A stator winding has a plurality of conductor members forming coil ends, and each of the conductor members of the coil ends is hardened and heat treated to have hardness which changes along the length of conductor members. Therefore, the stiffness of the coil ends changes and resonant vibration of the stator can be reduced.

1. Field of the Invention
The present invention relates to a rotary electric machine driven by an internal combustion engine which is mounted in a vehicle such as a passenger car, a truck, or boat.
2. Description of the Related Art
As noise has been reduced, requirements for reducing noise of engine accessories has become severe. For example, reduction in noises of an alternator, which always operates while the vehicle is running, is strongly needed. Because the alternator is also required to reduce the weight by reducing the thickness of the housing, which may increase magnetic vibrations, the noise reduction of the alternator has been very difficult.
In general, the magnetic noise is generated when magnetic change in the gap between a stator and a rotor vibrates the stator core, windings and frames supporting the stator core to make an air wave of condensation and rarefaction. It is well known that if the weight of the stator increases, the noises can be reduced.
JP-B-5-50969 proposes to suppress the magnetic vibration of the stator by increasing stiffness of the aluminum frame supporting the stator. However, the aluminum frame can not increase stiffness of the stator directly, and the effect is limited.
JP-A-62-225140 proposes to form a variety of magnetic reluctances in the stator core to moderate the vibration frequency generated in the operation, thereby reducing the magnetic noise. This does not reduce the vibration amplitude, and may vibrate various parts surrounding the alternator. Thus, there was no effective structure for reducing the magnetic noise .
The magnetic vibration of the stator may be generated due to resonation although the amplitude of the vibration is rather small. Such vibration may be transmitted to portions of the stator winding extending from the stator core, which amplify noises.


An aspect of the present disclosure relates to a fluid bearing having an adjustable effective surface area and a method of adjusting the load carrying capacity of a fluid bearing. The fluid bearing may include a bore defining a central longitudinal axis and lubricating fluid provided within the bore. The fluid bearing may also include a bearing including a bearing surface, wherein at least a portion of the bearing is positioned within the bore. An adjustable effective bearing surface area may also be provided. The method includes adjusting effective bearing surface area of the bearing.

Fluid bearings may be designed to provide hydrodynamic load bearing capability across a range of operating conditions. However, the wetted-load carrying area of the bearing, for example, may be of generally fixed geometry. Because the load-carrying capacity of the bearing may be proportional to the bearing surface area, the bearing may effectively be overdesigned for certain operating conditions where the instantaneous load bearing capacity may be above the actual load at the time. Consequently, at operating conditions where the bearing capacity may be higher than the actual load, the carrying area and, therefore, viscous drag of the bearing may be higher than that which would occur for a bearing designed to accommodate the actual load.

Fluid bearings with adjustable frictional load characteristics


An improved filtering device for aquarium tanks and artificial ponds mainly comprises a water injector which is made up of a top cover plate and a water injector base, a multi-layered filtering member and an external shield cup which is used to contain the filtering member with appropriate space wherein the edge of the top cover plate is made to be a thick edge which has an annular slot for an "O" shaped seal washer to be placed on. When the top cover plate and the external shield cup are put together, the thick edge is covered up inside the external shield cup, allowing the "O" shaped seal washer to seal off the internal rim of the external shield cup. The top cover plate further comprises a water inlet and a water discharge switch units connecting to the aquarium tank or the artificial pond, a movable lid which is located in a position corresponding to the top of the motor housing, an air discharge valve which corresponds to an air discharge trough of the injector base, a sealed motor chamber which forms with the top cover plate as a one piece body is located on the water injector base, attached to the sealed motor chamber are dual air discharge troughs, a main water inlet pipe and a main water discharge pipe.

(a) Field of the Invention
The present invention relates to an improved structure of a filtering device for an aquarium tank or an artificial pond. More specifically, the present invention relates to a water filtering device having a structure with multi-layered filtering, water cooled motor, water inlet/outlet flow restriction device and a special device in which the contaminated air in the recirculated water can be discharged.
(b) Description of the Prior Ar
Water filtering devices for aquarium tanks are in general designed for small size tanks because the filtering volume is limited. In fact most of these filtering devices are merely processing the fish excretion and the waste foods in the tank. Theses useless material are being trapped in the filtering cartridges in the tank while the water is being circulated. This kind of filtering technique is inefficient and the water cannot be purified.

Filter device for aquarium tanks or artificial ponds


The simultaneous paging method in the wireless local loop system in accordance with the present invention comprises the steps of rouging a simultaneous paging code from a transmitting terminal to a simultaneous paging processing system by a base station controller and a simultaneous paging automated response system, receiving the simultaneous paging code and verifying a service grade of the transmitting terminal and sending a ring signal to a receiving terminal based on the verification process. The present allows the simultaneous paging or the multi-user communication between subscribers of the wireless communication system so that the end-user can conveniently use the system in occasions such as a meeting between many people or the simultaneous paging between the terminals. Furthermore, since the simultaneous paging is performed only in the designated base transceiver station, the communication quality of the wireless local loop system is not affected and the overall wireless local loop system performance is enhanced.

1. Field of the Invention
This invention relates to a wireless local loop system. More particularly, the present invention relates to a method and an apparatus for a simultaneous paging in the wireless local loop system to allow a simultaneous paging between terminals connected to the wireless local loop system or communication between multiple users by utilizing the traffic channel of a designated base transceiver station.
2. Description of the Prior Art
In general, the wireless local loop system furnishes the services, such as a voice, data and a fax, to a subscriber located in a remote area where the wiring establishment is difficult by using the wireless loop. Unlike a cellular communication system or a PCS (Personal Communication Services), the characteristic of this system is that it is for immobile user services, and not mobile user services. Therefore, although the system may not have functions such as a roaming and a hand-over of the mobile communication system, it is capable of furnishing various additional services since the traffic channel and the control channel between the switchboard and the terminal are provided.
FIG. 1 illustrates the block diagram of the conventional wireless local loop system.
Referring to FIG. 1, the conventional wireless local loop system comprises a terminal 100axcx9c100n, a base transceiver station 101axcx9c101n which confirms the position of terminals 100axcx9c100n and exchanges the signal, a base station controller 102 which controls the traffic channel and the control channel of the base transceiver station 101axcx9c101n, a voice mail system 103 which processes the transmission, the accumulation and searching the digitized voice signal of terminals 100axcx9c100n and a public switched telephone network (PSTN) 104 which communicates with the base station controller 102 and the wired subscriber 105.
FIG. 2 is a flow chart illustrating the multi-user communication method in the conventional wireless local loop system.
Referring to FIG. 2, when a transmitting terminal calls an arbitrary receiving terminal (step 201), a specified response signal is sent out by a receiving terminal and then the second receiving terminal is called (step 202). The three-user communication between the transmitting terminal and two receiving terminals is established when the response signal is transferred from the second receiving terminal (step 203).
The above described step 202 and step 203 can be repeatedly performed, and thus the multi-user communication among the affiliated terminals 100axcx9c100n in the wireless local loop system is possible.
However, one to the disadvantages of the multi-user communication method in the conventional wireless local loop system is that, to initiate the simultaneous paging or multiple users communication, the telephone number of a desired receiving terminal must be individually dialed by operating the terminal buttons. As a result, the conventional method has an inconvenience of having to individually operate the keys of the terminal and a time-consuming problem.
Moreover, when the simultaneous paging is made to the receiving terminal moved to the scope of another base transceiver station, the communication quality of overall wireless local loop system is deteriorated due to the occupancy of a channel used of another base transceiver station by the roaming receiving terminal.
The object of the present invention is to overcome the disadvantages of the wireless local loop system of the prior art. It is the object of the present invention to provide a method and an apparatus for a simultaneous paging in order to quickly and conveniently process the multi-user communication within the terminals affiliated to the wireless local loop system by using the traffic channel of the specified station.
These and other objects are satisfied by a method for the simultaneous paging comprising the steps of: routing a simultaneous paging code from a transmitting terminal to a simultaneous paging processing system by a base station controller and a simultaneous paging automated response system; receiving the simultaneous paging code and verifying a service grade of the transmitting terminal; and delivering a ring signal to a receiving terminal based on the verification process.
Other objects of the invention are satisfied by the method for the simultaneous paging comprising the steps of: transmitting the simultaneous paging service signal from the transmitting terminal to the base station controller; transmitting an automated response message from the simultaneous paging automated response system to the transmitting terminal based on a signal of the simultaneous paging service; transmitting the simultaneous paging code from the transmitting terminal to the simultaneous paging automated response system in accordance with the automated response message; and transmitting the simultaneous paging code from the simultaneous paging automated response system to the simultaneous paging processing system based on the simultaneous paging code.
Other objects of the invention are satisfied by the method for the simultaneous paging comprising the steps of checking whether or not the received simultaneous paging code has been registered and transmitting terminal is the one which the simultaneous paging code has been assigned to.
Other objects of the invention are satisfied by the method for the simultaneous paging comprising the steps of verifying the location of the receiving terminal by the base station controller based on the simultaneous paging code; transmitting the message requesting delivery of the ring signal from the simultaneous paging processing system to the base station controller upon a permission granted via the verification process; and transferring the ring signal from the base station controller to the receiving terminal in accordance with the message requesting delivery of the ring signal.
Also, other objects of the invention are satisfied by the apparatus for the simultaneous paging of a wireless local loop system comprising multiple terminals; a base transceiver station which confirms the position of terminals and exchanges the signal; a base station controller which controls the traffic channel and the control channel of the base transceiver station; a voice mail system which processes the transmission, the accumulation and searching the digitized voice signal of terminals; a simultaneous paging automated response system, which is connected to the base station controller, detects the simultaneous paging message transferred from the transmitting terminal among the multiple terminals and sends the corresponding response message back to the transmitting terminal; a simultaneous paging processing system, which is connected with the simultaneous paging automated response system and the base station controller, allows the multi-user communication between the transmitting terminal and the receiving terminal among the multiple terminals by processing the simultaneous paging message sent by the simultaneous paging automated response system; and a public switched telephone network which connects the base station controller to the general wired subscriber.
Other features and advantages of the present invention will be readily apparent by reference to the following detailed description and accompanying drawings.

Method and apparatus for simultaneous paging of wireless local loop system


The present invention discloses a pixel unit, a pixel array structure and a display device, to solve the problem that horizontal stripes may occur between adjacent rows in a conventional pseudo dual-domain pixel display. The pixel unit of the present invention comprises a first pixel unit and a second pixel unit arranged adjacent to each other and have a shape of a parallelogram. A long edge direction of the first pixel unit is consistent with a short edge direction of the second pixel unit, or a short edge direction of the first pixel unit is consistent with a long edge direction of the second pixel unit. The first pixel unit and the second pixel unit are driven by different thin film transistors, so that electrode domain inclination directions of the pixel units in adjacent rows are alternate to avoid the occurrence of horizontal stripes when the pseudo dual-domain display is performed.

A conventional liquid crystal display comprises a multitude of pixel units arranged in a matrix and a drive circuit driving the pixel units. Deflection of liquid crystal molecules is achieved by varying an electric field in a liquid crystal layer to realize a display effect.
In order to improve the display effect, multi-domain display technology has been widely used, where a multi-domain pixel structure is designed in a pixel in the existing multi-domain display, or in order to avoid the color cast problem caused by the multi-domain design in one pixel, different domain directions are designed in adjacent pixels to realize a pseudo multi-domain pixel structure.
FIG. 1A is a schematic diagram of a structure of an existing pixel unit, and FIG. 1B is a schematic diagram of an existing pixel array structure. As shown in FIG. 1A, a pixel unit in an existing pseudo dual-domain pixel structure comprises a first pixel unit 101 and a second pixel unit 102, where the two pixel units are driven by different thin film transistors, and the oblique line direction A-A′ and the oblique line direction B-B′ in the figure respectively represent domain inclination directions in two adjacent pixel units. As can be seen from FIG. 1A, the domain inclination directions in the two pixel units are different, and the domain inclination directions in the same pixel unit are consistent. After the pixel array structure of FIG. 1B is formed by the pixel units shown in FIG. 1A, the domain inclination directions in the pixel units in the same row direction are the same, and pixel units in two adjacent rows have different domain inclination directions, for example, as shown in FIG. 1B, pixel units in the first row direction are formed by the first pixel units 101, pixel units in the second row direction are formed by the second pixel units 102, pixel units in the third row direction are formed by the first pixel units 101, and the rest can be done in the same manner that domain inclination directions of pixel units in two adjacent rows are different, so that the domain inclination directions of the pixel units at the junction of the adjacent rows are opposite, the display states of the adjacent rows are different when images are displayed, where one is dark and the other is bright, and horizontal stripes may occur at the junction of two adjacent rows.

Pixel unit, pixel array structure and display device


A hair coloring applicator has an applicator body having a top surface and a bottom surface. A neck receiving bore in the bottom surface is adapted to engage a neck of a container. The hair coloring applicator further includes a plurality of solution application prongs, a plurality of comb elements, and a plurality of distribution brushes that extend upwardly from the top surface. A plurality of solution application ducts communicate between the neck receiving bore and a proximal ends of each of the plurality of solution application prongs.

1. Field of the Invention
This invention relates generally to applicators for applying a fluid, and more particularly to a hair coloring applicator for coloring a user's hair.
2. Description of Related Art
The prior art includes many devices for applying a hair coloring agent to a user's hair. In common practice, the coloring agent is mixed with a hydrogen peroxide containing compound, applied to a comb, and combed into the user's hair. Other devices include mixing chambers with injector elements for injecting the mixture into the user's hair, or onto a comb. Most of the prior art devices commonly used in the industry cannot be used by the user to apply the agent to his or her own hair, but require the assistance of a professional.
Other specialty devices have also been developed to assist a user in applying the agent to his or her own hair. However, these devices are often complicated, battery powered devices that are difficult to use. Rijskamp, U.S. 2005/0092340, teaches a battery powered device for applying a hair dye to a user's hair. The device includes a base part, an applicator which is connected to an additive reservoir, and has at least one outlet opening for applying additive to the hair during operation. The applicator includes a hair parting element for parting the hair during operation. The hair parting element has a substantially wedge-shaped cross-section with a tip extending practically in the operating direction. The outlet opening is positioned behind the tip, as viewed in the operating direction.
The Rijskamp patent application is generally similar in both structure and function to the present application; however, there are important differences between the two devices. The Rijskamp device includes a wedge-shaped hair parting element, rather than the comb elements used for grasping the hair in the present invention. There is also a difference in the structure of the elements that trail the injection conduit, with the present applicator utilizing a brush structure rather than the prongs used in the Rijskamp device. Furthermore, the Rijskamp device includes an internal reservoir for containing the hair coloring solution, and an electric motor for dispensing the hair coloring solution. Not only does this require the device to be filled and periodically emptied and cleaned, it also requires a motor for dispensing the solution, and batteries to power the motor. The present invention requires none of these elements, but utilizes the container of the cleaning solution both for storage of the solution and for powering the dispensing of the solution.
Kajgana, U.S. Pat. No. 6,062,230, teaches a tint brush with a color distributor, the brush being adapted to be screwed onto a connection pipe with a main tinter body. A free flow of hair dye mixture from the container is enabled by squeezing the container or by using a pump provided in the container in an alternative embodiment. A collector area defined in the main tinter body collects dye mixture wherefrom the dye mixture is distributed with the aid of a flow regulator and a plurality of radial exit bores which define, on their ends, funnel-like or shaped openings that open in tangent with a set of bristles connected to the tinter body. The flow regulator is suitably grooved so that the rate of dye mixture flowing through the main tinter body can be regulated from a minimum to a maximum amount by turning the flow regulator by 90 degrees.
Laporte, U.S. Pat. No. 6,286,518, teaches another device for applying dye to a user's hair. Similar to the Rijskamp device, the Laporte device includes a reservoir and a dispensing head, equipped with at least one row of application teeth, this head being connected to the reservoir by at least one channel for conveying the product to the base of the teeth. The head comprises at least one row of retention teeth extending along each row of application teeth and located at a distance from the latter, these teeth being shorter than the teeth; the space between one row of application teeth and an adjacent row of retention teeth, and the spaces between the teeth in these two rows, are such that they permit the product to be retained in them so that said space located between one row of application teeth and an adjacent row of retention teeth forms an intermediate product reservoir capable of receiving and temporarily retaining this product. Similar devices are shown in Sofer, U.S. Pat. No. 6,053,177, Sofer, U.S. Pat. No. 6,460,546, and Dhaliwal, U.S. Pat. No. 5,937,865.
Various devices that inject dye adjacent a brush-type element are shown in Harlan, et al., U.S. Pat. No. 5,289,835, Mehringer, et al., U.S. Pat. No. 5,333,627, Capristo, U.S. 2005/0211261, and Capristo, U.S. 2004/0221864. Other patents of interest include Ng, U.S. Pat. No. 5,146,936, Chu, et al., U.S. Pat. No. 6,145,513, Seen, U.S. D401,380, Pannozzo, et al., U.S. D442,331, and Seiichi, et al., JP9308519. All of the above-described references are hereby incorporated by reference in full.
The prior art teaches various methods and devices for dispensing a hair coloring solution. However, the prior art does not teach the particular combination of elements and features used in the present invention, particularly the combination of comb elements for grasping the user's hair, injector prongs and solution application ducts for injecting the hair coloring solution, and brush elements for brushing the hair coloring solution through the user's hair. Furthermore, the prior art does not teach utilizing the container of the coloring solution for dispensing the coloring solution into the user's hair. The present invention fulfills these needs and provides further related advantages as described in the following summary.


A method for preparing a nickel-zinc-copper or nickel-zinc alloy electroplating solution from at least one electroplating waste solution and/or at least one acidic leach solution of metal scrap containing nickel and/or zinc ions is disclosed. The method involves mixing two or more than two of solutions of the electroplating waste solutions and the acidic leach solutions, and optionally water, so that the ion concentrations of Ni, Zn, Cu, Fe, Cr and Pb of the resulting mixed solution are within the following ion concentrations:. 15 gdm.sup.-3 <Ni.sup.2+ <58 gdm.sup.-3, 28 gdm.sup.-3 <Zn.sup.2+ <44 gdm.sup.-3, 0<Cu.sup.2+ <1430 gm.sup.-3, 0<Fe.sup.2+ +Fe.sup.3+<5000 gm.sup.-3, 0<Cr.sup.3+ <1000 gm.sup.-3 and 0<Pb.sup.2+ <50 gm.sup.-3.

Various methods have been utilized to treat a waste solution containing metallic ions. Ion exchange, membrane separation, solvent extraction, electrowining and precipitation are typical treatments for a waste solution containing a low concentration of metallic ions. As to the treatment of a waste solution containing a high concentration of metallic ions such as an electroplating waste solution and a thick leach solution of metal scrap, a complicated process involving several of those treatments is generally required, and thus the operation cost thereof is relatively high. When the waste solution contains different metallic ions of high concentrations, the separations of metallic ions from the waste solution become more difficult. Therefore, an ideal process for treating the waste solutions should be able to minimize the steps of separations, and preferably recycle useful products therefrom.
Upon electroplating a single metal such as zinc and nickel metal, impurity control in the electroplating bath is severe C. Cachet, R. Wiart, "Zinc deposition and passivated hydrogen evolution in highly acidic sulphate electrolytes: depassitivation by nickel impurities", Journal of Applied Electrochemistry, 20 (1990), p. 1009-1014.; S. K. Gogia, S. C. Das, "The effect of Co, Cu, Fe and Fe during electrowining of nickel", Journal of Applied Electrochemistry, 21 (1991), p. 64-72!. However, there is no study on the effect of impurities on the newly developed nickel-zinc alloy electroplating A. Brenner, "Electrodeposition of Alloys", Two Volumes, Academic Press, Inc., New York (1963); R. Shula, S. K. Srivastava, and S. C. Srivastava, "The role of addition agents in the electrobath", Surface and Coating Technology, 28 (1986), p. 129-231!.

Method for repairing nickel-zinc-copper or nickel-zinc alloy electroplating solutions from acidic waste solutions containing nickel and zinc ions and electroplating thereof

Industrial Technology Research Institute


Pressure sensitive inks have selected pressure sensitivity designed for use as a pressure sensitive component of a pressure sensitive device. The ink of the device is formed of an elastic polymer binder with a filler therefor of semiconductive nanoparticles preferably uniformly dispersed in the binder.

Pressure sensitive inks are well known for use in a variety of applications where it is desirable to obtain various electrical outputs in response to varying pressure or force applied across a layer or laminate of the ink, and in particular for use in various tactile or pressure sensitive devices of the type described in U.S. Pat. Nos. 4,856,993, 4,734,034 and 5,033,291. Such devices are capable of creating electrical signals with a monotony dependent upon applied mechanical pressure or force. Such devices include pressure transducers, sensors, strain gauges and the like.
Prior art inks sometimes have difficulties in applications in pressure sensitive devices due to limitations on one or more of hysteresis characteristics, sensitivity, temperature stability, difficulty in manufacturing and lack of consistency and accuracy in general electromechanical properties. For example, temperature limitations can affect the ability of certain inks to be useful in certain pressure transducers. Many current inks are often capable of operation of temperatures only up to approximately 100.degree. F.; however, there are applications where stability at temperatures in excess of 1000.degree. F. is desirable or required.
Printed circuits, switches and the like often incorporate electrically conductive inks useful as conductors or resistors where pressure sensitive properties, i.e., variation in resistivity with applied pressure variation, is not identified or used. Some such devices may incorporate nanoparticle semiconductive material in elastic components to achieve conductivity.

Pressure sensitive ink means, and methods of use


This invention relates to a process for purifying a heteropolyacid which comprises: subjecting an aqueous solution comprising (i) the heteropolyacid and (ii) salt impurities to at least one liquid/liquid extraction step with an organic solvent, characterized in that the organic solvent comprises a dihydrocarbyl ether having at least 5 carbon atoms.

The present invention relates to a process for the purification of a heteropolyacid, and in particular, to a process for the purification of a silicotungstic acid.
It is well known that heteropolyacids substantially free of extraneous cations (hereafter xe2x80x9cfree heteropolyacidsxe2x80x9d) are valuable chemical compounds which can be used as acid catalysts in organic reactions such as the addition reaction of lower aliphatic carboxylic acids to olefins to form the corresponding esters. One such method is described in our EP-A-0757027 which describes the use of free heteropolyacids as catalysts for the production of aliphatic esters such as ethyl acetate in an addition reaction as described above. Methods of synthesising heteropolyacids are also well known. For instance, such processes are described e.g. by North, E O in xe2x80x9cOrganic Synthesisxe2x80x9d, 1, page 129 (1978), Editor H S Booth, Robert E Krelger publishing company Huntington, N.Y.) and by Tatsuhiko, H et al in Kogyo Kagaku Zasshi, 72 (9), 1945-48 (1969).
Known methods for the preparation of heteropolyacids generally involve three stages, namely:
a. A reaction stage in which the tungstosilicic acid is formed by the addition of hydrochloric acid to a refluxing aqueous solution of sodium tungstate and sodium silicate. Upon neutralisation and hydrolysis, the reaction results in the formation of a brine solution containing a tungstosilicic acid Keggin structural unit. Overall, the reaction can be summarized as follows:
12Na2WO4+Na2SiO3+HClxe2x86x92H4SiW12O40.nH2O+NaCl+H2O
The product is filtered, acidified and cooled prior to purification.
b. A product recovery and purification stage in which the cooled product solution from (a) is purified by at least one liquid/liquid extraction step using an organic solvent. The solvent is such that it is capable of forming a solvent/heteropolyacid complex which is largely insoluble in the acidified aqueous brine. The resulting solvent/complex phase enables the disengagement of the contaminating inorganic salts from the brine solution.
c. A product regeneration stage in which an aqueous solution of the heteropolyacid is regenerated from the solvent/complex phase produced in step b). This regeneration is achieved by adding water to displace the solvent involved in the formation organic/complex phrase. The organic solvent is removed from the mixture by distillation. The organic solvent is conveniently removed as a solvent/water azeotrope. This azeotrope may form a two phase mixture on cooling. The denser of these two phases is an aqueous phase, which may be recycled to the reboiler. The less dense phase is an organic phase, which may be recovered, for example, for reuse. The amount of water added and removed can be adjusted to yield a 20-80%w/w aqueous solution of heteropoly acid.
The resultant concentrated aqueous solution of the heteropolyacid product can then be used to impregnate an inorganic support.
The known synthetic methods referred to above mention the use of diethyl ether, methyl ether ketone and ethyl acetate as possible solvents for purification of the product. We have found that all these materials have inherent disadvantages. For instance, diethyl ether has a high volatility and low auto-ignition point;
methyl ethyl ketone gives rise to colour formation due to desired acid catalysing an aldol type reaction with the solvent ketone; and esters such as ethyl acetate have a propensity to undergo hydrolysis in the presence of the heteropolyacid being synthesised and any neutralising acids present therein.
It has now been found that these disadvantages can be mitigated if a suitable solvent is used during the purification stages.
According to a first aspect of the present invention, there is provided a process for purifying a heteropolyacid which comprises:
subjecting an aqueous solution comprising (i) the heteropolyacid and (ii) salt impurities to at least one liquid/liquid extraction step with an organic solvent,
characterised in that the organic solvent comprises a dihydrocarbyl ether having at least 5 carbon atoms.
In other words, the dihydrocarbyl ether is such that the total number carbon atoms in the two hydrocarbyl units, one on either side of the ethereal oxygen atom, is at least 5.
The liquid/liquid extraction step enables the heteropolyacid to form a complex in situ with the organic solvent. This allows the extract to separate into two or more phases including inter alia a dense organic phase, which generally settles at or towards the bottom of the separation vessel. This phase comprises the dissolved complex of the heteropolyacid.
Preferably, the dense organic phase is recovered. This may be mixed with water to form a separate layer of a dilute aqueous mixture, from which a concentrated 20-80% w/w solution of the heteropolyacid substantially free of organic impurities may be isolated.
The starting aqueous solution of heteropolyacid may be prepared by reacting (i) an aqueous solution of one or more alkali or alkaline earth metal salts selected from a tungstate and a molybdate with (ii) an alkali or an alkaline earth metal silicate or an alkali or an alkaline earth metal phosphate. Preferably, this reaction is carried out under reflux. The ensuing reaction produces an impure aqueous solution comprising the heteropolyacid of the chosen salt and any other salt formed in situ or used as a reactant. This solution may then be filtered, cooled and subjected to the liquid/liquid extraction step of the first aspect of the present invention.
Preferably, the heteropolyacid in the aqueous solution is a silicotungstic acid.
According to a second aspect of the present invention, there is provided a process for the synthesis of a heteropolyacid substantially free of extraneous cations, said process comprising:
a. reacting (i) an aqueous solution of one or more alkali or alkaline earth metal salts selected from a tungstate and a molybdate under reflux with (ii) an alkali or an alkaline earth metal silicate or an alkali or an alkaline earth metal phosphate in the presence of an acid to form in an impure aqueous solution comprising the heteropolyacid of the chosen salt and any other salt formed in situ or used as a reactant;
b. filtering and cooling the impure aqueous solution comprising the heteropolyacid;
c. purifying the cooled, impure aqueous solution from (b) by at least one liquid/liquid extraction with an organic solvent to enable the heteropolyacid to form a complex in situ with the organic solvent and allowing the extract to separate into two or more phases including inter alia a dense organic phase which comprises the dissolved complex of the heteropolyacid and which dense organic phase is below the aqueous phase;
d. recovering the dense organic phase from (c) and mixing it thoroughly with water to form a separate layer of a dilute aqueous mixture and
e. recovering a concentrated 20-80%w/w aqueous solution of the heteropolyacid substantially free of organic impurities from the dilute aqueous mixture,
wherein the organic solvent used in the liquid/liquid extraction step (c) comprises a dihydrocarbyl ether having at least 5 carbon atoms.
Preferably, the organic solvent used in the liquid/liquid extraction step (c) is a dihydrocarbyl ether having at least 5 carbon atoms.
The dihydrocarbyl ether may have 5-20 carbon atoms, and preferably, has 5-10 carbon atoms. The dihydrocarbyl ether may be such that at least one of the hydrocarbyl groups is a branched chain alkyl group. Preferably, the branched chain alkyl group is t-butyl or amyl. At least one of the hydrocarbyl groups in the ether may be a methyl, ethyl or propyl group. Preferably, this hydrocarbyl group is a methyl or ethyl group, and most preferably, it is a methyl group. It may be advantageous to employ ethers which have different hydrocarbyl groups on either side of the ethereal oxygen. For example, the ether may have a methyl group on one side of the ethereal oxygen, and a butyl or amyl group on the other.
The ether used should be substantially immiscible with water. In other words, the ether should be substantially insoluble in water, and water should be substantially insoluble in the ether. The ether when complexed with HPA should also be immiscible with water in order to facilitate the removal of any salt from the extract.
Suitable ethers generally have a boiling point above 40xc2x0 C., preferably between 40xc2x0 C. and 60xc2x0 C., more preferably between 50xc2x0 C. and 60xc2x0 C., for example, between 55 and 56xc2x0 C. In some applications, ethers having boiling points of above 90xc2x0 C. may also be suitable.
Suitable ethers include propyl butyl ether (e.g. propyl t-butyl ether), ethyl propyl ether, dipropyl ether (e.g. di-n-propyl ether (bp 88-90xc2x0 C.) and di-isopropyl ether), butyl glycol ether, di-butyl ether (e.g. disobutyl ether, di t-butyl ether, di n-butyl ether), methyl butyl ether (e.g. methyl n-butyl ether [bp 70-71xc2x0 C.], methyl sec butyl ether [bp 75xc2x0 C.], methyl tertiary butyl ether [bp 55-56xc2x0 C.]), methyl amyl ether (e.g. 4-tert-amyl methyl ether [bp 85-86xc2x0 C.]), butyl ethyl ether (e.g. n-butyl ethyl ether [bp 91-92xc2x0 C.], tert-butyl ethyl ether (bp 72-73xc2x0 C.)), and propyl butyl ether. Of these, methyl tertiary amyl ether and more particularly, methyl tertiary butyl ether (hereafter xe2x80x9cMTBExe2x80x9d) are preferred. An advantage of using such ethers as solvents is that they would reduce the total organic content of any effluent due to their low water solubility.
Step a) may be preceded by the preparation of an aqueous solution of at least one alkali or alkaline earth metal salt of a tungstate or a molybdate. Such solutions may be prepared using demineralised water to minimise the contamination of the final heteropolyacid desired by extraneous ions. Preferably, a solution of sodium molybdate or sodium tungstate is prepared.
The aqueous solution of at least one alkali or alkaline earth metal salt of a tungstate or a molybdate is then refluxed with an alkali or an alkaline earth metal silicate or phosphate (step a). The silicate or phosphate may be used as a solid or as an aqueous solution. Preferably, a silicate is used.
The ensuing reaction produces a mixture comprising an impure solution of the mixed heteropolyacid of the chosen salt, which may be generated initially as the salt of a partially acidified heteropolyacid (e.g. H2Na2-heteropolyacid) or the fully acidified heteropolyacid (H4-heteropolyacid). This resultant solution is then filtered, cooled, and preferably, acidified.
The reaction of step a) is carried out in the presence of an acid, which neutralises the reaction mixture. The heteropolyacid unit is believed to assemble during this neutralisation step. Suitable acids for the neutralisation step include mineral acids such as hydrochloric acid.
Preferably, acid is introduced into the reaction mixture of step a) through the reflux flow. The addition of acid is controlled so as to prevent the precipitation of the compounds such as e.g. tungstic acid.
More preferably, the addition of hydrochloric acid to the reaction is carried out in two stages. Firstly, as mentioned above, during step a) so as to neutralise the reaction mixture, and secondly, before the refluxed reaction mixture is liquid/liquid extracted in step c). This second acidification may be carried out as the mixture of step a) is cooled and filtered, but preferably, is carried out after the cooling and filtration step. The purpose of the second acid addition stage is (i) to ensure that the reactant salts are appropriately hydrolysed, (ii) to convert the heteropolyacid present in the reaction mixture to the H4 form, and (iii) to prevent ionisation in the aqueous solution. Since ionisation of the heteropolyacid in solution aids the dissolution thereof in water, the acidification of the solution by addition of an acid, and in particular, a strong mineral acid, suppresses this tendency of the heteropolyacid to ionise. This not only decreases its water solubility but also allows it to be extracted more easily by solvent extraction.
The acidified, cooled and filtered solution is then subjected to at least one liquid/liquid extraction step (step c). Preferably, a plurality of such extraction steps are employed. The liquid/liquid extraction is carried out using an organic solvent, which complexes with the heteropolyacid in situ. It should be noted that not all solvents are capable of forming such a complex; for example, cyclohexane is incapable of forming such a complex with the heteropolyacid.
The liquid/liquid extract is then allowed to separate into two or more phases. The complex of the heteropolyacid is soluble in the extracting organic solvent, and forms a solution which separates as a dense organic phase.
In certain embodiments of the invention, the extract separates into three phases: an upper organic phase which comprises mainly the solvent with traces of heteropolyacid, a middle aqueous phase which comprises mainly water and some of the acids and salts used or formed during the synthesis reaction and finally, a lower dense organic phase which contains the desired heteropolyacid complex of interest. The liquid/liquid extraction behaviour of such systems is unusual in that a complex of the heteropolyacid and the extracting solvent is formed in the lower dense organic phase when the components are mixed together.
The efficiency of the extraction will depend upon the extent of disengagement of the phases in the extract. In particular, the organic phase comprising the complex of the organic solvent and the heteropolyacid may appear to be initially hazy due to entrapped salts/aqueous phase of the reactant inorganic compounds and any salts formed in situ during the reaction. Such a haze may be removed using, for example, demisting treatments. Suitable demisting treatments include centrifugation and filtration methods.
The solution comprising the complex of the heteropolyacid is separated from the other phase(s). Preferably, this solution is admixed with water, which may advantageously be demineralised and/or de-ionised prior to the admixing step. The organic solvent may suitably be removed from the resultant admixture by azeotropic distillation in a column. The preferred organic solvents can form decanting mixtures, which allow facile separation of a bottom aqueous layer from the top organic phase. The aqueous layer can be returned to the distillation column or removed as a column heads take off. The amount of water employed to prepare the admixture can be adjusted prior to the distillation; similarly, the amount of water remaining after the distillation can also be adjusted to yield a solution of heteropolyacid 20-80%w/w of said heteropolyacid.
An alternative method of preparing an aqueous solution of the free heteropolyacid is to distil the organic phase under vacuum to remove the solvent and then take up the residue in water. Care, however, should be taken with vacuum drying as extended heating under vacuum even mild conditions (e.g. 100xc2x0 C., 16 hrs, 0.01 mmHg) can lead o some heteropolyacid loss by generation of by-products.
The term xe2x80x9cheteropolyacidxe2x80x9d as used herein and throughout the specification is meant to include the free acids. The heteropolyacids may be used to prepare esterification catalysts and olefin addition catalysts. When employed for such applications, the heteropolyacids may be used as free acids and or partial salts. The synthesis of heteropolyacids in accordance with the present invention. Allows the purity of such salts to be controlled.
Typically, the heteropolyacid, or the anionic component of its corresponding salt comprises 2-18 oxygen-linked polyvalent metal atoms, which are called peripheral atoms. These peripheral atoms surround one or more central atoms in a symmetrical manner. The peripheral atoms are usually one or more of molybdenum, tungsten, vanadium, niobium, tantalum and other metals. The central atoms are usually silicon or phosphorus but can comprise any one of a large variety of atoms from Groups I-VIII in the Periodic Table of elements. These include, for instance, cupric ions; divalent beryllium, zinc, cobalt or nickel ions; trivalent boron, aluminium, gallium, iron, cerium, arsenic, antimony, phosphorus, bismuth, chromium or rhodium ions; tetravalent silicon, germanium, tin, titanium, zirconium, vanadium, sulphur, tellurium, manganese nickel, platinum, thorium, hafnium, cerium ions and other rare earth ions; pentavalent phosphorus, arsenic, vanadium, antimony ions; hexavalent tellurium ions; and heptavalent iodine ions. Such heteropolyacids are also known as xe2x80x9cpolyoxoanionsxe2x80x9d, xe2x80x9cpolyoxometallatesxe2x80x9d or xe2x80x9cmetal oxide clustersxe2x80x9d. The structures of some of the well known anions are named after the original researchers in this field and are known e.g. as Keggin, Wells-Dawson and Anderson-Evans-Perloff structures.
Heteropolyacids usually have a high molecular weight e.g. in the range from 700-8500 and include dimeric complexes. They have a relatively high solubility in polar solvents such as water or other oxygenated solvents, especially if they are free acids and in the case of several salts, and their solubility can be controlled by choosing the appropriate counter-ions. Specific examples of heteropolyacids that may be synthesised in the present invention include:
The present invention is particularly suitable for the synthesis and purification of silicotungstic acid.
The heteropolyacids purified or synthesised by the present invention may be impregnated into a support. This may be achieved by dissolving the heteropolyacid in distilled water, and then adding the support to the aqueous solution so formed. The support is suitably left to soak in the acid solution for a duration of several hours, with periodic manual stirring, after which time it is suitably filtered using a Buchner funnel in order to remove any excess acid.
The wet catalyst thus formed is then suitably placed in an oven at elevated temperature for several hours to dry, after which time it is allowed to cool to ambient temperature in a desiccator. The catalyst can also be dried suitably by using a flow of heated gas such as e.g. nitrogen or air. The catalyst loading in g/liter was determined by deducting the weight of the support used from the weight of the catalyst on drying.
Alternatively, the support may be impregnated with the catalyst using the incipient wetness technique and dried by using a flow of heated gas such as e.g. nitrogen or air.
This supported catalyst (measured by weight) can then be used in processes such as e.g. the hydration of olefins to form alcohols or the addition of aliphatic monocarboxylic acids to olefins to form the corresponding ester. The amount of heteropolyacid deposited/impregnated on the support for use in the addition reaction for making esters is suitably in the range from 10 to 60% by weight, preferably from 20 to 50% by weight, more preferably from 20-35% by weight (corresponding to a loading in the range of about 100-215 g/liter) based on the total weight of the heteropolyacid and the support.
The present invention is further illustrated with reference to the following Examples:


Exemplary embodiments of the present invention disclose a method and system for selecting an eviction location of an item to evict and an insertion location for a new item in a circular buffer. In a step, an exemplary embodiment specifies an insertion location with an insertion pointer. In another step, an exemplary embodiment increments an access count of a first item. In another step, an exemplary embodiment moves an eviction pointer clockwise when specifying an insertion location for the new item and the circular buffer is in eviction mode. In another step, an exemplary embodiment decrements an access count of a second item. In another step, an exemplary embodiment moves the insertion pointer to maintain a constant clockwise distance to the eviction location. In another step, an exemplary embodiment evicts the second item with an access count of zero and inserts the new item counterclockwise to the insertion location.

Buffers and caches are often used in computing systems to temporarily hold items that are frequently accessed or whose access time may otherwise inhibit performance. Since buffers and caches have limited size, techniques used to efficiently utilize their limited space strongly influence their performance. One type of buffer is a circular buffer implemented in software. A circular buffer is a list of items linked in a circular fashion. Each item in the list is linked to a previous item and a next item, where the first item in the list is the next item with respect to the last item on the list, i.e., the items are linked in a circle. Two algorithms are necessary to operate such a buffer: first, an algorithm to select an item to delete when a new item is to be inserted into a full buffer; second, an algorithm to select a location for the new item. A location from which an item is deleted to make space for a new item and a location to which the new item is inserted may not be the same location. This happens more often in software implemented buffers than those implemented in hardware. The logic that selects these locations is embodied in a replacement algorithm which has a profound effect on the performance of a buffer under various workloads. The performance of a buffer is usually measured by its hit rate, the fraction of accesses to a buffer that find an accessed item in the buffer. The performance of a given replacement algorithm will vary under different circumstances and depends strongly on the access pattern of a program using a buffer.
A common replacement algorithm used with a buffer or a cache is least recently used or LRU. When a new item must be added to a full buffer, the LRU algorithm evicts an item from the buffer or a section of the buffer that has not been accessed for the longest period of time compared to that of other items under consideration and the new item replaces the evicted item. Unfortunately, in some buffer configurations and for large buffers, the logic necessary to keep track of a LRU item and the next LRU item, etc. can be significant.

Two handed insertion and deletion algorithm for circular buffer

International Business Machines Corporation


It is an object of the present invention to provide a method for manufacturing a substrate having film patterns such as an insulating film, a semiconductor film, and a conductive film in simple processes. It is another object of the invention to provide a method for manufacturing a semiconductor device with high throughput and high yield at low cost. A method for manufacturing a semiconductor device including the steps of: forming a first film over a substrate; discharging a solution containing a mask material to the first film thereby forming a mask over the first film; patterning the first film with the use of the mask thereby forming low wettability regions and a high wettability region over the substrate; removing the mask; and discharging a solution containing a material of an insulating film, a semiconductor film, or a conductive film to the high wettability region provided between the low wettability regions thereby forming a pattern of the insulating film, the semiconductor film, or the conductive film.

1. Field of the Invention
The present invention relates to a method for manufacturing a semiconductor device having a semiconductor element formed by a droplet discharge method represented by an ink-jet method. The invention further relates to techniques for forming films of various parts of a semiconductor element, mask patterns, and contact holes.
2. Description of the Related Art
As to manufacturing of semiconductor devices, a droplet discharge systems are considered to be used for forming a pattern of a thin film or a wiring of a semiconductor element for the purpose of reducing facility cost, and simplifying a process.
There has been a problem that a solution discharged by a droplet discharge method is spread. Further, the spread on a substrate tends to be nonuniform. In the case of forming a wiring by discharging a solution containing metal particles by a droplet discharge method, problems such as shorting between wirings are caused. Accordingly, when the space between wirings is narrow, a method in which a pattern of a low wettable material is formed to repel the wirings thereby preventing the wirings from shorting to each other, is used.
As a method for forming such a pattern, a method in which an organic material film containing a fluoroalkyl group is formed and thereafter subjected to UV irradiation using a photomask pattern used in a normal photolithography process, or the like has been employed (for example, reference 1: Japanese Patent Laid-Open No. 2002-164635).
However as to the above method, since a photomask used in a normal photolithography process is used, reduction in facility cost and simplification in processes cannot be achieved.

Method for manufacturing semiconductor device

Semiconductor Energy Laboratory Co., Ltd.


The present invention provides an apparatus for and method of determining the nature of the wireless environment which is in use and dynamically selecting appropriate frequency channels for data transmissions which are more likely to accommodate sustained data transmission at high speeds.

This invention relates to high speed data communications over wireless links such as radio links. The present invention is further related to determining the nature of the wireless environment which is in use and dynamically selecting appropriate frequency channels for data transmissions which are more likely to accommodate sustained data transmission at high speeds.
Wireless transmissions, and more particularly radio transmissions, are subject to many environmental factors which degrade the effectiveness of the wireless transmissions. One environmental effect is the physical reality that wireless signals reflect off many surfaces, including buildings, mountains, and even moving objects as such vehicles and/or airplanes. When wireless signals bounce off one or more such objects before arriving at a receiving station, the receiving station receives more than one version of the transmitted signal. This is due to the fact that there are often a number of different routes by which the transmitted signal can find its way to the receiving station. For example, the signal may have a direct path and may have another path which bounces off an object such as a mountain, for example. If there a numerous possible paths, then numerous versions of the transmitted signal arrive with differing signal strengths and at different times. Sorting out these numerous signals can be a difficult problem for the receiving apparatus at the receiving station and can cause a type of interference which is often referred to as multipath (multiple path) interference. In the prior art, adaptive equalization has been employed as one means to mitigate against channel degradation effects (for example, multipath interference) caused by environmental factors.
A popular method of adaptive equalization takes a training signal which sets a digital signal processing phase network to sum up the received signal, which contains multiple path signals, as they arrive at the receiver into one coherent signal.
The present invention is directed to a new channel-adaptive wireless method and apparatus that provides for reliable aggregated data transport, particularly for high speed wireless networks. A radio modem is disclosed, which according to the present invention, can be reconfigured in real-time based on wireless (e.g. radio) channel characteristics provided by a built-in broadband propagation path sensor which performs radio channel characterization, on some periodic basis such as prior to each data transmission session and/or at regular intervals during a session. In the preferred embodiment, the propagation environment is measured in the time domain with a pilot signal using spread spectrum techniques, and then transformed and translated into a frequency domain of interest. Frequencies where the propagation is poor are noted and the communication channels are then established at one or more frequency channels where reliable data communications can be maintained. The wireless environment is periodically tested and frequency channel(s) used for data transmission is(are) moved or changed dynamically when appropriate.
Preferably, the pilot signal is phase-shift keyed with a pseudo-random noise (PN) code such that its frequency content covers the entire frequency spectrum of interest. The pilot signal is transmitted at a transmitting site and received at a receiving site where it is correlated, after appropriate demodulation, against an identical PN code in the receiver. The received, demodulated signal is then transformed into the frequency domain to determine which channels have the least impairment in terms of fading in the frequency domain. High priority channels are moved to those frequencies channels which have the least impairment to maintain reliable data communications. Adaptive equalization can still be performed, if desired, but the amount of equalization needed in an individual channel may be substantially reduced.
The present invention has certain advantages over the existing radio modem technologies:
The radio link can be characterized at all frequencies in one measurement. Thus, the entire spectrum can be tested allowing dynamic assignment of channels only in those frequency bands exhibiting low propagation path impairment. Known adaptive equalization techniques may be performed on individual channels. As a result, a very high quality of data communications can be provided which exhibits low bit error rates.
The present invention allows for the pre-selection of propagation channels with lower levels of impairment to relieve excessive adaptive equalization processing. The preferred approach is essentially a frequency division multiplexed (FDM) approach in which the speed requirement of individual channels can be on the order of 100 Mbps for simplified baseband transmitter and receiver circuits, and yet the channels can be multiplexed together to provide a high aggregate data rate for data communications.
The present invention does not require adaptive attune techniques that utilize multiple antenna elements in order to obtain satisfactory results. The adaptive techniques of the present invention involve detecting a signal from multiple received signals and then selecting appropriate signal paths (by selecting appropriate channel frequencies) to reduce multipath impairment. Thus, wireless communication devices can be made compact by using a single set of transmit and receive antennas compared to the prior art practice of using multiple antenna elements for spatial diversity. To attain this compactness, the present invention gives up some spectrum by inhibiting transmission at impaired frequencies, but has the advantage of not requiring multiple antennas.
The present invention offers a means to increase the data transport capability of the radio channel by using more bandwidth-efficient modulation schemes (e.g. M-ary QAM vs. BPSK) for frequency bands with less propagation impairment for data communications.
The radio links with numerous receivers can be characterized in one measurement. For example, the invention can be used with a command post which communicates with units in the field in different areas. The radio modems used at the field units will usually characterize the wireless environment differently. That is, each unit in the field may determine that it can best communicate with the command post on a different sets of acceptable frequency channels. However, since the entire frequency spectrum is tested in one measurement action, all field units learn at the same time the best frequencies for each of them to use.
Once an acceptable set of frequency channels are determined, the party sending data to the other radio modem receiver may use just one acceptable channel for data communication or may use several channels depending on the transmission protocol used and the type of modulation used.
The term xe2x80x9cdata communicationsxe2x80x9d as used herein means any type of data communication, including voice communications (both analog and digital), facsimile, computer data, video, images, and the like.


A memristive device is described. The memristive device includes a first layer having a first plurality of conductive lines, a second layer having a second plurality of conductive lines, and memristive interlayer connectors. The first and second layers differ. The first and second pluralities of conductive lines are each lithographically defined. The first and second pluralities of conductive lines are insulated from each other. The memristive interlayer connectors are memristively coupled with a first portion of the first plurality of conductive lines and memristively coupled with a second portion of the second plurality of conductive lines. The memristive interlayer connectors are thus sparsely coupled with the first and second pluralities of conductive lines. Each memristive interlayer connector includes a conductive portion and a memristive portion. The memristive portion is between the conductive portion and corresponding line(s) of the first plurality of conductive lines and/or the second plurality of conductive lines.

Matrix multiplications are utilized in a variety of computing applications. For example, multiple layers of vector-matrix multiplication operations may be performed by multiple layers of crossbar arrays. In such an application, input signals form the input vector that is provided to the inputs of the crossbar array. The input signals may be data for a still image, video image frames and/or other information. The input signals are multiplied by a matrix of weights. The matrix of weights is provided by resistances at the crossings between the inputs and outputs. In a crossbar array, each input is connected to all of the outputs (i.e. is fully connected). The outputs signals are the result of the vector-matrix multiplication operations on the input signals and form the output vector. The output vector may be provided as an input vector to a next crossbar array. This progression continues until processing is completed. Thus, the output of the final crossbar array is the output of the system. Such a vector-matrix multiplication carried out by a crossbar array may also be performed in neural networks. In such a case, the inputs to the crossbar are input neurons, while the output to the crossbar may be output neurons. Multiple crossbar arrays can also be used in a neural network application. In such a case, inputs to the first crossbar array are input neurons. The outputs for the last crossbar array are to output neurons.
Memristors can provide the resistances, or weights, between the inputs and outputs of a crossbar array. A memristor has a resistance that can depend upon previous currents through or voltage driven across the device. Thus, the memristor provides a programmable weight for the crossbar array. For example, the crossbar array includes a first set of parallel metal lines and a second set of parallel metal lines in two different layers of a device. The metal lines in the first set are nominally perpendicular to the metal lines in the second set. Memristors provide connections between the first set of parallel lines and the second set of parallel lines at the locations at which the lines cross. Although such arrays are utilized, what is desired is an improved mechanism for performing computing operations, such as matrix multiplications.


Method of carrying out the cryogenic therapy, particularly on the whole body of one or several patient/s, characterized in that said patient/s are introduced along a transport route through the upper part of a chamber and then through the interior of said chamber, wherein said chamber has thermally insulated walls and a space containing a deposited low temperature cooling agent. The patient/s are then led to a cryogenic treatment cabin having a very low temperature from −60.c to −160.c with exposure times ranging from 0.5 to 5 minutes, whereafter said patient/s leave said treatment cabin through the interior of said chamber and further along said transport route outside chamber to an area at room temperature. The corresponding device for carrying out cryogenic therapy is characterized by a chamber with an open upper part and by a separated cryogenic treatment cabin inside said chamber said cabin being cooled in its whole volume by a cooling agent in the form of liquid air sprayed by nozzles. Alternatively, said device for carrying out cryogenic therapy has a cabin cooled by a cooling agent in the form of liquid carbon dioxide or liquid nitrogen sprayed by nozzles, said chamber having an air intake device in its upper part for providing breathing air to said patient/s. Optionally, said device has a chamber having an upper part with a movable cover which is preferably transparent, said chamber comprising illumination means, the cryogenic treatment cabin having an emergency door situated on one side of said of said chamber, said door enabling access for disabled people on wheelchairs, said chamber, said door enabling access for disabled people on wheelchairs, said chamber, also having measuring and control means for temperature and oxygen concentration in order to protect said patient/s.

There are known methods in the medical technology for performing the cryogenic therapy by exposing some parts of the human body or the whole body to the agents reducing their temperature. It is carried out by using the evaporation of condensed gases or compressed gases. The known devices for carrying out the cryogenic treatment have the therapeutical chamber. The patient, the cryogenic gas loading system, the control system and the protecting system etc are inside the chamber.
There is known from the German Patent Specification no. 3213919 the device for preparating the cryogenic air which is provided to the medical cryogenic chamber. The device has the air compressor, the dryer for removing the steam from the compressed air, the heat exchanger and the condensed gas container. The device is provided with the measuring elements, the control elements and the protective elements. The parts of the device which contain the cryogenic agents are provided with the thermalinsulation. The device requires a long starting time and a stand-by system.
From the Polish Patent Specification no 157168 the device is known for carrying out the cryogenic treatment which has the chamber for patients and the chamber cryogenic air loading unit. The chamber has the loading air circulation system having the air compressor, the dryer and the air cooling circulation system. The cooling air circulation system has the liquid gas vessel and the heat exchangers, wherein it has three heat gas exchangers ie; the preliminary heat exchanger, the main heat exchanger and the final heat exchanger as well as the spraying element. The preliminary heat exchanger and the spraying element are situated inside the chamber for the patients. The device has the favourable operating characteristics displayed in the short starting time and closing time.
The aim of the present invention is to provide the method and the cryogenic device which are directed to carrying out the safe treatment on the whole body of one or several patients.

Method and the device for cryogenic therapy applied on the whole body of a patient


An object of the invention is to provide a separator for an electrochemical element in which the occurrence of fluff on the sheet surface thereof is suppressed and an internal short-circuit defect rate is low, and the invention provides a separator for an electrochemical element, comprising: a fibrillated solvent spun cellulose fiber; and a synthetic fiber, wherein the separator for an electrochemical element contains, as the synthetic fiber, from 5 to 40% by weight of a core-sheath type composite fiber having a fiber diameter of 6.0 μm or less which is composed of: a core component made of a resin having a melting point of 160° C. or more; and a sheath component made of polyethylene.

Since a lithium secondary battery which is one kind of the electrochemical elements has an operating voltage of 3.7 V on average, which is approximately three times that of an alkaline secondary battery, it is used in a variety of applications as an electrochemical element having a high energy density. Applications include mobile phones, notebook computers, hybrid vehicles, electric vehicles, power storage applications and the like.
Since a capacitor which is one kind of the electrochemical elements has a large capacitance and high stability to repeated charge and discharge, it is becoming widely used in applications, for example, a power supply for use in vehicles or electric equipment.
The main member used in the electrochemical element includes a positive electrode, a negative electrode, a separator for an electrochemical element (hereinafter may be referred to as "separator" in some cases), and an electrolytic solution. The separator separates the positive electrode and the negative electrode such that the positive electrode and the negative electrode do not directly contact, that is, so as not to cause internal short-circuit in the electrochemical element. In order to lower the internal resistance of the electrochemical element, pores through which ions in the electrolytic solution are able to be efficiently transmitted must be formed in the inside of the separator. Therefore, the separator is required to be porous.
As the separator, a paper separator made mainly of cellulose or a separator made mainly of an inorganic fiber represented by a glass fiber has been known. Further, a separator composed of a wet nonwoven fabric which is produced by a wet paper making method and contains a synthetic fiber and a beaten solvent spun cellulose fiber (fibrillated solvent spun cellulose fiber) as the essential components is disclosed (for example, see Patent Documents 1 and 2).
The separator containing a synthetic fiber and a beaten solvent spun cellulose fiber as the essential components has an advantage in that an internal short-circuit defect rate is small. However, both the synthesis fiber and the beaten solvent spun cellulose fiber have a short fiber length and tend to cause insufficient entanglement of the fibers with each other.
Further, fibrils occur in the solvent-spun cellulose fiber by beating, and the fibrils are able to form a paper layer by being spot-glued together. However, since the solvent-spun cellulose is cellulose having high crystallinity, it has high rigidity, and even by pressing in the wet paper making process, the fibril itself is less crushed to be flattened and maintains the cross-sectional shape close to a circle. Therefore, after drying the wet fiber web formed by a wet paper making method at a Yankee dryer, upon the release of the dry fiber web from the Yankee dryer, the synthetic fiber and the beaten solvent spun cellulose fiber may be taken by the Yankee dryer. As a result, fluff is likely to occur on the Yankee dryer surface of the dry fiber web.
As means for solving the occurrence of fluff, there is a means for applying a release agent to the Yankee dryer.

Separator for electrochemical elements, and electrochemical element comprising same


Methods and control systems are provided for automatically controlling operation of a vehicle. In one embodiment, the control system includes an exterior sensor for sensing the environment outside the vehicle. A processor is in communication with the exterior sensor and configured to calculate a driving plan of the vehicle based at least partially on the sensed environment outside the vehicle. The processor is also configured to calculate a confidence level of the driving plan of the vehicle based at least partially on the sensed environment around the vehicle. The control system also includes a display in communication with the processor and configured to receive data from the processor and display a representation of at least one of the driving plan and the confidence level.

Control systems and associated methods have been developed to provide automatic, or autonomous, control of vehicles, such as automobiles. These systems and methods allow for the vehicle to drive itself on the roadway, using various sensors to identify the roadway, navigate on the roadway, and avoid collision with other vehicles.
Such systems are typically able to switch between at least an automatic mode, in which a computing device controls operation of the vehicle, and a manual mode, in which the driver controls the vehicle. When errors occur in the automatic operation of the vehicle, the control system may need to switch over, or be switched over by the driver, to manual mode. Often, this switchover can occur with little warning to the driver. Other times, the driver must determine when the system is in error and cause the switch to manual driving.
Accordingly, it is desirable to provide a control system and method which informs the driver as to the operation of the control system in automatic mode. Furthermore, other desirable features and characteristics of the present invention will become apparent from the subsequent detailed description and the appended claims, taken in conjunction with the accompanying drawings and the foregoing technical field and background.

Display systems and methods for autonomous vehicles


According to some embodiments, a method and apparatus are provided to receive, at a cache entity, a refresh request associated with a resource. A determination is made, via a processor, and based on the refresh request, to reload the resource from a server. The reloaded resource is replaced at the cache entity.

A web cache saves resources of various types from one or more web servers and provides these resources to clients when a request for the resource is received. When a client sends a request for a specific resource, the request is received at the web cache and the cache checks whether it already has a copy of the requested resource stored in its storage and determines whether the copy of the resource has or has not expired. If the copy of the requested resource is available and has not expired, then the web cache sends a response to the requesting client with this stored copy of the resource, without communicating with the original server which holds this resource.
The advantages of caching are that by receiving the requested resource from the cache, the client gets a faster response to his request, network traffic is reduced, and the load on the web server supplying the resource is reduced.
Sometimes, however, a web server may provide an incorrect or incomplete copy of the resource to the web cache (i.e., "poisoned" the cache). Furthermore, in some embodiments a cache may be poisoned by a cache simply becoming defective, and thus the copies of the resources stored within the cache are also defective. Thereafter, clients who request the resource will get an incorrect or incomplete copy in response to their request. While the incorrect or incomplete resource copy may be quickly remedied on the web server, the web cache may still store the incorrect or incomplete copy of the resource. Since cached resources are associated with a time out period (e.g., expiration time), conventional remedies involve waiting until the time out period of the cached resource has expired and then the web cache will evacuate the previously stored copy of the resource by itself. However, until the time out period ends, users will be unable to obtain the desired resources from the web server, unless an administrator will manually clean up the cache, usually the entire cache (which would cause performance degradation, since "good" resources are deleted as well).

Identifying and resolving cache poisoning


A tractor-trailer for hauling a load is provided which is convertible from a conventional steering arrangement to a stinger steering arrangement to maneuver relatively long loads around tighter corners, roundabouts and other obstacles. The tractor-trailer includes a rear wheel assembly with a telescoping reach and a towing tractor including a chassis and a stinger to selectively attach to the telescoping reach of the rear wheel assembly. The stinger is movably coupled to the chassis to move between a stowed configuration for conventional steering and a deployed configuration for stinger steering.

Technical Field
This disclosure generally relates to tractor-trailers and more particularly to tractor-trailers and towing tractors thereof that are convertible from a conventional steering arrangement to a stinger steering arrangement.
Description of the Related Art
Long haul tractor-trailers are known which feature conventional steering arrangements wherein the rear wheels of the trailer are aligned parallel to the hauled load. In this manner, the rear wheels may be considered passive. As a result, it is often difficult for such vehicles, particularly those having trailers of the 53 foot variety, to maneuver around tighter corners, roundabouts and other obstacles because the rear wheels do not track with the front wheels and tend to cut corners. As such, various tractor-trailer combinations may be provided with active steering of the rear wheels to assist in negotiating corners, roundabouts and other obstacles. In this context, active steering may refer to steering arrangements in which the rear wheels may be rotated relative to the hauled load to assist in steering activities. Some examples of tractor-trailers with active steering arrangements may be found in U.S. Pat. Nos. 3,972,540, 3,993,326, and 4,660,848 and European Patent No. 0034032, which are incorporated herein by reference in their entirety. Various known tractor-trailers having active steering functionality, however, may suffer from a variety of drawbacks or deficiencies. For example, the tractor-trailers may be overly complex or may require custom tractor units that may not be well suited to tow common trailer configurations, thereby diminishing the versatility of such tractors.

Tractor-trailer with convertible steering arrangement


A system for extended enterprise planning across a supply chain is provided. The system includes transactional execution system layers (14, 18) for a demand enterprise (10) and a supply enterprise (12). First and second federated electronic planning interchange layers (16, 20) provide a data specification format and an external communication interface for transactional execution system layers (14, 18). A supply chain planning engine (22), operable to perform planning for the supply chain, is in communication with a third federated electronic planning interchange layer (24) which provides a data specification format and an external communication interface for the supply chain planning engine (22). A data access/transfer layer (28) interconnects and allows transfer of information between the first, second and third electronic federated planning interchange layers (16, 20, 24). The supply chain planning engine (22), the first transactional execution system (14) and the second transactional execution system (18) can thereby communicate data which the supply chain planning engine (22) can use to provide constraint based extended enterprise planning across the supply chain.

Planning systems are used by enterprises in various industries to plan operations. Conventional transactional execution systems include ERP (Enterprise Requirements Planning), MRP and MRPII (Material Requirements Planning), and DRP (Distribution Requirements Planning) type systems. Other, more complex systems can be used to integrate enterprises and execute planning strategies provided the enterprises use compatible data specification formats. One such complex system is the RHYTHM system available from I2 TECHNOLOGIES located in Dallas, Tex. The RHYTHM System uses a flexible network based approach of operations, resources and buffers to model a supply chain rather than a traditional hierarchical approach.
Conventional transactional execution systems such as the ERP/MRP/DRP type systems are typically architected as hierarchical to pass data between independent nodes rather than to solve planning and scheduling problems as they exist throughout a supply chain. Dependencies for multiple enterprises between demand, material, capacity, logistics, customer allocations, supplier allocations, and related business constraints are not solved by these conventional systems. When using conventional transactional execution systems, each enterprise generates its own plan from its point of view. Sequential data transfer between enterprises in a supply chain is used to share information. This transfer of data can provide some information to aid the planning of operations for an enterprise.
One conventional technology used by enterprises to share information is EDI (Electronic Data Interchange). This protocol provides a way to administer change management and control within a supply chain. However, EDI has problems with respect to achieving customer driven goals such as real time order promising and true supply chain cost optimization, assembly coordination, and inventory deployment. Using the automotive industry as an example, a considerable portion of the cost build up for a vehicle is overhead in the supply chain due to attempts to plan operations based upon old, inaccurate or limited information. Even with EDI, the lack of bidirectional vertically integrated production plans within the supply chain causes problems in that plans are constructed based upon old or inaccurate information and material and capacity exceptions at each level are not solved before requirements are passed to the next level in the supply chain, thus compounding problems down the supply chain.
In general, supply chains can be placed into one of two categories: tightly coupled or loosely coupled. A tightly coupled supply chain is one in which there is little substitution of vendors or suppliers of materials and parts within the supply chain. These types of supply chains are characterized by complex bills of materials and by products that have a higher sophistication with requirements that are more detailed and more deeply involved. Tightly coupled supply chains are generally lean in that they are characterized by a low inventory environment. An example of a tightly coupled supply chain is the automotive industry. On the other hand, a loosely coupled supply chain is one in which there is relatively heavy substitution between vendors and suppliers of products and parts. An example of a loosely coupled supply chain is a consumer packaged goods supply chain such as one driven by customer demand at a large retail store.
Conventional planning processes implemented by enterprises in either type of supply chain are not characterized by close cooperation. Generally, the supply chains are composed of separate enterprises with each running a separate transactional execution system. The degree of planning across the enterprises to plan for the whole supply chain is relatively nonexistent. Consequently, it becomes difficult to effectively coordinate and create business relationships that efficiently and effectively fills customers needs. It is desirable to plan for the entire supply chain, as closely to real time as possible, and to propagate information forward and backward between enterprises.

System and method for extended enterprise planning across a supply chain


Methods and systems for a networked storage system are provided. One method includes: receiving, by a first storage node, a request to modify data stored using a logical storage object presented by the first storage node, the first storage node communicating with a second storage node configured as a failover partner of the first storage node; transmitting, by the first storage node, an invalidation request to the second storage node to invalidate an entry in a storage location cache of the second storage node, the entry indicating a storage location where data is stored by the first storage node, before modification; and responding, by the first storage node, to the request after modifying the data and upon receiving a response from the second storage node indicating successful invalidation of the entry.

Various forms of storage systems are used today. These forms include direct attached storage, network attached storage (NAS) systems, storage area networks (SANs), and others. Storage systems are commonly used for a variety of purposes, such as providing multiple users with access to shared data, backing up data and others.
A storage system typically includes at least one computing system (may also be referred to as a "server", "storage server", "storage node", "storage system node" or "storage controller") executing a storage operating system configured to store and retrieve data on behalf of one or more computing systems at one or more storage devices. The storage operating system exports data stored at storage devices as a storage volume.
In SAN storage arrays (i.e. storage arrays having storage devices accessed using a SAN protocol e.g., Fibre Channel Protocol, iSCSI (Internet Small Computer Systems Interface), FCoE (Fibre Channel over Ethernet) and others all data paths are advertised to a computing device (i.e. a host system) as active paths to access stored data. For example, the computing device can have a network connection to a first storage controller (may also be referred to as a first storage node or first storage system node) and a second storage controller, both controllers are configured as partner nodes. A logical unit (LUN) (i.e. a logical object) owned by the first storage node may be used to store data for the computing device. To read the stored data, a read request can be sent by the computing device to either the first node or the second node. In conventional systems, when the second storage node receives a request for data stored using the first node's LUN, the request is sent to the first node for processing. This can result in undesirable latency in processing the read request. Continuous efforts are being made to develop technology to reduce latency in processing read requests.

Write invalidation of a remote location cache entry in a networked storage system


An electronic part comprising an amorphous thin film formed on a substrate; and a metal wiring formed on the surface of the amorphous thin film; wherein an interatomic distance corresponding to a peak of halo pattern appearing in diffraction measurement of the amorphous thin film approximately matches with a spacing of a particular crystal plane defined with the first nearest interatomic distance of the metal wiring. An electronic part provided with a metal wiring formed of highly orientated crystal wherein half or more of all grain boundaries are small angle grain boundaries defined by one of grain boundaries with a relative misorientation of 10.degree. or less in tilt, rotation and combination thereof around orientation axes of neighboring crystal grains; coincidence boundaries where a .SIGMA. value is 10 or less; and grain boundaries with a relative misorientation of 3.degree. or less from the coincidence boundary. A method for manufacturing an electronic part, comprising the step of depositing a conductor layer which is mainly formed of one selected from Al and Cu on a substrate via an insulative layer, a barrier layer, a contact layer or an amorphous thin film layer wherein one element selected from Ga, In, Cd, Bi, Pb, Sn and Tl is supplied before or during the deposition of the conductor layer.

1. Field of the Invention
The present invention relates to electronic parts such as integrated circuit (IC) devices, and particularly to electronic parts with metal wiring having higher reliability e.g., the improved electromigration endurance, and manufacturing method thereof.
2. Description of the Related Art
Recently integration in memory IC devices represented by D-RAMs has been increasing. With the increase, wiring electrically connecting between elements becomes finer. This fineness requires wiring for a higher current density and operating temperature. At the same time, wiring is required for the further improved electromigration endurance, thereby attaining high reliability. However, the electromigration endurance is inversely proportional to a current density and operating temperature. At present, a thin film made of metal such as Al or Al alloys is frequently used for wiring. The electromigration endurance of such metal wiring has been improved by addition of a transition metal such as Cu or Ti in a trace quantity or the bamboo sheath-like grain structure (bamboo structure) which is caused by crystal grain growth. However, it is difficult to attain the reliability of wiring on the order of 0.1 micron only by this improvement in electromigration endurance. Recent investigations revealed that the electromigration endurance and stress-migration endurance due to tensile stress introduced in wiring were remarkably increased by a single-crystal wiring. As a means for attaining high reliability, it is considered that the crystalline properties of a metal thin film are as near to those of single crystal as possible.
At present, in electronic parts such as memory IC devices, metal wiring is formed on the surface of an amorphous thin film generally represented by a SiO.sub.2 interlayer insulative film with or without a barrier layer. Thus a metal thin film with the high crystalline properties cannot be formed by a so-called epitaxial crystal growth method where a single-crystal thin film can be grown by continuing the crystalline arrangement of an underlayer. As a result, metal wiring with the excellent electromigration endurance and high reliability is hardly obtained.
As described above, there is a problem that conventional electronic parts hardly have metal wiring with the high reliability.

Electronic parts and manufacturing method thereof


An apparatus and method for wafer rotation in microelectronics manufacturing equipment is presented. The present invention combines an external stator assembly having a plurality of electromagnetic actuator coils with an internal rotor assembly having a plurality of multipolar permanent magnets or ferromagnetic coupling tabs. The rotor assembly supports the semiconductor wafer or any other substrate inside the process chamber. The electromagnetic actuator coils of the stator assembly receive a plurality of multi-phase, controlled frequency electrical currents to create magnetic fields around the actuator coils that interact with the multipolar permanent magnets or ferromagnetic coupling tabs of the rotor assembly to provide the rotational force to rotate the rotor assembly and thus, rotate the semiconductor wafer or any other substrate within the process chamber.

Semiconductor integrated circuit manufacturing technologies utilize many single-wafer thermal, deposition, and plasma etch clean process steps through the chip fabrication process flows. Semiconductor wafer temperature and overall process uniformity are important requirements in semiconductor manufacturing equipment in order to maximize device manufacturing yield. In particular, precision wafer temperature uniformity and repeatability are essential requirements in thermal processing equipment including rapid thermal processing (RTP) systems. For instance, rapid thermal anneal (RTA), rapid thermal oxidation (RTO), and rapid thermal chemical-vapor deposition (RTCVD) processes must provide dynamically uniform and repeatable wafer temperatures with within-wafer temperature non-uniformities and wafer-to-wafer temperature variations of less than .+-.5.degree. C. in most thermal processes for sub-half-micron semiconductor IC production. Moreover, chemical-vapor deposition (CVD) processes must provide high-quality material layers (such as polysilicon, amorphous silicon, epitaxial silicon, silicon nitride, silicone dioxide, etc.) with uniform and repeatable material layer thicknesses. This places a demand for not only wafer temperature uniformity and repeatability control, but also reactant mass transport uniformity across the semiconductor wafer or any other substrate (e.g., then-film head, flat-panel display, etc.).
One effective method to establish improved wafer temperature uniformity and also improved reactant mass transport uniformity in single-wafer fabrication equipment is wafer rotation during wafer processing. For instance, wafer rotation in an RTP equipment can result in axisymmetrical wafer temperature distribution with improved temperature uniformity and enhanced repeatability. Moreover, wafer rotation in RTCVD and single-wafer plasma-enhanced CVD (PECVD) systems is effective in establishing an axisymmetrical reactant mass transport distribution profile over the wafer with improved deposition process uniformity, including uniform material layer thickness distribution.
Another application of wafer rotation in semiconductor manufacturing equipment is deposition rate enhancement in CVD Rotating Disk Reactor (RDR) systems. The typical wafer rotation speeds for temperature and process uniformity improvements are in the range of 20 RPM to 200 RPM (RPM=Revolutions per Minute). The RDR CVD systems, however, employ much higher wafer rotation speeds, typically in the range of 500 to over 1500 RPM. These relatively high rotation speeds are required in order to increase the material deposition rate in certain CVD process applications by reducing the boundary layer (stagnant layer) thickness, particularly for mass-transport-limited deposition processes.
The wafer rotation methods in single-wafer manufacturing equipment typically employ external rotation motors in conjunction with ferrofluidic feedthroughs. A ferrofluidic feedthrough provides a rotatable shaft wherein one end of the shaft can be placed within the process chamber (e.g., vacuum process chamber) while the other end of the shaft can be placed on the atmospheric side outside the process chamber. An electrical motor applies rotation to the ferrofluidic feedthrough shaft outside the fabrication equipment process chamber. This rotation is performed through direct mechanical transfer through to the ferrofluidic feedthrough shaft terminal located inside the fabrication equipment process chamber. The ferrofluidic shaft is connected to the wafer holder, or wafer susceptor or any wafer support structure, resulting in wafer rotation. This wafer rotation configuration has several disadvantages in terms of equipment reliability and performance.
Generally, ferrofluidic feedthroughs present a problem due to their limited life in operation. Wafer rotation mechanisms with ferrofluidic feedthroughs can also generate particulates in the process chamber, resulting in a reduction of the manufacturing yield due to an increase in chip defect density.
In vacuum or low-pressure CVD applications, the ferrofluidic feedthrough can also cause vacuum integrity problems and possible vacuum base pressure degradation over extended operation.
In RTP systems, the use of ferrofluidic feedthroughs for wafer rotation also has some obvious disadvantages and constraints. For instance, a typical ferrofluidic rotation assembly will consume the much needed space below the wafer backside. As a result, this type of wafer rotation eliminates availability of an access port facing the wafer backside, placing a serious constraint on equipment design.
An alternative method for wafer rotation was developed in the Microelectronics Manufacturing Science and Technology (MMST) program at Texas Instruments Incorporated for use in RTP systems. Both inventors of the present invention, Mehrdad M. Moslehi and Yong Jin Lee, were members of the MMST team who developed the Advanced-Vacuum Processor RTP or AVP RTP system. The MMST RTP rotation assembly was designed based on the use of two multipolar magnetic wheels, as schematically shown in FIG. 1. The internal multipolar magnetic field contains an even number of preferably radially magnetized magnets with alternating poles. These magnets are mounted on a soft magnetic material ring composed of a permeable magnetic material such as nickel-plated iron, 400 series stainless steel, or 1018 steel. The internal multipolar magnet wheel is attached to the wafer holder and a quartz or metallic liner (or wafer support structure) supported on a circular or ring-shaped mechanical bearing assembly. The rotation motor rotates the external magnet wheel through a gear coupling mechanism. Rotation of the external magnet wheel results in rotation of the internal magnet wheel due to the strong magnetic field coupling between the two sets of multipolar permanent magnets through the process chamber well. Rotation of the internal multipolar magnet wheel results in wafer rotation through rotation of the wafer support assembly.
The multipolar magnet rotation has an important advantage over the ferrofluidic feedthrough rotation since it does not employ a ferrofluidic feedthrough. As a result, the multipolar rotation assembly is a more reliable method of wafer rotation in semiconductor manufacturing equipment, including single-wafer vacuum and atmospheric fabrication equipment. Another advantage of the multipolar rotation design is the fact that it does not need to occupy the spaces directly above or below the semiconductor wafer. Thus, the regions directly above and below the wafer can be used for implementation of process energy sources as well as other fabrication equipment components and subassemblies.
However, this multipolar rotation design, like the other prior wafer rotation methods and devices, still presents the disadvantage of having mechanically moving parts outside the fabrication process chamber in the manufacturing clean room. These mechanical parts, such as the motor, motor shaft, and rotating gears, can be sources of equipment reliability and downtime problems as well as generators of particulates. Generation of particulates due to external mechanical motion and rotational friction can degrade the clean room cleanliness and class around the fabrication equipment.

Programmable ultraclean electromagnetic substrate rotation apparatus and method for microelectronics manufacturing equipment