A device and a method of forming a floating gate memory transistor of very small area, thereby allowing a high-density integrated circuit chip, more specifically for Erasable Programmable Read-Only Memory (EPROM) or similar non-volatile devices.. In a first embodiment, a method is disclosed that fabricates a programmable memory cell described as a "diffusion cut" cell where a plug-type floating gate contact hole cuts through a diffusion region and partially into a substrate region. In a second embodiment, a method is disclosed that fabricates a programmable memory cell described as an "oxide cut" cell, where the plug-type floating gate contact hole only penetrates a silicon oxide layer. This "oxide cut" cell is formed in a similar fashion except penetration does not go into the diffusion region or substrate.

The non-volatile memory function of EPROM memories is based on the storage of charge. EPROM memory transistors are all of the floating gate type, which means that the charge is stored on an additional polysilicon layer, located between the control gate and the substrate of a transistor. This type of memory cell can consist of only one transistor. The presence or absence of charge on the floating gate determines whether the cell will conduct current or not, which defines the two logic states. Present EPROM devices all use channel hot electron (CHE) injection to bring electrons onto the floating gate, and ultra-violet (UV) light is used to erase the memory. CHE injection programming is accomplished by applying a higher voltage (12 V) to the cell control gate. CHE programming is also used to store charge on flash-EPROMs. Another non-volatile memory floating gate device is the electrically erasable read-only memory (EEPROM) which is also programmed with the 12 volt gate signal.
In the IC chip industry, it is a continuing objective to reduce the size of each individual cell to allow packing more devices on a single chip, i.e., higher density. Since it has become clear that CHE programmable transistors are to be used in high-density EPROMs, technology has been adapted in order to yield fast-programmable, high-density floating gate EPROM structures. The efficiency of the CHE programming process is largely dependent on substrate (and drain junction) doping level, effective channel length, and floating gate-drain junction overlap. One method that can achieve high density is by using the self-aligned double polysilicon stacked gate structure, in which the drain/source junctions are self-aligned with respect to the floating gate and in which the double polysilicon stacked gate structure is etched in one step, usually by means of an anisotropic dry etching process.
There are certain problems associated with extremely short channels. Included in these so-called "short channel effects" are: (1) failure of the drain current to saturate at large V.sub.DS ; (2) increased subthreshold current; (3) reduction of threshold voltage V.sub.t ; and (4) in the extreme, a loss of the ability of the gate to control gain. Consequently, much of the present-date MOSFET design effort is devoted to producing transistors that are physically small but still exhibit the electrical characteristics similar to those of physically long channels.
It is the purpose of this invention to provide a memory cell of minimal surface area, i.e., one square micron or less, yet maintain the electrical characteristics of a larger area device.


An area array semiconductor device (10) having a lid with functional I/O contacts can be manufactured. In one embodiment, a semiconductor die (12) is mounted in a die cavity (16) of a substrate (14). A plurality of wire bonds (20) connect the die to conductive traces (18) on a surface of the substrate. A lid (22) having conductive traces (26) on an inner surface, which are electrically interconnected to an area array of contact pads (28) on an outer surface by a plurality of plated through-holes (30), is attached to the substrate with an anisotropic conductive adhesive (32). The adhesive electrically connects the conductive traces on the substrate to the conductive traces on the lid. A plurality of conductive pins (34) are attached to the area array of contact pads to provide one method of mounting the device to a board.

Semiconductor devices are used in the electronics industry in various types of consumer products, such as pagers, phones, portable equipment, computers, and the like. It is desirable to minimize the size of these semiconductor devices because board space can be limited. However, for a semiconductor device having increased functionality which results in high input/output (I/O) connections, the resulting packaged device can be larger than desired. One approach to packaging devices having high I/O connections has been a package having an area array configuration, which allows higher density connections than a peripheral array configuration. Examples of area array devices are pin grid array (PGA) and ball grid array (BGA) packages. PGAs feature a multiplicity of plug-in pins arranged in an array or matrix format on the bottom of a substrate. This type of package is typically ceramic and is not a surface mount package, but PGAs can be made with printed wiring boards (PWB), such as epoxy-glass. PGAs can be surface mounted in some configurations, but reliable assembly can be complicated by variations in surface flatness of the substrate being contacted by the pins in the surface mount assembly process.
A typical BGA 120 is illustrated in FIG. 1 as prior art. BGA 120 has a semiconductor die 12 mounted to a PWB substrate 122. Die 12 is electrically connected to conductive traces (not illustrated) on the PWB substrate 122 with a plurality of wire bonds 20. A plastic encapsulant 124 encapsulates the semiconductor die 12 and wire bonds 20 on the top surface of the PWB substrate 122. The wire bonds 20 and the conductive traces (not illustrated) are electrically connected with vias or plated through-holes 140 and 141. Plated through-hole 141 is often bisected when excised from the panel in which it is manufactured as illustrated in FIG. 1. BGA 120 has a plurality of solder balls 126 arranged in an array format along a bottom surface of the PWB substrate 122. BGA 120 is a surface mount device which is more desirable in many applications. A disadvantage to a BGA is that it is usually assembled on a PWB with a junction-side-up die orientation, wherein the active surface of the die is facing away from the PWB. This orientation is thermally inefficient. The heat generated by the device usually has to be dissipated into the board since the thermal resistance of encapsulant 124 is typically too high.
In some cases, the solder connections under the die area of a junction side up BGA are used for thermal dissipation. In other instances, signal, power, or ground connections can be made underneath this die area if the substrate is multilayered. This reduces the thermal performance of the package. If all the I/O contact area under the die region is used for thermal dissipation, then the signal I/Os which could have been connected under the die must be placed on another row of contact pads in the BGA I/O matrix. This added row causes an increase in package size which is not desirable.
It is preferable to design a package with a die down (or junction side down) configuration so that the heat generated during device operation can be dissipated into the ambient environment. Additionally, a heat sink may be attached to the backside of the package to provide a direct heat flow path away from the device and the PWB. Such a package is illustrated in FIG. 2 as prior art. In FIG. 2, BGA 130 is in a die down configuration, wherein the semiconductor die 12 is mounted to a copper plane 134 that is laminated to a PWB substrate 132. PWB substrate 132 has a cavity to accommodate the die 12. Again, wire bonds 20 electrically connect the die 12 to the substrate 132. A plastic encapsulant 124 encapsulates the die 12 and the wire bonds 20 on a bottom surface of the PWB substrate 132. A plurality of solder balls 126 is arranged in an array format on the bottom surface of the PWB substrate 132. However, because BGA 130 is in a die down configuration, the area underneath the die cannot be used for electrical signal, power, or ground connections. Thus, in an effort to improve the thermal performance of the device 130, the size of the substrate must be increased to accommodate the routing of traces for solder ball connections.
It is desirable to package a semiconductor die using an area array configuration in which an entire surface of the packaged device can be used for I/O connections without degrading thermal management of the device.

Area array semiconductor device having a lid with functional contacts


A Hardware Analysis Module (“HAM”) embedded in an integrated circuit (IC) implements a dedicated hardware-controlled access control procedure. The secure hardware analysis features are unlocked by a key unit subject to successful completion of an access control procedure. The access control procedure prevents unlocking of the secure hardware analysis features by an unauthorized or compromised key unit by including an embedded control command in an authentication challenge sent by the HAM to the key unit during the access control procedure.

Mobile communication devices, such as cellular telephones, typically contain highly sensitive data that is used to authenticate mobile devices and mobile subscribers when the mobile device accesses a communication network. Such information is typically stored in a secure hardware or secure memory. In order to perform testing of integrated circuits in a mobile telephone, it may be necessary to disable security functions in the integrated circuit in order to perform a complete analysis of the integrated circuit with dedicated test software. For example, the test software may need to access production test features in the integrated circuit, which are typically disabled before the device is sold. Examples of secure hardware analysis features include central processing unit (CPU) debug and trace, internal memory read/write, internal scan, and external boot features. Access to secure hardware analysis features represents a major security risk. Therefore, access to such secure hardware analysis features should be granted only after authentication of the user.
Several different authentication mechanisms for mobile terminal platforms have been introduced or suggested. For example, advanced RISC machines (ARM) provide secure debugging access based on public key authentication procedures. The ARM authentication procedure, however, provides only limited access to secure hardware analysis features. Therefore, there is a need for new security measures to protect secure hardware analysis features in production devices that allows the secure hardware analysis features to be re-enabled for hardware testing.

Method and apparatus for secure hardware analysis


Providing a template for orchestration of a cloud provided service in a datacenter. This template can include virtual processing services, virtual networking services, storage services, and service level requirements that a user or administrator can select for the cloud provided service. Based on the template the cloud provided service can be provisioned according to the requirements of the service level agreement.

Software for orchestrating application containers for cloud services can automate the coordinated installation and licensing of multiple virtual services. This software can enable quick set up of virtualized applications by providing a network container abstraction that is easy to customize and consume for server and application administrators. This software allows users to define container templates as well as to instantiate (e.g., provision) container instances. Instantiating a container involves automated set up and provisioning of virtual services.

This patent is subject to a terminal disclaimer.

Attaching service level agreements to application containers and enabling service assurance


A process for preparation of co-granules including one or more bleach activators and one or more bleach agent compounds is described. The bleach component is mixed and coated with a binder selected from the group of fatty acids, fatty acid polyol esters, polyglycols and fatty alcohol oxalkylates. One or more bleach activators is added to this mixture followed by granulation or agglomeration in a mixer, resulting in a bleach co-granule composition including the bleach activator and peroxide components.

Inorganic peroxide compounds, such as hydrogen peroxide, solid peroxides, which release hydrogen peroxide by dissolving in water (e.g. sodium perborate and sodium percarbonate perhydrate), have been used as oxidants for disinfection and bleaching for a long time. The oxidation properties of such compounds are strongly dependent on temperature. For example, hydrogen peroxide or perborate in alkaline bleaching liquors show satisfactory, accelerated bleach performance on soiled textiles only at temperatures above 80° C.
At lower temperatures, the efficiency of oxidation of an inorganic peroxide compound can be improved by addition of bleach activators. These bleach activators include N- or O-acyl compounds, e.g. multiple acylated alkylene diamines, especially tetra acetyl ethylene diamine and tetra acetyl glycoril, N-acylated hydantoines, hydrazines, triazoles, hydrotriazines, urazoles, di-keto piperazines, sulfurylamides, and cyanurates, as well as carboxylic acid anhydrides, especially phthalic acid anhydride and substituted maleic acid anhydrides, carboxylic acid esters, especially sodium-acetoxy-benzene sulfonate, sodium-benzoyloxy benzene sulfonate (BOBS), sodium-nonanoyloxy benzene sulfonate (NOBS), sodium-lauroyloxy-benzene sulfonate (LOBS), sodium-isononanoyloxy benzene sulfonate (Iso-NOBS) and acylated sugar derivatives, like pentaglucose. In the presence of such bleach activator substances, the bleach performance of aqueous peroxide solutions can be improved such that similar bleaching results are achieved at a temperature range of 40-50° C., comparable to those of sole peroxide solutions at 95° C. Mixtures of bleach activators may be used as well, which may include both hydrophilic and hydrophobic bleach activators. Mainly, hydrophobic components derivatives of the readily water soluble sodium-phenolsulfonates are used, e.g. nonanoyloxy benzene sulfonate, acetoxy benzene sulfonate or benzoyloxy benzene sulfonate. These hydrophobic compounds are preferably combined with tetra acetyl ethylene diamine. Also, bleach activators based on hydroxy benzoic acids and derivatives thereof show effective bleach performance.
Bleach activators in the form of granules are preferred as bleaching components in combination with substances generating hydrogen peroxide, e.g. sodium perborate or sodium percarbonate for use in laundry, cleaning, and disinfection applications, in textile and fiber treatment preparations, and in the wood, pulp and paper industries. In order to avoid the premature reaction of a bleach activator and peroxide compounds resulting in a loss of bleach performance, a number of processes have been developed to stabilize such systems by granulation, using binders and other additives and to eventually protect the granules by coating.
For example, EP 0 037 026 shows a process for the production of a readily dissoluble granulated activator containing 90% to 98% active matter. The bleach activator in powdered form is homogenously mixed with cellulose or starch ethers in powdered form, followed by spray-on of an aqueous solution of the cellulose or starch ether, followed by granulation processing and a drying step. Because of the gelling of the cellulose and starch ethers in water, causing poor flow properties and low adhesive power, the activator granules according to this reference are less than optimally stable.
In EP 1 447 380 A1, a process for the production of sodium percarbonate is shown. A hydrogen peroxide solution is sprayed onto sodium carbonate while simultaneously drying in an air current. This process yields granules having less than optimal solubility characteristics, especially at low washing temperatures, with resultant, less than optimal bleach performance.
U.S. Pat. No. 5,458,801 discloses a process for producing bleach activators comprising core granules of sodium percarbonate or sodium perborate. The activators are coated with borate, mixed in the presence of water-soluble binders and then granulated. The use of boronic compounds raises toxicological concerns, and therefore these are not preferred components in laundry and cleaning formulations. U.S. Pat. No. 5,458,801 teaches that a granulation process of percarbonate and bleach activators is only possible if the percarbonate is coated with borate.
There is a demand, therefore, for methods and compositions, that combine a bleach activator and bleach material in a form which is easy to produce and highly effective while providing long term shelf stability. The present invention satisfies the demand.

Co-granulates of bleach activator-peroxide compounds


An impressed emblem is disclosed which includes a cover sheet which is used together with heat and pressure to impress a desired pattern on an emblem. The emblem can also be impressed with a pattern and simultaneously heat-sealed onto a desired substrate.

Emblems have been widely used to apply a variety of designs, patterns, numerals, names and logos onto many different types of substrates. Emblems have found particular use on sports jerseys, jackets and the like. Design emblems incorporating trademark indicia or licensed characters have also become increasingly popular.
To add to the design characteristics or trademark indicia of an emblem, prior art techniques have disclosed methods for embossing a desired lettering or design pattern onto an emblem.
U.S. Pat. No. 5,322,783 discloses a method for heat-embossing a synthetic woven material by use of a heat-resistant distortable intermediate material between the heat-embossing die and the target material that is subject to high adhesive properties when melted during the embossing process.
U.S. Pat. No. 5,298,031 relates to a method for embossing and decorating a thermoplastic velvet-like fabric. In the '031 patent, a transfer sheet supporting a thermally-activated decoration is simultaneously passed with a fabric between two rolls which are under pressure with respect to each other. At least one of the rolls is engraved so as to cause embossing of the fabric. The passing of the fabric and transfer sheet between the rolls is carried out at a temperature sufficient to activate the decoration and allow the transfer of the decoration to the embossed portions of the fabric.
U.S. Pat. No. 4,581,278 directed to thermo-imprinting of one or more surfaces, uses a heat-transfer cover and a release layer pigmented, low molecular weight polyolefin. The imprint is made by bringing the transfer layer into contact with the surface of an object while applying heat.
One significant problem with the prior art methods for emblem impressing is that such methods require tooling a die with the desired impression and then impressing the emblem with the die. For each individual pattern that is desired, a separate die must then be manufactured that is configured in the shape of the desired impression or design. Such a method of impressing an emblem is both time consuming and very expensive. Moreover, since a die must be re-tooled for each new design or logo, this embossing technique can only be utilized for large scale production. In many instances, smaller custom orders for impressed emblems would not be able to afford the cost associated with custom tooling a die.
Accordingly, it is an object of this invention to facilitate the production and use of impressed emblems. A related object is to reduce the cost of producing suitable impressed emblems and reduce the amount of materials required in conjunction with this method.
An additional object of the present invention is the provision of a method for simultaneously impressing an emblem with a desired pattern, and heat-fusing the emblem in position on the surface of a substrate, wherein the method utilizes conventional apparatus and is relatively simple and cost-effective.
Another object of the present invention is to provide a method of impressing an emblem without impairing or damaging the underlying substrate.
One more object of this invention is to facilitate marking fabrics with trademark indicia in a manner that is aesthetically pleasing and cost effective.
A final object of the present invention is to produce an impressed emblem without requiring the expensive step of tooling a die to serve as the transfer technique for the impressed pattern.
In carrying out the above objects of the invention, a cover sheet for impressing a pattern on the surface of an emblem is disclosed which includes a cover sheet having a base layer and a release coating thereon, wherein the release coating exhibits an impression complementing the desired pattern, such that when the coating is placed in registry with an emblem and heat and pressure are applied on the cover sheet toward the emblem, the desired pattern is formed on the emblem.
This invention further provides an impressed emblem including an emblem having an upper thermoplastic layer and a lower adhesive layer; a cover sheet having a base layer and a release coating thereon, wherein the coating exhibits an impression complementing the desired pattern; and the upper thermoplastic layer and the release coating being placed into mating engagement with one another such that upon the application of heat and pressure on the cover sheet and toward the emblem, the upper thermoplastic layer is impressed with the desired pattern.
The present invention further discloses a method of impressing a desired pattern to an emblem and a method for impressing a desired pattern to an emblem during simultaneous attachment of the emblem to a substrate. In a preferred embodiment the surface of the emblem is embossed or debossed slightly to form indicia, such as a trademark or the like, which is legible within about four feet of a viewer, but not substantially therebeyond. This enables a sports numeral, for example, appearing on a sports jersey to be identified with a trademark or other message which does not detract from the principle identifying function of the numeral.
This thermal impressing method preferably utilizes a cover sheet, the cover sheet is made up of a base layer with a release coating applied thereon. The cover sheet has an impression complementing the desired pattern. The impression can consist of raised surfaces or engraved, grooved or rigid surfaces. To create the impressed emblem, the release coating is matingly applied to the emblem, such that, upon application of heat and pressure on the cover sheet and toward the emblem, the emblem becomes impressed with the desired pattern. In one embodiment, the same application of heat and pressure used to bring about the impressing, is simultaneously used to adhere the emblem onto a desired substrate. With this method, the emblem is impressed and adhered to an underlying substrate, in one step.


A user of a mobile device can specify particular news, weather, traffic, or other perishable content received on a particular Internet radio station or other media channel received by the mobile device. The user can customize the station so that wherever the user is currently located, they can receive on their mobile device perishable content related to a preferred geographic location or other category. In some embodiments, a user can specify that a customized station plays local news from one city at the top of the hour, traffic from another city at 10 minutes past the hour, and music or other content at other times. The user can also customize original content from the personal libraries of specified users. Thus, a user can customize not only the genre of content or select a particular local station, but can also modify the perishable content provided by the customized station.

Content consumers may have collections of media content, such as libraries of music. Those collections may be stored in local computers, or in remote servers, or in portable media devices. Consumers may also have arranged their content into playlists to create a certain listening experience. Moreover, consumers may have various content management tools and media players to arrange and play their content. Consumers do not, however, typically have the resources, skill or experience to create professional-sounding or radio-like listening experiences. Similarly, consumer-generated playlists typically provide a more monotonous listening experience, i.e., an all-music listening experience. And, consumers typically do not have the time or resources to add perishable content to their listening experience, such as news updates or weather reports.
Radio broadcasters, on the other hand, typically have the resources, skill and experience to create professional-sounding and radio-like listening experiences, e.g., radio broadcasts. Such broadcasts may provide a variety of content arranged so as to maintain consumer interest. For example, a jazz music radio broadcast may play a selection of music by a variety of jazz artists having diverse jazz styles. The jazz music may be interspersed with a generally pleasing mix of radio host commentary, advertisements, weather reports, news reports, station jingles, and the like. Also, each song or music element in the jazz broadcast may be mixed and edited to provide generally pleasing transitions, e.g., cross-fades and voiceovers. However, because radio broadcasters generally develop broadcast programs for a large audience, the broadcast programs may not be as fully pleasing or customized to an individual listener as the listener would like.
Some broadcasters provide an Internet broadcast that allows consumers to select content to listen to, whether by artist, genre, style, and the like, yet still comply with various regulations, e.g., those promulgated under the Digital Millennium Copyright Act ("DMCA"), and rights management schemes, e.g., digital rights management ("DRM"). However, such broadcasts may suffer from the same sort of monotony associated with consumer-created playlists, and may fail to allow any further listener customization.
Additionally, many organizations typically do not have the resources or expertise to distribute content to their constituents. Organizations need a way to distribute content to their constituents in such a way and by such means that the constituent will receive and consume the content in a timely manner. For example, if a business desires to distribute an audio message from an executive, the business may circulate an email with information on how a user may listen to the message, e.g., by going online and downloading the message for playback, and urge the consumer to do so. However, many constituents may view those steps as too much of a hassle, and simply not listen to the message. Similarly, a church organization may desire a better way to distribute bulletin items or sermons.
Thus, there is a need for better systems and methods for engaging content consumers.

Mobile device selection of preferred content


A magnetic drive coupling apparatus is provided and includes a drive unit having a first rotatable shaft and an open drive assembly, a driven unit having an end face and a second rotatable shaft extending through the end face axially overlap, a magnetic drive coupling having first and second magnetically attractive parts associated with the first and second rotatable shafts, respectively, which transmits rotation between the first and second rotatable shafts and a sealing unit coupled to the end face to encompass the second magnetically attractive part and to hermetically seal oil and refrigerant in an interior of the driven unit.

Aspects of the invention are directed to a magnetic drive coupling apparatus.
Reciprocating and other types of compressors often have an open drive configuration whereby a compressor is coupled to a motor or engine. In such cases, the crankshaft of the compressor has a mechanical face seal, which seals refrigerant and other fluids in the interior of the compressor but also allows for the coupling to the motor or engine. The face seal operates with a film of oil between a stationary stator and the rotor, which rotates with the crankshaft. Due to the nature of the seal, however, it has been observed that oil tends to leak and drip outside of the sealed compressor. This causes complaints in the field and leads to the need for rework of compressors.


In accordance with the present invention, a receiver circuit and a method of controlling voltage pulses, thereby improving the performance of the receiver are provided. The receiver circuit includes a switch for blocking high voltages and for converting voltage signals to current signals. The switch includes first and second signal terminals and a control terminal. The switch exhibits an ON resistance when closed, wherein the ON resistance is controlled by an electric value at the control terminal. The receiver circuit also includes a control circuit coupled to the switch for controlling the ON resistance of the switch in closed mode. The first switch signal terminal is coupled to an output of a transducer and the second switch signal terminal is coupled to an input of a low-noise amplifier circuit. The switch is a transmit/receive switch which is open during a transmission time interval and closed during a reception time interval. The switch passes only low-voltage pulses to the low-noise amplifier circuit which requires an input resistance and a feedback resistance. The ON resistance of the switch is the input resistance of the low-noise amplifier circuit. The control circuit is a servo-loop circuit for generating an electric value at the control terminal of the switch when closed.

1. Field of the Invention
The present invention relates to receiver circuits. Particularly, the present invention is directed to improving the performance of a receiver through a combination of a transmit/receive (T/R) switch protecting the receiver electronics with a Low-Noise Amplifier (LNA).
2. Description of Related Art
Generally, communications systems transfer information from a source to a destination using a combination of a transmitter and a receiver. Typically, the transmitter includes a transducer and a transmission element which together convert an electrical signal into an electromagnetic signal. The electromagnetic signal then propagates through a transmission medium to the receiver, which converts the signal with the help of another transducer into a desired form for a use by an end user. The transmission medium may be any of a variety of suitable devices, including copper cable, optical fiber or even air.
The present invention relates particularly to receivers for duplexed transducers, such as those typically present in ultrasound systems. In an ultrasound system, for example, a piezo-electric transducer converts an electronic signal to a sound wave. The same piezo-electric transducer may also perform the converse transformation such that a received sound wave is converted into an electrical signal. The present invention relates to systems where transducers are used for both the generation and the detection of ultrasound waves. Scanning along a line radiating from a transducer, as shown in FIG. 1, is performed as follows.
First a transmitter, in the ultrasound system creates a high-voltage pulse. The high-voltage pulse is applied to the transducer during a short transmission time interval to create an ultrasound wave. The ultrasound wave is reflected by an interface between regions of different acoustic impedance. For example, in medical imaging, the interface between the liver and surrounding tissues would reflect the ultrasound pulse. The reflected ultrasound pulse is absorbed during a reception time interval by the transducer, which creates a low-voltage pulse as a result. A receiver in the ultrasound system amplifies and processes the received low-voltage pulse.
A low-noise amplifier (LNA) is an electronic circuit of the receiver that amplifies the low-voltage pulse while minimizing the amount of electronic noise added to the low-voltage pulse. An important characteristic of this LNA is its input impedance. The input impedance of the LNA will present a load to the transducer. A very crude model of the transducer is a transformer operating between different domains as illustrated in FIG. 2. For ultrasound imaging system, for example, the two domains are electric and acoustic. In receiving mode, the acoustic signal stimulating the transducer can be modeled in the electrical domain as a voltage source. To maximize power conversion between domains by the transducer, it is necessary to load the transducer with an impedance equal to the impedance associated with the voltage source on the acoustic side of the transformer, as seen from the electric side. The LNA should therefore ideally present an input impedance equal to this value. Because the real part of the transducer impedance is small, ranging from 40 ohms to 400 ohms, the LNA should typically have a small input impedance.
An example of a circuit implementation of an LNA is illustrated in FIG. 3. LNA may be composed of an operational amplifier (op-amp) and two resistors. The purpose of the op-amp is to establish a virtual ground at the common terminal of the two resistors. The first resistor, Rf, converts an input voltage to a current and the second resistor, Rf, converts this current back to a voltage. The input impedance of the LNA circuit illustrated in FIG. 3 therefore is equal to Ri while the voltage gain is established by the ratio of Rf over Ri. The present invention relates to this type of LNA where the input voltage is first converted to a current.
Such a LNA typically is used only with low-voltage signals and is generally implemented in a silicon integrated circuit (IC) process that can not tolerate high-voltages. Therefore, it is necessary to position a transmit/receive (T/R) switch between the transducer and the LNA to prevent high-voltage pulses applied to the transducer, such as during the transmission time interval of an ultrasound system, from damaging the LNA. The T/R switch is open during the transmission time interval and closed during the reception time interval, thus passing only the low-voltage pulses to the LNA. An exemplary T/R switch is shown in FIG. 4A. This exemplary switch includes two Metal-Oxide-Silicon (MOS) devices. The gate-to-source voltage, defined as the potential difference between VG and VS, controls the resistance of the switch. The switch may thus be represented as a variable resistance as depicted in FIG. 4B. For a gate-to-source voltage below the threshold voltage of the MOS devices, the T/R switch presents a very high impedance and is therefore essentially open. The present invention disclosed herein, however, is not limited to the type of T/R switch.
Because the T/R switch is not ideal, i.e. demonstrating no resistance, it will exhibit a small resistance when closed. This resistance can be labeled ON resistance and denoted Ron. For purposes of illustration, the circuit in FIG. 5 shows a circuit comprising a T/R switch which is represented as an ideal switch in series with the ON resistance, and an op-amp-based LNA. The ON resistance of the T/R switch may be detrimental for at least two reasons. First, the ON resistance reduces the signal amplitude appearing at the input of the LNA because of a voltage divider effect. In particular, the signal amplitude at the input of the LNA will be the amplitude of the signal at the input terminal of the T/R switch scaled by the ratio of the input impedance of the LNA over the sum of the input impedance of the LNA and the ON resistance of the T/R switch. Second, the ON resistance generates electronic noise, which can reduce signal quality. The magnitudes of the adverse effects are proportional to the ON resistance.
Therefore, the ON resistance of a T/R switch must be reduced. In practice, the ON resistance preferably would be made much smaller than the LNA input impedance. Reducing the ON resistance of the T/R switch, however, would require increasing the size of the T/R switch circuit. Because larger circuits are more expensive to fabricate and also exhibit larger unwanted capacitances that limit high-frequency operation, an alternative approach is required.
There is thus a need for a circuit where the ON resistance of the T/R switch may be made larger, thus reducing fabrication costs and unwanted capacitances.

Combined T/R switch with LNA and a method of improving the performance of a receiver


A photoresist polymer having a spiro cyclic ketal group, and a photoresist composition including the same is disclosed. The photoresist polymer and the photoresist composition can improve the resolution and the process margin due to its low activation energy of the deprotection reaction of the spiro cyclic ketal group, and can produce fine photoresist patterns due to its low PEB (Post Exposure Baking) temperature sensitivity.

Recently, as the integration degree and precision of semiconductor devices increase, the formation of ultra-fine photoresist patterns, which have a half pitch of less than 90 nm, is needed in the photolithography process for producing the semiconductor devices. Consequently, the wavelength of an exposure light is reduced to less than 193 nm, and various technologies for optimizing the wafer forming process and making a precise wafer have been being developed. In addition, in order to form the fine photoresist patterns, it is also necessary to develop photosensitive materials having a low LER (Line Edge Roughness), a low PEB (Post Exposure Baking) temperature sensitivity, and a good dry etching resistance.
In order to improve the resolution and the process margin in the process for forming the photoresist pattern, and to produce a more fine photoresist pattern, the photosensitive photoresist polymer should have a low activation energy in the deprotection reaction of the protecting group, in which the protecting group is adhered to the chain of the photoresist polymer for inhibiting the dissolution of the polymer against a basic solution, and/or a low PEB (Post Exposure Baking) temperature sensitivity. For example, the photoresist polymers which can be used for ArF exposure light source include polyacrylate, cycloolefin-maleic anhydride copolymer, polynorbornene and so on, and they are classified into (i) a polymer having the high activation energy protecting group, such as a tertiary butyl group, (ii) a polymer having the medium activation energy protecting group, such as a methyl adamantyl group or an ethyl adamantyl group, and (iii) a polymer having the low activation energy protecting group, such as an acetal group or a ketal group, according to the magnitude of the activation energy of the deprotection reaction of the protecting group which is adhered to the chain of the polymer. As the photoresist polymer for ArF exposure light source, poly(meth)acrylate having acetal groups, which belong to the low activation energy protecting group, is disclosed in U.S. Pat. No. 4,975,519, U.S. Patent Publication No. 2002-0143130(2002.10.03) and International patent publication No. WO 2002-20214(2002.3.14) and so on.

Photoresist monomer having spiro cyclic ketal group, polymer thereof and photoresist composition including the same


This application discloses the structure of an ESC stage where a chucking electrode is sandwiched by a moderation layer and a covering layer. The moderation layer and the covering layer have the thermal expansion coefficients between the dielectric plate and the chucking electrode. This application also discloses the structure of an ESC stage where a chucking electrode is sandwiched by a moderation layer and a covering layer, which have internal stress directed oppositely to that of the chucking electrode. This application further discloses a substrate processing apparatus for carrying out a process onto a substrate as the substrate is maintained at a temperature higher than room temperature, comprising the electrostatic chucking stage for holding the substrate during the process.

1. Field of the Invention
This invention relates to an electrostatic chucking (ESC) stage for holding a board-shaped object such as a substrate, and a substrate processing apparatus comprising the ESC stage.
2. Description of the Related Art
The ESC stages for chucking substrates by electrostatic force are used widely in the field of substrate processing. In manufacturing electronic devices such as LSIs (Large-Scale Integrate circuits) and display devices such as LCDs (Liquid Crystal Displays), for example, there are many steps of processing substrates that are bases for products. In these steps, ESC stages are used for securing process uniformity and process reproducibility. Taking the plasma etching as an example, a substrate is etched, utilizing functions of ions and activated species produced in plasma. In this, an ESC stage is used for holding the substrate at an optimum position against the plasma.
Generally, an ESC stage comprises a chucking electrode to which voltage for chucking is applied, and a dielectric plate that is polarized by the voltage applied to the chucking electrode. The held substrate is in contact with the dielectric plate, and chucked by static electricity induced on the surface of the dielectric plate.
ESC stages are demanded to chuck substrates with making them stable. If a substrate is displaced or changes the posture on an ESC stage while a process is carried out, it might bring the problem of degrading the process uniformity and the process reproducibility. Thermal transformation and thermal expansion of an ESC stage could be critical in substrate processing in view of process homogeneity and process reproducibility. Temperatures of substrates during processes are often higher than room temperature. This is usually from process conditions, otherwise because of environments in process chambers in which processes are carried out. Anyway, when temperature of a substrate rises up, temperature of the ESC stage rises up as well. If thermal transformation or thermal expansion of the ESC stage takes place from the temperature rise, the held substrate might be transformed or displaced.

Electrostatic chucking stage and substrate processing apparatus


A processing tank 10 is divided into a washing section 15 and a drying section 30, a clearance is formed in the joint between the sections, and the clearance is communicated with by sink 29. In drying a substrate, the substrate is moved from the washing section to the drying section, a porous plate 28 is inserted into the lower region where the clearance is formed, and a drying gas is jetted against the substrate with the internal pressure of the drying section 30 kept higher than that of the sink 29 and the internal pressure of the washing section 15 kept lower than that of the drying section 30. In this case, it is preferable that the porous plate 28 is a punched plate in which plural small holes having predetermined diameters have been made. The above configuration provides a substrate processing method and a substrate processing device in which the drying gas can uniformly and stably be supplied to an assembly of plural substrates.

In the semiconductor production process, for various substrates, for example in order to clean a wafer surface, after the wafer surface is cleansed with a chemical solution, washing is performed using a processing solution such as pure water, and the wafer is dried with an organic solvent such as isopropyl alcohol (hereinafter referred to as IPA). More specifically, the processes includes a process, in which, after the wafer is cleansed with the chemical solution and pure water, the wafer is exposed in an IPA vapor to condense IPA on the wafer surface, thus substituting IPA for the pure water adhering to the wafer, and contaminants such as particles are washed from the wafer surface by running pure water down the wafer surface, and a drying process of vaporizing IPA to dry the wafer surface. In the drying process, if even a small droplet of water remains on the wafer surface, a water mark is formed on the wafer surface, which causes wafer quality to be worsened in the same way as a particle does. Therefore, in the semiconductor production process, it is necessary that such contaminants do not adhere to the wafer. Many methods and apparatus for processing the substrate surface of the wafer, in which measures are taken against contaminants, have been devised and put into practical use. Such methods and apparatus for processing the substrate are disclosed in many patent documents such as Japanese Patent Laid-Open No. 2001-271188 (see FIG. 1 and right column of page 5 to left column of page 6).
The substrate processing device described in Japanese Patent Laid-Open No. 2001-271188 includes one processing tank. The processing tank includes a bottomed box body and a lid. The box body has an open upper region. The opening of the box body is covered with the lid. The opening of the box body is formed to a size such that the many wafers can be supported and accommodated at predetermined intervals and in parallel and vertical orientation. The depth of the box body is formed to such extent that the upper space has an appropriate volume in which it is ensured an inert gas can be supplied when the wafers are dipped into it. The processes including the chemical-solution process, the process of washing out the chemical solution from the wafer surface using pure water, and the drying process of removing the water adhering to and remaining on the wafer surface with mixed substitution of the organic solvent vapor and the inert gas after the washing process is performed in the one processing tank.
When the flow of the inert gas within the processing tank was investigated during the wafer drying process, routes shown in FIG. 9 were observed. FIG. 9 is a sectional view schematically showing the flow of the inert gas within the processing tank. Substrate processing device 1 includes a processing tank 2 with an inner tank 21, an outer tank 22, and a lid 23. The outer tank 22 has a bottomed box shape and an open upper region. The inner tank 21 surrounds the outer periphery in the upper region of the inner tank 21. An openable and closable lid 23 is provided in the upper region of the outer tank. A processing solution discharge hole 212 is made in a bottom region of the inner tank 21. One end of the exhaust pipe 5 is connected to the processing solution discharge hole 212, and the other end of the exhaust pipe 5 is coupled to a vacuum pump or the like. Vapor ejection ports 8 are protruded in the outer tank 22, and the vapor ejection ports 8 are coupled to a vapor supply mechanism 9. Gas jet nozzles 41 are mounted in the upper region of the lid 23, and the gas jet nozzles 41 are connected to a nitrogen gas supply source 7 through piping 4.
In the substrate processing device 1, when the nitrogen gas N2 (drying gas) from the nitrogen gas supply source 7 is jetted from the upper region of the processing tank 2, the jetted nitrogen gas N2 flows downward, and the nitrogen gas N2 is jetted onto an assembly of wafers W′, and the nitrogen gas N2 is exhausted outside the tank from an exhaust pipe 5. At this point, some of the jet gas is exhausted outside the sink 3 through the space between the outer tank 22 and the lid 23. The outside of the sink 3 is at atmospheric pressure. As shown by arrows in FIG. 9, the gas jetted onto the assembly of wafers W′ collides with the bottom wall surface of the inner tank 21 and rises to circulate in the processing tank 2, and then the gas is exhausted from the exhaust pipe 5. The surfaces of the assembly of wafers W′ are dried by the gas directly jetted from the jet nozzles 41 and by the gas circulating the inside of the processing tank 2.

Substrate processing method and substrate processing device


Disclosed herein is a mobile device charger. A mobile device charger, comprising a housing having a connector to a mobile device; an inner cavity configured to house one or more extensions, wherein the one or more power connectors are at least: a male USB connector, a male outlet plug connector, or a male cigarette lighter connector. The housing can comprise a cover, wherein the cover is configured to conceal the inner cavity of the housing. The mobile device charger is configured to have a retracted position and an extended configuration for the power connectors. The mobile device charger further comprising an extender fixture to secure the mobile device.

In some situations, charging a mobile or any portable electronic device is made inconvenient due to a lack of available outlet options. For example, a user of the mobile device may be travelling in a vehicle but lack the appropriate connector to charge the mobile device in the vehicle. In other instances, a user may be inside a building but not have the proper connector to charge the mobile device in a wall outlet. Thus, the conventional strategy is to purchase additional ad-hoc connectors. This often causes problems because the conventional strategy does not provide for a comprehensive and efficient way to address the problem. For example, cords and connectors may be misplaced. In other instances, cords and connectors may be bent, broken, or otherwise ineffective.
Accordingly, there remains a need for improved comprehensive and efficient way to address the problem. This need and other needs are satisfied by the various aspects of the present disclosure.


A system and method for detecting scene changes in a sequence of video frames utilizing a combination of a plurality of difference metrics including an interframe difference metric, a histogram difference metric and an interframe variance difference metric, as well as adaptive threshold level selection methods to dynamically select appropriate threshold levels for each of the difference metrics. The interframe and histogram difference metrics are used to identify abrupt scene changes and the interframe variance difference metric is used to identify gradual scene changes. The identified gradual and abrupt scene changes are validated by applying a plurality of conditions.

1. Technical Field
The present invention relates generally to digital video processing and analysis and, more specifically, to a system and method for detecting scene changes utilizing a combination of a plurality of difference metrics applied to successive video frames and adaptive threshold selection methods for the metrics so as to identify abrupt and gradual scene changes.
2. Description of Related Art
The use of digital video in multimedia systems is becoming quite popular. Moreover, videos are playing an increasingly important role in both education and commerce. Indeed, video is utilized in connection with a myriad of applications such as multimedia systems, defense/civilian satellites, scientific experiments, biomedical imaging, industrial inspections, home entertainment systems, etc. As a result, there has been a rapid increase in the amount of video data generated. The process of searching through a video so as to annotate and/or obtain a quick overview of the video content can be tedious and time consuming using conventional digital video applications such as fast forward or rewind. Therefore, in order to search for desired video content in an effective and efficient manner, the videos should be appropriately indexed into a database. In this manner, a user can readily retrieve desired videos or sections of video without having to browse the entire video database.
The primary task in this indexing process is segmenting the video into meaningful continuous units or "shots," which affords an efficient method for video browsing and content based retrieval. A "shot" or "take" in video parlance refers to a contiguous recording of one or more video frames depicting a continuous action in time and space. Typically, transitions between shots (also referred to as "scene changes" or "cuts") are created intentionally by film directors. A statistical characterization of a video can also be performed in terms of the different attributes of a shot such as their length and type (close, medium, long, camera movement etc.). At a global level, this can be used for video clustering.
During a shot, the camera might remain fixed or it might undergo one of the characteristic motions, i.e. panning, zooming, tilting or tracking. In general, the process of segmenting a video into a sequence of shots is non-trivial, complicated by the large variety of transitions between shots made possible by the modern editing machines. Shot transitions consisting primarily of visually abrupt changes or camera breaks (also called "straight cuts") are readily identifiable by examining frame to frame intensity changes at the pixel level.
In many cases, however, a transition between two shots is made in a gradual manner using special editing machines to achieve a visually pleasing effect. These type of gradual changes are also called "optical cuts." There are several types of optical cuts, such as "fade in", "fade out", "dissolve", "wipe", "flips", "superimpose", "blow-ups", "move-ins", etc. (see, e.g., P. Aigrain, et al., "The automatic real time analysis of film editing and transition effects and its applications," Computer Graphics, 18:93-103, 1994). In general, the process of detecting optical cuts is challenging and requires a more detailed analysis of the video at a global scale rather than merely analyzing the interframe difference such as the case with conventional methods.
Conventional methods related to scene change detection began with the study of frame difference signals, where it was demonstrated that the gamma distribution provides a good fit to the probability density function of frame difference signals (see, A. Seyler, "Probability distributions of television frame differences," Proceedings of the IEEE, 5:355-366, 1965). Subsequent studies of frame difference signals were performed in connection with four different types of videos, a sports video, an action video, a talk show and a cartoon animation by subdividing the images into 8×8 blocks with each block being represented by the average value, and then computing the difference metric as the average value of the magnitude of the interframe difference (see D. Coll, et al., "Image activity characteristics in broadcast television," IEEE Transactions on Communications, 26:1201-1206,1976). It was shown that this measure was capable of detecting shot boundaries with reasonable accuracy.
Other conventional methods for cut detection have been recently proposed that are characterized either as frame difference methods or as histogram based methods. For instance, with the frame difference method, assuming that fij(t) is the representative pixel value at location (i,j) and at time t, the metric is given by either:             d      t        =                  ∑        ij                                                                           (                                                            f                  ij                                                                  (                  t                  )                                            -                                                f                  ij                                                                  (                                      t                    -                    1                                    )                                                      )                    2                                                           or                        d      t        =                  ∑        ij                                                     U                          (                                    (                                                                    f                    ij                                                                          (                    t                    )                                                  -                                                      f                    ij                                                                          (                                          t                      -                      1                                        )                                                              )                        ≥                          T              d                                )                                    where U(x)=1 if the condition x is satisfied, and zero otherwise, and where Td is an appropriate threshold. In the first case, the magnitude of the difference is considered (sometimes in place of the square of the difference, the magnitude of the difference is also considered). In the second case, the number of pixels undergoing changes are picked up. A cut is determined if dt exceeds an appropriate threshold.
One problem associated with using these interframe approaches for detecting scene changes, however, is that they cannot adequately cope with conditions such as noise, minor illumination changes and camera motion. When such conditions exist, the interframe difference will, in virtually all instances, be large, thereby resulting in a false alarm. To obviate this problem, several techniques have been proposed including the three and five frame scheme (see K. Otsuji, et al., "Video browsing using brightness data," Proc. SPIE: Visual communications and Image Processing, pages 980-989, 1991) and a twin-comparison approach (see H. Zhang, et al., "Automatic partitioning of full motion video," Multimedia Systems, 1:10-28, 1993), where a simple motion analysis is used to check whether an actual transition has occurred. This process, however, is typically computationally extensive. In addition, despite the corrections, these methods are not able to detect gradual changes.
Because of the extreme sensitivity of the interframe difference methods to object motion, illumination changes and camera motion, intensity histogram comparison techniques have been proposed (see, e.g., Y. Tonomura, "Video handling based on structured information for hypermedia systems," Proc. ACM: Multimedia Information Systems, Singapore, pp. 333-344, 1991; and Y.Z. Hsu, et al., "New likelihood test methods for change detection in image sequences," Computer Vision, Graphics and Image Processing, 26:73-106, 1984). In general, with such methods, cuts are detected using absolute sum of the difference of intensity histogram, i.e., if:             ∑      i                                                                         H            i                                          (            t            )                          -                              H            i                                          (                          t              -              1                        )                                      ≥      T    h                  where Hi(t) is the count in the ith bin at time t and where Th is an appropriate threshold. This method assumes that brightness distribution is related to the image which changes only if the image changes. The histogram is likely to be minimally affected by small object motion and even less sensitive to noise, thereby resulting in a reduction of the amount of false alarms. In some instances, rather than using the above mentioned metric, either one of the following correlation metrics may be used:             d      t        =                  ∑        i                                                                                (                                                                    H                    i                                                                          (                    t                    )                                                  -                                                      H                    i                                                                          (                                          t                      -                      1                                        )                                                              )                        2                                              H              i                                                  (                              t                -                1                            )                                                                                or                        d      t        =                  ∑        i                                                                           (                                                            H                  i                                                                  (                  t                  )                                            -                                                H                  i                                                                  (                                      t                    -                    1                                    )                                                      )                    2                                                                                H                  i                                                                  (                  t                  )                                            +                                                H                  i                                                                  (                                      t                    -                    1                                    )                                                      )                    2                                        whereby a scene change will be detected if the above metrics exceed a predetermined threshold. Instead of analyzing the intensity, other conventional techniques have utilized the color space for video segmentation (see, e.g., U. Gargi et al., "Evaluation of video sequence indexing and hierarchical video indexing," Proc. SPIE: Storage and Retrieval for Image and Video Databases, San Jose, pp.144-151, 1995; and S. Devadiga, et al., "Semiautomatic video database system," Proc. SPIE: Storage and Retrieval for Image and Video Databases, San Jose, pp. 262-267, 1995.)
Another conventional metric that is utilized is known as the Kolmogorov-Smirinov test metric. This metric is based on the cumulative histogram sum (CHP) of the previous and the current frames:       d    t    =            MAX      j                                                      CHP            j                                          (            t            )                          -                              CHP            j                                          (                          t              -              1                        )                                                    where CHPj(t) is the cumulative histogram sum of the jth intensity value in frame t (see N. V. Patel, et al., "Compressed video processing for cut detection," IEEE Proc. Vis. Image Signal Proc., 143:315-323, 1996).
In addition to the above mentioned methods, model based methods have also been suggested to improve the cut detection performance. These methods attempt to model the distribution of the pixel differences for the various types of cuts that are possible, which is then used for scene change detection.
Virtually all the above conventional cut detection methods utilize uncompressed video for scene change detection. While several methods purportedly operate in the compressed domain, in reality, the methods select a subset of the DCT coefficients for each one of the MJPEG blocks and continue with the processing after the blocks are decompressed (see, e.g., F. Arman, et al., "Image processing on compressed data for large video databases," Proc. ACM Multimedia, 1993; and E. Deadorff, et al., "Video scene decomposition with motion picture parser," Proc. SPIE: Electronic Imaging, Science and Technology, 1994). Also, when MPEG video is used, only the I frames are considered, thereby reducing the problem to an equivalent MJPEG problem (see J. Meng, et al., "Scene change detection in MPEG compressed video sequence," Proc. SPIE: Digital Video Compression Algorithms and Techniques, 2419:14-25, 1995). Motion vectors directly from the P and B frames of an MPEG video are rarely considered primarily because they are very unreliable for any real computation and, in any event, can be estimated from the I frames.
Shots and the associated cuts can be classified into several types as a convention for the directors and camera operators, such as:                Static shots: These are shots that are taken without moving the camera. This category includes close, medium, full and long shots. They all result in different types of interframe differences. For instance, close shots produce more changes than long shots and so on.        Camera moves: These shots include the classical camera movements i.e. zoom, tilt, pan etc. The interframe difference is obviously a function of the camera speed.        Tracking shots: In these shots, the camera tries to follow the target object. Again, the interframe difference depends on the relative motion between the camera and the object.
Because different types of videos with different motion types result in different interframe changes, the criteria to detect cuts should be different when different types of shots are processed. Therefore, a method that utilizes soft thresholds that are adaptively selected based on the types of shots would be advantageous.
Another issue is that since films and videos have different frame rates, when film is converted to video, there is a need to compensate for this discrepancy. Typically, 3:2 pulldown is effected, whereby every other film frame is played slightly longer. This results in duplicate frames in the resulting video, which may result in false alarms if the cut method is based solely on interframe difference. This problem is particularly true for animations.
As for the different types of transitions, some of the most frequent ones are as follows:                Fade in: The incoming scene gradually appears starting from a blank screen;        Fade out: The complete reverse of the above;        Dissolve: The transition is characterized by a linear interpolation between the last frame of the outgoing scene and the first frame of the incoming scene;        Wipe: The incoming scene gradually replaces the outgoing scene from one end of the screen to the other; and        Flip: The outgoing scene is squeezed out from one corner to the other revealing the incoming scene.
In addition to the above transition types, other types such as freeze-frame, blow up, move in, montage, etc. are also used. Another issue other than the scene-change type is the duration. While in theory the duration of the scenes in a video could be arbitrary, normally the duration is limited to a reasonable level based on the duration of the intermittent shots.
The majority of the above-mentioned conventional cut detection methods do not employ a global strategy for identifying cuts in video as they typically employ only one metric for identifying scene changes. In addition, such methods typically employ hard thresholds resulting in the successful identification of scene changes for only certain sections of a video or, at best, for only certain types of video. Accordingly, an improved system and method for accurately detecting scene changes, both abrupt and gradual, is highly desirable.

Integrated method for scene change detection


To provide a method for manufacturing a holographic recording medium and a method for manufacturing a semiconductor device, by which effects of distortion or irregularities of the surface of an exposure object can be reduced. The method includes the steps of: splitting a laser beam emitted from a laser oscillator into a first laser beam and a second laser beam, and forming a fringe pattern in a holographic recording medium by illuminating the holographic recording medium with the first laser beam through a mask and illuminating the holographic recording medium with the second laser beam. The mask is a substrate having a light-shielding film formed over its surface.

1. Field of the Invention
The present invention relates to a holographic recording medium, a method for manufacturing the same, and an exposure method using the same. More specifically, the invention relates to a holographic recording medium, a method for manufacturing the same, and an exposure method using the same, by which adverse effects of distortion or irregularities of the surface of an exposure object can be reduced. In addition, the present invention relates to a method for a manufacturing a semiconductor device.
2. Description of the Related Art
In recent years, an exposure technique using holography has drawn attention as a pattern formation method in the process of manufacturing a semiconductor device. The exposure technique using holography includes a first step (a recording step) of recording a hologram into a medium for the recording of a hologram by illuminating the holographic recording medium with an object beam and a reference beam, i.e., a step of forming a holographic recording medium, and a second step (a reconstruction step) of illuminating the holographic recording medium with a reconstruction beam, so that a reconstruction image of the fringe pattern that is formed in the holographic recording medium is printed into a resist.
In the recording step, the holographic recording medium is illuminated with a first laser beam (an object beam) through a mask (an original mask) having a desired pattern, and at the same time, the holographic recording medium is illuminated with a second laser beam (a reference beam) from a direction different from the first laser beam. Thus, by illuminating the holographic recording medium with the first laser beam and the second laser beam at the same time, a fringe pattern is recorded in the holographic recording medium. In the reconstruction step, on the other hand, a resist formed over an element formation substrate is illuminated with a laser beam (a reconstruction beam) through the holographic recording medium having the fringe pattern, so that diffraction rays for reproducing the original mask pattern (a reconstruction image) are projected onto the resist.
Research has been conducted on micropattern formation methods (reduction-projection exposure) or the like. For example, in a holographic exposure technique, laser beams that are emitted from different kinds of laser oscillators are used in the recording step and the reconstruction step, so that a pattern with a smaller feature size than the original pattern is printed into a resist (for example, see Reference 1: Japanese Published Patent Application No. 2004-253660).

Method for manufacturing holographic recording medium and method for manufacturing semiconductor device

Semiconductor Energy Laboratory Co., Ltd.


A paint roller tray mounting device includes a platform that has a width sized to fit between first and second side rung supports of a ladder, a length sufficient to support a paint roller tray. The platform has a recess in an upper surface sized and shaped to provide a gripping surface for a ladder rung. At least two securing hooks have a hooking end and an attaching end. The hooks are symmetrically attached at the attaching end adjacent opposite edges of the platform. The hooks extend from at least a lower surface of the platform to a surrounding upper edge of the paint roller tray. The hooks have a tightening device for urging the tray and the platform together. The platform is located beneath the ladder rung or a top shelf of a step ladder. The paint roller tray is located above either the rung or the top shelf.

Paint rollers offer an easy and efficient way to pain flat surfaces. The roller eliminates brush marks and provides a smoothly finished surface for even the relatively unskilled painter. Paint rollers are typically charged with paint using a roller tray. This shallow rectangular tray usually has a sloped bottom surface with some ridges formed in it to help distribute the paint evenly over the roller. Painting with a roller and roller tray can become more difficult if it becomes necessary for the painter to stand on a ladder while painting. This often occurs when painting ceilings or higher portions of walls. When the painter must stand on a ladder, the positioning of the roller tray can be problematical. What is desired is a way to secure the roller tray to a ladder or step ladder in such a way that it can be easily removed and attached to facilitate filling and cleaning of the tray. Various inventions have been developed to address this problem.
U.S. Pat. No. 3,822,846, issued to Jesionowski, discloses a combination platform roller pan and tray for a paint roller that has a pair of aligned bosses which extend outwardly from each side thereof, the bosses being releasably engageable with locking means which is releasably associated with the ladder, the locking means in one form comprising a locking hook engageable with the step or rung of the ladder and, in another form, comprising a locking cam engageable in the rung of the ladder.
U.S. Pat. No. 4,424,949, issued to Kimmett, et al. is directed to an adjustable paint tray support for use on a ladder having a bracket for attaching to one of the legs of the ladder is disclosed. The bracket contains a section for engaging one of the steps or rungs on the ladder. A support member for the paint tray is pivotally connected to the bracket. The support member has a raised portion at each end for engaging the paint tray. A clamp is positioned on the bracket to engage a portion of the support member to releasably secure the support member with respect to the bracket.
U.S. Pat. No. 4,489,911, issued to Riley illustrates a device capable of being mounted on a ladder having hollow rungs comprises a platform or tray having a first arm mounted thereon adjacent one end thereof and a second arm pivotably mounted thereon adjacent the other end thereof and extending below the platform or tray, said second arm being adjustable in length and said arms being adapted to enter the hollow rungs of a ladder. In use the first and second arms are inserted in separate rungs of the ladder, the second arm being inserted in the rung below the first arm.
U.S. Pat. No. 5,135,193, issued to Parris disclose a tray that attaches to the side of hollow-rung ladders. The tray is sized large enough to accommodate an industry standard paint-roller-pan and hold it in a convenient position for the user either at the left side or at the right side of the ladder. The tray mounts to the ladder via a shaft that passes thru one hollow-rung. Secure attachment to various width ladders is accomplished via a safety-clip inserted into one of the series of thru-holes in the free end of the shaft that extends thru the hollow-rung. Adjustment of the tray to horizontal is accomplished via a movable L-shaped support that penetrates into a second hollow-rung. This invention contains fewer and simpler parts in comparison to prior inventions.
U.S. Pat. No. 5,461,752, issued to Lemon, et al. is directed to a ladder-upright-mountable, paint tray assembly is provided wherein at least one bracket assembly is provided on the underside of upper, paint draining portion of the paint tray assembly. Therefore each bracket assembly is a sliding fit on the ladder upright and hooks over a portion of a ladder rung adjacent that upright. A central bracket assembly may be provided alone or in combination with two side bracket assemblies. In other embodiments only two side brackets are provided. Pairs of paint container wall members may also be provided, aligned with the bracket assemblies, for the ladder upright to be slidably retained therein.
U.S. Pat. No. 5,493,751, issued to Misiukowiec, et al. discloses a versatile paint pan has a receptacle and a bracket removably attached to the back of the receptacle. The bracket has a base and two legs. The bracket may be pivoted to dispose the paint pan on a horizontal surface. The bracket may be supported transversely on a step of a ladder such that the receptacle is suspended vertically externally of the side rail of the ladder. The bracket may also be supported substantially parallel to a step of the ladder and such that the receptacle is suspended vertically between the side rails of the ladder. The paint pan has a paint brush holder and a removable cover.
U.S. Pat. No. 5,503,245, issued to Etesam discloses a step ladder that includes legs and a ladder top connected to the ladder legs. The ladder top is molded integrally from a polymer material and has an inverted-cup shape defined by a generally rectangular central web with a periphery and peripheral flanges extending generally down from the periphery. The web defines a platform of the ladder top on which articles such as tools and paint cans can be placed. The web has a pair of eye-loops protruding up from a plane common with the platform, these eye loops being spaced and arranged for removably receiving a pair of hooks on a conventional roller paint-pan so as to support the paint-pan on the top surface of the platform.
U.S. Pat. No. 5,507,363, issued to Tredup discloses a universal portable support platform for a ladder base is formed from a plurality of interfitting elements capable of left and right interconnections so that a horizontal support can be located selectively adjacent an elevated work site. Adjustment means are provided to level the horizontal support, regardless of the angulation of the ladder base.
U.S. Pat. No. 6,148,958, issued to Ahl, et al. discloses a ladder supported holding tray assembly for releasable attachment to a ladder includes a generally horizontal container including opposing side panels, a front, a back, and a bottom. The tray assembly also includes a ladder attachment bracket including a connecting wall attaching the bracket to a side panel of the tray. Step engagement means are disposed on the bracket, wherein the step engagement means comprises an upward sloping surface to releasably engage and securely hook onto a step from underneath the step. The tray when mounted on a ladder extends laterally outwardly from the ladder so as to not interfere with the normal use of the ladder.
It is an objective of the present invention to provide a device for removably attaching a standard paint roller tray to either a ladder or a step ladder. It is a further objective to provide such a device that is easily removed and reattached for purposes of filling or cleaning. It is a still further objective of the invention to provide a device that is easily adaptable to a variety of paint roller trays. It is yet a further objective to provide a device that can maintain a level orientation at all times. Finally, it is an objective of the present invention to provide such a device that is durable, inexpensive and easily manufactured.
While some of the objectives of the present invention are disclosed in the prior art, none of the inventions found include all of the requirements identified.