1. A method of generating a compact model for one or more devices, comprising: generating a physics-based model using a technology computer-aided design (TCAD) of the one or more devices in a technology node; calculating nominal capacitance and voltage, and independent variables for the one or more devices based on the physics-based model; incorporating the calculated nominal capacitance and voltage, and the independent variables into the physics-based model to generate a nominal compact model; generating a matrix of variations comprising a set of TCAD models of the one or more devices by varying process variables, wherein the matrix of variations includes: a first entry for the nominal compact model that includes nominal values for the process variables for the nominal compact model; and a plurality of additional entries, wherein each entry of the plurality of additional entries includes at least one change in the nominal values for the process variables; generating a matrix of outputs comprising key device parameters that an integrated circuit designer is interested in monitoring, wherein the matrix of outputs includes: a first entry for the nominal compact model that includes nominal output values for the key device parameters based on the nominal values for the process variables found in the first entry of the matrix of variations; and a plurality of additional entries, wherein each entry of the plurality of additional entries includes output values for the key device parameters based on the at least one change in the nominal values for the process variables found in the plurality of additional entries of the matrix of variations; quantifying relationships between the process variables in the matrix of variations and the key device parameters in the matrix of outputs in terms of change of capacitance or current; calculating a net variation of variables for the one or more devices using the at least one change in the nominal values for the process variables found in the plurality of additional entries of the matrix of variations and the quantified relationships between the process variables and the key device parameters; and generating the compact model based at least on the net variation of variables, wherein at least the step of the generating the compact model is performed using at least one processor.