A storage or cargo system clamping assembly is utilized in a freight area of a motorized vehicle and semi-permanently attaches a storage system to the horizontal wooden slats found in the interior of a motorized vehicle. This storage system has vertically disposed struts for readily accepting a threaded screw-type member, which extends, non-restrictively, through the strut member whether a shelf leg or an iron frame and engages an L-shaped member having a threaded hole corresponding to the screw. Such a storage system and clamping assembly provides great versatility to freight and cargo vehicles, allowing for easy installation, adjustment, or removal of the storage system, without damaging the vehicle or leaving any telltale markings on the vehicle that would indicate that a storage system was utilized within the vehicle.

1. FIELD OF THE INVENTION
The present invention relates generally to accessories for transport vehicles, and more particularly, to a clamping assembly for attaching shelving, inventory systems, and other structurally related storage systems, such as closets, cabinets, dressers, desks, drawers, darkrooms, worktables, and wardrobes to internal wall support members that are conventional, integral parts of the walls of most medium to large cargo vehicles. The clamping assembly provides firm mounting of the shelving and other storage systems and ready detachment thereof, without in any way marring or disfiguring the wall support members of cargo vehicles within which the systems are temporarily installed.
2. DESCRIPTION OF THE RELATED ART
The instant invention provides for the firm attachment of a storage system within a cargo vehicle, such as a moving van, or work truck for a production company, without need for drilling holes, cutting through walls or wall members, or in any way marring or damaging the vehicle cargo carrying interior. Thus, use of this invention is particularly advantageous when leasing a moving van or the like for a period of time, to convey freight (e.g., movie sets and related gear) back and forth from place to place, or operate as a production vehicle, and then relinquish the vehicle at the end of the lease without having damaged the cargo carrying interior at all; the shelving, storage, and associated clamping assemblies of this invention are as easily removed as they are installed. In short, the invention has universal application, in the film, television, and commercial industries as well as for general freight hauling in the industrial and moving company markets.
The known prior art teaches somewhat related shelving assemblies, or clamping structures, or both, as follows.
U.S. Pat. No. 2,158,503, issued May 16, 1939 to Frank B. Hewel, discloses a shelving system for delivery vehicles that allows easy and quick access to a plurality of shelves while minimizing the amount of sliding, adjusting, or removing of the shelves required to accomplish such an action. The shelving system utilized here comprises a plurality of flat planar surfaces, hingedly attached to one another, and to the interior walls of the vehicle, extend inwardly towards the center of the vehicle, whereby, after the center shelves are moved from a non-supporting vertical disposition to their useful, shelf-like horizontal position, a small number of vertically disposed planar members are introduced thereto, so as to keep the products in the vehicle from moving about during transport. Although the Hewel structure is somewhat similar, with respect to the utilization of horizontal members of the vehicle cargo walls to support the shelving units within the vehicle, the structural differences and manner in which the shelving is connected to the interior of the vehicle are vastly different; the system of Hewel requires permanent alteration to the interior of the vehicle, which is avoided with the utilization of the present invention. Use of the Hewel system in a leased vehicle would not be economically feasible or even possible.
U.S Pat. No. 2,826,108, issued Mar. 11, 1958 to Edward L. Mills, teaches a lipped, washer type nut fastener assembly, remotely similar to the L-shaped member of the present invention in regards to physical construction, but not having any utility in the environment of the instant invention. Furthermore, the multi-part fastener assembly of Mills cannot be utilized in and of itself as a means of fastening a threaded member to a supporting surface without the aid of a threaded nut.
U.S. Pat. No. 3,175,073, issued to Carl E. Gingher et al. on Apr. 20, 1969, discloses a modular shelving unit of an adjustable nature, having vertically disposed support members with holes drilled therein to accept the adjusters of the shelving platforms that are incorporated within the unit. Although these vertical members are remotely similar in structure to those utilized in the present invention, no means of attaching such a unit to the walls of a vehicle using these members, or any other member of the unit, is taught.
U.S. Pat. No. 4,236,747, issued to Roger D. Ratliff on Dec. 2, 1980, discloses a transport vehicle having a variety of features making it a versatile transport vehicle. Although a removable shelving unit is an essential feature of one of the three cargo areas disclosed, no manner of attaching the shelving in a temporary, semi-permanent, or permanent fashion is disclosed.
Lastly, U.S. Pat. No. 4,759,654, issued to Graham L. Martin et al. on Jul. 26, 1988, discloses a three part clamping device for holding a grid-like member to a rigid I-beam or the like, rather than an uncomplicated, two part clamping assembly as herein disclosed and claimed. The clamping device of Martin et al. includes an L-shaped clamping member with a plurality of geometrical cutouts for non-rotational contact between the clamping member and the rigid structure. Features on the heads at the ends of the lever-arm portions of the L-shaped members help to secure the grid-like member to the I-beam through centralized pressure on the shaped portions of the member. Also seen on this L-shaped member is a tapered, threaded hole used to accept a threaded bolt or the like to secure the clamp. Although this arrangement appears somewhat similar to the present invention, the threaded hole therein is placed in the center of the long side of the L-shaped member between the shaped end of the member and the right angle of bend of the member itself, whereas the present invention utilizes a cantilever-type grip to secure the shelving unit to the wall member. The present invention is further distinguished in that the threaded hole is located in a substantially different location of the member, that is, adjacent to the right angle bend of the member.
None of the above inventions and patents, taken either singly or in combination, is seen to describe the present invention as claimed.


Disclosed is a method for determining a paging alert mode of a mobile terminal in a mobile communication system. The mobile terminal determines whether there exists a sub-BTS, depending on a broadcasting channel message provided in a cell formed by a main BTS. When the sub-BTS exists, the mobile terminal monitors receipt of a beacon paging group frame from the sub-BTS, and upon receipt of the beacon paging group frame, changes the paging alert mode to a predetermined paging alert mode.

1. Field of the Invention
The present invention relates generally to an apparatus and method for determining a paging alert mode in a mobile communication system, and in particular, to an apparatus and method for determining a paging alert mode of a mobile terminal in a base transceiver system(BTS).
2. Description of the Related Art
A rapid growth of the mobile communication business has caused a rapid increase in population of the mobile subscribers. Further, as the population of the mobile subscribers increases rapidly, the mobile communication service providers are competing against each other to attract many subscribers by providing the services differentiated from those of other mobile communication service providers.
FIG. 1 illustrates a conceptional cell structure of a conventional mobile communication system, in which one cell 20 is formed by its associated base station (BTS) 30.
A paging operation of the conventional mobile communication system will be described with reference to the above cell structure. Upon receipt of a paging request from a core network (CN), a core network (CN) determines a paging-requested mobile terminal. After determining the paging-requested mobile terminal, the RNC 10 calculates a paging group to which the mobile terminal belongs, using an identification (ID) of the paging-requested mobile terminal. Calculation of the paging group is accomplished by mapping the ID of the mobile terminal to a given mapping group. At this point, all the mobile terminals within the cell are uniformly distributed to the paging groups constituting a PICH(Paging Indicator Channel). FIG. 2 illustrates a structure of the PICH required for the paging operation in the conventional mobile communication system. As illustrated in FIG. 2, the PICH used in the conventional mobile communication system is comprised of a specified number (e.g., 144 in FIG. 2) of paging group frames. Therefore, "uniform distribution" refers to uniformly matching the number of the mobile terminals belonging to the respective paging group frames.
Meanwhile, after completing calculation of the paging group to which the paging-requested mobile terminal belongs, the RNC 10 creates a frame which the paging group sets to 1. The paging group frame is created such that it should have paging information for paging a specific mobile terminal. Based on the broadcasting message, the mobile terminal determines the number of paging groups that exists and determines whether a particular paging group's bit is '1' or '0'. If the paging group's bit is determined to be '1', the mobile terminal demodulates the S-CCPH channel after certain amount of delay and reads the identification message of the mobile terminal. As a result, if it is determined to contained the ID of the mobile terminal, the mobile terminal determines that paging exists and starts the RRC(Radio Resource Control) connection procedure.
Upon power-on, the corresponding mobile terminal calculates a paging group to which it belongs, using its mobile ID and the information of number of PI(Paging Indicator) of broadcast channel. Calculation of the paging group is accomplished by the same method as that used in the BTS to calculate the paging group using the mobile ID. After that, the mobile terminal proceeds to a suspended mode, and turns on radio frequency receive power (RF Rx power) at a position assigned for the calculated paging group out of the slots constituting the physical channel, to determine whether there exists paging. That is, all the mobile terminals located in the cell 20 continuously monitor the paging information corresponding to the paging groups to which they belong. That the mobile terminal continuously monitors its paging information means that the mobile terminal is enabled at a time when the corresponding slot of the physical channel over which the paging information of its paging group is transmitted, to read all the information loaded in the slot. The existence or nonexistence of paging is determined by checking the number of the PI bits with logic '1' If the base station has 144 paging groups as shown in FIG. 4, one PI is made of 2 bits. If it is determined that the 2 bits of PI is logic '1' after examining the bits, S-CCPCH channel is read after certain amount of delay. After the demodulation of S-CCPCH, the mobile terminal generates an alert tone in a paging alert mode set by the subscriber. The alert mode set by the mobile terminal can be divided into a melody mode in which paging is indicated using a melody, a vibration mode in which paging is indicated by vibration, and a mute mode in which paging is indicated through a display. As mention above, such an alert mode can be set by only the subscriber's manipulating the mobile terminal in person.
As described above, when paging occurs for a specific mobile terminal, the RNC and the BTS of the conventional mobile communication system service only the function of simply paging the corresponding mobile terminal through the physical channel. That is, the conventional mobile communication system controls only the radio communication service but cannot control the function of changing the paging alert mode provided in the mobile terminal. Accordingly, in order to change the paging alert mode according to the surroundings, the subscriber should change the mode by manipulating the keypad prepared in the mobile terminal in person, suffering inconveniences.

Apparatus and method for determining paging alert mode in a mobile communication system


A composite utility knife blade and method of making such a blade involves butt joining a tool steel wire to a front edge of an alloy steel backing strip. The wire is electron beam welded to the backing strip to form a composite strip defining a first metal portion formed by the alloy steel backing strip, a second metal portion formed by the tool steel wire, and a weld region joining the first and second metal portions. The composite strip is then annealed, and the annealed strip is straightened to eliminate any camber therein. The annealed composite strip is then hardened such that the first metal portion defines a surface hardness within the range of approximately 38 Rc to approximately 52 Rc, and the second metal portion defines a surface hardness within the range of approximately 60 Rc to approximately 57 Rc.

Conventional utility knife blades are made of carbon steel and define a back edge, a cutting edge located on an opposite side of the blade relative to the back edge, and two side edges located on opposite sides of the blade relative to each other and extending between the back and cutting edges of the blade. A pair of notches are typically formed in the back edge of the blade for engaging a locator in a blade holder. Typically, the back, cutting and side edges of the blade define an approximately trapezoidal peripheral configuration.
Conventional utility knife blades are manufactured by providing a carbon steel strip, running the strip through a punch press to punch the notches at axially spaced locations on the strip, and stamping a brand name, logo or other identification thereon. Then, the strip is scored to form a plurality of axially spaced score lines, wherein each score line corresponds to a side edge of a respective blade and defines a preferred breaking line for later snapping the scored strip into a plurality of blades. The punched and scored strip is then wound again into a coil, and the coil is hardened and tempered. The hardening and tempering operations may be performed in a "pit-type" vacuum furnace wherein the coils are repeatedly heated and cooled therein. Alternatively, the hardening and tempering operations may be performed "in-line", wherein the strip is unwound from the coil and successively driven through a series of furnaces and quenching stations to harden and temper the strip. The carbon steel strip is typically heat treated to a surface hardness of about 58 Rockwell "c" ("Rc"), and thus defines a relatively hard and brittle structure.
The heat treated strip is then ground, honed and stropped in a conventional manner to form the facets defining a straight cutting edge along one side of the strip. Then, the strip is snapped at each score line to, in turn, break the strip along the score lines and thereby form from the strip a plurality of trapezoidal shaped utility knife blades. Because the entire strip is relatively hard and brittle (about 58 Rc), the strip readily breaks at each score line to thereby form clean edges at the side of each blade.
One of the drawbacks associated with such conventional utility knife blades is that each blade is formed of a single material, typically carbon steel, that is heat treated to a relatively hard and brittle state, typically about 58 Rc. Thus, although such blades define a relatively hard, wear-resistant cutting edge, the entire blade is also relatively brittle, and therefore is subject to premature breaking or cracking in use. In addition, the cutting edges of such conventional blades are frequently not as wear resistant as might otherwise be desired. However, because the entire blade is made of the same material, any increase in hardness, and thus wear resistance of the cutting edge, would render the blade too brittle for practical use. As a result, such conventional utility knife blades are incapable of achieving both the desired wear resistance at the cutting edge, and overall toughness to prevent cracking or premature breakage during use. Another drawback of such convention utility knife blades is that the carbon steel typically used to make such blades corrodes relatively easily, thus requiring premature disposal of the blades and/or costly coatings to prevent such premature corrosion.
Certain prior art patents teach composite utility knife blades defining sandwiched, laminated, or coated constructions. For example, U.S. Pat. No. 4,896,424 to Walker shows a utility knife having a composite cutting blade formed by a body section 16 made of titanium, and a cutting edge section 18 made of high carbon stainless steel and connected to the body section by a dovetail joint 25.
U.S. Pat. Nos. 3,279,283, 2,093,874, 3,681,846, and 6,105,261 relate generally to laminated knives or razor blades having cutting edges formed by a core layer made of a high carbon steel or other relatively hard material, and one or more outer layers made of relatively softer materials. Similarly, U.S. Pat. Nos. 3,911,579, 5,142,785, and 5,940,975 relate to knives or razor blades formed by applying a relatively hard carbon coating (or diamond like coating ("DLC")) to a steel substrate. In addition, U.S. Pat. Nos. 5,317,938 and 5,842,387 relate to knives or razor blades made by etching a silicon substrate.
One of the drawbacks associated with these laminated, sandwiched and/or coated constructions, is that they are relatively expensive to manufacture, and therefore have not achieved widespread commercial use or acceptance in the utility knife blade field.
In stark contrast to the utility knife blade field, bi-metal band saw blades have been used in the saw industry for many years. For example, U.S. Reissue Pat. No. 26,676 shows a method of making bi-metal band saw blades wherein a steel backing strip and high speed steel wire are pre-treated by grinding and degreasing, and the wire is welded to the backing strip by electron beam welding. Then, the composite band stock is straightened and annealed. The sides of the annealed stock are then dressed, and the band saw blade teeth are formed in the high speed steel edge of the composite stock by milling. Then, the teeth are set and the resulting saw blade is heat treated. There are numerous methods known in the prior art for heat treating such band saw blades. For example, International Published Patent Application No. WO 98/38346 shows an apparatus and method for in-line hardening and tempering composite band saw blades wherein the blades are passed around rollers and driven repeatedly through the same tempering furnace and quenching zones. The heat treated composite band saw blades are then cleaned and packaged.
Although such bi-metal band saw blades have achieved widespread commercial use and acceptance over the past 30 years in the band saw blade industry, there is not believed to be any teaching or use in the prior art to manufacture utility knife blades defining a bi-metal or other composite construction as with bi-metal band saw blades. In addition, there are numerous obstacles preventing the application of such band saw blade technology to the manufacture of utility knife blades. For example, as described above, conventional utility knife blades are manufactured by forming score lines on the carbon steel strip, and then snapping the strip along the score lines to break the strip into the trapezoidal-shaped blades. However, the relatively tough, spring-like backing used, for example, to manufacture bi-metal band saw blades, cannot be scored and snapped. Rather, such relatively tough materials require different processes to form the utility knife blades from a heat treated, composite strip. In addition, the heat treating applied to conventional utility knife blades could not be used to heat treat bi-metal or other composite utility knife blades.
Accordingly, it is an object of the present disclosure to overcome one or more of the above-described drawbacks and disadvantages of prior art utility knife blades and methods of making such blades, and to provide a bi-metal or other composite utility knife blade defining a relatively hard, wear-resistant cutting edge, and a relatively tough, spring-like backing, and a method of making such utility knife blades.

This patent is subject to a terminal disclaimer.

Method of making a composite utility blade


Provided is a patch 1 containing a backing layer 2 and a pressure-sensitive adhesive layer 3 formed on the backing layer 2, where the pressure-sensitive adhesive layer 3 contains (i) ropinirole and a metal salt produced by the reaction of a ropinirole acid adduct and a metal ion containing desalting agent in an equivalent mole or less to the acid adduct and (ii) an adhesive base free of a hydroxyl group and a carboxy group.

Ropinirole was developed as a drug which conquers the limit associated with L-Dopa therapy, and has been used for treating Parkinson's disease. Further, transdermal preparations containing ropinirole have been studied owing to the avoidance of adverse reactions on the stomach and intestines and the easy removal in case adverse reactions occur (Patent Documents 1 and 2).
On the other hand, the drug is distributed in the market in the form of an acid adduct salt from the viewpoints of the handleability and stability thereof. When a drug in the form of an acid adduct salt is directly applied for transdermal administration or the like, it is generally known that the absorbability tends to be decreased, but also known that a free form of a drug is preferred in terms of the absorbability.
In Patent Document 3, a technique wherein a drug acid adduct salt is used as a starting material for producing a transdermal preparation and the drug acid adduct salt is neutralized (desalted) in the preparation during the production or after the production so that a free form can be absorbed at the time of transdermal administration.    Patent Document 1: Japanese Unexamined Patent Application Publication (Translation of PCT Application) No. 2001-518058    Patent Document 2: Japanese Unexamined Patent Application Publication (Translation of PCT Application) No. H11-506462    Patent Document 3: Japanese Unexamined Patent Application Publication No. 2007-16020

Adhesive skin patch and packaged product


A method for displaying a circular interpolation locus which is used in a numerical control apparatus. The method is constituted by the steps of detecting movements of axes controlled by the numerical control apparatus, synthesizing signals detected in the detected step, displaying a movement locus of two axes as a circular interpolation locus on a display. A numerical control apparatus which has a circular interpolation locus display function is also disclosed. The numerical control apparatus is constituted by first detecting unit for detecting a motion of a control object controlled by a first servo motor, second servo detecting unit for detecting a motion of the control object by a second servo motor, two axes synthesizing unit for synthesizing the output signals for the first detecting unit for displaying the two axes movement locus. The method and apparatus can be applicable both semi-closed loop and hybrid control.

1. Field of the Invention
This invention relates to a numerical control method and an apparatus thereof.
More specifically, this invention relates to a numerical control method and an apparatus thereof which have a circular interpolation locus display function for setting and adjusting servo parameters in order to use the most suitable servo characteristics in a machining process.
2. Description of the Related Art
Machine tools which execute three dimensional cutting or the like, have drive mechanisms which are arranged in each axis thereof, such as the X-axis, the Y-axis, and the Z-axis. A tool attached on a machine tool is simultaneously controlled by such drive mechanisms. As a result, more accurate three dimensional motion is made and three dimensional cutting, machining or the like, are executed.
A controller is used for these multi axes simultaneous control which uses a program control. This is a so called "numerical control apparatus (NC apparatus)".
Numerical control apparatus analyze a machining program which is externally input, and also analyze each command input in the machining program. Data for each axis are output in accordance with these commands, and a machining process is automatically executed. As a result, the machine tool, or the like, are controlled to have a desired motion.
Such an NC-device analyzes respective movement command values for the shafts from a predetermined movement command program input externally, and sequentially outputs the respective thus-analyzed command values into driving mechanisms for the corresponding shafts of the machine tool to thereby cause the respective driving mechanisms to cooperate and hence to cause the machine tool to automatically execute a desired operation set in the program.
If the machine tool executes a circular cutting motion, at least simultaneous two axis control is required. For example, when a real circle which as a radius r is described in the X-Y plane and the center of the circle has the coordinates (X.sub.0, Y.sub.0) in X-axis and Y-axis respectively, the X value and the Y value are controlled with cooperation in the expression: EQU (x-X.sub.0).sup.2 +(h-Y.sub.0).sup.2 =r.sup.2 ( 1)
Each axis value is simultaneously controlled according to: ##EQU1## When adjusting such simultaneous two axes control, if each servo characteristics is not adjusted well, an error occurs. The cutter path becomes different from the coordinates of a command value and the machining accuracy decreases.
There are many methods for servo adjustment, such as, gain adjustment, gain discrepancy adjustment between two axes, anticipation control, backlash compensation, and projection control or the like. These methods are used for adjusting the error corresponding to several error elements using the DBB measurement apparatus (Kakino et al. Study of the Motion Accuracy of NC Machine Tools (1st report)), Journal of The Japan Society of Precision Engineering, Vol. 52, July 1986 or the like, and these methods need expensive measurement tools and a high skill. An example of this is found in copending application Ser. No. 07/548,704, U.S. Pat. No. 5,189,627.
In another method, a circular cutting test is executed using a test piece, and the deviation of the circle from a perfect circle is measured by a circle perfection measurement apparatus. This method takes labor and time. Further, this method is effected by spindle rotation and a tool, so that it has not been estimated exactly.
Therefore, in the related art, such as DBB measurement apparatus or circular interpolation movement accuracy measurement method, much labor and time are needed. Thus, it has been desirable to provide an NC method and NC apparatus which are able to shorten the amount of labor and time for adjusting servo characteristic.

Numerical control apparatus having a circular interpolation locus display function and control method thereof


A method for displaying a tabbed dialog box, a property sheet, which can be either modal or modeless. The property sheet has at least one child window. The child window has a tab field identifying a category of information. The parent window or property sheet has a multiple associated, displayable child windows. Upon selection of the tab field, a menu window is displayed with at least one menu item field. The menu item may be selectable by the user to initiate the display of another child window or subcategory menu window. The user can select the field to display a third child window, a property page which can display properties of an object.

Often times it is necessary for a user of a computer program to select certain functions or provide information to a computer application during its execution. User interfaces can accomplish this through a series of textual prompts, or, in the WINDOWS.RTM. programming environment, through the use of dialog boxes. A dialog box typically appears as a result of selecting a menu command that ends with an ellipse (e.g., Open . . . ). The dialog box opened by the menu command can provide additional selections for the user or display additional information. In this way, the dialog box can act as a type of menu extender which provides the user with additional choices. The dialog box can display these additional choices in the form of push buttons, list boxes, drop-down list boxes, check boxes, option buttons, and text boxes. Dialog boxes are child windows which are typically owned by a program's main window and can be either modal or modeless. A modal dialog box requires the user to supply information or cancel the application before allowing the main application to continue. A modeless dialog box allows the user to continue with the main application without closing the dialog box. For example, the user can switch between the modeless dialog box and the window that created it as well as to other programs.
While dialog boxes simplified the presentation of information to a user, often times it was necessary for the user to navigate down a series of cascading dialog boxes to set a value or input information. If the user improperly set a previous value or forgot a key piece of information, it would be necessary to close the series of dialog boxes and begin again. An improvement upon the dialog boxes occurred with the introduction of property sheets. A property sheet (or tabbed dialog box) simplified the display of dialog boxes and typically comprises a frame, title bar and push buttons (e.g., OK, Cancel, Apply, Help). Conventional pages of a property sheet each manages its own control windows (e.g, push buttons, checkboxes and the like) and has a single tab displayed therewith. Thus, each tab is displayed in conjunction with only a single property page such that user selection of the tab can move and display only a single associated page (or dialog box).
While property sheets and their associated property pages have simplified the display of dialog boxes, there continues to be a need in the art for more efficient and flexible processes and apparatuses for displaying dialog boxes. Particularly, there continues to be a need to provide processes and apparatuses accommodating increased flexibility for the display of property pages. Still further, there continues to be a need to provide improved processes and apparatuses for associating a plurality of property pages with a tabbed window, thereby providing simplified user interfaces which are easier to navigate. The present invention incorporates processes and structures which can accommodate the above described benefits.

Navigation between property pages with tabs and menus


An X-ray tomography device for providing a 3D image of a sample comprising an X-ray source, a cell, a photon detector and a processing unit. The processing unit computes the 3D image on the basis of the images corresponding to a plurality of cell angles. The device further comprises a first and a second gratings having a grating period lower than 200 nm, and a microscope between the second grating and the detector.

The present invention concerns an X-ray tomography device adapted to petrophysics application, such as to study the flow of fluids into a porous medium. For example, the aim is to study the multiphase flow of a mix of two or three fluids inside a porous medium: a mix of any two of water, gas and oil or the three of them.
The known X-ray tomography systems are adapted to study the morphology of rock pores, to identify the minerals comprised into the rock sample (the porous medium) or the topology of various fluid phases present in the rock sample under static (ie non flowing) conditions.
Moreover, these known tomography systems are not able to visualize small pores in rocks, at the same time as the various fluids or mix of fluids inside the rock and pores of the rock.

UNIVERSITE DE PAU ET DES PAYS DE L'ADOUR


A process for positioning a mask relative to a workpiece in which positioning can be done with high accuracy, and which can be advantageously used for step and repeat exposure. An improved device for executing the process of the present invention is also provided. The invention includes a reflection component positioned on a workpiece carrier in a position removed from the workpiece attachment site. The exposure light from an exposure light irradiation device is projected onto the mask and alignment marks provided on the mask are projected onto the reflection component. The alignment mask projection images are detected, their relative positions are stored, and emission of the exposure light terminated. The workpiece carrier, on which a workpiece is placed, is moved into a position in which the mask alignment marks are projected onto the workpiece. Furthermore, nonexposure light is emitted onto the alignment marks of the workpiece, the workpiece alignment marks are detected and their relative positions are determined. Then the workpiece and/or the mask are/is moved such that the mask and workpiece alignment marks come to rest on top of one another.

1. Field of the Invention
The invention relates to a process for positioning a mask relative to a workpiece and a device for executing the process in an exposure device which is used for production of a semiconductor device, a printed board, an LCD (liquid crystal display) and for similar purposes.
2. Description of Related Art
Production of electrical and electronic components and parts of various types in which processing of structures in the micron range is necessary includes an exposure process. These electronic parts are semiconductor components, liquid crystal displays, printer heads of the inkjet type, and multichip modules in which a host of different electronic components are produced on a substrate and thus a module is formed, and the like.
In this exposure process, it is important, in the case of transmission of the mask pattern onto the workpiece, that a pattern to be subsequently transferred is positioned exactly to a pattern formed beforehand.
The above described positioning is conventionally done such that the alignment marks of the mask and the workpiece come to lie on top of one another.
As automated devices for transferring a mask pattern, exposure devices of the projection type are known wherein positioning is done using exposure light, for example of an i-line, an h-line or a g-line (i-line: 365 nm wavelength, h-line: 405 nm wavelength, g-line: 436 nm wavelength), or wherein positioning is done using nonexposure light, as, for example, an e-line, a d-line or a c-line (e-line: 546 nm wavelength, d-line: 588 nm wavelength, c-line: 656 nm wavelength).
In the aforementioned devices, in the area used for positioning, a circuit pattern cannot be formed since the photoresist is exposed to the action of exposure light during positioning.
In the case in which the yield from a workpiece is to be a host of chips, as in semiconductor components, the number of chips decreases according to the area used for positioning. Therefore, the disadvantage arises that production efficiency is impaired. On the other hand, in these devices, there is the advantage that the region of the circuit patterns is not limited by the positioning region, since the photoresist is not exposed to the action of exposure light during positioning.
However, it is considered disadvantageous that, as a result of the different wavelengths of the exposure light and the nonexposure light, the mask pattern is not projected onto the same site.
FIG. 11 shows, schematically, an arrangement of the conventional exposure device in which positioning is done using the above described e-line. In the drawing reference number 1 indicates an exposure light irradiation device or a nonexposure light irradiation device; reference number 1a, a lamp; reference number 1b, a focussing mirror; reference number 1c, a shutter; reference number 1d, an optical filter; and reference number 1e, a condenser lens.
Furthermore, reference number 2 indicates a mask carrier on which mask M is attached by means of a vacuum chuck or the like and which is driven by means of a drive device not shown in the drawing in the X-Y-Z-directions (X axis and Y axis being orthogonal axes on the plane parallel to one mask surface; Z axis being the axis in the vertical direction in FIG. 11; .theta. axis being the axis of rotation around the Z-axis).
On mask M, a mask pattern and mask alignment marks MAM, hereinafter referenced to as mask marks, are recorded for purposes of positioning.
Reference number 3 indicates a projection lens and reference letter W indicates a workpiece. Workpiece alignment marks WAM, hereinafter referenced to as workpiece marks, are recorded on workpiece W for purposes of positioning.
Reference number 5 indicates an alignment unit which consists of lens 5a, objective lens 5b, half mirror 5c and image converter 5d which has a CCD camera. Workpiece mark WAM and mask mark MAM, which is projected onto the workpiece W, are detected via half mirror 5c, objective lens 5b and lens 5a by means of image converter 5d, and thus the positions of the two marks are observed.
In FIG. 11, alignment unit 5 is shown only once. However, there are several alignment units 5 (at least at two locations) since there are several mask marks MAM and several workpiece marks WAM (each at least at two locations) each on mask M and workpiece W, and because alignment unit 5 is assigned according to the respective alignment mark.
Furthermore, alignment units 5 are ordinarily formed such that they can be removed in the direction of the arrow according to FIG. 11. During exposure, alignment units 5 are removed when they extend within the exposure area.
Alignment units 5 can be located in area B as shown. Moreover, they can also be located in additionally shown area A or area C.
In FIG. 11 when workpiece W is exposed, the e-line, as nonexposure light, is emitted first from exposure light (or nonexposure light) irradiation device 1 via optical filter 1d and, by means of alignment units 5, workpiece marks WAM and mask marks MAM, projected onto workpiece W, are detected. This method of determining mask marks MAM projected onto the workpiece by the projection lens is called TTL, i.e., the "through the lens", method.
In the case of auto alignment, by means of a control device which is not shown in the drawing, based on the features of mask marks MAM and workpiece marks WAM, the respective marks are recognized and mask carrier 2 and/or a workpiece carrier 4 are automatically moved such that the positions of the two marks agree with one another.
In the case of manual alignment, detected mask marks MAM and workpiece marks WAM are displayed on a monitor, which is not shown in the drawing, and by watching the monitor, an operator moves mask carrier 2 and/or workpiece carrier 4 such that the two marks agree with one another.
After completed positioning, optical filter 1d is removed from the optical path, the i-line, as exposure light, is then emitted from exposure light (or nonexposure light) irradiation device 1, the mask pattern is projected onto workpiece W, and exposure is effected.
In the case of using the i-line as the exposure light and the e-line as the nonexposure light, as a result of the different wavelengths of the two lines, the following disadvantages arise in the above described positioning:
1) In a projection lens which is designed such that at exposure wavelengths no imaging error or aberration occurs, at nonexposure wavelengths, a deviation of the mask pattern projection surface takes place. This means that the mask pattern is not projected onto the same surface as is illustrated in FIG. 11 wherein the pattern is projected on surfaces I and E.
2) The positions of mask marks MAM' on mask pattern projection surface E by the e-line, and the positions of mask marks MAM on mask pattern projection surface I by the i-line, do not agree with one another as a result of the chromatic aberration of the magnification factor.
This means that the distance between projection lens 3 and mask pattern projection surface E by the e-line becomes greater than the distance between projection lens 3 and mask pattern projection surface I by the i-line, and distance Le of mask marks MAM' on mask pattern projection surface E by the e-line becomes greater than distance Li of mask marks MAM on mask pattern projection surface I by the i-line, as shown in FIG. 11.
Furthermore, the positions of the projection images of mask marks MAM' on mask pattern projection surface E are changed by the locations of the alignment marks. This means that different values are obtained for distances .DELTA.L and .DELTA.L' between the workpiece marks and projected mask marks, as illustrated in FIG. 12.
Conventionally, therefore, the deviation of the projection surfaces is corrected by inserting a parallel flat plate in the optical path of the projection optics system and, according to the wavelengths of the nonexposure light, by changing the plate thickness or adjusting the plate tilt (JP patent HEI 5-43168 and corresponding U.S. Pat. No. 4,616,130).
In the above described prior art, the deviation of the projection images by the exposure light and the nonexposure light is corrected by inserting the parallel flat plate between the projection lens and the workpiece. The property being that, by inserting the parallel flat plate in the optical path, the focal position deviates by .DELTA.S, as is illustrated in FIG. 13.
The above described prior art, however, has the following disadvantages:
(1) As is shown in FIG. 12, the positions of the projection images of the mask marks are changed by the nonexposure light depending on the positions of the alignment marks. It is therefore necessary to insert the parallel flat plate between the mask and the projection lens, to adjust its tilt and to correct the position deviation by the positions of the alignment marks, as is shown, for example, using the conventional device.
(2) When the wavelength for exposure and the wavelength for alignment change, the amount of focal length correction changes. It is therefore necessary to make available the parallel flat plate according to a combination of the above described wavelengths.
(3) To adjust the magnification factor, an optical component is used which consists of the parallel flat plate. It is therefore necessary to additionally use a retaining device for this purpose. Especially in the case in which the optical component is inserted and removed again, does the disadvantage arise that the device becomes complex and too large at the same time.
(4) The disadvantage arises that the workpiece is contaminated by dust because directly above the workpiece is the insertion device of the parallel flat plate.
As was described above, positioning using the nonexposure light has the advantage that the pattern can be formed in the vicinity of the alignment marks. But then it is necessary to correct the length of the optical path using the parallel flat plate and the like. This results in various disadvantages.
Furthermore, in the conventional process in which the relative positions of the two alignment marks are determined in the state in which the mask mark is projected onto the workpiece provided with the workpiece marks, the disadvantage arises that when auto alignment is done, the control device only recognizes the workpiece marks with difficulty.
To eliminate the above described disadvantages, the applicant has already proposed the device shown in FIG. 14 (JP patent application HEI 6-294279 and corresponding U.S. Pat. application No. 08/564,005).
In the drawing, the same parts as in FIG. 11 are provided with the same reference numbers as in FIG. 11. Reference number 1 indicates the exposure light (or nonexposure light) irradiation device, reference number 2 indicates the mask carrier, reference letter M indicates the mask on which a mask pattern and the mask alignment marks MAM are recorded for positioning. Reference number 3 indicates the projection lens and reference letter W indicates the workpiece on which workpiece marks WAM are recorded for purposes of positioning. Furthermore, reference number 4 indicates the workpiece carrier on which total reflection or half mirror 4a is installed and which is driven by means of a drive device which is not shown in the drawing in the X-Y-Z-.theta. directions.
Reference symbol WA1 indicates an alignment mark partial illumination system. The nonexposure light which is emitted from a light source not shown in the drawing is incident via optical fibers 6a, lens 6b and mirror 6c on half mirror 5e of alignment unit 5 and irradiates workpiece mark WAM on workpiece W.
Exposure will now be described using the device shown in FIG. 14:
(1) Mask M is placed on mask carrier 2 and attached. Shutter 1c of exposure light (or nonexposure light) irradiation device 1 is opened in the state in which optical filter 1d in the optical path is removed. Exposure light is emitted onto mask M. In this process, step workpiece W is not placed on workpiece carrier 4.
(2) The position of workpiece carrier 4 is shifted in the Z-direction such that the reflection surface of mirror 4a installed in workpiece carrier 4 agrees with mask pattern projection surface Zo by the exposure light.
(3) Alignment unit 5 is inserted. Alignment mark partial illumination system WA1 is arranged integrally with alignment unit 5 and is inserted together with alignment unit 5.
(4) By means of image converter 5d of alignment unit 5, mask mark MAM, projected onto mirror 4a of workpiece carrier 4, is detected. An image processing part, not shown in the drawing, identifies mask mark MAM based on the detected image and stores the position coordinates thereof (XM, YM).
(5) Shutter 1c of exposure light (or nonexposure light) irradiation device 1 is closed. In this way emission of exposure light onto mask M is stopped.
(6) Workpiece W is placed on workpiece carrier 4 and attached.
(7) Workpiece carrier 4 is moved in the Z-axis direction such that the surface of workpiece W agrees with mask pattern projection surface Zo.
(8) Illumination light is supplied to alignment mark partial illumination system WA1. Workpiece mark WAM on workpiece W is irradiated via optical fibers 6a, lens 6b, mirror 6c, half mirror 5e, lens 5b and half mirror 5c, and is detected by means of image converter 5d.
The image of workpiece mark WAM, detected by means of image converter 5d, is sent to the above described image processing part which identifies workpiece mark WAM and determines its position coordinates (XW, YW).
(9) Emission of the illumination light of alignment mark partial illumination system WA1 is stopped.
(10) The position deviation of workpiece W and mask M is determined on the basis of stored position coordinates (XM, YM) of mask mark MAM and determined position coordinates (XW, YW) of the workpiece mark.
As a result of the above described position deviation, mask carrier 2 and/or workpiece carrier 4 is/are driven in the X-Y-Z-.theta. directions and the position of mask mark MAM is brought into agreement with the position of workpiece mark WAM.
With the above described agreement of the position of mask mark MAM with the position of workpiece mark WAM, alignment unit 5 is removed. Shutter 1c of exposure light (nonexposure light) irradiation device 1 is opened, the exposure light is emitted onto mask M, and thus exposure is effected.
In the case of using the above described exposure for a step and repeat process in which each exposure zone on the workpiece is exposed in steps by moving the workpiece, according to above described process (10), the following processes are also performed, the processes of (8) through (15) are repeated, and exposure of the respective exposure zone is effected.
(11) Alignment unit 5 is removed.
(12) Shutter 1c of exposure light (nonexposure light) irradiation device 1 is opened, the exposure light is emitted onto mask M, and thus exposure is effected.
(13) Shutter 1c of exposure light (nonexposure light) irradiation device 1 is closed, and emission of exposure light is stopped.
(14) Workpiece carrier 4 is moved in a certain amount in order that the next exposure zone is positioned in a stipulated exposure position.
(15) Alignment unit 5 is inserted. There is a return to above described process (8). Processes (8) through (15) are repeated and the respective exposure zone on the workpiece undergoes step and repeat exposure.
The above described technique suggested previously by the applicant does have the advantages that no parallel flat plate is used and that positioning of the mask to the workpiece can be done independently of the projection lens and with high precision. In the case of its use for the above described step and repeat exposure, however, the following disadvantage arises:
In the case of using the previously suggested exposure process for step and repeat exposure, it is necessary to insert and remove alignment unit 5 when each exposure is effected. As a result, the reproducibility of the insertion position of alignment unit 5 is important.
FIG. 15 schematically shows a case in which the stopping position of alignment unit 5 changes. When the stopping position of alignment unit 5 is identical to the position in FIG. 15 by the broken line, the imaging position of mask mark MAM (or of workpiece mark WAM) on image converter 5d, changes accordingly.
In the above described step and repeat cycle of processes (8) through (15), in step and repeat exposure, only the positions of workpiece mark WAM are, however, detected and stored starting the second time. Therefore, in this case, it is possible that deviations occur from the position of mask mark MAM which was stored the first time.
In step and repeat exposure, the alignment accuracy is usually roughly .+-.1 micron. A positioning accuracy of alignment unit 5 of roughly .+-.0.1 microns (roughly 1/10 of the accuracy of alignment of mask M to workpiece W) is necessary in order that the deviations of workpiece marks WAM from the stored position of mask mark MAM lie within this range. It is difficult to do this mechanically with each insertion and removal of alignment unit 5.
The above described disadvantage is, on the other hand, eliminated by the position of mask mark MAM being stored in each step and repeat cycle. However, in the above described case, the sequence of storing the position of mask mark MAM by emission of exposure light cannot be done because, beginning with the second step and repeat cycle, workpiece W is attached to workpiece carrier 4.

Process for the positioning of a mask relative to a workpiece and device for executing the process


A support body for an apparatus having an extended nip formed between the support body and a counter-pressure member, having a working surface, being elastically deformable, and comprising a plurality of pressure chambers pressurized for controlled expanding in the direction of the working surface in order to load the nip. According to the invention the support body comprises a plurality of reinforcing profiles disposed in at least one chamber of the pressure chambers, the interiors of the profiles being in fluid communication with one another via holes, a wall of the profile facing said working surface including holes for communicating fluid between the interior of the profile and the chamber in which said profile is located, said profiles providing an inner support to walls defining said at least one chamber.

The present invention relates to a support body for an apparatus having an extended nip formed between the support body and a counter-pressure member, said support body having a working surface, and being elastically deformable, and comprising a plurality of pressure chambers that are arranged to be pressurized for controlled expanding in the direction of the working surface in order to load the nip via said working surface.
The invention also relates to a support body assembly for an apparatus having an extended nip N, comprising:                a support body having a working surface, and being elastically deformable, and comprising a plurality of pressure chambers said nip (N) being formed between the support body and a counter-pressure member, said chambers being arranged to be pressurized in order to load the nip (N) via said working surface; and        a holding device for the support body, the holding device providing an outer support to all sides of the support body having said pressure chambers except the side of the working surface so that a pressurization of the pressure chambers cause the pressure chambers to expand in a controlled manner in the direction of said working surface.
The invention also relates to an apparatus for the treatment of a fibre web being manufactured in a paper or board machine, comprising:                a first structural element, and a second structural element movably arranged with respect to the first structural element and having a counter-pressure surface for interaction with the first structural element to form an extended nip, said first structural element including:                    a movable clothing;            a support body assembly, including                            a support body having a working surface that together with the counter-pressure surface defines said nip, said support body being elastically deformable and comprising a plurality of pressure chambers arranged to be pressurized in order to load the nip via said contact surface; and                a holding device for the support body, the holding device providing an outer support to sides of the pressure chambers except at a side of the pressure chambers facing said working surface so that a pressurization of the pressure chambers cause the pressure chambers to expand in the direction of said working surface.
The previously known presses with an extended press nip have a so-called press shoe, which consists of a metallic material, such as aluminium or steel, and are designed with a press surface, usually a concave press surface, whose profile is very accurately adapted to the opposed counter-pressure surface. Such a press shoe is very complicated to manufacture and therefore involves a very high cost. Due to the fact that it consists of metal, it is relatively rigid and inflexible. The press roll acting as a counter roll such a shoe press can have a relatively thick cylinder wall which withstands the forces from the press shoe. In accordance with another embodiment of the counter roll, it has a relatively thin cylinder wall and is provided internally with a counter-pressure system for adjustable crowning of the thin and, thus, deformable cylinder wall or shell in dependence of the forces the press shoe has to apply on the counter roll in order to obtain the desired load. Also the press shoe can be crowned in accordance with the crowning of the counter roll, and it will then be usable only in combination with this counter roll. Alternatively, the metallic press shoe can be tilted by means of hydraulic cylinders.
A Yankee cylinder has a cylinder wall or shell which is relatively thin, and which easily is deformed by impression of the press shoe when the Yankee cylinder is used as a counter roll. The deformation of the shell varies in an axial direction from the central region in a direction towards the end walls, where the impression is substantially smaller than within the central region. Therefore, the press shoe will act with a higher pressure at and in the vicinity of the end walls, resulting in an increased wear at the edges of the press felt and an irregular load profile along the press shoe, something which in its turn results in variable paper properties crosswise to the machine direction. It has been proposed to crown the shell of the Yankee cylinder by means of an internal counter-pressure system, or to arrange two or more rows of hydraulic cylinders on the underside of the press shoe for influencing the press shoe to conform to the deformed surface, in both cases in order to achieve a more uniform load profile. Both proposals, however, are complicated and expensive to carry out.
The following documents are examples of presses having extended press nips.
DE 44 05 587 and WO 02/44467 describe a press having a hydrostatic bearing, including a press shoe 3 or double press shoes 3a, 3b of the same design. A press belt 6 rotates on top of a lubricating fluid bed of the press shoe 3 with a very small friction. The press shoe, which is made of metal, has a pressure chamber 10 containing a hydraulic fluid, preferably water. A rectangular pressure-equalizing membrane 20, consisting of a suitable solid material, preferably stainless steel, is fixed on the press nip side of the press shoe. The pressure-equalizing membrane 20 has an outer edge 26, an inner edge 22, and an opening 27 that is defined by the inner edge 22. The pressure-equalizing membrane 20, thus looking like a frame, is flexible so that an edge zone 21, standing in direct contact with the hydraulic fluid, can deflect when pressure differences occur between its two sides. These pressure differences arise when hydraulic fluid happens to leak out through the press nip as a result of irregularities in the paper web and/or in the envelope surface of the counter roll. Thus, the flexible pressure-equalizing membrane 20 creates a self-adjusting nip 2, having no or only a minimum of fluid leakage. Thus, through the opening 27 in the pressure-equalizing membrane 20, the pressure fluid in the pressure chamber 10 stands in direct contact with the movable belt. The complementary addition which has been done in said WO-publication in comparison to said DE-publication is that the flexible membrane has been provided with "pinholes 255" within its free edge zone 21 in order to conduct hydraulic fluid from the pressure chamber 10 to the belt 6 for the purpose of lubricating the belt.
U.S. Pat. No. 5,980,693 describes presses having a tube-shaped or inflatable loading element, but with a metal shoe between the loading element and the inside of the belt. Furthermore, this part of the shoe is constructed in order to provide a slow reduction of the pressure in nip outlet. Normally, an abrupt pressure drop is desired.
U.S. Pat. No. 3,839,147 describes a shoe press having two opposed shoes. Each shoe has a metal bottom and sills, sealing against the inside of the belt. The side of the shoe facing the belt is a perforated diaphragm, which causes the pressure of the hydraulic fluid in a pressure chamber to load the inside of the belt directly. The shoe is of a rather complicated construction with various apertures and reinforcements.
U.S. Pat. No. 5,951,824 describes an ordinary shoe having ordinary hydraulic loading elements. The shoe is coated with a soft and durable layer of polymer or rubber in order to reduce the risk of damages to the belt and shoe from paper wads passing through the press nip.
EP 0 575 353 describes a press having a shoe, which is loaded with bellows being arranged inside a metal cover of the shoe, wherein a belt slides around said metal cover.
U.S. Pat. No. 6,334,933 describes a press having a counterpart of metal, which is provided with a plurality of pressure pockets being sealed by a metal plate and hoses, which also can contribute to loading the opposite portions of the press nip.
U.S. Pat. No. 6,387,216 describes a press having an open fluid chamber, over which a belt is running and which is loading the press nip. The chamber is sealed by means of setting the belt under pressure, so that it is tightened over the edges of the chamber.
EP 1 319 744 describes a method for measuring and regulating the nip pressure in a shoe press, crosswise to and along the web, by means of measuring and continuously adapting the hydraulic static pressure in reference points above measurement holes in the press nip.
DE 30 30 233 describes an elastic slide shoe which is attached to a stand of metal. The slide shoe includes a solid body or a hollow body in the form of a hose which can be filled with a pressure medium. The hose is surrounded by an elastic belt which is attached to the metal stand. The hollow body may be divided into chambers which can be pressurized to different pressures. However, a change of pressure in the chamber or chambers does not result in a change of the loading in the nip because of the fact that the hollow body is permitted to expand laterally during every such increase of pressure.
Wo 2005/038129 A1 describes an elastic support body which, in relation to known support bodies, can be manufactured in a more simple way, without any special machining and without any major consideration to the shape of the opposed surface which it is to work against, and which can provide a loading profile in dependence of the pressure in the pressure chamber or pressure chambers in the same way or even in a better way than what is possible with a conventional support body of metal with one or more rows of pressure pockets which are closed by running belt.
It is an object of the present invention to provide an improved elastic support body having inner support arrangement embedded therein which withstands the differential pressure between adjacent pressure chambers, especially at higher differential pressures, in a desired way.
The support body according to the invention is characterized in that the support body further comprises a plurality of reinforcing profiles disposed in at least one chamber of said plurality of pressure chambers, the interiors of the profiles being in fluid communication with one another via holes provided between said profiles, a wall of the profile facing said working surface including holes for communicating fluid between the interior of the profile and the chamber in which said profile is located, said plurality of profiles providing an inner support to walls defining said at least one chamber.
The support body assembly according to the invention is characterized in that the support body is designed in accordance with any one of claims 1-12.
The apparatus according to the invention is characterized in that the support body assembly is designed in accordance with claim 13 or claim 14.
The expression "nip" is to be interpreted in its broadest meaning in order to encompass such a nip that is defined by a wire and support body.

Support body for an apparatus having an extended nip for the treatment of a fibre web


The present invention relates to apparatus and methods for stabilizing and or maintaining adjacent bone portions in predetermined desired relationships and for constraining one, two or three-dimensional motion and/or rotation of the adjacent bone portions. More particularly, the present invention relates to a magnetic apparatus with at least two magnetic arrays, each of which may include any number of magnets arranged in a predetermined manner and each magnetic array generating a magnetic field therearound. Once implanted and secured to the adjacent bone portions, the apparatus provides interacting magnetic fields in the area of the bone portions and transduces magnetic energy into mechanical energy and mechanical energy into potential magnetic energy, thereby reproducing functionally anatomic and/or anatomically advantageous arrangement of the bone portions.

Orthopedics is a medical subspecialty that treats disorders of the human body related to bones, muscles, ligaments, tendons, and joints, with its current emphasis on the treatment of the bones and joints. The treatment of bone and joint disorders can be generally subclassified into categories including the treatment of bone fractures, joint instability, early stage arthritis, and end stage arthritis. Originally, the treatment of orthopedic conditions had mainly relied on casting and bracing. However, with the advent of new implantable materials and development of better joint replacement prostheses, orthopedics shifted its focus to become increasingly more of a surgical subspecialty. With improved materials, better engineering, and a better understanding of the human body, the practice of orthopedic medicine and biomechanical experimentation have made remarkable progress. The treatment of bone fractures and joint disorders has continually been refined to the present state-of-the-art. The last 40 years have shown a myriad of innovations that have concentrated specifically on developing static mechanical design characteristics and new implantable materials used for fracture treatment and in total joint arthroplasties. These static mechanical design characteristics have been directed to solutions for problems concerning wear, stability, and methods of fixation for the total joint arthroplasties. They have also been utilized to improve the current state of the art concerning fracture treatment.
There have been some attempts to develop applications that utilize nonmechanical forces to augment the treatment of particular orthopedic problems. For example, pulsating electromagnetic field has been used as an adjunct to stimulating bone healing. Biochemical and biomaterial means have been used to alter the milieu at fracture sites and in joints to aid healing and to decelerate disease processes. Others have attempted to utilize magnetic fields in treatment of bone and joint disorders as well. For example, U.S. Pat. No. 4,024,588 to Janssen, et al. describes artificial joints with magnets. U.S. Pat. No. 4,029,091 to Von Bezold et al. discloses a method of applying plates to fractured bones so as to allow limited motions of the bone fragments when subjected to an externally generated electromagnetic force. U.S. Pat. No. 4,322,037 to Esformes et al. suggests a elbow joint including mechanically interlocking joint components with the inclusion of a magnetic force on the joint. U.S. Pat. No. 5,595,563 to Moisdon discloses a method of repositioning body parts through magnetic induction generated by extracorporeal magnetic or electromagnetic devices. U.S. Pat. No. 5,879,386 to Jore describes an apparatus to hold bones apart which can also be adjustable from inside the joint, possibly through arthroscopic means. The disclosed devices and methods had only limited uses for specific orthopedic problems. However, these designs are generally not practically feasible due to errors or misconceptions related to the practical application of orthopedic surgical treatments or, more importantly, a lack of understanding concerning the properties of permanent magnets in relationship to the mechanical environment found in the human body, especially as they relate to the normal functions of bones and joints. Accordingly, there remains a need in the art for improved apparatus and methods for less invasively locating and restraining bones in treatment of orthopedic conditions.


A wireless device includes a self-activation client that allows a user to activate a communication service for that wireless device and for one or more other wireless devices. The communication service may use a long-range type of wireless communication, such as 1×RTT CDMA, EV-DO, GSM, or IEEE 802.16 (WiMAX) communication. During the activation process, the wireless device communicates with a device management server using the long-range type of wireless communication but communicates with the one or more other wireless devices using a short-range type of wireless communication, such as IEEE 802.11 (WiFi), Bluetooth, or infrared communication. After the communication service has been activated, the wireless device may subsequently communicate with the device management server in order to manage the communication service for itself and/or for one or more other wireless devices (e.g., to receive updates or to make changes).

When a wireless service subscriber purchases a new wireless communication device, such as a wireless telephone, the subscriber typically goes through a service activation process to activate the subscriber's wireless service on the new device. This service activation process is traditionally performed at a wireless service provider's retail location, such as the retail location where the new wireless device is purchased, with the aid of trained personnel who may be employed by the wireless service provider.
As an alternative, various types of subscriber self-activation approaches have been proposed. In these approaches, a wireless service subscriber may activate and configure a desired wireless communication service on a new wireless communication device on his or her own. In one such approach, a subscriber may activate a wireless communication service on a new wireless device by having the wireless device communicate with an activation system of the wireless service provider, for example, using an over-the-air (OTA) activation process. During the OTA activation process, the subscriber may enter information into the wireless device, and the wireless device may communicate this information to the wireless service provider's activation system. The wireless service provider may then use this information to create a service profile for the wireless communication service. For example, during the OTA activation process, the subscriber may be prompted to enter the subscriber's name and address, as well as the specifics of the desired wireless communication service (such as the type of service plan or the features to be included in the wireless communication service). When the OTA activation process is successfully completed, the new wireless device may then be able to the use the wireless communication service under the subscriber's service profile.
In addition to self-activation, a wireless communication device may be able to engage in other types of device management functions. For example, the Open Mobile Alliance (OMA) includes a Device Management (DM) Working Group that has issued various DM specifications for managing wireless communication devices. The OMA DM specifications support such device management functions as device provisioning (such as initial activation of wireless service and enabling or disabling features), device configuration (such as changing settings or parameters on the device), software upgrades (such as obtaining upgrades for existing software or obtaining software for new applications), and fault management (such as reporting errors from the wireless device).

Method and system for managing wireless devices using short-range wireless communication


Methods of fabricating a semiconductor device include forming a field trench in a silicon substrate, forming a first oxide layer in the field trench, forming a first thinned oxide layer by partially removing a surface of the first oxide layer, and forming a first nitride layer on the first thinned oxide layer.

1. Field
Example embodiments of the inventive concepts relate to methods of fabricating a semiconductor device having a shallow trench isolation (STI).
2. Description of Related Art
As the integration of a semiconductor device increases, it becomes difficult to form a void-free field insulating material in a shallow trench isolation (STI) region.

Methods of fabricating semiconductor device having shallow trench isolation (STI)


An improved vacuum material handler having an onboard drive engine powering a vacuum pump and a hydraulic pump. The vacuum material handler also having a frame with integrated forklift lugs.

Vacuum material handlers are pieces of equipment which can be mounted on the boom of an excavator, overhead crane or other equipment to move large and heavy objects. They are most commonly found in pipeline construction and certain manufacturing facilities where they are used to move large diameter pipe or flat stock steel. The vacuum material handlers available on the market today typically have a frame with a hydraulically powered rotator which can be coupled to the boom of an excavator. The high pressure hydraulic fluid from the excavator is used to operate the rotator and rotate the material being moved.
The frame carries an internal combustion engine upon which can be either gasoline or diesel powered. This engine drives a vacuum pump. The vacuum pump is in fluid communication with a vacuum reservoir. The vacuum reservoir is in fluid communication with a large suction cup structure located beneath the frame typically called the pad. The pad is slightly contoured to be complimentary to the surface of the object being moved such that the pad would be slightly concaved to compliment the curve of the pipe being moved. Likewise the pad could be relatively flat to match up to the surface of plate metal being moved.
The prior art vacuum material handlers have been somewhat limited in applications to being used only on the equipment having a supply of hydraulic fluid. They are also not readily moved from one piece of equipment to another with the material held in place, i.e. it has not heretofore not been possible to pick up a pipe with the material handler on a excavator and then transfer the material handler with the pipe still attached to a second piece of equipment such as a forklift or overhead crane.
These limitation arises for two primary reasons. First the prior art material handler requires the high pressure hydraulic fluid from the excavator in order to rotate. Second there is not an apparatus by which the material handler can be moved from a first piece of equipment to a second piece of equipment while maintaining hold on the pipe or other material.


A method for treating a subject is provided, comprising positioning at least one electrode at least one site of the subject for less than about 3 hours, applying an electrical current to the site of the subject, and configuring the current to increase cerebral blood flow (CBF) of the subject, so as to treat a condition of the subject. The site is selected from the list consisting of: a sphenopalatine ganglion (SPG) of the subject, a greater palatine nerve of the subject, a lesser palatine nerve of the subject, a sphenopalatine nerve of the subject, a communicating branch between a maxillary nerve and an SPG of the subject, an otic ganglion of the subject, an afferent fiber going into the otic ganglion of the subject, an efferent fiber going out of the otic ganglion of the subject, an infraorbital nerve of the subject, a vidian nerve of the subject, a greater superficial petrosal nerve of the subject, and a lesser deep petrosal nerve of the subject.

The blood-brain barrier (BBB) is a unique feature of the central nervous system (CNS) which isolates the brain from the systemic blood circulation. To maintain the homeostasis of the CNS, the BBB prevents access to the brain of many substances circulating in the blood.
The BBB is formed by a complex cellular system of endothelial cells, astroglia, pericytes, perivascular macrophages, and a basal lamina. Compared to other tissues, brain endothelia have the most intimate cell-to-cell connections: endothelial cells adhere strongly to each other, forming structures specific to the CNS called "tight junctions" or zonula occludens. They involve two opposing plasma membranes which form a membrane fusion with cytoplasmic densities on either side. These tight junctions prevent cell migration or cell movement between endothelial cells. A continuous uniform basement membrane surrounds the brain capillaries. This basal lamina encloses contractile cells called pericytes, which form an intermittent layer and probably play some role in phagocytosis activity and defense if the BBB is breached. Astrocytic end feet, which cover the brain capillaries, build a continuous sleeve and maintain the integrity of the BBB by the synthesis and secretion of soluble growth factors (e.g., gamma-glutamyl transpeptidase) essential for the endothelial cells to develop their BBB characteristics.
PCT Patent Publication WO 01/85094 to Shalev and Gross, which is assigned to the assignee of the present patent application and is incorporated herein by reference, describes apparatus for modifying a property of a brain of a patient, including electrodes applied to a sphenopalatine ganglion (SPG) or a neural tract originating in or leading to the SPG. A control unit drives the electrodes to apply a current capable of inducing (a) an increase in permeability of a blood-brain barrier (BBB) of the patient, (b) a change in cerebral blood flow of the patient, and/or (c) an inhibition of parasympathetic activity of the SPG.
U.S. Pat. No. 5,756,071 to Mattern et al., which is incorporated herein by reference, describes a method for nasally administering aerosols of therapeutic agents to enhance penetration of the blood brain barrier. The patent describes a metering spray designed for per nasal application, the spray containing at least one sex hormone or at least one metabolic precursor of a sex hormone or at least one derivative of a sex hormone or combinations of these, excepting the precursors of testosterone, or at least one biogenic amine, with the exception of catecholamines.
U.S. Pat. No. 5,752,515 to Jolesz et al., which is incorporated herein by reference, describes apparatus for image-guided ultrasound delivery of compounds through the blood-brain barrier. Ultrasound is applied to a site in the brain to effect in the tissues and/or fluids at that location a change detectable by imaging. At least a portion of the brain in the vicinity of the selected location is imaged, e.g., via magnetic resonance imaging, to confirm the location of that change. A compound, e.g., a neuropharmaceutical, in the patient's bloodstream is delivered to the confirmed location by applying ultrasound to effect opening of the blood-brain barrier at that location and, thereby, to induce uptake of the compound there.
U.S. Pat. No. 6,526,318 to Ansarinia and related PCT Publication WO 01/97905 to Ansarinia, which are incorporated herein by reference, describe a method for the suppression or prevention of various medical conditions, including pain, movement disorders, autonomic disorders, and neuropsychiatric disorders. The method includes positioning an electrode on or proximate to at least one of the patient's SPG, sphenopalatine nerves, or vidian nerves, and activating the electrode to apply an electrical signal to such nerve. In a further embodiment for treating the same conditions, the electrode used is activated to dispense a medication solution or analgesic to such nerve. The '318 patent and '905 publication also describe surgical techniques for implanting the electrode.
U.S. Pat. No. 6,405,079 to Ansarinia, which is incorporated herein by reference, describes a method for the suppression or prevention of various medical conditions, including pain, movement disorders, autonomic disorders, and neuropsychiatric disorders. The method includes positioning an electrode adjacent to or around a sinus, the dura adjacent a sinus, or falx cerebri, and activating the electrode to apply an electrical signal to the site. In a further embodiment for treating the same conditions, the electrode dispenses a medication solution or analgesic to the site. The '079 patent also describes surgical techniques for implanting the electrode.
PCT Publications WO 03/084591, WO 03/020350, WO 03/000310, WO 02/068031, and WO 02/068029 to Djupesland, which are incorporated herein by reference, describe nasal delivery devices. US Patent Application Publication 2003/0079742 to Giroux, which is incorporated herein by reference, describes a nasal nebulizer.
U.S. Pat. Nos. 5,725,471 and 6,086,525 to Davey et al., which are incorporated herein by reference, describe a magnetic nerve stimulator system comprising a core of highly saturable material with a coil winding. A thyristor capacitive discharge circuit pulses the device. A rapidly changing magnetic field is guided by the core, preferably vanadium permendur. A C-shape is employed for focusing the stimulation.
PCT Publication WO 02/32504 to Zanger et al., which is incorporated herein by reference, describes a transcranial magnetic stimulation (TMS) device for treating certain physiological conditions, such as cardiovascular or neurophysiological conditions, or for studying the physiology of the body.
US Patent Application Publication 2003/0050527 to Fox et al., which is incorporated herein by reference, describes apparatus and methods for delivery of TMS. The apparatus includes a TMS coil which when energized generates an electric field substantially parallel to a long axis of the coil and substantially normal to a surface of the coil.
U.S. Pat. No. 6,432,986 to Levin and PCT Publication Wo 99/03473 to Levin, which are incorporated herein by reference, describe techniques for inhibiting a cerebral neurovascular disorder or a muscular headache. The techniques include intranasally administering a pharmaceutical composition comprising a long-acting local anesthetic.
U.S. Pat. No. 6,491,940 to Levin, U.S. Patent Application 2003/0133877 to Levin, and PCT Publication WO 00/44432 to Levin, which are incorporated herein by reference, describe techniques for inhibiting a cerebral neurovascular disorder or a muscular headache. The techniques include intranasally administering a pharmaceutical composition comprising a long-acting local anesthetic. Apparatus for delivering or applying the composition is also described.
U.S. Patent Application 2001/0004644 to Levin and PCT Publication WO 01/43733 to Levin, which are incorporated herein by reference, describe techniques for inhibiting cephalic inflammation, including meningeal inflammation and cerebral inflammation. The techniques include intranasally administering a long-acting local anesthetic. Apparatus for delivering or applying the composition is also described, including a dorsonasally implanted electronic neural stimulator, such as a transepithelial neural stimulation device.
An article entitled "Endoscopic transnasal neurolytic sphenopalatine ganglion block for head and neck cancer pain," by Varghese et al., J Laryngol Otol. 2001 May; 115(5):385–7, which is incorporated herein by reference, describes nasal endoscopy as a valuable adjunct to the localization of the sphenopalatine ganglion. Twenty-two patients with advanced malignancies of the head and neck region whose pain was not adequately controlled with conventional medications, including oral morphine, were given nasal endoscopically-guided neurolytic sphenopalatine ganglion block with six percent phenol, after a prognostic block with local anesthetic solution. Seventeen patients had good immediate relief. One had partial relief and four had inadequate relief. On follow-up for one month, the patients had significantly lower pain intensity and the pain was more manageable with oral medication.
The following references, which are incorporated herein by reference, may be useful:    Delepine L, Aubineau P, "Plasma protein extravasation induced in the rat dura mater by stimulation of the parasympathetic sphenopalatine ganglion," Experimental Neurology, 147, 389–400 (1997)    Hara H, Zhang Q J, Kuroyanagi T, Kobayashi S, "Parasympathetic cerebrovascular innervation: An anterograde tracing from the sphenopalatine ganglion in the rat," Neurosurgery, 32, 822–827 (1993)    Jolliet-Riant P, Tillement J P, "Drug transfer across the blood-brain barrier and improvement of brain delivery," Fundam. Clin. Pharmacol., 13, 16–25 (1999)    Kroll R A, Neuwelt E A, "Outwitting the blood brain barrier for therapeutic purposes: Osmotic opening and other means," Neurosurgery, 42, 1083–1100 (1998)    Sanders M, Zuurmond W W, "Efficacy of sphenopalatine ganglion blockade in 66 patients suffering from cluster headache: A 12–70 month follow-up evaluation," Journal of Neurosurgery, 87, 876–880 (1997)    Syelaz J, Hara H, Pinard E, Mraovitch S, MacKenzie E T, Edvinsson L, "Effects of stimulation of the sphenopalatine ganglion on cortical blood flow in the rat," Journal of Cerebral Blood Flow and Metabolism," 8, 875–878 (1988)    Van de Waterbeemd H, Camenisch G, Folkers G, Chretien J R, Raevsky O A, "Estimation of blood brain barrier crossing of drugs using molecular size and shape and h bonding descriptors," Journal of Drug Targeting," 6, 151–165, (1998)    Suzuki N, Hardebo J E, Kahrstrom J, Owman C, "Selective electrical stimulation of postganglionic cerebrovascular parasympathetic nerve fibers originating from the sphenopalatine ganglion enhances cortical blood flow in the rat," Journal of Cerebral Blood Flow and Metabolism, 10, 383–391 (1990)    Suzuki N, Hardebo J E, Kahrstrom J, Owman C H, "Effect on cortical blood flow of electrical stimulation of trigeminal cerebrovascular nerve fibres in the rat," Acta Physiol. Scand., 138, 307–315 (1990)    Major A, Silver W, "Odorants presented to the rat nasal cavity increase cortical blood flow," Chem. Senses, 24, 665–669 (1999)    Fusco B M, Fiore G, Gallo F, Martelletti P, Giacovazzo M, "'Capsaicin-sensitive' sensory neurons in cluster headache: pathophysiological aspects and therapeutic indications," Headache, 34, 132–137 (1994)    Lambert G A, Bogduk N, Goadsby P J, Duckworth J W, Lance J W, "Decreased carotid arterial resistance in cats in response to trigeminal stimulation," Journal of Neurosurgery, 61, 307–315 (1984)    Silver W L, "Neural and pharmacological basis for nasal irritation," in Tucker W G, Leaderer B P, Mølhave L, Cain W S (eds), Sources of Indoor Air Contaminants, Ann. NY Acad. Sci., 641, 152–163 (1992)    Silver W, "Chemesthesis: the burning questions," ChemoSense, Vol. 2, 1–2 (1999)    Devoghel J C, "Cluster headache and sphenopalatine block," Acta Anaesthesiol Belg., 32(1):101–7 (1981)    Branston N M, "The physiology of the cerebrovascular parasympathetic innervation," British Journal of Neurosurgery 9:319–329 (1995)    Branston N M et al., "Contribution of cerebrovascular parasympathetic and sensory innervation to the short-term control of blood flow in rat cerebral cortex," J Cereb Blood Flow Metab 15(3):525–31 (1995)    Toda N et al., "Cerebral vasodilation induced by stimulation of the pterygopalatine ganglion and greater petrosal nerve in anesthetized monkeys," Neuroscience 96(2):393–398 (2000)    Seylaz J et al., "Effect of stimulation of the sphenopalatine ganglion on cortical blood flow in the rat," J Cereb Blood Flow Metab 8(6):875–8 (1988)    Nollet H et al., "Transcranial magnetic stimulation: review of the technique, basic principles and applications," The Veterinary Journal 166:28–42 (2003)    Van Gijn J et al., "Subarachnoid haemorrhage: diagnosis, causes and management," Brain 124:249–278 (2001)    Goadsby P J et al., "Effect of stimulation of trigeminal ganglion on regional cerebral blood flow in cats," Am J Physiol 22:R270–R274 (1987)    Walters B B et al., "Cerebrovascular projections from the sphenopalatine and otic ganglia to the middle cerebral artery of the cat," Stroke 17:488–494 (1986)    Suzuki N et al., "Trigeminal fibre collaterals storing substance P and calcitonin gene-related peptide associate with ganglion cells containing choline acetyltransferase and vasoactive intestinal polypeptide in the sphenopalatine ganglion of the rat. An axon reflex modulating parasympathetic ganglionic activity?" Neuroscience 30:595–604 (1989)    Roth B J et al., "In vitro evaluation of a 4-leaf coil design for magnetic stimulation of peripheral nerve," Electroencephalography and Clinical Neurophysiology 93:68–74 (1994)


A hardware-to-software compiler is provided that runs an optimization on a circuit implemented in programmable logic. The optimization allows portions of the program implemented by the circuit to be executed via software. A communication interface between the hardware and software is provided that allows for efficient data flow. A communication channel is provided that can be effected as bidirectional using a unidirectional transport medium (e.g., PCI bus). Communication between devices is done through pop interface buffers and push interface buffers on either side of the communication channel.

The present invention relates to a communication interface, and more particularly, the present invention relates to a communication interface between hardware and software.
There are known benefits to implementing particular constructs in hardware and particular constructs in software, such as that the speed of execution using one implementation may be faster than if using the other. Programs that are implemented for a particular hardware device, such as a graphics processor, are often partitioned to partially execute on a computer's microprocessor. The detail of this partition is often decided and encoded directly into the program. That is, guesses must be made with regard to whether a particular partition of constructs between hardware and software is an optimal partition. The consequences of incorrect guesswork involves inefficient execution and inefficient use of resources.
With regard to communication between hardware and software, various bus protocols exist. For example, peripheral component interface (PCI), industry standard architecture (ISA), small computer system interface (SCSI), as well as others allow peripheral hardware devices and a personal computer's microprocessor to communicate. In each of these cases, however, a separate, specialized bus-based protocol must be used.
In addition, many conventional systems rely on shared memory to link hardware devices and software devices, but this approach is limited in its nature and does not offer portability in terms of compatibility.
It would therefore be desirable provide a way in which a program is implemented efficiently in hardware and software based on profiling results.
It would further be desirable to provide a portable and efficient communication interface between hardware and software devices.


A conducting trench in a dielectric layer can function as both (a) a plurality of contacts and (b) an interconnect in a semiconductor device. The conducting trench may be made by depositing a conductor in a trough formed in a dielectric layer of the device.

1. Field of the Invention
The present invention relates to a method of forming interconnects and contacts between elements in a semiconductor or integrated circuit, as well as a device or integrated circuit having these interconnects and contacts.
2. Discussion of the Background
A variety of methods have been used to make electrical connections between transistors in integrated circuit devices. One method makes use of self-aligned contacts (SAC), or SAC technology, and is illustrated in FIGS. 1a-1c. SAC technology allows contacts to be made to portions of the substrate, typically the source or drain of a transistor element, which can overlap the gate of a transistor, or overlap the edge of diffusion, without making electrical contact with these overlapped areas. FIG. 1a shows gates 12 encapsulated with a cap 14 and spacers 16. Typically, the gate 12 is made of highly doped polysilicon, and the caps 14 and spacers 16 are made from an insulator, such as silicon oxide. These are present on the substrate 10, and these elements are isolated from other regions of the semiconductor substrate by isolation region 18, typically made as an oxidized portion of the substrate. The encapsulated gate is typically made by depositing a layer of polysilicon, and depositing a layer of oxide on the polysilicon layer. This is then followed by a mask and etch of the oxide and polysilicon together. The spacers 16 may be formed by (a) an anisotropic etch of the oxide deposited on the gate or by (b) spacer oxide deposition, followed by spacer etch.
FIG. 1b shows the next step in formation of the self-aligned contacts. A SAC etch stop layer 20, typically about 700 .ANG. of silicon nitride, is deposited on the substrate 10, and on the gates 12, the caps 14 and spacers 16. A thick dielectric layer 24 is applied over the etch stop layer 20. The dielectric layer is typically made of doped silicon dioxide (e.g., spin-on glass, BPSG, reflow). The dielectric layer 24 is then planarized, for example using chemical-mechanical polishing (CMP).
FIG. 1c shows the final SAC structure. Vias are formed in the dielectric layer 24 by a series of masking and etching steps. The etching proceeds quickly through the dielectric 24 until it reaches the etch stop layer 20, where the etching rate is greatly reduced. Thus, if the masking and etching is somewhat misaligned from the substrate contact regions 22 (i.e., source or drain), SAC technology prevents misalignment of the via, because the etch stop layer greatly slows the vertical etching process, preventing the via from penetrating through caps 14 to the gates 12. The etch chemistry is then changed to selectively remove the exposed portions of the etch stop layer 20. Once the vias are formed, they are filled with a conductor, such as tungsten, to form metal contacts 32. After planarizing the metal contact 32 to the surface of the dielectric layer 24, the contacts can be connected to each other and/or to other circuit components with surface metal interconnects 30. A distinct advantage of SAC technology is that the contacts generally cannot be misaligned, allowing various circuit components to be placed very close together.
A different method has been used for making electrical contact between two closely spaced regions or elements of a semiconductor circuit (i.e., local interconnects) illustrated in FIGS. 2a-2c. FIG. 2a, which is identical to FIG. 1a, or a side or edge-on view of a device, illustrating gates 12, which are encapsulated with caps 14 and spacers 16, on substrate 10. Also present is isolation region 18. A dielectric layer 24 is then added, and planarized, as illustrated in FIG. 2b. When forming a local interconnect, the dielectric layer 24 has a thickness at this stage which corresponds to the final thickness of the local interconnect, typically 2000 .ANG..
FIG. 2c shows the final structure including the local interconnect 34. The local interconnect 34 is prepared by masking and etching a trough (generally rectangularly-shaped when viewed from the top) in the dielectric 24 without etching through the caps 14 over the gates 12. The dielectric layer 24 is etched through to the substrate contact regions 22. The trough is then filled with a conductor, such as tungsten, and planarized to the level of the dielectric 24, thereby forming an electrical connection between the substrate regions 22.
The process of forming a trough in a dielectric layer and then filling the trough with a conductor is also known as a metal damascene process. Typically, the normal damascene process is used only for local interconnects, as the interconnects tend to be shallow, and therefore have a high resistance. The local interconnects are only suitable for providing an electrical connection over short distances, because of their high resistance.
SAC technology is typically used to form metal contacts from substrate contact regions, through a dielectric layer, to form electrical contacts with the surface metal interconnects between circuit elements. SAC technology, together with the surface metal interconnects, allows long range contacts to be formed between substrate contact regions, and hence a variety of circuit elements, across the semiconductor device.
Metal interconnects running along the surface of the dielectric layer are useful for long range contacts, regardless of whether SAC technology or a metal damascene process is used. These metal contacts are separately deposited, masked and etched, and planarized, requiring additional steps.
The present invention combines aspects of both damascene and SAC technologies, providing robust, low resistance connections and contacts between substrate contact regions across a semiconductor device, removing or reducing the need for metal interconnects on the dielectric layer.

Method of forming robust interconnect and contact structures in a semiconductor and/or integrated circuit


The application discloses a method for adjusting a wide viewing angle, including: obtaining gray scale values of two pixels located in a same column and two adjacent rows; obtaining a view angle value of a wide view angle, and determining a target difference value according to the view angle value; and reducing a gray scale value of one of the two pixels and/or increasing a gray scale value of another one of the two pixels according to the target difference value, to perform wide view angle adjustment of a picture to be displayed, wherein a difference value between the gray scale values of the two pixels after the wide view angle adjustment is greater than or equal to the target difference value. The application also discloses a display panel and a computer readable storage medium.

The statements herein only provide background information related to this disclosure and does not necessarily constitute prior art.
A wide view angle refers to a large visual angle, which is an important parameter of a display panel.
In the exemplary technique, each sub-pixel of the display panel is provided with a dark area and a bright area, and each of the dark area and the bright area is provided with a pixel charging circuit. When adjusting the wide view angle, the electric quantity of the pixel charging circuit corresponding to the dark area is partially discharged, so that the brightness of the dark area of the sub-pixel is less than 100%, and the brightness of the bright area is 100%. However, one sub-pixel needs to be equipped with the circuits and wires in the dark and bright areas, resulting in a small aperture ratio of the display panel. However, it needs to ensure the light transmittance of the display panel. When the aperture ratio is small, the area of the backlight strips needs to be increased, and the adjustment cost for the wide view angle of the display panel is relatively high.

Method for adjusting wide view angle, display panel and computer readable storage medium