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Simulation of an Ar/O2/Cl2 magnetized direct current discharge

A homemade 2D hybrid model (coupling particle in cell model with fluid model) is used to investigate the effect of the reaction chamber radius, the mixing ratio and pressure on the plasma properties in an Ar/O2/Cl2 magnetized DC (direct current) discharge. The results show that the main products are Ar**, Ar*, e, Ar2+, Cl, Cl2+, O(3P) and O2+. The densities of oxygen species are slightly lower than those of Cl2 species. If the magnetic field strength of the central magnetic pole is slightly weaker than those of the edge magnetic poles, it will improve the uniformity of the plasma species at the film basal position. Even the mixing ratio of Ar/O2/Cl2 is varied from 9 : 0.2 : 1 to 9 : 1 : 0.2, the main particles are hardly changed, but the concentrations of Cl2+ ions and Cl atoms significantly decrease. The main ion densities at 3 mTorr appear to be lower, but more inhomogeneous than those at 6 mTorr.