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Dynamic response and modal analysis of micro-machined disk resonator for RF application

A micro-machined disk resonator has been fabricated using POLYMUMPS process. The resonator has been characterized by Laser Doppler Vibrometer. A detailed modal analysis has been carried out for the disk. The fundamental frequency of vibration of the disk has been estimated analytically and verified with the experimental results. The structure shows radial mode vibration at around 920 MHz which is suitable for RF applications.