#include <bits/stdc++.h>
using namespace std;
const int L = 20, N = 1e6 + 5;
const long long MOD = 1e9 + 7;
int dp[1 << L], n;
long long pow2[N];
int main() {
  scanf("%d", &n);
  int a;
  for (int i = (int)1; i <= n; i++) {
    scanf("%d", &a);
    dp[a]++;
  }
  pow2[0] = 1;
  for (int i = (int)1; i <= N - 1; i++) pow2[i] = pow2[i - 1] * 2 % MOD;
  for (int i = (int)0; i <= L - 1; i++)
    for (int msk = (int)0; msk <= (1 << L) - 1; msk++)
      if (msk >> i & 1 ^ 1) dp[msk] += dp[msk ^ (1 << i)];
  long long ans = (pow2[dp[0]] - 1 + MOD) % MOD;
  for (int msk = (int)1; msk <= (1 << L) - 1; msk++) {
    if (dp[msk] == 0) continue;
    if (__builtin_popcount(msk) % 2)
      ans = (ans - pow2[dp[msk]] + 1 + MOD) % MOD;
    else
      ans = (ans + pow2[dp[msk]] - 1 + MOD) % MOD;
  }
  cout << ans << endl;
  return 0;
}
