1. In a manufacturing process flow involving a current manufacturing process of a component and a downstream product containing multiple components of the same kind, a method of enhancing downstream product yield without significantly affecting yield of components from which downstream products are made or enhancing yield of the components without significantly affecting the downstream product yield and performance, the method comprising: obtaining a failure rate of the downstream manufacturing process as a function of each of a plurality of component performance parameters of the current manufacturing process of the component; optimizing weighted factors in a figure of merits (FOM) equation based on correlation between the current manufacturing process of the component and the downstream manufacturing process, the weighted factors each corresponding to one of the plurality of component performance parameters; and calculating the figure of merits (FOM) with respect to the plurality of component performance parameters of the current manufacturing process of the component, the FOM including the weighted factors.