A method for manufacturing a bipolar punch-through semiconductor device is disclosed, which includes providing a wafer having a first and a second side, wherein on the first side a high-doped layer of the first conductivity type having constant high doping concentration is arranged; epitaxially growing a low-doped layer of the first conductivity type on the first side; performing a diffusion step by which a diffused inter-space region is created at the inter-space of the layers; creating at least one layer of the second conductivity type on the first side; and reducing the wafer thickness within the high-doped layer on the second side so that a buffer layer is created, which can include the inter-space region and the remaining part of the high-doped layer, wherein the doping profile of the buffer layer decreases steadily from the doping concentration of the high-doped region to the doping concentration of the drift layer.

In EP 1 017 093 A1, a method for manufacturing an IGBT having an emitter side 14 and a collector side 16 is described. On the collector side 16 of a wafer an n doped layer is created by diffusion. On the emitter side 14, a p-base layer 4, n source regions 5 and a gate electrode 6 are then created. Afterwards an emitter electrode 82 is applied. The thickness of the wafer is reduced on the collector side 16 so that a tail section of the n doped layer remains as a buffer layer 3. Finally a p collector layer 75 and a collector electrode 92 are applied. By such a method an IGBT is created which has a lowly doped buffer layer 3. Such devices are, therefore, called soft punch-through devices. However, as the n layer from which the buffer layer is made, has to be cut within the rising doping profile as shown by the dashed line in FIG. 2, it is difficult to cut the wafer accurately. A cut at a wrong depth can lead to a device, in which the punch-through properties of the IGBT cannot be guaranteed any more, if the doping concentration is too low, or the buffer layer can be made thicker than electrically necessary to assure the punch-through properties. However, a thicker buffer layer creates higher losses and variations in bipolar gain. Furthermore, the device has non-uniform current.
Such a known method can be used for devices with blocking voltages up to around 2000 V, because such devices are relatively thin. It would be difficult if such devices were manufactured directly on a thin wafer, because working directly on thin wafers can be a rather complex process, if the wafer is thin in low voltage IGBTs for forming the frontside layers including the emitter MOS cells and termination and the backside layers including the anode and buffer regions. However, even with the implementation of the described method above, such devices need optimization for improved static and dynamic performance with a number of limiting process options.
Similar challenges are met when designing fast recovery diodes based on thin wafer processing. In addition, the larger the wafer diameter, the more the difficulties encountered for thin wafer processing. Finally, the quality and availability of silicon substrate material is also an issue for thin wafer technologies utilizing for example deep diffused methods, for example, for larger wafer diameters above 200 mm.
EP 0 749 166 A1 shows a diode which is created providing a highly doped wafer, and successively epitaxially growing layers each with constant doping concentration, but in the series with decreasing doping concentration to form intermediate buffer layer. The buffer layer includes thus a first part of constant doping concentration and another part of decreasing doping concentration. A drift layer is also grown also with a plurality of layers of decreasing doping concentration. The p doped anode layer is a diffused layer. As a diode is manufactured in EP 0 749 166 A1, no sophisticated structure is needed on the cathode (emitter) side like in a design of an IGBT.
The method applied in EP 0 749 166 A1 can be complicated, time consuming and expensive due to the necessity of growing a plurality of epitaxial layers and even more complicated due to the growing the subsequent epitaxial layers with decreasing doping concentration and ending in a device with a thick buffer layer due to a thick highly doped wafer being used as a basis for the manufacturing.

Bipolar punch-through semiconductor device and method for manufacturing such a semiconductor device


A two-dimensional semiconductor image sensor has row lines which are selectable over a vertical shift register for driving first selection transistors of the sensor elements. Column lines are connected to a read-out line by way of first switches which are sequentially driven by the outputs of a horizontal shift register. Blooming is reduced. This is achieved by providing second selection transistors for the sensor elements which are connected in series with the first selection transistors and which are sequentially driven by the outputs of the horizontal shift register, and is further achieved by further switches which connect the column lines to a reference potential and which are inversely selectable relative to the first switches.

1. Field of the Invention
The present invention relates to a two-dimensional semiconductor image sensor comprising sensor elements disposed on a doped semiconductor body in rows and columns, wherein row lines which are selectable over assigned parallel outputs of a vertical shift register serve for driving first selection transistors of the sensor elements over which exposure-dependent sensor signals formed in the sensor elements are transmitted to column lines and wherein the column lines are successively connected to a read-out line via switches which are driveable by parallel outputs of a horizontal shift register, the read-out line exhibiting an output for the sequential read-out of the sensor signals.
2. Description of the Prior Art
A semiconductor image sensor of the type set forth above is known from the data sheet "Reticon Solid-State Image Sensor Arrays" of the Reticon Corporation, Mountain View, Calif. USA.
Overexposure of the sensor elements represents a general problem given semiconductor image sensors. When, due to overexposure, more charge carriers are released in a sensor element than can be absorbed, the excess charge carriers flow off into adjacent image elements or onto the column lines. This spread of the charge carriers is referred to as "blooming".

Two-dimensional semiconductor image sensor including an arrangement for reducing blooming


An electronic injection carburetor is disclosed. Fuel under pressure is quantized for primary metering by an electronic fuel injector and input to a metered fuel chamber. The quantization occurs by controlling the duration of the opening time of the injector by an electronic control unit responsive to speed and manifold absolute pressure information. Secondary metering is provided as a function of the mass air flow through the throat of the carburetor by an actuator assembly controlling fuel input to the carburetor from the metered chamber. The actuator provides the secondary metering by changing the bias pressure on a flexible diaphragm producing a closure force on a needle valve that varies the flow of fuel from the metered chamber to an atomizing discharge nozzle in the throat of the carburetor.

1. Field of the Invention
The invention pertains generally to carburetors or single point air/fuel ratio controllers for internal combustion engines and is more particularly directed to an electronic injection carburetor having primary and secondary metering functions.
2. Description of the Prior Art
Generally, carburetors in the prior art are well known and comprise basically a metering jet or jets located within a venturi. The metering jets and appropriate slow and fast idle adjustments are sized to provide an approximate air/fuel ratio as fuel is drawn into the carburetor throat by the suction or pressure drop of the air flowing past the venturi restriction. Such carburetors further employ a reservoir and float mechanism controlling a fuel pump for normally providing an acceleration well to draw fuel from for rapid advancements of a throttle plate. An accelerator pump may also be provided and attached controllably to the throttle in such a case for rapid transient response.
These systems depend on mass air flow through the venturi to provide a pressure drop or vacuum indicative thereof for controlling the metering function and while efficient to some extent do not provide an exact air/fuel ratio for all operating conditions. For example, an idle setting at a desired or a slightly richer than desired air/fuel ratio with a fixed metering jet will produce an even richer air/fuel ratio at high speeds because the fuel drawn into the venturi increases at a rate faster than the air flow. This rich operation is not fuel efficient over a wide range of operating speeds where economy and not power is necessitated.
The sizing of the venturi in a conventional carburetor is a tradeoff between high and low speeds. It is necessary to manufacture the restriction small enough to supply enough metering vacuum at low speeds and just off idle but not so small as to restrict engine air flow at higher speeds. Further, with a venturi, distributional problems of fuel may arise. Normally the jets must be centered in the area of highest vacuum for correct vaporization of the fuel. The central air/fuel charge must then spread out through the manifold to reach the individual cylinders. A system that was capable of a more even initial distribution of the air/fuel mixture as the charge is formed in the carburetor throat would increase fuel distribution effectiveness.
Conventional single point carburetion systems are, however, relatively inexpensive and provide a good response for transient operations. They additionally provide the relatively rich air/fuel ratios needed for high speeds and power operation at wide open throttle positions.
An example of a mass air flow carburetor including a a venturi is shown in a U.S. Pat. No. 2,733,901.
Operating at precise air/fuel ratio is becoming more important as fuel expense rises because fuel efficiency and power output are functions of the correct air/fuel ratio. It is known that for very lean air/fuel ratios power is lost and driveability is sacrificed and for very rich air/fuel ratios fuel is wasted because not all the available fuel is utilized. A stoichiometric air/fuel ratio or one relatively close thereto is envisioned as a desirable operating point for many operating conditions.
Moreover, governmental regulation of the amount of emissions in the exhaust gas of an engine is becoming a design factor in carburetion systems. Air/fuel ratios exceedingly rich or lean will cause emission problems. For example, in a three way catalytic converter system for reducing exhaust emissions, it is known that the air/fuel ratio must be controlled within a fairly narrow window for correct operation.
Therefore, electronic fuel injection apparatus have been devised to meet the need for a more precise air/fuel ratio than a carburetor can provide. Advantageously, the apparatus utilize multiple solenoid injectors that are controlled electronically by a control unit that schedules the opening times and amount of fuel injected for each injector. The opening times of each injector valve are calculated by operating parameters of the engine such as speed, manifold absolute pressure, and others to precisely provide a desired air/fuel ratio.
These injection apparatus are to this date, however, relatively expensive and generally include an extra transient sensing circuit to respond quickly to changing engine needs. This is because open loop fuel schedulers normally respond to parameters that are changed by the transients instead of the variable that produce them. Further, some delays are built into the sensors supplying speed-density information such as a MAP sensor which must average all cylinder pressure changes into an overall signal.
Still further, additional circuitry in case of a system failure of fuel delivery is generally provided in an electronic fuel injection system to permit the engine to limp home once the loss of the basic fuel metering pulse is recognized. At that point, most of the control over the accuracy of the air/fuel ratio is sacrificed so the car may be driven to where service is available.
Thus, it would be advantageous to provide a system with the better features of both the speed-density fuel injection system and the mass air flow carburetor. This would reduce the cost of such apparatus below a fuel injection system but would provide a better control of air/fuel ratio than a regular carburetor. Such a system would further be more responsive to transient conditions and tolerant to system failures without additional circuitry and would alleviate distributional and other venturi problems.


Systems and methods are disclosed that include providing an isolating mule shoe having an integrated axial isolator coupled to a landing sleeve of a drill string at an upper end of the axial isolator. The axial isolator includes an elastomeric component that is coupled between a first component and a second component. The first component and the second component are configured to displace axially with respect to one another as a result of a force imparted upon the landing sleeve to provide vibration control.

In some hydrocarbon recovery systems, electronics and/or other sensitive hardware may be included in a drill string. In some cases, a drill string may be exposed to both repetitive vibrations comprising a relatively consistent frequency and vibratory shocks that alternatively may not be repetitive. Each of the repetitive vibrations and shock vibrations may damage and/or otherwise interfere with operation of the electronics, such as, but not limited to, measurement while drilling (MWD) devices and/or logging while drilling (LWD) devices, and/or any other vibration sensitive device of a drill string. While some electronic devices are packaged in vibration resistant housings, in some cases the vibration resistant housings are not capable of protecting the electronic devices against both the repetitive and shock vibrations. In some cases, active vibration isolation systems are provided to isolate the electronics from harmful vibration but the active vibration isolation systems are expensive. Further, many hydrocarbon recovery systems employ universal bottom hole orientation (UBHO) subs in combination with a complementary alignment hub in order to establish and maintain a downhole tool orientation relative to the wellbore. The alignment hub is sometimes referred to as a landing sleeve and/or a mule shoe, and the alignment hubs are generally axially rigid so that repetitive vibrations and shock vibrations are not significantly damped by the alignment hub and/or the UBHO sub.


The present disclosure provides modified human herpesvirus glycoprotein B (gB) proteins that incorporate unique mechanisms for generating proteins that mimic their native conformation to enhance their immunogenicity. The modified herpesvirus gB proteins insert a peptide linker at the furin cleavage site in the extracellular domain of herpesvirus gB. When expressed, the gB subunit associates in triplicate to produce a homotrimeric complex, mimicking the native conformation of the gB protein. Also provided are protein complexes comprising a homotrimeric complex of a modified herpesvirus gB protein and herpesvirus gH and gL proteins. Also provided are nucleic acids encoding the modified herpesvirus gB proteins, methods of inducing or suppressing an immune response in a subject by administering a vaccine comprising the modified herpesvirus gB protein, or nucleic acid encoding the same, or a protein complex comprising a homotrimeric complex of the modified herpesvirus gB protein and herpesvirus gH and gL proteins.

Human cytomegalovirus (HCMV) is a ubiquitously occurring pathogen that causes severe disease in immunocompromised hosts. HCMV is the most common viral infection acquired in utero in the developed world, and is a major cause of congenital defects in newborns. In the U.S. and Europe an estimated 0.2% to 1.2% of all live born infants are infected with HCMV. Congenital HCMV infection is a leading cause of sensorineural hearing loss in children and is the leading infectious cause of central nervous system damage in children.
In addition to newborn infants, the virus can also cause severe disease in immunosuppressed patients, such as organ transplant recipients and HIV-positive individuals. HCMV can become an opportunistic pathogen in these patients and cause severe disease with high morbidity and mortality.
HCMV is an enveloped, double-stranded DNA j-herpesvirus of the Herpesviridae family. Glycoprotein B (gB) of the Herpesviridae family is a type III fusion protein that has a shared trimeric structure of its fusion-active forms, and a post-fusion trimer of hairpins. HCMV gB is encoded by the UL55 gene and is synthesized as a 906-amino acid precursor molecule in infected cells. An amino-terminal signal sequence directs the nascent polypeptide to the endoplasmic reticulum (ER), where gB folds and rapidly associates into disulfide-dependent macromolecular complexes formed by identical molecules. Following transport from the ER, HCMV gB enters the Golgi apparatus, where it underdoes glycosylation and is processed by proteolysis by the host subtilisin-like enzyme, furin, into the amino-terminal and carboxy-terminal fragments, gp115 and gp55, respectively. These two fragments of the monomeric form of gB—gp 115 and gp55—are held together by intramolecular disulfide bonds. The mature product is then delivered to the surface of infected cells, where it is recycled between endosomal vesicles and the plasma membrane and is eventually incorporated into virions. Recently, native HCMV gB has been postulated to be a homotrimer based on the 3D crystallography structure of gB proteins in related viruses, Herpes Simplex Virus I (HSV-1) gB and Epstein Barr Virus (EBV) gB, which are homotrimers (29-32). Various vaccines, including live attenuated vaccines and subunit vaccines, are being developed to target HCMV-associated diseases. For example, gB is considered a major vaccine target antigen for eliciting neutralizing antibodies based on its critical role in mediating viral-host cell fusion and thus viral entry. Indeed a significant portion of neutralizing antibodies in human serum is specific for gB epitopes. Others have attempted to take advantage of this humoral response to gB in the effort to develop an effective vaccine for the prevention of HCMV infection. For example, a recombinant gB protein is described in Spaete et al., A recombinant subunit vaccine approach to HCMV vaccine development, Transplantation Proceedings, Vol 23, No 3, Suppl 3 (June), 1991: pp 90-96, and in WO 2012/049317, which is hereby incorporated by reference in its entirety. Based on analysis of a gB protein made in an analogous manner, it is believed that this recombinant gB protein is composed of mostly dimeric gB and minor amounts of monomeric and trimeric gB. This recombinant gB protein was generated by mutating the gene encoding for gB at the furin cleavage site, rendering the site ineffectual, and deleting the transmembrane domain, thus leaving the extracellular and intracellular domains.
A vaccine based on this recombinant gB protein was used in Phase 2 clinical trials. Pass et al., Vaccine Prevention of Maternal Cytomegalovirus Infection, N Engl J Med 2009; 360:1191-1199. Three doses of the HCMV vaccine or placebo were given at 0, 1, and 6 months to HCMV-seronegative women within 1 year after they had given birth. HCMV infection was determined in the women in quarterly tests during a 42-month period, using an assay for IgG antibodies against HCMV proteins other than glycoprotein B. Infection was confirmed by virus culture or immunoblotting. The primary end point was the time until the detection of HCMV infection. 234 subjects were randomly assigned to receive the HCMV vaccine and 230 subjects to receive placebo. After a minimum of 1 year of follow-up, there were 49 confirmed infections, 18 in the vaccine group and 31 in the placebo group. Kaplan-Meier analysis showed that the vaccine group was more likely to remain uninfected during a 42-month period than the placebo group (P=0.02). Vaccine efficacy was 50% (95% confidence interval, 7 to 73) on the basis of infection rates per 100 person-years. One congenital infection among infants of the subjects occurred in the vaccine group, and three infections occurred in the placebo group.
However, no vaccine candidates for the prevention of HCMV have entered into Phase III clinical trials. Although the natural conformation of gB during HCMV infections is predicted to be a trimer, there has been no reported success in producing a recombinant trimeric gB.
Likewise, Epstein-Barr Virus (EBV), also known as human herpesvirus 4, is a major, global source of morbidity and mortality, responsible for such pathologic entities as Burkitt lymphoma, nasopharyngeal carcinoma, infectious mononucleosis, a subset of Hodgkin's disease, and the lymphoproliferative syndrome in immunosuppressed patients. EBV is a γ-herpesvirus, with a double stranded, linear DNA genome, that infects B cells and epithelial cells. Vaccines being developed to target EBV infection have focused on glycoprotein 350 (gp350) (E. M. Sokal et al., J. Infect. Di. 196: 1749 (2007)); however, no vaccine candidates for the prevention of EBV have targeted EBV gB, whose natural conformation during EBV infection has been shown to be a trimer. (Backovic M, Longnecker R, Jardetzky T S. 2009. Structure of a trimeric variant of the Epstein-Barr virus glycoprotein B. Proc Natl Acad Sci USA 106: 2880-5.)

Human herpesvirus trimeric glycoprotein B, protein complexes comprising trimeric gB and their use as vaccines

The Henry M. Jackson Foundation for the Advancement of Military Medicine, Inc.


A color signal conversion apparatus for converting a color signal of an input gamut to a color signal of an output gamut is provided. First, a target gamut for gamut mapping carried out on the input gamut is set, after which an evaluation function is determined for evaluating the difference between the target gamut and the results of gamut mapping performed on the input gamut using initialized mapping parameters. Then, the mapping parameters are determined based on the evaluation function so that the difference is minimum. The color signal of the input gamut is then mapped to the output gamut based on the determined mapping parameters and constraining conditions. This makes it possible to achieve favorable gamut mapping based on optimal mapping parameters that have been determined automatically.

1. Field of the Invention
The present invention relates to a color signal conversion method and apparatus for converting a color signal of an input gamut to a color signal of an output gamut, and to a method and apparatus for generating mapping parameters.
2. Description of the Related Art
Gamut mapping is a technique that associates a certain gamut with another gamut in a uniform calorimetric system, and is known as a conventional technique for color reproduction aimed at achieving perceptual matching between images when utilizing paper types, display media, and the like that have different gamuts. A technique by which complex map conversion from a single dimension to three dimensions is carried out over plural stages (for example, see Japanese Patent Laid-Open No. 2001-94799) and a technique that realizes a gamut map by expressing gradation representing color change as a curve (for example, see Japanese Patent Laid-Open No. 2002-33929) have been proposed as such types of gamut mapping techniques.
Regarding the yellow (Y) component in particular, while there is a trend that favors pure colors for use in color printers, cyan (C) and magenta (M) components will contaminate and muddy the Y component if hue deviation occurs with the gamut map. Such muddied color is prominent in the high brightness range of the Y component, and is perceptually apparent as a change in the hue. A technique that achieves perceptually favorable color reproduction by correcting hue deviation in the input and output gamuts respectively has accordingly been proposed (for example, see Japanese Patent Laid-Open No. 2002-152536).
However, according to the above-mentioned conventional techniques, a user is required to manually adjust a large number of color conversion parameters when mapping a gamut from a monitor to a color printer. The optimal combination of parameters also depends on, among other things, the monitor and printer models, and thus it takes an inordinate amount of time for the user to determine the optimal control parameters for the gamut map.
Furthermore, because gamut maps are typically configured from maps of a plurality of stages, controlling the mapping process is difficult, and thus a high level of knowledge regarding map conversion is required if the user is to achieve the intended color reproduction. Although mapping parameters are provided in some mapping conversion processes in order to make it easier for the user to control the mapping process, it is nevertheless difficult to understand the effects of the mapping parameters and the influence they have on the overall process.
There is therefore demand for automatic adjustment functionality by which optimal mapping parameters can be obtained, so that effective and uniformly favorable gamut mapping can be realized with regard to unspecified images.

Color signal conversion method and apparatus, and method and apparatus for generating mapping parameters


A switched-current fuzzy processor for pattern recognition is provided, which is specifically designed to operate in current mode for high performance. The switched-current fuzzy processor includes means for decoding a feature input into a set of binary feature signals; an array of MFGs, coupled to the decoding means, for obtaining a set of current outputs whose magnitudes are proportional to the values of the feature signals respectively; weight-adjusting means, coupled to the MFG array, for applying a predetermined weight factor in binary form to the output currents from the MFG array; summing means, coupled to the weight-adjusting means, for summing up each set of currents from each column of the MFGs in the MFG array to thereby obtain a total value for the currents therefrom; and a maximum-value determination circuit, coupled to the summing means, capable of obtaining the one of the currents with the maximum magnitude from the summing means. The foregoing switched-current fuzzy processor features that the circuits in the simulation unit are all based on the switched-current mode of operation without the need to use current-to-voltage conversion means, thus allowing simplified circuit structure and high precision in signal processing with high performance; and that the provision of the weight-adjusting and summing means in the switched-current fuzzy processor in place of the MIN-MAX means in the prior art allows the switched-current fuzzy processor to be adjustable in weight with simplified operation.

1. Field of the Invention
This invention relates to fuzzy processors, and more particularly, to a switched-current fuzzy processor for pattern recognition which is specifically designed to operate in current mode for high performance.
2. Description of Related Art
A fuzzy processor is a logic processing means which processes logic signals based on conditional rather than absolute true or false states. The results obtained from a fuzzy processor are less definite than those obtained with strict classical logic, but fuzzy logic applies to a wide range of cases, such as pattern recognition.
Most conventional fuzzy processors are based on a MIN-MAX operation. For applications in pattern recognition, the MIN-MAX operation is considered unsatisfactory. Other fuzzy processors are based on digital circuitry which is complex in structure. A type of fuzzy processor, called switched-voltage fuzzy processor, utilizes transistor switching elements to implement the fuzzy logic for pattern recognition. This type of fuzzy processor, however, has the drawbacks of requiring a large layout area to implement, a low operating speed, and a complex circuit structure to implement.

Switched-current fuzzy processor for pattern recognition


A method, apparatus, and system for use in providing wireless communication while reducing power consumption includes an in-band system and an out-of-band system, wherein the out-of-band system receives an out-of-band wireless communication and activates the in-band system causing the in-band system to transition from a sleep mode to an activate mode. The in-band system is maintained in the sleep mode. When an out-of-band communication is received, the out-of-band system activates the in-band system such that the in-band system transition from the sleep mode to the active mode. The out-of-band system can further verify the in-band system is an intended target of the out-of-band communication such that the in-band system is activated when the in-band system is verified as the intended target by transmitting an out-of-band identification request, and receiving an out-of-band reply containing an identification.

In wireless networks such as 802.11 based wireless local area networks (WLAN), a wireless communication device, such as a station or access point can wirelessly communication with a remote device of the network, such as another station or the same or an alternate access point. This communication often occurs when the remote device is not otherwise being used. However, in present 802.11 implementations, the remote device being targeted is to be maintained in a completely powered on state or mode, with its radio, related wireless chips, host processor, and related components powered on, in order to monitor the communication channels for packets directed towards the target device.
Alternatively, the remote device may operate in a low power mode where some of the components of the 802.11 medium access controller (MAC) may be powered down but the radio and the remainder of the system and much of the host device (e.g., host processor) typically need to be at least partially powered up. The power consumption of the 802.11 radio, the remainder of the system and the host device utilize a significant amount of power and significantly limit the operating time of hosts powered by batteries or cells.
In low power mode a device typically would need to periodically transition to the fully active mode to check for packets directed to the device. As a result, the device has additional power requirements and further drains portable power supplies.

Apparatus, system and method for use in powering on a remote wireless device


The present invention provides a method for controlling a magnetic domain wall of a magnetic structure and a magnetic memory device using same. The method includes: a first step of applying a first magnetic field in a first direction to a magnetic structure having a plurality of magnetic domains and a magnetic domain wall between the magnetic domains, and applying a second magnetic field in a second direction to the magnetic structure, the first direction being parallel to the magnetization direction of the magnetic domain wall and the second direction being parallel to the magnetization direction of the magnetic domain wall; and a second step of applying a third magnetic field in a direction opposite to the first direction to the magnetic structure and applying a fourth magnetic field in a direction opposite to the second direction to the magnetic structure, wherein the magnetic domain wall can be moved uniformly in a direction parallel to the magnetization direction of the magnetic domain wall or the magnetization direction of the magnetic domains.

As the information industry develops, large-volume information processing is required, and demand for information storage media capable of storing a large amount of information is continuously increasing. A hard-disk drive (HDD), which is widely used as information storage medium, generally includes a read/write head and a rotating medium on which information is recorded, and can store large amount of information of 100 GB or more. However, a storage device having a rotating part such as an HDD tends to be worn out, and there is a disadvantage in that reliability is low due to a possibility of occurrence of an error during operation.
In recent years, researches and developments have been made on a new data storage device using the principle of magnetic domain wall movement of magnetic materials. In general, a magnetic micro domain constituting a magnetic structure is called a magnetic domain. In one magnetic domain, it is characterized in that the rotation of electrons, that is, the magnetic moment, is in the same direction. The size and magnetization direction of the magnetic domain can be appropriately controlled by the shape, size and external energy of the magnetic material. The magnetic domain walls represent the boundaries of magnetic domains having different magnetization directions. The magnetic domain wall is characterized in that it can be moved by a magnetic field or a current applied to the magnetic material.
Meanwhile, if the width of a magnetic thin film is reduced to form a ribbon-like structure, the magnetization state can be uniformly formed in the width direction, and it can be used as a memory device when matched to "1" or "0" depending on the state of the magnetic domain. This type of memory is called a magnetic domain wall racetrack memory. In order to operate the magnetic domain wall racetrack memory device, it is necessary that all the magnetic domain walls move uniformly in the longitudinal direction of one device. The magnetic domain wall can be moved by using a magnetic field or electric current. Meanwhile, recently, a lot of studies have been made on a method for moving magnetic domain walls by flowing electric current.
However, if electric current that is sufficient for moving magnetic domain walls is supplied to a memory device, the problem of temperature increase due to Joule heating caused by the electric current becomes so serious that the memory device is destroyed. In addition, although the magnetic domain wall can be moved by using a magnetic field uniformly applied from the outside, it is problematic that the magnetic domain wall cannot be used since it only moves away or comes closer without uniformly moving in one direction.
Furthermore, another method using a magnetic field has recently been proposed. A device is oriented such that magnetic domain walls move in only one direction and the directionality of the magnetic domain wall of the device is determined by forming a device with asymmetric serration or by post-processing. When a magnetic field is applied to such an asymmetric sample such that the direction of the magnetic field continuously changes in the positive or negative direction, the magnetic domain wall moves in one direction while reciprocating. This method has a disadvantage in that a complicated process is required to orient the device.

Method for controlling magnetic domain wall of magnetic structure and magnetic memory device using same

KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE


A method for fabricating a metal structure for a semiconductor device is disclosed. The method begins with providing a wafer with a current input contact and current output contact. Remaining steps include loading the wafer into a deposition apparatus, depositing a layer of metal onto a predefined metal region, removing the wafer from the deposition apparatus, and performing an ex-situ passivation process. If additional layers are to be deposited and passivated, the steps are repeated until a predetermined number of layers of metal are deposited onto the predefined metal region. The predefined metal region is a gate metal opening if the metal structure is a gate contact for a field effect transistor. The ex-situ passivation process is achievable through oxidation or nitridation of the wafer using either oxygen plasma or a nitrogen plasma, respectively. Alternately, oxidation is also achievable through exposing the wafer to air at an elevated temperature.

During fabrication of a semiconductor device such as a gallium nitride (GaN) high electron mobility transistor (HEMT), a transition metal such as nickel (Ni) is deposited as a layer of the semiconductor device to realize a Schottky barrier. The Schottky barrier is an energy barrier that provides a rectifying function used to prevent unwanted leakage current from passing through a junction region of the semiconductor device. A thicker noble metal layer for carrying a relatively large current at low resistance is typically deposited over the layer making up the Schottky barrier. However, when a transition metal such as Ni is used as a Schottky contact metal, an intervening layer of a noble metal such as platinum (Pt) or palladium (Pd) is also deposited to form a diffusion barrier layer. Alternately, diffusion layers have been fabricated using an in-situ oxidation process that oxidizes a transition metal during deposition. These diffusion layers and the other layers of metal making up a metal structure for a semiconductor device are generally deposited in a vacuum chamber by thermal evaporation, e-beam evaporation or sputtering. As such, the in-situ oxidation process requires expensive modifications of tools and/or complicated modifications of other processes. Thus, a new process for fabricating a metal structure for a semiconductor device is needed to avoid expensive modifications of tools and/or complicated modifications of other processes.

Methods for fabricating a metal structure for a semiconductor device


Apparatus for use in one of a plurality of sensors each having a respective transmitter which transmits pulses for sensing, a respective clock which controls timing of the pulses transmitted from the respective transmitter, and a respective receiver which receives echoed instances of the pulses. The apparatus comprises: sensing logic configured to sense a being or object in dependence on the echoed pulses received back by the respective receiver from the respective transmitter, and timing logic configured to compensate for a clock discrepancy between the respective clock and that of one or more others of the sensors. The timing logic does this by using the respective receiver to listen for instances of the pulses from the one or more other sensors, and adjusting the timing of the pulses from the respective transmitter based thereon.

A presence sensor is a sensor for remotely sensing the presence of a being or other object, typically a person. For example the sensing of presence may comprise detecting whether or not the being or object is in motion, determining a measure of its motion (e.g. speed or velocity), determining its range from the sensor, and/or simply detecting the fact of its existence in a certain zone (e.g. defined by the range of the sensor).
Presence sensors come in two kinds: active or passive. An active presence sensor is one which transmits a probing waveform and then uses a reflection of that waveform received back at the sensor to detect presence, e.g. using certain signal characteristics in the reflected signal to determine presence-related information. Examples of active sensors include ultrasonic, radio (e.g. radar) and microwave sensors which emit pulses of ultrasonic, radio frequency (RF) or microwave radiation respectively and sense presence based on the reflection thereof. A passive presence sensor on the other hand does not transmit its own waveform but instead relies on radiation emitted by the being or object to be sensed, or reflected from it but originating from another source other than the sensor itself. Examples of passive sensors include infrared sensors which sense the infrared radiation given off by an object such as a person or other being, and light sensors which detect light reflected from the being or object being sensed (e.g. originating from the sun or electric lighting in a room).
Presence sensors have a wide range of applications. One such application is found in controlling a lighting system. For example office lighting typically constitutes almost 30% of the electrical consumption in office buildings. It is known that light control strategies based on occupant presence information can be the most effective in reducing energy consumption. Hence the design of green buildings typically involves presence-adaptive lighting control systems.
Active sensors like ultrasound sensors tend to provide better detection than passive infrared sensors in large volumetric spaces. In larger physical areas, it is commonplace to have multiple active presence sensors for proper detection coverage. When such presence sensing systems are deployed however, there is a potential for cross-interference across active transmissions. For the system as a whole to function properly, ideally each individual presence sensor should be able to determine presence-related information in its respective coverage area. Cross-interference across active sensors (e.g. ultrasound or RF) is a commonly encountered problem in indoor and outdoor sensing applications, which can affect proper operation of the sensing and control systems. For instance, a sensor may trigger a false alarm when an adjacent zone is occupied based on an overheard transmission from a neighboring sensor. Such sensing malfunction can disrupt the lighting control system as a whole.
Active presence sensors may also be found in other applications where the problem cross-interference may occur, or more generally where operation of one active sensor may affect one or more other sensors.
The problem of cross-interference management in ultrasonic sensor networks has been considered for example in "The Cricket Location-Support system". N. B. Priyantha, A. Chakraborty and H. Balakrishnan, Annual Conference on Mobile computing and Networking, 2000.

This patent is subject to a terminal disclaimer.

Controlling transmission of pulses from a sensor


Optical coupling devices for an improved coupling efficiency of light energy, without damage to the optical components, are disclosed. An optical system divides an input beam of light energy into two or more output beams of lesser energy, each of which is focused toward a focal point in space. Individual optical fibers are positioned with their proximal end faces at the focal points of each of the lesser output beams. Means for dividing the light energy and aligning the components are disclosed.

1. Field of the Invention
The present invention relates to the field of optical couplers. In particular, the present invention relates to optical fiber coupling devices that convert a single input beam of light energy from a laser into multiple output beams of partial light energy, each of which is focused into a separate optical fiber, with improved transfer efficiency and without damage to the individual optical fibers.
2. Description of the Prior Art
Many applications for laser energy in medicine are known in the prior art. Lasers produce an intense, coherent, directional beam of light energy. Medical applications of lasers include coagulating bleeding ulcers, removing plaque (a fatty deposit) in a blood vessel, excising or vaporizing a tumor, and ablating the hard dentin or enamel of a tooth, to name a few. In order to transmit light energy needed for these surgical applications, optical fibers made of transparent materials, such as glass, fused silica or the like, are utilized to channel and direct the energy. Either a single discrete fiber or a bundle of fibers may be used to transmit the light energy.
A relatively large diameter optical fiber, such as one with a core diameter of 1,000 microns, can transmit a relatively great amount of light energy without damage to the integrity of the optical fiber. However, where flexibility is needed, for example, to enable the optical fiber to pass through a tortuous blood vessel or to reach a relatively inaccessible site in a body behind other structures, a single, relatively large diameter optical fiber may not be sufficiently flexible. While a relatively smaller diameter optical fiber, such as one with core diameter of 50 or 100 microns, may provide more flexibility, a small diameter optical fiber is often unable to carry a sufficiently large amount of light energy without significant damage to the optical fiber.
To transmit large amounts of light energy, while retaining needed flexibility, it is frequently necessary to use a plurality of smaller diameter optical fibers in a bundle, thereby dividing the light energy into several parts so that the energy carried by each individual optical fiber is not excessive. The use of multiple optical fibers, each carrying a portion of the light energy needed to accomplish the desired result, is particularly advantageous, for example, in the transmission of extremely high intensity pulsed light energy from a xenon chloride (excimer) laser at a wavelength of 0.308 microns through quartz or fused silica optical fibers with a high hydroxyl content, or from a holmium:YAG laser at a wavelength of 2.1 microns, through quartz or fused silica optical fibers with a low hydroxyl content. It would be desirable to transmit light energy from an erbium:YAG laser at a wavelength of 2.94 microns. However, light energy of this wavelength cannot be efficiently transmitted through conventional quartz or fused silica fibers. Zirconium fluoride fibers, the fibers of choice for that purpose, can transmit only a small amount of said light energy without fracturing or melting and-releasing toxic gas.
In delivering light energy from a laser to a bundle of fibers, there are significant losses of light energy. This is part of the problem that the present invention addresses. Primarily, the energy losses occur because the emitted laser beam is focused on a cross section of fibers in the bundle, and a portion of the light energy is lost in the spaces between the fibers as well as in the cladding which surrounds each fiber. Furthermore, where the laser emission is in a gaussian pattern, the fibers in the center of the bundle receive a larger amount of light energy than those in the periphery of the bundle.
Since many applications require the delivery 10 of more light energy than one optical fiber of relatively small diameter can effectively and safely transmit, it would be useful to have a device which could divide the light energy from a single laser source into a plurality of relatively equal individual beams, with each beam independently directed toward an individual focal point, so that the proximal end faces of a corresponding plurality of individual optical fibers could each be positioned at one of the focal points. Since each optical fiber would be individually positioned to receive a proportionate amount of the light energy from the partitioned beam, the device would avoid the substantial losses of light energy associated with the coupling inefficiencies in the past. In addition, since the method of light beam partitioning would divide the light energy into relatively equal, separate parts, below the damage threshold of the receiving optical fiber, each of the individual fibers in the bundle could receive and transmit an equal amount of laser light energy without damage thereto.
However, the division of laser light energy into the individual fibers in the bundle does not necessarily need to be equally distributed; nor does the predominant spectral line that is delivered to each individual fiber need to be the same wavelength. Also, by focusing the light energy delivered to each individual optical fiber, the light energy could be delivered to each individual optical fiber with a spot size area and convergence angle which is most suitable for entry into that optical fiber.
Therefore, there is a need for a light energy coupling device and method to divide light energy from a single transmission path into a plurality of transmission paths; where the plurality of individual transmission paths are directed toward and focused into a corresponding plurality of individual optical fibers; and, where the light energy directed into each optical fiber does not exceed its damage threshold. The present invention satisfies the foregoing needs.
The following patents describe light energy coupling devices and methods.
U.S. Pat. No. 4,933,949, to Johnson (hereafter the "Johnson Patent") for "Arrangement for Multiplexing and Intensity Splitting Light Beams for Interface into Fiber Optic Cables".
U.S. Pat. No. 4,961,622, to Gorman et al. (hereafter the "Gorman Patent") for "Optical Coupler and Refractive Lamp".
U.S. Pat. No. 4,868,361, to Chande et al. (hereafter the "Chande Patent") for "Coupling Device for High Power Laser Beam Transmitting Optical Fibers".
U.S. Pat. No. 4,917,084, to Sinofsky (hereafter the "First Sinofsky Patent") for "Infrared Laser Catheter System".
U.S. Pat. No. 4,950,266, to Sinofsky (hereafter the "Second Sinofsky Patent") for "Infrared Laser Catheter System".
U.S. Pat. No. 4,925,265, to Rink et al. (hereafter the "Rink Patent") for "Apparatus for Directing a Laser Beam into Optical Fibers".
The Johnson patent discloses an optical mixing bar of sufficient length to permit mixing of light therein. The mixing bar has a plurality of facets on the beam input end. There are means for directing separate laser beams into each of the facets of the mixing bar. The light energy mixes within the mixing bar and the output of the mixing bar is a single beam of laser light energy approximately equal to the sum of the energies of the input beams. In the present invention, there is a single light energy beam at the input, and that beam is permitted to pass through an optical system that separates the light into a plurality of separate open or free beam paths that converge at a plurality of associated focal regions. In contrast, the Johnson patent teaches to combine a plurality of mixed input beams into plural output beams, a different purpose than that contemplated by the present invention. In addition, the present invention permits fine mechanical positioning of the multiple output beams to enhance their alignment into the individual optical fibers.
The Gorman Patent discloses an optical coupler and refractive lamp. The Gorman Patent describes an optical system that produces an input ring of laser light energy. A plurality of optical fibers are arranged concentrically in a ring opposite the ring of laser light energy. The present invention is an improvement over the Gorman Patent, because the present invention focuses a portion of the input energy precisely into each of a plurality of individual optical fibers, thereby increasing the transmission efficiency.
The Chande patent discloses an optical system for coupling a high power laser beam from one optical fiber into another optical fiber. There is a mounting means, so that both the input optical fiber and the output optical fiber can be retained in alignment. The Chande patent is different from the present invention, in that the present invention transmits the input light energy from a single source into a plurality of output optical fibers. In contrast, the light energy coupling in the Chande patent is limited to transmitting light energy from a single input fiber into another single output fiber.
The Sinofsky patents disclose an infrared laser catheter system which is utilized for the percutaneous removal of atherosclerotic plaque. A single beam of light energy is directed toward the proximal ends of several optical fibers. In the four-fiber coupling system of the Second Sinefsky patent, a portion of the laser light is transmitted into four mirrors, each of which reflects the laser light into one of four lenses, that each focus the light energy into one of four optical fibers that are retained in four fiber optic connectors. In contrast, in the present invention, the beam is partitioned and individually directed into a plurality of optical fibers. The present invention utilizes fewer optics than the Sinofsky invention. Also, it is not necessary for the single input beam of the present invention to be divided by mirrors or beam splitters, as taught by the Sinofsky patents. In addition, the present invention provides increased coupling efficiency.
The Rink patent discloses an apparatus for directing a laser beam into optical fibers. The apparatus utilizes a movable lens which steers the beam serially into individual optical fibers. In contrast, the present invention utilizes optics in a fixed position, the output of which is focused into individual optical fibers. The present invention differs from the Rink patent, in that a single path of light energy in the present invention is simultaneously divided and focused into a plurality of open or free beam paths without moving parts.
None of the aforementioned prior art has implemented an optical coupling device and method where the light energy is transferred from a single source and along a single transmission path into a plurality of open or free beam transmission paths by a partitioning optical system, where the plurality of transmission paths are directed toward and focused into a corresponding plurality of optical fibers, and where the energy directed into each optical fiber does not exceed its damage threshold; all in a manner that improves the transfer efficiency of the optical coupling without moving parts.

Coupling device and method for improved transfer efficiency of light energy from a laser source into optical fibers


A method for determining the adequacy of corrosion prevention treatments applied to metal surfaces is disclosed. The method provides a qualitative determination of corrosion detection using inexpensive equipment. Generally, the method encompasses wetting at least a first and a second absorbent patches capable of retaining a liquid corrosive to metal surfaces to be tested with the corrosive liquid to obtain wetted patches and then contacting a portion of a first metal surface to be tested with the first patch under corrosive conditions and contacting a portion of a second metal surface to be tested with the second patch, wherein the second metal surface having the same composition as the first metal surface has been treated with an effective amount of a corrosion prevention treatment and subjecting the second patch in contact with the second metal surface to the same corrosive conditions as the corrosive conditions applied to the first patch in contact with the first metal surface. The method includes removing the first and the second patches from the first and the second metal surfaces; respectively and, treating the first and the second patches with an effective amount of a tetrazolium compound; and, comparing the amount of stain present on the first patch with the amount of stain present on the second patch, wherein the efficacy of the corrosion prevention treatment can be qualitatively determined.

1. Field of the Invention
The invention relates to a novel method of determining corrosion efficacy of various treatment compounds and, more particularly, to a patch test for determining the efficacy of corrosion inhibitors used for metal cans.
2. Description of the Prior Art
Determination of the efficacy of corrosion prevention treatments applied to metal surfaces is of great importance to industry. The use of metal surfaces which have been improperly treated with corrosion prevention coatings lead to short shelf lives of goods fabricated using these metals. Cans containing foodstuffs which are improperly treated for corrosion prevention during the cooking or cooling process corrode, and while this condition does not bring into direct question the quality of the foodstuff contained in the can, goods look unappealing and unappetizing resulting in their removal from store shelves and their eventual destruction.
Current corrosion testing means are time consuming and do not offer a rapid indication of whether or not metal surfaces, including cans, have been properly treated so that they may attain the longest possible shelf life without visible deterioration due to corrosion. Examples of current tests employed to determine the effect of corrosion prevention treatments include the use of corrosion coupons which are exposed to air (or water) for lengthy periods of time and then carefully weighed to determine metal loss, the use of an apparatus such as a Cleveland humidity cabinet which provides high humidity environments for the exposure of treated metal surfaces over long periods of time, and the exposure of samples of the treated goods to the atmosphere.
All of these treatment methods are time consuming and, as a result of the time taken, by the time a defect, or improperly treated specimen is determined, the goods so treated have frequently been shipped to a customer or further processed.

Field method for determining if adequate corrosion inhibition has been applied to thermally processed cans


Disclosed are an organic-inorganic hybrid film comprising a cellulose derivative and a polycondensation product of a condensation polymerizable reactive metal compound, wherein the film contains a plasticizer in an amount of 1 to 20% by weight and its manufacturing method.

A cellulose derivative film is applied to an optical film such as a polarizing plate protective film, an optical retardation film, or an optical compensation film, since it has excellent optical properties.
It is essential that an additive such as a plasticizer or a UV absorbent be added to the cellulose derivative film in order to improve its processability or moisture vapor transmittance. However, the addition has a problem which causes bleeding-out or volatilization of the additive, resulting in lowering of dimensional stability and storage stability of the film.
A polarizing plate is generally one in which a polarizing plate protective film comprised of triacetyl cellulose is provided on both surfaces of a polarizing film comprised of a uniaxially stretched dichroic dye dyed polyvinyl alcohol, in order to shield light or moisture. A crystal liquid display comprising such a polarizing plate is often used outdoors as in a car navigation system or a cell phone, and its durability under various circumstances is required. However, the polarizing plate protective film in a conventional polarizing plate varies with time, and has a problem in that the edge of the polarizing plate transmits light, resulting in phenomenon of edge whitening.
Improvement of dimensional stability is required in another optical film employing a cellulose derivative film. For example, dimensional stability of an optical retardation film is required in view of stability of its optical properties. Recently, as a high resolution image and a color image reproduction are required in a display of a note board type personal computer or a cell phone, an optical film with high performance having an anti-reflection property or an anti-static property has been sought. Such an optical film has been developed which comprises a cellulose derivative substrate with high transmittance and a functional layer such as a metal oxide layer directly or through another layer on the substrate. However, this optical film has still a problem in that its optical properties lower due to dimensional change of the substrate.
The optical film in the invention is a functional film used in various displays such as a liquid crystal display, a plasma display, an organic EL display, a field emission display, and an electronic paper display. Examples of the optical film include a polarizing plate protective film, an optical retardation film, a reflection plate, a viewing angle increasing film, an optical compensation film, an antiglare film, an antireflection film, an illuminance increasing film, a color correction filter, a color separation film, a UV or IR absorbing film, an antistatic film, and an electrically conductive film.

Organic-inorganic hybrid film, its manufacturing method, optical film, and polarizing film


The present invention has for its object to provide an electrolyte solution which can dramatically suppress the time degradation in performance of an electrochemical device, especially an electrochemical capacitor.

As an electrolyte solution for electrochemical device, a nonaqueous electrolyte solution for electrochemical capacitor comprising a solution of a cyclic amidinium salt in propylene carbonate as a solvent has been known (Patent Document 1 and Patent Document 2).
Conventional nonaqueous electrolyte solutions do not have sufficient electric strength in some cases, so that an electrochemical device, especially an electrochemical capacitor, which contains such electrolyte solution sometimes causes marked time degradation in its performance.    Patent Document 1: International Publication WO95/15572    Patent Document 2: Japanese Kokai Publication 2005-197666

Electrolyte solution for electrochemical device and electrochemical device using same

Abstract: The present invention relates to                an electrolyte solution for electrochemical device        which comprises an imidazolium salt (A) represented by the general formula (1) as a main component,        wherein the content of the imidazolium salt (B) represented by the general formula (2) is not more than 15% by weight to the total weight of the imidazolium salt (A) and imidazolium salt (B);

Abstract: (in the formula, R1, R2 and R3 may be the same or different and each represents an alkyl group containing 1 to 3 carbon atoms; R4 and R5 may be the same or different and each represents an hydrogen atom or an alkyl group containing 1 to 3 carbon atoms; and X− represents a counter anion)

Abstract: (in the formula, R1, R3, R4, R5 and X− are the same as the definition for the general formula (1)).


A rotationally symmetrical molded part of a high-temperature superconductor achieves a critical current density of j.sub.c .gtoreq.800 A/cm.sup.2 at a temperature of 77K, by using a powder mixture (8) having the stoichiometric composition of Bi.sub.2+x EA.sub.3 Cu.sub.2 O.sub.y, where -0.15<x<0.4; EA=an alkaline earth metal or a mixture of alkaline earth metals, in particular a mixture of Sr and Ca in the ratio of Sr:Ca=(2+z):(1-z), where 0<x<0.2; 8.ltoreq.y.ltoreq.8.3. With the aid of a conveying chute (9), the powder mixture (8) is brought uniformly at room temperature with a grain size of <50 .mu.m into a silver mold (5) which is arranged inside a rotating fusion mold (4), open at one side, in a furnace (3). Subsequently, the fusion mold (4) is accelerated, heated to 500.degree. C. and held for approximately 30 min at 500.degree. C. After subsequent partial melting at a temperature of T.sub.m K to T.sub.m +6K, where T.sub.m =melting temperature of the pulverulent starting material, for 30 min to 2 h at an oxygen partial pressure of p(O.sub.2).gtoreq.0.8 bar, a first long-term annealing is performed at 840.degree. C. to 850.degree. C. for 20 h to 40 h. Thereafter, a second long-term annealing is performed at a reduced oxygen partial pressure of p(O.sub.2) and, below 700.degree. C., cooling to room temperature in a nitrogen atmosphere. There can be a subsequent third long-term annealing.

1. Field of the Invention
The invention relates to a method for producing a rotationally symmetrical molded part of a high-temperature superconductor.
2. Discussion of Background
DE-A1-4,019,368 discloses a method is described for producing cylinders or rings on the basis of a bismuth two-layer cuprate. In this case, the homogeneous melt is spun into a rotating, cold fusion mold. Very different solidification rates at the edge and in the interior of the specimen produce a microstructure having a very different density and full of internal stresses. Nothing is reported on the values of the critical current density.
EP-A1-0,482,221 discloses a method for producing a ceramic high-temperature superconductor of the Bi-Sr-Ca-Cu-O type, in which the ratio of Bi:Sr:Ca:Cu is (2-x):2:(1+v):(2+w), where 0.05.ltoreq.x.ltoreq.0.6; 0<v.ltoreq.0.5 and 0<w.ltoreq.0.5. Oxides of Bi and Cu and carbonates of Ca and Sr are converted below the melting temperature, preferably at 800.degree. C., into a Bi 2-layer compound. The powder mixture is then pressed into a desired shape and melted a few degrees above the melting temperature for 1 h at 1 bar O.sub.2. In a two-stage process, (13 h at 860.degree. C. at 1 bar O.sub.2 and 60 h at 800.degree. C. in air), the material is aftertreated and converted into the Bi 2-layer compound. The subsequent cooling was carried out below 700.degree. C. in an N.sub.2 atmosphere. In the absence of a magnetic field, the critical current density j.sub.c was 1.6 kA/cm.sup.2. j.sub.c (B=0) was measured as 2.12 kA/cm.sup.2 for x=0.05 and an aftertreatment of 18 h at 800.degree. C.
It has been disclosed in EP-A2-0,351,844 to produce a high-temperature superconductor of the Bi-Sr-Ca-Cu-O type with a critical temperature of 94K and a critical current density of 2 kA/cm.sup.2. After heat treatment for 30 minutes in an oxygen atmosphere at 900.degree. C., heating was carried out for 10 minutes to 920.degree. C. and annealing was subsequently carried out for 6 h at 880.degree. C. Thereafter, cooling was performed at a cooling rate of 2K/min to 600.degree. C., and subsequently in a nitrogen atmosphere down to room temperature.
Jun-ichiro Kase et al., Partial Melt Growth Process of Bi.sub.2 Sr.sub.2 Ca.sub.1 Cu.sub.2 O.sub.x Textured Tapes on Silver, Japanese Journal of Applied Physics, Vol. 29, No. 7, July 1990, pages L1096-L1099 has disclosed achieving a critical current density j.sub.c of 13 kA/cm.sup.2 for orientated thick films at a temperature of 77K without an external magnetic field.
A disadvantage of this method is the restriction to film thicknesses of <100 .mu.m.
As in the case of the method according to the abovementioned. EP-A2-0,351,844, here, as well, the powder, pressed or poured, is applied to a planar substrate, preferably made from silver. Under the action of gravity in the partially melted state, the powder is compressed to form a compact body or film. In the case of non-planar, e.g. cylindrical substrates, this method fails due to non-uniform running or running out of the liquid.
The article by G. Triscone et al., Variation of the superconducting properties of Bi.sub.2 Sr.sub.2 CaCu.sub.2 O.sub.8+x with oxygen content, Physics C 176 (1991), pages 247-256, particularly FIG. 1 on page 248, discloses how the critical temperature T.sub.c depends on the oxygen partial pressure in the case of equilibrium heat treatment. It is therefore possible to optimize Bi2212 superconductors of any type of manufacture and size with respect to the critical temperature.

Method for producing a rotationally symmetrical molded part of a high-temperature superconductor


A supporter for a vehicle includes a pair of brackets separated from each other so as to face each other, one end of each of the brackets being fixed to a holding part held inside of the vehicle, and cubes installed between the brackets so as to be rotatable, the cubes having a polyhedral shape, and one or more holding holes formed on at least two surfaces of the cubes. The supporter selectively supports or holds various goods, such as cup holders, various articles and electronic devices, according to the sizes of the goods, thereby efficiently using space and increasing user convenience.

1. Field of the Invention
The present invention relates to a supporter for a vehicle, and more particularly, to a supporter configured to support an electronic device or article of a user while the user rides in the vehicle.
2. Description of the Related Art
In general, in vehicles such as buses, in order to satisfy passenger convenience, a cup holder or a pocket to contain belongings or garbage is installed on a front seat back of a vehicle seat.
Since most passengers generally possess one or more electronic devices, such as a portable terminal, a PDA, a portable game machine, a display device, etc., space is needed in a vehicle to keep, hold and support these electronic devices for convenience of passengers.
In general, if a passenger views a screen or uses the Internet through an electronic device, such as a PDA, the passenger needs to hold the electronic device which may be inconvenient. Further, if the electronic device is not be held on a separate supporter or holder, then it generally needs to be put into a passenger's bag or pocket or inserted into a pocket formed on a front seat back.

Supporter for holding electronic device or article in vehicle


The present invention relates to compounds that modulate the shikimate pathway and/or a pathway branching from the shikimate pathway in members of the Amoebida Order. In particular these compounds may be useful in the treatment or prevention of diseases caused or contributed to by members of the Amoebida Order.

Acanthamoeba are normally free-living protozoa found throughout the environment. Acanthamoeba are responsible for Acanthamoeba keratitis and granulomatous Acanthamoeba encephalitis (GAE) in humans (Cohen et al., 1985; Culbertson et al., 1966). Acanthamoeba keratitis is normally associated with contact lens wear and is increasingly evident in immunocompetent individuals (Auran et al., 1987; Moore et al., 1985; Stehr-Green et al., 1989).
Acanthamoeba (species) are a cause of keratitis and encephalitis in humans. Incidence of Acanthamoeba keratitis has been estimated to be 1 per 30000 contact lens wearers per year, although a separate study found that it could be as high as 20, 3.3 and 1.1 per 10,000 for extended wear, daily disposable and rigid gas permeable lenses, respectively. GAE is a disease of the immunocompromised, particularly those with AIDS where it is invariably fatal.
Current therapeutic regimens for Acanthamoeba keratitis rely on topical applications of antimicrobials every 15-60 minutes for a period of weeks making treatment arduous. These drugs include a combination of propamidine isothionate and neomycin or chlorhexidine. Current treatments are poorly effective against the cystic stages of the parasite and allow residual infection. Corneal transplantation is often necessary due to extensive damage caused by the parasites prior to diagnosis. Residual cysts remaining after treatment can result in infection of transplanted corneas (Seal, 2003). No effective antimicrobial treatment for GAE has been described although such therapy has been used with apparent effect as an adjunct to surgery (Marciano-Cabral et al., 2000; Seijo Martinez et al., 2000). This exemplifies the urgent need for new and effective antimicrobials.
The present inventors have now obtained evidence that the shikimate pathway occurs in Acanthamoeba and that inhibition of this pathway is capable of restricting the growth of the parasite in vitro. The shikimate pathway is essential for production of a plethora of aromatic compounds in plants, bacteria and fungi. The shikimate pathway was at one time believed to be absent from all protozoans, but was recently demonstrated to be present in Apicomplexan parasites. (Roberts et al., 1998).
The shikimate pathway results in the production of chorismate. In the first instance the shikimate pathway converts phosphenolpyruvate and erythrose 4-phosphate to chorismate generally in seven enzyme-catalysed steps. The shikimate pathway feeds numerous other pathways with essential compounds. In particular the shikimate pathway provides compounds for use in pathways producing ubiquinone, folate, and/or aromatic amino acids in the Amoebida. By way of an example, chorismate, produced by via the shikimate pathway, is fed into pathways for synthesising ubiquinone and folate. The synthesis of ubiquinone from chorismate depends upon eight enzymes while the production of folate in the Amoebida results from the conversion of chorismate to tetrahydrofolate in six enzymatic reactions.
In addition to the above detailed pathways, chorismate is also used in pathways, which result in the synthesis of aromatic amino acids, for example tryptophan, phenylalanine and tyrosine. Tryptophan synthesis from chorismate depends upon seven enzymes. Phenylalanine and tyrosine synthesis involve separate pathways that branch from prephenate, which is produced from chorismate via the action of chorismate mutase. The pathways that lead to either phenylalanine or tyrosine, each involve an additional five enzymes (reviewed, Roberts et al., 2002).
The molecular organisation of the shikimate pathway enzymes differs between taxonomic groups (Coggins et al., 1987). Most prokaryotes have monofunctional polypeptides encoded by separate genes, which provide seven single enzyme activities. Plants have a molecular arrangement similar to prokaryotes (Butler et al., 1974), with the exception of dehydroquinase (DHQase) and shikimate dehydrogenase, which are present as separate domains on a bifunctional protein (Mousdale et al., 1987). At least one prokaryote, Chlaniydia, also has this bifunctional fusion. All fungi examined to date have mono-functional 3-deoxy-D-arabino-heptulosonate 7-phosphate (DAHP) synthases and chorismate synthases and a pentafunctional polypeptide termed AROM (Duncan et al., 1987). The AROM polypeptide has domains analogous to the bacterial enzymes; dehydroquinate (DHQ) synthase, EPSP synthase, shikimate kinase, DHQase and shikimate dehydrogenase.
The shikimate pathway is absent from mammals, including humans that must obtain their aromatic compounds from their diet (Roberts et al., 1998; Roberts et al., 2002). This makes this pathway a potentially excellent target for new antimicrobial agents. The present inventors have found evidence that the shikimate pathway occurs in Acanthamoeba.
As a result it is among the objects of the present invention to provide an antimicrobial compound which is effective against the Amoebida.


Compounds useful as chemotherapeutic, chemopreventive, and antiangiogenic agents are provided. The compounds are flavanoids, including flavanones, flavanols, and chalcones. The compounds have the structure of formula (I)

Cancer is the second leading cause of death in the United States, exceeded only by heart disease. Drugs currently used to treat cancer tend to be toxic at their therapeutic dose levels, commonly causing severe and even life-threatening adverse effects. These adverse effects include serious disorders of the blood, gastrointestinal tract, liver, kidneys, and other organs. Most current anticancer drugs thus have a narrow therapeutic window: the range between the therapeutic dose and the maximum tolerated dose is very small. Due to this toxicity, as well as the fact that most anticancer drugs are administered intravenously, nearly all cancer chemotherapy must be administered in a hospital or clinic. An additional problem with most current cancer chemotherapy is that cancers frequently develop resistance to the drugs, so that recurrence of disease is common.
It is therefore of utmost importance to develop new anticancer agents that are effective in treating drug-resistant cancers, exhibit low toxicity, and have a wide therapeutic window, such that an agent targets diseased tissue while sparing healthy tissue. An ideal anticancer agent would also be easily administrable outside of a clinical setting; orally active compounds would be particularly attractive in this regard. Ideal agents would also be useful prophylactically in patients at risk of developing cancer, in addition to their utility in therapeutic methods. Angiogenesis, the process by which new blood vessels are formed, is essential for many normal physiologic functions, including growth, establishment of the placenta, and wound repair. It is also essential for the growth of cancerous tumors larger than about two mm in diameter (Weidner et al. (1991) New England J. Med. 324:1-8). To obtain sufficient nutrients and oxygen, tumors secrete factors that induce the development of new blood vessels that connect the tumor to the surrounding tissue. Once a tumor establishes a system of blood vessels connected to the host organism, a means is provided by which tumor cells can enter the circulation and metastasize to distant sites such as the liver, lung, or bone. If this neovascularization is prevented or destroyed, the tumor will eventually shrink and die. Some of the most promising anticancer compounds in development are antiangiogenic. These compounds include: angiostatin, a polypeptide of approximately 200 amino acids produced by the cleavage of plasminogen, a plasma protein involved in dissolving blood clots; endostatin, a polypeptide of 184 amino acids that is the globular domain found at the C-terminal of Type 18 collagen, a collagen found in blood vessels; and troponin I, a protein found in muscles. Another antiangiogenic compound in development is a monoclonal antibody directed against the vascular integrin anb3. Other experimental compounds are targeted against VEGF. As all of these compounds in development are proteins, they cannot be administered orally, and they may induce allergic reactions. An additional experimental antiangiogenic compound, suramin, has such high systemic toxicity that its utility is severely limited.
Many diseases other than cancer are also associated with pathologic angiogenesis. Ocular neovascularization has been implicated as the most common cause of blindness. In diabetic retinopathy, capillaries formed in the retina invade the vitreous, bleed, and cause gradual loss of vision leading to blindness. In arthritis, newly formed capillaries and other blood vessels invade the joints and destroy cartilage. In psoriasis, angiogenesis is required to maintain the rapid growth and turnover of skin cells. Many other examples of inflammatory disorders and other diseases associated with angiogenesis are known in the art.
Although some antiangiogenic agents are quite active, many of the currently known agents are associated with a number of problems. For example, many of the known antiangiogenic agents exhibit poor bioavailability, result in numerous side effects, have problems with stability, and are difficult to synthesize in an efficient manner.
Endothelial cell proliferation is a key process in angiogenesis. Endothelial cells form the endothelium—a thin layer of cells that lines blood vessels. Angiogenesis relies on the ability of endothelial cells to proliferate in order to form the endothelium of the newly forming vessels. Thus, while the proliferation of endothelial cells is required for normal physiological processes, angiogenesis associated with the growth of a tumor involves the unwanted proliferation of endothelial cells.
Angiogenesis also requires migration of endothelial cells, for example through the extracellular matrix. Cellular migration is undesirable in the context of metastasis and tumor cells; endothelial cell migration is similarly undesirable in the context of pathologic angiogenesis. The migration of endothelial cells is aided by matrix metalloproteinases, which are involved in the degradation of the extracellular matrix. Importantly, the migration of tumor cells is also aided by matrix metalloproteinases. Thus, the inhibition of matrix metalloproteinases represents a potential method for interrupting metastasis.
Methods of treatment which disrupt unwanted proliferation of endothelial cells and/or unwanted migration of tumor cells and/or endothelial cells would be expected to have value in the treatment of angiogenesis, but would also be expected to have value in the treatment of disease processes besides angiogenesis, especially metastasis. Such methods are therefore desirable independently of how effective they are against angiogenesis.

Flavanoids as chemotherapeutic, chemopreventive, and antiangiogenic agents

Abstract: wherein R1 through R3 and R5 through R11 are defined herein, and α, β and γ are optional bonds, providing that when α is absent, β is present, and when β is absent, α is present. When α is present, preferred R4 moieties are selected from O, S, NH and CH2, and when α is absent, preferred R4 groups are selected from OH, SH, NH2 and CH3. When γ is present, the preferred R5 substituent is O, while when γ is absent, the preferred R5 substituent is OH. Pharmaceutical compositions are provided as well, as are methods of synthesis and use.


The present invention provides a compound having a cholinergic muscarinic M1 receptor positive allosteric modulator activity, which may be useful as medicaments such as a prophylactic or therapeutic drug for Alzheimer's disease, schizophrenia, pain, sleep disorder, Parkinson's disease dementia, dementia with Lewy bodies and the like, and the like. The present invention relates to a compound represented by the formula (I)

Acetylcholine is a neurotransmitter that induces signal transduction in the central nervous system and the neuromuscular connections (the parasympathetic nerve and motor nerve). In the central nervous system, nuclei of origin of the acetylcholine neuron are in the brain stem and forebrain, and those acetylcholine neurons project to cerebral cortex, hippocampus, and limbic area. In addition, some interneurons in some brain areas such as striatum utilize acetylcholine as a neurotransmitter. Acetylcholine receptor is classified into a ligand dependent ion channel (cholinergic nicotinic receptor) and a G-protein-conjugated receptor (cholinergic muscarinic receptor). The cholinergic muscarinic receptor is one kind of receptor for excitatory neurotransmitter acetylcholine, and was named based on the selective activation of the receptor by muscarine. The muscarinic receptor is further classified into subtypes of M1 to M5, and the M1 receptor is known to be widely distributed mainly in the brain, and deeply involved particularly in learning, memory, sleep, neuropathic pain and the like. The importance of cholinergic muscarinic M1 receptor in brain physiology is well known, and a compound having an M1 receptor function enhancing action is expected to be useful as a prophylactic or therapeutic drug for mental diseases, neurodegenerative diseases, memory disorders, pain, sleep disorders and the like (non-patent document 1).
WO 2006/020879A1 (patent document 1) discloses the following compound as a metabotropic glutamate receptor modulator which is effective for neurological and psychiatric disorder associated with glutamate dysfunction:
wherein each symbol is as defined in the document.
WO 2013/063549A1 (patent document 2) discloses the following compound as a compound effective for neurological and psychiatric disorder associated with muscarinic acetylcholine receptor dysfunction.
wherein each symbol is as defined in the document.
Bioorganic & Medicinal Chemistry Letters, 20 (2010), 1972-1975 (non-patent document 2) discloses the following compound and the like as a M1 receptor positive allosteric modulator:

Gordon, C. P., Byrne, N., McCluskey, A. Green Chem., 2010, 12, 1000-1006. (non-patent document 3) discloses the following compounds similar to the compound of the present invention.

WO 2010/096338A1 (patent document 3) discloses the following compound as an M1 receptor positive allosteric modulator effective for Alzheimer's disease, schizophrenia, pain or sleep disorder.
wherein each symbol is as defined in the document.
WO 95/030647A1 (patent document 4) discloses the following compound similar to the compound of the present invention.
wherein each symbol is as defined in the document.
WO 2007/139464A1 (patent document 5) discloses the following compound as a CB1 receptor ligand effective for pain, cancer, multiple sclerosis, Parkinson's disease, Huntington's chorea, Alzheimer's disease, anxiety disorder, gastrointestinal disorder and cardiovascular disorder.
wherein each symbol is as defined in the document.
US 2008/0108659A1 (patent document 6) discloses the following compound as a compound having a poly(ADP ribose)polymerase (PARP) activity, and useful for cancer, central nervous system disease, inflammatory disease and the like.
wherein each symbol is as defined in the document.
WO 2011/006794A1 (patent document 7) discloses the following compound as a compound which selectively inhibits the activity of poly (ADP-ribose) polymerase PARP-1 with respect to poly (ADP-ribose) polymerase PARP-2 and useful for cancer, cardiovascular diseases, central nervous disorders and the like.
wherein each symbol is as defined in the document.
WO 2012/003147A1 (patent document 8) discloses the following compound as a compound having an M1PAM activity, and effective for Alzheimer's disease, schizophrenia, pain, and sleep disorder.
wherein each symbol is as defined in the document.
WO 2012/158475A1 (patent document 9) discloses the following compound as a compound having an M1PAM activity, and effective for Alzheimer's disease and the like.
wherein each symbol is as defined in the document.
WO 2013/129622A1 (patent document 10) discloses the following compound as a compound having an M1PAM activity, and effective for Alzheimer's disease and the like.
wherein each symbol is as defined in the document.
WO 2015/028483A1 (patent document 11) discloses the following compound as a muscarinic M1 receptor positive allosteric modulator, which is effective for Alzheimer's disease and the like.
wherein each symbol is as defined in the document.
WO 2015/044072A1 (patent document 12) discloses the following compound as a muscarinic M1 receptor positive allosteric modulator, which is effective for Alzheimer's disease and the like.
wherein each symbol is as defined in the document.
WO 2015/049574A1 (patent document 13) discloses the following compound as a muscarinic acetylcholine receptor M1 positive allosteric modulator, which is effective for Alzheimer's disease and the like.
wherein each symbol is as defined in the document.

Abstract: wherein ring A is an optionally substituted 5- or 6-membered ring; R is a C1-6 alkyl group substituted by 1 to 5 halogen atoms; and X is —CH═ or —N═, or a salt thereof.


A panoptic visualization document support system includes a request interface and support engine. The request interface is configured to receive a request for printout(s) of selected document component(s) of a layout of document components of a panoptic visualization document collection. The collection has a plurality of document components each of which includes respective media content and has associated metadata providing information about the respective document component. The layout includes a panoptic arrangement of visual representations of the document components of the layout according to the associated metadata of the respective document components. The support engine is configured to retrieve and prepare the selected document component(s) for printing according to at least a selected print layout style. Preparation of the selected document component(s) includes generation of one or more printable document components for respective ones of the printout(s). And the support engine is configured to communicate the printable page(s).

Information printed about a topic is often printed on multiple pages because the information does not fit on a single page and/or is more effectively presented using multiple pages. The multiple pages may be in the same source or in multiple sources. For example, technical drawings of an aircraft may be printed such that different portions of the same diagram may be printed on different pages. Drawings of one assembly on the aircraft may be contained in one library or source, while drawings of another assembly may be contained in a second library or source.
Printed information may also be printed such that one document contains one level of detail about an object, while a second document contains a second level of detail about the same object. For example, a diagram of an aircraft may be printed such that the exterior of the aircraft is visible in the diagram. Another diagram of the same aircraft may be printed such that the exterior of the aircraft is obscured, but the interior of the aircraft is presented. Thus, a reader may use different diagrams to learn different information about the same object.
As another example, wiring diagrams of wiring systems are often printed across multiple pages because the graphical and textual information presented in the wiring diagram is too great to fit on a single page. Thus, a reader may change documents multiple times to learn information about an entire wiring system.
Documents such as engineering diagrams, technical drawings, wiring diagrams, and other suitable document types may be used in the maintenance of an aircraft. The documents are created to be viewed in printed form. However, such documents are commonly stored in electronic form and viewed on a display device of a data processing system. As a result, the reader looks through different documents that may be on different types of media. This type of review may be more time-consuming than desired to find information about an aircraft.
Documents regarding a complex system of systems such as an aircraft may therefore contain large amounts of information regarding the complex system and its components, subsystems and parts, and the connections and relationships among the respective elements of the complex system. The complexity of the system and the large amount of information often required to describe the system may increase not only the time required to study the documents, but the difficulty in comprehending the complex system and its elements. A user may not only require the time to review documents containing large amounts of information, but may also require the time and endure the difficulty of studying the information to understand the ways in which the complex system and its elements relate to each other.
In today's printing systems, a printer controller manages complex data and presentation objects prior to printing a document. Similarly, there exist situations where complex data and presentation objects require spending valuable computational cycles to search, reference, find generate and/or cache/save resources. What is desired is a printer controller that performs communications with other components, such as a document parser and tiler to conduct any number of functions in preparation for printing.
There also exists the need for the selected print layout style to preserve the relationship between the complex data. This would include a display or printout of the one or more selected document components separately or together, and in their respective entireties or in a portion in which they are viewable in a viewable portion of the layout that maintains the relationships between the components.
There also exist situations utilizing document complex systems that base resource information may be lost, or the relationship with the base information is lost. Relocating missing resource or regenerating missing resources is computationally expensive and potentially occurs in the printer controller during page processing when runtime is most critical. Therefore what is desired is a means to generate instructions for storing and referencing complex resource information and relationships in preparation for printing.
Therefore, it may be desirable to have a method and apparatus that takes into account at least some of the issues discussed above, as well as possibly other issues.

Panoptic visualization document printing


A light-weight, high-strength beam member for use in concrete form assemblies. An end plate is secured by weldment to each end of a pair of channel members arranged in a back-to-back, spaced apart relation. The channel members includes a pair of transversely opposite leg sections with inturned terminal edges and an interconnecting web section. The terminal end portion of the web section is foreshortened by one-half the thickness of an end plate. In assembly, an end plate rests against the terminal edge of the web sections and is partially recessed in the leg sections and inturned edges of the channel members. Upon welding of the end plates to the channel members a high-strength end connection is created which permits full strength beam assemblies to be constructed by interconnecting end-to-end a plurality of individual beam members.

The invention relates generally to concrete forming systems and, more specifically, to light-weight, high-strength beam members useful in a multitude of applications in concrete forming systems and assemblies including the support of an upright form assembly in a predetermined upright position.
Concrete forming systems are well known and widely used in the construction of diverse concrete structures. Certain of these systems make use of beams or soldiers as upright and horizontal structural members, inclined braces, columns, shores, walers, and the like. Known beams are formed of a pair of channel members arranged back-to-back in a spaced relation and having an end plate butt-welded to each of the ends of the pair of channel members. An example of such beams are those of Rapid Metal Developments Limited, Aldridge, England.
An application of the known beams is described by their manufacturers as being the bolting together in an end-to-end relation two or more beam members for assembly into beams of extended length. Such beam assemblies, however, because of butt-welded end plates have severely decreased strengths relative to a single beam member of the same length.
The beam members of the present invention are both light-weight and high-strength and, when bolted end-to-end, form an extended beam assembly that has the same strength as a single beam member of the same length.


A resist film is formed out of a resist material on a substrate, and then pre-baked. Next, the pre-baked resist film is exposed to extreme ultraviolet radiation through a photomask. Then, the exposed resist film is developed, thereby defining a resist pattern on the substrate. The pre-baking and exposing steps are carried out in a vacuum without subjecting the resist film to the air.

The present invention relates to a method for forming a fine-line resist pattern by exposing a resist film to extreme ultraviolet (EUV) radiation through a photomask and also relates to an apparatus for fabricating a semiconductor device by utilizing the pattern forming method.
As semiconductor devices for a semiconductor integrated circuit have been downsized, it has become increasingly necessary to further reduce the feature size of a line-and-space pattern. And to define a fine-line pattern, a lithography technique is indispensable. Particularly when a pattern with a line width of 0.07 μm or less should be defined, a lithography technique using EUV radiation with a wavelength of around 13 nm as an exposing radiation is expected to be very effective.
In a known lithographic process using krypton fluoride (KrF) excimer laser radiation (with a wavelength of around 248 nm) or argon fluoride (ArF) excimer laser radiation (with a wavelength of around 193 nm), an exposure process is carried out in the air or nitrogen ambient. However, if the same exposure process is performed in such an ambient using EUV radiation, then the radiation is absorbed into oxygen or nitrogen molecules contained in the ambient, because the EUV radiation has a much shorter wavelength. This is why the EUV exposure process should be carried-out in a vacuum.
For that reason, a known process of forming a resist pattern out of a chemically amplified resist material, for example, using the EUV radiation is carried out in the following manner.
First, a chemically amplified resist material is applied onto a substrate in the air to deposit a resist film thereon. Next, the resist film is pre-baked to vaporize a solvent contained in the resist film.
Then, the resist film is exposed through a photomask to EUV radiation in a vacuum, thereby transferring the pattern of the photomask onto the resist film.
Subsequently, the resist film is subjected to a post-exposure baking process in the air so that the acid diffuses in the exposed or non-exposed parts of the resist film. Finally, the resist film is developed using a developer, thereby defining a resist pattern.
Where a resist pattern should be formed out of a non-chemically-amplified resist material, the resist film is exposed through a photomask to EUV radiation in a vacuum and then developed immediately in the air without being subjected to the post-exposure baking process.
The present inventor tentatively defined a resist pattern by exposing a resist film to EUV radiation and then patterned a film on a substrate by dry-etching it using the resist pattern obtained. As a result, the present inventor found that the walls of the patterned film showed a non-negligibly high degree of roughness.

Pattern forming method and apparatus for fabricating semiconductor device

Matsushita Electric Industrial Co., Ltd.