ebeam lithography is an amazing tool for small scale research projects and R&D work that needs the highest resolution without justifying the investment into an EUV mask

ebeam tools are a joy to use, they have great resolution, but the main downside is very slow write times/very busy tools

imo what makes ebeam special is the amount of knobs that can be fine tuned for a specific pattern, such as with proximity effect correction and the added ability to do very precise height mapping for perfect focusing onto samples that is not done with laser writers

here i am making diamond probes for quantum sensing, using single electron spins as qubits in the form of Nitrogen-vacancy centers