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A study on analysis of dynamic characteristics for ultrasonic transport system

Abstract Generally, an object transport system is driven by a conveyor belt system or a magnetic levitation system. It is an indispensable device for many fields and especially it is very important in the factory automation. Recent studies have focused on ultrasonic transport system to protect objects safely during transportation from being damaged in precision optical components by the contact force or destroyed in the inner structure of semiconductor by the magnetic field. The ultrasonic transport system is a device that transports objects on the elastic body using ultrasonic wave. When ultrasonic wave is applied to flexural beam, the flexural beam vibrates to excite air layer, which lifts up the object on the beam to transport. In this paper, we theoretically analyze dynamic characteristics of the ultrasonic transport system. Through normal mode expansion, the modelling equation on steady state response of ultrasonic vibration is expressed and natural frequency of flexural beam in each mode is also estimated. We also theoretically analyze the transport direction of objects depending on phase difference and frequency and verify the theoretic results by experiments.