System and method for structuring and manipulating data that includes a mechanism for processing the data and a mechanism for storing the data. A data structure includes a location structure, a content structure, and a mechanism for mapping each location structure to some or all of the variables within the storing mechanism. The location structure has at least two locators and each of the locators is configurable to have at least one resolution. Each resolution has one or more uniquely identifiable positions, wherein the juxtaposition of one position selected from each of the locators defines a unique location within the location structure. A content structure is provided which is configurable to have variables, wherein each of the variables defines a data item. A mechanism is also provided for mapping each location within the location structure to some or all of the variables within the content structure. A method is disclosed for structuring an manipulating data. A computer implemented process for storing, structuring, manipulating and processing data is also disclosed.

1. Field of the Invention
The present invention relates to information processing and data organization, and more particularly, to a system and method for structuring and manipulating data. As applied to the invention described herein, the term "computer program" means a computer program related invention, not a computer program per se.
2. Description of Related Art
The proliferation of personal computers has been accompanied by a proliferation of computer programs for use on those computers. Historically, two main classes of programs available for use on personal computers are spreadsheet and database programs. A useful visual metaphor for understanding existing database and spreadsheet programs is that of a matrix having rows and columns. The intersection of a row and a column defines a cell. Cells may contain different types of information or data, such as numbers, text, or boolean values. In existing technology, each cell is capable of containing a single value, that is, the cell is uni-variate. A cell is typically associated with a defining formula which determines the value of the cell. The defining formula is a set of processor instructions which, when executed, cause a value to be assigned to the cell. In some existing implementations a cell may also have an accompanying textual note.
Spreadsheet programs are useful for structuring and manipulating numeric data. Lotus 1-2-3 is an example of a currently available spreadsheet program. Lotus 1-2-3 is a trademark of Lotus Development Corporation. Spreadsheet programs include mechanisms for performing a variety of mathematical operations on ranges of data (e.g., permitting rapid summation or averaging of rows and/or columns of numbers). Early spreadsheet programs organized data in a two-dimensional row and column fashion analogous to an accounting ledger sheet, hence the term "spreadsheet". Newer spreadsheet programs include mechanisms for linking more than one spreadsheet together to accomplish a certain multi-dimensional effect for organizing data, and for providing a relational database in which to store data and spreadsheet formulas. These improvements to existing spreadsheet technology attempt to increase the ability to restructure and view data.
Database programs are another class of computer programs for personal computers. They are also useful for structuring and manipulating numeric data, however, they are typically employed for organizing textural information as well. For example, a typical use is to organize the names, addresses, and telephone numbers of businesses and individuals into a database in order to permit easy access to and organization of that information. dBASE is an example of a currently available database program. dBASE is a trademark of Borland International, Inc.
In addition to spreadsheet and database programs, data structuring and manipulation systems available for use on personal computers have evolved to include knowledge-based artificial intelligence systems (including expert systems and neuron network based systems), statistical modelling systems, computer assisted software engineering (CASE) systems, and simulation modelling systems.
In general, known existing technologies are not well suited for information-intensive situations. As used herein, the term "information-intensive situation" means an information processing problem involving a large number of variables and a large number of data points for each variable. An example of an information intensive situation is the modelling of the financial flow over time for a retail corporation comprising hundreds of retail units each selling thousands of products.
One of the many difficulties with existing technologies is that they typically rely on a single value cell architecture which, as it turns out, significantly hampers the ability to easily restructure and view complex data sets. In order to achieve increased restructuring and viewing capabilities, existing technologies typically compensate by providing cumbersome mechanisms for manipulating linked single valued cells.
The present invention includes a unique mechanism for structuring and manipulating data which is particularly well suited for information-intensive situations. The present invention is marketed under the trademark FREETHINK and a commercial embodiment including the invention is COPYRIGHT .COPYRGT. Power Thinking Tools, Inc. 1991, all rights reserved.
Applicant is aware of the following U.S. patents and articles generally related to information processing and data organization.
______________________________________ Patent No. Expires Inventor Title ______________________________________ 4,318,184 03-02-1999 Millett INFORMATION STORAGE AND RETRIEVAL SYSTEM AND METHOD 4,555,771 11-26-2002 Hayashi DATA PROCESSING SYSTEM FOR DATA BASE MANAGEMENT OF MATRIX TYPE DATA 4,730,259 03-08-2005 Gallant MATRIX CONTROLLED EXPERT SYSTEM PRODUCIBLE FROM EXAMPLES 4,739,477 04-19-2005 Barker IMPLICIT CREATION OF A SUPERBLOCK DATA STRUCTURE 4,751,635 06-14-2005 Kret DISTRIBUTED MANAGEMENT SUPPORT SYSTEM FOR SOFTWARE MANAGERS 4,811,199 03-07-2006 Kuechler SYSTEM FOR STORING AND MANIPULATING INFORMATION IN AN INFORMATION BASE 5,055,998 10-08-2008 Wright INTERMEDIATE SPREADSHEET STRUCTURE 5,019,961 05-28-2008 Addesso COMPUTER APPARATUS AND METHOD FOR LOGICAL MODELLING 5,021,976 06-04-2008 Wexelblat METHOD AND SYSTEM FOR GENERATING DYNAMIC, INTERACTIVE VISUAL REPRESENTATIONS OF INFORMATION STRUCTURES WITHIN A COMPUTER 04-20-92 Infoworld "Dadisp is a whiz at graphing data in unique spreadsheetlike cells" Infoworld "HiSheet analyzes spreadsheet data on one ______________________________________ screen"
Millett et al. relates to a computerized system and method for the compact storage and rapid retrieval and manipulation of data that is classified and stored in the form of hierarchal information trees. Briefly, data is classified and arranged in a mutually exclusive manner using a hierarchal information tree. Paths in the information tree are encoded in a bit string representation. Information is said to be stored, retrieved, separated, compared and interrelated by analyzing the encoded information tree and displaying results via an appropriate input/output device.
Hayashi relates to a data processing system having a data base in which matrix type data is prepared for a common data base and a plurality of programs access the contents of the common data base. Hayashi is directed to a data processing system which employs a hierarchical structure to handle matrix type data. N-dimensional matrix type data is stored on the basis of one-dimensional address information.
Gallant relates to a general purpose matrix controlled expert system which includes a matrix of learning coefficients, an external interface and inference engine.
Barker et al. relates to integrated multiple data editors and, more particularly, to a superblock structure containing two or more diverse object sets positioned so that the object sets overlap one another, reside side-by-side, or extend above or below one another. A "superblock" is defined as any displayable area containing two or more object sets positioned so that the object sets overlap one another, reside side-by-side or extend above or below one another.
Kret relates to an apparatus for a distributed computer based management support system for providing information to software managers regarding large scale on-going software development efforts and a method for use therein.
Kuechler et al. relates to a system for storing and manipulating information in an information base which employs a "topological" mapping technique. A topological map comprises compact symbols corresponding to predefined ranges of values of an attribute in the information base. Such a map purportedly may be retrieved and processed to efficiently retrieve stored information elements, given any general unpreprogrammed query as input to the system, and to determine correlations among various attributes of the information elements.
Wright relates to structures used to transfer formatted information between data processing systems, and more particularly to structures used to transfer a spreadsheet from one spreadsheet processing system to another. Wright seeks to provide an intermediate spreadsheet structure which can represent spreadsheets of any dimensionality, and which can represent any expressions or formats defined for spreadsheets. Note that in column 21, lines 3 through 4, it is stated that "[c]ells are 0-dimensional: they are points of data." In the present invention, cells, or locations, are multivariate and, in that sense, multi-dimensional and therefore different from the cells envisioned in connection with the Wright invention.
Addesso relates to a computer based modelling system which includes tooling means responsive to an interface means for enabling a high level user of the system to create a modelling methodology by editing a database to define: (a) modelling objects in terms of certain primitives; (b) a mode of viewing the modelling objects; and (c) logical relationships between elements of said modelling objects and views thereof.
Wexelblat relates to a computer system for inspecting and modifying data contained within an information system. A key aspect of the invention is an "automatic icon" feature which is defined by associating certain graphical primitives with certain mathematical relationships so that as an embodiment of the relationships is moved through an information space, the appearance of the icon automatically changes as a result of the correlation between the mathematical relationships and the contents of the information space.
The article which appeared in the Apr. 20, 1992 issue of Infoworld includes a description of a software product entitled Dadisp 3.0 for Windows. In Dadisp you purportedly "use spreadsheet like formulas to manipulate your data and see the results in adjacent windows." The article indicates that you "can apply routine statistical options to your data, such as ranking, sorting, conditional computation, transposition, descriptive statistics, and linear regression."
The article which appeared in the Apr. 27, 1992 issue of Infoworld announced "HiSheet", a Microsoft Excel add-on program that is said to allow organization of spreadsheets into hierarchical sets and control stacks of spreadsheet data. The article indicates that by "scrolling vertically and horizontally, users can traverse sections or levels to gather information for several types of analysis." Changes to data are said to be automatically updated through the stacks either aggregately or proportionally.
The present invented method, apparatus, and article of manufacture differ from the related art in several ways. Although the present invention employs the matrix metaphor to a certain extent, it differs from known existing technology in that, among other things, each cell or location is capable of containing more than a single data item or information item. Thus, each cell is multivariate, that is, it may have multiple variables wherein each variable contains either constant or computed information such as numbers, text, boolean values or references to external data sources. Typically, more than one value per cell is displayed to the viewer of the data. The number of viewable values per cell and the order of the values may be varied depending upon the preference of the viewer. Another important aspect of the present invention is that each cell exists in the context of a location which is defined by two or more locators. In the present invention, each of these locators may take on differing levels of aggregations. Each level of aggregation may be flexibly ordered on the basis of specified characteristics pertaining to the values. Flexible presentation of information is facilitated by distinguishing between data storage (the manner in which data is physically stored) and data representation (the manner in which data is displayed to a user or used by the system).

Location structure for a multi-dimensional spreadsheet


A new and distinct variety of rose with long lasting, novel yellow flowers, and dark green and attractive foliage. It exhibits upright and uniform growth with abundant flowers. The new variety propagates well using traditional methods. This new and distinct variety has shown to be uniform and stable in the resulting generations from asexual propagation.

The new variety of rose plant of the present invention originated from a controlled crossing during the summer of 1995 between an un-named seedling and 'KORruge', a non-patented rose.
The resulting seeds were planted during the following winter and germinated in the spring. The resulting seedlings were evaluated and exhibited distinctive physical and biological characteristics. The new rose plant was selected as a single plant from the seedling beds due to its superior characteristics and asexually propagated for further evaluation. This new and distinctive rose variety is named 'KORquelda'.

W. Kordes' Söhne Rosenschulen GmbH & Co KG


A temperature sensing component enables accurate in situ temperature measurement. The temperature sensing component is disposed within the process chamber. The temperature sensing component has a cavity, in which a transparent cover is disposed over an opening of the cavity. A material is disposed within the cavity of the temperature sensing component, and a sensor is configured to sense a phase change of the material through the transparent cover.

In the fabrication of semiconductors there is a need to control the process parameters to ensure process consistency and repeatability. The need for process control is becoming more important as semiconductor devices are requiring sub-nanometer accuracy in dimension tolerance (e.g., CD, thickness, etch rate, uniformity, profile, etc.) as device nodes advance to smaller and smaller features (e.g., 90 nm and smaller). In the more advanced processes, feature size variations and dimensional tolerance in the fabricated device (within a wafer, wafer-to-wafer, lot-to-lot, die-to-die, chamber-to-chamber, etc.) resulting from all process variations are required to be smaller than 5 nm and within three-sigma of standard deviation. Soon, as wafer processing become even more advanced, the allowable feature size variations will be even smaller, e.g., smaller than 2 nm and within three-sigma of standard deviation.
One of the more difficult process parameters to control, maintain, and characterize is the process temperature. For example, the process temperature on chamber interior wall surfaces, the substrate support surface, and the substrate surface are difficult to control, maintain, and characterize. As discussed within the scope of the present invention, the reference to wafers and substrates is interchangeable since those of ordinary skill in semiconductor fabrication often interchangeably use both terms. Many process recipes are sensitive to process temperature variation. Temperature variation as small as 1 degree Celsius can have significant effect on the outcome of the process recipe. For example, in a semiconductor fabrication etch process, poly gate CD (critical dimension) can change by as much as 1 nm per 1 degree Celsius variation in the process temperature, e.g., the temperature on the surface of a substrate support, the surface of the substrate, etc. Some process recipes can be affected by even smaller variations, e.g., 0.5 degree Celsius, in the process temperature. Accordingly, accurate temperature control and measurement are becoming critical process control requirements as device nodes advance to smaller and smaller feature size. Therefore, accurate temperature measurement and characterization capable of measuring absolute temperature and sensing small temperature changes, e.g., changes as small as 0.5 degree Celsius or smaller, is desired.
Many of the currently available temperature measurement techniques have performance limitations and undesirable effects. For example, many of the currently available temperature measurement techniques are unable to measure the in situ process temperature accurately. The techniques that have the capability to measure the in situ process temperature of a wafer usually include placing a special wafer with temperature sensors embedded on the wafer. Placing a special wafer in the process chamber requires interrupting the normal flow of processing. Usually, placing a special wafer into the process chamber requires venting the process chamber to ambient pressure. Once the process chamber is vented, considerable amount of time is required to bring the chamber back to process operating conditions (e.g., pressure, temperature, etc.), which affects the throughput of lot processing. Also, in many cases, the embedded sensors could be a source of contamination that may cause device defects. In addition, these special wafers with embedded sensors are expensive and the sensors are typically not very robust. When the sensors are exposed to process operating conditions, they could fail or work improperly. Furthermore, the embedded sensors are not acceptable for delivering the desired measurement accuracy as most of these sensors have a temperature measurement uncertainty of 0.5 degree Celsius or more. Thus, an improved in situ temperature measurement method and apparatus are needed.

Accurate temperature measurement for semiconductor applications


A computer system is composed of sending and receiving computers. The sending computer includes an encoder module encoding an internal representation of a structured document to generate an encoded document. The receiving computer includes a decoder module which receives the encoded document through a network, and decodes the encoded document to reproduce the internal representation. The encoder module lists texts and structures included within the structured document without duplication to thereby generate validation information, and incorporates the validation information into the encoded document. The decoder module includes a validation module which is responsive to the validation information to validate whether a data structure of the reproduced internal representation is in compliance with a predetermined document type declaration.

1. Field of the Invention
The present invention is generally related to a computer system, more particularly, to communications of structured documents (or structured texts) between computers.
2. Description of the Related Art
Structured documents, such as XML and SGML documents, designate documents into which data structure information thereof is incorporated therein. In order to describe the data structure thereof, structured documents include symbols called "tag". Structured documents have advantages of improved flexibility and expandability in the data structure, and these advantages promote the use of structured documents for data exchange between different computers or different applications.
Structure of a structured document is defined in a document type definition. For example, a document type definition (DTD) or an XML schema is typically used as a document type definition of an XML document. A document type definition may be incorporated into the structured document, or independently prepared for the associated structured document. An independently prepared file that describes a document type definition of a structured document is referred to as a document structure definition file.
A structured document is required to be in compliance with a document type definition. A structured document not in compliance with the document type definition may cause a computer to incorrectly recognize the contents of the structured document.
Therefore, there is a need for validating a structured document. Nishioka et al. disclose a structured document processor for validation of structured document in Japanese Open Laid Patent Application No. Jp-A 2001-75958 discloses. The disclosed structured document processor is provided with validation libraries for validating whether a structured document is in compliance with a document structure declaration.
Atsumi discloses a structure testing apparatus for validating structured documents in Japanese Open Laid Patent Application No. Jp-A-Heisei 8-190560. The disclosed testing apparatus is composed of a test data generating module which generates a document structure table from a structured document to list element IDs, element names, and contents of the elements, and a structure test module which validates the structured document using the document structure table.
One of the problems in validation of structured documents is that a considerable amount of processing is required for validation. Structured documents tend to be large in size and to have many repeated structures. The increased size and repetition of structured documents undesirably increases the amount of processing for validation, and thus increases the validation cost.
This problem is especially serious in transferring a structured document between computers. When a structured document is transferred between computers, the structured document is preferably validated by not only the sending computer but also the receiving computer, because a communication error may invalidate the structured document received by the receiving computer. Nevertheless, performing validation check of a structured document in both of the sending and receiving computers undesirably increases the amount of processing for confirming validity of the document.
Other techniques are disclosed for encoding or processing structured documents as follows. Firstly, Imaoka discloses a method for encoding XML data in Japanese Open Laid Patent Application No. Jp-A 2002-244894. The disclosed encoding method involves converting a DTD into a type described in an ASN.1 abstract syntax, dividing XML data into the element contents and structure thereof, converting the structure into values described in the ASN.1 abstract syntax, converting the values into an ASN.1 transfer syntax, compressing the element contents, and incorporating the compressed element contents and the ASN.1 transfer syntax.
Liefke and Suciu disclose a method for efficiently compressing XML documents in "XMill: an Efficient Compressor for XML Data" in proceedings of ACM SIGMOD Symposium on the Management of Data, 2000. This method discloses that XML documents are first divided into text and structure regions, the texts are classified by text types, duplicated texts are eliminated, and then the whole texts are compressed separately by their types. This method succeeded on efficient compression of XML documents in size, but did not mention about compression for reducing validation cost.
David Mertz discloses similar compression technologies of XML documents in http://www-6.ibm.com/jp/developerworks/xml/020125/j_x-matters13.html, but he did neither mention about the compression for reducing validation cost.
Satoh discloses a structured document processing system for efficiently compressing structured documents and reducing the amount of processing necessary for tag analysis in Japanese Open Laid Patent Application No. Jp-A 2002-163248. The structured document processing system includes a set of structured document compressing and uncompressing units. The compressing unit includes a tag list generating module generating a common tag list used for a plurality of structured documents, a compression module generating compressed documents of the plurality of structured document through replacing tags with delimiter codes, and an output module incorporating the tag list and the compressed documents to develop a compression result document. The decompressing unit includes a reproducing module reproducing a data structure from the tag list, and a write module reproducing the element contents from the compressed documents so as to associate the positions of the tags in the compressed documents with those of the tags in the data structure.
Maruyama discloses a data compression apparatus for structured documents in Japanese Open Laid Patent Application No. 2001-217720. The disclosed compression apparatus includes an encoder which divides tree-structured documents into the structure and contents to encode the structure, and a compression processor compressing the contents of the document.
Nishioka discloses an XML data converter in Japanese Open Laid Patent Application No. 2001-331479, the XML data converter including planarizing means for planarizing a DTD, DTD graph generating means for generating a DTD graph from the planarized DTD, schema generating means for generating a schema of an object relational model from the DTD graph, XML document generating means for generating a well-structured XML document for the planarized DTD, and object relational model generating means for data of the object relational model from the well-structured XML document.
Finally, Imaoka et al. disclose a structured document processor in Japanese Open Laid Patent Application No. Jp-A-Heisei 10-214265. The disclosed processor includes document structure analyzing means for analyzing an input document to generate an input document tree structure, document processing instruction interpreter means for interpreting and executing instructions to generating an output document tree structure from the input document tree structure, and structured document reproducing means for reproducing an output document from the output document tree structure.
However, no prior art is concerned on communications of structured documents with reduced amount of processing necessary for validation of structured documents.

Computer system suitable for communications of structured documents


Method and apparatus for high field asymmetric waveform ion mobility spectrometry in an electronic chip assembly,, including an input section, an ion filter and detection section and a control section, in which ion filtering proceeds in a planar chamber under influence of high field asymmetric periodic signals, with detection integrated into the flow path, for producing accurate, real-time, data for identification of a broad range of chemical compounds.

The present invention relates to spectrometry, and more particularly, to planar spectrometer devices that enable analysis of compounds by high field asymmetric waveform ion mobility techniques, and method of achieving same.
A chemical sensor system provides samples to a detector, i.e., a spectrometer, for identification. The device may take samples directly from the environment, or it may incorporate a front end device to separate compounds in a sample before detection.
In making such measurements, whether in the lab, the workplace or in the field, there is a need for unambiguous compound identification. One approach is to employ a combination of instruments capable of providing an orthogonal set of information for each chemical measurement. (The term orthogonal will be appreciated by those skilled in the art to mean data which enables accurate identification of a particular chemical species, and uses a different property of the compound for identification.)
One combination of known instruments is a gas chromatograph (GC) attached to a mass spectrometer (MS). The GC separates compounds in a gas sample that improves the chemical identification capability of the spectrometer. The mass spectrometer is generally considered one of the most accurate detectors for compound identification. A mass spectrometer can generate a fingerprint pattern of fragment ions based on mass corresponding to each compound eluting from the GC. Use of the mass spectrometer as the GC detector dramatically increases the value of analytical separation provided by the GC. The combined GC-MS information, in most cases, is sufficient for unambiguous identification of the compound.
Mass spectrometers are expensive, easily exceeding $100 K, and are difficult to deploy in the field. Mass spectrometers also suffer from the need to operate at low pressures resulting in complex systems, and their spectra can be difficult to interpret often requiring a highly trained operator. As well, the GC-MS is not well suited for small, low cost, fieldable instruments.
Lower cost and compact, reliable instrumentation for the laboratory and field is a desirable goal. In the lab, there is a continuing demand for improvements in affordable bench top analytical equipment. As well, there is a developing interest in making in situ measurements of chemicals present in complex mixtures at industrial and environmental venues. Therefore the search continues for low cost, high quality, and compact chemical detector equipment.
Time-of-flight Ion Mobility Spectrometers (TOF-IMS) have been described as functional detectors from early in the development of ion mobility spectrometry. High-speed response and low memory effects have been attained, and the gas phase ion chemistry inside the TOF-IMS can be highly reproducible providing the foundation to glean chemical class information from mobility spectra. Widespread use still remains a problem for TOF-IMS. Despite advances over the past decade, TOF-IMS flow channels (also referred to as drift tubes) are still comparatively large and expensive and suffer from losses in detection limits when made small.
The high field asymmetric waveform ion mobility spectrometer (FAIMS) is an alternative to the TOF-IMS. In a FAIMS device, a gas sample that contains a chemical compound is subjected to an ionization source. Ions from the ionized gas sample are drawn into an ion filter and subjected to a high field asymmetric waveform ion mobility filtering technique. Select ion species allowed through the filter are then passed to an ion detector, enabling indication of a selected species.
The FAIMS filtering technique involves passing ions in a carrier gas through strong electric fields between the filter electrodes. The fields are created by application of an asymmetric period voltage (typically along with a further control bias) to the filter electrodes.
The process achieves a filtering effect by accentuating differences in ion mobility. The asymmetric field alternates between a high and low field strength condition that causes the ions to move in response to the field according to their mobility. Typically the mobility in the high field differs from that of the low field. That mobility difference produces a net displacement of the ions as they travel in the gas flow through the filter. In absence of a compensating DC bias signal, the ions will hit one of the filter electrodes and will be neutralized. In the presence of a specific DC bias signal, a particular ion species will be returned toward the center of the flow path and will pass through the filter without neutralization. The amount of change in mobility in response to the asymmetric field is compound-dependent. This permits separation of ions from each other according to their species, in the presence of an appropriately set DC bias.
In the past, Mine Safety Appliances Co. (MSA) made an attempt at a functional FAIMS implementation in a cylindrical device with coaxial electrodes, such as disclosed in U.S. Pat. No. 5,420,424. (This FAIMS technology is referred to by MSA as Field Ion Spectrometry (FIS), see FIG. 1.) The device has been found to be complex, with many parts, and somewhat limited in utility.
A characteristic of known coaxial FAIMS devices is the relatively slow detection time. This can be a serious problem when coupling to a prefilter or separator, such as a GC. A GC operates so rapidly that known FAIMS devices cannot generate a complete spectra of the ions present under each GC peak. Therefore these prior art FAIMS devices would have to be limited to a single compound detection mode if coupled to a GC, with a response time of about 10 seconds. Any additional compound that is desired to be measured will take approximately an additional 10 seconds to measure. A FAIMS device with faster response times is much desired.
While the foregoing arrangements are adequate for a number of applications, it is still desirable to have a low cost and compact spectrometer that can render real-time or near real-time indications of detected chemical compounds, whether for the laboratory, the battlefield or in other environments, and whether as a stand alone detector or in cooperation with other devices such as a GC or an MS.
It is therefore an object of the present invention to provide a functional, small, spectrometer that overcomes the limitations of the prior art.
It is a further object of the present invention to provide a chemical sensor that features the benefits of FAIMS but is able to operate rapidly, affording real-time or near real-time detection.
It is a further object of the present invention to provide a chemical sensor that features the benefits of FAIMS and is able to detect multiple species simultaneously.
It is a further object of the present invention to provide a chemical sensor that features the benefits of FAIMS but is able to detect positive and negative ions simultaneously.
It is a further object of the present invention to provide a chemical sensor that features the benefits of FAIMS but is able to be part of a system that generates orthogonal data that fully identifies a detected species.
It is a further object of the present invention to enable a new class of chemical sensors that can rapidly produce unambiguous, real-time or near real-time, in-situ, orthogonal data for identification of a wide range of chemical compounds.
It is a further object of the present invention to provide a class of sensors that enable use of pattern recognition algorithms to extract species information.
It is a further object of the present invention to provide a class of sensors that do not require consumables for ionization.
It is a further object of the present invention to provide a class of sensors utilizing an arrays of FAIMS devices each tuned to detect a particular compound, such that multiple compounds can be detected rapidly, with simplified electronics.
It is a further object of the present invention to provide a class of sensors utilizing arrays of FAIMS devices to provide redundancy in ion detection.
It is a further object of the present invention to provide a class of sensors utilizing arrays of FAIMS devices where each ion filter has its own flow path (or flow channel) and is doped with a different dopant for better compound identification.
It is a further object of the present invention to provide a class of detectors that can provide information on the cluster state of ions and ion kinetics by varying the amplitude of the high voltage asymmetric electric field.
It is a further object of the present invention to provide a class of detectors that can provide information on the cluster state of ions and ion kinetics by adjusting the frequency of the asymmetric signal.
It is a further object of the present invention to provide a class of detectors that can provide information on the cluster state of ions and ion kinetics by adjusting the flow rate of ions through the device.
It is a further object of the present invention to provide a class of detectors that can provide information on the cluster state of ions and ion kinetics by varying the amplitude of the high voltage asymmetric electric field, or by adjusting the frequency of the asymmetric signal, or by adjusting the flow rate of ions through the device, or any combination of these techniques.
It is further an object of this invention to provide a class of sensors that can quantitatively detect samples over a wide range of concentrations through controlled dilution by regulating the amount of ions injected into the ion filter region by controlling the potentials on deflector electrodes.

The Charles Stark Draper Laboratory, Inc.


Methods of selecting a configuration of fixation and compression screws for a bone plate to be installed on a bone of a patient. A computer or website allows a user to load images of a fractured bone and specify a particular configuration of fixation and compression screws with a plate on the loaded bone. The computer replicates stresses imposed on the bone by regular activities using finite element analysis and provide information about the suitability of the selected configuration.

Bone fractures, deformities and other conditions may be treated using a variety of medical devices. A surgeon selecting an appropriate medical device or devices for treatment of a fracture may take into account information about the fracture, the potential devices, the individual patient, and/or the potential stresses and motions to which the bone and device may be subject, among other things. In the case of plates used to treat bone fractures, in order to treat a fracture appropriately, surgeons and others desire to know or predict the proper plate/screw configuration to optimize the biomechanics of the particular fracture they are treating. They also frequently need to select between locking and traditional non-locked screws, which may perform in significantly different ways because of biomechanic differences. In short, selection of an appropriate medical device may be limited by a surgeon's limited ability to predict the performance of potential fracture and medical device constructs.
Various studies are underway to evaluate the plate/bone biomechanics of common fractures. However, there are many challenges in dealing with the many permutations of fracture, plate, and locked or unlocked screws. Biomechanics studies defining the biomechanics for a particular fracture/plate construct typically provide information only for the particular fracture/plate constructs and do not provide any ability to evaluate or optimize among multiple permutations of fracture type and constructs. Often surgeons do not have information about the specific biomechanics of the patients they are treating and simply rely on instinct and experience to select among alternative options.
The July 2004 thesis of Jonathan Kirk Nielson titled "Expedited Finite Element Analysis of Ankle External Fixation Stiffness," which is incorporated herein by this reference, discloses software for measuring llizarov distal tibia frame axial stiffness that utilizes finite element analysis software. The software allows a user to specify different wire and pin configurations as input and delivers axial movement of the tibia as output. However, the approach does not include the actual bone or fracture(s) in the bone in the characterization.
There is a need for enhanced simulation capabilities and, in the context of plate devices, there is a need for simulation of performance of alternative plate/screw configurations that takes into account actual bone, plate type, and/or screw configuration characteristics. Such simulation may allow selection of among alternative configurations to optimize biomechanics and provide more rapid healing, fewer non-unions and failures. There is a further need for a computer system that offers adequate simulation that allows a surgeon to input information about the fracture type and characteristics, as well as potential plate and screw combinations, and choose the appropriate plate and locked or unlocked screw configuration to optimize the biomechanics for the fracture and other bone characteristics of the patient. Similar needs also exist for other types of devices, including, but not limited to, screws, external fixators and other devices used in orthopaedic or trauma applications.

Interactive orthopaedic biomechanics system


A transistor, a semiconductor device including the transistor and methods of manufacturing the same are provided, the transistor including a threshold voltage adjusting layer contacting a channel layer. A source electrode and a drain electrode contacting may be formed opposing ends of the channel layer. A gate electrode separated from the channel layer may be formed. A gate insulating layer may be formed between the channel layer and the gate electrode.

1. Field
Example embodiments relate to a transistor and a method of manufacturing the same. Other example embodiments relate to a semiconductor device including a transistor and a method of manufacturing the same.
2. Description of the Related Art
Transistors are widely used as switching devices or driving devices in the field of electronic equipment. In particular, because thin film transistors (TFTs) may be fabricated on a glass substrate or a plastic substrate, TFTs are mainly used in flat panel display apparatuses (e.g., liquid crystal display (LCD) devices) and organic light emitting display (OLED) apparatuses.
In order to achieve the desired operational properties of transistors, attempts have been made to utilize an oxide layer having high carrier mobility (e.g., a ZnO-based material layer) as a channel layer. The above method is mainly applied to TFTs for the flat panel display apparatuses.
In the transistors having the oxide layer as the channel layer (hereinafter, referred to as "conventional oxide transistors"), it may be difficult to control a threshold voltage. If a silicon layer is used as the channel layer, n-channel metal-oxide semiconductor (NMOS) transistors and p-channel metal-oxide semiconductor (PMOS) transistors may be more easily fabricated by changing the kind of elements doped in the channel layer. In addition, the threshold voltage may be controlled by adjusting the concentration of the doped elements. According to the oxide material transistor, it may difficult to control the threshold voltage by the doping due to a self-compensation.
The channel layer formed of the oxide material may be primarily formed of an n-channel layer. The conventional oxide transistors are mainly depletion mode transistors of which the threshold voltage is less than 0 volts.

Transistor, semiconductor device including a transistor and methods of manufacturing the same


An apparatus for creating an illusion in which a setting is superimposed around a real image rather a reflected image being superimposed into the middle of the setting as is traditionally the case. More particularly, rather than images being superimposed into a setting by using a beam splitter in the traditional manner, a real, not a reflected image, is used and the setting is superimposed around the real image. In the apparatus of the invention, there are no dead or hidden areas and set proportions are not dictated by the angle of a beam splitter. Additionally, viewing angles do not dictate audience position and, so long as the audience can see inside the setting, the illusion can be created.

1. Field of The Invention
The present inventions relates generally to an apparatus for creating visual images. More particularly, the invention involves an illusion in which a setting is superimposed around a real image rather a reflected image being superimposed into the middle of the setting as is traditionally the case.
2. Discussion of The Invention
In the past a number of approaches have been taken in the construction of apparatus for use theatrical and like performances to create optical illusions. As early as 1879 John H. Pepper and J. J. Walkers patented an apparatus designed to render an actor or object gradually visible or invisible, at will, and also to substitute for an object in sight of the audience the image of another similar object hidden from the direct vision of the audience. This apparatus and its use is described in the very early U.S. Pat. No. 221,605.
U.S. Pat. No. 4,306,768 issued to Egging discloses an apparatus for creating multi-planar images using computer generated images which are displayed on a display screen such as a TV monitor. A series of parallel mirrors are disposed at an angle to the monitor and act as beam splitters. Three dimensional models, which are reflected to the viewer or viewed through the beam splitters, are used to provide a combined image with a video display.
In U.S. Pat. No. 4,738,522 issued to Lunde, et al., there is disclosed an imaging apparatus which uses a first three dimensional set, and a second set which is occupied by live actors or other objects, which are to be incorporated into the three dimensional scene as a part of the illusion. A beam splitter is provided in front of the three dimensional set and a monitor or projector is positioned to project an image from the second set onto the beam splitter. The actors on the second set are then positioned to achieve the desired scale. The actor is then filmed in real time interacting with the blacked out second set props and the image is then recorded. The recorded image is then played back on the monitor and reflected onto the beam-splitter to give the illusion that the recorded image is interacting with the props in the three dimensional set.
The Lunde et al. approach is exemplary of the traditional approach wherein "ghosts", which are in reality video or film images, are superimposed into the middle of a setting by using beam splitters. In sharp contradiction, the present invention uses a real, not a reflected image, and superimposes the setting around it. This unique approach avoids many of the drawbacks of the traditional so called "Pepper's Ghost" type illusions. For example, there is a certain inefficiency to the traditional "Pepper's Ghost" set-up because there are necessary dead areas such as the area where the video monitor is located. Also, in the prior art illusions the viewing angles must carefully controlled so that each member of the audience is provided with a proper view of the "ghost" image. Further, the proportions of the apparatus are of necessity, dictated by the angle of the beam splitter and size of the image. For these and other reasons in certain applications the traditional approach either won't work or it creates substantial problems in certain applications.
As will be better understood from the description which follows in using the apparatus of the present invention, "Real Image" ghosts are not reflected, and there are no bad angles and no dead or hidden areas. If the audience can see inside the setting, they can see the illusion. Additionally, the "Real Image" set can be in any proportion. It need not be deeper than it is tall and it can be both shallow and wide. Because there are no hidden areas or special angles, the apparatus can be conveniently installed and used virtually anywhere. For example, the apparatus can easily be incorporated into an interactive display, taking images off of video disc and creating images in response to audience choices.

Illustion creating apparatus comprising a housing and a CRT


A mobile terminal includes a terminal body having a front surface and a rear surface, a display module disposed on the front surface and configured to display visual information, and a rear input unit disposed on the rear surface and configured to sense an input of a control command, wherein the rear input unit includes a button member externally exposed from the rear surface, a first sensing unit disposed to overlap the button member and configured to sense a push input applied onto the button member, and a second sensing unit disposed to overlap the button member and configured to sense a touch input applied onto the button member.

1. Field of the Invention
This specification relates to a mobile terminal having a user input unit capable of receiving a control command.
2. Background of the Invention
Terminals may be divided into mobile/portable terminals and stationary terminals according to their mobility. Also, the mobile terminals may be categorized into a handheld terminal and a vehicle mount terminal according to whether it is directly portable by a user.
As it becomes multifunctional, the mobile terminal can be allowed to capture still images or moving images, play music or video files, play games, receive broadcast and the like, so as to be implemented as a multimedia player.
Various new attempts have been made for the multimedia devices by hardware or software in order to implement such complicated functions. For example, a user interface environment is provided in order for users to easily and conveniently retrieve or select functions.
Furthermore, as a mobile terminal is considered as a personal belonging for expressing one's own personality, various design forms are required. The design forms include structural changes and improvements for the user to more conveniently use the mobile terminal. As one of the structural changes and improvements, a manipulation unit may be taken into account.
For instance, a manipulation unit is configured as a type of a touch screen or separately provided as other types, to receive a user input. However, the touch screen type has a problem that a target to be manipulated is obscured by a finger or a stylus pen. To obviate the problem, a manipulation unit is separately disposed on a front or side surface of the terminal, but this may mess up a slim and simple design of the terminal. Therefore, an input method with a new structure for overcoming the problem may be considered.


A switching power supply device performs a stable operation with fast response for a semiconductor integrated circuit device. A capacitor is provided between the output side of an inductor and a ground potential. A first power MOSFET supplies an electric current from an input voltage to the input side of the inductor. A second power MOSFET turned on when the first power MOSFET is off allows the input side of the inductor to be of a predetermined potential. A first feedback signal corresponding to an output voltage obtained from the output side of the inductor and a second feedback signal corresponding to an electric current flowed to the first power MOSFET are used to form a PWM signal. The first power MOSFET has plural cells of a vertical type MOS-construction.

The present invention relates to a switching power supply device, a semiconductor integrated circuit device, and a power supply device. For instance, the present invention relates to a technique effective to be applied to a switching power supply device converting a high voltage to a low voltage and a semiconductor integrated circuit device used therefor.
There is U.S. Pat. No. 6,559,684 as a switching power supply device. There is "Fundamentals of Power Electronics Second Edition", pp. 439-449, published by KLUWER ACADEMIC PUBLISHERS in the United States, as a technical document related to a switching power supply device.    [Patent Document 1] U.S. Pat. No. 6,559,684    [Non-Patent Document 1] "Fundamentals of Power Electronics Second Edition", pp. 439-449, published by KLUWER ACADEMIC PUBLISHERS

Switching power supply device, semiconductor integrated circuit device and power supply device


An apparatus for detecting tissue hardness of a living body includes a housing, a cap, a bottom cover, a driving module, a buffering module, a spring pipeline, a push-rod and a detecting module, and the driving module includes a firing spring and a restoring spring, and the two springs have different rigidities so as to form a reciprocating structure of the firing mechanism. After the detecting module of a firing mechanism is triggered, the resilience of the restoring spring compresses the firing spring back to its firing length, so as to restore its position by a single driving point and allow users to complete the firing operation by one hand and simplify the operation of doctors to improve convenience and efficiency.

In general, tumors are found through touching or naked-eye observation, and the observation is usually assisted by instruments such as ultrasonic instruments or endoscopes. The endoscope primarily extends a soft tube with a camera and a light source device into a living body, and an external display device is provided for obtaining the information of the surfaces of organs and tissues in vivo. Further, a tissue section is sliced and collected in order to perform a pathological test. However, the endoscope just can provide the information of the surface of tissues only, but it is difficult to determine the existence of a tumor in subcutaneous tissues through the observation by the endoscope.
A change of tissue hardness is usually accompanied with a pathological change. For example, a subcutaneous tumor causes abnormal tissue hardness, and the test still requires ultrasonic endoscopes to obtain tumor information accurately. However, the ultrasonic endoscope is expensive and thus it is not popular among general medical institutions. Therefore, it is necessary to provide a simple and easy way of measuring the flexibility of tissues in a living body in order to examine whether there is a subcutaneous tumor and assist the diagnosis of diseases.
As disclosed in U.S. Pat. No. 8,328,730 entitled "Living body measurement apparatus", the living body measurement apparatus includes a contact section which includes a first contact surface contacting a living body and which applies pressure to the living body, an auxiliary section disposed on an external side of the contact section and including a second contact surface contacting the living body, and supporting the second contact surface, so that the second contact surface performs reciprocating movement between coplanar positions and drives the second contact surface to retract to the position of the first contact surface, and the first contact surface and the second contact surface are disposed on the same plane, and a first pressure sensor is installed for measuring pressure applied to both of the contact section and the auxiliary section. The measurement apparatus includes a support section for supporting the auxiliary section, a first elongated groove formed between the auxiliary section and the support section and extended in a reciprocating direction of the reciprocating movement of the second contact surface, a second elongated groove which is formed in the one of the auxiliary section and the support section and which extends in a direction perpendicular to the reciprocating direction, a protruding portion which is formed in the other of the auxiliary section and the support section and which is disposed at either one of the first elongated groove, so that the locking mechanism is configured to lock the auxiliary section in a state in which the second contact surface is disposed at the retracted position, such that the hardness of muscular tissues and the pain of a patient can be measured by a single instrument.
As disclosed in U.S. Pat. No. 4,159,640 entitled "Apparatus for measuring the consistency or hardness of a material", the apparatus includes a cylindrical housing enclosing a spring with the degree of pre-straining of which, in compression, is adjustable by means of screw, and the spring pushes a piston towards the material, and the end of the piston fixedly carries a feeler, and the displacement of the piston in the cylindrical housing is registered by means of a conventional type of displacement sensor which delivers a continuous voltage output proportional to the displacement of the feller from a reference position, and the housing includes stops for limiting the travel of the piston, thereby defining the aforementioned reference position. Therefore, this apparatus can be used for testing a material having variable pressures and measuring the hardness of elastic material (such as skin) accurately.
As disclosed in U.S. Pat. No. 5,766,137 entitled "Frequency deviation detecting circuit and measuring apparatus using the frequency deviation detecting circuit", the apparatus includes an oscillator for generating a mechanical oscillation, and a detecting element for detecting the oscillation information, and a feedback circuit for feeding back a feedback signal of the oscillator based on the oscillation information, and driving the oscillator into a first resonant state, and the oscillator has a central frequency of the first oscillator, a gain variation compensating circuit installed to the feedback circuit, and the central frequency of the gain is different from the frequency of the oscillator applicable for increasing the gain in response to a change of frequency. If the frequency changes, the oscillator shifts from the first resonant state to a second resonant state, and the oscillator has a second oscillation central frequency, and the apparatus detects the deviation between the central frequencies of the first and second oscillators, and this apparatus is applied to the apparatus for measuring hardness and detecting the hardness of biological tissue (such as skin or internal organ).
In addition, the inventor of the present invention also filed a sensor related patent as disclosed in U.S. patent application Ser. No. 13/116,092 entitled "Apparatus and method for identifying a tissue in a living body", and the apparatus comprises a sensing element for sensing tissue parameters, a manipulating device for manipulating the sensing element, and an analyzing element for analyzing the meaning of the parameters. The sensing element is placed near an object to be tested and forces are applied to both of the top and bottom ends of the sensing element, so that a contact force is produced between soft tissues and the sensing element to cause deformation, and the deformation is measured and its corresponsive voltage value is read, so that a ratio of voltage values or a reflected stress ratio may be used to estimate the tissue to be tested and the material property related to hardness.
However, the aforementioned patent primarily aims at the aspect of sensors, and the control of forces is essential to the sensors, so that the sensors still require an appropriate firing device for triggering the sensor and touching the object to be tested in order to obtain measured values and continue the measurement.

Apparatus for detecting tissue hardness of living body

Southern Taiwan University of Science and Technology


A more efficient cooling system for densely packed electronic components for use in an out-of-doors equipment enclosure. An array of cooling assemblies are placed on heat generating components mounted to printed circuit boards mounted in enclosure racks. Each board has a manifold for intake and exhaust of refrigerant, and larger rack manifolds are substituted for rails and are attached to a backplane. A hybrid package including a ceramic hybrid power module and an attached array of cooling assemblies provide even more density of components and improved cooling.

1. Field of the Invention
The present invention relates to a cooling system and more particularly to a compact cooling system for densely packed electronic components for efficiently and effectively cooling powerful electronic components, the system being easily configurable and of high reliability.
2. Description of the Related Art
As microprocessors, such as Intel's Pentium brand series, become more powerful, they also generate more heat. To prevent failure and to ensure optimum capability, it is necessary to remove heat and to maintain the temperature of these microprocessors within a predetermined range. In certain environments, such as electrical equipment enclosures, heat generating components are being packed more densely than in existing enclosures. Excessive heat results. A number of previous devices have been proposed. See for example, U.S. Pat. Nos. 4,392,362; 4,498,118; 5,067,047; 5,088,005; 5,099,311; 5,099,910; 5,183,104; 5,218,515; 5,285,347; 5,365,749; 5,394,936; 5,509,468; 5,823,005; and 5,870,823. The search, however, goes on for more effective, efficient and reliable cooling systems.

Cooling system for densely packed electronic components

Emerson Network Power, Energy Systems, North America, Inc.


A pump cylinder housing has a hollow cylinder and an end-side cover part, a threaded sleeve may be fixed on the outside of the hollow cylinder, at least three radially outward projections are connected to and distributed on the cover part periphery to the cover part and at least partly pass through recesses of the threaded sleeve. A union nut may be screwed onto the threaded sleeve so that the projections project radially out of the threaded sleeve and bear on an end side of the union nut. The cylinder housing may be assembled by in a simple manner so that the cylinder housing and the cover part may be connected to one another in an exactly colinear and centred manner and thereby may be reliably sealed. The cylinder cover may thereby be positioned in an infinite radial position on the cylinder.

The invention lies in the field of mechanics, in particular engineering, and concerns the design of cylinder housings.
Cylinder housings are used in different fields of application such as in hydraulics, pneumatics or with internal combustion engines, for example as working cylinders. For many such applications, it is necessary to close a corresponding cylinder, usually with a circular cross section, by way of a cover part. A corresponding cover part may be integrally connected to the cylinder housing as one piece, but may also be placed onto this and fixed with mechanical holding means. For many applications, furthermore, there is a demand for the cover part to close off the cylinder housing in a gas-tight or liquid-tight manner.
In this context, it is the object of the present invention to provide a cylinder housing which may be closed off in a sealed manner at the end side, wherein a hollow cylinder and the cover part may be connected to one another in a colinear and centred manner and with an infinitely variable radial position, and furthermore the fastening of the cover part should be designed in a simple manner without the reliability of the connection being compromised due to this.

Cylinder housing, in particular pump cylinder housing


There is provided a hybrid stepping motor comprising the following: a first rotor yoke and a second rotor yoke, each of the rotor yokes having a plurality of rotor teeth on a periphery thereof; a rotating shaft located between the first and second rotor yokes and supporting the first and second rotor yokes on a same axis, the rotating shaft including at least one permanent magnet magnetized in a direction of the axis; and a plurality of stator yokes, each of the stator yokes having a core portion, a coil wound around the core portion, and a plurality of stator teeth extending parallel to the axis from opposed end portions of the core portion, the stator yokes being disposed at regular intervals around the rotating shaft so that a constant air gap is maintained between radially inward surfaces of the stator teeth and radial end surfaces of the rotor teeth. A positive current is applied to the opposed and paired coils of said coils and a negative current is applied to the rest coils of said coils. The positive current and the negative current are applied at the same time and magnitude.

1. Field
The present invention relates to a hybrid stepping motor with improved core shaped and winding structure.
2. Background
In recent years, various hybrid stepping motors with built-in permanent magnets have been researched and developed. Compared to general stepping motors, such hybrid stepping motors are advantageous in that they consume nearly half of electric power to generate the same torque as that of a general stepping motor.
FIG. 1 shows a hybrid stepping motor disclosed in Korean Patent Application Publication No. 1998-046512 as one example of known hybrid stepping motors. Referring to FIG. 1, in the prior art hybrid stepping motor 1, a rotating shaft 10 is rotatably supported on a pair of bearings 2, 3 disposed in both end portions of a stator casing 14. Ring-shaped first and second stator yokes 16, 16A with a ring-shaped magnet plate 30 mounted therebetween are disposed axially in the stator casing 14. Primary and secondary coil winding portions 20a, 21a are formed on an inner periphery of the first and second stator yokes 16, 16A, respectively. Primary and secondary coils 22, 23 are wound in the coil winding portions 20a, 21a, respectively. Thus, two cores are formed in the first stator yoke 16 while the other two cores are formed in the second stator yoke 16A. Surfaces of each core are provided with a plurality of stator teeth 17, 17a. The stator teeth 17, 17a, which are provided on the surfaces of the four cores of the first and second stator yokes 16, 16A, are deviated by a ¼ tooth for one another and with 90° phase difference. A rotor yoke 19 is disposed on the rotating shaft 10 to correspond to the stator yokes 16, 16A. An outer periphery of the rotor yoke 19 is provided with a plurality of rotor teeth 19a.
In the above-described prior art hybrid stepping motor 1, rotation of the rotor yoke 19 continues while magnetic flux is sequentially focused on the four cores in a manner that one magnetic flux generated by a current alternately applied to the primary and secondary coils 22 and 23 and the other magnetic flux generated by the ring-shaped magnet 30 are overlapped or offset to each other.
However, in the above-discussed prior art hybrid stepping motor 1, only one of the four cores of the stator yokes 16, 16A contributes to torque generation. Specifically, when a current is applied to the primary coil 22, no current is applied to the secondary coil 23. In such a case, bias flux, which is caused by the ring-shaped magnet plate 30, is allowed to flow through air gaps existing at the second stator yoke 16A side, to which a current is not applied. Such bias flux flows particularly through the teeth, which is less deviated from the stator teeth 19a of the second rotor yoke 19, of two cores of the second stator yoke 16A. Accordingly, there is a problem with the prior art hybrid stepping motor 1 in that torque is produced in an opposite direction to a rotational direction of the rotor yoke 19, thereby deteriorating efficiency of the hybrid stepping motor 1. In addition, since the coil winding portions 20a, 21a and the coils 22, 23 of the stator yokes 16, 16A are located outwardly of the rotor yoke 19, there is a further problem in that increasing a diameter of the rotor yoke 19 is restricted due to a determined diameter of the hybrid stepping motor 1.

Hybrid stepping motor having high torque density

Korea Institute of Science and Technology


A method of fabricating an MIM capacitor is provided, by which higher capacitance can be secured per unit volume or area by forming a dual-stack type capacitor to increase an effective area of the capacitor. The method includes patterning a first metal layer, forming a planarized second insulating layer having a trench exposing a portion of the patterned first metal layer, forming a second metal layer within the trench, forming a first dielectric layer on the second metal layer, forming first via holes exposing the patterned first metal layer, forming first plugs filling the trench and first via holes, forming a third metal layer thereover, forming a second dielectric layer on the third metal layer, forming a patterned fourth metal layer on the second dielectric layer, patterning the second dielectric layer and the third metal layer, forming a planarized third insulating layer having second via holes therein, and forming a patterned fifth metal layer on the third insulating layer.

1. Field of the Invention
The present invention relates to a method of fabricating a semiconductor device, and more particularly, to a method of fabricating an MIM capacitor, by which a dual-stack structure can be provided using a general logic forming process.
2. Discussion of the Related Art
FIGS. 1A to 1F are cross-sectional diagrams for explaining a capacitor fabricating method according to a related art.
FIG. 1A shows a step of forming a first conductive layer and an insulating layer on a semiconductor substrate.
Referring to FIG. 1A, a first insulating film 1 for insulation from devices below is stacked on a semiconductor substrate on which the FEOL process of a semiconductor device (i.e., transistor formation) has been performed in a general manner. The first insulating layer 1 is then planarized. A first metal layer 2 is stacked on the resultant structure after planarization and is then patterned by photolithography. A second insulating layer 3 is stacked on the resultant structure after photolithography and etching, and the insulating layer 3 is then planarized by CMP or the like.
FIG. 1B shows a step of forming a via hole and stacking a second metal layer.
Referring to FIG. 1B, the second insulating layer 3 is etched to form a via hole 5 over the first metal layer 2 by photolithography. Metal is deposited on the substrate to fill up the via hole, and the deposited metal is planarized. Then, a second metal layer 6 is deposited on the second insulating layer 3 including the metal filling the via hole 5. A portion of the second metal layer 6 will be used as a lower electrode of a capacitor. In doing so, the second metal layer 6 contains a multi-layer including Ti/TiN/Al_Cu/Ti/TiN or the like.
FIG. 1C shows a step of stacking a dielectric layer and an upper electrode layer of a capacitor.
Referring to FIG. 1C, a dielectric layer 7 to be used as a dielectric of a capacitor and a third metal layer 8 to be used as an upper electrode of the capacitor are stacked over the substrate in turn. Namely, the dielectric layer 7 is formed 500˜1,000 Å thick by depositing a SiN layer by PECVD. And, the third metal layer 8 is deposited on the dielectric layer 7 over the substrate to be used as the upper electrode of the capacitor. In doing so, the third metal layer 8 contains a multi-layer including Ti/TiN.
FIG. 1D shows a step of patterning an upper electrode of a capacitor.
Referring to FIG. 1D, photoresist is coated over the substrate. The photoresist is patterned into a photoresist pattern 9 defining an upper electrode by exposure and development. The third metal layer is then etched using the photoresist pattern 9 as an etch mask.
FIG. 1E shows a step of patterning a lower electrode of the capacitor.
Referring to FIG. 1E, after the photoresist pattern has been removed from the structure shown in FIG. 1D, photoresist is coated on the resultant structure. Exposure and development is carried out on the photoresist to form another photoresist pattern 10 defining a lower electrode 14 and a second level of metallization 15. The second metal layer is then etched using the photoresist pattern 10 as an etch mask.
FIG. 1F shows a step of forming wires of the upper and lower electrodes of the capacitor.
Referring to FIG. 1F, after the photoresist pattern 10 in FIG. 1E has been removed, a third insulating layer 11 as an interlayer is stacked over the substrate. Via holes 12 of the upper and lower electrodes are formed by photolithography. Finally, wires 13 of the upper and lower electrodes are formed on the third insulating layer 11 including the via holes 12.
However, the related art capacitor fabricating method cannot increase the size of the capacitor to provide sufficient capacitance for certain applications without undue area consumption.


A shower assembly is provided that includes a shower head having an integrated diverter valve. The shower head receives a detachable hand-held shower wand. The diverter valve is arranged upstream of an adjustable connector so that length is not added to the shower assembly that would interfere with headroom. A cam shaft of the diverter valve is rotated to selectively control fluid flow between the shower head and the hand-held shower wand. Cam followers are moved linearly in response to rotation of the cam shaft to selectively block first and second outlet ports.

The present invention relates to a shower assembly and diverter valve for directing fluid from an inlet to multiple outlets. In particular, the invention relates to a rotatable diverter valve integrated with a shower head such as a fixed shower head.
Diverter valves typically used for shower assemblies include either a rotary or push-pull mechanism actuatable by the user. The push-pull diverter valves use longitudinal movable seal members to isolate between various flow paths. Such valves are not inherently intuitive to users.
Furthermore, the diverter valves have been installed upstream of the shower head between the shower spout that extends from the wall of the shower enclosure and the shower head. Such an arrangement not only detracts from the aesthetics of the shower assembly, but also adds length to the overall shower assembly creating headroom problems.
Typical rotary diverter valves utilize a seal that is mounted on a shaft rotatable about an axis to isolate the fluid paths. In particular, the seal is used to block one of two outlet ports. The seal can be arranged between the outlet ports so that fluid from the inlet exits both outlet ports. Rotating the shaft drags the seal across the sealing surface of the housing thereby wearing the seal. Over time, the worn seal does not sufficiently block the outlet ports thereby permitting leaks.
What is needed is a diverter valve that is intuitive to the user, has improved wear and does not create headroom problems.

Shower head with integral diverter valve


Methods and apparatus for implementing notification by network elements of packet drops. In response to determining a packet is to be dropped, a network element such as a switch or router determines the source of the packet and returns a dropped packet notification message to the source. Upon receipt of notification, networking software or embedded hardware on the source causes the dropped packet to be retransmitted. The notification may also be sent from the network element to the destination computer to inform networking software or embedded logic implemented by the destination computer that the packet was dropped and notification to the source has been sent, thus alleviating the destination from needing to send a Selective ACKnowledge (SACK) message to inform the source the packet was not delivered. (Too narrow)

Computer networks are ubiquitous to today's computer usage. Increases in processor speeds, memory, storage, and network bandwidth technologies have resulted in the build-out and deployment of networks with ever increasing capacities. More recently, the introduction of cloud-based services, such as those provided by Amazon (e.g., Amazon Elastic Compute Cloud (EC2) and Simple Storage Service (S3)) and Microsoft (e.g., Azure and Office 365) has resulted in additional network build-out for public network infrastructure, and addition to the deployment of massive data centers to support these services which employ private network infrastructure. Additionally, the new generation (i.e., 4G) of mobile network data services is expected to significantly impact the utilization of both wireless and land-line networks in the near future. The result of these and other considerations is that the utilization of computer networks is expected to continue to grow at a high rate for the foreseeable future.
In general, network traffic can be broadly categorized into two categories: reliable data traffic and best-effort traffic. For transmission of reliable data traffic, techniques are employed to ensure that the data received at a destination endpoint is the same as the data sent from a source endpoint—in other words, techniques are employed to ensure reliable delivery of the original data to the destination. Examples of this type of traffic include transmission of data files and the like. For best-effort traffic, packets are forwarded using techniques that emphasize delivery speed over reliability. Examples of best-effort traffic include streaming multimedia content and Voice over Internet (VoIP) traffic.
The most common technique for supporting reliable data traffic employs the Transmission Control Protocol (TCP). TCP is the protocol used by major Internet applications such as the World Wide Web, email, remote administration and file transfer. It is also used for reliable data delivery on all sizes of networks ranging from private LANs to enterprise WANs to the Internet itself.
TCP is one of the core protocols of the IP (Internet Protocol) Suite, and is implemented in combination with IP using a network "stack" at each TCP connection endpoint. More particularly, a TCP connection is typically managed by an operating system through a programming interface that represents the local end-point for communications, the Internet socket (also referred to as a TCP socket). TCP supports reliable transmission of data through the combined use of sequence numbers in the TCP segment headers and ACKnowledgement schemes. When transmitting data, such as a file, the TCP socket component segments the data into chunks and adds a TCP header, creating a TCP segment. The TCP segment is then encapsulated into an IP datagram. The IP datagrams including TCP segments are informally called IP packets or simply packets, and this terminology is used herein, noting that under the IP standard (RFC 791) a segment refers to a TCP Protocol Data Unit (PDU) to the IP PDU and frame to the data link layer PDU.
Conventional uses of TCP are shown in FIG. 1, which includes a source computer 100 connected to a destination computer 102 via an IP network 104 including a plurality of nodes comprising network elements (e.g., switches 1-20) connected via links 106. For illustrative purposes, one-way communication between source computer 100 and destination computer 102 is depicted, with the recognition that communication between these computers would be bi-directional. Source computer 100 and destination computer 102 operate as TCP endpoints, and each includes a network stack including a TCP socket and an IP Stack. This is depicted by a source a TCP socket 108, and an IP stack 110 implemented on source computer 100 and a destination TCP socket 112 and IP stack 114 implemented on destination computer 102.
After a TCP connection is established between source computer 100 and destination computer 102, the source computer begins to stream packets 1-7 sequentially toward destination computer 102 via IP network 104. The switches and routers in an IP network are configured to forward packets using routing/forwarding tables that forward traffic based on packet classification data, wherein a baseline level of forwarding is typically based at least on the destination IP address in the packet header (which in this example corresponds to the address of destination computer 102). Packet forwarding is done using a hop-by-hop routed path, an example of which is depicted as a path 116 via nodes 1-2-4-5-6-7-8. An alternative path 118 is depicted via nodes 1-9-10-11-12-13-14-8.
The current TCP protocol facilitates reliable transmission by primarily using a cumulative acknowledgement scheme, where the receiver sends an acknowledgement (ACK) signifying that it has received all data preceding the acknowledged sequence number without error. A retransmission timeout timer is associated with each packet that is transmitted from a source, and source TCP socket 108 employs a timeout timer 120 to determine when to retransmit packets for which ACKs have not been received within the timeout period for those packets. Under another scheme, in response to receiving an out-of-order packet TCP receivers may send Selective ACKnowledgements (SACK) or a Double ACK to request retransmission of a packet.
During network transmission, packet drops may occur for various reasons, such a for bit errors or if a switch has inadequate buffer space due to local network congestion. An example of a packet drop for packet 4 shown by an X at switch 5 in FIG. 1. In the event of a packet drop, the timer-based ACK approach creates a long delay before a packet is retransmitted. Under an out-of-order condition, retransmission requests should wait to see if the out-of-order packet has been rerouted along a different path than other packets in the flow, causing a delay in delivery. Thus, retransmission is not immediately requested. Under both approaches, a packet drop causes a long latency prior to retransmission, reducing the effective bandwidth of the link.

Notification by network element of packet drops


A humidity control device is for controlling the humidity of air in a target space, and the humidity control device comprises: a processor for controlling the humidity of air in the target space by passing air through a hygroscopic liquid L; a regenerator for regenerating the hygroscopic liquid L used for the process by the processor; a hygroscopic-liquid pipe path (50), provided so as to pass through a ventilation opening (70) intended for ventilating the target space, for transferring the hygroscopic liquid L from the processor to the regenerator; and a discharged-air-utilizing regeneration unit (60) for regenerating the hygroscopic liquid L by passing air to be discharged from the target space through the ventilation opening (70) through the hygroscopic liquid L flowing through the hygroscopic-liquid pipe path (50) toward the regenerator. A humidity control device whose energy utilization efficiency is improved is thus provided.

Humidity control devices have been conventionally known that use a hygroscopic liquid such as lithium chloride (LiCl) to control the humidity, as described in Japanese Patent Laid-Open Application No. Hei 11-37514, Japanese Patent Laid-Open Application No. 2005-214595, and the like. A humidity control device using a hygroscopic liquid has: a processor for performing a process of taking in air from a target space, dehumidifying or humidifying the taken-in air, and returning the air to the target space; and a regenerator for regenerating the hygroscopic liquid used by the processor.
A hygroscopic liquid of a high solution concentration absorbs moisture as the temperature decreases, and a hygroscopic liquid of a low solution concentration releases moisture as the temperature increases. Taking advantage of this nature, a humidity control device controls the humidity and regenerates a hygroscopic liquid by controlling the temperature of the hygroscopic liquid to be supplied to the processor and regenerator. Here regenerating a hygroscopic liquid means to restore the concentration of the hygroscopic liquid changed due to humidity control to the same condition as before the humidity control. For example, when dehumidification is performed, moisture in air is absorbed by a hygroscopic liquid by cooling the hygroscopic liquid of a high solution concentration and passing air through the cooled hygroscopic liquid. This process reduces the solution concentration of the hygroscopic liquid. Sufficient dehumidification cannot be performed with the hygroscopic liquid of a low solution concentration, and thus the hygroscopic liquid is restored to the hygroscopic liquid of a high solution concentration by desorbing moisture from the hygroscopic liquid. On the other hand, when humidification is performed, the solution concentration of the hygroscopic liquid increases, and thus the hygroscopic liquid is restored to the hygroscopic liquid of a low solution concentration by making the hygroscopic liquid absorb moisture.


A semiconductor memory device (100) having an array of ROM cells (101) based on a flat cell architecture has been disclosed. Semiconductor memory device (100) can include a y-selector (103) coupled between a sense amplifier (102) and array (101). During a read operation, the y-selector can electrically connect a selected digit line (D2) and an adjacent digit line (D3) to the sense amplifier. Y-selector (103) can couple a next digit line (D4) to a precharge voltage that may be supplied by a precharge circuit (104). A virtual ground selector (105) can apply a ground voltage level from a main virtual ground line (VG1) to sources of a column of memory cells including a selected memory cell (310). Virtual ground selector (105) can apply a precharge voltage to an adjacent main virtual ground line (VG2). In this manner, a minimum sensing current, when a series of memory cells along a selected word line (W01) are on-bit cells, can be improved.

The present invention relates generally to a semiconductor memory device and more particularly to a semiconductor memory device and a method of detecting cell current for outputting data during a read operation.
In order to reduce the chip size of a read only memory (ROM), memory array architecture can be based on a flat cell. A flat cell may not have element isolation regions in the cell array. Thus, memory cells along a row can be connected in series.
Referring now to FIG. 7, a conventional ROM having a cell array using a flat cell is set forth in a block schematic diagram and designated by the general reference character 700. Conventional ROM 700 includes a memory array 701, a sense amplifier 702, a y-selector 703, precharge circuits 704, a virtual ground (VG) selector 705, and a x-decoder 706.
The example illustrated in FIG. 7 is a read operation of a memory cell connected to digit line D2 and located between digit lines D2 and D1. In the read operation, based on an applied y-address, Y-selector 703 selectively connects a main digit line (in this example D2) to a sense amplifier 702 and selectively connects an adjacent main digit line (in this example D3) to precharge circuit 704. At this same time VG selector 705 connects virtual ground line VG1 to ground and virtual ground line VG2 to precharge circuit 704.
Referring now to FIG. 8, a circuit schematic wiring diagram of the y-selector 703 of FIG. 7 is set forth. Y-selector includes a data selection section 802 and a precharge section 804.
Data selection section 802 includes data selection circuits (806 and 806xe2x80x2). It is understood that there are many data selection circuits but only data selection circuits (806 and 806xe2x80x2) are illustrated to avoid unduly cluttering the figure. Each data selection circuit operates in the same manner, thus only data selection circuit 806 will be discussed. Data selection circuit 806 receives y-selection signals (Y0 to Y7). Data selection circuit 806 includes data selection transistors (TD0 to TD7) connected between digit lines (D0 to D7) respectively and sense amplifer 702. Each data selection transistor (TD0 to TD7) receives a respective y-selection signal (Y0 to Y7) and selectively connects a digit line to a respective sense amplifier 702. In this case, y-selection signal Y2, is active (high), thus data selection transistor TD2 is conductive and electrically connects digit line D2 to sense amplifier 702. Thus, a data bit from a cell (not shown in FIG. 8) connected to digit line D2 is accessed. In this case, all other digit lines in the digit line group (D0, D1, and D3 to D7) are not connected to sense amplifier 702 because their corresponding data selection transistor (TD0, TD1, and TD3 to TD7) are turned off.
Precharge section 804 includes precharge selection circuits (808 and 808xe2x80x2). It is understood that there are many precharge selection circuits but only precharge selection circuits (808 and 808xe2x80x2) are illustrated to avoid unduly cluttering the figure. Each precharge selection circuit operates in the same manner, thus only data selection circuit 808 will be discussed. Precharge selection circuit 808 receives precharge selection signals (P0 to P7). Precharge selection circuit 808 includes precharge selection transistors (TP0 to TP7) connected between digit lines (D0 to D7) respectively and precharge circuit 704. Each precharge selection transistor (TP0 to TP7) receives a respective precharge selection signal (P0 to P7) and selectively connects a digit line to precharge circuit 704. In this case, precharge selection signal P3, is active (high), thus precharge selection transistor TP3 is conductive and electrically connects digit line D3 to precharge circuit 704. Thus, digit line D3 is precharged when a data bit from a cell (not shown in FIG. 8) connected to adjacent digit line D2 is accessed. In this case, all other digit lines in the digit line group (D0, D1, D2 and D4 to D7) are not connected to precharge circuit 704 because their corresponding precharge selection transistor (TD0, TD1, TD2, and TD4 to TD7) are turned off.
Referring now to FIG. 9, a circuit diagram showing an operating state of conventional semiconductor memory device 700 is set forth. For simplicity, the circuit diagram of FIG. 9, illustrates only a portion of the memory cell array 702 corresponding to digit lines (D2 to D5)
The conventional semiconductor memory 700 of FIG. 9, illustrates a read from memory cell 910. Memory cell 910 has been programmed with a low threshold voltage, such that when word line W01 is high, memory cell 910 is conductive or is an on-bit cell. Memory cells that are not conductive (off-bit cell) when their respective word line is high are denoted with an xe2x80x9cXxe2x80x9d. It can be seen that the memory cell adjacent to memory cell 910 and commonly connected to sub-digit line D22 is an off-bit cell.
FIG. 10 sets forth a truth table illustrating logic levels of y-selection signals (Y0 to Y7), precharge selection signals (P0 to P7), bank selection signals (BS0 and BS1) and ground selection lines (GS0 to GS3) when a predetermined memory cell column is selected. In the example illustrated in FIG. 9, memory cell 910 is selected. Memory cell 910 is in a memory cell column that corresponds with digit line D2 and BANK2. Thus, y-selection signal Y2, precharge signal P3, bank selection signal BS1, and ground selection line GS1 are all enabled (high).
When memory cell 910 is selected, word line W01 goes high and y-selection signal Y2, precharge signal P3, bank selection signal BS1, and ground selection line GS1 are all high. Also, main virtual ground line VG1 is connected to ground and main virtual ground line VG2 is connected to a precharge potential through precharge circuit 704. In this manner, selected memory cell 910 has a source electrically connected to ground through a VG selection transistor 902 and a drain electrically connected to sense amplifier 702 through bank selection transistor 906 and data selection transistor TD2.
In the case illustrated in FIG. 9, the cell adjacent to memory cell 910 is an off-cell, thus current flowing from precharge circuit 704 through the row of memory cells connected to word line W01 is blocked from sub-digit line D22 and memory cell 910. Therefore, in this case, a steady-state current ISA flowing through selected cell 910 is the same as the current flowing through digit line D2 and sensed by sense amplifier 702.
Referring now to FIG. 11, a circuit diagram showing an operating state of conventional semiconductor memory device 700 is set forth. The circuit diagram of FIG. 11, illustrates a case where the memory cell adjacent to selected memory cell 910 is an on-bit cell. In this case, selected memory cell 910 provides a current path from ground to sense amplifier 702, shown as ISA. However, selected memory cell 910 also provides current paths from ground to precharge circuit 704. These undesirable current paths are illustrated by dashed lines, where IPC0 is a current path to precharge circuit 704 through digit line D3 and IPC1 is a current path to precharge circuit 704 through VG selection transistor 904. In this case, the current flowing through selected cell 910 is given by the sum of current ISA0 flowing through selected digit line D2 and the currents IPC0 and IPC1 flowing from precharge circuit 704.
xe2x80x83ISA=ISA0+IPC0+IPC1
Referring now to FIG. 12, a graph is shown illustrating a simulation of currents in the memory cell configurations of FIGS. 9 and 11 over a range of operating voltages.
Waveform 1202 illustrates the current ISA as shown in FIG. 9 in which the cell adjacent to selected cell 910 is an off-bit cell. Waveform 1204 illustrates the current ISA0 as shown in FIG. 11 in which the cell adjacent to selected cell 910 is an on-bit cell. Waveform 1206 illustrates the current IPC0 as shown in FIG. 11. Waveform 1208 illustrates the current IPC1 as shown in FIG. 1.
The simulation results indicate that there is a difference of more than 7 microamperes (uA) or approximately 18% between waveforms 1202 (ideal case, FIG. 9) and 1204 (FIG. 11 case) at an operating voltage of 3.3 volts. It can also be seen that the minimum value of the sense amplifier current is less than 30 uA at 3.3 volts in the case of the configuration of FIG. 11.
A technique for improving the precision of the current detection by stabilizing the sense amplifier current has been disclosed in Japanese Patent Application Laid Open No. Hei 4-311900. However, when the fluctuation in the sense amplifier current is large, the circuit design can be difficult and highly restricted. Also, if the minimum sense amplifier current decreases, noise tends to introduce erroneous operation.
In view of the above discussion, it would be desirable to provide a semiconductor memory in which the minimum sense amplifier current is increased as compared to conventional approaches. Still further it would also be desirable to decrease the difference between the current flowing through the selected memory cell and the current detected by the sense amplifier.
According to the present embodiments, a semiconductor memory device includes a selection circuit electrically connecting a first and second digit line to a sense amplifier during a read operation and the sense amplifier can detect a data value stored in a selected memory cell by in accordance with the summation of currents on the first and second digit lines.
According to one aspect of the embodiments, the semiconductor memory device can include a plurality of memory cells having source/drain paths arranged in series where adjacent memory cell are electrically connected at a common source/drain node.
According to another aspect of the embodiments, the semiconductor memory device can include a plurality of word lines arranged in a first direction and the plurality of memory cells can be electrically connected to a word line.
According to another aspect of the embodiments, the semiconductor memory device can include a third digit line being electrically connected to a precharge circuit.
According to another aspect of the embodiments, the semiconductor memory device can include a first virtual ground line receiving a reference voltage and selectively coupled to a source of the selected memory cell during a read operation.
According to another aspect of the embodiments, the semiconductor memory device can include a second virtual ground line receiving a precharge voltage and being selectively coupled to a source/drain connection of unselected ones of the plurality of memory cells.
According to another aspect of the embodiments, a selection circuit can receive selection signals and selectively electrically connect a virtual ground line to source/drain connection of memory cells.
According to another aspect of the embodiments, a selection circuit can receive selection signals and selectively electrically connect digit lines to a sense amplifier.
According to another aspect of the embodiments, a selection circuit can receive selection signals and selectively electrically connect a digit line to a precharge circuit.
According to another aspect of the embodiments, memory cells can be chain linked in series and can be programmed to conduct simultaneously when selected. A predetermined selected memory cell can have a cell current that includes the summation of a first current flowing through a first digit line, a second current flowing through a second digit line and a third current flowing from a precharge voltage supplied by at least one of the plurality of virtual ground lines and the first and second currents can be greater than the third current.
According to another aspect of the embodiments, the predetermined selected memory cell current can include a fourth current flowing from a precharge circuit through a digit line and the first and second currents can be greater than the fourth current.
According to another aspect of the embodiments, a plurality of sub-digit lines can be coupled to a digit line through a bank selector circuit. The bank selector circuit can receive a bank selection signal to selectively electrically connect a sub-digit line to a digit line.
According to another aspect of the embodiments, a method of outputting data includes detecting a data value stored in a selected memory cell by summing a first current flowing through a first digit line and a second current flowing through a second digit line.
According to another aspect of the embodiments, a cell current can include a summation of the first current flowing through a first digit line, the second current flowing through a second digit line, a third current flowing from a precharge voltage through a virtual ground line, and a fourth current flowing through a fourth digit line.

Semiconductor memory apparatus and method for outputting data