#include <bits/stdc++.h>
using namespace std;
const double eps = 1e-9;
const int maxmask = 1000010;
const int mod = 1000000007;
int cnt[maxmask], pw[maxmask];
int main() {
  int n;
  cin >> n;
  for (int i = 0; i < n; ++i) {
    int ai;
    scanf("%d", &ai);
    cnt[ai]++;
  }
  pw[0] = 1;
  for (int i = 1; i <= n; ++i) {
    pw[i] = (pw[i - 1] * 2) % mod;
  }
  for (int bit = 1; bit < maxmask; bit <<= 1) {
    for (int mask = 0; mask < maxmask; ++mask) {
      if (mask & bit) cnt[mask ^ bit] += cnt[mask];
    }
  }
  int res = pw[n] - 1;
  for (int i = 1; i < maxmask; ++i) {
    int bits = 0;
    for (int bit = 1; bit <= i; bit <<= 1) {
      if (i & bit) ++bits;
    }
    int add = pw[cnt[i]] - 1;
    if (bits & 1)
      res -= add;
    else
      res += add;
    res = res % mod;
  }
  res = (res + mod) % mod;
  cout << res;
  return 0;
}
