A modeling approach based on domain partitioning and use of the electromagnetic circuit formulation for full wave electromagnetic field is applied for high frequency integrated passive components, including MEMS switches. The procedure is completed by model order reduction and generation of a small compact model that describes with high accuracy the input-output behavior of the device. The main benefit of the approach is that it allows the saving of computational resources, that will be further used to refine the most complicated part of the domain, and thus obtain a more accurate model for the full device. The procedure is validated for real benchmarks for which measurements are available, as well as for a RF MEMS switch test, described in the literature.