1. An inspection system, comprising: an inspection means that detects the positions and size of particles or pattern defects with which an inspected object is provided; a storage means that is connected to the inspection means via a network and stores inspection data that the inspection means detected and obtained and kill ratio computation data for the position and size of the particles or pattern defects set in a device that is formed in the inspected object; and a computation means that computes kill ratios of individual particles or pattern defects based on the inspection data and the kill ratio computation data and kill ratios every device that comprises the inspected object from the kill ratio every individual particle or pattern defect.