1. A method of automatically determining process parameters for processing equipment, said method comprising: processing at least one first substrate in the processing equipment at a first time; processing at least one second substrate in the processing equipment at a second time different from the first time; collecting process monitor data for the at least one first substrate after processing is completed; collecting process monitor data for the at least one second substrate after processing is completed; receiving the collected data by a multiple-input-multiple-output (MIMO) optimization system; revising a sensitivity matrix used, by a MIMO optimizer of the MIMO optimization system, using the collected data and an adaptive-learning algorithm, wherein the adaptive-learning algorithm revises the sensitivity matrix based on a learning rate coefficient, and the learning rate coefficient is related to reaction of the processing equipment as a function of time; and determining a set of process parameters for the processing equipment by the MIMO optimizer, wherein the MIMO optimizer uses the revised sensitivity matrix to determine the process parameters, and the process parameters determine the process monitor data.