
rasayanik-yaantrik pollishing

rasayanik yaantrik pollishing (see. aim. pee.) yaa samtalikaran rasayanik aur yaantrik balon key sanyojan key saath satahon koo chikna karane kii ack prakriya haye. ise rasayanik nakkashi aur mukt gharshankari pollishing key sankar key roop mein socha jaa sakata haye.
varnan.
prakriya ack pollishing paid aur retaining ring key sanyojan mein ack apgharshak aur sankshaarak rasayanik ghol (aamtaur parr ack colloid) kaa upayog karati haye, joe aamtaur parr wafer kii tulanaa mein adhik vyaas kaa hotaa haye. paid aur wafer koo ack gatishil pollishing haid dwara ack saath dabaaya jaataa haye aur ack plastic retaining ring dwara jagah parr rakhaa jaataa haye. gatishil pollishing haid koo ghoornan key vibhinn akshon key saath ghumaaya jaataa haye (i.ee., kendrit naheen). yeh samagri koo hataa detaa haye aur kissy bhee aniyamit sthalaakriti koo samaan roop seey baahar nikaal detaa haye, jisase wafer sapaat yaa samtal hoe jaataa haye. atirikt paripath tatvon key gathan key liye wafer sthaapit karane key liye yeh aavashyak hoe sakata haye. udaaharan key liye, see. aim. pee. poori satah koo photolithography pranali key kshetra kii gaharaai key bheetar laa sakata haye, yaa apani sthiti key aadhar parr samagri koo chuninda roop seey hataa sakata haye. navintam 22 nm praudyogiki key liye vishisht kshetra kii gaharaai kii aavashyaktaaen angstrom star taka hain.
kaary siddhant.
shaaririk kriya.
vishisht see. aim. pee. upkaran, jaise kii daaeen or dikhaai dene vaale, ack atyant sapaat plate koo ghumaate hain joe ack paid seey dhaki hoti haye. polish kiye jaa rahey wafer koo ack backing film parr ack vaahak/spindle mein ulta-neeche lagaaya jaataa haye. retaining ring (chitra 1) wafer koo sahee kshaitij sthiti mein rakhti haye. upkaran parr wafer koo load karane aur utaarane kii prakriya key dauran, wafer koo vaahak dwara vacuum dwara pakad liya jaataa haye taaki wafer kii satah parr avaanchhit kanon koo banane seey rokaa jaa sakey. ack ghol parichay tantra ghol koo paid parr jamaa kartaa haye, jise chitra 1 mein ghol kii aapoorti dwara darshaaya jaataa haye. plate aur vaahak donon koo phir ghumaaya jaataa haye aur vaahak koo dolan mein rakhaa jaataa haye; ise chitra 2 key sheersh drishya mein behtar dekhaa jaa sakata haye. vaahak parr ack neeche kii or dabaav/neeche bull lagaaya jaataa haye, ise paid key khilaf dhakel diyaa jaataa haye; aam taur parr neeche bull ack ausat bull hotaa haye, lekin hataane key tantra key liye sthaaniya dabaav kii aavashyakta hoti haye. neeche bull sampark kshetra parr nirbhar kartaa haye joe badale mein, wafer aur paid donon kii sanrachanaon parr nirbhar kartaa haye. aam taur parr paid mein 50 microne kii khurdarapan hoti haye; sampark asperities (joe aamtaur parr wafer parr uchch bindu hotey hain) dwara kiya jaataa haye aur isake parinamswarup, sampark kshetra wafer kshetra kaa kewal ack ansh hotaa haye. see. aim. pee. mein, wafer key yaantrik gunon parr bhee vichaar kiya jaanaa chaahiye. yadi wafer kii sanrachana thodi jhukati haye, tou kinaaron parr dabaav kendra kii tulanaa mein adhik hoga, joe gair-samaan pollishing kaa kaaran banata haye. wafer dhanush kii bharpai key liye, wafer key peechhe kii or dabaav daala jaa sakata haye, joe badale mein, kendra-kinare key antar koo barabar curr dega. see. aim. pee. upkaran mein upayog kiye jaane vaale paid kathor honey chaahiye taaki wafer kii satah koo samaan roop seey chamkaaya jaa sakey. haalaanki, inn kathor paid koo harr samay wafer key saath sanrekhan mein rakhaa jaanaa chaahiye. isaliye, vaastavik paid aksar kewal naram aur kathor samagriyon key dher hotey hain joe kuchh hudd taka wafer sthalaakriti key anuroop hotey hain. aam taur parr, yeye paid chhidrapurna polymeric samagri seey baney hotey hain jinka chhidra aakar 30-50 microne key beach hotaa haye, aur kyonki unakaa sevan iss prakriya mein kiya jaataa haye, isaliye unhein niyamit roop seey phir seey taiyar kiya jaanaa chaahiye. jyaadaatar mamalon mein paid bahut adhik swaamitva vaale hotey hain, aur aamtaur parr unake rasayanik yaa anya gunon key bajaay unake trademark naamon seey sandarbhit kiye jaate hain.
rasayanik kriya.
rasayanik yaantrik pollishing yaa samtalikaran rasayanik aur yaantrik balon key sanyojan key saath satahon koo chikna karane kii ack prakriya haye. ise rasayanik nakkashi aur mukt gharshankari pollishing key sankar key roop mein socha jaa sakata haye.
ardhchaalak nirmaan mein upayog.
lagbhag 1990 seey pahale see. aim. pee. koo uchch-parishuddhata nirmaan prakriyaon mein shamil karane key liye bahut "gandaa" key roop mein dekhaa jaataa thaa, kyonki gharshan kanon koo banaata haye aur gharshan swayam ashuddhiyon key binaa naheen hotey hain. usa samay seey, ekikrit paripath udyog aluminium seey tambe key chalakon kii or badh gayaa haye. isake liye ack "yogaatmak pratiroopan" prakriya key vikas kii aavashyakta thee, joe samtal aur samaan tareeke seey samagri koo hataane aur tambe aur oxide insulate karane vaali paraton key beach interfaces parr doharaane key liye see. aim. pee. kii anoothi kshamataon parr nirbhar karati haye (vivaran key liye tambe key paraspar sampark dekhein). iss prakriya koo apanaane seey see. aim. pee. prasanskaran bahut adhik vyaapak hoe gayaa haye. aluminium aur tambe key alawa, tungsten, silicon dioxide aur (haal hii mein) carbon nanotube koo chamakaane key liye see. aim. pee. prakriyaon koo vikasit kiya gayaa haye.
seemaaen.
vartamaan mein see. aim. pee. kii kaee seemaaen hain joe pollishing prakriya key dauran dikhaai detee hain aur ack naee takneek key anukoolan kii aavashyakta hoti haye. vishesh roop seey, wafer metrology mein sudhaar kii aavashyakta haye. isake alawa, yeh paaya gayaa kii see. aim. pee. prakriya mein kaee sambhaavit dosh hain jinamen tanaav daraar, kamjor interfaces parr deliminating aur ghol rasayanon seey sankshaarak hamale shamil hain. oxide pollishing prakriya, joe aaj key udyog mein sabse purani aur sabse adhik upayog kii jaane vaali prakriya haye, mein ack samasya haih antim binduon kii kamee key liye andhe pollishing kii aavashyakta hoti haye, jisase yeh nirdhaarit karna mushkil hoe jaataa haye kii samagri kii vaanchhit matra kaba hataa dee gaee haye yaa plenerisation kii vaanchhit degree kaba praapt kii gaee haye. yadi oxide parat koo paryaapt roop seey patala naheen kiya gayaa haye aur/yaa iss prakriya key dauran samatalat kii vaanchhit degree praapt naheen kii gaee haye, tou (saiddhaantik roop seey) wafer koo phir seey polish kiya jaa sakata haye, lekin vyaavhaarik arthon mein yeh utpaadan mein gair-aakarshak haye aur yadi sambhav hoe tou isase bachaa jaanaa chaahiye. yadi oxide kii motai bahut patali yaa bahut gair-samaan haye, tou wafer parr phir seey kaam kiya jaanaa chaahiye, ack aur bhee cumm aakarshak prakriya aur ack joe whiffle honey kii sambhavana haye. jahir haye, yeh vidhi samay lene vaali aur mahangi haye kyonki technicians koo iss prakriya koo karate samay adhik dhyaan denaa padata haye.
aavedan.
uthali khaai algaav (sti), ardhchaalak upkaranon koo banaane key liye upayog kii jaane vaali ack prakriya, ack takneek haye jiska upayog upkaranon aur sakriya kshetron key beach algaav koo badhaane key liye kiya jaataa haye. isake alawa, sti mein samtalata kii uchch degree hoti haye joe ise prakashshilatmak anuprayogon mein aavashyak banaati haye, nyuntam rekha chaudaai koo cumm karke phocus bajat kii gaharaai. uthali khaaiyon koo samtal karane key liye, ack samanya vidhi kaa upayog kiya jaanaa chaahiye jaise kii pratirodh eaching-back (rib) aur rasayanik yaantrik pollishing (see. aim. pee.) kaa sanyojan. yeh prakriya nimnanusar ack anukram pattern mein aatee haye. sabse pahale, algaav khaai pattern koo silicon wafer mein sthanantarit curr diyaa jaataa haye. oxide koo wafer parr khaaiyon key aakar mein jamaa kiya jaataa haye. silicon nitride seey banaa ack photo mask, iss tyag oxide key sheersh parr banaaya gayaa haye. samtal satah banaane key liye wafer mein ack doosari parat jodee jaati haye. usake baad, silicon koo ushmiya roop seey aukseekrit kiya jaataa haye, isaliye oxide una kshetron mein badhata haye jahaan koee aiss. aaee. 3aine. 4 naheen haye aur vriddhi 0.50 aur 1.00 microne key beach motee hoti haye. choonki paani yaa oxygen jaisi okseekaran karane vaali prajaatiyan mask key madhyam seey failane mein asamarth hoti hain, nitride okseekaran koo rokta haye. isake baad, naqqaashi prakriya kaa upayog wafer koo naqqaashi karane aur sakriya kshetron mein thodi matra mein oxide chhodane key liye kiya jaataa haye. anta mein, see. aim. pee. kaa upayog sakriya kshetra parr ack oxide key saath aiss. aaee. oh. 2 key adhik bojh koo chamakaane key liye kiya jaataa haye.