▁functionality . ▁The ▁device ▁must ▁be ▁integra ble ▁to ▁other ▁circuit ries ▁to ▁form ▁a ▁system . ▁This ▁would ▁be ▁the ▁inter f acing ▁circuit ry ▁and ▁pack aging ▁for ▁the ▁device ▁to ▁become ▁useful . ▁For ▁the ▁analysis ▁of ▁every ▁ME MS ▁device , ▁the ▁L ump ed ▁assumption ▁is ▁made : ▁that ▁if ▁the ▁size ▁of ▁the ▁device ▁is ▁far ▁less ▁than ▁the ▁characteristic ▁length ▁scale ▁of ▁the ▁phenomen on ▁( wave ▁or ▁diffusion ), ▁then ▁there ▁would ▁be ▁no ▁spatial ▁variations ▁across ▁the ▁entire ▁device . ▁Mod elling ▁becomes ▁easy ▁under ▁this ▁assumption . ▁ ▁Oper ations ▁in ▁ME MS ▁The ▁three ▁major ▁operations ▁in ▁ME MS ▁are : ▁ ▁S ens ing : ▁meas uring ▁a ▁mechanical ▁input ▁by ▁converting ▁it ▁to ▁an ▁elect rical ▁signal , ▁e . g . ▁a ▁ME MS ▁acceler ometer ▁or ▁a ▁pressure ▁sensor ▁( could ▁also ▁measure ▁elect rical ▁signals ▁as ▁in ▁the ▁case ▁of ▁current ▁sens ors ) ▁ ▁Act u ation : ▁using ▁an ▁elect rical ▁signal ▁to ▁cause ▁the ▁disp lacement ▁( or ▁rotation ) ▁of ▁a ▁mechanical ▁structure , ▁e . g . ▁a ▁synth etic ▁jet ▁actu ator . ▁ ▁Power ▁generation : ▁generates ▁power ▁from ▁a ▁mechanical ▁input , ▁e . g . ▁ME MS ▁energy ▁har vest ers ▁ ▁These ▁three ▁operations ▁require ▁some ▁form ▁of ▁trans du ction ▁schemes , ▁the ▁most ▁popular ▁ones ▁being : ▁pie zo elect ric , ▁electro static , ▁pie z ores ist ive , ▁elect rod ynamic ,