1. A method for manufacturing in a semiconductor device production area, said method comprising: creating a plurality of lots in a manufacturing facility, each said lot including a plurality of substrates processed together as a group; generating a priority score for each said lot at each processing operation of a plurality of processing operations used to fabricate a semiconductor device, using an algorithm that includes at least a designated lot priority, inventory factors in the manufacturing facility and processing tool capability factors; at each said processing operation, determining a processing order of said lots based on said priority score; and processing said lots based on said processing order.