1. A method of process monitoring, comprising: generating a multivariate analysis reference model of a process environment from data corresponding to monitored parameters of the process environment; identifying at least one of the monitored parameters as being correlated to maturation of the process environment; collecting current process data corresponding to the monitored parameters, including the at least one identified parameter; and scaling the multivariate reference model based on the current process data of the at least one identified parameter to account for maturation of the process environment.