1. A real-time monitoring method for abnormal process or tool states, comprising the steps of: collecting historical data for a plurality of processes or tools; analyzing the historical data and obtaining abnormal-state causes for the processes or tools; designating at least one control chart model according to the abnormal-state causes, thereby obtaining model parameters of the control chart model and linking settings therebetween, both stored in a database; creating a real-time monitoring model according to the abnormal-state causes, model parameters, and linking settings; generating a real-time monitoring interface by merging a plurality of the real-time monitoring models; and the real-time monitoring interface displaying the operating states of the processes or tools according to real-time data or the historical data stored in the database.