1. A method to fabricate an integrated circuit, the method comprising: generating mask data based on an integrated circuit design, wherein said generating includes: determining a layout based on the integrated circuit design; determining a set of templates for the layout, wherein each template in the set of templates is associated with an area in the layout; determining a processing schedule for the set of templates based on a spatially coherent ordering of the set of templates; performing a first processing stage on a first template from the set of templates based on the processing schedule; and performing a second processing stage on a second template from the set of templates based on the processing schedule, wherein the second processing stage is performed concurrently with the first processing stage, and wherein the second processing stage is performed on the first template after the first processing stage completes processing the first template; and fabricating the integrated circuit based on the mask data.