What is the fine-grained topic of the following text: In this study the implantation temperature was varied and the resulting structures investigated (before and after annealing) using optical absorption, Fourier Transform Infrared Spectroscopy (FTIR), Rutherford backscattering spectroscopy (RBS) and cross sectional transmission electron microscopy (XTEM). Only return the topic.
Investigation of structures resulting from varying implantation temperatures using various spectroscopy methods and microscopy.