1. A sensor device, comprising: a substrate; a plurality of sensing electrodes formed on the substrate; a humidity nanowire sensor, configured on the substrate, and the humidity nanowire sensor comprising at least an exposed first nanowire sensing region, a plurality of hydrophilic material layers, and first two sensing electrodes of the plurality of sensing electrodes respectively connected with two ends of the first nanowire sensing region, wherein the first nanowire sensing region is formed with a plurality of nanowires, and the plurality of nanowires of the first nanowire sensing region is covered by the plurality of hydrophilic material layers respectively; a temperature nanowire sensor, configured on the substrate, and the temperature nanowire sensor comprising at least a second nanowire sensor region, second two sensing electrodes of the plurality of sensing electrodes respectively connected with two ends of the second nanowire sensing region, and a dielectric layer covering the second nanowire sensing region; and a gas nanowire sensor, configured on the substrate, the gas nanowire sensor comprising at least an exposed third nanowire sensing region and third two sensing electrodes of the plurality of sensing electrodes respectively connected with two ends of the third nanowire sensing region, wherein the dielectric layer further covers the remaining portion over the substrate except for a plurality of pad openings on the plurality of sensing electrodes.