{'fraction_non_alphanumeric': 0.017241379310344827, 'fraction_numerical': 0.0, 'mean_word_length': 5.7190082644628095, 'pattern_counts': {'":': 0, '<': 0, '<?xml version=': 0, '>': 0, 'https://': 0, 'lorem ipsum': 0, 'www.': 0, 'xml': 0}, 'pii_count': 0, 'substrings_counts': 0, 'word_list_counts': {'cursed_substrings.json': 0, 'profanity_word_list.json': 0, 'sexual_word_list.json': 0, 'zh_pornsignals.json': 0}}
Experimental investigation of the electron sheath resonance (ESR) effect in parallel plate radio-frequency capacitively coupled plasmas

We have conducted a systematic experimental investigation on the electron heating mechanism named as electron sheath resonance (ESR) effect, with a parallel plate discharge configuration under various experimental conditions. In all conditions, a clear plasma density peak was observed at the magnetic field for ESR, providing a direct evidence for the effect. Further analysis suggests that the more significant ESR effect should appear at higher frequency, lower pressure discharges with larger electrodes. The results form a basis for further studies of the ESR effect, which is also meaningful to practical applications such as etching and thin film deposition processes.