#include <bits/stdc++.h>
using namespace std;
const int N = 20;
const int V = (1 << 20) + 10;
const int P = 1000000007;
int Pow(int x, int y) {
  int ret = 1;
  while (y) {
    if (y & 1) ret = (long long)ret * x % P;
    x = (long long)x * x % P;
    y /= 2;
  }
  return ret;
}
void utf(int *a, int l, int r) {
  if (l + 1 != r) {
    int mid = (l + r) / 2;
    for (int i = 0; i < mid - l; i++) {
      a[l + i] -= a[mid + i];
      if (a[l + i] < 0) a[l + i] += P;
    }
    utf(a, l, mid);
    utf(a, mid, r);
  }
}
void tf(int *a, int l, int r) {
  if (l + 1 != r) {
    int mid = (l + r) / 2;
    tf(a, l, mid);
    tf(a, mid, r);
    for (int i = 0; i < mid - l; i++) {
      if (((l + i) & (mid + i)) != (l + i))
        while (1)
          ;
      a[l + i] += a[mid + i];
      if (a[l + i] >= P) a[i + l] -= P;
    }
  }
}
int cnt[V], q[V];
int n, x, pro[V];
int pt[V];
int main() {
  pt[0] = 1;
  for (int i = 1; i < (1 << N); i++) pt[i] = pt[i - 1] * 2 % P;
  while (~scanf("%d", &n)) {
    memset(cnt, 0, sizeof(cnt));
    for (int i = 0; i < n; i++) {
      scanf("%d", &x);
      cnt[x]++;
    }
    tf(cnt, 0, (1 << N));
    for (int i = 0; i < (1 << N); i++) pro[i] = pt[cnt[i]];
    utf(pro, 0, (1 << N));
    printf("%d\n", pro[0]);
  }
  return 0;
}
