4. The method of claim 1 , wherein the DEM aware manufacturing applications comprise process prediction, process recipe optimization, process control, monitoring, inline scan, scan diagnostic data analysis, metrology, failure analysis, design-technology co-optimization and DFM deck optimization.
4. The method of claim 1 , wherein the DEM aware manufacturing applications comprise process prediction, process recipe optimization, process control, monitoring, inline scan, scan diagnostic data analysis, metrology, failure analysis, design-technology co-optimization and DFM deck optimization. 6. The method of claim 4 , wherein process recipe optimization comprises: performing optical rule checking (ORC) simulation to detect hotspots; generating a report on a result of the ORC simulation; extracting and classifying one or more layout patterns; updating a pattern database with results of the extracting and classifying; and validating the hotspots and providing a feedback.