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Enhancement in optical transmission of ZnO: Al film by c-orientation arrayed growth

Abstract Al-substituted ZnO film is an excellent transparent conducting material. In this paper, we report the fabrication and optical properties of the anisotropic oriented arrayed Al-substituted ZnO films. The films were prepared on quartz glass substrate with the sol-gel method and different calcining schedules. X-ray diffraction, atomic force microscopy, UVvis spectrophotometry and luminescent spectrophotometry were used to characterize the films. Pre-annealing at 400°C and annealing of 700°C led to a weak (002)-oriented texture with a granular morphology. Rapid heating and annealing at 700°C led to a highly (0002)-oriented texture with a morphology of strip grains running parallel to the substrate surface. Clear optical anisotropy was observed in the films. The highly (0002)-oriented film has greater transmittance in the range of UV-visible light and a wider band gap. The mechanisms of formation and the anisotropic optical properties of the films are discussed.