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The Effect of Substrate Temperature on the Formation of ITO Thin Films

Indium tin oxide (ITO) used in many applications such as electronic and optical devices were deposited on the soda lime glass substrate by an electron beam evaporation techniques from a mixture of 90wt% of In2O3 and 10wt% of SnO2. The physical, electrical and optical properties of the ITO films were determined as a function of substrate temperature. The films deposited at 200 showed optimum properties with a strong diffraction peak having a preferred orientation along the [111] direction. Experimental results showed that sheet resistance and transmittance of the ITO film increased with an increase in substrate temperature. Surface roughness increased slightly as a function of substrate temperature because of grain growth.