An EL sheet diaphragm including a diffusion type EL sheet having a diaphragm portion exhibiting a dome shape and a flange supporting portion disposed about the outer circumference of the diffusion type EL sheet. The diffusion type EL sheet including a transparent film having an upper surface and a lower surface, a transparent electrode layer formed on the lower surface of the transparent film, a light emitting layer formed on the transparent electrode, a dielectric layer formed on the light emitting layer, a rear electrode layer formed on the dielectric layer, and an insulating layer formed on the rear electrode layer. The diffusion type EL sheet emits light from the diaphragm portion of the upper surface of the transparent film. The diffusion type EL sheet bows outwardly in an at-rest state such that the upper surface of the transparent film exhibits a convex shape, and bows inwardly when depressed for operation such that the upper surface of the transparent film exhibits a concave shape.

Recently, such electronic devices as communication, video and audio devices are used more and more in portable applications.
A lighted switch in conventional portable electronic devices has been lighted by employing either a bullet-type LED in the vicinity of a contact part of the switch or a chip-type LED in the vicinity of the switch, and providing such light guiding plate as transparent acrylic plate to guide the light to the switch section.
A lighted switch comprising opposing films or glasses with a transparent electrodes on a diffusion-type EL sheet is also known.
However, in such constitution of employing a chip-type LED in the vicinity of the switch, and guiding the light by means of a light guiding plate, it has been a problem that a loss of light and unevenness in brightness are significant, and an attempt of reducing the loss and unevenness causes increase in size and weight, leading to higher power consumption of LED and earlier exhaust of a battery in a portable device, so that the portable device cannot be used continuously for a long time.
A switch with transparent electrodes provided in opposition to each other on an EL sheet is advantageous in that very uniform illumination can be obtained, and a loss is insignificant, while it has been a problem that it lacks operational feeling as a switch.
Further, although a sputtered film of indium tin oxide (hereinafter ITO) is employed as a transparent electrode in a conventional diffusion-type EL sheet, because it is excessively stretched and bent in a process of shaping a diaphragm portion, it has been a problem that ITO may be relatively easily broken during the shaping process or operation of the diaphragm portion, and no light is emitted by the diaphragm portion due to breakage of a binder resin in a light emitting layer or dielectric layer.

EL sheet diaphragm and a switch using the same


In order to form a storage electrode of a semiconductor memory device, an interlayer dielectric layer is formed on a semiconductor substrate having a bit line thereon. A contact hole exposing the semiconductor substrate is formed by patterning the interlayer dielectric layer. A polysilicon layer is etched to a predetermined thickness using polysilicon etching gas after the polysilicon layer is deposited. An over-etch process is performed relative to the polysilicon layer, and then a storage node contact having a planarized surface is formed in the contact hole by performing an etching process for planarizing the surface of the polysilicon layer. A mold insulating layer is formed on the resultant structure, in which the mold insulating layer exposes an area where the storage node contact is formed. A storage electrode coupled to the storage node contact is formed.

The invention relates to a method of manufacturing a semiconductor device and, more particularly, to a method of forming a storage electrode of a semiconductor memory device.
As the design rules of semiconductor memory devices continue to decrease, it becomes more difficult to form the memory devices in a limited area. For example, in the case of a DRAM, it has become more difficult to form a capacitor having sufficient capacitance in a limited area.
In a conventional semiconductor memory device, because photolithography and etching processes have been performed with a sufficient margin, a problem does not occur during the patterning process caused by a step difference or a surface roughness. However, as the design rules decrease, the process margin has also been reduced. As a result, the patterning problem caused by the step difference or the surface roughness is newly arising, and the number of process steps is significantly increased. Accordingly, reducing the number of processes and the manufacturing cost has become an important factor to determine the competitiveness of a device in the future.
Meanwhile, a storage electrode of a capacitor is electrically connected to a semiconductor substrate through a storage node contact. In order to form the storage node contact, an interlayer dielectric layer is formed in a state in which a word line and a bit line have been formed, and then a contact hole is formed to expose a predetermined area of the semiconductor substrate or a contact plug coupled to the semiconductor substrate. Subsequently, a conductive layer is deposited on an entire surface of the contact hole until the conductive layer has a predetermined thickness sufficient to fill the contact hole. At this time, the conductive layer generally includes a doped polysilicon layer. After that, the storage node contacts are separated from each other through a conventional etch back process using polysilicon etching gas, or a chemical mechanical polishing (CMP) process.
However, when performing the CMP process to separate the storage node contacts from each other after etching the polysilicon layer by using the polysilicon etching gas, a dishing phenomenon is observed and a severe wave-shaped topology is formed due to an over etch or an over CMP. Such a defective topology is transferred onto a mold insulating layer when depositing the mold insulating layer to form the storage electrode in the subsequent process, so that the mold insulating layer also has the defective topology. As a result, a pattern is improperly transferred and a pattern defect or a pattern deformation is incurred during the photo process for patterning the mold insulating layer.
After depositing the mold insulating layer, a planarization process of the mold insulating layer must be separately performed in order to prevent such a phenomenon; thus, this phenomenon causes a time loss and an economic loss. In addition, an over etch target must be set when performing the storage node etching process due to the defective topology, so the process margin may be significantly reduced in the photo and etching processes.

Method for forming storage electrode of semiconductor memory device


The present invention is directed to a process for separating an olefin copolymer from volatile gases using a flash separator. The flash separator can be used with a solution or high pressure process. The mass transport of volatile gases from the viscous polymer melt is increased.

Polyolefins are produced by several different conventional technologies. Typical temperatures are from 50 to 350° C. and pressures vary from 30 to 3000 bars. The polyolefins are produced at a temperature in which the polymer is dissolved in a liquid or supercritical mixture of unreacted monomer, unreacted comonomers and optional solvents.
The polymerization process includes one or more polymerization reactors. Suitable reactors include unstirred or stirred, spherical, cylindrical and tank-like vessels and recirculating loop reactors and tubular reactors. Such reactors typically include injection points for monomer, comonomer, solvent, catalyst and optional other reactants and additives and withdrawal points for reaction mixtures. In addition the reactors may include heating or cooling means.
The separation of unreacted dissolved monomer(s), comonomer(s) and possible solvents from the reaction mixture comprising a polymer melt is commonly carried out in flash separator(s), typically carried out in one or more separation stages. In the solution process, a stream of a reaction solution withdrawn from the polymerization reactor is passed to the flash separator where ethylene with or without comonomer (i.e., propylene, 1-butene, 1-hexene, 1-octene or combination of comonomers) and hydrocarbon solvent are separated from the polymer melt.
In high pressure processes, for making LDPE, the pressure of the reaction mixture at the reactor outlet, is decreased from its operating value of about 1000 to 3000 bar to a value of 100 to 300 bar via the operation of the exit let-down valve. The reaction mixture expansion caused by the let-down valve, results in a temperature increase of the outlet reaction stream (i.e., reverse Joule-Thompson effect). Subsequently, the reaction mixture is fed into a flash separator, also called high pressure separator where the monomer/comonomer/polymer ternary mixture is split into a polymer stream, which is a polymer rich liquid phase, and a gaseous stream, which is a monomer(s)-rich gas phase. The polymer stream coming from the bottom of the flash separator is fed to a further flash separator for further removal of residual monomer(s). In the second flash separator, the pressure is further reduced. The gas stream, containing low molecular weight waxes, leaving the second flash separator (i.e., off gas) is fed to the primary compressor while the liquid bottom polymer stream is directed to the extruder for pelletization.
When operating flash separators with in viscous polymer solutions one faces a problem with respect to the achievement of the highest possible separation efficiency of the components with minimum material entrainment. The smaller the size of the polymer droplets entering the flash separator, the more enhanced is the mass transfer rate but then the risk of carry-over of the droplets increases. Entrained polymer (waxes, small size droplets, etc.) which follows the recycled gaseous stream out of the flash separator will increase fouling of down-stream heat exchangers, thus reducing the overall heat transfer rate. Moreover, deposition of entrained polymers in the pipes and compressors increases cleaning cost and maintenance time and, in extreme cases, can cause piping blockages and premature failure of mechanical components.
The object of the invention is to improve the separation of hydrocarbons from a viscous compound, such as olefin copolymer. Especially, the object of the invention is to improve the separation of hydrocarbons having a relatively high molecular weight (and which therefore are less volatile), such as the comonomer(s) used in the polymerization. It is relatively easy to separate small-size molecules as ethylene; however, the separation of bulky molecules, such as comonomers, typical examples of which are 1-octene and vinyl acrylate, from viscous olefin copolymer melt is challenging.
One object of the present invention is to increase the mass transfer of volatile gases by increasing the surface area of the droplets in the high pressure separator. Another object of this invention is a process with increased mass transfer area to efficiently separate volatile gases from the highly-viscous polymer melt.
Yet another object of the invention is to reduce the amount of droplets carry-over, i.e. the amount of entrained olefin copolymer carry-over into the gaseous stream.
The present invention is an inlet for a flash separator's having means for distribution of the reaction mixture, which is a highly viscous polymer melt. Such inlet can increase the separation efficiency with minimum risk of droplets carry over. The invention further has advantages of:                Minimum droplets entrainment combined with high separation efficiency closer to equilibrium-ideal separation        Less risk of heat exchangers, filters and compressors blockage.        Smooth operation of the flash separator.        Less effort in cleaning and maintenance of the knock out drums in the downstream processing unit.
The object of the invention is to improve separation of large molecules from the viscous compound, i.e. the reaction mixture. The removal of unreacted ethylene from ethylene homopolymer is efficient enough since ethylene has a relative high mass transport rate.

Method for separating hydrocarbons from polymer


A method for accepting payments from a consumer for a travel ticket from a travel company comprises receiving at a point of sale device a transaction request that includes a transaction identifier that identifies a travel arrangement made with the travel company and a payment amount. The payment amount and the transaction identifier is transmitted to a host computer system for validation. Also, a validation from the host computer system is received indicating that the transaction requested has been validated. A payment is received from the consumer, and at least a portion of the payment is electronically transmitted to the travel company.

The present invention relates generally to financial transaction systems and methodologies, and in particular to methods and systems for making payments and consummating staged transactions based on a consumer or transaction identification. In one particular aspect, the invention relates to making payments for travel tickets, such as an airline ticket, following the making of the reservation.
A wide variety of payment methods are available to consumers of goods and services. In addition to currency, consumers are often able to use their credit in making purchases. A common system for making credit purchases involves the use of a credit card provided by a credit card issuer, such as a commercial bank or other financial institution. Non-credit transactions can be handled by debit cards, which utilize funds already deposited by the consumer for payment purposes.
Many types of payment methodologies are dependent upon consumers having relationships with financial institutions such as banks, credit unions, etc. However, a substantial percentage of consumers do not use such conventional financial institutions. These consumers are often referred to as "unbanked" because they do not maintain accounts with such institutions. Unbanked consumers are often inconvenienced in making financial transactions. For example, without bank accounts, they experience difficulty and inconvenience in obtaining negotiable instruments, making purchases on credit, etc.
Other consumers may not feel comfortable providing or sending personal information, such as credit card numbers, over the telephone or internet. Such consumers may desire an alternative method of rendering payment. Still other consumers may have had an attempted payment denied, such as by attempting to render payment using a credit card that is at or over the maximum limit available to the consumer, or the like. To assist consumers in these situations, as well as others, an alternative payment scheme(s) may be desired.
Recently there have been a variety of new products which provide at least partial solutions to the problems of the unbanked and other consumers. For example, "prepay" cards allow consumers to pre-purchase various goods and services. An important example relates to the use of telecommunications services, which are available through prepaid "calling cards." Many consumers prepay on a monthly basis for "dial tone" service. Prepaid cards can also be reloadable whereby additional value can be added by consumers for using their cards indefinitely. Another system involves the use of a service provider making payments on behalf of consumers over the Internet global computer network or by negotiable instrument. While these solutions address some of the needs of the unbanked, there remain other needs that have not been addressed.
Therefore, there is a need in the art for solutions to address problems incurred by the unbanked and other consumers. Hence, among a number of other advantages apparent from the following description, the present invention provides systems and methods for addressing such problems.

Airline ticket payment and reservation system and methods


Provided is a Fourier transform spectroscopy method that removes restrictions on spectral resolution and spectral accuracy in Fourier transform spectroscopy for observing a cyclic repeating phenomenon, that realizes, theoretically, infinitesimal spectral resolution accuracy. After accurately and sufficiently stabilizing the repetition period of a phenomenon, a temporal waveform is acquired by making a repetition period and a time width for observing the temporal waveform of a phenomenon strictly conform, and by performing a Fourier transform, acquired is a discrete separation spectrum in which the inverse number of the observation time window size T is made a frequency data gap. Measurement is repeated while causing the repetition period to change, and the gap of the discrete separation spectrum is supplemented. Thereby, in a case of an observation target in which the existence time of a phenomenon is longer than the repetition period, the spectral resolution of the obtained discrete separation spectrum becomes infinitesimal.

A Fourier transform spectroscopy method (a Fourier transform frequency analysis method) is a spectroscopic technique where spectra are obtained by measuring a temporal waveform or interferogram of electromagnetic radiation, or other types of radiation, and calculating its Fourier transform.
When a periodical signal is considered, a temporal waveform signal h(t) observed in a time domain is related with a frequency spectrum H(f) observed in a frequency domain based on the Fourier transform (Equation (1)) and the inverse Fourier transform (Equation (2)) as are shown by the following Equations.
[Equation 1]H(f)=∫−∞∞h(t)exp(−2πift)dt  (1)[Equation 2]h(t)=∫−∞∞H(f)exp(2πift)df  (2)
Signals in a time domain and in a frequency domain are considered to be equivalent to each other from the relations of the Fourier transform and the inverse Fourier transform. Before computers became available, measurements in a frequency (or wavelength) domain were generally performed for the spectrum measurement due to a difficulty in performing the Fourier transform.
For example, in optical spectroscopy such as dispersive spectrometers, a spectrum was acquired by spatially separating multiple wavelength components of light with dispersive optical elements (a diffraction grating, a prism and so on) and selecting only a specific wavelength component.
However, the Fourier transform became extremely easy as computers became available, which made it possible to acquire the spectrum for each frequency by the Fourier transform of a measured temporal waveform of a phenomenon, namely, the Fourier transform spectroscopy.
Typical examples of the Fourier transform spectroscopy method includes a pulse Fourier-transform nuclear magnetic resonance spectroscopy method (FT-NMR), a nuclear magnetic resonance imaging method (MRI), a Fourier-transform infrared spectroscopy method (FT-IR), a terahertz time-domain spectroscopy method (THz-TDS) and so on, and these are widely used in industrial fields and medical fields. A FT-NMR irradiates pulsed high frequency radio waves (radio waves) on a sample tube set at the center of a superconducting magnet and measures a time domain signal called FID (Free Induction Decay) and consequently a NMR spectrum is acquired by the Fourier transform of this FID. A Nuclear Magnetic Resonance Imaging (MRI) applies NMR spectra to computed tomography. A FT-IR and a THz-TDS observe interferogram and electric field as a function of time, respectively, and spectra are acquired after the Fourier transform of them.                Features of a Fourier transform spectroscopy method are includes the following 1) to 4).
1) High Signal Intensity.                The signal intensity is high and hence a high signal-to-noise ratio is acquired because the whole spectral components of input signal is collected at the same time by acquiring the time-domain signal in the Fourier transform spectroscopy method.
2) Bright Optical System without Slits.                High optical throughput and a high signal-to-noise ratio can be realized because slits required in a dispersive spectrometer are not necessary and its optical system is brighter than that of dispersive spectrometer.
3) A Continuous Spectrum with High Spectral Accuracy.
Continuous spectrum can be observed and its spectral accuracy is relatively high due to Fourier transform.
4) Applicable to Various Electromagnetic Regions.
The Fourier transform spectroscopy method is now becoming the main stream of the spectroscopic measurement and is now widely used in various fields thanks to the features mentioned above.
TABLE 1Fourier transform spectroscopy methodApplication fieldNuclear magnetic resonance Structural determination of organicspectroscopy method (NMR)substances and so onNuclear magnetic resonance imagingBiological body tomography imaging and, so onFourier transform infrared spectroscopySemiconductor defect Drug and inspection method (FT-IR)food analysis and so onTerahertz time domain spectroscopy Drug analysis, Non-destructive method (THz-TDS)inspection Protein identificationFourier transfer mass spectroscopy Protein identificationmethod (FT-MS)Fourier transfer optical spectrum Optical communication, optical analyzerdevice evaluationFourier transform spectrum analyzerElectronic device evaluation
The important characteristics of the spectroscopy are the spectral resolution and the spectral accuracy.
FIG. 1 shows a temporal waveform of an observed signal and the corresponding amplitude spectrum obtained by its Fourier transform. When the temporal waveform of a phenomenon is measured, the spectral resolution is simply determined by the inverse of the measurement time window size during which the temporal waveform is observed (an observation time window). Therefore, as the time window is increased, the spectral resolution is enhanced. On the other hand, when the phenomenon repeats, it is generally accepted that the achievable spectral resolution is limited to its repetition frequency (theoretical limit of spectral resolution) because the maximum window size is restricted to a single repetition period to avoid the coexistence of multiple signals. Also, when the majority of the signal components are temporally localized, excessive extension of the window size increases the noise contribution.
Also, the acquisition time increases in proportion to the expansion of the observation time window size. Furthermore, in the case of optical FTS, the travel range of a translation stage used for time-delay scanning practically limits the spectral resolution. The practical spectral resolution is far lower than the spectral resolution to be determined by the repetition frequency and it is not easy to realize a sufficiently large size of the observation time window. Considering such these factors, the actual observation time window size is selected, which determines the spectral resolution.
On the other hand, the spectral accuracy depends on the accuracy of time sampling in the temporal waveform.
For improving the substance identification capacity in spectroscopic analysis, further improvement of the spectral resolution and the spectral accuracy are necessary.
Some inventors among the inventors of this invention have already proposed a measurement equipment of a high speed THz spectrometry with a spectral resolution of a theoretical limit (=repetition frequency=mode-locked frequency) in the THz-TDS. (Refer to Patent Literature 1)
The present invention resolves a limitation of spectral resolution in the Fourier transform spectroscopy including the THz-TDS, realizes a theoretically infinitesimal spectral resolution (an infinite spectral resolving power) and improves a spectral accuracy remarkably.

Fourier transform spectroscopy method, spectroscopic device, and spectroscopic measurement program that improve spectral resolution and spectral accuracy


The subject invention relates the use of cembranoids to inhibit nicotine addiction at the behavioral level. The subject host is sensitized to nicotine. Cembranoids are then administered to reduce such sensitization.

Despite the consensus that nicotine is the compound responsible for the addictive properties of cigarettes, other factors may contribute to this addiction. Besides nicotine, tobacco contains thousands of other compounds among which there is a family of cyclic diterpenoids called cembranoids. Cyclic diterpenoids are also found in marine invertebrates, specifically Gorgonian species (soft corals).
Cembranoids are found in both tobacco leaves and flowers. Their content varies considerably with the tobacco species, constituting on the average about 1% (w/w) of green leaves. By comparison, nicotine content in cigarette tobacco is about 1-3%. The most abundant tobacco cembranoids are (1S,2E,4R,6R,7E,11E)-cembra-2,7,11-triene-4,6-diol (also termed 4R-cembratriene) and its diasteroisomer (1S,2E,4S,6R,7E,11E)-cembra-2,7,11-triene-4,6-diol (also termed 4S-cembratriene). Both of these compounds are shown in FIG. 1. These compounds are thought to be the precursors of most of the over seventy currently known tobacco cembranoids. Relatively few biological effects of tobacco cembranoids have been described. These few described biological effects include regulation of plant growth, inhibition of tumor growth, inhibition of aldose reductase and of prostaglandin synthesis.
According to another aspect of the invention, administering cembranoids to a living host reduces sensitization to nicotine.
According to further aspects of the invention, the living host is sensitized to nicotine by regular administration of nicotine to the living host. The cembranoids are administered after the regular administration of nicotine to the living host. The cembranoids may all be the same compound or may be a plurality of different compounds, including eunicin, eupalmerin acetate, 12,13-bisepieupalmerin, 4S-cembratriene and 4R-cembratriene.
According to one aspect of the invention, the cembranoids are administered in a dose of approximately six milligrams of cembranoid per kilogram of host.
According to another aspect of the invention, the cembranoid is administered in a dose of approximately, or that does not exceed, a milligram of cembranoid per kilogram of host.
According to still further aspects of the invention, the living host is a mammal.

Tobacco cembranoids block the expression of the behavioral sensitization to nicotine and inhibit neuronal acetylcholine receptors


The present invention provides a human eosinophil-derived basic protein (EBPH) and polynucleotides which identify and encode EBPH. The invention also provides genetically engineered expression vectors and host cells comprising the nucleic acid sequences encoding EBPH and a method for producing EBPH. The invention also provides for use of EBPH and agonists, antibodies or antagonists specifically binding EBPH, in the prevention and treatment of diseases associated with expression of EBPH. Additionally, the invention provides for the use of antisense molecules to polynucleotides encoding EBPH for the treatment of diseases associated with the expression of EBPH. The invention also provides diagnostic assays which utilize the polynucleotide, or fragments or the complement thereof, and antibodies specifically binding EBPH.

This invention relates to nucleic acid and amino acid sequences of a novel human eosinophil-derived basic protein and to the use of these sequences in the diagnosis, prevention, and treatment of disease.
Stem cells are progenitor blood cells which differentiate to mature white blood cells, rid blood cells, and platelets. Stem cells are found in adult bone marrow, in fetal liver and spleen, and in blood collected from the umbilical cord after the birth of a baby.
Eosinophil growth and differentiation from stem cells is regulated by hematopoietic growth factors including granulocyte-macrophage colony stimulating factor (GM-CSF), interleukin-3 (IL-3), and interleukin-5 (IL-5). IL-5 is a potent eosinophil differentiation and activation factor, while GM-CSF and IL-3 also increase the production of other myeloid cells.
Eosinophils are white blood cells which are sub-classified as granulocytes due to the presence of large, coarse membrane-bound cytoplasmic granules. These granules contain proteins and other compounds which carry out a variety of inflammatory and immune functions. In response to chemotactic factors, eosinophils migrate through blood vessel walls and through tissues to the site where they are needed. There the contents of the granules are released in response to specific stimuli. Eosinophil granule release is stimulated by immunoglobulin E (IgE)-mediated hypersensitivity reactions such as parasitic infections and type I allergic reactions. Such type I allergic reactions include asthma and allergic rhinitis.
A variety of eosinophil-derived basic proteins (EDBPs) are released from eosinophil granules. These cytotoxic proteins disrupt membrane surfaces and lyse cells. EDBPs are thus potent anti-parasitic and anti-bacterial agents, however, EDBPs may also damage host tissues. For instance, the cardiovascular damage associated with chronic hypereosinophilia has been attributed in part to secreted EDBPs. EDBPs have been shown to damage respiratory epithelial cells, and have been implicated in the increase in bronchial hyperreactivity frequently observed in asthma patients. A significant correlation exists between the intensity of bronchial hyperreactivity and the levels of EDBPs in blood and bronchoalveolar lavage (BAL) fluid from asthmatics.
Eosinophil granule major basic protein (MBP), one of the most extensively characterized EDBPs, is a potent toxin against helminths, protozoa, bacteria and other cells. MBP also causes epithelial desquamization and ciliostasis, effects that mimic the pathology of asthma (Gleich, G. J. et al. (1988) J. Allergy Clin. Immun. 81:776-781). MBP is found in sputa and on damaged bronchial tissues of asthma patients (Frigas, E. et al. (1981) Mayo Clin. Proc. 56:345; Filley, W. V. et al. (1982) Lancet 2:11).
Along with its cytolytic properties, MBP also possesses noncytolytic proinflammatory properties, many of which are associated with late phase reactions of allergic disease. The release of histamine and leukotriene C4 from basophils is stimulated by MBP and further enhanced by the cytokines IL-3, IL-5 and GM-CSF (Sarmiento, E. U. et al. (1995) J. Immunol. 155:2211-2221). MBP also stimulates neutrophil activation and degranulation, including the release of superoxide anion (O2-) and lysozyme (Moy, J. N. et al. (1990) J. Immunol. 145:2626-2632), and platelet activation (Rohrbach, M. S. et al. (1990) J. Exp. Med. 172:1271-1274). MBP also induces further eosinophil degranulation (Kita, H. et al. (1995) J. Immunol. 154:4749-4758).
The cDNA for MBP encodes a 25 kdal preproprotein molecule of 222 amino acids, which includes a predicted 15 amino acid leader peptide, a 90 amino acid acidic pro domain and a 117 amino acid mature polypeptide (Popken-Harris, P. et al. (1995) J. Immunol. 155:1472-1480). The pro domain of MBP contains a heterogeneous population of O- and N-linked glycosyl modifications and has an isoelectric point (pI) of approximately 4.9. The 14 kdal mature MBP contains two disulfide bridges and five free cysteine residues (Oxvig, C. et al. (1994) FEBS Lett. 341:213-217).
The negatively-charged pro domain appears to interact with the positively-charged mature MBP. This interaction is proposed to inhibit the activity of mature MBP thus protecting the developing eosinophil from damage by MBP during granule processing (Popken-Harris, et al. (1995), supra). Mature MBP, but not proMBP, reacts readily with acidic lipids and disorders lipid bilayers resulting in the lysis of liposomes (Abu-Ghazaleh, R. I. et al. (1992) J. Membr. Biol. 128:153-164). Unlike mature MBP, proMBP does not stimulate basophil histamine release or neutrophil superoxide generation; in fact, proMBP is an inhibitor of these MPB-stimulated activities (Popken-Harris, et al. (1995), supra).
ProMBP is expressed in placental X cells and is found in the sera of pregnant women (Wagner, J. M. et al. (1994) Placenta 15:625-640). Levels of proMBP peak before labor and rapidly decline after delivery (Maddox, D. E. et al. (1983) J. Exp. Med. 158:1211-1216). ProMBP of placental origin is heavily glycosylated and circulates in disulfide-bridged complexes with pregnancy-associated plasma protein A (PAPP-A), angiotensinogen, and complement C3dg (Oxvig C. et al. (1993) J. Biol. Chem. 268:12243-12246; Oxvig C. et al (1995) J. Biol. Chem. 270:13645-13651). Low serum levels of PAPP-A in the first trimester have been linked to fetal chromosomal abnormalities (Brambati, M. C. (1993) Br. J. Obstet. Gynaecol. 100:324-326). A high molecular weight (HMW) form of angiotensinogen has been found in moderate quantities in plasma from pregnant women and in high quantities in hypertensive pregnant women (Tewksbury, D. A. et al. (1989) Am. J. Hypertens. 2:411-413). Oxvig and colleagues (1995, supra) suggest that this HMW angiotensinogen is actually the proMBP:angiotensinogen complex.
The discovery of polynucleotides encoding a novel EDBP-like molecule, and the molecule themselves, satisfies a need in the art by providing a new means for the diagnosis, prevention, or treatment of diseases and conditions associated with eosinophil accumulation and granule release including late-phase allergic/inflammatory reactions, eosinophilias, parasitic infections, and conditions associated with placental derived-EDBP accumulation in pregnancy.
The present invention features a novel basic protein derived from IL-5 cultured umbilical cord blood cells, hereinafter designated as EBPH and characterized as having chemical and structural homology to eosinophil granule MBPs from human and guinea pig.
Accordingly, the invention features a substantially purified human EBPH having the structural characteristics of the MBPs above and as shown in amino acid sequence, SEQ ID NO:1.
One aspect of the invention features isolated and substantially purified polynucleotides that encode EBPH. In a particular aspect, the polynucleotide is the nucleotide sequence of SEQ ID NO:2.
The invention also features a polynucleotide sequence comprising the complement of SEQ ID NO:2 or variants thereof. In addition, the invention features polynucleotide sequences which hybridize under stringent conditions to SEQ ID NO:2.
The invention additionally features nucleic acid sequences encoding polypeptides, oligonucleotides, peptide nucleic acids (PNA), fragments, portions or antisense molecules thereof, and expression vectors and host cells comprising polynucleotides that encode EBPH. The present invention also features antibodies which bind specifically to EBPH, and pharmaceutical compositions comprising substantially purified EBPH. The invention also features agonists and antagonists of EBPH.

Polynucleotides encoding human eosinophil-derived basic protein


A combination turf stake and frame construction assembly for establishing a framework construction upon a ground surface. The turf stake includes an elongate spike portion having a first inserting end, a second supporting end and a plurality of vane portions projecting in circumferentially spaced apart and axially directed fashion substantially along the spike portion. A substantially polygonal shaped body defining a hollowed and interior cavity is integrally formed atop the second supporting end of the turf stake and substantially corresponds to a likewise polygonally shaped and inserting end of a selected elongate frame construction member so as to engage the elongate member in a friction fit manner. A plurality of turf stakes and frame construction members can be employed to assemble any desired framework construction. Both the turf stakes and frame construction members can be further internally hollowed to facilitate the communication of fluid, such as water, through an interconnecting network of the assembly and to provide irrigation and watering to plants or like vegetation.

1. Field of the Invention
The present invention relates generally to underground staking devices and, more particularly, to a novel type of turf staking device which is capable of being secured in an upwardly extending fashion from a selected underground location and is further capable of supporting a plurality of individual framing elements in the construction of an above-ground frame assembly.
2. Description of the Prior Art
Underground staking devices are well known in the art, the purposes for which traditionally have been to establish a secured ground position for attachment of a rope or cord. The most basic of such staking devices traditionally has been the large nail or spike which includes an elongate shaft portion and a flattened head portion, the spike being driven into the ground, usually at an angle, and providing a seating location between an upper end of the shaft and the flattened head for receiving a loop or cord.
More recent staking devices include such as is taught in U.S. Pat. No. 5,226,829, issued to Jones, which discloses a staking device capable of establishing a prolonged or permanent ground position at all times. The staking device of Jones discloses a longitudinal stake member which is attached to an open cylindrical housing member. A curved or hook-like member extends within the open cylindrical housing and permits the attachment of a cord or line as previously described. The staking device is further characterized by a pair of barbs which are capable of extending from the stake member in acute angle fashion such that the stake may be relatively easily driven into the ground, but may not be easily withdrawn in a reverse direction.
U.S. Pat. No. 5,349,775, issued to Mondares, teaches an adjustable ground-inserted fishing rod holder for supporting a fishing rod at a desired angle. An elongate stake portion is capable of being driven into the ground and further includes a pair of supports which are coupled to the stake and are capable of being adjusted to accommodate fishing poles of varying lengths. Measurement indicia is placed along a selected side of the stake and an optional oscillator assembly may also be provided for selectively oscillating an associated fishing pole.
Finally, U.S. Pat. No. 4,407,505, issued to Kendziorski, teaches a portable and collapsible practice gold flagstaff with stowable ground spike. The spike is capable of being held within a hollow tubular housing of the assembly in a storage position and is capable of being secured in an oppositely extending fashion from a weighted base portion in a second installed position so that it may be driven into the ground surface. The flagstaff is further provided as an elongate member which receives a flag portion at an upper end thereof.

Multi-purpose turf stake and combination turf stake and frame construction assembly


A semiconductor integrated circuit device is provided with a selector that selects a normal operation signal or a circuit diagnosis input signal depending upon a first-mode input signal. A first latch and a second latch selectively execute one of (i) a scan mode for either holding or transmitting one of the normal operation signal and the circuit diagnosis input signal, selected by the selector depending upon a clock signal, and (ii) a long delay path function mode for transmitting a transmission signal irrespective of the clock signal, depending upon a second-mode input signal.

The present invention relates to a semiconductor integrated circuit device which has a design that facilitates testing the manufacturing state of a wafer to check whether the semiconductor integrated circuit device satisfies a desired circuit performance based on a design standard.
Usually, from the viewpoint of improving the reliability in the operation of a semiconductor integrated circuit device, it is necessary to check a wafer in a manufacturing state of the semiconductor integrated circuit device to check whether the semiconductor integrated circuit device satisfies a desired circuit performance or not. As methods for performing such a test, there is known a method of adding a group of gate circuits (a long delay path) to the semiconductor integrated circuit device and a method of adding a scan path group, constructed based on what is called a design for testability, to the semiconductor integrated circuit device.
FIG. 4 is a diagram that shows a circuit construction of the above gate circuit group. This gate circuit group is constructed to have logic gates such as AND gates and OR gates connected in series of several hundred stages between an input buffer and an output buffer. Such a gate circuit group is located within a semiconductor integrated circuit device at a position where it operates independent of the operation of the circuits that achieve the primary functions of the semiconductor integrated circuit device. A test using this gate circuit group is carried out such that a desired signal is first input into an input terminal (IN), and propagation delay time of this signal is monitored when it is output from an output terminal (OUT). The circuitry is diagnosed based on this propagation delay time.
This test is based on the fact that logic gates (semiconductors) on the same semiconductor integrated circuit device, or the same wafer, have substantially the same characteristics, and therefore, the circuit diagnosis of the gate circuit group can be equivalently applied to the diagnosis of the logic circuits that achieve the primary functions of the semiconductor integrated circuit device.
On the other hand, circuits that constitute a scan path group are designed so that they are built into the logic circuits that achieve the primary functions within the semiconductor integrated circuit device. The performance of the circuitry is diagnosed by verifying an output result corresponding to a predetermined scan signal that is input into the logic circuits (hereinafter to be referred to as a scan test). A multi-stage connection of scan flip-flop circuits is known as a representative example of the circuitry that forms the scan path group.
Generally, within a semiconductor integrated circuit device that has been designed to be built in with a scan path group, that is, within a scan-designed semiconductor integrated circuit device, there are disposed a plurality of scan flip-flops that input or output normal-operation input signals to be input during a normal operation or circuit-diagnosis input signals to be input for carrying out the test, at an input pre-stage and an output post-stage of sequential circuits or combination circuits (hereinafter to be collectively referred to as combination circuits) that achieve the primary functions of the semiconductor integrated circuit device.
The plurality of scan flip-flops disposed at the input pre-stage (hereinafter to be referred to as a flip-flop pre-stage section) are constructed such that, when the normal operation mode has been selected, a plurality of externally-applied normal signals are input in parallel to the flip-flop pre-stage section of the combination circuits, and so that, when the test mode has been selected, circuit diagnosis input signals are delivered in series to the flip-flop pre-stage section.
Similarly, the plurality of scan flip-flops disposed at the output post-stage (hereinafter to be referred to as a flip-flop post-stage section) are constructed such that, when the normal operation mode has been selected, a plurality of signals output from the combination circuits are input in parallel to the post-stage section, and that, when the test mode has been selected, circuit diagnosis input signals that have been delivered in series at the flip-flop pre-stage section are delivered in series to the flip-flop post-stage section.
Based on the above arrangement, during the normal operation mode, the scan path group can execute the primary input and output operations of the combination circuits. During the test mode, the scan path group can sequentially take out the output of the combination circuits obtained from the input of the circuit diagnosis input signals, from a predetermined scan flip-flop at the flip-flop post-stage section. Thus, it is possible to diagnose the combination circuits based on the result of this output.
FIG. 5 is a diagram that shows a circuit construction of the above-described scan flip-flop. This scan flip-flop consists of a selector 101, a first latch 102, a second latch 103, and an inverter G10 for inverting a clock signal T. The selector 101 selectively outputs a normal operation input signal D and a circuit diagnosis input signal SI, according to a mode changeover input signal SMC.
The selector 101 consists of an inverter G111 that inverts the mode changeover input signal SMC, an N-channel transmission gate N111 that receives the mode changeover input signal SMC from a control terminal (a gate) and receives the normal operation input signal D from one contact terminal (a source or a drain), and an N-channel transmission gate N112 that receives the output signal of the inverter G111 at a control terminal (a gate) and receives the circuit diagnosis input signal SI from one contact terminal (a source or a drain). The other contact terminal (a drain or a source) of the N-channel transmission gate N111 and the other contact terminal (a drain or a source) of the N-channel transmission gate N112 are connected with each other. The circuit diagnosis input signal SI or the normal operation input signal D is selectively output from the node between these contact terminals.
The first latch 102 receives the normal operation input signal D or the circuit diagnosis input signal SI output by the selector 101, holds the received signal and transmits it to the second latch 103 at the next stage, according to the clock signal T.
The first latch 102 consists of an N-channel transmission gate N121 that receives the clock signal T from a contact terminal (a gate) and whose one contact terminal (a source or a drain) is connected to an output terminal of the selector 101 as an input terminal of the first latch 102. The first latch 102 also has an N-channel transmission gate N122 that receives the output of the inverter G10 at a control terminal (a gate) and whose one contact terminal (a source or a drain) is connected to the other contact terminal (a drain or a source) of the N-channel transmission gate N121. The first latch 102 also has an inverter G121 whose input terminal is connected to the other contact terminal (a drain or a source) of the N-channel transmission gate N121 and whose output terminal is also an output terminal of the first latch 102. The first latch further has an inverter G122 whose input terminal is connected to the output terminal of the inverter G121 and whose output terminal is connected to the other contact terminal (a drain or a source) of the N-channel transmission gate N122.
The second latch 103 is a circuit that holds and outputs a signal output from the first latch 102 according to the clock signal T. The second latch 103 consists of an N-channel transmission gate N131 that receives the output of the inverter G10 from a control terminal (a gate) and whose one contact terminal (a source or a drain) is connected to an output terminal of the first latch 102 as an input terminal of the second latch 103. The second latch 103 also has an N-channel transmission gate N132 that receives the clock signal T from a control terminal (a gate) and whose one contact terminal (a source or a drain) is connected to the other contact terminal (a drain or a source) of the N-channel transmission gate N131. The second latch 103 also has an inverter G131 whose input terminal is connected to the other contact terminal (a drain or a source) of the N-channel transmission gate N131 and whose output terminal is also an output terminal of the second latch 103, that is, as a terminal for outputting an output signal Q of the scan flip-flop. The second latch 103 further has an inverter G132 whose input terminal is connected to the output terminal of the inverter G131 and whose output terminal is connected to the other contact terminal (a drain or a source) of the N-channel transmission gate N132.
The operation of the scan flip-flop will be now explained. First, when the logic level of the mode changeover input signal SMC is xe2x80x9cL(Low)xe2x80x9d, the N-channel transmission gate N111 is turned OFF and the N-channel transmission gate N112 is turned ON. As a result, the circuit diagnosis input signal SI is selectively output from the selector 101. In other words, the scan flip-flop is in test mode when the mode changeover input signal SMC of the logic level xe2x80x9cLxe2x80x9d is input.
When the logic level of the clock signal T is xe2x80x9cH(High)xe2x80x9d, the N-channel transmission gate N121 in the first latch 102 is turned ON. Therefore, the circuit diagnosis input signal SI output from the selector 101 is input into the inverter G121 through the N-channel transmission gate N121. The control terminal of the N-channel transmission gate N122 is supplied with a xe2x80x9cLxe2x80x9d level signal which is an inverted signal of the clock signal T of the logic level xe2x80x9cHxe2x80x9d. Therefore, the N-channel transmission gate N122 is turned OFF, and the output terminal of the inverter G122 is set to a release state. The output signal of the inverter G122 is not input into the inverter G121. In other words, the first latch 102 transmits an inverted signal of the circuit diagnosis input signal SI to the second latch 103 in the next stage.
Similarly, when the logic level of the clock signal T is xe2x80x9cHxe2x80x9d, in the second latch 103, the control terminal of the N-channel transmission gate N131 is supplied with a xe2x80x9cLxe2x80x9d level signal which is an inverted signal of the clock signal T of the logic level xe2x80x9cHxe2x80x9d. Therefore, the N-channel transmission gate N131 is turned OFF, and the signal output from the first latch 102 is not transmitted to the inverter G131. On the other hand, the control terminal of the N-channel transmission gate N132 is input with the clock signal T of the logic level xe2x80x9cHxe2x80x9d. Therefore, the N-channel transmission gate N132 is turned ON, and the signal output from the inverter G131 is inverted by the inverter G132, and is then recursively input into the inverter G131.
In other words, the second latch 103 holds a signal of the logic level that had been output from the inverter G131 until immediately before the logic level of the clock signal T becomes xe2x80x9cHxe2x80x9d. In this state, the signal of the logic level held by the inverters G131 and G132 of the second latch 103 is output as the output signal Q.
When the logic level of the clock signal T is xe2x80x9cLxe2x80x9d, the N-channel transmission gate N121 in the first latch 102 is turned OFF. Therefore, the circuit diagnosis input signal SI that has been output from the selector 101 is not input into the inverter G121. On the other hand, the control terminal of the N-channel transmission gate N122 is supplied with a xe2x80x9cHxe2x80x9d level signal which is an inverted signal of the clock signal T of the logic level xe2x80x9cLxe2x80x9d. Therefore, the N-channel transmission gate N122 is turned ON, and the signal output from the inverter G121 is inverted by the inverter G122, and is then recursively input into the inverter G121. In other words, the first latch 102 holds the signal of a logic level that had been output from the inverter G121 immediately before the logic level of the clock signal T became xe2x80x9cLxe2x80x9d.
Similarly, when the logic level of the clock signal T is xe2x80x9cLxe2x80x9d, in the second latch 103, the control terminal of the N-channel transmission gate N131 is supplied with a xe2x80x9cHxe2x80x9d level signal which is an inverted signal of the clock signal T of the logic level xe2x80x9cLxe2x80x9d. Therefore, the N-channel transmission gate N131 is turned ON. The signal output from the first latch 102, that is, the signal of the logic level held by the inverters G121 and G122 of the first latch 102, is input into the inverter G131 through the N-channel transmission gate N131.
In the same state, the control terminal of the N-channel transmission gate N132 is input with the clock signal T of the logic level xe2x80x9cLxe2x80x9d, and the N-channel transmission gate N132 is turned OFF. Therefore, the output terminal of the inverter G132 is set to a release state, and its output signal is not input into the inverter G131. In other words, the second latch 103 outputs the inverted signal of the signal output from the first latch 102, as the output signal Q of the scan flip-flop.
As explained above, in the test mode operation of the scan flip-flop, when the clock signal T has a logic level xe2x80x9cLxe2x80x9d, the first latch 102 latches the inverted signal of the circuit diagnosis input signal SI at this point of time and inputs this inverted signal to the second latch 103. When the clock signal T changes to the logic level xe2x80x9cHxe2x80x9d, the second latch 103 latches and outputs the inverted signal of the signal that has been output from the first latch 102 at this point of time. Therefore, the scan flip-flop outputs the circuit diagnosis input signal SI by delaying the output by one cycle time of the clock signal T.
When the mode changeover input signal SMC has a logic level xe2x80x9cHxe2x80x9d and the scan flip-flop is in the normal operation mode, the first latch 102 and the second latch 103 carry out a operation similar to that described above respectively, except that the normal operation input signal D is output from the selector 101 in place of the circuit diagnosis input signal SI. Therefore, this explanation will be omitted.
As explained above, the conventional semiconductor integrated circuit device facilitates the diagnosis of the circuit performance and improves the reliability of the operation, according to the design for facilitating the test based on the addition of the gate circuit group and the introduction of the scan path group such as the scan flip-flops.
However, the gate circuit group and the scan path group have different test objects as explained above. Therefore, when it is desired to carry out both the monitoring of the propagation delay time in the logic gate and the scan test of the combined circuits, it has been necessary to design the semiconductor integrated circuit devices such that the circuits for achieving the monitoring and the scan test are separately built into the semiconductor integrated circuit devices.
In recent years, along with the increase in the levels of functions and increase in the processing speed of the semiconductor integrated circuit devices, there has been a tendency that the combined circuits and other logic circuits built into the semiconductor integrated circuit devices are becoming more complex. Therefore, the addition of the circuits necessary for the test brings about an increase in the scale of the circuits. Further, the increase in the number of electrode terminals (pads) has become unavoidable in order to implement the test.
It is an object of the present invention to provide a semiconductor integrated circuit device which can restrict an increase in the circuit scale and which can achieve both the monitoring of the propagation delay time and the test of functions.
In order to achieve the above object by solving the aforementioned problems, according to the present invention, there is provided a semiconductor integrated circuit device having a selector circuit that selects a normal operation signal to be input into the logic circuit during a normal operation mode and a circuit diagnosis input signal to be input into the logic circuit during a test mode, according to a first-mode changeover input signal, and a latch circuit that has a logic gate for inputting and holding or transmitting one of the normal operation signal and the circuit diagnosis input signal (hereinafter to be referred to as a transmission signal) that has been selected by the selector circuit, and that selectively executes a scan mode for either holding or transmitting the transmission signal according to a clock signal and a long delay path function mode for transmitting the transmission signal irrespective of the clock signal, according to a second-mode changeover input signal. Thus, the latch circuit constructed by the test facilitation design functions as a holder for the scan test and as a long delay path by utilizing the logic gates. As a result, it is possible to selectively execute the two kinds of circuit diagnosis test in one latch circuit.
Further, the latch circuit is equipped with at least one latch that has a logic gate for transmitting or holding the transmission signal, a first controller for transmitting or interrupting the transmission signal according to the clock signal when the second-mode changeover input signal shows the scan test mode and for transmitting the transmission signal to the logic gate when the second-mode changeover input signal shows the long delay path function mode, and a second controller for selectively controlling the transmission or the holding of the transmission signal in the logic gate according to the clock signal. The first controller selects the execution of the scan test or the long delay path function. When the scan test has been selected, the logic gates function as the holder for the scan test. When the long delay path function has been selected, the logic gates function as the long delay path. As a result, it is possible to selectively execute the two kinds of circuit diagnosis test in one latch circuit.
Further, first controller has at least one first transmission gate, and the transmission signal is transmitted to the logic gate through the first transmission gate, and the second controller has at least one second transmission gate, and the logic gate selectively controls the transmission and the holding of the transmission signal in the logic gate by ON/OFF controlling the second transmission gate based on the clock signal. The first controller controls the selection of the transmission of the transmission signal to the logic gate based on the first transmission gate, and the second controller controls the selection of the transmission or the holding of the transmission signal based on the second transmission gate. Therefore, it is possible to select either the scan mode or the long delay path function mode by suitably selecting the logic levels to be given to the first and second transmission gates.
Further, the first and second transmission gates are N-/P-channel transmission gates. N-/P-channel transistor gates are used for controlling the transmission or the holding of the transmission signal in the first controller and the second controller respectively. Therefore, it is possible to achieve a stable and secure transmission of the signal of the logic level xe2x80x9cHxe2x80x9d.
Further, the logic gate has a first inverter for inverting a signal transmitted through the first controller and outputting the inverted signal, a second inverter for inverting a signal output from the first inverter and inputting the inverted signal to the first inverter through the second controller, and a third transmission gate for interrupting an output signal of the second inverter from being input into the first inverter when the second-mode changeover input signal shows the long delay path function mode. When the second-mode changeover input signal shows the long delay path function mode, the third transmission gate interrupts the output signal of the second inverter from being recursively input into the first inverter, where the second inverter becomes valid only when the logic gate functions as the holder, and the first inverter becomes valid both when the logic gate functions as the transmitter and as the holder. Therefore, it is possible to avoid the collision of the signal generated at the input stage of the first inverter by interrupting the second transmission gate from being turned ON during the long delay path function mode.
Other objects and features of this invention will become apparent from the following description with reference to the accompanying drawings.

Scan flip-flop providing both scan and propagation delay testing


An electric motor drive control method includes deriving a target current from a target torque to apply electric current corresponding to the target current to an electric motor. When a rotation speed of the motor is in a predetermined speed region, including a zero rotation speed at which the target current for driving the motor allocated to the target torque is switched discontinuously, the target current corresponding to the rotation speed is obtained through a linear interpolation using the rotation speed and target currents at a traction side and a regeneration side allocated to the target torque such that the electric current corresponding to the target current is applied to the motor.

The present invention relates to an electric motor drive control method and apparatus.
An electric motor serves to drive a vehicle (traction) and apply a braking force to the vehicle (regeneration). Development of the vector control technique has allowed various types of electric motor control to be smoothly performed with precision. Recently, a three-phase AC motor such as a three-phase induction motor, a permanent magnet synchronous motor and the like has been employed to control the motor under a vector control. Japanese Patent Application Publication No. JP-A-2005-192341 discloses a permanent magnet synchronous motor structured to be mounted on a hybrid vehicle. Japanese Patent Application Publication No. JP-A-2006-14539 discloses a mode of the vector control with respect to the electric motor of the aforementioned type.
The permanent magnet synchronous motor is provided with a rotor equipped with a permanent magnet and a stator equipped with stator coils at a U-phase, V-phase and W-phase. In Japanese Patent Application Publication No. JP-A-2006-14539, the electric motor is connected to a drive control unit for the purpose of generating a drive motor torque serving as a torque of the drive motor or a generator torque serving as a torque of the generator. The control unit transmits pulse width modulation signals (PWM pulse) at the U-phase, V-phase and W-phase to an inverter. The inverter supplies the phase current, that is, the electric current at the U-phase, V-phase and W-phase to the respective stator coils so as to generate the drive motor torque and the generator torque.

Electric motor drive control method and apparatus


The present invention provides (1) curable polyamide monomers represented by the formula: R.sup.1 --A.sup.1 --B.sup.1 --A.sup.2 --B.sup.2 --A.sup.3 --R.sup.2 where R.sup.1 and R.sup.2 are radicals selected from the group consisting of maleimide, substituted maleimide, nadimide, substituted nadimide, ethynyl, and (C(R.sup.3).sub.2).sub.2 where R.sub.3 is hydrogen with the proviso that the two carbon atoms of (C(R.sup.3).sub.2).sub.2 are bound on the aromatic ring of A.sup.1 or A.sup.3 to adjacent carbon atoms, A.sup.1 and A.sup.3 are 1,4-phenylene and the same where said group contains one or more substituents selected from the group consisting of halo, e.g., fluoro, chloro, bromo, or iodo, nitro, lower alkyl, e.g., methyl, ethyl, and propyl, lower alkoxy, e.g., methoxy, ethoxy, or propoxy, and fluoroalkyl or fluoroalkoxy, e.g., trifluoromethyl, pentafluoroethyl and the like, A.sup.2 is selected from the group consisting of 1,4-phenylene, 4,4'-biphenyl, 2,6-naphthylene and the same where said groups contain one or more substituents selected from the group consisting of halo, e.g., fluoro, chloro, bromo, or iodo, nitro, lower alkyl, e.g., methyl, ethyl, and propyl, lower alkoxy, e.g., methoxy, ethoxy, or propoxy, and fluoroalkyl or fluoroalkoxy, e.g., trifluoromethyl, pentafluoroethyl and the like, and B.sup.1 and B.sup.2 are selected from the group consisting of --C(O)--N(H)-- and --N(H)--C(O)--, (2) thermoset polyamide compositions comprised of cured segments derived from monomers represented by the formula: R.sup.1 --A.sup.1 --B.sup.1 --A.sup.2 --B.sup.2 --A.sup.3 --R.sup.2 as described above, and curable blends of at least two of the polyamide monomers and (4) processes of preparing the curable polyamide monomers.

Liquid crystal polymers are recognized as having great potential for the development of new materials with exceptional physical and mechanical properties. In general, liquid crystal polymers consist of polymer chains containing anisotropic structural units (mesogenic groups) which may be incorporated into the polymer backbone, as pendent groups, or both. The mesogenic groups may be rod-like or disc-like in nature. Fibers, films, and molded plastics processed from the liquid crystalline state have shown outstanding properties.
Another desirable characteristic of such liquid crystalline polymers would be that they be thermosetting. Liquid crystal thermosetting polymers are known, e.g., the acrylic-terminated thermoset resins and precursors disclosed by Conciatori et al. in U.S. Pat. Nos. 4,440,945, 4,452,993, and 4,514,553, the epoxy-terminated thermoset resins and precursors disclosed by Muller et al. in U.S. Pat. No. 4,764,581, and the various difunctionally terminated materials disclosed by Dhein et al. in U.S. Pat. No. 4,762,901.
Another type of thermosetting resins utilizing end groups such as maleimide, nadimide and methyl nadimide are described in various patents such as U.S. Pat. Nos. 4,225,497, 4,550,177, 4,739,030, 4,661,604, 4,684,714, 4,851,495, and 4,851,501.
Accordingly, it is an object of this invention to provide curable polyamide materials including curable liquid crystalline polyamide materials.
Another object of this invention is to provide a process of preparing curable polyamide materials including curable liquid crystal polyamide monomers.
Yet another object of this invention is to provide curable blends of polyamide materials including curable liquid crystal polyamide materials.
It is a further object of this invention to provide thermoset polyamide compositions including thermoset liquid crystal polyamide compositions.
It is a still further object of this invention to provide thermoset polyamide compositions having a high heat resistance including thermoset liquid crystalline polyamide compositions having a high heat resistance.

The United States of America as represented by the United States Department of Energy


The systems and methods described herein relate to storing values, such as sketches, that represent time indexed data related to network traffic. The model may be indexed by multiple sets of keys and time range values. It is an advantage that the index is essentially repeated for different time intervals. Utilization of the sketches avoids prohibitively large amounts of network traffic from overwhelming the monitoring computing device(s). Further, the probabilistic representative accuracy of the sketches is dynamically configurable. The time indexed data may represent data traffic on a computer network. The time indexed data may be data packets sent on the network. In one or more embodiments the time indexed data may be sketches that represent and/or approximate the data packets. Further, it is contemplated herein that the accuracy of the sketches' representation may be dynamically configurable.

Current market solutions for identifying security risks on a computer network analyze text-based log information and aggregate this information into a system called Security Information and Management (SIEM) system. These logs are text-based summaries of the data sent on the network. These centralised logging systems generally leverage Relational Database Management Systems (RDBMS). As the size of the logs grows, the logs themselves are also abstracted and aggregated further to make the data efficiently processable.
Other solutions that process network packet captures (PCAPs) use point solutions (tools) that are generally grouped into the Digital Forensics/Incident response.


The invention relates to a clutch arrangement in radially nested design. Known in the prior art is a clutch arrangement which comprises a radial outer multiple disk clutch having outer disks and inner disks and a radial inner multiple disk clutch having outer disks and inner disks, where the radial outer multiple disk clutch and the radial inner multiple disk clutch have a common disk support, which supports the outer disks of the radial inner multiple disk clutch and the inner disks of the radial outer multiple disk clutch. According to the invention, a common endplate is provided for the radial inner multiple disk clutch and the radial outer multiple disk clutch. Alternatively or in addition, the invention provides that the common disk support has a hollow cylindrical section with a meander-like cross section, so that on the outer peripheral side an outer toothing is formed for the accommodation of an inner toothing of the inner disks of the radial outer multiple disk clutch and on the inner peripheral side an inner toothing is formed for the accommodation of an outer toothing of the outer disks of the radial inner multiple disk clutch.

Multiple clutches for motor vehicles are often classified by their type of friction partner as dry clutches or wet clutches, i.e., cooled by a liquid cooling medium. Multiple clutches, in particular double clutches, may also be classified by their arrangement. Particularly, in the case of wet double clutches, there is the radially nested design ("concentric arrangement"), in which the friction disks of a radial outer clutch, when brought into friction lock, surround the corresponding friction disks of a radial inner clutch, and the axially arranged series design, in which the friction disks of the clutches are arranged in series along a common axis of rotation ("parallel arrangement").
A multiple clutch in parallel design is disclosed, for example, in document EP 1 195 537 A1. Multiple clutches in radially nested design, to which the invention relates, are described for example in EP 0 758 434 B1, DE 101 11 202 A1, DE 102 31 405 A1, DE 102 22 933 A1, DE 203 10 015 U1, DE 102 03 618 A1, DE 102 23 892 A1, DE 100 04 186 A1 or DE 100 04 189 A1.
The clutches proposed in these documents comprise a first clutch, below referred to as a radial outer multiple disk clutch, with an outer disk support supporting at least one outer disk and with an inner disk support supporting at least one inner disk, as well as a second clutch, below referred to as a radial inner multiple disk clutch, with an outer disk support supporting at least one outer disk and with an inner disk support supporting at least one inner disk. The disks of the radial outer multiple disk clutch and the disks of the radial inner multiple disk clutch rotate about a common axis of rotation. There, the disks of the radial outer multiple disk clutch are located radially outside the disks of the radial inner multiple disk clutch, while the disks of the radial outer multiple disk clutch and the disks of the radial inner multiple disk clutch are as a rule located in the same axial section, so that the disks of the radial outer multiple disk clutch reach radially around the disks of the radial inner multiple disk clutch. Each clutch comprises an actuating piston, by means of which the disks of the respective clutch can be brought into friction lock. Each actuating piston is guided axially displaceable by a corresponding cylinder. The cylinder and actuating piston in each instance form a so-called pressure chamber, which by means of a fluid, in particular a hydraulic fluid, can be acted on by a pressure, in order to bring the disks into (or out of) frictional engagement. Frequently, a so-called equalizing piston is in addition assigned to one or both actuating pistons. The actuating piston(s) and equalizing piston form a so-called equalizing chamber. This equalizing chamber may likewise be supplied or filled with a fluid, i.e., for example with hydraulic fluid. The fluid found in this equalizing chamber serves (largely) to equalize any superelevation of pressure in the pressure chamber due to centrifugal force occurring with increasing speed. In some cases, under- or overcompensation of this pressure superelevation may even be desirable.
The clutches proposed in the documents mentioned above are optimized with regard to a wide variety of parameters. Therefore, some of them differ considerably in the space they require for installation.
In most of the multiple clutches presented and described in the printed sources mentioned above, in particular double clutches, the individual disk supports are designed as separate structural parts. In the right-hand half of FIG. 1 of EP 0,758,434 B1, from which the invention starts out, there is shown a double clutch arrangement in radially nested design, in which the radial outer multiple disk clutch and the radial inner multiple disk clutch have a common disk support, which supports the outer disks of the radial inner multiple disk clutch and the inner disks of the radial outer multiple disk clutch. The common disk support thus results in double utilization, namely as inner disk support of the radial outer clutch and as outer disk support of the radial inner multiple disk clutch.
Both the outer disk support of the radial outer multiple disk clutch and the outer disk support of the radial inner multiple disk clutch support steel disks. The inner disk supports of both clutches support so-called friction disks, which are provided on both faces with a friction lining. For application of the counterforce to the respective disk package upon actuation of the clutches by the actuating piston assigned in each instance, endplates are provided, which close off or support the disk package on the side opposite to the respective actuating piston. These endplates are made of steel disks in both clutches, which are supported by the respective outer disk support and which are stop-limited by a safety ring.
Although each of the clutches has basically proven its worth for the respective application described in the above-mentioned printed sources, a need for improvement still exists.
The object of the invention, therefore, is to keep the space required for installation as small as possible, to keep the number of components necessary for making the clutch arrangement small and to make manufacture as simple as possible.

Clutch arrangement having a radially nested design


A hood support for a vehicle having a hood moveable between open and closed positions is provided. The hood support includes a spring assembly disposable between the vehicle hood and another portion of the vehicle. The spring assembly is moveable into an extended position to accommodate movement of the hood into the open position and moveable into a compressed position to accommodate movement of the hood into the closed position. The hood support further includes a lock tube surrounding a portion of the spring assembly and moveable relative to the spring assembly. The lock tube is selectively actuatable between a locked position, wherein the lock tube secures the spring assembly in the extended position, and an unlocked position, wherein the spring assembly is permitted to be displaced into the compressed position.

Conventional heavy duty trucks have a large engine covering hood which tilts about a transverse pivot point located above the bumper to expose the engine for servicing. Although commonly made of lightweight materials, these hoods are nevertheless cumbersome to handle in part because of their heaviness and the relatively long moment arm between the center of gravity of the hood and the pivot axis. For example, the mass of the hood makes arresting its movement toward either the open or closed position a challenge.
A hood tilt assist mechanism is often disposed between the hood and a portion of the vehicle to slow the hood when it is moved into either the open or closed position. The hood tilt assist mechanism normally includes a counterbalancing device to control the movement of the hood, thereby assisting the user. The counterbalancing device may be an extension or compression spring, a cable, a shock-absorber, a gas spring, etc.
In addition to the hood tilt assist mechanism, the vehicle may also include an automatic locking device that secures the hood in the open position to prevent inadvertent closure of the hood and avoid injuring the operator. However, including a locking device separately from the hood tilt assist mechanism increases the number of assemblies within the truck. Moreover, many automatic lock designs include multiple moving parts, which increase assembly time and decreases production. Additionally, use of multiple moving parts within a lock causes the lock components to wear quickly and fail over time.
Thus, it is desired to provide a hood tilt assist mechanism having a simplified automatic locking system integrated therewithin.


A wheel lift head assembly is pivotally mounted adjacent the rear end of a truck frame and is hydraulically operated for raising and lowering one end of a vehicle to be towed behind the truck. The wheel lift head assembly includes a crossbar member having a pair of hollow tubes pivotally mounted at opposite ends thereof with a pair of J-shaped wheel engaging members slidably mounted therein. A retainer is secured to an end of each J-shaped arm to prevent the withdrawal of the arm from the pivoted guide tube and a J-shaped arm provides engagement on opposite sides of the wheels of the vehicle to be towed to prevent lateral slipping of the wheels. A tiltable truck bed is mounted on the truck for pivotal movement between a horizontal position and an inclined position. At least one support post is provided at the rear of the tiltable truck bed for supporting the end of the tiltable truck bed on the ground and notches are formed in a forwardly facing surface of the support post. A locking member is pivotally mounted on the wheel lift head assembly for pivotal movement into and out of engagement with a selected notch for locking the wheel lift head assembly in the raised position.

The present invention is directed to a wheel lift head and more specifically to an adjustable J-shaped arm pivotally mounted thereon for engagement with a wheel of a vehicle.
The use of such wheel engaging lift devices is old and well known in the art. Most of the devices utilize a substantially T-shaped boom which is pivotally mounted on the rear end of a truck and provided with a pair of L-shaped arms pivotally mounted on the crossbar of the T-shaped boom for engagement with the wheels of a vehicle to be towed. Wheel engaging members may be hydraulically or manually operated and may be detachably mounted on the boom to facilitate the storage of the boom when not in use.
A typical example of a prior art wheel lift device is disclosed in the U.S. patent to Roberts et al. (U.S. Pat. No. 5,249,909). A T-shaped boom is extendible and retractable within a guide which is pivotally mounted on the truck and the crossbar of the T-shaped support is pivotally connected to the stem. The opposite ends of the crossbar are provided with an oversized sliding member which can be locked in place as needed to adjust the width of the crossbar. The tire engaging member is pivotally mounted on the end of each sliding member and locking means are provided for locking the tire support in the operative position or a storage position. An L-shaped tire brace is removably connected to the pivoted tire support and means are provided for locking the tire brace in an adjusted position for engaging different size tires.


A system and method are that includes a frame and a weapon mount on the frame that receives a weapon mock-up. The method includes setting up a trainer simulator including opening a transportable shipping container, wherein the transportable shipping container includes a coupled integrated common base frame and a universal mount tower. The method includes assembling a seat and pivoting the universal mount tower from a horizontal position to a vertical position wherein the universal mount tower auto-locks into position. The method includes delivering ground vehicle based weapon system training to a user using a continuum of human interface fidelities that includes a first, second and third fidelity, wherein the user is first delivered training at a first fidelity, and then at a second fidelity and then at a third fidelity. A system for a mission reconfigurable trainer simulation is also presented.

As understood in this document, a simulation system may be a physical structure in which real people and objects may move, change location, and possibly interact with each other. Further, these objects may interact with simulated people and objects, whose presence may be enacted via visual projections, audio emissions, or other means, typically in order to train for, prepare for, experience, analyze, or study real-life, potentially real-life, historical, or hypothetical situations, activities, or events. Simulations may be conducted for other purposes as well, such as educational or entertainment purposes, or for analyzing and refining the design and performance of mechanical technologies (such as transportation vehicles, weapons systems, etc.). The simulation as a whole may also be understood to include any technology that may be necessary or desirable to implement a simulation environment or simulation experience.
Realistic simulations of events may play a key role in many fields of human endeavor, from the training of police, rescue, military, and emergency personnel; to the development of improved field technologies for use by such personnel; to the analysis of human movement and behavior in such fields as athletics and safety research. Increasingly, modern simulation environments strive for a dynamic, adaptive realism, meaning that the simulation environment can both provide feedback to individuals in the environment and can modify the course of the simulation itself in response to events within the simulation environment.
Simulation training may be conducted using a variety of fidelities ranging from a physical embodiment of a particular gauge to a virtual reality rendering of that same gauge. The level of required fidelity to train an individual may be dependent upon the individual's level of training and the particular instrument, vehicle, or weapon in use. Further, different levels of fidelity may be required at different levels of training. The most effective level of fidelity that should be used in a simulation training system may be based on the tasks and skill being trained and the standard to which they may be evaluated.

Portable and toolless mission reconfigurable trainer


An improved structure of a roasting device is disclosed. The roasting device comprises a body, a bean-roasting chamber, a bean-entering cover, a front frame board, front cover, connecting elements, a rear cover, fan, filter, fan seat, controller, cooling device, and control panel. The roasting device allows the exhausted gas within the chamber to be forced out and the oil fume and particles are filtered. This will improve environmental pollution and the quality of the roasted bean is improved. The roasted beans are prevented from being squeezed out from the chamber and the speed of cooling of the roasted beans is increased.

(a) Field of the Invention
The present invention relates to a roasting device, and in particular, to a roasting device comprising a body, a bean-roasting chamber, a bean-entering cover, a front frame board, a front cover, connecting members, rear cover, fan, control panel, cooling device.
(b) Description of the Prior Art
Referring to FIGS. 1 and 2, there is shown a conventional roasting device comprising a body having a bean-roasting chamber 11 with a front cover 2. A fixed filtering board 3 and a bean-entering cover 4 are also provided to the chamber 11. The lower section of the chamber 11 is provided with manual control switch 6 and indicator 7. The lower section of the chamber 11 is also provided with a collecting tray 1000 for collecting residue in the course of bean roasting. The bottom section of the collecting tray 1000 is provided with a fan 100 for quench the roasted bean 8. A cooling device 15 with a cooling tray 10 provided at the cooling rod 101 is provided to the recessed region 12 of the body 1. The central of the recessed region 12 is provided with a motor 13 such that the axle 131 protruded out of the recessed region. There are drawbacks with respect to the conventional roasting device structure.
For instance, the front cover 2 cannot be rapidly removed or opened and the chamber 11 therefore cannot be cleaned effectively. Secondly the oil fume cannot be reduced and the fume will cause pollution. In other words the conventional roasting device does not provide with an effective filtering apparatus to filter polluted flume. Thirdly, the cooling tray 10 is not secured between the tray 14 and the recessed region 12 and therefore the rotating of the axle 131 will drive the tray 14 and the cooling tray 10. This will cause the cooling rod 101 to be ineffective and the roasted bean 8 cannot be stirred. In other words the cooling rod 101 can only be rotated but cannot stir the roasted bean 8. The cooling effect is not significant. Accordingly it is an object of the present invention to provide an improved structure of a roasting device, which mitigates the above drawbacks.
Accordingly, it is an object of the present invention to provide a structure of a roasting device, wherein the bean-roasting chamber can be quickly cleaned and the exhausted gas within the chamber can be forced out and the oil fume particles can be filtered. Thus, the environment pollution is minimized, and the quality of bean roasting can be improved.
The foregoing object and summary provide only a brief introduction to the present invention. To fully appreciate these and other objects of the present invention as well as the invention itself, all of which will become apparent to those skilled in the art, the following detailed description of the invention and the claims should be read in conjunction with the accompanying drawings. Throughout the specification and drawings identical reference numerals refer to identical or similar parts.
Many other advantages and features of the present invention will become manifest to those versed in the art upon making reference to the detailed description and the accompanying sheets of drawings in which a preferred structural embodiment incorporating the principles of the present invention is shown by way of illustrative example.


Thin film thickness measurement accuracy in x-ray reflectometry systems can be enhanced by minimizing scattering and beam spreading effects. A reflectometry system can include an x-ray tube that can produce an x-ray beam having any cross-sectional shape by scanning an electron beam in an appropriate pattern over a target in an x-ray tube. For example, the electron beam can be scanned over the target in a pattern having a non-unitary aspect ratio, so that the x-ray beam is generated from a source region having a non-unitary aspect ratio. The elongation allows the beam direction dimension to be substantially reduced, without causing overheating of the target. By blocking portions of the x-ray beam focused on the thin film and generating reflectivity curves in increments, the effects of scattering can be minimized.

1. Field of the Invention
The present invention relates to the area of non-destructive film thickness measurement. In particular, the present invention relates to a method and apparatus for improving the resolution and accuracy of x-ray reflectometry measurements of thin films.
2. Discussion of Related Art
Conventional thin film thickness measurement systems often use a technique known as x-ray reflectometry (XRR), which measures the interference patterns created by reflection of x-rays off a thin film. FIG. 1A shows a conventional x-ray reflectometry system 100, as described in U.S. Pat. No. 5,619,548, issued Apr. 8, 1997 to Koppel. X-ray reflectometry system 100 comprises an x-ray tube 110, an x-ray reflector 120, a detector 130, and a stage 140. A test sample 142 having a thin film layer 141 is held in place by stage 140 for the measurement process.
To measure the thickness of thin film layer 141, x-ray tube 110 directs a source x-ray beam 150 at x-ray reflector 120. Source x-ray beam 150 actually comprises a bundle of diverging x-rays, including x-rays 151, 152, and 153. X-ray reflector 120 reflects and focuses the diverging x-rays of x-ray beam 150 into a converging x-ray beam 160. Converging x-ray beam 160 includes x-rays 161, 162, and 163, which correspond to x-rays 151, 152, and 153, respectively. Typically, x-ray reflector 120 is a monochromator that ensures that only x-rays of a particular wavelength are included in converging x-ray beam 160.
Converging x-ray beam 160 is then reflected by thin film layer 141 as an output x-ray beam 170 onto detector 130. A detail view of this reflection is shown in FIG. 1B, with reflected x-rays 171, 172, and 173 corresponding to incident x-rays 161, 162, and 163, respectively. The x-rays undergo specular reflection, forcing angles A1, A2, and A3, of x-rays 161, 162, and 163, respectively, to be equal to angles A11, A22, and A33 of x-rays 171, 172, and 173, respectively.
As shown in FIG. 1C, the reflected x-rays are actually formed by reflections at both thin film surface 141a and thin film/substrate interface 142a. Using x-ray 162 as an example, the incident x-ray splits into a primary ray 172a and a secondary ray 172b at thin film layer 141. Primary ray 172a is reflected by thin film surface 141a at an angle A22. Secondary ray 172b is transmitted through thin film layer 141 and is reflected at thin film/substrate interface 142a, eventually exiting thin film surface 141a at angle A22.
Because both rays 172a and 172b exit thin film surface 141a at angle A22, the intensity of x-ray 172 is determined by the amount of constructive or destructive interference between the two rays. The two rays will be in phase if the difference between the optical path length of primary ray 172a and the optical path length of secondary ray 172b is equal to an integer multiple of the wavelength of x-ray 162. (Note that the optical path length of ray 172b includes the distance secondary ray 172b travels within thin film layer 141 multiplied by the index of refraction of thin film layer 141.) If rays 172a and 172b are in phase, the maximum intensity for x-ray 172 is achieved. However, if this optical path length difference is not an integer multiple of the wavelength of x-ray 162, then the two rays will be out of phase, thereby reducing the intensity of x-ray 172.
Note that the actual optical path length of secondary ray 172b within thin film layer 141 is controlled by the incident angle of x-ray 162. Therefore, the intensity of x-ray 172 is ultimately determined by incident angle A2. By simultaneously focusing a beam of x-rays spanning a range of incident angles at the thin film layer, a reflected beam of x-rays having varying intensities can be generated. Those varying intensities can be measured by sensor 130, as indicated in FIG. 1B. For example, reflected x-rays 171, 172, and 173 are shown impinging on a detector plane 130a of detector 130 at points 181, 182, and 183, respectively. Points 181, 182, and 183 typically comprise sensor pixels capable of measuring incident x-ray intensity. The known pixel positions allow detector 130 to correlate the intensities at points 181, 182, and 183 with incident angles A1, A2, and A3, respectively. By performing a similar correlation for all the pixels on detector surface 130a, a reflectivity curve can be derived for thin film layer 140. An example reflectivity curve is shown in FIG. 2. By measuring the fringes in the reflectivity curve, the thickness of thin film layer 140 can be determined, as described in U.S. Pat. No. 5,619,548.
However, accuracy of conventional x-ray reflectometry systems can be severely limited by problems associated with x-ray scattering and spreading at the thin film surface. For example, FIG. 3 shows a detail view of x-ray reflectometry system 100, with incident x-rays 164 and 165 being reflected by thin film layer 141. X-ray 164 has an incident angle A4 and is reflected at an angle A44 as x-ray 174. In accordance with the law of specular reflection, angle A4 is equal to angle A44. X-ray 165 has an incident angle A5, and theoretically would be reflected at an angle A55 as x-ray 175r, where angle A55 is equal to angle A5. Because angle A4 is different from angle A5, x-rays 174 and 175r would ideally impinge on detector surface 130a at points 184 and 185, respectively. However, scattering caused by imperfections in the surface of thin film layer 141 can result in a portion or all of the incident x-rays parallel to x-ray 165 scattering off as x-ray 175s. X-ray 175s leaves the surface of thin film layer 141 at an angle A5s (which is not equal to incident angle A5). If angle A5s happens to be equal to angle A44, both x-rays 175s and 174 will impinge on detector surface 130a at point 184, thereby corrupting the intensity measurements at both points 184 and 185. Scattering is most likely to occur for x-rays having incident angles near the "critical angle" where total external reflection takes place.
The accuracy of conventional x-ray reflectometry systems is further degraded by problems associated with x-ray beam spreading. For example, FIG. 4A depicts the interface between x-ray beam 160 and thin film layer 141 where an illuminated spot B (i.e., the spot formed by the intersection between thin film layer 141 and x-ray beam 160) is formed on thin film surface 141a. Compared to a cross-section A at the most tightly focused portion of x-ray beam 160, illuminated spot B is significantly elongated in the beam direction. FIG. 4B shows cross-section A of x-ray beam 160 overlaid onto illuminated spot B. Conventional x-ray tubes produce an approximately circular x-ray beam, as indicated in FIG. 4B. Accordingly, the height H1 and width W1 of cross-section A are the same (i.e., unitary aspect ratio). In contrast, illuminated spot B is significantly distorted as it spreads across thin film surface 141a, and so has a length L2 and a width W2 at its largest dimensions. In a direction perpendicular to the beam direction and parallel to thin film surface 141a (sometimes referred to as the "neutral axis"), width W2 of illuminated spot B is increased slightly from width W1 of beam cross-section A. However, along the beam direction, height H1 of beam cross-section A is translated into a significantly greater length L2 of illuminated spot B. This disparity in x-ray beam height and illuminated spot length increases as the incident angle of the incoming x-ray beam decreases, and so is particularly problematic for the grazing-angle x-ray beams required in x-ray reflectometry. For example, at an incident angle of 0.5 degree, the length of the illuminated spot is roughly 100 times greater than the diameter of the x-ray beam.
Because of this lengthening of the illuminated spot, the resolution of conventional x-ray reflectometry systems can be degraded in two main ways. First, the increased illuminated spot size increases the chances that irregularities in the surface of the thin film will lead to scattering of the incident x-rays. Second, the larger spot size can allow reflections of x-rays having different incident angles to impinge on the same point on the detector. For example, if an x-ray reflects from the thin film layer at a point farther from the detector surface than an x-ray having a larger angle of incidence, both reflected x-rays could converge at the same pixel on the detector surface, thereby improperly skewing the measured results. This "overlapping" reflection becomes progressively more prevalent as the spreading of the illuminated spot increases, and can ultimately prevent any measurement of the thin film layer thickness. Note that the increase in illuminated spot width does not present a problem since the key reflection and intensity measurements are all along the beam direction.
In addition, it is desirable in semiconductor manufacturing to measure in as small a region as possible. It is especially desirable to measure within the scribe line (i.e., the region between active integrated circuits), which is usually less than 100 μm wide. Furthermore, even within the scribe line, space is very valuable and so it is desirable to limit the length of the measurement spot within the scribe line. The scribe line may contain patterned regions used for other types of tests, and the x-ray reflectivity measurement is best done on an unpatterned region. It is therefore desirable that the measurement be made in as small a region as possible, ideally in a region less than 100 μm×100 μm.
Therefore, it is desirable to reduce the illuminated spot size at a measurement location in an x-ray reflectometry system. However, reducing the x-ray beam diameter in conventional x-ray tubes can be difficult. X-rays are produced by aiming a high-energy electron beam (e-beam) at a metal target. This electron bombardment causes the target atoms to emit x-rays, but also significantly heats the exposed portion of the target. Since the energy level of the electrons in the e-beam must remain at a specific level to cause the target atoms to emit the desired x-rays, reducing the cross-sectional area of the e-beam increases the energy flux at the exposed portion (source spot) of the target. This in turn increases the required rate of heat conduction away from the source spot to prevent overheating. Therefore, the minimum size of the e-beam is constrained by the thermal conductivity of the target material surrounding the perimeter of the source spot.
Accordingly, it is desirable to provide an x-ray reflectometry system that minimizes the effect of beam spreading at a measurement location while maintaining sufficient x-ray flux at the measurement location.

X-ray reflectivity system with variable spot