Measuring 3D micro-features is a challenging task that is usually performed using high-cost systems generally based on technologies with narrow working ranges and very accurate control of the sensor positions. Well-known image analysis methods, such as Photogrammetry, would likely lower the costs of 3D inspection of micro-features and add texture information to the 3D models; however, the behaviour of Photogrammetry is strongly affected by the scaling method because it retrieves a model that must be scaled after its computation. In this paper, an experimental study of the validity of a hybrid 3D image processing method for measuring micro-features is presented. This method exploits the Depth-from Focus method to retrieve the correct scale for a photogrammetric model. The measurement of properly designed and manufactured specimens was performed by following and adapting the German guideline VDI/VDE 2634, Part 3 to validate the method using calibrated specimens. The proposed system has been demonstrated to be very promising can achieve an error,of less than 10 mu m. (C) 2016 Elsevier Inc. All rights reserved.