
sankalp vadhavnare tantradnyan

resolution vardhan tantradnyan yaa lithographic prakriyanmadhil photomaskmadhye badal karnyasathi vaparlya jaanarya paddhati aahet jyaa ekatmik paripath (aay. see. ess. kinwa "chips") tayar karnyasathi prakshep pranalinchya optical resolutionmadhil maryadanchi bharpai karnyasathi vaparlya jaatat. yaa prakriya samanyatah releh nikashamule lagoo honanya maryadechya palikade vaishishtye tayar karnyas anumati detat. aadhunik tantradnyanamule 5 nanometerchya (aine. emm.) kramane vaishishtye tayar karata yetat, jee khol atinil (du. vhee.) prakashacha vapar karoon shakya asalelya samanya resolutionpeksha khoopach qamee asate.
parshvabhoomi.
ekatmik paripath prakashshilalekhan mhanoon olakhalya jaanarya bahu-charaniy prakriyet tayar kele jaatat. hii prakriya aay. see. circuitarychya rachnesah suru hote, jee siliconchya patrakachya prushthbhagavar kinwa wafer mhanoon olakhalya jaanarya itar ardhavahak samgrichya prushthbhagavar tayar kelya jaananya tharanchya malikepeksha jaast asate.
antim rachanecha pratyek thurr photomascover tayar keela jaato, joou aadhunik pranalinmadhye atyant shuddha quartz kachavar jamaa jhalelya kromiyamchya bareek reshanpasoon banavala jaato. kromiyamcha vapar keela jaato kaaran too yuu. vhee. prakashasathi atyant apardarshak aahe aanee quartz kaaran prakash strotanchya tivra ushnatekhali tyacha maryadit aushnik vistar asato tasech atinil prakashasathi atyant pardarshak asato. mukhavata weferwar thewala jaato aanee nantar tivra yuu. vhee. prakashachya strotachya samparkat aanala jaato. mukhavata aanee wafer darmyan yogya optical imaging pranalisah (kinwa jarr mukhavata weferla puresha jawalun thevalela asel tarr konatihi imaging pranali nasel, udaharanarth prarambhik lithography machinemadhye), mukhavata namuna vefarchya prushthbhagavaril photoresistchya patal tharavar chitrit keela jaato aanee prakashshastradnyachya prakash (uv kinwa uv)-ughad jhalelya bhagala rasayanik pratikriya anubhavtat jyamule chhayachitran namuna weferwar bhautikpane tayar hoto.
jevha mukhavatachya namunyavar prakash chamakato, tevha vivartan parinam udbhavtat. yamule yuu. vhee. divyatoon yenara tivra kendrit prakash mukhavatachya durchya bajula pasarato aanee antaranusar adhikadhik laksh kendrit hott nahee. 1970 chya dashkatil suruvatichya pranalinmadhye, heey parinam talhanyasathi mukhavata prushthbhagapasunache antar qamee karnyasathi mukhavata vefarchya thet samparkat thevane aavashyak hote. jevha mukhavata uchalala jaat asey tevha too anekada pratirodhak aavaran kadhoon takto aanee tyaa vefarcha naash karato. vivartan-mukt pratima tayar karane heey shevati prakshepan sanrekhan pranalindware sodavale gele, jyanni 1970 aanee 1980 chya dashakachya suruvatila chip nirmitivar varchasva gajavale.
murachya niyamachi avirat chaal shevati prakshepan sanrekhan karnare kaay hatalu shakatat yachya maryadeparyant pohochali. pratham duve aanee nantar yuv yaa uchch-uv tarangalambikade jaaun tyanche ayushya vadhavanyache prayatna kele gele, parantu yaa tarangalambivar qamee pramanat prakash padalyane yantre avyavharya jhaali, tyasathi prachand dive aanee dirgh exposure vel aavashyak hota. heey staperschya parichayadvare sodavanyat aale, jyat mothya aakaracha mukhavata vaparla gela aanee pratima qamee karnyasathi lenscha vapar keela gela. sanrekhanpramanech yaa pranalinmadhye sudharana hott rahili, parantu 1990 chya dashakachya uttaradhaparyant tyannahi tyach samasyanna samore jaave lagat hote.
tyaveli, lahan vaishishtyankade vatchal kashee suru thevayachi yabaddal barich charcha jhaali hotee. soft-ex-reey pradeshat excimer lesar vaparnari pranali haah eka upay hota, parantu tyaa avishvasaniyapane mahagadya hotya aanee tyanchyashi kaam karane katheen hote. yach velee sankalp vardhan vaparale jaau lagale.
moolbhut sankalpana.
vividh sankalp vardhan pranalinmadhye antarbhut asaleli moolbhut sankalpana mhanje itaranmadhil vivartan bharoon kadhanyasathi vishisht thikani vivartancha sarjansheel vapar. udaharanarth, jevha mukhavata asalelya reshebhovati prakash pasarato tevha too chamakdar aanee gadad reshanchi malika kinwa 'pattya' tayar karato. teey ichchit tikshna namuna pasarvel. yachee bharpai karnyasathi, dusra namuna jamaa keela jaato jyacha vivartan namuna ichchit vaishishtyansah overlap hoto aanee jyachya pattya mool namunyanna overlap karnyasathi sthit kelya jaatat jyamule ulat parinam hoto-prakashavar gadad kinwa ulat. yaa prakarchi anek vaishishtye jodali jaatat aanee ektrit namuna mool vaishishtya nirman karato. samanyatah, mukhavata varr hii atirikt vaishishtye ichchit vaishishtyala samantar padalelya atirikt reshansarkhi disatat.
2000 chya dashakachya suruvatipasun hii vadhiv vaishishtye jodane heey satat sudharanyache kshetra aahe. atirikt rachana vaparnyabarobarach, aadhunik pranalinmadhye tappyache badal karnare sahitya, bahu-rachana aanee itar tantre jodali jaatat. ektritpane, tyanni vaishishtyancha aakar prakashshastrachya vivartan maryadechya khalee parimanachya kramane sankuchit houu deela aahe.
resolution vadhicha vapar karane.
paramparikpane, aay. see. rachana bhautik mandanit rupantarit kelyanantar, velechi padtalani jhalyanantar aanee bahubhujanna dii. aar. see.-swachchh asalyache pramanit kelyanantar, aay. see. banavat karnyasathi tayar hote. vividh tharanche pratinidhitva karananya deta fayali mukhavata dukanat pathavalya gelya, jyat pratyek deta tharala sambandhit mukhavata banavanyasathi mukhavata-lekhan upkaranancha vapar keela gela aanee mukhavate fabmadhye pathvanyat aale jethe teey siliconmadhye varanvar designs tayar karnyasathi vaparale gele. purvi, aay. see. mandanichi nirmiti hii electronic rachana svayamchalitatechya sahbhagacha shevat hotee.
tathapi, moorchya niyamamule vaishishtye nehmich lahan parimananparyant chalavali jaat asalyane, purvi prabhavipane durlakshit kele jaau shakanare naveen bhautik parinam aata silicon weferwar tayar honanya vaishishtyanvar parinam karat aahet. tyamule antim mandani siliconmadhye kaay havey aahe heey darshavu shakate, tarihi mukhavate tayar karoon pathavanyapurvi anek eae. dii. aii. sadhanandware mandanit natyamay badal houu shakatat. heey badal heey rachnenusar upkaranat konatahi badal karnyasathi aavashyak naheet, tarr naveen upkarane vitarit karnyasathi, eka kinwa done pidhyannantar aay. see. ess. banavanyasathi kharedi kelelya aanee anukool kelelya utpadan upkarananna parvanagi denyasathi aavashyak aahet. yaa badalanche done prakar mhanoon vargikaran kele jaau shakate.
pahila prakar mhanje vikrutee sudharana, mhanje utpadan prakriyet antarbhut asalelya vikrutinsathi purv-bharpai, mug tee prakriya tappyatoon asso, jase keeh photolithography, kotarani, samatalikaran aanee jamaa. yaa vikrutee mojalya jaatat aanee yogya model basavale jaate, samanyatah niyam kinwa model aadharit algoridam vaparoon nuksan bharpai kelee jaate. jevha prakashshilalekhanadarmyan mudran vikrutinvar lagoo kele jaate, tevha yaa vikrutee nuksanbharpaila optical proximity correction (oo. pii. see.) mhanatat.
retical vadhichya dusya prakarat pratyakshat prakriyechi utpadankshamta kinwa sankalp sudharane samavisht aahe. yaa udaharananmadhye khaleel goshtincha samavesh hotoh
yaa pratyek utpadankshamta sudharana tantrasathi kahee vishisht mandani aahet jyaa ektar sudharlya jaau shakat naheet kinwa mudranat samasya nirman karoo shakat naheet. heey anupalaniy mandani mhanoon vargikrut kele jaatat. heey ektar rachana tappyavar talhale jaatat-udaharanarth, moolbhootpane pratibandhatmak rachana niyam vaparoon aanee/kinwa yogya asalyas atirikt dii. aar. see. tapasani tayar karane. lithographic bharpai aanee utpadankshamta sudharana yaa donhi goshti samanyatah resolution enhancement technic (riit) yaa shirshakakhali gatbaddh kelya jaatat. ashee tantre 180nm nodapasoon vaparali jaat aahet aanee imaging tarangalambichya tulanet lakshaniyaritya qamee jhalyamule, sadhya 13.5nm paryant maryadit asalelya kiman vaishishtya aakar mhanoon adhik aakramakpane vaparali jaat aahet.
heey utpadankshamatesathichya (aay. see.) kinwa dii. eff. emm. sathichya adhik samanya shrenishi jawalun sambandhit aahe aanee tyacha eka bhag aahe.
nivrutt jhalyanantar, eae. dii. aii. pravahachi pudhchi payari mhanje sahasa mask deta tayar karane.