SEMITOOL INC
EXHIBIT 10.4 AIRCRAFT LEASE
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<DESCRIPTION>EXHIBIT 10.4 AIRCRAFT LEASE
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<P ALIGN=RIGHT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>EXHIBIT 10.4 </FONT></P>

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<H1 ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2>AIRCRAFT LEASE </FONT></H1>

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<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;This
Lease Agreement (&#147;Lease Agreement&#148;) is executed this 31st day of March, 2004 by
and between EAGLE II LLC, a Montana limited liability company (&#147;Lessor&#148;) and
SEMITOOL, INC., a Montana corporation, with its principal place of business at 655 West
Reserve Drive, Kalispell, Montana (&#147;Lessee&#148;). </FONT></P>

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<H1 ALIGN=CENTER><FONT FACE="Times New Roman, Times, Serif" SIZE=2>RECITALS </FONT></H1>

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               <TD WIDTH=5%><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;</FONT></TD>
               <TD WIDTH=5%><FONT FACE="Times New Roman, Times, Serif" SIZE=2>A. </FONT></TD>
               <TD WIDTH=90%><FONT FACE="Times New Roman, Times, Serif" SIZE=2>
               Lessor is the owner of a Falcon 50 (the &#147;Aircraft&#148;) with a serial
               number of 24 and a registration number of N280RT. </FONT></TD>
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               <BR>

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               <TD WIDTH=5%><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;</FONT></TD>
               <TD WIDTH=5%><FONT FACE="Times New Roman, Times, Serif" SIZE=2>B. </FONT></TD>
               <TD WIDTH=90%><FONT FACE="Times New Roman, Times, Serif" SIZE=2>
               The parties previously amended the rental amounts and usage restrictions on the
               Aircraft and desire to restate the terms of the Lease as of the date hereof. </FONT></TD>
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               <BR>

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<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;NOW,
THEREFORE, in consideration of the mutual promises and covenants exchanged herein and for
other good and valuable consideration, the parties hereto agree as follows: </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;1.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Term</U>. The term of this Lease shall continue to be month to month
          (&#147;Term&#148;). </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;2.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Rental</U>. Effective April 1, 2004, Lessee hereby covenants and agrees to
          pay Lessor, during the Term, a monthly rental of SEVENTY THOUSAND AND NO/100
          DOLLARS ($70,000.00). All rental payments shall be made to Lessor, at a place
          designated by Lessor, on or before the first day of each monthly period of the
          Lease. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;3.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Taxes</U>. Lessee shall pay all taxes, assessments, and charges imposed by
          any national, state, municipal government or other public or airport authority
          on the Aircraft or on its use during the Term and until re-delivery of the
          Aircraft to the Lessor; and to save the Lessor free and harmless therefrom, and
          reimburse the Lessor on a pro rata basis for any such taxes or charges payable
          subsequent to the Term of this Lease. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;4.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Maintenance and Repair</U>. Lessee shall maintain and keep the Aircraft and
          all its components in good order and repair, in accordance with the requirements
          of the Federal Aviation Agency (&#147;FAA&#148;), or any other governmental
          authority having jurisdiction, and within reasonable time replace in or on the
          Aircraft any and all parts, equipment, appliances, instruments, or accessories
          which may be worn out, lost, destroyed, confiscated, or otherwise rendered
          unsatisfactory or unavailable for use in or on the Aircraft. Any replacements on
          the Aircraft shall be (a) in good operating condition and have a value, utility,
          and quality, at least equal to that which the property replaced originally had,
          and (b) at the time affixed to the Aircraft and made subject to this Lease,
          owned by the Lessee free and clear of all liens and encumbrances, it being
          understood that the Lessee shall have the same protection as the Lessor under
          the standard warranty clause of the manufacturer of the Aircraft the terms and
          provisions of said warranty being incorporated herein; perform all major
          overhaul on the Aircraft, whenever deemed necessary and as may be required by
          the FAA or any other governmental authority during the Term of this Lease, and
          all engine overhaul and inspection and maintenance service. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;5.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Insurance</U>. During the Term, Lessee agrees to keep the Aircraft insured,
          at Lessee&#146;s expense, with companies acceptable to the Lessor and which are
          qualified to do business in the State of Montana, for such amounts and against
          such hazards as the Lessor may require, including, but not limited to, hull
          damage and liability for personal injuries, death or Aircraft damages, arising
          from or in any manner occasioned by the acts or negligence of the Lessee or
          others in custody, operation or use of the Aircraft, with losses under the hull
          damage policies payable to the Lessor, in terms satisfactory to the Lessor, and
          deliver the policies, or evidence of insurance satisfactory to the Lessor, to
          Lessor with premium receipts. The Lessee hereby appoints Lessor as the
          Lessee&#146;s attorney-in-fact to make proof of loss, and claim for, receive
          payment of, and execute or endorse all documents, checks or drafts for hull
          damage or return premium under the insurance policies. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;6.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Conforming Use</U>. Lessee shall only use the Aircraft for the purposes and
          in the manner set forth in any application for insurance executed by Lessee in
          connection with the leased property and shall abide by and conform to, and cause
          others to abide by and to, all laws, ordinances, orders, rules and regulations,
          national, state, municipal, or otherwise, now existing or hereafter enacted,
          controlling or in any way affecting the operation, use, or occupancy of the
          Aircraft or the use of any airport premises by Lessee. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;7.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>No Lien or Assignment</U>. Lessee shall keep safely, and use carefully, the
          Aircraft, and shall not sell, or assign or dispose of the Aircraft, or any
          interest therein, or any part thereof, or equipment necessary thereto, or suffer
          or permit any charge, lien, or encumbrance of any nature upon the Aircraft, or
          any part thereof, or lend or rent the same. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;8.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Sublease</U>. Upon prior written approval of the Lessor, the Lessee shall
          have the right to sublease the Aircraft, provided, however, the Aircraft is
          maintained in conformance with all applicable rules and regulations pertaining
          to the use to which the Aircraft shall be subjected. In the event Lessee
          subleases the Aircraft, Lessee shall continue to be responsible for the
          performance of its covenants and obligations under this Agreement. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;9.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Indemnification</U>. Lessee shall be responsible for and liable to the Lessor
          for, and indemnify the Lessor against, all damage to the Aircraft which occurs
          in any manner from any cause or causes during the Term or until re-delivery of
          the Aircraft. Lessee shall indemnify and save Lessor harmless from and against
          all claims, cost, expenses, damages, and liabilities, including personal injury,
          death, or Aircraft damage claims arising out of, or in any manner occasioned by
          the operation or use of the Aircraft, during the Term or until re-delivery of
          the Aircraft to the Lessor, regardless of whether a claim occurs during or after
          the Term. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;10.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Licensed Pilotage</U>. Lessee shall not permit the Aircraft to be operated by
          anyone other than a currently certificated pilot having at least the minimum
          total pilot hours required by the applicable insurance required by this Lease. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;11.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Lessor&#146;s Right of Inspection</U>. Lessee shall permit the Lessor, or its
          duly authorized agent or representative, to inspect the Aircraft at any
          reasonable time, either on the land or aloft, and to furnish any information in
          respect to the Aircraft and its use that the Lessor may reasonably request. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;12.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Delivery Upon Termination</U>. Lessee shall return, upon demand, at the
          expiration of the Term, the Aircraft to the Lessor, at such place as may be
          designated as when received, excepting only for reasonable wear and tear, and
          damage by any cause covered by collectible insurance; provided, however, that
          the designated place shall not be more than one hundred fifty (150) miles from
          the home airport at the outset of this Lease. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;13.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Further Assurances</U>. Lessee and Lessor each agree to execute and deliver
          to the other party any additional or supplemental instruments or documents as
          may be requested by either Lessor or Lessee in connection with this Lease. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;14.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Assignment of Warranty</U>. Lessor hereby assigns to the Lessee, for and
          during the Term, any warranty of the manufacturer, express or implied, issued on
          or relating to the Aircraft, and hereby authorizes the Lessee to obtain the
          customary service furnished by the manufacturer in connection with any warranty,
          at Lessee&#146;s expense. The Lessee acknowledges and agrees that the Aircraft
          is a type of aircraft of a size, design, capacity, and a manufacturer selected
          by the Lessee and suitable for its purposes. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;15.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>No Implied Representations or Warranties</U>. The parties acknowledge that
          the Lessor is not a manufacturer or engaged in the sale or distribution of
          aircraft. It is further acknowledged that the Lessor makes no representations,
          promises, statements, or warranties, expressed or implied, with respect to the
          merchantability, suitability, or fitness for purpose of the Aircraft or
          otherwise. Lessor shall not be liable to the Lessee for any loss, claim, demand,
          liability, cost, damage, or expense of any kind, caused or alleged to be caused,
          directly or indirectly, by the Aircraft, or by any inadequacy thereof for any
          purpose, or by any defect therein; or in the use or maintenance thereof, or any
          repairs, servicing, or adjustments thereto, or any delay in providing, or
          failure to provide the same, or any interruption or loss of service or use
          thereof, or any loss of business, or any damage whatsoever and howsoever caused. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;16.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Risk of Loss</U>. All risks of loss or damage to the Aircraft, from whatever
          cause, hereby are assumed by the Lessee during the Term. If the Aircraft is
          damaged, and is capable of being repaired, the Lessee shall have the option of
          either repairing the same or replacing the same, at the Lessee&#146;s cost and
          expense. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;17.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Irrevocability</U>. This Lease is irrevocable for its full term and until the
          aggregate rentals have been paid by the Lessee. Rent shall not abate during the
          Term because the Lessee&#146;s right to possession of the Aircraft has
          terminated, or for any other reason whatsoever. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;18.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Lessor&#146;s Assumption of Lessee&#146;s Obligations</U>. In the event the
          Lessee fails to use, preserve, and/or maintain the Aircraft, discharge all
          taxes, liens, or charges, pay all costs and expenses or procure and maintain
          insurance, in the manner set forth in this Agreement, the Lessor, at its option,
          may do so, and all such advances by the Lessor shall be added to the unpaid
          balance of the rentals due under this Lease and shall be repayable by the Lessee
          to Lessor on demand, together with interest thereon at the rate of twelve
          percent (12%) per annum, until the unpaid balance shall have been repaid in
          full. The Lessor may enter upon any premises where the Aircraft is located, for
          the purpose of inspection, and may remove the Aircraft forthwith, without notice
          to Lessee, if, in the opinion of the Lessor, the Aircraft is being improperly
          used or maintained. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;19.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Default</U>. The occurrence of any of the following shall constitute an event
          of default: (1) Lessee shall fail to pay the rent provided for herein; (2)
          Lessee shall fail to observe or perform any of the obligations of Lessee
          provided for herein; (3) if a petition in bankruptcy or an application for any
          relief under any provision of the Bankruptcy Act is filed by or against Lessee;
          (4) Lessee shall make an assignment for the benefit of creditors; (5) a receiver
          is appointed for the assets or affairs of Lessee; (6) Lessee shall commit any
          act of bankruptcy; (7) Lessee&#146;s interest hereunder shall be levied upon
          under execution or seized by virtue of any writ of any court of law or equity;
          (8) any assignment of this Lease, either in whole or in part, is effected by
          operation of law; or (9) the Aircraft, in the opinion of Lessor, is being
          improperly used or maintained. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;20.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Lessor&#146;s Rights</U>. If Lessee shall be in default hereunder, Lessor
          shall have the right to make any payment or perform any act required by Lessee
          under any provision of this Lease, and, in exercising such right, to incur
          necessary and incidental costs and expenses, including reasonable counsel fees.
          All payments made and all costs and expenses incurred by Lessor in connection
          with any exercise of such right, together with interest thereon at twelve
          percent (12%) per annum from the respective dates of the making of such payments
          or the incurring of such costs and expenses, shall be reimbursed by Lessee
          immediately upon demand. Notwithstanding the foregoing, nothing herein shall
          imply any obligation on the part of Lessor to make any payment or perform any
          act required by Lessee. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;21.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Lessor&#146;s Remedies</U>. In the event of default by Lessee hereunder which
          shall remain uncured after ten (10) days notice of the default, or five (5) days
          in the case of nonpayment of rent or any other sum due hereunder, with or
          without notice of default from Lessor, Lessor may at once thereafter or at any
          time subsequently during the existence of such breach or default: (1) enter into
          and upon the premises or any part thereof and repossess the same, expelling and
          removing therefrom all persons and property (which property may be removed and
          stored at the cost of, and for the account of Lessee), and (2) either (a)
          terminate this Lease, holding Lessee for damages for its breach or (b) without
          terminating this Lease, re-let the premises or any part thereof upon such terms
          and conditions as shall appear advisable to Lessor. If Lessor shall proceed in
          accordance with the last-mentioned alternative (b), and the amounts received
          from re-letting of the premises during any month or part thereof shall be less
          than the rent due and owing from Lessee during such month or part thereof under
          the terms of this Lease, Lessee shall pay such deficiency to Lessor immediately
          upon calculation thereof. </FONT></P>

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<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Notwithstanding
the foregoing, any default (except failure to pay rent or any other amount due hereunder)
the curing of which shall actually require more than ten (10) days because of any cause
beyond Lessee&#146;s control, shall be deemed cured by Lessee if Lessee shall have
commenced to cure said default within the ten (10) day period and shall thereafter have
successfully prosecuted the curation of said default with all due diligence. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;22.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Miscellaneous Default Clauses</U>. In the event of breach of this Lease, the
          party at fault shall and will pay to the other party all costs, reasonable
          attorneys&#146; fees and other expenses which may be incurred by the said other
          party in enforcing his or its rights hereunder. The remedies hereinabove
          mentioned, or the election of any thereof by either party shall in no case be
          deemed or considered exclusive of any other remedy or action hereunder or which
          may otherwise be appropriate, each party having the right to pursue any and all
          other rights and remedies which it may have at law or in equity. The failure of
          either party to terminate this Lease at any time during the breach of any of the
          terms hereof shall be deemed only an indulgence by said party for that
          particular breach and shall not be construed to be a waiver of the rights of
          said party as to any further or subsequent breach. Lessor shall not be deemed to
          have terminated this Lease by reason of taking possession of the premises unless
          written notice of such termination has been served on Lessee. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;23.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Time of Essence</U>. Time is of the essence of this Lease. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;24.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>No Passage of Title</U>. This Agreement is, and is intended to be a lease,
          and the Lessee does not acquire by this lease any right, title, or amount
          whatsoever, legal or equitable, in the Aircraft or to the proceeds of the sale
          of the Aircraft, except its interest as the Lessee under this Lease. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;25.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Quiet Enjoyment</U>. The Lessor warrants that, if Lessee performs its
          obligations under this Lease, the Lessee shall peaceably and quietly hold,
          possess and use the Aircraft during the Term, free of any interference or
          hindrance. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;26.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Relationship of Parties</U>. The relationship between the Lessor and Lessee
          is only that of Lessor and Lessee. The Lessee shall never at any time during the
          Term for any purpose whatsoever be or become the agent of the Lessor, and the
          Lessor shall not be responsible for the acts or omissions of the Lessee or its
          agents. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;27.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Remedies</U>. The Lessor&#146;s rights and remedies with respect to any of
          the terms and conditions of this Lease shall be cumulative and not exclusive,
          and shall be in addition to all other rights and remedies in its favor. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;28.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>No Waiver</U>. The Lessor&#146;s failure to strictly enforce any provision of
          this Lease shall not be construed as a waiver thereof or as excusing the Lessee
          from future performance. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;29.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Partial Invalidity</U>. In the event any provision of this Lease or part
          thereof shall be determined by any court of competent jurisdiction to be
          invalid, void, or otherwise unenforceable, the remaining provisions hereunder,
          or parts thereof, shall remain in full force and effect and shall in no way be
          affected, impaired or invalidated thereby, it being understood that such
          remaining provisions shall be construed in a manner most clearly approximating
          the intention of the parties with respect to such invalid or unenforceable
          provision or part thereof. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;30.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Truth in Leasing</U>. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;a.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          The parties hereby certify as follows: During the twelve (12) months (or portion
          thereof during which the Aircraft has been subject to United States
          registration) preceding the execution of this Lease, the Aircraft has been
          maintained and inspected under Part 91 of the Federal Aviation Regulations. The
          Aircraft is in compliance with applicable maintenance and inspection
          requirements under the Federal Aviation Regulations for the operation of the
          Aircraft to be conducted under this Lease. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;b.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          The name and address of the person responsible for operational control of the
          Aircraft under this Lease are: </FONT></P>

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<P ALIGN=LEFT><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Name: &nbsp;&nbsp;&nbsp;&nbsp;&nbsp;                    Semitool, Inc.,<br>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Attention:  &nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Larry Viano<BR>
&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;Address: &nbsp;&nbsp;&nbsp;&nbsp;&nbsp;655 West
Reserve Drive, Kalispell, MT 59901 </FONT></P>

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<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;By
its signature below, Lessee certifies that it understands its responsibilities for
compliance with the applicable Federal Aviation Regulations. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;c.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          An explanation of factors bearing on operational control and pertinent Federal
          Aviation Regulations can be obtained from the nearest FAA Flight Standards
          District Office, General Aviation District Office, or Air Carrier District
          Office. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;31.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Subordination</U>. Lessee hereby acknowledges and agrees that this Lease and
          all right, title and interest of Lessee in, to and under this Lease are now and
          shall at all times continue to be unconditionally subject and subordinate in
          each and every respect to the lien of G.E. Capital Corporation (the
          &#147;Mortgagee&#148;) in the Aircraft, as said lien may be amended, modified or
          renewed from time to time. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;32.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Entire Agreement</U>. This Lease constitutes the entire agreement between the
          parties hereto, and any change or modification to this Lease must be in writing
          and signed by the parties hereto. </FONT></P>

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     <P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;33.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;
          <U>Headings</U>. The headings as to the contents of particular articles and
          sections are inserted for convenience and are in no way to be construed as a
          part of this Lease or as a limitation on the scope of the particular articles or
          sections to which they refer. </FONT></P>

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<P><FONT FACE="Times New Roman, Times, Serif" SIZE=2>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;IN
WITNESS WHEREOF, the Lessee and Lessor have duly executed this Lease on March 31, 2004 at
Kalispell, Flathead County, Montana. </FONT></P>


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<TR VALIGN="TOP">
     <TD WIDTH="30%"><FONT FACE="Times New Roman, Times, Serif" SIZE="2">
</FONT></TD>
     <TD WIDTH="70%"><FONT FACE="Times New Roman, Times, Serif" SIZE="2">LESSEE:  SEMITOOL, INC.
</FONT></TD></TR>
<TR VALIGN="TOP">
     <TD><FONT FACE="Times New Roman, Times, Serif" SIZE="2"></FONT></TD>
     <TD><FONT FACE="Times New Roman, Times, Serif" SIZE="2">By: <U>/s/Larry A.Viano</U>
</FONT></TD></TR>
<TR VALIGN="TOP">
     <TD><FONT FACE="Times New Roman, Times, Serif" SIZE="2"></FONT></TD>
     <TD><FONT FACE="Times New Roman, Times, Serif" SIZE="2">Name: <U>Larry A. Viano</U>
</FONT></TD></TR>
<TR VALIGN="TOP">
     <TD><FONT FACE="Times New Roman, Times, Serif" SIZE="2"></FONT></TD>
     <TD><FONT FACE="Times New Roman, Times, Serif" SIZE="2">Title <U>CFO</U>
</FONT></TD></TR>
</TABLE>

<br>


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     <TD WIDTH="30%"><FONT FACE="Times New Roman, Times, Serif" SIZE="2">
</FONT></TD>
     <TD WIDTH="70%"><FONT FACE="Times New Roman, Times, Serif" SIZE="2">LESSOR:  EAGLE I, LLC
</FONT></TD></TR>
<TR VALIGN="TOP">
     <TD><FONT FACE="Times New Roman, Times, Serif" SIZE="2"></FONT></TD>
     <TD><FONT FACE="Times New Roman, Times, Serif" SIZE="2">By: <U>/s/Raymon F. Thompson</U>
</FONT></TD></TR>
<TR VALIGN="TOP">
     <TD><FONT FACE="Times New Roman, Times, Serif" SIZE="2"></FONT></TD>
     <TD><FONT FACE="Times New Roman, Times, Serif" SIZE="2">Name: <U>Raymon F. Thompson</U>
</FONT></TD></TR>
<TR VALIGN="TOP">
     <TD><FONT FACE="Times New Roman, Times, Serif" SIZE="2"></FONT></TD>
     <TD><FONT FACE="Times New Roman, Times, Serif" SIZE="2">Title <U>Sole Member</U>
</FONT></TD></TR>
</TABLE>

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