A ceramic heater which includes: a cylindrical substrate including an insulator; a resistor provided in one end side of the substrate; a pair of lead parts provided in the substrate, connected to the resistor and extending to an opposite end side of the substrate; and a pair of electrode parts exposed to a surface at an opposite end side of the substrate and connected respectively to the lead parts. Both lead parts are made of the same material as both electrode parts. An axial cross-sectional area of the electrode part is equal to or larger than a cross-sectional area of the lead part in a direction perpendicular to an axis of the ceramic heater.

1. Field of the Invention
This invention relates to a ceramic heater, a glow plug, and a ceramic heater manufacturing method.
2. Description of the Related Art
JP-A-2003-56848 discloses a glow plug including a cylindrical metal shell, a columnar ceramic heater provided inside the tip end side of the metal shell and having a heating part at its tip end, and a center pole provided in the rear end side of the metal shell.
The ceramic heater of JP-A-2003-56848 has a cylindrical substrate made of a silicon nitride insulating material, a resistor buried in one end side of the substrate, a pair of lead parts buried in the substrate, the lead parts being connected to the resistor and extending to an opposite end side of the substrate, and electrode parts exposed at the opposite end surface of the substrate and connected to the lead parts. The ceramic heater of JP-A-2003-56848 has a metal cylinder and a metal ring on its outer periphery; one electrode part is electrically connected to the metal shell through the metal cylinder and the other electrode part is electrically connected to the center pole through the metal ring.
The resistor, the lead parts, and the electrode parts constitute a fired body made of an insulting material of silicon nitride and tungsten carbide (WC), for example. In this case, the lead parts and the electrode parts each has a larger WC content than that of the resistor, and accordingly has a higher electrical conductivity than the resistor.
The metal shell of the glow plug is fixed to a cylinder head of a diesel engine and the center pole is connected to a battery. In the ceramic heater, a voltage is applied between the metal shell and the center pole, whereby the resistor is energized through the electrode part and the lead part, to generate heat. Accordingly, the glow plug is utilized when starting the diesel engine and while idling.
This type of ceramic heater is manufactured as follows: First, for example, a resistor green part which is to become a resistor is injection-molded with a material having a decreased WC content and then a lead green part which is to become a lead part and an electrode part are injection-molded with a material having an increased WC content to provide a one-piece molded green body including the resistor green part and the lead green part.
The molded green body thus prepared is fitted into a substrate green body which is to become a substrate, and is pressed to produce a green body assembly. Then, the green body assembly is subjected to a debinder treatment and fired at 1700° C. or higher, for example, in the vicinity of about 1800° C. with a hot press, etc. The fired body thus obtained is ground to produce a ceramic heater.
As compared with a ceramic heater having a lead part and an electrode part made of metal wires, the ceramic heater having the resistor, the lead part, and the electrode part sintered from materials together with the substrate green body eliminates the need for a metal lead wire manufacturing process of bending and cutting wires made of W, W—Re alloy, etc. In addition, the lead parts and the electrode parts can be molded together with the resistor. Thus, as compared with the former ceramic heater, the latter has the advantage of high mass productivity. Thus, for example, the ceramic heater as described above enables a thin glow plug to be manufactured at low cost.
3. Problems to be Solved by the Invention
However, there is a strong need to enhance the long term durability of this kind of ceramic heater. For example, there is a need to suppress break-resistant strength degradation of the ceramic heater with use as a measure of durability. Particularly, recent high performance diesel engines require a small and thin glow plug. In such a glow plug, a ceramic heater having a substrate measuring about 3.5 mm or less in diameter is required, and the problem of long term durability becomes evident.

Ceramic heater, glow plug, and ceramic heater manufacturing method


Sentinel Cells, respond quickly and differentially to and among various high explosives (e.g., RDX, PETN, HMX, TNT, TNG), taggant (DMDNB), and bacteria, as well as volatiles of commercial C4, Semtex 1A, and military C4. These effects are observable within 5 minutes of exposure, indicate profound biological effects in exposed cells, and are distinctly different from responses to bacteria (e.g., E. coli, mycoplasma, lipopolysaccharide from E. coli, etc.). Quantitative and mechanistic analysis of the observations indicate that the mechanisms that give rise to these responses invoke different subsets of biochemical reactions. The mechanism within the exposed Sentinel Cells is also used in canine olfactory cells (e.g., bomb dogs). The nature of the explosives-induced biological effects provide for a cell based explosives detection system (i.e., a cellular dog nose), as well as a tool for the study of biological effects of energetic materials on humans.

The United States and its allies are the targets of attacks by terrorists or criminals who use weapons based on energetic materials (EM) such as explosives, biological weapons, or energy weapons. Such attacks may affect personnel and installations with possible significant casualties. In the past decade, the U.S. experienced about 3,000 explosions a year that warranted forensic investigation. (Comm Assessment Sec Tech for Transp, Nat'l Res Coun, 2004; Mostak P (2004); Sanchez et al (2007).
Improved near-range and standoff detection of EM is essential for defeating those who would use EM-based weapons and propellants against the U.S., its allies, and innocent people (McConnell J M (2008) Annual Threat Assessment of the Director of National Intelligence; Blair, D C (2009) Annual Threat Assessment of the Intelligence Community for the Senate Select Committee on Intelligence.). A spectrum of EM detection tools is necessary to protect and defend people from EM based attacks.
Thus, there exists a need for a robust, selective, and readily tailored detection system for various target species including explosives, chemical and/or biological weapons such as weapons of mass destruction (WMDs) as well as ionizing radiation.

Defense Threat Reduction Agency, Dept. of Defense, United States Government


A zoetrope device having a plurality of panels is disclosed. Each of the panels may be formed with one or more indicia representing various objects such as people and things. The panels may be mounted to a rotatable platform that traverses the panels over a light source. When the panel is traversed over the light source, the light source may illuminate the edge of the panel and the indicia formed on the panel. The indicia may be formed at different depths to provide the viewer with an image that appears to be three dimensional. Moreover, the light source may have one or more different light colors for illuminating the indicia therewith and/or alternately illuminating the indicia with different light colors.

The various embodiments described herein relate to a zoetrope device.
Prior art zoetrope devices are typically manual devices wherein a slip of paper having a series of images that depict movement of an object is rolled up within a rotating cylindrical platform. The cylindrical platform has a series of slits that the viewer looks through to view the series of images. By doing so, the viewer sees the images having movement. By way of example and not limitation, the images may represent a person walking or doing some other exercise. Unfortunately, prior art zoetrope devices suffer from various deficiencies.
Accordingly, there is a need in the art for an improved zoetrope device.


A connector assembly can include a bracket, a first connector and a second connector. The bracket can have a base adapted to be mounted in a fixed position and include a wall extending at a right angle from a plane of the base. The wall can have two curved, side-by-side grooves and an axis raised above the plane of the base. The first and second connectors can each have a housing for accommodating electrical terminals. One housing can include two posts located alongside each other for receipt in the grooves of the bracket such that the first connector is guided in a stable, curved sliding movement along the grooves. The second connector can include a channel for receiving and being acted upon by the axis of the bracket to draw the connectors further together and the terminals of the connectors into electrical engagement to a final position.

Bussed electrical centers (BECs), also known as power distribution centers or junction boxes can be used in automotive vehicles to simplify electrical system wiring by eliminating multi-branch wiring, consolidating fuses, relays and other electrical circuit components in a single location. In one example, a BEC can include a plastic case having complementary upper and lower housing portions. A multitude of sockets can be formed in the BEC for receiving the circuit components. The plastic case can include bus bars, printed circuit boards (PCBs) or other conductive elements for interconnecting and supplying power to the various circuit components. Electrical connectors can be disposed on the BEC to receive mating connectors. Such mating connectors can terminate wire harnesses extending throughout the vehicle to interconnect the circuitry of the BEC with various electrical systems and devices within the vehicle.
In many applications, mechanical fasteners can be provided for securing the upper and lower housing portions together. As can be appreciated, the use of fasteners can be time consuming and require special torque installation requirements. In one example, torque guns can be provided for installation of such fasteners during assembly.

Electrical connector assembly connected upon rotation about a bracket


A method and system for segmenting diaphragm regions in a chest X-ray radiograph is disclosed. The diaphragm regions are segmented based on left and right lung lobe regions and a heart region in the chest X-ray radiograph. A right diaphragm region is segmented in the chest X-ray radiograph based a boundary of the right lung lobe. A left diaphragm region is segmented in the chest X-ray radiograph based on the heart region and a boundary of the left lung lobe.

The present invention relates to diaphragm segmentation in a chest X-ray radiograph, and more particularly, to estimating regions representing the diaphragm in a chest X-ray radiograph, for nodule detection in the diaphragm region.
Nodules are small masses of tissue, which can form on various organs in the human body, such as the lungs. Lung nodule detection can be used for advance cancer screening. Accordingly, computer implemented methods for automatic nodule detection methods have been developed to detect nodules in chest X-ray radiographs. Such automatic nodule detection methods determine locations in a chest X-ray radiograph at which there is a high probability that a nodule exists.
In chest X-ray radiographs, diaphragm regions typically exhibit unique intensity characteristics. Diaphragm regions can represent special regions of interest for nodule detection in chest X-ray radiographs. For example, in lung nodule detection, detectable nodules in diaphragm regions are typically much larger and less prominent in intensity distribution, thereby exhibiting very different image characteristics from nodules in the upper lung lobes. Accordingly, special handling may be required to ensure reliable detection of nodules in diaphragm. In order to initiate special handling of the nodules in diaphragm regions, a valid segmentation of the diaphragm is need. However, even though many techniques have been developed for segmentation of lung lobes, heart regions, and ribs in chest x-ray radiographs, diaphragm segmentation has not been well addressed. Furthermore, diaphragm regions typically do not have a clear-cut definition in chest x-ray images, and there is not much edge information and/or intensity information that provides sufficient support segmenting diaphragm regions using a general segmentation algorithm. Therefore, a method of diaphragm segmentation in chest X-ray radiographs is desirable.

Method and system for diaphragm segmentation in chest X-ray radiographs


A group of multiple hollow fibers may be shaped to introduce angular divergence among the fibers, or to introduce a selected longitudinal oscillation into the fibers. In one shaping technique, the fibers are held in parallel while upper and lower crimping assemblies of parallel crimping bars are drawn together on opposite sides of the parallel fibers. When bars of the opposing assemblies draw sufficiently close, they sandwich the fibers in between them, causing each fiber to assume a shape that oscillates as the fiber repeatedly goes over and then under successive bars. Since the crimping bars are aligned at oblique angles to the fibers, the peaks and troughs of successive fibers are offset. While in this position, the fibers are heated and then cooled to permanently retain their shapes. A different shaping technique utilizes a lattice of criss-crossing tines defining multiple apertures. In this technique, the lattice and fibers are positioned so that each fiber passes through one of the apertures. Then, the lattice and/or the fibers are slid apart or together until the lattice holds the fibers in a desired configuration, where the fibers have a prescribed outward divergence relative to each other. While in this position, the fibers are heated and then cooled to permanently retain this angular divergence. The heating can be effected using heating fluid or gas circulated in the bars.

1. Field of the Invention
The present invention relates to catheters that utilize a bundle of many small fibers to conduct heat or materials exchange with a target area of the human body. More particularly, the invention concerns a catheter manufacturing process that selectively shapes a group of multiple hollow fibers to introduce angular divergence among the fibers or to introduce a selected longitudinal oscillation into the fibers.
2. Description of the Related Art
In warm blooded creatures, temperature regulation is one of the most important functions of the body. Despite the known importance of properly maintaining body temperature, scientists have discovered certain beneficial effects of artificially inducing a hypothermic state. For instance, cooling the body can help regulate vital functions during surgery by lowering the metabolism. With stroke, trauma, and other pathological conditions, hypothermia is believed to also reduce the permeability of the blood/brain barrier. Induced hypothermia is believed to additionally inhibit the release of damaging neurotransmitters, inhibit calcium mediated effects, inhibit brain edema, and lower intra cranial pressure. Regardless of the particular mechanism, the present invention understands that fevers degrade the outcomes for patients suffering from brain trauma or stroke, and moreover that hypothermia can improve the outcomes for such patients.
Hypothermia may be induced locally or systemically. With local hypothermia, physicians focus their cooling efforts on a particular organ, limb, anatomical system, or other region of the body. With systemic hypothermia, doctors universally lower body temperature without particular attention to any body part.
Under one technique for inducing systemic hypothermia, physicians cool the patient's entire body by packing it in ice. Although this technique has been used with some success, some physicians may find it cumbersome and particularly time consuming. Also, it is difficult to precisely control body temperature with ice packing. As a result, the patient's body temperature overshoots and undershoots the optimal temperature, requiring physicians to add or remove ice. Furthermore, there is some danger of injuring the skin, which is necessarily cooled more than any other body part.
In another approach to systemic hypothermia, the patient is covered with a cooling blanket, such as an inflatable air- or water-filled cushion. Beneficially, cooling blankets offer improved temperature control because physicians can precisely regulate the temperature of the inflation medium. Nonetheless, some delay is still inherent, first for a cooling element to change the temperature of the cooling medium, and then for the temperature adjusted cooling medium to cool the desired body part. This delay is even longer if the targeted body part is an internal organ, since the most effective cooling is only applied to the skin, and takes some time to successively cool deeper and deeper layers within the body.
The present invention recognizes that a better approach to inducing hypothermia is by circulating a cooling fluid through a cooling catheter placed inside a patient's body. The catheter may be inserted into veins, arteries, cavities, or other internal regions of the body. The present assignee has pioneered a number of different cooling catheters and techniques in this area. Several different examples are shown U.S. application No. 09/133,813, entitled "Indwelling Heat Exchange Catheter and Method of Using Same," filed on Aug. 13, 1998. Furthe, examples are illustrated in U.S. application No. 09/294,080, entitled "Catheter With Multiple Heating/Cooling Fibers Employing Fiber Spreading Features," filed on Apr. 19, 1999. The foregoing applications are hereby incorporated into the present application by reference. These applications depict catheters where the tip region includes multiple hollow fibers. The fibers carry a coolant that is circulated through the catheter. The thin walls and substantial surface area of the fibers are conductive to the efficient transfer of heat from surrounding body fluids/tissue to the coolant, thereby cooling the patient.
Advantageously, cooling catheters are convenient to use, and enable doctors to accurately control the temperature of a targeted region. In this respect, cooling catheters constitute a significant advance. This invention addresses improvements related to such catheters.

This patent is subject to a terminal disclaimer.

Method of selectively shaping hollow fibers of heat exchange catheter


A method and system augments shaft output of gas turbine engines that can be used in multiple modes of operation. The system comprises a washing unit capable of injecting atomized water into the gas turbine engine, thereby obtaining a release of fouling material from the at least one compressor blade; and at least one water injection unit capable of injecting atomized water into the air stream of the gas turbine engine's inlet duct or at the gas turbine, under the control of a computational fluid dynamic model, in order to increase a mass flow of said air flow, wherein the power output from said gas turbine engine can be augmented.

Generating power requires that gas turbines consume large quantities of air. Gas turbines are strongly dependant on the ambient air conditions for their performance. Ambient air conditions such as temperature, pressure and water content impact the gas turbine's compressor's capability to compress the air and thereby affects its performance. In other words, gas turbine power is a function of the total mass flow available for compression, in combination with fuel and expansion to drive a turbine section. Mass flow is directly proportional to the engine power output. Gas turbines are constant volume machines (i.e., they operate according to fixed geometries), and thus, air density is one parameter that plays an important role in a gas turbine's ability to generate power. Air temperature and air density are in direct correlation to one another. As air temperature increases the density of air decreases, thereby resulting in a decrease of the overall potential for mass flow. As mass flow decreases, the output of the gas turbine also decreases. Other key parameters that have a strong impact on the performance of the gas turbine include the pressure ratio and the compression efficiency.
Mass flow can be managed by manipulating the water vapor content at the air intake of the gas turbine. Thus, air can be saturated with water vapor to return the overall mass flow to the maximum level of the turbine's design. Saturation can result from simply saturating the air surrounding the gas turbine. Alternatively, a more aggressive approach to increasing overall mass flow is injecting water into the turbine's compressor or combustor to oversaturate the air. Oversaturation allows the heat of fusion to further pressurize the working fluid and increase the turbine's output to a level above saturated air output levels.
However, proper saturation of air can be problematic because of the range of temperatures encountered by the gas turbine throughout a given time period (i.e., temperature changes over a 24 hour period or over an annual time period). As a result of these temperature variances, the water requirement for saturation will vary accordingly. For a given weather and engine load situation, a corresponding amount of water is necessary to reach saturation or oversaturation. Thus, humidity detection and pumping equipment are used in providing the proper amount of water for the appropriate level of saturation or oversaturation. Using too much water results in "overspray," where the air can not absorb/hold the excess water. The excess water can harm operations by corroding and/or flooding the gas turbine's air duct. On the contrary, too little water will not saturate the air and the full mass flow increase effect will not be accomplished.
Another issue is the build up of fouling or foreign particles in the turbine, particularly in the compressor, which can affect the gas turbine's efficiency and therefore its power output. Machines, such as gas turbines, consume large quantities of air. Air contains foreign particles in the form of aerosols and small particles, which typically enter the compressor and adhere to components in the compressor's gas path. Compressor fouling changes the properties of the boundary layer air stream of the gas path components because the deposits increase the component surface roughness. As air flows over the component, the increase of surface roughness results in a thickening of the boundary layer air stream. The thickening of the boundary layer air stream negatively effects the compressor's aerodynamics. At the blade's trailing edge, the air stream forms a wake. The wake is a vortex type of turbulence that has a negative impact on the air flow. The thicker the boundary layer the stronger the wake turbulence. The wake turbulence together with the thicker boundary layer has the consequence of reducing mass flow through the engine. The thick boundary layer and the strong wake turbulence result in a reduced compression pressure gain, which in turn, results in the engine operating at a reduced pressure ratio. A reduced pressure ratio results in a lower efficiency of the engine. Further, fouling of the compressor reduces the compressor isentropic and polytropic efficiency. Reduced compressor efficiency means that the compressor requires more power for compressing the same amount of air. As a result, the power required for driving the compressor increases and results in less surplus power being available to drive the load.
Washing the gas turbine counteracts the fouling and can be conducted either with the engine being shut down or during its operation. In the former instance the engine shaft can be cranked using its starter motor while wash water is injected into the compressor. Fouling is released by the act of the chemicals and the mechanical movement during cranking. The water and the released fouling material are transported to the exhaust end of the engine by the air flow. This procedure is called "crank" washing or "off-line" washing. An alternative to off-line washing is "on-line" washing where the engine is washed while in operation. "On-line" or "fired" washing occurs as the engine is firing fuel. The washing water is injected into the compressor while the rotor is spinning at high speed. Due to high rotor speeds and short retention time for the water this wash is not as efficient as the crank wash, but allows washing during operation.
Typically, attempts to augment gas turbine power have utilized extensive instrumentation throughout the entirety of the turbine for measuring temperatures, displacement, pressures and loading levels of the machine. However, power augmentation that relies on such extensive instrumentation is problematic due to its expense, complication of use, and increase in the potential and likelihood for the occurrence of operational errors resulting from instrumentation inconsistencies or failure. Eliminating such reliance on complex and extensive instrumentation to augment power of a gas turbine is desired.
Thus, there exists a need in the industry for a method and apparatus for augmenting the power output of gas turbine engines including, but not limited to, a stationary gas turbine engine, over a wide range of operating conditions where the system is controlled using a computational fluid dynamic transfer model.

System and method for augmenting turbine power output


A new holder for holding a light source, especially a hand held light source, to a structure. The inventive device includes a frame having a holding portion and a pair of spaced apart arm portions which are pivotally coupled to a mounting frame. The holding portion is generally annular and has a pair of opposing ends defining a break between them. Each of the arm portions are each extended from an associated end of said holding portion. The terminal ends of the arm portions are pivotally coupled to the mounting plate which is designed for mounting to a structure. The holding portion is biased in a direction towards the mounting plate.

1. Field of the Invention
The present invention relates to light holding devices and more particularly pertains to a new holder for holding a light source, especially a hand held light source, to a structure.
2. Description of the Prior Art
The use of light holding devices is known in the prior art. More specifically, light holding devices heretofore devised and utilized are known to consist basically of familiar, expected and obvious structural configurations, notwithstanding the myriad of designs encompassed by the crowded prior art which have been developed for the fulfillment of countless objectives and requirements.
Known prior art light holding devices include U.S. Pat. No. 5,386,350; U.S. Pat. No. 4,219,178; U.S. Pat. No. Des. 336,536; U.S. Pat. No. 4,673,148; U.S. Pat. No. 4,696,447; and U.S. Pat. No. 4,746,090.
While these devices fulfill their respective, particular objectives and requirements, the aforementioned patents do not disclose a new holder. The inventive device includes a frame having a holding portion and a pair of spaced apart arm portions which are pivotally coupled to a mounting frame. The holding portion is generally annular and has a pair of opposing ends defining a break between them. Each of the arm portions are each extended from an associated end of said holding portion. The terminal ends of the arm portions are pivotally coupled to the mounting plate which is designed for mounting to a structure. The holding portion is biased in a direction towards the mounting plate.
In these respects, the holder according to the present invention substantially departs from the conventional concepts and designs of the prior art, and in so doing provides an apparatus primarily developed for the purpose of holding a light source, especially a hand held light source, to a structure.


The present invention provides a mono-component developer comprising toner particles containing a binding resin, a colorant and an additive and a method of forming images by use thereof. In the present invention said additive is preferably a titanium compound prepared by through the reaction between TiO(OH).sub.2 and a silane compound or through the reaction between TiO(OH).sub.2 and a silicone oil. The specific gravity of the said titanium compound is in the range of 2.8 to 3.6. The average particle diameter thereof is in the range of 10 to 70 nm. The said toner particle is preferably a non-magnetic particle. By making use of the mono-component developer and the method for forming an image using it, charging of the toner, and carriage of the toner can be stabilized over a long period of time, and stable image formation can be obtained.

1. Field of the Invention
This invention is related to a mono-component developer and a method for forming an image, more particularly, it is related to a mono-component developer and a method for forming a (multicolor) image comprising the steps of: forming a thin layer of the developer on a developer-holding member by making use of said mono-component developer, carrying said thin layer to a developing region, and developing an electrostatic latent image on a latent image-holding member.
2. Description of the Related Art
In recent years, an electrophotographic dry developing process has been used in not only an electrostatic copying apparatus, but also in a printer, facsimile and copying apparatus as well as combined apparatus of copying apparatus with facsimile. It has been recently required that these apparatuses are formed in lighter and smaller sizes and satisfy ecological requirements such as economy in energy, recycling, etc. In order to satisfy these requirements, an improvement and development have been extended in a method of forming an image and developer used therefore. As a dry development process in an electrostatic copying system practically used at the present are known two kinds of development, one is two component development making use of toner and carrier such as iron powder etc. and the other is mono-component development which dose not use a carrier.
The two-component development is the most widely utilized process. This process, however, suffers from the defect that it can not maintain long term image quality because of deterioration of developer. The toner particles adhere to the surface of the carrier. This process also has a disadvantage in that large developing apparatus is necessary, since it requires a control system for toner concentration to keep the concentration of the toner in the developer constant and a mixing apparatus for mixing the newly added toner with the developer. Therefore, the demand for a mono-component development system which is able to make the developing apparatus light and small has increased.
The mono-component toner development system is classified into two types of processes, one is a magnetic mono-component development system using magnetic toner, and the other is a non-magnetic mono-component development system using non-magnetic toner. In the magnetic mono-component development system, the magnetic toner is retained by making use of a developer-holding member such as a magnet etc. equipped with a means for generating a magnetic field therein and development is carried out. The magnetic mono-component development possesses several advantages that the toner may be easily carried and controlled and internal adhesion of copying apparatus, printer, etc. is minimal. However, the magnetic toner used in the magnetic mono-component development suffers from a serious disadvantage in that it cannot be full-colored because it contains black or brown magnetite and the like therein. Further, there are limits to how much the magnetic mono-component developing apparatus can be reduced in size because the developing roll must include a magnet therein, and therefore, a developing roll of a certain size is required.
On the other hand, colorization may be feasible in a non-magnetic mono-component development system because a magnetic substance is not used in the toner. And since no magnet is used in the developer-holding member, reductions in weight and size, cost-saving, etc. are feasible. In recent years, the non-magnetic mono-component development system has been, accordingly, undertaken to be practically utilized as a small-sized full-color printer.
However, in the non-magnetic mono-component development system, the toner must be supplied and held stably on the developer-holding member and charged and developed by means of only static electric force due to the absence of stable charging and carrying means. While, the two-component development system contains a stable charging and carrying material as carrier, the magnetic mono-component development system has a magnetic force of a magnetic roll as stable charging and carrying means. Therefore, the non-magnetic mono-component development system is significantly inferior to the two-component development system or magnetic mono-component development system in maintaining high image quality over a long period of time. Particularly, in full-color copying apparatus and/or printers using four color developments of yellow, magenta, cyan and black, accurate control of developing amount is required and the toner should have strict performances such as speedy and uniform charge, good fluidity, etc. in order to cope with the miniaturization/speeding up of recent years.
In recent years, instead of corona discharge a method for applying voltage to the surface of a photosensitive material in contact with a charging material directly or via a recording material or while pressing the surface of said photosensitive material directly by the charging material or via the recording material to charge and transfer in direct as a means for charging uniformly the surface of the photosensitive material (electrostatic charged image-holding member) or for transferring a toner image on said photosensitive material as described in, for example, Japanese Patent Application Laid-Open (JP-A) Nos. 63-149669 and 02-123385 has been growing in popularity. The method for charging and transferring is superior to conventional corona discharge, since no ozone is produced and environmental resistance properties are excellent. In this method, the shear in transfer is reduced, since the surface of the photosensitive sheet holding an image is in contact with a transfer sheet(paper). Furthermore, the mono-component developing apparatus, especially the non-magnetic mono-component developing apparatus has the advantage of adapting well to shortening of the path for carrying the transfer sheet and to reduction of the diameter of the photosensitive material which result from miniaturization of image-forming apparatus required by the mono-component developing apparatus or non-magnetic mono-component developing apparatus.
However, this apparatus also has disadvantages. The transfer apparatus must have pressurization to a certain extent during the transfer step. The toner image formed on the electrostatic latent image-holding member is also effected by this pressurization and agglomeration tends to occur, so that a phenomenon of inhibition of migration of the toner to transfer material is seen. This phenomenon is particularly significant in a linear portion in the range of 0.1 to 2.5 mm. The inventors of the present invention inferred that a good deal of toner is applied to the liner portion due to the edge effect and that agglomeration occurs through pressure. The toner image (transfer image) formed at this time has the serious defect of being formed only in profile, the so called "hollow character". In this way, the mono-component developing apparatus, especially the non-magnetic mono-component developing apparatus requires a toner exhibiting prevention of "hollow character".
In order to stabilize the charging and carriage of the toner, a charge controlling agent is conventionally added. Typical examples of negative charge controlling agents may include metal-containing azo dyes, and metal-containing salicylic acid compounds. Typical examples of positive charge controlling agent may include quaternary ammonium salts etc. An addition of such charge controlling agents is effective and indispensable in the maintenance of speedy and uniform charging of toner over a long period of time. However, such charge controlling agents may fail to exert fully their effects due to the presence of additives used in combination therewith, especially externally supplied additives of fine particles for imparting fluidity.
For example, inorganic fine powders like, for example, silica etc. are added to toners. However, this method can not make the carriage of the toner to the developer-holding member and chargeability of the toner optimum at either high temperature and high humidity or at low temperature and low humidity, and has disadvantages in that poor reproducibility of image density, background fogging, dripping of the toner, and internal adhesion of the apparatus, etc. occur.
In order to reduce such disadvantages, use of surface treated inorganic fine powder has been proposed. For example, in JP-A Nos. 46-5782, 48-47345, 48-47346, 59-34539, 59-198470, 59-231550, etc. is described a hydrophobic treatment of silica fine particles. However, these inorganic fine particles can not exert satisfactory effects, especially in chargeability. In the case of using a polyester resin as the binding resin, absolutely no effect was obtained. Further, the above problem of the hollow character occurred in the contact-transfer system.
A method for treating the surface of the inorganic fine particle with silicone oil is proposed as described in, for example, JP-A Nos. 61-249059, 61-277964, etc. as a method for increasing the hydrophobic nature of the inorganic fine particle. It is known that a significant effect can be obtained through this method because of the low surface tension peculiar to silicone oil and because of the lowering of non-electrostatic adhesion between toners, and especially because of the lowering of toner agglomeration under pressure.
However, this conventional method exerts significant effects on the hollow character, but dose not solve the above problem of chargeability (environmental dependency). As a method of relaxation of the negative chargeability of the toner particles, a method of external addition of silica fine particles surface-treated with an amino-denatured silicone oil (JP-A No. 64-73354) and a method of external addition of silica fine particles surface-treated with aminosilane and/or amino-denatured silicone oil have been proposed (JP-A No. 1-237561). These methods could not, however, solve the environmental dependency problem.
Further, the non-magnetic mono-component toner should, as above described, supply and hold stably the toner on the developer-holding member by only electrostatic force and should be charged and developed. Therefore, the non-magnetic mono-component toner must be charged by friction of contact with the developer-holding member (sleeve) and the charging blade for a short time and in a small space. Therefore, the toner must be charged quickly. However, the toner to which the silica fine particles are externally added can not usually be charged quickly with edge, whether with a two-component toner or a magnetic mono-component toner. The non-magnetic mono-component toner has the disadvantages of reverse pole fogging and toner clouding (internal adhesion of the apparatus) tending to occur easily at the low temperature and low humidity at which high charge can be obtained.
As above stated, even if the silica fine particles are subjected to hydrophobic treatment, treatment for relaxation of negative chargeability, etc. the environmental dependency of the charge, charging speed and lack of charge distribution can not be improved with only the silica fine particles.
Titania can be chosen as an inorganic oxide added for the purposes of charge and fluidity. The titania usually used can be charged more quickly than silica and may presumably make the charging distribution sharp through its low resistance. However, in case where titania is added high charge can not be given to the toner and a lowering of the amount carried, lowering of reproducibility of density caused by a lowering of charge and fogging of background tend to occur more easily.
In order to improve this chargeability, whether in two-component or mono-component systems, is proposed a method for externally adding to the toner a hydrophobic titanium oxide obtained by treating the surface thereof with a silane compound, a silane coupling agent, and a silicone oil, etc. (JP-A Nos. 58-216252, 60-123862, 60-238847). Using this conventional method, the charging level of mono-component toner can be improved to a certain extent depending on the types and amounts of treating agents used. Particularly when a treatment is carried out with silicone oil, no phenomenon of hollow character occurs in the contact-transfer system. However, neither charging level nor environmental dependency can be improved satisfactorily.
Improvements in charging level and environmental dependency can be seen by increasing the hydrophobic property of the titanium oxide with a processing agent. However, this titanium oxide is significantly inferior to conventional titanium oxide with regard to its charging speed, sharpness of charging distribution, etc. after the hydrophobic treatment.
The crystals of titanium oxide can be obtained by sulfuric acid method or hydrochloric acid method from an ilmeniteore. However, when using these methods, chemical bonds formed by dehydration-condensation are naturally present in the crystal obtained. It was not easy to redisperse such agglomerated particles. Using conventional techniques this is because the derived titanium oxide forms secondary and tertiary agglomerations. The fluidity increasing effect of the toner was also significantly inferior to that of silica. On the other hand, the titanium oxide conventionally used has a specific gravity larger than that of silica and has a disadvantage in that it can not tightly adhere to the surface of the toner. It is easily removed from the surface of the toner. Therefore, the titanium oxide is inferior to silica with regard to the charge stability over a long period of time resulting from sleeve adhesion. Titanium oxide also tends to cause adhesion of photosensitive bodies, and thus deterioration of and defects in image quality.
In order to achieve compatibility of fluidity improvement with environmental dependency of charging is attempted an addition of hydrophobic titanium oxide in combination with hydrophobic silica (JP-A No. 60-136755). While the defects of each hydrophobic titanium oxide and hydrophobic silica may be temporarily depressed by this method, they are much more subject to the influence of the other additive depending upon the state of dispersion. It is difficult to control stably the defects of each hydrophobic titanium oxide and hydrophobic silica over a long period of time.
A method is proposed for adding hydrophobic amorphous titanium oxide obtained by hydrolysis to the toner (JP-A Nos. 5-204183 and 5-72797). However, while titanium oxide can improve both charging performance and fluidity of toner, much water is absorbed and contained in the particles, which remains in the photosensitive material at the time of transfer. That is to say, since adhesion between the amorphous titanium oxide and the photosensitive material is strong, only the amorphous remains on the photosensitive material without being transferred. This causes white spots on images or the photosensitive material is damaged by hard titanium oxide at the time of cleaning.
On the other hand, in a method for purifying the titanium oxide by wet process, a method is proposed for hydrolyzing a silane compound in an aqueous medium, treating the surface of the titanium oxide, taking out the titanium oxide in a state of depressed agglomeration and adding the titanium oxide thus obtained to the toner (JP-A No. 5-188633).
The titanium oxide obtained by this method can improve the fluidity of the toner more than the titanium oxide obtained by conventional hydrophobic process can, however, it does not satisfy high negative chargeability and environmental dependency. It also adversely affects the charging speed (admixing property of additional toner) and charging distribution.
When these inorganic oxides are added to the surface of the toner, a filming or fusing of toner to the layer forming material occurs because of the stress applied to the toner from the layer forming material etc. by continuous use over a long period of time, or a change in the toner chargeability occurs by removal or embedding of additives externally supplied. Thus, this conventional method can not maintain stable charging and carriage of the toner over a long period of time easily. In order to solve these problem, is proposed a use of a specific binding resin for prevention of embedding of the additives externally supplied in, for example, JP-A Nos. 6-95429, 6-102699, 6-266156, etc. And a use of specific charging-controlling agent and external additives is proposed in JP-A Nos. 6-51561, 6-208242, 6-250442, etc. However, these methods do not exert sufficient effects. Particularly, in a full-color development system in which four colors are superinposed upon each other, the amount of developing toner development must be controlled very accurately. Therefore, there still remain unsolved problems with regard to the charging amount and long term-stabilization of carriage amount of the toner.
At present, the methods for forming an image adopted in a full-color copying apparatus or printer making use of electrophotographic systems, are exemplified by a-1) a system in which four developing apparatuses are arranged around the photosensitive material and steps of charging, exposure and development are repeated with respect to each toner in four cycles, and a-2) a system in which the charging, exposure and development of four color toner are carried out in one cycle, as well as a-3) a system in which four apparatuses of each charging apparatus, exposure apparatus, developing apparatus and transfer apparatus are disposed in one single apparatus and the toner images are superimposed.
As the system in which four color toners are superinposed are exemplified by b-1) a system in which a toner image formed on the photosensitive material is transferred and superimposed color by color onto a transfer drum around which transfer paper is wound, b-2) a system in which a toner image formed on the photosensitive material are transferred to an intermediate transfer sheet, and color toner images are superimposed on to the transfer sheet and then transferred collectively to the transfer sheet, and b-3) a system in which color toner images are superinposed on to the photosensitive material, and then transferred collectively to the transfer sheet.
While these methods have advantages and disadvantages in printing speed, apparatus size, etc., they are at present utilized according to the objects of the users.
The above systems b-2) and b-3) have the following advantages; (1) system b-2) has good transfer paper carrying properties; and (2) system b-3) is capable of being reduced in size because use of an intermediate sheet is unnecessary. However, these two methods have the disadvantage that transfer of toner images formed on the bottom layer of the transfer paper is difficult because the toner images ultimately transferred to the transfer paper become multilayered.
The full-color development has problems in common that the chargeability of the toner varies over repeated use, and thus the tone of the image changes. However, there has been no method for forming multicolor images able to simultaneously satisfy the problems.
In order to improve the transferring property of the above superimposed toner image in addition to stabilizing the above charging amount, it is necessary that a reduction in adhesion between the toner and the photosensitive material and a reduction in adhesion between the toner and intermediate transfer sheet are made.

Mono-component developer, method of forming image and method of forming multi-color image


Insulating films formed on side walls of a gate electrode are removed for a self-alignment to selectively implant impurities only into end portions of a source region and a drain region. Therefore, p.sup.+ -type semiconductor regions are selectively formed only on sides near a channel region of the source and the drain regions. A punch through of the source or drain region is prevented by the p.sup.+ -type semiconductor regions controlling an inversion threshold voltage. Therefore, the impurity concentration of the p-type substrate can be settled low, and the semiconductor transistor device can be miniaturized without increasing a parasitic junction capacitance. Moreover, since the impurity concentration in the channel region is ununiform, a drivability of the transistor can be increased. As a result, a semiconductor transistor device with a high withstand voltage and a high drivability in which the inversion threshold voltage can be easily controlled, and a method for producing the same are provided.

1. Field of the Invention
The present invention relates to a semiconductor transistor device with a high packing density and a method for producing a miniaturized semiconductor transistor device capable of high speed operation.
2. Description of the Prior Art
A semiconductor transistor device having a high packing density such as an LSI has recently been developed to have a smaller element size. Such a development has brought problems such as the decreasing of a withstand voltage of transistors and an instability of an inversion threshold voltage of transistors.
Referring to the attached drawings, a production method for a conventional metal-oxide-semiconductor type field effect transistor (MOS transistor) will now be described. FIGS. 14A through 14D show an example of the production method of a conventional n-channel type MOS transistor.
As is shown in FIG. 14A, boron ions are implanted into a p-type semiconductor substrate 1 to form a p.sup.+ -type semiconductor region 10, which is then oxidized to form a gate insulating film 3 with a thickness of 8 to 12 nm.
After depositing a polysilicon film with a thickness of 200 to 300 nm on a top surface of the gate insulating film 3, a polysilicon gate electrode 4 is formed through ordinary photolithography and etching processes as is shown in FIG. 14B. Next, phosphorus ions are implanted into the substrate 1 by an ion implantation using the gate electrode 4 as a mask, thereby forming n.sup.- -type semiconductor regions (LDD regions) 6a and 6b as part of a source region and part of a drain region, respectively.
A silicon oxide film is deposited on the top surface of the patterned substrate 1, and then main portions of the deposited film are removed by an anisotropic dry etching so as to allow side wall spacers 5a and 5b to remain on side walls of the gate electrode 4 as is shown in FIG. 14C. Then arsenic ions are implanted by the ion implantation using the gate electrode 4 and the side wall spacers 5a and 5b as a mask, thereby forming n.sup.+ -type semiconductor regions 7a and 7b, which are parts of the source region and the drain region, respectively. Next, the substrate 1 is heat treated at 900.degree. C. for 30 minutes in order to activate the arsenic ions in the n.sup.+ -type source and drain regions 7a and 7b and repair crystal defects (lattice damages).
An interlevel insulating film 11 is deposited in an ordinary manner as is shown in FIG. 14D. After etching contact portions in the interlevel insulating film 11 to form contact holes, metal electrodes 12a and 12b are formed to contact with the n.sup.+ -type source and regions 7a and 7b.
An operation of the n-channel type MOS transistor with the above-mentioned structure will now be described. The p+-type semiconductor region 10 serves to prevent a punch through effect, that is, an effect in which a drain depletion layer of the transistor is extended and the withstand voltage is decreased. In addition, an impurity concentration of the p.sup.+ -type semiconductor region 10 determines the inversion threshold voltage of the MOS transistor. The n.sup.- -type LDD regions 6a and 6b serve to decrease the strength of electric fields near the source and drain regions so as to prevent the MOS transistor from degrading due to a hot carrier injection.
Alternatively, a similar result can be attained by increasing an impurity concentration of the p-type semiconductor substrate 1 or using a p-type well with a high impurity concentration instead of forming the p.sup.+ -type semiconductor region 10 in the device of FIGS. 14A through 14D. However, in such a device having an increased p-type impurity concentration, there are some problems to prevent attaining a miniaturization and a high speed operation of the MOS transistor.
The conventional MOS transistor, in which the p.sup.+ -type semiconductor region 10 controls the inversion threshold voltage and increases a voltage at which the punch through is caused (hereinafter called the "punch through withstand voltage") has the following problems:
1. The junction capacitance is increased due to a high impurity concentration near pn-junctions of the source region and the drain region. Such a large junction capacitance makes it difficult to operate a circuit at a high speed.
2. When the impurity concentration of the p.sup.+ -type semiconductor region 10 is increased to prevent the punch through, the inversion threshold voltage is inevitably increased and the drivability (transconductance) of the MOS transistor is decreased. In other words, it is difficult to get satisfactory values for all of the punch through withstand voltage, the inversion threshold voltage and the drivability.
3. A substrate bias effect in which the electrical characteristic of the MOS transistor depends upon an electrical potential of the substrate 1 is reinforced by the existence of the p.sup.+ -type semiconductor region 10.
4. Since a heat treatment at a high temperature such as 900.degree. C. or more must be conducted in order to activate the impurities after forming the n.sup.+ -type source and drain regions, a short channel effect is reinforced because the n.sup.- -type LDD region is diffused and an effective channel length of the transistor is decreased.

Method for making semiconductor transistor device by implanting punch through stoppers

Matsushita Electric Industrial Co., Ltd.


According to the present invention, a photomask for providing a pattern to a resist applied on a substrate is provided. The photomask includes a light blocking region forming a boundary between a first region and a second region on the substrate. A width of the light blocking region is such that the light blocking region is not projected on the resist.

1. Field of the Invention
The present invention relates to a method for producing a mask ROM and a photomask used for such a method.
2. Description of the Related Art
A mask ROM of the type to which the present invention relates is a semiconductor memory, on which data is written by placing a resist over a plurality of memory cells arranged in a matrix, exposing the resist to light via a photomask so as to pattern the resist, and then selectively processing the memory cells. The mask ROM may, in some cases, form a part of a semiconductor device.
FIG. 10 illustrates an example of a photomask, where the white portions block light while the black (hatched) portions transmit light. In this photomask, memory cell regions 101 respectively correspond to the memory cells of the mask ROM while slits 102 correspond to boundaries between the memory cells.
Each of the memory cell regions 101 is slightly smaller than a memory cell of the mask ROM and is formed to occupy the inside of the memory cell and to form the slits 102 between the memory cell regions 101. Such an arrangement prevents light, which is supposed to be transmitted through the memory cell region 101 and to irradiate a portion of the resist over the corresponding memory cell, from leaking to and influencing the adjacent memory cells.
For example, in the case where data is written by selecting memory cells with a resist pattern and implanting an impurity into the selected memory cells, if light leaks out of the selected memory cells to adjacent memory cells, thereby disordering the resist pattern, the impurity may diffuse out of the selected memory cells into the adjacent memory cells. In such a case, an error occurs in the data to be written, thereby leading to performance abnormality of the mask ROM and lowering the production yield thereof.
For example, when the length of a side of the memory cell region 101 is about 0.8 to 0.9 .mu.m, the width of the slit 102 is set to about 0.4 .mu.m, so as to avoid the influence of light leaking to adjacent memory cells.
However, light leaking out of the memory cell region 101 consequently reduces the width of a linear portion of the resist pattern corresponding to the slit 102. In such a case, the linear portion may be collapsed or stripped off. The collapsed or stripped linear portion leads to circuit defects. This problem is more prominent when the slits 102 are provided in a parallel stripe pattern than when provided in a matrix as illustrated in FIG. 10.
On the other hand, when the width of the slit 102 is increased in order to avoid the above-described problem, the total area of the slits 102 increases. This makes it difficult to increase the density of memory cells and to downsize a mask ROM, thereby increasing the production cost thereof.
In view of this, an arrangement such as that illustrated in FIG. 11 has been proposed (see Japanese Laid-Open Publication No. 6-13250). In this arrangement, memory cell regions 111 for transmitting light are connected to one another so as to eliminate the slits between the memory cell regions 111, while memory cell regions 112 for blocking light are connected together so as to eliminate slits between the memory cell regions 112.
However, when a resist pattern illustrated in FIG. 12 is formed by using the photomask illustrated in FIG. 11, the four corners of each covering portion 113 and 113' of the resist pattern corresponding to the light blocking portions 112 and 112' of the photomask will be rounded off due to the optical diffraction occurring at the four corners of the light blocking portions 112 and 112' of the photomask. In such a case, light may leak to and influence the memory cells under the covering portions 113 and 113', thereby generating data errors.
In an attempt to prevent the corners of the resist pattern from being blunt and rounded off, another arrangement has been proposed (see Japanese Laid-Open Publication No. 7-147334). In this case, as illustrated in FIG. 13, an auxiliary pattern 123 is provided at each corner of a light transmitting portion 122 formed of light transmitting memory cell regions 121.
However, when such an auxiliary pattern 123 is used, the amount of information required to represent a photomask pattern increases because the pattern is then defined by smaller units, whereby the number of addresses designating the units increases. This significantly increases the data processing time. Moreover, it will also require fine processing of the resist, making the production thereof difficult, and thereby increasing the cost of a photomask as well as the cost of a mask ROM.
Moreover, although the auxiliary pattern 123 is favorable for the light transmitting portion 122, it is not favorable for a part 124 of the light blocking portions adjoining the light transmitting portion 122, and does not prevent this part 124 from being deformed. That is, such an auxiliary pattern is not appropriate for improving both the resolution of the light transmitting portions and the resolution of the light blocking portions of a photomask at once. In order to improve both of the resolutions at once, the number of types of the auxiliary pattern needs to be increased, which further complicates the photomask pattern.

Method for producing mask ROM and photomask used therefor


A composite material according to the present invention, is composed of SiC, SiO2, at least one out of Al and Si, with He leak rate of 1.3×10−10 Pa·m3/sec or below, thereby providing a composite material, which has a higher vacuum air-tightness, an excellent thermal conductivity, an adjustable coefficient of thermal expansion, small variation in strength and higher reliability, and a method for manufacturing the composite material, and a wafer holding member including the composite material.

1. Field of the Invention
The present invention relates to a composite material, which is composed of a ceramic component and a metallic component, and a method for manufacturing the composite material and a wafer holding member including the composite material. The present invention also relates to a wafer holding member for holding a wafer, such as semiconductor substrate or a substrate for liquid crystal, either in a deposition process, such as CVD (Chemical Vapor Deposition), PVD (Physical Vapor Deposition), sputtering, SOD (Spin-on Dielectric), SOG (Spin-on Glass), or in an etching process, and a method for manufacturing the wafer holding member.
2. Description of the Related Art
A composite material composed of a metal and a ceramics has characteristics that a coefficient of thermal expansion can be optionally adjusted by changing the ratio of metal to ceramics, with a desired thermal conductivity by selecting metallic species having a higher thermal conductivity and ceramic species. In a heat dissipation substrate for an IGBT (Insulated-Gate Bipolar Transistor) for example, in order to remove heat emitted from an IC chip, which is soldered to a Cu-metalized film on a ceramic substrate, the above-mentioned composite material is joined to the back of the ceramic substrate with metal adhesives or the like so as to function as a heat sink.
In addition, some composite materials are increasingly developed in the field of semiconductor manufacturing apparatus. In a semiconductor wafer process for manufacturing a semiconductor device, e.g., in either a deposition process, such as CVD, PVD, sputtering, or an etching process, it is important to deposit a homogeneous film having a uniform thickness on an objective wafer and to form an etching having a uniform depth on the deposited film. Therefore, a wafer holding member, which can facilitate temperature control of the wafer, is used. For the wafer holding member, for example, an electrostatic chuck includes a plate base, one principal plane of which serves as a placing surface for a wafer; and an internal electrode for attraction, which is provided near the placing surface of the plate base, wherein the wafer is held on the placing surface by generating an electrostatic attracting force between the wafer on the placing surface and the internal electrode.
Further, there is another type of wafer holding member which can heat up the wafer, where another internal electrode for heating is provided in the vicinity of another principal plane of the plate base. Both the internal electrodes for attraction and heating are electrically connected to feeding terminals, respectively. When the wafer is placed on the placing surface and a voltage is applied to the feeding terminals, the electrostatic attracting force is generated between the wafer and the attracting electrode so that the wafer is firmly held on the placing surface. Coincidentally, the wafer can be also heated up to a high temperature.
In yet another type of wafer holding member, the undersurface of which is joined with a metal plate, applying an RF voltage between the plate and an opposite electrode (not shown) can efficiently generate plasma above the wafer.
Recently, for internal wiring in a semiconductor device, conventional aluminum wiring is gradually shifted to copper wiring. In the copper wiring, heating a wafer up to a high temperature is not required. A wafer holding member having an electrostatic attracting function of holding the wafer around a room temperature is needed. The wafer mounted on the placing surface of the wafer holding member is exposed to plasma, including Cu or Ar, with the temperature rising up. In order to suppress the rise in temperature, there is a cooling approach where a plate, which is formed of a composite material having a higher thermal conductivity of 150 W/(m·K) or more, either composed of Al and SiC or composed of Al, Si and SiC, is joined to the wafer holding member with a brazing material or solder, so as to remove heat from the heated wafer subjected to plasma, including Cu or Ar, by water-cooling or air-cooling the plate. Such a plate, formed of a composite material, joined to the wafer holding member as used under the condition as described above requires the thermal conductivity of 160 W/(m·K) or more, the coefficient of thermal expansion close to that of the ceramics used in the wafer holding member, and the He leak rate of 1.3×10−10 Pa·m3/sec or below.
The prior document 1 (Japanese Patent Unexamined Publication (kokai) JP-A-10-32239 (1998)) proposes an electrostatic chuck, as shown in FIG. 4, including a plate base 24 of ceramics, in which an electrode 20 for electrostatically attraction is embedded, and a plate 23 composed of ceramics and Al, which is joined to the plate base 24. SiC is proposed as a ceramic component included in the plate 23. A approach where the plate base 24 and the plate 23 are joined to each other using a brazing material or solder by selecting a joint temperature in a range of 150 to 630 degree-C. corresponding to the ratio of the ceramic component in the plate 23 is also proposed.
The prior document 2 (Japanese Patent Unexamined Publication (kokai) JP-A-15-155575 (2003)) proposes another approach where a plating film is provided on a surface of a composite material composed of aluminum and SiC for joining other objects. Each plate described in the prior document 1 or 2 is composed either of ceramics and Al or of SiC and Al, and basically porous. Because of the difference in coefficient of thermal expansion between the fused metal and the ceramics like SiC, pores are created in cooling process after impregnating a ceramic preform with the fused metal or after casting a mixture of the fused metal and the ceramic into a mold, based on the difference in contraction due to the difference in coefficient of thermal expansion between the metallic species and the ceramic species.
The prior document 3 (Japanese Patent Unexamined Publication (kokai) JP-A-3-3249 (1991)) proposes yet another approach where a water-cooled electrode formed of Al and an electrostatic chuck formed of ceramics are joined to each other on a joint plane having a plating of In film at a temperature of 170 degree-C. or below.
The prior document 4 (Japanese Patent Unexamined Publication (kokai) JP-A-2003-37158) proposes an electrostatic chuck, as shown in FIG. 5, including a base 34, an insulating layer 36 formed on the base 34, an electrode 37 provided thereon, and a dielectric layer 38 provided for covering the electrode, characterized in that a metal layer 35 is formed on the surface of the base 34, and the base 34 is formed of a metal-ceramic composite material compounded of metal and ceramic powder, and the dielectric layer 38 has a volume resistibility value of 1×108 to 5×1013 ohm·cm.
The prior document 5 (Japanese Patent Unexamined Publication (kokai) JP-A-2003-80375) proposes a wafer holding member in which a metal member and a ceramic member are joined to each other via a metal layer.
However, since the above-mentioned composite plate, composed either of two components of Al and SiC or of Al, Si and SiC, is porous itself, when the plate base serving as a wafer holding member and the plate are joined to each other using a brazing material or solder, it cannot maintain vacuum gas-tightness of 1.3×10−10 Pa·m3/sec or below in terms of He leak rate, which is required for a semiconductor manufacturing apparatus.
The wafer holding member used for a leading-edge semiconductor manufacturing process requires the He leak rate of 1.3×10−10 Pa·m3/sec or below, the Weibull modulus, indicating variation in strength of the material, of 5 or more, the thermal conductivity of 160 W/(m·K) or more, and the coefficient of thermal expansion of 4×10−6 to 6×10−6/degree-C., close to that of the ceramics. The conventional composite material cannot simultaneously satisfy all the factors of He leak rate, variation in strength, thermal conductivity and coefficient of thermal expansion.
Further, a higher thermal conductivity is needed for removing efficiently heat of the Si-wafer heated by plasma. A wafer holding member, in which a plate base and a plate of Al are joined to each other using Al-brazing or In-brazing in order to increase the thermal conductivity, has a problem that the plate base is cracked under a thermal shock cycle of −40 to 100 degree-C., which is required for a deposition apparatus, such as CVD, PVD and sputtering, or an etching apparatus, because of the large difference in coefficient of thermal expansion between the plate of Al and the plate base.
Furthermore, when the composite plate, composed of two components of aluminum and SiC, and the ceramic plate are joined to each other using metal, wetting between the aluminum and the metal joint layer is not so good. Even though the composite plate of two components and the ceramic plate are integrated using metal joint, pores are likely to be created in the joint interface because of the bad wetting between the metal joint layer and the aluminum. The resulting pores cannot ensure the reliability under the thermal shock cycle of −40 to 150 degree-C., which is required for a deposition apparatus, such as CVD, PVD, sputtering, SOD or SOG, or an etching apparatus, even using the conventional manufacturing method as proposed in the prior document 1 (JP-A-10-32239) or 4 (JP-A-2003-37158).
Since the deposition apparatus, such as CVD, PVD, sputtering, SOD or SOG, or the etching apparatus employs a process in vacuum, a placing surface 20a of the wafer holding member is exposed to a high vacuum and a composite plate 23 is used in the ambient air.
Then, a coolant gas, such as Ar, is introduced through a gas feeding hole 21. A joint material 22 is generally subject to a kind of thermal shock cycle of −40 to 150 degree-C. Therefore, the reliability of the joint material 22 is required.
In FIG. 4, showing the conventional example, when using for an electrostatic chuck, some gas species is introduced to the back of a Si wafer through the gas feeding hole 21. The joint material 22 requires the vacuum gas-tightness as much as 1.3×10−10 Pa·m3/sec in terms of He leak rate. The composite plate is composed of two components of aluminum and SiC. In case metal is used for the joint material, wetting between the aluminum and the metal joint material is bad, resulting in minute pores created between the metal joint material and the aluminum. It is difficult to maintain the reliability under the thermal shock cycle.
Further, after depositing a desired film on the wafer attached onto the placing surface using CVD, PVD, sputtering, SOD or SOG in a vacuum chamber or etching, it is necessary to release the wafer from the placing surface immediately to proceed the next process. But there is a problem on residual attracting force, that a force for attracting the wafer remains because electric charges, which have been accumulated on the placing surface 20a after applying voltage to the electrode 20 for electrostatic attraction to attract the wafer to the placing surface 24a and then turning off the applied voltage to release the wafer on completion of a deposition or etching process, is not neutralized immediately. While the residual attracting force emerges, there are some problems that the wafer cannot be released even in an effort to put the wafer off the placing surface 20a, positioning of the wafer is out of order if released, or at its worst, the wafer is broken when the wafer is forced to be released form the placing surface.
Furthermore, there is a possibility that the residual attracting force emerges after repeating about 10,000 times a step for applying voltage to the electrode for electrostatic attraction through feeding terminals to attract the wafer W by generating an electrostatic attracting force, a step for depositing or etching on the wafer W in a vacuum chamber, and a step for turning off the voltage applied to the feeding terminals to release the wafer W on completion of depositing or etching.

Composite material, wafer holding member and method for manufacturing the same


A method and apparatus are provided for the collection of vehicle operating data in a motor vehicle diagnosis or analysis system. One or more motor vehicle operating or drive symptoms are utilized to access a database which identifies the most appropriate cause parameters for the drive symptom or symptoms. The database correlates entered operating or drive symptoms with system problems and, more particularly, with specific system parameters which can be monitored by connection to corresponding vehicle operating data access points. The drive symptom diagnostic method and apparatus thus identify appropriate data access points to monitor, such as conductors or pins of a connector associated with an identified motor vehicle which is experiencing problems. Once the appropriate access points are identified, pertinent vehicle operating data is collected from these data access points either when the vehicle is being serviced, as at a dealership or service garage, or when the vehicle is being driven.

The present invention relates generally to engine and vehicle analyzers and, more particularly, to a method and apparatus for diagnosing engine and/or vehicle system faults based on vehicle operating or drive symptoms by identifying specific conductors of an on-board control system connector which need to be monitored to obtain parameter data required to diagnose corresponding system failures.
Engine and vehicle analyzers have been around in various forms for some time. The recent extensive incorporation of computer control, sensors and other electronic and electrical components into motor vehicles to control engines and other vehicle operating systems has forever changed vehicle servicing. While engine and/or vehicle analyzers used to be optional or convenient for motor vehicle servicing, they now are a virtual necessity for assisting a mechanic in analyzing vehicle operating problems.
The inability to perform comprehensive diagnostic testing of systems including such components in the field can result in great inefficiencies and expenses. For example, it is often difficult to determine whether an operating problem resides in a vehicle's engine or transmission. As a result, the majority of transmissions which are removed and returned to the factory for repair turn out to be fault free. In most of the remainder of the returned transmissions, the problem can be corrected by a minor adjustment at the factory which easily could have been made in the field had the proper diagnosis been made.
A complicating factor in diagnostic testing is the proliferation of many different computer and/or electronically controlled systems. Differences can be substantial for different makes of cars, for different models from the same manufacturer, and even the same model line from year-to-year. The different systems are generally accompanied by different interfaces and data formats that limit any particular testing unit to only a relatively small number of vehicles. Stocking a large number of different monitors to accommodate the various makes and models is expensive, inefficient and wasteful. However, it is oftentimes difficult if not impossible to perform adequate field service without the use of these analyzers as previously noted.
Another problem is the difficulty of simulating normal driving conditions within the confines of an automotive repair facility, while at the same time monitoring the various systems to determine the location and nature of any malfunctions. Also, some automotive problems are intermittent and do not show up in a single test run. Such intermittent problems require the monitoring of a vehicle's performance over a sufficient, possibly long, period of time such that data representative of a failing or faulty component can be collected when an intermittent malfunction does occur to enable effective diagnostic analysis. Unfortunately, adding to all these problems is the fact that the collection of significant data relies upon the ability of the technician making the analysis. Accordingly, appropriate data may not be collected for hard faults much less intermittent faults.
It is thus apparent that there is a continuing need for improved diagnostic methods and apparatuses which can be used to diagnose motor vehicle system problems. For simplicity sake, the diagnosis preferably would be based on vehicle operating or drive symptoms which can be readily identified by an operator of a motor vehicle or by service personnel.

Method and apparatus for diagnosing engine and/or vehicle system faults based on vehicle operating or drive symptoms


An adapter for automatically dispensing any aromatic, deodorizing, cleansing, sanitizing fluid directly into the bowl of a recreational vehicle toilet as a result of operating either the bowl rinse or the bowl flush control. An apparatus adapted to toilets installed in recreational vehicles, travel trailers, an marine craft. Because it passively senses the presence of toilet inlet rinse water flow, the apparatus achieves its objective without making modifications to, and is totally independent of, the RV plumbing system. The adapter utilizes an electronic control unit which employs the electrically conductive property of water to detect the flush and the refill operations of the RV toilet. Upon detecting fresh water entering the toilet, the electronic control unit energizes an electric solenoid valve which releases a metered amount of chemical additive fluid directly into the toilet bowl. The chemical additive flow rate is fully adjustable by the user, and the chemical fluid reservoir is refillable.

1. Field of Invention
This invention relates to an adapter for automatically dispensing any type of scented, colored, cleansing or disinfecting liquid chemical directly into the bowl of a toilet installed in a recreational vehicle (RV). The toilet would be a typical RV toilet connected to a pressurized fresh water supply. Such recreational vehicles include motorhomes, travel trailers and marine craft. This invention is adaptable to both existing RV toilets and newly purchased RV toilets.
2. Description of Prior Art
Contemporary RVs have toilet systems which retain their waste water inside large compartments called holding tanks. Usually, holding tanks are installed directly beneath the RV toilet, immediately under the toilet room deck. With the toilet situated directly above the holding tank, it can flush directly into the holding tank without the use of a soil trap, thereby using a minimum amount of water in the process. Usually there is merely a vertical soil pipe which carries the waste from the RV toilet to the holding tank. Holding tanks are normally large enough to store waste water for a long enough duration until the owner finds it convenient to release the waste at an approved sewage dumping facility.
Even though the implementation of holding tanks has been very successful, the addition of chemicals to a holding tank has always been necessary for deodorizing the holding tank and enhancing the decomposition of waste. There is a possibility of the holding tank interior getting soiled and smelly if the owner neglects to add the chemicals before using the RV toilet. Usually, the additive chemicals are pre-measured liquids or powders, and are sent to the holding tank by flushing them directly down the toilet. In other instances, the owner needs to measure an amount of chemical before flushing it down the toilet. Sometimes, the RV gets used only for a small outing and then much of the chemical gets wasted from subsequent emptying of the holding tank when returning home.
Understandably, holding tanks can produce noxious odors which will migrate upward through the toilet bowl and into the RV interior spaces. However, RV toilets are internally constructed to seal shut at the base of the toilet bowl, thereby sealing off odors from the holding tank. Commonly, RV owners take advantage of the toilet's ability to seal at its base by leaving a preferred amount of water in the bowl. The ability of the RV toilet bowl to be prefilled with fresh water, much like a common household toilet, continues to give rise to the possibility of having colored, deodorized water standing in the bowl. Chemically-treated fresh water in the bowl of an RV toilet contributes to deodorizing both the RV toilet and bathroom. The same chemical additive would then enhance the overall treatment of waste in the holding tank. An understanding of the primary differences between household toilets and RV toilets will yield an appreciation as to why chemically treated additives in RV toilet bowls are not commonly found.
RV toilets are usually fitted with a combination-control lever which allows the option of either pre-filling the toilet bowl with the desired amount of water, or the dual-action of releasing toilet waste to the holding tank while allowing inlet-fresh water to rinse the toilet bowl. Because they are water frugal devices, RV toilets are not fitted with flush-water tanks behind the bowl as found on household toilets. The existence of flush-water tanks has made the use of water coloring, deodorizing and sanitizing chemicals convenient and safe for household toilets. By design, household toilet flush-water tanks maintain a safety air-gap between the water standing in the flush-water tank and the water in the supply line which prefills the tank. The air-gap, along with an overflow tube which dumps excess water directly to the toilet bowl, ensures against the possibility of chemical additives back-flowing into the household fresh water supply lines. Chemicals readily usable in household toilet flush-water tanks are found in dissolvable cake or tablet form.
Since RV toilets are not designed with flush-water tanks, such tank-installed chemical accessories for pre-deodorizing, coloring, and sanitizing toilet flush water are not employable. Consequently, with the absence of a flush-water tank, prefilling the RV toilet bowl with aromatic, colored, sanitizing chemicals has been a challenge to inventors.
Prior art remedies have mainly focused on the insertion of chemical additives into the water carried by the RV toilet inlet plumbing. The most popular technique has involved the use of chemical-mixing canisters which become pressurized by the RV fresh water supply line. Using the technique of inserting chemicals into the toilet water inlet line gives rise to the danger of chemical contamination of the RV fresh water supply. To counteract this possibility, prior art inventions have made use of one-way check valves installed in the fresh water supply tubing, upstream of the chemical canister. However, the eventual failure of the one-way check valve, due to hard water buildup and degradation of internal one-way check valve components, could cause serious physical harm to the RV occupants.
The crafty implementation of combining a safety air-gap as found in household toilet flush-water tanks, along with the additional safety assurance of a one-way check valve is exhibited in U.S. Pat. No. 4,841,578 issued to Mr. Al Mercer (1989). Unfortunately, his invention requires severing the toilet inlet water line and installing a bulky, multi-functional canister and trap assembly. Usually, RV bathrooms are small and space for such bulky components is seldom available; especially behind the toilet.
Another respectable invention which inserts chemical additives into the water entering the toilet is presented in U.S. Pat. No. 4,262,372 awarded to Donald F. Ryder (1981). Mr. Ryder's invention is typical of prior art which modifies the plumbing system and specifies the installation of a one-way check valve to keep the chemical concentrate from contaminating the RV fresh water source.
Also of merit, is U.S. Pat. No. 4,873,727 awarded to Donald A. Homan (1989) which exhibits a variation of the chemical mixing chamber. As usual, his chemical mixing chamber is installed into the toilet water inlet line. Mr. Homan's invention also utilizes a variety of one-way check valve referred to as an "anti-siphon valve". In this application, the anti-siphon valve is used as a performance enhancement rather than that of safety. Mr. Homan's invention was designed strictly for a marine toilet using sea water for its flush cycle, making a safety-check valve unnecessary. In addition to being limited to marine use, Mr. Homan's invention shares limitations in common with those of Mr. Mercer's and Mr. Ryder's.
All prior art cited utilize a variety of mixing containers which allow the combining of toilet flush water with concentrated chemicals. Unfortunately, this technique will produce non-linear concentrations of additive throughout the life cycle of each chemical replenishment, and is the effect of continued dilution of the chemical by water passing through the canister.
A later patent, U.S. Pat. No. 5,142,707 awarded to Frederick Prue (1992), specifies the installation of a chemical injection unit with numerous fluid gate valves. This invention is limited to marine craft toilets designed with salt-water flushing systems, requires through-hull component installations, and has many expensive, space-consuming parts.
Typical with all cited prior art is the lack of control offered to the toilet user. If, for example, the user finds the deodorization too strong, provisions for variably controlling the concentration of chemical additive are rarely furnished. Additionally, none of the prior art cited offers the convenience of a simple on/off switch.
Consequently, a new approach is needed for the design of an RV toilet chemical dispenser. Such an approach should make use of newer technology in fulfilling the above stated need for deodorizing, sanitizing, coloring, and generally treating toilet flush water in all classes of RVs.

Automatic liquid chemical additive dispenser for recreational vehicle toilets


A balance beam has an elongated beam member having opposite ends, a center portion, a top and a bottom, with legs on the bottom thereof adjacent the ends. Each leg has an upper and a lower end. A resilient support assembly is mounted within the elongated beam adjacent the ends thereof with each support assembly having a depending clevis extending downwardly therefrom with each clevis being pivotally secured to one of the upper ends of the legs. The legs extend downwardly and outwardly from the support assembly in the plane of the beam member so that the lower ends thereof dwell substantially under the ends of the beam member. Elongated links are pivotally secured by their ends to one end of the beam and one end of each of the legs to hold the beam member in an erected elevated horizontal position. Each leg has an upper portion that extends downwardly and outwardly from the clevis, and a lower portion that extends downwardly and outwardly from the upper portion, with the upper and lower portions having center axes forming an obtuse angle with respect to each other. The resilient support assembly is positioned within the beam and has two end blocks rigidly secured to the beam. An intermediate block is slidably mounted between the end blocks and is associated with the clevis. The resilient element is located between the intermediate block and the end block nearest the center portion of the beam member so that when a vertical force is applied downwardly on the top of the beam, the resilient element will yieldingly resist the sliding of the intermediate block towards the center portion. The legs on the beam are vertically adjustable and have an assist spring interposed between telescoping portions of the legs to assist the lifting of the beam during the height adjustment process.

The balance beam has long been a poplar piece of gymnastics equipment. Efforts have been made to provide balance beams with some reflex action to absorb the impact of gymnasts performing thereon. However, such beams do not stay constant at any height adjustment, and get more flexible at lower heights.
Further, existing balance beams sometimes cause the legs of the beam to be extended so far that they require different floor mats for certain height adjustments of the legs. In addition, existing balance beams often are complex in assembly.
It is therefore a principal object of this invention to provide a balance beam that can be easily adjusted in height from 100 CM to 125 CM in 5 CM increments.
A further object of this invention is to provide a reflex action utilizing a urethane spring wherein various durometer values can be used to create different degrees of balance.
A still further object of this invention is to provide a balance beam that is very quiet in operation and stable in its reflex action.
A further object of this invention is to provide a balance beam whose height can be easily and quickly adjusted.
These and other objects will be apparent to those skilled in the art.