Since the small inter-electrode gap (IEG), high current density applied, high heat generated and redundant reaction product, the convection of electrolyte in LEG becomes an important factor for the stability of electrochemical micro-machining (EMM) in manufacturing engineering. In this paper, a novel structure of cathode used in EMM is presented. The proper experimental parameters are established from the simulated results. The hollow cathode, which is much more conductive to the flow, has been designed and fabricated on the basis of non-silicon surface micro-machining technology. The experimental test showed the improvement of current stability, and is consistent with the numerical simulations.