nth number with n distinct prime factors A073329 is a sequence where the \$n\$th term is the \$n\$th number with exactly \$n\$ distinct prime factors. For example, \$a(3) = 60\$ as the first \$3\$ integers with \$3\$ distinct prime factors are \$30 = 2 \times 3 \times 5\$, \$42 = 2\times3\times7\$ and \$60 = 2^2 \times 3 \times 5\$.
You are to take a positive integer \$n\$ and output the first \$n\$ terms of the sequence. You may assume the input will never exceed the bounds of your language's integers. This is code-golf so the shortest code in bytes wins.
The first 10 terms of the sequence are
2, 10, 60, 420, 4290, 53130, 903210, 17687670, 406816410, 11125544430
Java, 170 characters in one line

int a(int n) {
    int a = 2, t = a, m = 1, i = 1;
    Set s = new HashSet();
    while (i++ &gt; 0) {
        if (t % i == 0) {
            s.add(i);
            t /= i;
            if (t == 1) {
                if (s.size() == n) {
                    if (n == m) {
                        break;
                    }
                    m++;
                }
                t = ++a;
                s.clear();
            }
            i = 1;
        }
    }
    return a;
}


Update, +77 characters IOL

int[] f(int n) {
    int[] f = new int[n];
    for (int i = 0; i &lt; n; i++) {
        f[i] = a(i+1);
    }
    return f;
}