Title: Thermo-elasto-plastic simulations of femtosecond laser-induced multiple-cavity in fused silica,
Abstract: The formation and the interaction of multiple cavities, induced by tightly
focused femtosecond laser pulses, are studied by using a developed numerical
tool, including the thermo-elasto-plastic material response. Simulations are
performed in fused silica in cases of one, two, and four spots of laser energy
deposition. The relaxation of the heated matter, launching shock waves in the
surrounding cold material, leads to cavity formation and emergence of areas
where cracks may be induced. Results show that the laser-induced structure
shape depends on the energy deposition configuration and demonstrate the
potential of the used numerical tool to obtain the desired designed structure
or technological process.