Which humanoid robots have open-source software (or hardware)?
There are quite a few ROS (Robot Operating System) based humanoid robots. Not all of them will be open-source down to the firmware level but most will at least be to the control level. I'm not aware of any that have open-source hardware as well.

Some examples include:


Talos
Reem-C
Nao
OP3
Thormang3