1. A method comprising: identifying at a data processing system, a device design comprising a first instantiation of a device and a second instantiation of the device; identifying a first layer of the device design; identifying a first region of the device design for the first instantiation based on the first layer of the first instantiation, and a second region of the device design for the second instantiation based on the first layer of the second instantiation; identifying a first compare layer of the device design, the first compare layer comprising a plurality of first compare features including a first compared feature within the first region and a second compared feature within the second region; determining a first difference between the first compared feature and the second compared feature; and determining if the first difference meets a first tolerance to determine if the first instantiation matches the second instantiation.