1. A method, executed by a computer, for controlling mask fabrication using statistical process control analysis, comprising: defining a manufacturing model that describes a fabricating process for masks according to material data and device data; performing a process run of a mask as defined by the manufacturing model; performing a fault detection analysis to reduce a bias in the manufacturing model by the computer, wherein the fault detection analysis comprises collecting process data during the process run; generating a fine-tuning signal in response to a result of the fault detection analysis according to the material data, the device data and the process data using analysis of variance method and regression analysis method by the computer; and adjusting the process run operation according to the fine-tuning signal.