Request for 1024-bit primes $p$ , subgroup $q$ and subgroup generator $g$ I need to find a prime $p$ of $1024$ bits with a $160$ bit sub group size $q$, such that $q|p-1$ , and $g$ is the generator of the sub group size $q$.

I'm looking for the numeric values of $p$ , $q$ and $g$.
Suitable values are 
$q=2^{159}+9593, p=2^{1023-159}*q+1, g=2^{2^{1023-159}}\mod p$

I have checked the values given in section 2.1 of RFC 5114 and they seem fine too.

Whether "it's safe to use them" depends entirely on how they're being used, what you're trying to prevent, against whom and for how long and what the consequences of getting it wrong are.