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Soft recovery characteristics of punch-through power diodes by proton irradiation

In this paper, we have experimentally compared the softness of reverse recovery characteristics of punch-through 1000 A/2000 V power alloyed diodes produced with different lifetime control techniques. It was found that the best softness factor could be obtained with a proton penetration depth of 220 /spl mu/m, achieved with an irradiation energy of 5 MeV. For comparison, the effects of 5-12 MeV electron irradiation and platinum diffusion and some combinations were studied. The simulation results for proton irradiated device based on Silvaco Mixed-mode verification indicated in qualitative agreement with measurements.