A film target for laser-induced particle acceleration includes a first target layer on which a laser is incident; an intermediate layer located behind the first target layer along a propagating direction of the laser, and in which an intended ion beam is generated; and a second target layer located opposite to the first target layer with the intermediate layer interposed therebetween.

1. Field
The present disclosure relates to a film target for laser-induced particle acceleration and a method of manufacturing the same, and more particularly, to a film target in which an ion layer is inserted and a method of manufacturing the same.
2. Discussion of Related Art
Conventionally, research and development of laser-induced particle acceleration using an ultra-short intense laser have been actively conducted.
When the ultra-short intense laser is focused on a thin layer, high energy ion beams are generated. The biggest issue is improving the energy characteristic of the ion beam, that is, to increase energy and reduce the energy width in the laser accelerated ion beam generation techniques.
Currently, the most remarkable technique is to use a very thin film of tens of nanometers thickness. However, the technique for substantially reducing a preceding pulse of the laser is additionally required, and the energy characteristic of the ion beam resulting from a very thin film are also not continuously improved when the intensity of the laser is increased due to non-uniform transverse spatial distribution of the laser intensity.

Film target for laser-induced particle acceleration and method of manufacturing the same


A method and apparatus for using a non-volatile storage device includes reading device identification information from the non-volatile storage device, application identification information corresponding to a content application related to a type of content to be protected or utilized among a plurality of content applications is acquired, usage identification information is generated using the device identification information and the application identification information, and protecting or utilizing content using the usage identification information.

1. Field of the Invention
The present invention relates generally to a non-volatile storage device and more particularly, to a method and apparatus for effectively using a non-volatile storage device, while ensuring the security of the non-volatile storage device.
2. Description of the Related Art
Recently, many types of storage devices have been introduced, such as memory cards using a flash memory as storage means, Universal Serial Bus (USB) memory connectable to a USB port and Solid State Drive (SSD) storage. Recently developed storage devices are characterized by an increased storage capacity, a reduced device size, and an interface detachable from a host device. Therefore, the mobility of storage devices has been enhanced. Further, external hard disks are considered inexpensive storage devices and provide mobility relative to a conventional hard disk installed fixed to a PC.
In addition to storage devices, host devices, which are connected to the storage devices to enable utilization of content stored in the storage devices have also been made smaller and more mobile. In an environment that allows use of digital content stored in a storage device at any time and in any place, content is now distributed in the form of digital data.
However, digital content stored in a storage device is easily duplicated. As such, many techniques for preventing content duplication have been proposed. Although the content duplication prevention techniques are implemented in different manners, the techniques share in common that content utilization is allowed only for authorized persons.
As one of the content duplication prevention techniques, storage devices having a self-authentication function have been developed. For instance, a Secure Digital (SD) card may have a cryptographic function, for data security and a Digital Rights Management (DRM) to control the number of plays and play time, and can be implemented in a secure Multi-Media Card (MMC).
DRM, Content Protection for Recordable Media (CPRM) for SD cards, and Advanced Access Content System (AACS) for Blu-ray Disks™ provide device authentication methods based on Public Key Infrastructure (PKI) or other cryptographic technology.
According to the device authentication methods based on the CPRM and AACS technologies, a device Identifier (ID) unique to a storage device is stored in a read-only area and a cryptographic scheme is applied to the device ID in the process of manufacturing the storage device. A host device then authenticates the storage device using the device ID bound to data stored in the storage device, thereby protecting content.
The storage device may store content corresponding to one or more content applications. Herein, a content application refers to a category into which content can be classified. For example, video content such as movies, game content, and e-book content can be classified respectively into a movie application, a game application, and an e-book application.
Thus, content corresponding to a plurality of content applications can be stored in a single storage device. These content applications stored in the same storage device share the same device ID. Consequently, if the device ID is used inappropriately for any of the applications, the security of the entire system is breached.
That is, since content corresponding to many applications is stored in a storage device using the same device ID irrespective of the security usage of the storage device, occurrence of an inappropriate situation may lead to a discarding of the entire storage device.

Method and apparatus for using non-volatile storage device


The present invention discloses use of quantum dot gate FETs as a nonvolatile memory element that can be used in flash memory architecture as well as in a nonvolatile random access memory (NVRAM) configuration that does not require refreshing of data as in dynamic random access memories. Another innovation is the design of quantum dot gate nonvolatile memory and 3-state devices using modulation doped field-effect transistors (MODFETs), particularly MOS-gate field effect transistors. The cladded quantum dot gate MODFETs can be designed in Si—SiGe, InGaAs—InP and other material systems. The incorporation of 3-state FET devices in static random access memory (SRAM) cell is described to result in advanced multi-state memory operation. Unlike conventional SRAMs, the 3-state QD-FET based of SRAMs provides 3 and 4-state memory operation due to the utilization of the intermediate states particularly in CMOS configuration. QD-gate FETs, potentially suitable for 8 nm channel lengths, in vertical configuration (VFET) are also described.

1. Field of the Invention
This invention relates to field-effect transistors (FETs), MOS (Metal Oxide Semiconductor) devices, and MOS-gate modulation doped field-effect transistors (MODFETs) in which the gate consists of a layer or layer(s) of cladded nanoparticles or cladded quantum dots. The device structure behaves as fast access nonvolatile memory structure or as a FET exhibiting multiple states (such as three-state) in its drain current-gate voltage characteristics depending on the configuration of the layers in the gate region which consists layers of cladded quantum dots and thin insulating films. In particular, MOS gate quantum dot nonvolatile memory and 3-state devices in MODFET structural configuration are described. MODFET configured as self-aligned MOS gate incorporating QD layers in gate and asymmetric couple well transport channels is one of the embodiments described for fast access nonvolatile memories. This invention also describes basic cells using quantum dot (QD) gate nonvolatile memory devices, in either QD gate FET or QD gate MODFET configuration, functioning as nonvolatile random access memory (RAM) with appropriate access transistors and bit line architecture. The QD gate FET based nonvolatile RAM (NVRAM) will replace a dynamic random access memory (DRAM) without the need of refreshing or maintaining biasing. Using a multi-bit QD gate nonvolatile memory device, a multi-bit NVRAM is envisioned. In addition, various configurations of static RAMs (SRAMs) using 3-state QD gate FETs are described. Use of 3-state n-channel and p-channel QD FETs configured as SRAM cells are shown to result in 3 state or 4-state memory operations.
2. Brief Description of Prior Art
Nonvolatile memories are used to store information in microchips in flash memory and nonvolatile random access memory [NVRAM] configurations [Sharma, 2003]. Floating trap memory [realized as SONOS (Si-Oxide-Nitride-Oxide-Si) structures] and floating gate memories are two generally used configurations for nonvolatile ROM, EEPROM and flash memories [Brown and Brewer (1998) and Cappelletti et al. (1999)]. Another important category is nonvolatile random access memories (RAMs) which are generally realized as dynamic RAMs (DRAMs; these include magnetic RAMs (MRAMs), carbon nanotube based, and ferroelectric RAM devices), and nonvolatile static RAMs (SRAMs) [Sharma, 2003]. In the case of SRAMs, nonvolatile devices are connected in parallel to conventional SRAM cells. More recently carbon nanotube based memories, where the state of carbon nanotube depends on the gate operating conditions, are reported. These memory devices are continually being scaled down to smaller sizes (such as sub 100 nm) with fast access time and smaller operating voltages. FIG. 1(a) and FIG. 1(b) show schematically two floating gate nonvolatile memory with regular and asymmetric source and drain regions. FIG. 1(c-1, to c-3) describes Read, Program or Write, and Erase operation in NOR configuration. FIG. 2(a) and FIG. 2(b) show schematically front and back-gated floating trap SONOS nonvolatile memory structures, respectively. There are many structural and process variations, as well as circuit architectures (such as NOR and NAND) in designing the floating gate and floating trap nonvolatile memories.
Nonvolatile floating gate quantum dot memories (QDMs), shown in FIGS. 3(a) and 3(b), represent another class of nonvolatile memories that are reported in the literature [Tiwari et al (1995, 1996), and Hasaneen et al (2004)]. In quantum dot gate nonvolatile memories, the charge may be discretely localized on the quantum dots if they are separated from each other. Thus, the charge distribution on the floating quantum dots is not continuous like conventional floating gate devices, and is determined by the tunneling of carriers (either directly from channel or via hot carriers from the drain end or source end). FIG. 3(a) shows a quantum dot gate memory first proposed by Tiwari et al.(1995) FIG. 3(b) shows a strained layer Si transport channel which is fabricated on a SiGe layer [Hasannen et al 2004] to obtain desired carrier mobility in the transport channel. Other investigators including Ostraat et al.[2001] have reported floating gate memory structures using Si nanocrystals. Ostraat et al. have summarized the advantages of nanocrystal based charge storage including: 1) reduced punch-through by reducing drain to floating gate coupling, 2) reduction in stress induced leakage currents, and 3) potentially enhanced retention times. However, the conventional QD based nonvolatile memory suffers from small retention time and fluctuations of electrical characteristics. In the current quantum dot gate device processing there is little control over the location of Si nanoparticles in the gate, their sizes, as well as the separation between them. Invariably, these Si nanocrystal dots are not cladded they touch each other. Some reports outlining formation of cladding on self-organized dots is in the literature after the dots are created. Here, they again suffer from the dot size variation problem inherent in conventional fabrication techniques including those employ self-organization.
Jain [2008] in U.S. patent application Ser. No. 12/006,974 has described quantum dot (QD) gate nonvolatile memories (QDMs) and 3-state FETs using cladded quantum dots. Here, cladded quantum dots (with appropriate diameter Si core is cladded with an insulator such as SiOx) are assembled or deposited on the transport channel of a FET forming the floating gate. The cladding maintains a sufficient separation between Si nanodots. Along with a thin tunnel and control gate layers, the structures control the channel to dot tunneling and inter-dot tunneling, thus improving the 'write and read' and the retention time characteristics. In addition, layers of self-assembled SiOx—Si quantum dots provide discrete values of charge at the floating gate that in turn results in multiple values of threshold shifts suitable for multiple-bit 'Program' and 'Read' capability. This patent describes various QD-gate FETs in Si and other substrates (such as GaAs, InP, etc.) for nonvolatile memory and 3-state FET structures. In addition, the use of coupled-quantum well transport channel, which has more than one wells and appropriate number of barrier layers, is presented for improved device performance. FIGS. 4-6 describe some QD-gate nonvolatile memory structures, and FIG. 7 describes a 3-state FET device.
In this invention, we describe a circuit configuration which permits use of QD-gate nonvolatile memories functioning as random access memories (RAMs) where periodic refreshing like DRAMs is not needed. What is also described in this application is the use of QD gate MODFET structures which are potentially faster than conventional QD gate FETs. In particular, MOS-gate Si MODFETs as memory and 3-state FETs are described. Three layers of quantum dots in the gate may result in two intermediate states (overall 4-states) in MODFET devices presented here.

Nonvolatile memory and three-state FETs using cladded quantum dot gate structure


Holes of a predetermined depth are formed in an outer peripheral surface of an outer ring. The outer ring is integrally connected to a housing by insert molding, so that a resin, forming the housing, is received in the holes. Alternatively, pins are fixedly inserted respectively in the holes, and are fitted respectively in grooves, notches or through holes formed in the housing. With this construction, a creep is positively prevented without the need for providing an interference fit between the housing and the outer ring.

This invention relates to a structure of fixing a one-way clutch to a housing. The invention can also be applied to a so-called rolling bearing-integrated one-way clutch in which a one-way clutch and a rolling bearing have common outer or inner rings.
Generally, a one-way clutch includes a plurality of wedge elements (such as sprags or rollers), and an urging member for urging these wedge elements in a predetermined direction (locking direction). Sprags, rollers or the like are used as the wedge elements, and when the inner and outer rings rotate relative to each other, a torque is transmitted in one direction only by the interaction between the shape of the wedge elements and the shape of a space between the inner and outer rings, and the inner and outer rings idle relative to each other in the other direction. There is also known a so-called rolling bearing-integrated one-way clutch in which the outer ring and inner ring of such a one-way clutch serve also as common at least one of outer and inner rings for a rolling bearing.
In the above one-way clutch, usually, the inner ring is fixed to a shaft, while the outer ring is received within a housing, and is fixed thereto so that the torque transmission/idling is effected between the shaft and the housing. Therefore, the inner ring and the shaftd need to move in unison, while the outer ring and the housing need to move in unison. Therefore, the inner ring and the shaft are fittingly fixed to each other by interference fit, while the outer ring and the housing are fittingly fixed to each other by interference fit.
Incidentally, in the case where the housing is formed, for example, by press working, and its dimensional accuracy and shape accuracy are low, it is difficult to control the dimension of the outer diameter of the outer ring so as to fit the outer ring in the housing by the predetermined interference fit. As a technique for solving this problem, there has been proposed a one-way clutch (see, for example, Patent Literature 1) in which an eccentric groove is formed in an outer periphery of an outer ring, and a stop ring with an outwardly-projecting pressing portion, is mounted in the eccentric groove so that a so-called creep phenomenon (in which the outer ring and a housing rotate relative to each other) will not occur even when a certain degree of clearance exists between the outer ring and the housing.
Patent Literature 1: JP-A-11-108084
In the above related creep prevention technique in which the stop ring is mounted in the eccentric groove formed in the outer ring, a considerable cost is required for forming the eccentric groove in the outer ring, and besides it is difficult to completely eliminate a possibility that a slip develops between the stop ring and the outer ring and also between the stop ring and the housing with respect to the relation between the depth of the eccentric groove and the dimension of the inner diameter of a housing hole, since a resilient force of the stop ring is utilized. Therefore, it is difficult to completely solve the problem that creep develops between the outer ring and the housing.
In recent years, with the advanced study of resins, there have been developed resins having excellent mechanical strength. For example, with respect to a one-way clutch used in a drive system of a washing/dewatering basket (rotating vessel) of a washing/dewatering machine, it has been proposed to form a housing of this one-way clutch, using a resin. In the case of using such a resin-molded housing, a certain degree of effect can be expected by the use of the above related technique, but there still remains the problem that the cost for forming the eccentric groove in the outer ring increases considerably.
For fitting the outer ring of the one-way clutch in the hole in the resin-molded housing, it is advantageous to use a method in which the outer ring is integrally connected to the housing by insert molding. In the insert molding method, however, it is substantially impossible to integrally connect the outer ring to the housing by interference fit, and it is expected that there arises a problem that the creep phenomenon (in which the two rotates relative to each other) is liable to develop due for example to the difference in thermal expansion between the two.


At a server, during one or more first time periods, event data is received from a first client with respect to one or more events that occur at the first client. The event data is sent by the first client under control of a first application resident on a removable storage device. At the server, during one or more second time periods, event data is received from a second client with respect to one or more events that occur at the second client. The event data is sent by the second client under control of the first application resident on the removable storage device. The first and second time periods are non-overlapping.

It is difficult to receive event data from different clients being used by the same one user during different time periods in such a way that the event data received from the different clients is automatically associated with the same one user, without requiring installation of special software on each of the different clients.

Recording client events using application resident on removable storage device


The subject of the invention is a process for producing polyamide, copolyamide, polyolefin, copolyester amide or fluorocarbon resin powder particles on to the surface of which has been grafted at least one functionalized grafting monomer, characterized in that it comprises: a) a step of blending the polyamide or copolyamide powder particles with the functionalized grafting monomer; followed by b) a step of irradiating the powder impregnated with functionalized grafting monomer resulting from a) with photons (γ-radiation) or electrons (β-radiation), with a dose ranging from 0.5 to 15 Mrad. The invention also relates to the particles grafted in this way and to the compositions containing such particles.

Within the context of surface coatings, such as UV-crosslinkable coatings, polyester coatings, polyurethane coatings and acrylic coatings, among others, it is important to have an abrasion-resistant and scratch-resistant material and more generally to improve the mechanical resistance properties of the coating. This resistance is provided by the addition in these media (UV-crosslinkable, polyester, polyurethane or acrylic medium) of elements known for their mechanical resistance properties, such as polyamide or copolyamide powders.
The same problem arises in hydrophilic media, namely that of the compatibility of the hydrophobic PA or coPA powders that are added to these media.
Methods for functionalizing polyamide powders, in order to improve their compatibility with coatings, do exist. In most cases, this consists in introducing a functional compound into the polymer during its polymerization. However, the copolymerization of these functional compounds is often difficult to control, resulting in non-uniform distributions. Furthermore, the many process steps (grinding, drying, screening, etc.) often have to be adapted so as to preserve the reactivity of these functional compounds until the final powder is obtained.
It is therefore important to have polymer, particularly PA or coPA, powder particles that are compatible in various media, it being possible for this compatibility to be rapidly provided, in few steps and according to the customer's requirements, on a base product sold on a large scale, namely the polymer. This method of compatibilization must be applicable for all polyamide or copolyamide powders, independently of their production process.
The technical problem to be solved is a problem of compatibility between these media and said polymer powders, particularly PA or coPA powders, and of preservation of the active principles in the one medium without them being able to migrate out of said medium.
The Applicant has therefore discovered the possibility of adding powder particles to media, particularly polyamide or copolyamide particles, that are rendered compatible with such media by a grafting process carried out downstream of the production of said powders. This compatibility is made possible thanks to a process for grafting at least bifunctionalized grafts onto the powder particles, which make the powder particles reactive or compatible with respect to the media in which they may subsequently be added.
For example, in the case of a hydrophilic medium, the grafting onto a hydrophobic polyamide or copolyamide particle of a graft having a hydrophilic functional group makes it easier to disperse the particle in said medium, giving this particle hydrophilic properties.
The functionalization of the powder by grafting may be used to directly modify the surface properties of polymer, particularly polyamide or copolyamide, powders.

Grafting onto a polyamide powder by gamma-irradiation


A portable end prep facer for refurbishing piping components in the field comprises a chuck to which a cylindrical mandrel is affixed where the chuck can be centrally mounted relative to a longitudinal axis of the piping component by affixing the chuck either to the I.D. or the O.D. of the piping component. A non-rotatable torque housing surrounds the mandrel and is longitudinally positionable there along. A cutting head assembly is journaled for rotation about the mandrel by means of bearings mounted in the torque housing and coapting with an annular race formed in a face plate of the cutting head assembly. Mounted on the face plate is a variable speed reversing drive mechanism that couples to a lead screw that forms a part of a tool support guide member. A sliding head is affixed to the lead screw and it, in turn, supports a tool bit holder that can be manually adjusted to set the depth of cut when machining the flange portion of a piping component being repaired.

I. Field of the Invention
This invention relates generally to portable, on-site metal machining equipment, and more particularly to an apparatus that can be mounted on a piping component for machining a surface of that component.
II. Discussion of the Prior Art
Oil refineries, chemical processing plants, pipeline companies and power plants typically provide fluid handling through piping systems where adjacent piping components are connected together by running bolts through mating flanges thereof. Such piping components may include straight pipe sections, elbows, nozzles, reducers, valves, etc. These components are typically subjected to fluids under high pressure, high temperatures, adverse atmospheric conditions, and having corrosive properties. Over time, such piping components may develop leaks due to scoring, warpage, and metal erosion, especially on flange faces. When this happens, it is necessary to machine the flange faces to remove grooves due to scoring and to restore a true flat surface to the flange meeting the original specifications for the pipe segments. Flanges on large diameter pipes also will include an annular groove having tapered side walls for receiving a metal seal ring therein. These grooves are also subject to wear and periodically need to be machined to insure seal integrity. Flanged pipes may also require internal diameter boring and outside diameter turning operations in the filed.
When it is considered that in many industrial installations, the piping components may vary anywhere from about 30 inches to 120 inches in diameter and may weigh several tons, it is impractical to transport such pipe components to a machine shop facility for refurbishment. Accordingly, a need exists for a machine for refacing flanges of piping components in the field.
In the Hunt Patent, U.S. Pat. No. 4,852,435, there is disclosed a portable machining tool for refacing or regrooving pipe flanges. It comprises a chuck that is adapted to be mounted within the bore of the pipe component to be refurbished. The chuck supports a machine body that is motor driven so as to rotate about an axis that is aligned with the center of the chuck. Mounted on the machine body is a tool bar that is fed in a direction transverse to the longitudinal axis of the pipe in which the chuck is mounted and it carries a cutting tool for engaging the surface of the flange being refaced so as to remove metal as the tool bar is being fed across the face of the flange.
Another portable flange facer adapted for use in the field is available from the Climax Machine Tool Company of Newberg, Oreg., and which is more particularly described in the Strait Patent, U.S. Pat. No. 5,630,346. With reference to that patent, its tool bar 200 feeds radially in and out. This presents a problem when working in confined spaces. More importantly, the feed system depicted in FIGS. 4, 5 and 6 of the '346 patent does not provide continuous feed. Instead, the feed stops and starts with each actuation of the cams 100A and 100B on the rocker arms 152A and 152B. This tends to leave an uneven surface finish. Such a condition is not acceptable in certain flange sealing applications.
The prior art devices suffer from a number of other drawbacks that limit its capabilities. For example, in the Strait '346 patent, the tool base 234 cannot swivel and, hence, the cutting tool 254 cannot be used for cutting angled grooves when desired.
It is sometimes advantageous to mount the chuck to the inside diameter of the pipe component whose flange is to be refaced. In other applications, it is advantageous to affix the chuck to the perimeter of the flange itself. No provision is made in the prior art for allowing one or the other of these two mounting modes. The device described in the Hunt '435 patent suffers from a number of operational deficiencies. First of all, there are no mitering capabilities in the chuck assembly, making setup and centering somewhat difficult. Moreover, there is no provision for translating the rotatable main body 70 relative to the spindle 10. In terms of performance, the feed resulting from the use of the feed cam 94 on the cam follower 96 results in an inferior surface finish due to the inherent lurching involved. Further, there is no provision in the Hunt machine for adjustment of the rotational bearing 72 following a period of use and resulting wear. Furthermore, it is not possible to reverse the feed direction without first removing and reversing the position of the feed slave unit 110.
It is, therefore, desirable to have an end prep facer for refurbishing piping components that obviates the aforementioned problems inherent in prior art machines used for this purpose.


Disclosed in the present disclosure is a paging processing method, a network device, a user equipment (UE), and a computer storage medium. The method comprises: obtaining a terminal type of a UE, and cell identifier information or base station identifier information corresponding to the position of the UE; and if the terminal type of the UE is a static type, determining a paging range for the UE on the basis of the cell identifier information or base station identifier information corresponding to the position of the UE.

A 5G UE is similar to a UE in LTE. First, the UE performs an attachment registration to a core network. Then context information of the UE exists at the core network. One piece of the information is location area information (i.e., a TA (Tracking Area) list). When there is a paging for the UE, the core network sends a paging message through all base stations in the TA, and triggers these base stations to page for the UE in all cells under the base stations. Therefore, a paging for a UE is at least that all cells in a TA range send the paging message. However, for a 5G network, a large quantity of Internet of Things terminals may exist, and such terminals stay only inside one cell, without mobility. Therefore, for such terminals, if the paging is still sent within a TA range in a traditional mode, wireless resources will be greatly wasted.

Paging processing method, network device, user equipment, and computer storage medium

GUANGDONG OPPO MOBILE TELECOMMUNICATIONS CORP., LTD.


Disclosed is a rotating compensator sample system investigation system which includes a source of a beam of electromagnetic radiation, a polarizer, a stage for supporting a sample system, a beam splitting analyzer, and at least two detector systems which are positioned each to intercept a different of the at least two electromagnetic beams which emerge from the beam splitting analyzer. Also disclosed is a regression based approach to calibration which simultaneously extracts a sample system PSI and DELTA.

The present invention relates to Rotating Compensator Sample System Investigation Systems and more particularly to use of Beam Splitting Analyzer means therein to simultaneously provide two electromagnetic beams, each thereof having a different effective Analyzer Azimuthal angle imposed thereupon. In use each of said two beams of electromagnetic radiation is directed to a separate detector such that two corresponding data sets are simultaneously, rather than sequentially as required where conventional Rotatable Analyzer means are utilized, obtained.
The practice of ellipsometry is well established as a non-destructive approach to determining characteristics of sample systems, and can be practiced in real time. The topic is well described in a number of publications, one such publication being a review paper by Collins, titled xe2x80x9cAutomatic Rotating Element Ellipsometers: Calibration, Operation and Real-Time Applicationsxe2x80x9d, Rev. Sci. Instrum., 61(8) (1990).
Continuing, in general, modern practice of ellipsometry typically involves causing a spectroscopic beam of electromagnetic radiation, in a known state of polarization, to interact with a sample system at at least one angle of incidence with respect to a normal to a surface thereof, in a plane of incidence. (Note, a plane of incidence contains both a normal to a surface of an investigated sample system and the locus of said beam of electromagnetic radiation). Changes in the polarization state of said beam of electromagnetic radiation which occur as a result of said interaction with said sample system are indicative of the structure and composition of said sample system. The practice of ellipsometry further involves proposing a mathematical model of the ellipsometer system and the sample system investigated by use thereof, and experimental data is then obtained by application of the ellipsometer system. This is typically followed by application of a square error reducing mathematical regression to the end that parameters in the mathematical model which characterize the sample system are evaluated, such that the obtained experimental data, and values calculated by use of the mathematical model, are essentially the same.
A typical goal in ellipsometry is to obtain, for each wavelength in, and angle of incidence of said beam of electromagnetic radiation caused to interact with a sample system, sample system characterizing PSI and DELTA values, (where PSI is related to a change in a ratio of magnitudes of orthogonal components rp/rs in said beam of electromagnetic radiation, and wherein DELTA is related to a phase shift entered between said orthogonal components rp and rs), caused by interaction with said sample system:
PSI=|rp/rs|;
and
DELTA=(xcex94rpxe2x88x92xcex94rs).
As alluded to, the practice of ellipsometry requires that a mathematical model be derived and provided for a sample system and for the ellipsometer system being applied. In that light it must be appreciated that an ellipsometer system which is applied to investigate a sample system is, generally, sequentially comprised of:
a. a Source of a beam electromagnetic radiation;
b. a Polarizer element;
c. optionally a compensator element;
d. (additional element(s));
e. a sample system;
f. (additional element(s));
g. optionally a compensator element;
h. an Analyzer element; and
i. a Spectroscopic Detector System.
Each of said components b.-i. must be accurately represented by a mathematical model of the ellipsometer system along with a vector which represents a beam of electromagnetic radiation provided from said source of a beam electromagnetic radiation, Identified in a. above)
Various conventional ellipsometer configurations provide that a Polarizer, Analyzer and/or Compensator(s) can be rotated during data acquisition, and are describe variously as Rotating Polarizer (RPE), Rotating Analyzer (RAE) and Rotating Compensator (RCE) Ellipsometer Systems. It is noted that nulling ellipsometers, in which elements therein are rotatable rather than rotating, and that ellipsometers containing modulation elements also are known.
Continuing, in use, data sets can be obtained with an ellipsometer system configured:
with a sample system present,
sequentially for cases where other sample systems are present, and
where the ellipsometer system is configured in a straight-through configuration wherein a beam of electromagnetic radiation is caused to pass straight through the ellipsometer system without interacting with a sample system.
Simultaneous mathematical regression utilizing multiple data sets can allow calibration of ellipsometers and evaluation of sample system characterizing PSI and DELTA values. The obtaining of numerous data sets with an ellipsometer system configured with, for instance, a sequence of sample systems present and/or wherein a sequential plurality of polarization and/or analyzer azimuthal angle states are imposed on an electromagnetic beam caused to interact with one or more sample systems, can allow system calibration of numerous ellipsometer system variables. It is noted, however, that it is often inconvenient to have to sequentially reconfigure an ellipsometer system to obtain multiple data sets. It is that problem to which the present invention provides an answer.
As it is relevant to the present invention it is noted at this point that polarizer and analyzer elements often comprise rotatable elements which serve to provide, or detect, a single beam of linearly polarized electromagnetic radiation, and that multiple data sets can correspond to multiple azimuthal angle rotation positions of said analyzer.
With the present invention in mind it is disclosed that relevant Patents include U.S. Pat. No. 5,872,630 to Johs et al., (said 630 Patent being incorporated by reference hereinto), which describes a Rotating Compensator Ellipsometer System. Said 630 Patent rotating compensator ellipsometer is described as being a sample system investigation system comprising a source of a beam of electromagnetic radiation, a polarizer, a stage for supporting a sample system, an analyzer, and a detector system, said rotating compensator sample system investigation system further comprises at least one compensator(s) positioned at a location selected from the group consisting of:
before said stage for supporting a sample system; and
after said stage for supporting a sample system; and
both before and after said stage for supporting a sample system;
such that when said rotating compensator sample system investigation system is used to investigate a sample system present on said stage for supporting a sample system, said polarizer means and analyzer means are maintained essentially fixed in position and at least one of said at least one compensator(s) is caused to continuously rotate while a beam of electromagnetic radiation produced by said source of a beam of electromagnetic radiation is caused to pass through said polarizer means and said at least one compensator(s), said beam of electromagnetic radiation being also caused to interact with said sample system and pass through said analyzer means and enter said detector system.
Further disclosed is a U.S. Pat. No. 5,416,588 to Ducharme which describes use of a Wollaston Prism as an Analyzer beam splitting means in said Modulation Element Ellipsometer System.
U.S. Pat. No. 5,946,098 to Johs et al. is disclosed as providing numerous designs for compensators which can be used in a present invention system. Said 098 Patent is incorporated by reference herewithin.
As the present invention includes regression calibration, a Patent to Thompson et al. U.S. Pat. No. 5,706,212 is also disclosed as it teaches a mathematical regression based double Fourier series ellipsometer calibration procedure for application, primarily, in calibrating ellipsometers system utilized in infrared wavelength range. Bi-refringent, transmissive window-like compensators are described as present in the system thereof, and discussion of correlation of retardations entered by sequentially adjacent elements which do not rotate with respect to one another during data acquisition is described therein. Said 212 Patent is incorporated by reference herewithin.
Also, while not citing the Johs paper, a Patent to Chen et al., U.S. Pat. No. 5,581,350, describes regression calibration of ellipsometer systems.
Patents which describe compensator systems for application in present invention systems are:
U.S. Pat. No. 5,963,325;
U.S. Pat. No. 5,946,098;
U.S. Pat. No. 6,084,674;
U.S. Pat. No. 6,084,675;
U.S. Pat. No. 6,100,981;
U.S. Pat. No. 6,118,537; and
U.S. Pat. No. 6,141,102.
U.S. Pat. No. 5,002,371 to Wright and Russian Patent No. SU 1432439 are also mentioned as they describe means for beam splitting.
A paper, which is incorporated by reference herewithin, is by Johs, and titled xe2x80x9cRegression Calibration Method for Rotating Element Ellipsometersxe2x80x9d, Thin Solid Films, 234 (1993). Said paper is disclosed as it describes a mathematical regression based approach to calibrating ellipsometer systems.
Further cited is a paper titled xe2x80x9cA Two-Channel Polarization Modulation Ellipsometerxe2x80x9d, Jellison and Modine, Appl. Opt., (October 1990).
Even in view of relevant prior art, there remains need for a more convenient approach to simultaneously providing multiple data sets in the context of rotating compensator material system investigation systems. The present invention responds to said identified needs.
The 630 Patent to Johs et al. cited in the Background Section of this Specification describes, in the context of a Rotating Compensator Sample System Investigation System, describes the presence of Rotatable Polarizer and Analyzer elements which can be set to various static positions during data acquisition, during which data acquisition at least one present Compensator is caused to rotate. To calibrate said system it is typically required that two data sets be obtained, which data sets can correspond to two azimuthal angle settings of the Analyzer and/or Polarizer element.
The present invention rotating compensator sample system investigation system comprises a source of a beam of electromagnetic radiation, a polarizer, a stage for supporting a sample system, a beam splitting analyzer means, and at least two detector systems, each said detector system being positioned to separately intercept one of at least two beams which emerge from said beam splitting analyzer means; said rotating compensator sample system investigation system further comprising at least one compensator(s) positioned at a location selected from the group consisting of:
before said stage for supporting a sample system; and
after said stage for supporting a sample system; and
both before and after said stage for supporting a sample system.
It is specifically noted that the present invention rotating compensator sample system Investigation system differs from that disclosed in the 630 Patent, (and from all other known similar Rotating Compensator based systems), in that in place of a Rotatable Analyzer and a Single Detector, (typically comprising multiple detector elements), there is present:
a beam splitting analyzer means, and at least two detector systems, each said detector system being positioned to separately intercept one of at least two beams of electromagnetic radiation which emerge from said beam splitting analyzer means . . .
In use, when said present invention rotating compensator sample system investigation system is used to investigate a sample system present on said stage for supporting a sample system, said polarizer means and beam splitting analyzer means are maintained essentially fixed in position and at least one of said at least one compensator(s) is caused to continuously rotate while a beam of electromagnetic radiation produced by said source of a beam of electromagnetic radiation is caused to pass through said polarizer means and said at least one compensator(s), said beam of electromagnetic radiation being also caused to interact with said sample system and pass through said beam splitting analyzer means such that two beams of electromagnetic radiation, (eg. affected to correspond to two azimuthal positions of a conventional analyzer means), are simultaneously caused to each separately enter different of said at least two detector systems.
A method of calibrating a rotating compensator sample system investigation system while extracting sample system PSI and DELTA values, comprising the steps of:
a. providing a rotating compensator sample system investigation system as described above; in either order practicing steps b. and steps (c. and d.):
b. developing a mathematical model of said rotating compensator sample system investigation system which comprises as calibration parameter variables polarizer azimuthal angle orientation, present sample system PSI, present sample system DELTA, compensator azimuthal angle orientation(s), matrix components of said at least one compensator(s), and effective beam splitting analyzer means azimuthal angle orientations, which mathematical model is effectively a transfer function which enables calculation of electromagnetic beam intensity as a function of wavelength detected by a detector when given intensity as a function of wavelength provided by said source of a beam of electromagnetic radiation;
c. causing a beam of electromagnetic radiation produced by said source of a beam of electromagnetic radiation, to pass through said polarizer, interact with a sample system caused to be in the path thereof, pass through said beam splitting analyzer means such that at least two beams emerge therefrom with each thereof entering a different one of said at least two detector systems; said beam of electromagnetic radiation also being caused to pass through said compensator(s) positioned at a location selected from the group consisting of:
before said stage for supporting a sample system;
after said stage for supporting a sample system; and
both before and after said stage for supporting a sample system;
d. simultaneously obtaining two data sets of intensity values, corresponding to the effective azimuthal angles of two beams of electromagnetic radiation exiting said beam splitting analyzer means over time, while at least one of said at least one compensator(s) is caused to continuously rotate;
e. performing a mathematical regression of said mathematical model onto said at least two data sets;
said regression based calibration procedure serving to compensate said mathematical model for azimuthal angles of said polarizer, said at least one compensator(s), matrix elements of said at least one compensator(s), and said two effective analyzer angles, in addition evaluating the PSI and DELTA of the present sample system.
Said method of calibrating a rotating compensator sample system investigation system can further comprise, in the step d. simultaneously obtaining two data sets of intensity values vs. effective azimuthal angles of said beam splitting analyzer means for each of two sample systems; and in step e. including simultaneous regression onto data for both sample systems.
Finally, as the present invention comprises a rotating compensator, it is noted that any functional compensator can be utilized, however, for reference, a catalog of suitable Compensators, (many Patented by the J. A. Woollam Co.), are recited directly. Compensators disclosed in co-pending patent application Ser. No. 09/496,011 are:
a single element compensator;
a compensator system comprised of at least two per se. zero-order waveplates (MOA) and (MOB), said per se. zero-order waveplates (MOA) and (MOB) having their respective fast axes rotated to a position offset from zero or ninety degrees with respect to one another, with a nominal value being forty-five degrees;
a compensator system comprised of a combination of at least a first (ZO1) and a second (ZO2) effective zero-order wave plate, said first (ZO1) effective zero-order wave plate being comprised of two multiple order waveplates (MOA1) and (MOB1) which are combined with the fast axes thereof oriented at a nominal ninety degrees to one another, and said second (ZO2) effective zero-order wave plate being comprised of two multiple order waveplates (MOA2) and (MOB2) which are combined with the fast axes thereof oriented at a nominal ninety degrees to one another; the fast axes (FAA2) and (FAB2) of the multiple order waveplates (MOA2) and (MOB2) in said second effective zero-order wave plate (ZO2) being rotated to a position at a nominal forty-five degrees to the fast axes (FAA1) and (FAB1), respectively, of the multiple order waveplates (MOA1) and (MOB1) in said first effective zero-order waveplate (ZO1);
a compensator system comprised of a combination of at least a first (ZO1) and a second (ZO2) effective zero-order wave plate, said first (ZO1) effective zero-order wave plate being comprised of two multiple order waveplates (MOA1) and (MOB1) which are combined with the fast axes thereof oriented at a nominal ninety degrees to one another, and said second (ZO2) effective zero-order wave plate being comprised of two multiple order waveplates (MOA2) and (MOB2) which are combined with the fast axes thereof oriented at a nominal ninety degrees to one another; the fast axes (FAA2) and (FAB2) of the multiple order waveplates (MOA2) and (MOB2) in said second effective zero-order wave plate (ZO2) being rotated to a position away from zero or ninety degrees with respect to the fast axes (FAA1) and (FAB1), respectively, of the multiple order waveplates (MOA1) and (MOB1) in said first effective zero-order waveplate (ZO1);
a compensator system comprised of at least one zero-order waveplate, ((MOA) or (MOB)), and at least one effective zero-order waveplate, ((ZO2) or (ZO1) respectively), said effective zero-order wave plate, ((ZO2) or (ZO1)), being comprised of two multiple order waveplates which are combined with the fast axes thereof oriented at a nominal ninety degrees to one another, the fast axes of the multiple order waveplates in said effective zero-order wave plate, ((ZO2) or (ZO1)), being rotated to a position away from zero or ninety degrees with respect to the fast axis of the zero-order waveplate, ((MOA) or (MOB)).
Additional compensator systems, previously disclosed in patent application Ser. No. 08/997,311, (now U.S. Pat. No. 5,946,098 which is incorporated herewithin), and CIP""s therefrom, which compensators are specifically within the scope of application with the present invention are:
a compensator system comprised of a first triangular shaped element, which as viewed in side elevation presents with first and second sides which project to the left and right and downward from an upper point, which first triangular shaped element first and second sides have reflective outer surfaces; said retarder system further comprising a second triangular shaped element which as viewed in side elevation presents with first and second sides which project to the left and right and downward from an upper point, said second triangular shaped element being made of material which provides reflective interfaces on first and second sides inside thereof; said second triangular shaped element being oriented with respect to the first triangular shaped element such that the upper point of said second triangular shaped element is oriented essentially vertically directly above the upper point of said first triangular shaped element; such that in use an input electromagnetic beam of radiation caused to approach one of said first and second sides of said first triangular shaped element along an essentially horizontally oriented locus, is caused to externally reflect from an outer surface thereof and travel along a locus which is essentially upwardly vertically oriented, then enter said second triangular shaped element and essentially totally internally reflect from one of said first and second sides thereof, then proceed along an essentially horizontal locus and essentially totally internally reflect from the other of said first and second sides and proceed along an essentially downward vertically oriented locus, then externally reflect from the other of said first and second sides of said first triangular shaped elements and proceed along an essentially horizontally oriented locus which is undeviated and undisplaced from the essentially horizontally oriented locus of said input beam of essentially horizontally oriented electromagnetic radiation even when said retarder is caused to rotate; with a result being that retardation is entered between orthogonal components of said input electromagnetic beam of radiation;
a compensator system comprised of, as viewed in upright side elevation, first and second orientation adjustable mirrored elements which each have reflective surfaces; said compensator/retarder system further comprising a third element which, as viewed in upright side elevation, presents with first and second sides which project to the left and right and downward from an upper point, said third element being made of material which provides reflective interfaces on first and second sides inside thereof; said third element being oriented with respect to said first and second orientation adjustable mirrored elements such that in use an input electromagnetic beam of radiation caused to approach one of said first and second orientation adjustable mirrored elements along an essentially horizontally oriented locus, is caused to externally reflect therefrom and travel along a locus which is essentially upwardly vertically oriented, then enter said third element and essentially totally internally reflect from one of said first and second sides thereof, then proceed along an essentially horizontal locus and essentially totally internally reflect from the other of said first and second sides and proceed along an essentially downward vertically oriented locus, then reflect from the other of said first and second orientation adjustable mirrored elements and proceed along an essentially horizontally oriented propagation direction locus which is essentially undeviated and undisplaced from the essentially horizontally oriented propagation direction locus of said input beam of essentially horizontally oriented electromagnetic radiation even when said compensator/retarder is caused to rotate; with a result being that retardation is entered between orthogonal components of said input electromagnetic beam of radiation;
a compensator system comprised of a parallelogram shaped element which, as viewed in side elevation, has top and bottom sides parallel to one another, both said top and bottom sides being oriented essentially horizontally, said retarder system also having right and left sides parallel to one another, both said right and left sides being oriented at an angle to horizontal, said retarder being made of a material with an index of refraction greater than that of a surrounding ambient; such that in use an input beam of electromagnetic radiation caused to enter a side of said retarder selected from the group consisting of: (right and left), along an essentially horizontally oriented locus, is caused to diffracted inside said retarder system and follow a locus which causes it to essentially totally internally reflect from internal interfaces of both said top and bottom sides, and emerge from said retarder system from a side selected from the group consisting of (left and right respectively), along an essentially horizontally oriented locus which is undeviated and undisplaced from the essentially horizontally oriented locus of said input beam of essentially horizontally oriented electromagnetic radiation even when said retarder is caused to rotate; with a result being that retardation is entered between orthogonal components of said input electromagnetic beam of radiation;
a compensator system comprised of first and second triangular shaped elements, said first triangular shaped element, as viewed in side elevation, presenting with first and second sides which project to the left and right and downward from an upper point, said first triangular shaped element further comprising a third side which is oriented essentially horizontally and which is continuous with, and present below said first and second sides; and said second triangular shaped element, as viewed in side elevation, presenting with first and second sides which project to the left and right and upward from an upper point, said second triangular shaped element further comprising a third side which is oriented essentially horizontally and which is continuous with, and present above said first and second sides; said first and second triangular shaped elements being positioned so that a rightmost side of one of said first and second triangular shaped elements is in contact with a leftmost side of the other of said first and second triangular shaped elements over at least a portion of the lengths thereof; said first and second triangular shaped elements each being made of material with an index of refraction greater than that of a surrounding ambient; such that in use an input beam of electromagnetic radiation caused to enter a side of a triangular shaped element selected from the group consisting of: (first and second), not in contact with said other triangular shape element, is caused to diffracted inside said retarder and follow a locus which causes it to essentially totally internally reflect from internal interfaces of said third sides of each of said first and second triangular shaped elements, and emerge from a side of said triangular shaped element selected from the group consisting of: (second and first), not in contact with said other triangular shape element, along an essentially horizontally oriented locus which is undeviated and undisplaced from the essentially horizontally oriented locus of said input beam of essentially horizontally oriented electromagnetic radiation even when said retarder is caused to rotate; with a result being that retardation is entered between orthogonal components of said input electromagnetic beam of radiation;
a compensator system comprised of a triangular shaped element, which as viewed in side elevation presents with first and second sides which project to the left and right and downward from an upper point, said retarder system further comprising a third side which is oriented essentially horizontally and which is continuous with, and present below said first and second sides; said retarder system being made of a material with an index of refraction greater than that of a surrounding ambient; such that in use a an input beam of electromagnetic radiation caused to enter a side of said retarder system selected from the group consisting of: (first and second), along an essentially horizontally oriented locus, is caused to diffracted inside said retarder system and follow a locus which causes it to essentially totally internally reflect from internal interface of said third sides, and emerge from said retarder from a side selected from the group consisting of (second and first respectively), along an essentially horizontally oriented locus which is undeviated and undisplaced from the essentially horizontally oriented locus of said input beam of essentially horizontally oriented electromagnetic radiation even when said retarder system is caused to rotate; with a result being that retardation is entered between orthogonal components of said input electromagnetic beam of radiation; and
a compensator system comprised of first and second Berek-type retarders which each have an optical axes essentially perpendicular to a surface thereof, each of which first and second Berek-type retarders has a fast axis, said fast axes in said first and second Berek-type retarders being oriented in an orientation selected from the group consisting of: (parallel to one another and other than parallel to one another); said first and second Berek-type retarders each presenting with first and second essentially parallel sides, and said first and second Berek-type retarders being oriented, as viewed in side elevation, with first and second sides of one Berek-type retarder being oriented other than parallel to first and second sides of the other Berek-type retarder; such that in use an incident beam of electromagnetic radiation is caused to impinge upon one of said first and second Berek-type retarders on one side thereof, partially transmit therethrough then impinge upon the second Berek-type retarder, on one side thereof, and partially transmit therethrough such that a polarized beam of electromagnetic radiation passing through both of said first and second Berek-type retarders emerges from the second thereof in a polarized state with a phase angle between orthogonal components therein which is different than that in the incident beam of electromagnetic radiation, and in a propagation direction which is essentially undeviated and undisplaced from the incident beam of electromagnetic radiation even when said retarder system is caused to rotate; with a result being that retardation is entered between orthogonal components of said input electromagnetic beam of radiation;
a compensator system comprised of first and second Berek-type retarders which each have an optical axes essentially perpendicular to a surface thereof, each of which first and second Berek-type retarders has a fast axis, said fast axes in said first and second Berek-type retarders being oriented other than parallel to one another; said first and second Berek-type retarders each presenting with first and second essentially parallel sides, and said first and second Berek-type retarders being oriented, as viewed in side elevation, with first and second sides of one Berek-type retarder being oriented other than parallel to first and second sides of the other Berek-type retarder; such that in use an incident beam of electromagnetic radiation is caused to impinge upon one of said first and second Berek-type retarders on one side thereof, partially transmit therethrough then impinge upon the second Berek-type retarder, on one side thereof, and partially transmit therethrough such that a polarized beam of electromagnetic radiation passing through both of said first and second Berek-type retarders emerges from the second thereof in a polarized state with a phase angle between orthogonal components therein which is different than that in the incident beam of electromagnetic radiation, and in a propagation direction which is essentially undeviated and undisplaced from the incident beam of electromagnetic radiation, said compensator system further comprising third and forth Berek-type retarders which each have an optical axes essentially perpendicular to a surface thereof, each of which third and forth Berek-type retarders has a fast axis, said fast axes in said third and forth Berek-type retarders being oriented other than parallel to one another, said third and forth Berek-type retarders each presenting with first and second essentially parallel sides, and said third and forth Berek-type retarders being oriented, as viewed in side elevation, with first and second sides of one of said third and forth Berek-type retarders being oriented other than parallel to first and second sides of said forth Berek-type retarder; such that in use an incident beam of electromagnetic radiation exiting said second Berek-type retarder is caused to impinge upon said third Berek-type retarder on one side thereof, partially transmit therethrough then impinge upon said forth Berek-type retarder on one side thereof, and partially transmit therethrough such that a polarized beam of electromagnetic radiation passing through said first, second, third and forth Berek-type retarders emerges from the forth thereof in a polarized state with a phase angle between orthogonal components therein which is different than that in the incident beam of electromagnetic radiation caused to impinge upon the first side of said first Berek-type retarder, and in a direction which is essentially undeviated and undisplaced from said incident beam of electromagnetic radiation even when said retarder system is caused to rotate; with a result being that retardation is entered between orthogonal components of said input electromagnetic beam of radiation;
a compensator system comprised of first, second, third and forth Berek-type retarders which each have an optical axes essentially perpendicular to a surface thereof, each of which first and second Berek-type retarders has a fast axis, said fast axes in said first and second Berek-type retarders being oriented essentially parallel to one another; said first and second Berek-type retarders each presenting with first and second essentially parallel sides, and said first and second Berek-type retarders being oriented, as viewed in side elevation, with first and second sides of one Berek-type retarder being oriented other than parallel to first and second sides of the other Berek-type retarder; such that in use an incident beam of electromagnetic radiation is caused to impinge upon one of said first and second Berek-type retarders on one side thereof, partially transmit therethrough then impinge upon the second Berek-type retarder, on one side thereof, and partially transmit therethrough such that a polarized beam of electromagnetic radiation passing through both of said first and second Berek-type retarders emerges from the second thereof in a polarized state with a phase angle between orthogonal components therein which is different than that in the incident beam of electromagnetic radiation, and in a propagation direction which is essentially undeviated and undisplaced from the incident beam of electromagnetic radiation; each of which third and forth Berek-type retarders has a fast axis, said fast axes in said third and forth Berek-type retarders being oriented essentially parallel to one another but other than parallel to the fast axes of said first and second Berek-type retarders, said third and forth Berek-type retarders each presenting with first and second essentially parallel sides, and said third and forth Berek-type retarders being oriented, as viewed in side elevation, with first and second sides of one of said third and forth Berek-type retarders being oriented other than parallel to first and second sides of said forth Berek-type retarder; such that in use an incident beam of electromagnetic radiation exiting said second Berek-type retarder is caused to impinge upon said third Berek-type retarder on one side thereof, partially transmit therethrough then impinge upon said forth Berek-type retarder on one side thereof, and partially transmit therethrough such that a polarized beam of electromagnetic radiation passing through said first, second, third and forth Berek-type retarders emerges from the forth thereof in a polarized state with a phase angle between orthogonal components therein which is different than that in the incident beam of electromagnetic radiation caused to impinge upon the first side of said first Berek-type retarder, and in a direction which is essentially undeviated and undisplaced from said incident beam of electromagnetic radiation even when said retarder system is caused to rotate; with a result being that retardation is entered between orthogonal components of said input electromagnetic beam of radiation.
The present invention will be better understood by reference to the Detailed Description Section of this Specification, in conjunction with the Drawings.
It is therefore a primary objective and/or purpose of the present invention to teach a rotating compensator sample system investigation system which comprises a source of a beam of electromagnetic radiation, a polarizer, a stage for supporting a sample system, a beam splitting analyzer means, and two detector systems, each said detector system being positioned to separately intercept one of at least two beams which emerges from said beam splitting analyzer means; said rotating compensator sample system investigation system further comprising at least one compensator(s).
It is another objective and/or purpose of the present invention to teach regression based calibration and extraction of sample system PSI and DELTA values.
Other objectives and/or purposes of the present invention will become apparent by a reading of the Specification and Claims.

Beam splitting analyzer means in rotating compensator ellipsometer


A semiconductor package and a method for fabricating a semiconductor package are disclosed. The semiconductor package includes semiconductor chip attached to a circuit board that includes at least one lateral slot formed through the circuit board. Provision of the slot reduces stresses in the circuit board that are manifested by warpage. The semiconductor chip may be positioned in a central aperture of the circuit board and held therein by hardened encapsulant material.

1. Field of the Invention
The present invention relates to a semiconductor package and a method for fabricating a semiconductor package.
2. Description of the Related Art
A typical ball grid array (BGA) semiconductor package includes a semiconductor chip mounted on an upper surface of an insulative, printed circuit board substrate. The substrate may be made of a glass fiber filled organic laminate, such as FR4 board, FR5 board, or BT board, and has interconnected, conductive circuit patterns on upper and lower surfaces thereof. A hardened encapsulant material covers the chip, the upper surface of the substrate, and electrical conductors, such as bond wires, that extend between the chip and the circuit patterns on the upper surface of the substrate. Conductive balls or other input/output terminals are formed on the circuit patterns of the lower surface of the substrate.
Consistent with a trend toward smaller and thinner packages, the semiconductor chip is sometimes mounted within a central aperture of the substrate. The chip is supported in the aperture by the hardened encapsulant material. One difficulty with such a package, however, is warpage of the substrate due in part to temperature cycling during the manufacturing process and differences in the thermal expansion properties of the various materials of the package, e.g., differences in the thermal expansion properties of the substrate and encapsulant material. The warpage is particularly manifest at the corners of the package. Where the package substrate is warped, the conductive balls or other input/output terminals on the lower surface of the substrate are uneven. This causes difficulty when mounting the package on a motherboard. The magnitude of the warpage tends to increase as package size increases, and thus tends to impose an upper limit on the package size.
The present invention includes, among other things, a substrate for a semiconductor package that is resistant to the warpage problem mentioned above, a method of making such a package, and a circuit board strip for making a plurality of the packages in a parallel process.
For example, one embodiment of a semiconductor package in accordance with the present invention includes a semiconductor chip attached to a circuit board. For instance, the chip may be provided within a central aperture of the circuit board, and held therein by hardened encapsulant material. Circuit patterns are provided on one or both of two opposing major surfaces of the circuit board. The chip is electrically connected to the circuit patterns of one of the surfaces through bond wires, leads, or the like. The circuit patterns of at least one of the surfaces include input/output terminals for the package, which are in electrical communication through the various package elements to the chip. The terminals may include conductive balls, as in a BGA package, or exposed lands, as in a land grid array (LGA) package, among other possibilities. The encapsulating material covers the chip and the electrical connections. The circuit board further includes at least one lateral slot through the circuit board. The slot(s) may extend inward from an outer peripheral wall of the circuit board or, in the case where the circuit board includes a central aperture, may extend outward from the central aperture, or both. The one or more slots act to relieve stresses in the circuit board that are otherwise manifested in warpage. Such stresses can result from temperature cycling typically during the manufacturing process, the encapsulation process, and/or differing thermal expansion properties of the various materials of the package. Accordingly, the packages of the present invention exhibit little or no such warpage, and hence may be more easily and reliably mounted on a mother board, even where a plurality of the packages are stacked one on top of the other.
These and other aspects, features, and capabilities of the present invention will be clear from a reading of the following detailed description of the exemplary embodiments and the accompanying drawings.

Semiconductor package with warpage resistant substrate


A control apparatus for a hybrid vehicle drive system includes: a differential device including first and second differential mechanisms and four rotary components; and an engine, first and second electric motors, and an output rotary member respectively connected to said four rotary components. One of said four rotary components is constituted by a rotary element of said first differential mechanism and a rotary element of said second differential mechanism selectively connected to each other through a clutch, while one of said rotary elements of said first and second differential mechanisms is selectively connected to a stationary member through a brake. The control apparatus includes a drive mode switching control portion for switching the hybrid vehicle drive system to one of at least two hybrid drive modes according to a selected one of different combinations of operating states of said clutch and said brake.

1. Field of the Invention
The present invention relates to an improvement of a control apparatus for a drive system of a hybrid vehicle.
2. Description of Related Art
There is known a hybrid vehicle drive system including: a differential device which comprises a first differential mechanism and a second differential mechanism and which comprises four rotary components; an engine, a first electric motor, a second electric motor and an output rotary member which are respectively connected to said four rotary components; and a plurality of coupling elements. JP-2013-224133 A1 discloses an example of a hybrid vehicle transmission system configured to switch the hybrid vehicle drive system to a selected one of a plurality of vehicle drive modes, according to a selected one of different combinations of operating states of the coupling elements.
It is known that the hybrid vehicle drive system constructed as described above has a so-called "mechanical locking point" at which an amount of an electric energy transmitted through an electric path between the first and second electric motors is minimal as a result of zeroing of an operating speed of the first or second electric motor. At this mechanical locking point, a transmission efficiency of the hybrid vehicle drive system has a maximal value. However, the prior art control apparatus for the hybrid vehicle drive system is not configured to implement a vehicle drive mode switching control while taking account of the mechanical locking point, so that the transmission efficiency cannot be effectively improved. This problem was first discovered by the present inventor in a process of intensive studies in an effort to improve the performance of the hybrid vehicle.

Control apparatus for a hybrid vehicle drive system


The present invention relates to a method for optical fiber transmission which can increase a transmission distance. A first optical fiber having dispersion is first provided. An optical signal is next supplied to the first optical fiber so that the optical signal is compressed on the time axis as propagating in the first optical fiber. In the case that the dispersion is normal dispersion, for example, prechirping is performed so that the optical signal has down-chirp. A compressed optical signal output from the first optical fiber is supplied to an optical device having a saturated gain. According to this method, the transmission distance can be increased by the effective combination of compression of the optical signal and waveform shaping by the optical device.

1. Field of the Invention
The present invention relates to a method, optical device, and system for optical fiber transmission.
2. Description of the Related Art
Owing to recent developments of low-loss silica optical fibers, various optical fiber communication systems each using such an optical fiber as a transmission line have been put to practical use. The optical fiber itself has a very wide band. However, a transmission capacity by the optical fiber is actually limited by a system design. The most important limitation is due to waveform distortion by chromatic dispersion occurring in the optical fiber. Further, the optical fiber attenuates an optical signal at a rate of about 0.2 dB/km, for example. Loss of the optical signal due to this attenuation has been compensated for by adopting an optical amplifier such as an erbium doped fiber amplifier (EDFA) that is a typical example.
The chromatic dispersion that is often referred to simply as dispersion is a phenomenon such that the group velocity of an optical signal in an optical fiber changes as a function of the wavelength (frequency) of the optical signal. In a standard single-mode fiber, for example, an optical signal having a longer wavelength propagates faster than an optical signal having a shorter wavelength in a wavelength region shorter than 1.3 μm, and the resultant dispersion is usually referred to as normal dispersion. In contrast, an optical signal having a shorter wavelength propagates faster than an optical signal having a longer wavelength in a wavelength region longer than 1.3 μm, and the resultant dispersion is usually referred to as anomalous dispersion.
In recent years, the nonlinearities of an optical fiber have received attention in association with an increase in optical signal power due to the use of an EDFA. The most important nonlinearity that limits a transmission capacity is an optical Kerr effect occurring in an optical fiber. The optical Kerr effect is a phenomenon such that the refractive index of an optical fiber changes with the intensity of an optical signal. A change in the refractive index modulates the phase of an optical signal propagating in an optical fiber, resulting in the occurrence of frequency chirping which changes a signal spectrum. This phenomenon is known as self-phase modulation (SPM). Spectral broadening due to SPM occurs to cause further enlargement of the waveform distortion due to chromatic dispersion.
Thus, in optical fiber communication, the waveform degradation due to the dispersion of an optical fiber or the nonlinear optical effects in an optical fiber becomes a large factor of transmission limit. The influence of the dispersion increases with an increase in width of a signal band, and becomes significant in proportion to the square of a signal speed. Accordingly, a transmission distance in transmission of a high-speed signal is remarkably limited. Various dispersion compensating methods have been invented and put to practical use to compensate for the dispersion.
As a typical example of the methods for compensating the transmission waveform distortion due to dispersion, a method using a dispersion compensator is known. A dispersion compensating fiber providing a large dispersion or a compensating device such as a fiber grating is known as the dispersion compensator. Other known dispersion compensating methods include a method of alternately arranging positive and negative dispersions along a transmission line to configure a transmission line having substantially zero dispersion, and a method of arranging an optical phase conjugator along a transmission line to compensate for a phase change due to dispersion. The compensating method using the optical phase conjugator can also compensate for the nonlinear optical effects.
As an example of the method of simply compensating the influence of the nonlinear optical effects, a method of performing prechirping to a signal is known. This method is a method of compressing pulses by the nonlinear optical effects in a transmission line to compensate for pulse broadening due to dispersion and to simultaneously ensure a high optical signal-to-noise ratio (SNR), thereby increasing a transmission distance. This prechirping method is widely adopted in a practical system.
The group velocity of optical pulses in a normal dispersive fiber becomes larger with an increase in wavelength, whereas the group velocity of optical pulses in an anomalous dispersive fiber becomes larger with a decrease in wavelength. Accordingly, by providing chirping such that a wavelength shift toward longer wavelengths occurs near the leading edge of each pulse (negative chirp) and a wavelength shift toward shorter wavelengths occurs near the trailing edge of each pulse (positive chirp), i.e., by providing up-chirp, pulse compression is caused by transmission in an anomalous dispersive fiber. On the other hand, by providing chirping such that a wavelength shift toward shorter wavelengths occurs near the leading edge of each pulse (positive chirp) and a wavelength shift toward longer wavelengths occurs near the trailing edge of each pulse (negative chirp), i.e., by providing down-chirp, pulse compression is caused by transmission in a normal dispersive fiber.
Further, pulse compression can also be caused by setting the total dispersion to a slight normal dispersion or a slight anomalous dispersion rather than to zero dispersion in carrying out dispersion compensation, and then performing the prechirping under this setting.
In the conventional dispersion compensating methods or the prechirping method, the transmission distance cannot be sufficiently increased.
It is therefore an object of the present invention to provide a method for optical fiber transmission which can increase a transmission distance. It is another object of the present invention to provide an optical device and system which are applicable in carrying out such a method. Other objects of the present invention will become apparent from the following description.

Method, optical device, and system for optical fiber transmission


A self-contained system for the enteral delivery of a nutrient solution from an aseptic package without the intermediate step of emptying the package contents into a traditional flexible bag solution container for delivery by parastalic pump, gravity means or the like.. The system of the invention uniquely includes a novel, distendable membrane stored energy source which functions to automatically deliver on demand the premixed solution contained within the package to the patient at a precisely controlled rate.

1. Field of the Invention
The present invention relates generally to liquid delivery systems. More particularly, the invention concerns an apparatus for enteral feeding applications.
2. Discussion of the Invention
When patients are comatose, or for some reason are unable to take nourishment by mouth, enteral feeding becomes necessary. Enteral nutrition, or tube feeding, is typically accomplished by nasogastric administration or by direct delivery of liquids to the stomach via a surgically implanted feeding tube. Parastalic pumps are currently used for nasogastric feeding when gravity flow from an elevated container is insufficient to instill flow or when an exact amount of regulated feeding is necessary. Such devices are cumbersome to use and at times have proven unreliable.
The apparatus of the present invention overcomes the drawbacks of prior art enteral feeding systems by providing a self-contained apparatus which includes an internal energy source that automatically expels prepackaged nutritional liquids from a sealed aseptic container at a desired uniform rate.
Aseptic packaging is, of course, not new. Such packaging is being used more and more in the food industry for packaging fruit juice, milk products and the like. Additionally, some use of aseptic packaging has been made in the medical field for packaging medical solutions.
When the packaged, aseptically filled liquid is a food product, such as fruit juice, the sealed package is typically punctured at a specific site location and the juice is withdrawn through a straw. When the packaged liquid is a medical solution, the package is typically opened, mixed with other components when required and emptied into a traditional, wide-mouth flexible bag solution container for enteral delivery by conventional gravity means and parastalic pump. However, in U.S. Pat. No. 4,826,500 issued to Rantsola, a system for the enteral delivery of a medical solution directly from an aseptic container is there described. In accordance with the methods of the Rantsola patent, the solution is passed from a container through an elongated giving set and metering system into a nasal tube. The container is an aseptic carton having penetrable side walls, with the giving set being provided with a fitting having a fluid passage extending therethrough. The fitting terminates at a carton cooperating portion which includes a first portion for penetrating the carton side walls to form an orifice therein, the orifice establishing fluid communication between the carton interior and the fitting fluid passage, and a second portion for engaging the carton side wall to maintain cooperation between the carton and fitting.
In U.S. Pat. No. 4,688,595, issued to Srebnik, et al, there is described an enteral nutrition delivery system which comprises an integral molded plastic base which includes a first platform to which is secured an infusion pump and a second platform having a recess in which is secured a specially designed bottle containing nutritional fluid to be fed to a patient. A tubing net-work is included for interconnecting the pump, bottle and the patient.
Neither Rantsola nor Srebnik, et al disclose or remotely suggest the novel apparatus of the present invention, which comprises a prefilled, self-contained system, including a unique stored energy source disposed within an aseptic package for delivering the nutritional liquid at a controlled, uniform rate.
Through use of the novel apparatus of the present invention, the disadvantageous current practice of preparing the dry nutrient composition and mixing it with sterile water at the point of use is avoided. The current practice of preparing the dry nutrient composition and mixing with sterile water at point of use has many obvious disadvantages. Historically, the use of this two-step method of treatment preparation has, in part, been driven by the problems resulting from combined solution sterilization, including chemical reactivity of certain nutrient materials under autoclave conditions because of the flexible bag. Prior art practices also typically employ intermittent feeding of the patient. Recent clinical practice now favors continuous feeding rather than intermittent feeding in most cases. In accordance with the present invention, certain drugs, minerals, nutrients and the like are aseptically sealed in a multi-barrier layer, oxygen impermeable, moisture-proof, microorganism-impermeable aseptic dispenser for automatic, on-demand continuous delivery to the patient without the required use of a parastalic pump or external energy sources of any kind.


An apparatus used in a method of restricting venous flow in an extremity includes a first flexible, stretchable elongate band and a first flexible, stretchable loop fixed to a first end of the first band. A second loop sized to fit about the extremity is defined by passing a free end of the first band through the first loop. Upon pulling a free end of the first band through the first loop in a direction outward from the extremity, the first band stretches against the first loop, thereby causing the second loop to tighten about the extremity to restrict venous flow therethrough. A combination of frictional engagement and stretching of the first band and of the first loop against each other releasably secures the second loop about the extremity in its tightened position, thereby eliminating the need to hold the apparatus to maintain the tightened position. With venous flow restricted in the extremity, various procedures can be performed such as obtaining a blood sample with a conventional fingerstick puncture of the extremity.

The present invention relates to the field of blood sampling, specifically in the area of blood glucose monitoring to help ensure adequate levels of capillary blood are collected for a glucose test.
Diabetes is a disease, which affects a large segment of the population. According to the American Diabetes Association (ADA), it is estimated that nearly 16 million people in the Unites States have diabetes. Today, however, approximately half of this figure or 8 million people have been diagnosed with the disease.
People with diabetes, in order to maintain their blood glucose in a "normal" range, must balance their level of exercise, their diet and their medication (insulin). In order to monitor an individual's effectiveness in maintaining these variables, an individual must measure their blood glucose up to 4 or more times per day. The tool that provides these individuals with a snapshot of their glucose level, and hence, a measurement of how well these variables are being balanced or managed, is the blood glucose monitor.
Self-monitoring of blood glucose (SMBG) was made possible during the late 1970's through the introduction of slow, technique dependent glucose meters. These glucose meters have since undergone significant improvement. Today, blood glucose meters are capable of providing a blood glucose reading in less than 30 seconds, are the size of a fountain pen and are relatively simple to use.
The technological advances in blood glucose meters and the increased awareness of the importance of maintaining glycemic control in avoiding the complications associated with diabetes have led to a dramatic increase in the number of individuals using blood glucose meters. Today, approximately 4 million individuals use blood glucose meters in the United States which equates to approximately 1.3 billion tests annually.
Despite the numerous technological advances over that past fifteen years, many user problems have not been satisfactorily addressed in regard to SMBG. In particular, many individuals still have difficulty obtaining an adequate blood sample from their finger tip required to effectively measure their blood glucose level. This difficulty can result from fingers being calloused from repeated testing and poor circulation, amongst other factors.
Once a blood sample is obtained, the sample is then transferred to a reagent coated test "strip" that works in combination with the glucose meter. When small blood samples are obtained due to inability to harvest a large enough blood sample, the test strips are frequently wasted and/or the glucose meter will give an inaccurate result. The fingerstick is so problematic in executing effective blood glucose measurement that there are currently over 75 initiatives worldwide being pursued to address or eliminate this problem. Complications in obtaining a blood sample are increased as a normal progressive side effect of the disease and also as the individual naturally ages.
Finally, while numerous prior devices have attempted to address blood collection using traditional large scale tourniquet-type devices, these prior efforts have failed to produce a simple, elegant solution that is low in cost, easy to use with a single hand, and which is especially adapted for use in obtaining blood samples from a smaller extremity such as a fingertip.

Device and method for restricting venous flow for improved blood sampling


A sheet-guiding device with a cooled sheet-guiding plate formed with air outlet openings, the sheet-guiding plate having a sheet-guiding surface on one side thereof and being connected, at the other side thereof opposite to the one side, to coolant ducts permitting the air outlet openings to remain freely open, and a cooling-duct plate having deformations forming the coolant ducts, the cooling-duct plate being connected by welding to the sheet-guiding plate and being sealed with respect thereto, includes a sealing element disposed between the other side of the sheet-guiding plate and the cooling-duct plate, the sealing element being in a groove-shaped indentation formed in the cooling-duct plate and surrounding a respective air outlet opening, and welding zones located in the vicinity of the sealing element for forming a connection between the sheet-guiding plate and the cooling-duct plate by weldments.

1. Field of the Invention:
The invention relates to a sheet-guiding device with a cooled sheet-guiding plate formed with air outlet openings, the sheet-guiding plate having a sheet-guiding surface on one side thereof and being connected, at the other side thereof opposite to the one side, to coolant ducts permitting the air outlet openings to remain freely open, and a cooling-duct plate having deformations forming the coolant ducts, the cooling-duct plate being connected by welding to the sheet-guiding plate and being sealed with respect thereto.
Such a sheet-guiding device has become known heretofore from the published German Patent Document DE 94 18 358 U1. The sheet-guiding device disclosed in this German patent publication is formed of a perforated sheet-guiding plate, an air chamber located beneath the sheet-guiding plate, and a cooling system provided in the air chamber directly beneath the sheet-guiding plate, the cooling system being formed of cooling ducts through which water flows. The cooling ducts are constructed as troughs or channels open at the upper side thereof, and are welded to the rear side or underside of the sheet-guiding plate. The cooling ducts are so arranged that air outlet openings formed in the sheet-guiding plate are not covered thereby, and so that, via the air outlet openings, blast air may leave the air chamber beneath the sheet being conveyed over the sheet-guiding plate and may be aspirated or sucked away, if necessary.
Sheet-guiding devices of the type according to the invention are required to provide a sheet-guiding surface which is cooled as uniformly and optimally as possible and, even under varying temperatures, to provide a reliable separation of the coolant from the air in the air chamber. The sheet-guiding plate should have a smooth surface and ought not to have any tendency to deform due to varying temperatures. On the other hand, the sheet-guiding plate should have an overall height which is as small as possible, and have a relatively low weight, it should be relatively easy to assemble and should be manufacturable with a minimal possible effort or expense.

Sheet-guiding device with a cooled sheet-guiding plate