1. One or more non-transitory computer-readable media storing computer-executable instructions for causing one or more processors to perform a method, the method comprising: receiving information of a layout design, the layout design representing at least a portion of an integrated circuit design; performing a resolution enhancement process on the layout design to generate an altered layout design; checking the altered layout design for errors, wherein one or more errors are detected and comprise one or more sub-resolution assist feature errors; performing a repair process to correct the one or more detected sub-resolution assist feature errors; and saving the corrected layout design to a memory storage location.