We report on the theoretical and experimental investigations about the Ta-hydride formation depending on the temperature for recycling of Ta scraps. The structural investigations based on scanning electron microscope and X-ray diffraction (XRD) showed that the amount of hydrogen incorporated into the Ta matrix varied with hydridation temperature. The XRD measurement showed that the H/Ta mole ratio in Ta-hydride increased with increasing the hydridation temperature up to 700 degrees C and then decreased with increasing the temperature furthermore. Depending on the hydridation temperature, various phase of Ta-hydride, such as TaH0.93 and Ta2H were formed and this hydride process was verified by thermodynamic analysis. (C) 2016 Elsevier Ltd. All rights reserved.