1. A system that facilitates utilizing a resolution enhancement for a circuit feature, comprising: a scanning electron microscope (SEM) component that provides a two-dimensional image of the circuit feature; an image analysis engine that extracts circuit feature information from the two-dimensional image; an advanced process control (APC) engine that generates at least one instruction for at least one of a feed forward control or a feedback control based at least in part on the extracted circuit feature information and an inference derived from finding a hyper-surface in previously persisted sets of extracted circuit feature information; and a process component that utilizes the at least one instruction to minimize an error.