Title: Parasitic Bipolar Leakage in III-V FETs: Impact of Substrate Architecture,
Abstract: InGaAs-based Gate-all-Around (GAA) FETs with moderate to high In content are
shown experimentally and theoretically to be unsuitable for low-leakage
advanced CMOS nodes. The primary cause for this is the large leakage penalty
induced by the Parasitic Bipolar Effect (PBE), which is seen to be particularly
difficult to remedy in GAA architectures. Experimental evidence of PBE in
In70Ga30As GAA FETs is demonstrated, along with a simulation-based analysis of
the PBE behavior. The impact of PBE is investigated by simulation for
alternative device architectures, such as bulk FinFETs and
FinFETs-on-insulator. PBE is found to be non-negligible in all standard InGaAs
FET designs. Practical PBE metrics are introduced and the design of a substrate
architecture for PBE suppression is elucidated. Finally, it is concluded that
the GAA architecture is not suitable for low-leakage InGaAs FETs; a bulk FinFET
is better suited for the role.