1. A system comprising: a plurality of processing modules sharing a vacuum environment, each processing module for performing one or more fabrication processes on a workpiece, the processing modules arranged for sequential processing of the workpiece in a sequence from a first processing module to a last processing module; at least two end load locks for exchanging the workpiece between the vacuum environment and an external environment, the at least two end load locks positioned at opposite ends of the plurality of processing modules, and a mid-entry load lock coupled to the vacuum environment and separating the vacuum environment into two separate interior volumes each selectively isolated from the mid-entry load lock by a slot valve, the mid-entry load lock configured to at least one of add the workpiece to the vacuum environment and remove the workpiece from the vacuum environment.