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Performance of a step-and-scan system for DUV lithography

To meet the high productivity standards, set by current top- end stepper systems, the use of excimer laser sources and high scanning speeds are essential. This paper reports on a new Step & Scan system capable of exposing 26 X 33 mm fields, using a 248 nm DUV-lens with a variable Numerical Aperture of 0.40 to 0.63. The system is equipped with an advanced AERIALTM illuminator which allows the user to choose coherence and illumination modes on a job-by-job basis. The double telecentric lens is equipped with lens manipulators to allow on-site aberration control. Results are presented on dynamic image distortion, field flatness and dynamic imaging performance. Performance of the overlay accuracy and dose accuracy at high scanning speeds proves that Step & Scan technology is now developed to a level suitable for use in high volume sub 0.25 micrometers manufacturing.