Title: Precision of Evaluation Methods in White Light Interferometry: Correlogram Correlation Method,
Abstract: In this paper we promote a method for the evaluation of a surface topography
which we call the correlogram correlation method. Employing a theoretical
analysis as well as numerical simulations the method is proven to be the most
accurate among available evaluation algorithms in the common case of
uncorrelated noise. Examples illustrate the superiority of the correlogram
correlation method over the common envelope and phase methods.