1. A pulsed DUV workpiece treatment apparatus delivering light to irradiate the workpiece, for crystallization of a material on the workpiece, carried on a work stage, comprising a pulsed laser DUV light source and an optical train producing a very narrow width very elongated beam of light pulses with a set of parameters required to be maintained within a respective selected narrow range of values on a pulse to pulse basis comprising: a laser controller; a work stage controller; a system controller receiving process recipe control demands from a customer recipe control command generator and providing control signals to the laser controller and the workstage controller, comprising: a database driven process controller comprising: a database containing generic process command steps selectable by a user through an external process user interface.