1. A method for automatically detecting fault conditions and classifying said fault conditions during substrate processing, comprising: collecting processing data by a set of sensors during said substrate processing; sending said processing data to a fault detection/classification component; performing data manipulation of said processing data by said fault detection/classification component; and executing a comparison between said processing data and a plurality of fault models stored within a fault library, wherein each fault model of said plurality of fault models representing a set of data characterizing a specific fault condition, wherein said each fault model including at least a fault signature, a fault boundary, and a set of principal component analysis (PCA) parameters.