A typical cracked surface of SiCN coated multilayer E (ABA) silicon (Si 100) sample at 1000 gf load.
S. K. Mishra, Devraj Verma, S. Bysakh, L. C. Pathak
CC BY 4.0
S. K. Mishra et. al. "Hard and Soft Multilayered SiCN Nanocoatings with High Hardness and Toughness", Journal of Nanomaterials <a rel="nofollow" class="external text" href="https://doi.org/10.1155/2013/949416">doi:10.1155/2013/949416</a>