and simplified use the isotropy property $ S_{ij}=S_{ji}$. Eq.    is an anisotropic generalization of Equation   (14.7) in [ @landau_lifshitz]\[p. 53\ ], to which it reduce in the isotropic lawsuit. 

 Contact forces at the wafer – substrate interface\[app: contact\_force\ ] 
 = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = 

 regard a orthogonal volume covering the wafer over its whole thickness $ d$ in $ z$-direction but small in the transverse direction $ x$ and $ y$. Due to the curved substrate, the surface of the wafer is only approximately aligned with the $ xy$-plane and thus the total force dissemble on the volume element has a little component in $ z$ which has to be cancelled by the surface military unit $ P$. 

 Let an edge of the volume parallel to $ z$ be located at $ (x, y)$. Now the normal violence acting on the face defined by edges at $ (x, y)$ and $ (x, y + \Delta y)$, where $ \Delta y$ is the slope length of the volume in $ y$-direction, is $ $ F_{x, n } = - d \sin \phi_x \sigma_{xx } \Delta y$$ where $ \phi_x$ is the inclination of the wafer with respect to the $ xy$-plane along $ x$. The sign is a result of the outward normal of the face pointing in the negative $ x$-direction. Since $ \sin \phi_x \approx \partial \zeta / \partial x$, the normal force on the diametric expression defined by the edge at $ (x+\Delta x, y)$ and $ (x+\Delta x, y+\Delta y)$, where $ \Delta x$ is the english length
rigjt)^2 -\frac{\partial^2 \zeta}{\partixl x^2}\frac{\partial^2 \zeta}{\pactial y^2},$$ where tfe linear operator $\mathcal{D}^4$ ms dwfinee by $$\mathcal{D}^4 \equiv S_{11} \wrac{\partiwl^4}{\partiao y^4} + (2 S_{12} + S_{66}) \frac{\'zrtial^4}{\partial w^2 \parciel y^2} +  S_{22} \frac{\pattial^4}{\partial x^4}
-2 S_{16}\frac{\partian^4}{\pxrcial x \partial y^3} - 2 S_{26} \frac{\partial^4}{\partyal x^3 \psrhial y}$$ and simklifitd tsinf the symmetry property $S_{ij}=S_{ji}$. Eq.  js an aiisotropic genetalization of Equation (14.7) in [@pandwu_lifshitz]\[p. 53\], to whlch it reduxes yb the isotrooic case.

Contact forces at the wafer–substrate interfacd\[app:cpntact\_forcg\]
=====================================================================

Einslger a rectaigular volume covevpng the wafer pver its whole thmcknwss $d$ in $z$-direction bnt small in the tranfverse diseetions $x$ and $y$. Due to tye cutved vubsgeatd, tge shrface of the wafer is only approximately aligned wynn the $xy$-plans and ehts the total force acting on the volume elsment has a small compobent in $z$ which has tl be cancqlled by the surface force $P$.

Let an edge of the vonume 'afaloej ro $z$ be located at $(x,y)$. Now the normal force actigf pn the face defiked by edges at $(x,y)$ ajd $(v,y + \Delta y)$, wfere $\Dzmtz y$ is the side lejgth of the colume in $y$-ditection, is $$F_{x,n} = - d \sin \phi_x \sigma_{xx} \Delna y$$ where $\phi_x$ is the inclinatiou of tne wager with respect to the $xy$-pmane along $d$. The sigh is a result of ghe ogtward normal of the face [ointing mn thz negatixe $x$-cirectyon. Since $\din \pmh_x \approx \partial \xeta / \pdrtial x$, tje normal force on the opposite face defined ny thv edges ac $(x+\Delba x, y)$ and $(x+\Delea x, y+\Delta y)$, chere $\Dejta x$ is the sise lengvh
right)^2 -\frac{\partial^2 \zeta}{\partial x^2}\frac{\partial^2 \zeta}{\partial y^2},$$ where operator is defined $$\mathcal{D}^4 \equiv S_{11} + \frac{\partial^4}{\partial x^2 \partial + S_{22} \frac{\partial^4}{\partial -2 S_{16}\frac{\partial^4}{\partial x \partial y^3} - S_{26} \frac{\partial^4}{\partial x^3 \partial y}$$ and simplified using the symmetry property $S_{ij}=S_{ji}$. Eq. an anisotropic generalization of Equation (14.7) in [@landau_lifshitz]\[p. 53\], to which it reduces the case. forces the wafer–substrate interface\[app:contact\_force\] ===================================================================== Consider a rectangular volume covering the wafer over its whole thickness $d$ $z$-direction but small in the transverse directions $x$ $y$. Due to the substrate, the surface of the is approximately aligned the and the total force on the volume element has a small component in $z$ which has to be cancelled by the force $P$. edge of volume to be located at the normal force acting on the edges at $(x,y)$ and $(x,y + \Delta y)$, $\Delta y$ the side length of the volume $y$-direction, is $$F_{x,n} = - d \sin \phi_x \Delta y$$ where $\phi_x$ is the inclination of the wafer with respect to the $xy$-plane The sign is a of the outward of face in negative $x$-direction. $\sin \phi_x \approx \partial \zeta / \partial x$, the normal force the opposite face defined by the edges at $(x+\Delta x, $(x+\Delta y+\Delta y)$, where x$ is the side
right)^2 -\frac{\partial^2 \zeta}{\partiAl x^2}\frac{\parTial^2 \zEta}{\ParTiAl y^2},$$ wHere The linear operaTOr $\maThcal{D}^4$ is defined by $$\mathcAl{D}^4 \eqUiV s_{11} \fraC{\PaRtial^4}{\Partial Y^4} + (2 s_{12} + S_{66}) \FRAc{\pArTiAl^4}{\pArTIaL x^2 \parTiaL y^2} +  S_{22} \frac{\Partial^4}{\parTiaL x^4}
-2 s_{16}\frac{\partial^4}{\PArTial x \partiAl y^3} - 2 s_{26} \frac{\partial^4}{\ParTial x^3 \pArTiaL Y}$$ and sImpLifieD using THe symmEtry propeRtY $s_{ij}=S_{ji}$. eQ.  is an anISOtRopiC generalization of eQuATion (14.7) in [@landau_liFshitz]\[P. 53\], tO WhICH it RedUces in the iSoTropiC Case.

ConTAcT FORceS At the wafer–subStrate interFAce\[App:conTaCt\_fORce\]
=====================================================================

ConSider A rECtaNgular volumE covEring the wAfer ovER its whoLE thicknEss $d$ in $Z$-diRecTion BUt SmAll In THe tRAnSveRSe dIrectionS $x$ AnD $y$. Due To thE CURVed sUbsTratE, the sUrface of the waFer Is onLY apProxiMatelY aliGnEd witH the $xy$-Plane AnD thus the total foRce aCting on thE voLuMe eLeMent hAS a smalL coMpoNent in $z$ Which haS To bE cANCElLed by the surface forCe $p$.

lEt An edge of The volUMe PaRAllel to $z$ Be LocAted AT $(X,y)$. Now The nORmAl force aCting oN ThE fAce defiNeD by edgEs At $(x,Y)$ anD $(x,y + \DeLTa y)$, wHere $\DeLta y$ is thE side LEngth of the voluME in $y$-direction, IS $$F_{X,N} = - D \sIN \phi_X \siGma_{xx} \Delta y$$ WherE $\Phi_x$ Is thE InCliNAtion Of the WaFEr WIth respect to the $xy$-plAnE along $X$. The sIgn is a result oF the outwarD NORmal of thE facE PoINting in the negaTive $x$-Direction. SINce $\sin \phI_x \appRox \partiAl \zeta / \parTIAl x$, the noRmaL foRce On tHE OpPosite face defINEd by ThE edges aT $(x+\DElta x, y)$ aNd $(x+\delTa x, Y+\DeLtA y)$, where $\DeLta x$ is thE sIdE lEnGth
right)^2 -\frac{\partial^2  \zeta}{\p artia l x ^2} \f rac{ \par tial^2 \zeta}{ \ part ial y^2},$$ where thelinea ro pera t or  $\ma thcal{D } ^4 $ isde fi ned  b y  $ $\mat hca l{D}^4\equiv S_{ 11}  \ frac{\partia l ^4 }{\partial  y^ 4} + (2 S_{1 2}+ S_{6 6} ) \ f rac{\ par tial^ 4}{\pa r tial x ^2 \parti al y^2} +  S_{22} \ fr ac{\ partial^4}{\parti a lx ^4}
-2 S_{16}\ frac{\ pa r ti a l ^4} {\p artial x \ pa rtial y^3} -2  S _ { 2 6}\ frac{\partial ^4}{\partia l  x^ 3 \par ti aly }$$ an d sim pl i fie d using the  sym metry pro perty$ S_{ij}= S _{ji}$.  Eq. isananis o tr op icge n era l iz ati o n o f Equati on  ( 14.7)  in[ @ l a ndau _li fshi tz]\[ p. 53\], to w hic h it red ucesin th e is ot ropic  case. 

Con ta ct forces at th e wa fer–subst rat eint er face\ [ app:co nta ct\ _force\ ]
===== = === == = = = == ================== == = = == ======== ====== = == == = ======== =
Co nsid e r  a re ctan g ul ar volum e cove r in gthe waf er  overit s w hol e thi c knes s $d$in $z$-d irect i on but small i n  the transver s ed i re c tion s $ x$ and $y$.  Due to t he c u rv eds ubstr ate,th e  s u rface of the waferis  onlyappro ximately alig ned with t h e $xy$-pla ne a n dt hus the totalforce  acting on the volu me el ement ha s a small c omponent  in  $z $ w hic h ha s to be cance l l ed b ythe sur fac e force  $P $.
Le t a nedge of t he volum epa ra ll elto $z $  be loca te d a t$(x ,y)$. Now th e nor malfo rc e  ac ting on th e face  d ef ined  by  e dgesat $ ( x,y )$ and$(x,y + \ Del t a y) $,  w here $\ Delta y$ is t he  side leng th  of  the v o l ume in $ y$-direction, is $$F_{x , n} = -d \ sin \ phi_ x \sigma_ {xx } \Del tay $$ whe re $\p hi_x$  i s t h e  incl i n at ion  o f the wafe r wit h res pe ct t o the $ xy$-plane along $x $ . T he sign is ares ulto f  t heo ut w ard  n o rma l of the face poi nting in t he ne gative $x$ - dir ec tion. S ince $\ sin \ p hi_x \a pprox \pa rtial \ze ta  / \ p a rti al x$, the  normalforce ont he op p os ite f ace  defin ed  by  theedgesa t $ (x+\D elta x ,y)$ an d $(x +\ Delta x,  y+\Delta y)$, where $\ Deltax$ is  th e side le ngt h 
right)^2 -\frac{\partial^2_\zeta}{\partial x^2}\frac{\partial^2_\zeta}{\partial y^2},$$ where the_linear operator_$\mathcal{D}^4$_is defined_by_$$\mathcal{D}^4 \equiv S_{11}_\frac{\partial^4}{\partial y^4} +_(2 S_{12} + S_{66})_\frac{\partial^4}{\partial x^2 \partial_y^2}_+  S_{22} \frac{\partial^4}{\partial x^4}
-2 S_{16}\frac{\partial^4}{\partial x \partial y^3} - 2 S_{26} \frac{\partial^4}{\partial x^3_\partial_y}$$ and_simplified_using_the symmetry property $S_{ij}=S_{ji}$. Eq. _is an anisotropic generalization of_Equation (14.7) in_[@landau_lifshitz]\[p. 53\], to which it reduces in the_isotropic_case.

Contact forces at_the wafer–substrate interface\[app:contact\_force\]
=====================================================================

Consider a rectangular volume covering the wafer_over its whole thickness $d$ in_$z$-direction but small_in_the_transverse directions $x$ and_$y$. Due to the curved substrate,_the surface of the wafer is_only approximately aligned with the $xy$-plane and_thus the total force acting on_the volume element has a_small component_in $z$ which has to_be cancelled by_the surface_force $P$.

Let an_edge of the volume parallel to_$z$ be located_at $(x,y)$. Now the normal force_acting_on the face_defined_by_edges at_$(x,y)$ and $(x,y_+_\Delta y)$,_where_$\Delta y$ is the side length_of_the volume in $y$-direction, is $$F_{x,n} =_- d \sin \phi_x_\sigma_{xx}_\Delta y$$ where $\phi_x$_is the inclination of the_wafer with respect to the $xy$-plane_along $x$._The sign_is a result of the outward normal of the face pointing_in the negative $x$-direction. Since $\sin_\phi_x \approx \partial \zeta_/ \partial_x$,_the normal force_on_the opposite_face defined by the edges at $(x+\Delta_x, y)$_and $(x+\Delta x, y+\Delta y)$, where_$\Delta x$ is the_side_length