#include <bits/stdc++.h>   using namespace std;   const int MOD = 1000000007;   const double eps = 1e-8;   const int nm = 1100005;   int n, k, m, t;   long long res;   int cnt[nm], f[nm][23];   int POW(int x, int z) {     if (z == 0) return 1;     if (z == 1) return x % MOD;     int u = POW(x, z >> 1);     u = ((long long)u * u) % MOD;     if (z % 2) u = ((long long)u * x) % MOD;     return u;   }   int main() {     int i, j, x, y, z, w;     scanf( %d , &n);     for (i = 1; i <= n; i++) {       scanf( %d , &x);       cnt[x]++;     }     for (i = (1 << 20) - 1; i >= 0; i--) {       if (i & 1)         f[i][0] = cnt[i];       else         f[i][0] = cnt[i] + cnt[i + 1];       for (j = 1; j < 20; j++) {         if (i & (1 << j))           f[i][j] = f[i][j - 1];         else           f[i][j] = f[i][j - 1] + f[i + (1 << j)][j - 1];       }     }     for (i = (1 << 20) - 1; i >= 0; i--) {       x = __builtin_popcount(i);       if (x & 1)         res -= POW(2, f[i][19]);       else         res += POW(2, f[i][19]);       res = (res + MOD) % MOD;     }     cout << res;     return 0;   }   