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<p>A miniature directional sound sensor was fabricated using micro-electromechanical system (MEMS) technology based on the operational principle of  Ormia ochracea fly's hearing organ. The fly uses coupled bars hinged at the  center to achieve the directional sound sensing by monitoring the difference in  vibration amplitude between them. The MEMS sensor design employed in this  thesis was fabricated using the PolyMUMPs process. The sound sensor has two  primary vibrational modes (rocking and bending) which were simulated by finite  element analysis and tested by actuating the sensor using both electrostatics and  sound. The experimentally observed vibrational frequencies were found to be in  good agreement with that of the modeling but the amplitudes of vibration were  found to be relatively small compared to the expected values. The design of  optimized sensors, with larger amplitude of vibration hence high sensitivity, will  be discussed in this presentation.
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<br>Subjects: Physics</div>
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Shivok, Timothy J.</div>
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