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Progress in carbon nanotube based nanoelectromechanical systems synthesis

We present a revised process flow for the integration of individual single‐walled carbon nanotubes into microelectromechanical systems. The revision consists in a re‐ordered process sequence which consider‐ably increases the device yield. Thermal catalytic chemical vapor deposition of single‐walled carbon nanotubes is performed conjunctly with annealing as the very last process step. Maskless catalyst deposition is demonstrated to produce individual single‐walled carbon nanotubes with good location and orientation control by shaping the catalyst support. Straining experiments showed that the mechanical anchoring between the tube and the support can be sufficient. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)