chmod failed "Unable to open FILE: invalid argument"
First, try updating BusyBox.

However, I doubt it will help you much, because you are trying to modify very internal Linux "files" that may not even be files or block devices, or be in another filesystem (like ext4 while your phone may use f2fs etc.), or be corrupted. Maybe it's problem with file owner, I don't really know.

What I know, however, is that it's not good idea to run chmod -R 777 on Linux internal files