Note: A valve-type piezoelectric reciprocating pump with secondary resonant vibrator.
A valve-type piezoelectric diaphragm pump using secondary resonant vibrator is introduced in this paper. The secondary resonant vibrator, which is mainly composed of a first vibrator and a second vibrator, is used to coordinate the frequency incompatibility between piezoelectric elements and check valves. The intermittent vibration of the first vibrator excites the resonant vibration of the second vibrator. The diaphragm in the pump chamber moves with the second vibrator, resulting in chamber volume and pressure variations. Control circuit capable of frequency tracking is designed. Vibration displacement and flow rate changing with driving voltage amplitude, frequency, and backpressure are studied in experiments. The flow rate of a prototype driven by voltage of 712 Vpp is 13.94 ml/min at secondary resonant frequency of 6 Hz.