What is the fine-grained topic of the following text: Driven by the present scientific community effort to integrate the RF MEMS vibrating components and the electronic circuits for getting one chip transceiver in the near future, within this thesis we have combined the DG SOI MOSFET circuits with RF MEMS resonators for developing at the virtual level on-chip frequency generating functions. Only return the topic.
Integration of RF MEMS vibrating components and DG SOI MOSFET circuits for on-chip frequency generation.