11. The lithographic apparatus of claim 7 , wherein content of at least one of the dictionary memories includes data relating to a portion of the requested pattern, the portion corresponding to a region of the requested pattern that has been most recently processed.
11. The lithographic apparatus of claim 7 , wherein content of at least one of the dictionary memories includes data relating to a portion of the requested pattern, the portion corresponding to a region of the requested pattern that has been most recently processed. 12. The lithographic apparatus of claim 11 , wherein the portion of the requested pattern is delimited by a window of a substantially predetermined size, which is smaller than the requested dose pattern, and wherein the window is moved during decompression so as to contain only the region of the pattern most recently processed.