<div class="description">
<p>Journal of Research of the National Institute of Standards and Technology
</p>
<br>Subjects: extreme ultraviolet;  metrology;  lithography;  reflectometry;  synchrotron radiation</div>
<div class="fn value">
<dl><dd>Tarrio, C.</dd>
<dd>Grantham, S.</dd>
<dd>Vest, R.E.</dd>
<dd>Squires, M.B.</dd>
<dd>Lucatorto, T.B.</dd></dl></div>
Internet Archive identifier