1. An apparatus comprising: an equipment front end module; a four facet sealed transport chamber, each facet having a substrate transport opening configured for sealed communication with substrate holding modules; a load lock connected to a facet of the four facet sealed transport chamber for connecting the equipment front end module to the four facet sealed transport chamber; and a second sealed transport chamber having more than four facets and being communicably connected to another facet of the four facet sealed transport chamber, each facet of the second sealed transport chamber having a substrate transport opening configured for sealed communication with other substrate holding modules.