1. An automated method for isolating one or more causes of misprocessing in a semiconductor process comprising the steps of: a. processing a plurality of wafers; b. measuring a plurality of process parameters during said processing for each of said plurality of wafers; c. creating a wafer tracking database which contains said plurality of process parameters and a plurality of identifying information associated with each wafer; d. generating a first plurality queries wherein each query in said first plurality of queries corresponds to at least one of said plurality of process parameters; e. applying each query of said first plurality of queries to said wafer tracking database to obtain a set of observations for each query of said first plurality of queries; f. automatically determining from a pattern of each of said set of observations whether each query of said first plurality of queries is interesting for fault isolation; g. dividing said first plurality of queries into a second plurality of queries wherein said second plurality contains queries determined to be interesting for fault isolation; and h. displaying said second group of queries so that at least one cause of misprocessing can be determined.
1. An automated method for isolating one or more causes of misprocessing in a semiconductor process comprising the steps of: a. processing a plurality of wafers; b. measuring a plurality of process parameters during said processing for each of said plurality of wafers; c. creating a wafer tracking database which contains said plurality of process parameters and a plurality of identifying information associated with each wafer; d. generating a first plurality queries wherein each query in said first plurality of queries corresponds to at least one of said plurality of process parameters; e. applying each query of said first plurality of queries to said wafer tracking database to obtain a set of observations for each query of said first plurality of queries; f. automatically determining from a pattern of each of said set of observations whether each query of said first plurality of queries is interesting for fault isolation; g. dividing said first plurality of queries into a second plurality of queries wherein said second plurality contains queries determined to be interesting for fault isolation; and h. displaying said second group of queries so that at least one cause of misprocessing can be determined. 2. The method of claim 1 wherein the step for determining whether each query of said first plurality of queries is interesting comprises determining whether each query contains outliers, wherein queries found to contain outliers are interesting.