▁systems ▁( ME MS ) ▁to ▁convert ▁an ▁electric ▁current ▁into ▁a ▁mechanical ▁output ▁by ▁employ ing ▁the ▁well - known ▁Lor ent z ▁Force ▁Equ ation ▁or ▁the ▁theory ▁of ▁Mag net ism . ▁ ▁Over view ▁of ▁ME MS ▁Micro - E lect ro - Me chan ical ▁System ▁( ME MS ) ▁technology ▁is ▁a ▁process ▁technology ▁in ▁which ▁mechanical ▁and ▁electro - me chan ical ▁devices ▁or ▁structures ▁are ▁constructed ▁using ▁special ▁micro - fab ric ation ▁techniques . ▁These ▁techniques ▁include : ▁bulk ▁micro - m ach ining , ▁surface ▁micro - m ach ining , ▁L IG A , ▁wa fer ▁bond ing , ▁etc . ▁ ▁A ▁device ▁is ▁considered ▁to ▁be ▁a ▁ME MS ▁device ▁if ▁it ▁satisfies ▁the ▁following : ▁ ▁If ▁its ▁feature ▁size ▁is ▁between ▁ 0 . 1   µ m ▁and ▁hundreds ▁of ▁mic rom eters . ▁( below ▁this ▁range , ▁it ▁becomes ▁a ▁n ano ▁device ▁and ▁above ▁the ▁range , ▁it ▁is ▁considered ▁a ▁mes os ystem ) ▁ ▁If ▁it ▁has ▁some ▁elect rical ▁functionality ▁in ▁its ▁operation . ▁This ▁could ▁include ▁the ▁generation ▁of ▁voltage ▁by ▁elect romagnet ic ▁induction , ▁by ▁changing ▁the ▁gap ▁between ▁ 2 ▁electro des ▁or ▁by ▁a ▁pie zo elect ric ▁material . ▁ ▁If ▁the ▁device ▁has ▁some ▁mechanical ▁functionality ▁such ▁as ▁the ▁de formation ▁of ▁a ▁beam ▁or ▁dia ph rag m ▁due ▁to ▁stress ▁or ▁stra in . ▁ ▁If ▁it ▁has ▁a ▁system - like