15. The computer readable medium of claim 14 wherein the statistical model parameters comprise at least one of: an electrical oxide thickness; a standard deviation of the electrical oxide thickness; a flatband voltage, for both n-type and p-type devices; a standard deviation of the flatband voltage, for both n-type and p-type devices; a channel doping concentration at depletion edge of zero body bias, for both n-type and p-type devices; a standard deviation of the channel doping concentration at depletion edge of zero body bias, for both n-type and p-type devices; a zero biased lightly doped drain resistance per unit width, for both n-type and p-type devices; and a standard deviation of the zero biased lightly doped drain resistance per unit width, for both n-type and p-type devices.
14. The computer readable medium of claim 11 , wherein the method of extracting the theoretical statistical parameters based on the target data parameters comprises at least one of: identifying and measuring data parameters and distribution of data parameters in process control monitoring; extracting statistical model parameters from measured data parameters; and determining a distribution of model parameters from the measured data parameters and distribution of the measured data parameters.