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<p>The Sensor Research Laboratory at the Naval Postgraduate School has developed a MEMS direction finding sensor that makes use of capacitance comb fingers in order to detect and localize frequencies near 1.4 kHz. The capacitance comb fingers have proven brittle and are prone to breaking when subjected to viscous, non-uniform environments or large sound pressure levels. Lead Zirconate Titanite, abbreviated to PZT, is a robust and durable piezoelectric ceramic used for sensing in many MEMs devices. This thesis will investigate whether it is possible to characterize and develop a usable PZT thin film for the eventual replacement of the capacitance comb fingers in the DF sensor.
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<br>Subjects: PZT; MEMs; microfabrication; sol gel; acoustic sensing</div>
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Stiker, Christian</div>
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