▁MO C VD ▁has ▁become ▁well - est ab lished ▁production ▁technology , ▁there ▁are ▁equally ▁growing ▁concerns ▁associated ▁with ▁its ▁bearing ▁on ▁personnel ▁and ▁community ▁safety , ▁environmental ▁impact ▁and ▁maximum ▁quantities ▁of ▁ha z ard ous ▁materials ▁( such ▁as ▁g ases ▁and ▁metal organ ics ) ▁perm iss ible ▁in ▁the ▁device ▁fabric ation ▁operations . ▁The ▁safety ▁as ▁well ▁as ▁responsible ▁environmental ▁care ▁have ▁become ▁major ▁factors ▁of ▁param ount ▁importance ▁in ▁the ▁MO C VD - based ▁cry stal ▁growth ▁of ▁comp ound ▁sem icon duct ors . ▁As ▁the ▁application ▁of ▁this ▁technique ▁in ▁industry ▁has ▁grown , ▁a ▁number ▁of ▁companies ▁have ▁also ▁grown ▁and ▁evol ved ▁over ▁the ▁years ▁to ▁provide ▁the ▁anc ill ary ▁equipment ▁required ▁to ▁reduce ▁risk . ▁This ▁equipment ▁includes ▁but ▁is ▁not ▁limited ▁to ▁computer ▁autom ated ▁gas ▁and ▁chemical ▁delivery ▁systems , ▁to xic ▁and ▁car rier ▁gas ▁sn iff ing ▁sens ors ▁which ▁can ▁detect ▁single ▁digit ▁pp b ▁amounts ▁of ▁gas , ▁and ▁of ▁course ▁ab at ement ▁equipment ▁to ▁fully ▁capture ▁to xic ▁materials ▁which ▁can ▁be ▁present ▁in ▁the ▁growth ▁of ▁ar sen ic ▁containing ▁allo ys ▁such ▁as ▁Ga As ▁and ▁In G a As P . ▁ ▁See ▁also ▁At omic ▁layer ▁de position ▁H ydro gen ▁pur ifier ▁List ▁of ▁sem icon duct or ▁materials ▁Metal organ ics ▁M ole cular ▁beam ▁ep it axy ▁Th in - film ▁de position ▁ ▁References ▁ ▁Category : Ch em ical ▁processes ▁Category :