Subsidies Incidence on Producers and Consumers
According to standard textbooks on public finance (e.g., Tresch, Public Finance, 3rd ed., p. 272) the tax incidence includes the deadweight loss. This is because we are interested in the burden of the tax on consumers and producers and the deadweight loss can be a large part of this. (However, see https://en.wikipedia.org/wiki/Tax_incidence which does not include the deadweight loss.)

There are some difficulties, however. First, the deadweight loss is only a meaningful concept in partial equilibrium settings. The incidence as you described it cannot be used in general equilibrium settings as supply and demand curves shift with the introduction of the tax. Thus, the more common approach in general equilibrium is to determine the welfare loss of different individuals.