1. A semiconductor wafer, comprising: (a) a test structure operatively configured to detect the presence of an anomaly within said test structure, said test structure comprising a plurality of like test devices each having a test response and comprising: (i) a first component; (ii) a second component in a predetermined physical relationship with said first component, wherein said predetermined physical relationship is different from said predetermined physical relationship of each other of said plurality of like test devices; and (iii) sensing circuitry operatively configured to sense said test response of each corresponding respective of said plurality of like test devices.