1. A method for an inspection procedure, the method comprising the steps of: (a) providing a device having a plurality of features; (b) obtaining a first image of the device; (c) providing a second image wherein the second image is a benchmark image for the device; (d) characterizing each of the plurality of features in the first image using a first predetermined criteria; (e) characterizing each of a plurality of features in the second image using the first predetermined criteria; (f) comparing the characterization of one of the plurality of features in the first image with the characterization of the corresponding feature in the second image; and (g) creating an output image comprising the first image with a highlighted area wherein the highlighted area comprises a defect determined from the comparison.