1. A cluster tool for processing a substrate, the cluster tool comprising: a first processing module configured to process the substrate with a first recipe; a second processing module configured to process the substrate with a second recipe; a transfer module configured to transfer the substrate from said first processing module to said second processing module; a key file containing restrictions pertaining to said first processing module and said second module; and a configuration application configured to use at least said key file to generate one or more component-specific configuration files, said one or more component-specific configuration files pertaining to said first recipe and said second recipe.