Smoothing OSB subfloor after hardwood and glue removal
If there are just a few patches here and there where it ripped out parts of the subfloor, something like FeatherFinish may be acceptable.

Personally, I have seen and have used 1/8" Lauan underlayment on rough surfaces or where the subfloor has been damaged. It is easy to install and creates an extremely smooth surface for adhesive tiles, laminated flooring, or engineered / hardwood floors.