7. The lithographic apparatus of claim 1 , wherein content of at least one of the dictionary memories changes according to a region of the requested pattern being processed by the dictionary decompressor.
7. The lithographic apparatus of claim 1 , wherein content of at least one of the dictionary memories changes according to a region of the requested pattern being processed by the dictionary decompressor. 9. The lithographic apparatus of claim 7 , wherein output from the first dictionary decoder forms an input for the second dictionary decoder and the internal dictionary memory is progressively updated by storing subsequent portions of the output from the second dictionary decoder.