What is the fine-grained topic of the following text: To verify device performance, a host of equipment characterizes the MEMS/electronic devices including low and high frequency vector network analyzers; semiconductor parameter analyzers; scanning and tunneling electron microscopes; high resolution and high speed microscopy; laser Doppler vibrometry from mHz to 1.2 GHz; semi and full autoprobers;systems for characterizing on-chip energetic reactions and materials; and custom electronic test equipment for actuators and sensors. Only return the topic.
Characterizing MEMS/electronic devices performance and testing equipment