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Characterization of Crystalline Nanoparticles/Nanorods Synthesized by Atmospheric Plasma Enhanced Chemical Vapor Deposition of Perfluorohexane

A mass of nanoparticles/nanorods were formed on a simultaneously deposited granular film by plasma enhanced chemical vapor deposition (PECVD) of perfluorohexane at atmospheric pressure without any catalysts or templates. Scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) were used to characterize the morphology and the chemical compositions of nanoparticles. The average size of particles is about 100 nm and the length of synthesized nanorods is between 1 μm and 2.5 μm. The analyses of transmission electron microscopy (TEM), high-resolution transmission electron microscopy (HRTEM), selected area electron diffraction(SAED) and X-ray diffraction (XRD) reveals that the nanoparticles and nanorods are crystalline.