Applications thumb|A Texas Instruments DMD chip for cinema projection thumb|Measuring mechanical properties of a gold stripe (width ~1 μm) using MEMS inside a transmission electron microscope Some common commercial applications of MEMS include: Inkjet printers, which use piezoelectrics or thermal bubble ejection to deposit ink on paper. Accelerometers in modern cars for a large number of purposes including airbag deployment and electronic stability control. Inertial measurement units (IMUs): MEMS accelerometers. MEMS gyroscopes in remote controlled, or autonomous, helicopters, planes and multirotors (also known as drones), used for automatically sensing and balancing flying characteristics of roll, pitch and yaw. MEMS magnetic field sensor (magnetometer) may also be incorporated in such devices to provide directional heading. MEMS inertial navigation systems (INSs) of modern cars, airplanes, submarines and other vehicles to detect yaw, pitch, and roll; for example, the autopilot of an airplane. Accelerometers in consumer electronics devices such as game controllers (Nintendo Wii), personal media players / cell phones (virtually all smartphones, various HTC PDA models), augmented reality (AR) and virtual reality (VR) devices, and a number of digital cameras (various Canon Digital IXUS models). Also used in PCs to park the hard disk head when free-fall is detected, to prevent damage and data loss. MEMS barometers. MEMS microphones in portable devices, e.g., mobile phones, head sets and laptops. The market for smart microphones includes smartphones, wearable devices, smart home and automotive applications. Precision temperature-compensated resonators in real-time clocks. Silicon pressure sensors e.g., car tire pressure sensors, and disposable blood pressure sensors. Displays e.g., the digital micromirror device (DMD) chip in a projector based on DLP technology, which has a surface with several hundred thousand micromirrors or single micro-scanning-mirrors also called microscanners. The MEMS mirrors can also be used in conjunction with laser scanning to project an image. Optical switching technology, which is used for switching technology and alignment for data communications. RF switches and relays. Bio-MEMS applications in medical and health related technologies including lab-on-a-chip (taking advantage of microfluidics and micropumps), biosensors, chemosensors as well as embedded components of medical devices e.g. stents. Interferometric modulator display (IMOD) applications in consumer electronics (primarily displays for mobile devices), used to create interferometric modulation − reflective display technology as found in mirasol displays. Fluid acceleration, such as for micro-cooling. Micro-scale energy harvesting including piezoelectric, electrostatic and electromagnetic micro harvesters. Micromachined ultrasound transducers. MEMS-based loudspeakers focusing on applications such as in-ear headphones and hearing aids. MEMS oscillators. MEMS-based scanning probe microscopes including atomic force microscopes. LiDAR (light detection and ranging).
applications thumb|a texas instruments dmd chip for cinema projection thumb|measuring mechanical properties of a gold stripe (width ~1 μm) using mems inside a transmission electron microscope some common commercial applications of mems include inkjet printers which use piezoelectrics or thermal bubble ejection to deposit ink on paper accelerometers in modern cars for a large number of purposes including airbag deployment and electronic stability control inertial measurement units (imus) mems accelerometers mems gyroscopes in remote controlled or autonomous helicopters planes and multirotors (also known as drones) used for automatically sensing and balancing flying characteristics of roll pitch and yaw mems magnetic field sensor (magnetometer) may also be incorporated in such devices to provide directional heading mems inertial navigation systems (inss) of modern cars airplanes submarines and other vehicles to detect yaw pitch and roll; for example the autopilot of an airplane accelerometers in consumer electronics devices such as game controllers (nintendo wii) personal media players / cell phones (virtually all smartphones various htc pda models) augmented reality (ar) and virtual reality (vr) devices and a number of digital cameras (various canon digital ixus models) also used in pcs to park the hard disk head when free-fall is detected to prevent damage and data loss mems barometers mems microphones in portable devices eg mobile phones head sets and laptops the market for smart microphones includes smartphones wearable devices smart home and automotive applications precision temperature-compensated resonators in real-time clocks silicon pressure sensors eg car tire pressure sensors and disposable blood pressure sensors displays eg the digital micromirror device (dmd) chip in a projector based on dlp technology which has a surface with several hundred thousand micromirrors or single micro-scanning-mirrors also called microscanners the mems mirrors can also be used in conjunction with laser scanning to project an image optical switching technology which is used for switching technology and alignment for data communications rf switches and relays bio-mems applications in medical and health related technologies including lab-on-a-chip (taking advantage of microfluidics and micropumps) biosensors chemosensors as well as embedded components of medical devices eg stents interferometric modulator display (imod) applications in consumer electronics (primarily displays for mobile devices) used to create interferometric modulation − reflective display technology as found in mirasol displays fluid acceleration such as for micro-cooling micro-scale energy harvesting including piezoelectric electrostatic and electromagnetic micro harvesters micromachined ultrasound transducers mems-based loudspeakers focusing on applications such as in-ear headphones and hearing aids mems oscillators mems-based scanning probe microscopes including atomic force microscopes lidar (light detection and ranging)