Please generate a JSON representation of the process gasses used for amorphous carbon deposition in PECVD, with the molecular formula as the key, the gas name included in the description, and a "dep rate" key indicating the most likely effect on the carbon deposition rate after increasing the proportion of the gas in a process (with values of "increase", "decrease", or "inconsequential"). Also include a number 1-10 indicating the strength of the belief in the effect described. The header should be "amorphous carbon PECVD".
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