1. A method of yield analysis, comprising: receiving failure files for a plurality of failing dies, and corresponding test patterns and circuit design information, the circuit design information comprising logic and layout information; performing a layout-aware diagnosis based on the failure files, the test patterns and the circuit design information to derive suspect information for the plurality of failing dies, the suspect information comprising a plurality of suspects; determining potential root causes for the plurality of failing dies based on the suspect information; determining suspect feature weights and total feature weights for each of the potential root causes; generating probability information of observing a particular suspect that is related to a particular root cause based on the suspect feature weights, the total feature weights, the suspect information and the circuit design information; and generating root cause distribution information based on the probability information and the suspect information.