1. A method for evaluating materials, unit processes, and process sequences for a semiconductor manufacturing process, comprising: performing a first set of tests in a combinatorial manner according to corresponding input variables in order to evaluate material properties on a first substrate; inputting results of the first set of tests and the corresponding input variables into a mathematical model to derive coefficients relating the input variables to the results; defining sets of varied input variables; combining sets of the varied input variables with the coefficients to derive a predicted output for each of the sets; selecting a portion of the sets of the varied input variables; and performing a second set of tests in a combinatorial manner according to the portion of the sets of the varied input variables on a second substrate.