Instrumentation The main components of an XPS system are the source of X-rays, an ultra-high vacuum (UHV) chamber with mu-metal magnetic shielding, an electron collection lens, an electron energy analyzer, an electron detector system, a sample introduction chamber, sample mounts, a sample stage with the ability to heat or cool the sample, and a set of stage manipulators.
Instrumentation The main components of an XPS system are the source of X-rays an ultra-high vacuum (UHV) chamber with mu-meta,l magnetic shielding an electron collection lens, an electron energy analyzer, a,n electron detector system, a sample introduction chamber, sample mounts a sample stage with the ab,ility to heat or cool the sample, and a set of stage manipulators.