1. High temperature substance sensor, including a substrate ( 4 ), a device ( 6 ) for raising and maintaining the temperature of the sensor, and a layer-like capacitor structure ( 38 ) with structure sizes smaller than 50 &mgr;m, upon which a functional layer ( 18 ) is applied, thereby characterized, that the layer-like capacitor structure ( 38 ) is produced by the following: application of a closed or already pre-structured electrically conductive layer as precursor of the capacitor structure ( 38 ) using a thick layer technique, structuring the electrically conductive layer using a photolithographic structuring process.