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Body Fitted Grid Generation Method with Moving Boundaries and Its Application for analysis of MEMS

Abstract Recently MEMS technology is growing rapidly in RF field. More detailed and complex information is required for a realization of MEMS devices, but the numerical simulation of these moving devices are difficult. In this paper, a new numerical approach to analyze these MEMS devices using body fitted grid generation method with moving boundaries is proposed. This technique is based on the finite-difference time-domain (FD-TD) method and a kind of grid generation. The key feature of this method is the time factor is added to the conventional numerical grid generation. After describing the general theory of body-fitted grid generation method with moving boundaries, the numerical method to solve twodimensional variable capacitor is proposed.