1. A troubleshooting support device that supports troubleshooting by analyzing logs created in a substrate processing apparatus that executes a specific type of processing on a processing target substrate in the event of trouble in said substrate processing apparatus, comprising: an input unit; a display unit; a log file storage unit in which a plurality of category-specific log files, each having stored therein a specific category of log created in said substrate processing apparatus, are stored; a keyword file storage unit in which a single keyword file or a plurality of keyword files having stored therein keywords constituted with character strings set in advance, each corresponding to a single log or a plurality of logs related to trouble that occurs in said substrate processing apparatus, are stored; a keyword setting unit that sets a keyword to be used for log search, selected from a single keyword file or a plurality of keyword files specified based upon input information provided via said input unit; a category-specific log file setting unit that sets a category-specific log file to be used for log analysis, selected from said category-specific log file storage unit based upon input information provided via said input unit; an analysis log file creation unit that creates an analysis log file by extracting and incorporating logs from the selected category-specific log file and sorting said logs in time sequence; and a display control unit that brings up on display said logs in said analysis log file at the display unit, searches said analysis log file for each log containing said keyword having been set and brings up a highlighted display of said log, wherein: said keyword setting unit searches said keyword file storage unit for a single keyword file or a plurality of keyword files specified based upon keyword file information input via said input unit and sets all said keywords contained in each keyword file obtained through the search as keywords to be used for log search.
3. A troubleshooting support device according to claim 1 , further comprising: an extraction range setting unit that sets a range over which logs are to be extracted from each category-specific log file based upon extraction range information input via said input unit, wherein: said analysis log file creation unit extracts and incorporates said logs in said extraction range having been set from said category-specific log file having been selected to create an analysis log file by sorting the logs in time sequence.