ap our ▁and ▁trans ports ▁it ▁to ▁the ▁re actor . ▁The ▁amount ▁of ▁metal organ ic ▁v ap our ▁transport ed ▁depends ▁on ▁the ▁rate ▁of ▁car rier ▁gas ▁flow ▁and ▁the ▁b ub b ler ▁temperature , ▁and ▁is ▁usually ▁controlled ▁automatically ▁and ▁most ▁accur ately ▁by ▁using ▁an ▁ul tr ason ic ▁concentration ▁meas uring ▁feedback ▁gas ▁control ▁system . ▁Allow ance ▁must ▁be ▁made ▁for ▁s atur ated ▁v ap ors . ▁ ▁Press ure ▁maintenance ▁system ▁ ▁Gas ▁exhaust ▁and ▁clean ing ▁system . ▁To xic ▁waste ▁products ▁must ▁be ▁converted ▁to ▁liquid ▁or ▁solid ▁was tes ▁for ▁rec y cling ▁( pre fer ably ) ▁or ▁dispos al . ▁Ide ally ▁processes ▁will ▁be ▁designed ▁to ▁minim ize ▁the ▁production ▁of ▁waste ▁products . ▁ ▁Organ omet all ic ▁prec urs ors ▁▁ ▁Al umin ium ▁Tr im eth yl al umin ium ▁( T MA ▁or ▁T MA l ), ▁Li qu id ▁ ▁Tri eth yl al umin ium ▁( TE A ▁or ▁TE Al ), ▁Li qu id ▁ ▁Gal li um ▁ ▁Tr im eth yl gal li um ▁( TM G ▁or ▁T M G a ), ▁Li qu id ▁Tri eth yl gal li um ▁( TE G ▁or ▁T EG a ), ▁Li qu id ▁ ▁Ind ium ▁ ▁Tr im eth yl ind ium ▁( T MI ▁or ▁T M In ), ▁Sol id ▁ ▁Tri eth yl ind ium ▁( TE I ▁or ▁TE In ), ▁Li qu