11. An apparatus for validating a semiconductor process recipe, comprising: a memory configured to store recipe checker software and a plurality of rule sets describing operating windows for semiconductor process tools; and a processor, coupled to the memory, configured to execute the recipe checker software to: select a rule set describing from the plurality of rule sets for a semiconductor process tool; check parameter values defined by steps in the semiconductor process recipe against limit-checking rules of the rule set to produce first results; determine step types from the steps in the semiconductor process recipe using step definition rules of the rule set to produce second results; check transitions between the step types against step transition rules of the rule set to produce third results; and generate validation data for use of the semiconductor process recipe with the semiconductor process tool based on the first, the second, and the third results.
11. An apparatus for validating a semiconductor process recipe, comprising: a memory configured to store recipe checker software and a plurality of rule sets describing operating windows for semiconductor process tools; and a processor, coupled to the memory, configured to execute the recipe checker software to: select a rule set describing from the plurality of rule sets for a semiconductor process tool; check parameter values defined by steps in the semiconductor process recipe against limit-checking rules of the rule set to produce first results; determine step types from the steps in the semiconductor process recipe using step definition rules of the rule set to produce second results; check transitions between the step types against step transition rules of the rule set to produce third results; and generate validation data for use of the semiconductor process recipe with the semiconductor process tool based on the first, the second, and the third results. 12. The apparatus of claim 11 , wherein the memory is configured to store configuration data for each of the semiconductor process tools, and wherein the processor is configured to select the rule set from the plurality of rule sets based on the configuration data for the semiconductor process tool.