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Examination of the heat and electrical modes of the M-112 magnetron operation within the plasma unit

Results of examination of the plasma load influence on the heat operation mode of the continuous action magnetron with the air-cooling system and on the anode current curve shape, are submitted. The obtained results can be used for design of systems for microwave plasma equipment control and protection, as well as for development of protective-switch-off devices of microwave power sources. It is determined that during operation with the plasma load in the modes, acceptable for materials plasma treatment, the magnetron body temperature may exceed the specification parameters. This is caused by reflection of microwave power from the load. The magnetron body overheating is in the direct proportion to the value of microwave power, reflected from the load. Correlation between the distortion degree of the anode current signal shape and the microwave power-cum-load reflected values is determined. In order to ensure the safe operational modes of the microwave power sources within the plasma technological equipment, it is expedient to envisage the protective-switch-off devices, based on monitoring of magnetron operation heat modes and analysis of anode current curve shape.