Title: Optomechanical characterization of silicon nitride membrane arrays,
Abstract: We report on the optical and mechanical characterization of arrays of
parallel micromechanical membranes. Pairs of high-tensile stress, 100 nm-thick
silicon nitride membranes are assembled parallel with each other with
separations ranging from 8.5 to 200 $\mu$m. Their optical properties are
accurately determined using a combination of broadband and monochromatic
illuminations and the lowest vibrational mode frequencies and mechanical
quality factors are determined interferometrically. The results and techniques
demonstrated are promising for investigations of collective phenomena in
optomechanical arrays.