Title: Timing Aware Dummy Metal Fill Methodology,
Abstract: In this paper, we analyzed parasitic coupling capacitance coming from dummy
metal fill and its impact on timing. Based on the modeling, we proposed two
approaches to minimize the timing impact from dummy metal fill. The first
approach applies more spacing between critical nets and metal fill, while the
second approach leverages the shielding effects of reference nets. Experimental
results show consistent improvement compared to traditional metal fill method.