Shape memory alloys (SMAs) are commonly used in micro-electro-mechanical systems (MEMS). Having the unique shape memory, super-elastic affects and now damping capacity SMAs have become an important smart material for a broad range of engineering applications in last year's. Copper based SMAs are promising alloys, based on the obtaining price and good characteristic properties. Shape memory alloys as thin films are used for fast actuation in applications due to their high surface to volume ratio comparing to bulk SMAs. In this paper two shape memory alloys based on copper, proposed as targets in different deposition processes to obtain MEMS and with different chemical composition, are analyzed through scanning electrons microscope (SEM), XRD and EDAX considerations after water quenching and recovery heat treatments. The martensite variants are dimensioned and 3D aspects are also analyzed for both metallic materials. The metallic phases obtained after heat treatment are determined and compare in both thermal influenced cases.