65nm silicon-germanium
Does a commercially-available 65nm SiGe process exist? Sorta...

ST Microelectronics seems to have a 55nm BiCMOS process with a 320GHz ft device. 

GlobalFoundries has a 90nm SiGe process with a 310GHz ft device.

I wasn't able to quickly find info on the TSMC process, but I would expect values in the same ballpark.

A bit of history, IBM spun out their foundry services and sold them to GlobalFoundries. The "selling point" of SiGe BJTs is that you can tack on a high performance NPN (and sometimes PNP) on to a high density CMOS process. The size refers to the CMOS process, and the actual NPN devices will be much larger.