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SU-8 Buckled-type Microvalves Switched by Surface Tension Forces

This paper presents the design, the fabrication, and the measurement result of a novel buckled-type microvalve. This device comprises of a parylene microtube for liquid transportation and a peacock-like SU-8 capillary microstructure for switching the microvalve without external power source. The maximal spreading angles of the peacock-like structures actuated by water surface tension are experimentally tested as 204deg and 15deg for the cases of not integrating and integrating a parylene microtube, respectively.