A dry cryogenic shipping container having a removable absorbent assembly is provided. The dry cryogenic shipping container is structured to be a Dewar's flask having a first, outer shell assembly, and second, inner shell assembly disposed within and spaced from the first, outer shell assembly, and a cap. Within the shipping container is an absorbent assembly having a body with a central cavity. The absorbent assembly body is formed by a plurality of removable absorbent assembly elements. That is the absorbent assembly elements are sized to pass through the passage into the space within the shipping container. As such, after use, the absorbent assembly body elements may be removed and the remaining components may be sterilized. After sterilization, new absorbent assembly body elements are inserted into the inner space and the dry cryogenic shipping container is used again.

1. Field of the Invention
This application relates to a dry cryogenic shipping container and, more specifically, to a dry cryogenic shipping container having a removable absorbent.
2. Background Information
Cryogenic shipping containers are used to transport materials at temperatures well below the freezing point of water. The materials transported at cryogenic temperatures are typically biologically active, such as, but not limited to, tissue samples and microorganism cultures. Hereinafter these materials will be identified as "use materials." The typical cryogenic shipping container, similar to many storage devices for cryogenic liquids, included a Dewar flask, or similar construct, having an outer shell, an inner shell, and a vacuum therebetween. The inner and outer shells were coupled at a neck which defines a passage into the interior of the inner shell. A shipper core, typically a hollow cylinder, was disposed within, and coupled to, the inner shell. The inner shell had an inner diameter that was greater than the diameter of the shipper core. Thus, there was an annular gap between the shell and the shipper core. The shipper core may have also included a support structure for holding another containment device, such as, but not limited to, a canister or sample container.
When prepared for transport or storage, a cryogenic shipping container included a use material disposed in a sample container, which in turn was contained in a removable canister. The canister was then disposed in the shipper core. The shipper core, as noted above, was coupled to the inner shell. A cryogenic liquid was disposed in the annular gap between the shell and the shipper core. The container was closed by an insulated cap as was known in the art. This basic configuration, while useful, allowed cryogenic liquid to slosh about within the inner shell. Such a fluid movement is undesirable as it enhanced evaporation; the cryogenic liquid could splash on the use material, and cryogenic liquids can be dangerous to touch. Additionally, certain cryogenic liquids are prohibited from certain forms of transportation, such as air shipping.
To reduce the amount of free cryogenic liquid in a cryogenic shipping container, absorbent materials were disposed in the annular gap. The absorbent materials were typically a rigid foam or another moldable material that could be disposed within the inner shell while maintaining a cavity sized to accept the shipper core. This absorbent material was, effectively, sealed in the inner space of the inner shell when the shipping core was coupled to the inner shell. In operation, the cryogenic liquid was poured into the inner space and allowed to be absorbed by the absorbent material. Any excess cryogenic liquid was removed prior to placing a sample container in the shipping core. As the cryogenic liquid was trapped in the absorbent materials, this type of cryogenic shipping container was identified as a "dry" cryogenic shipping container.
The disadvantage to using the dry cryogenic shipping container is that the absorbent material may become contaminated by the use materials. Once the absorbent materials become contaminated, the cryogenic shipping container should not be used again. Thus, the relatively expensive cryogenic shipping container may be rendered useless due to the contamination of the relatively inexpensive absorbent material.
There is, therefore, a need for a dry cryogenic shipping container that may be reused.
There is a further need for a dry cryogenic shipping container having a removable absorbent material.


A device for removing dirt adhering to the tire (2) of a roller used for compacting soil and for spraying the tire (2) with water. The scraping unit (5, 6) and a nozzle system (10, 11, 12) are joined into one modular component and the scraper (6) forms a cavity (10) that is sealed off from a scraper support (5). A water supply pipe (11) leads into the cavity (10) from which nozzles (12) branch off through the wall of the scraper support (5).

1. Field of the Invention
This application claims priority from PCT/EP97/06597, filed Nov. 26 1997.
The invention relates to a device for cleaning the tire of a soil tamping roller of adhering dirt and for spraying the tire with water, this device being provided in a known way with a stripping device which extends essentially perpendicularly to the direction of rotation of the tire over the tire region to be cleaned and which is fastened to a tire carrier in a fixed position in relation to the tire, with a nozzle arrangement which is fastened to the tire carrier in a fixed position in relation to the tire, and with nozzles, arranged at a distance from one another and approximately parallel to the stripping device, for spraying water onto the tire behind the stripper in the tire running direction.
2. Description of the Related Art
In the known devices of this type, the stripping device and the nozzle arrangement are provided as components which are separate from one another and which each have to be fastened independently to the tire carrier.

Device for cleaning the tire of a roller


A speaker box includes a housing, a speaker unit and a flexible circuit board. The housing includes a base defining a through hole, and a cover. The flexible circuit board includes an end received in the housing and an opposite end exposed to outside of the housing. The flexible circuit board includes a first surface facing the cover and a second surface opposite to the cover. A first pad and a second pad are disposed at the second surface. The flexible circuit board includes a first mounting part, a second mounting part and a bending part. The first pad is arranged on the first mounting part and configured to be electrically coupled to the speaker unit. The second pad is arranged on the second mounting part and configured to be electrically coupled to external circuits. The second pad is exposed to outside of the housing via the through hole.

In recent years, with the remarkable development of science and technology, especially the development of mobile communication technology, more and more mobile electronic devices appear in people's daily life, such as smart phones, tablet computers, notebook computers and multifunction media players have already become indispensable personal belongings in people's life. With the popularity of these mobile electronic devices, the control of manufacturing costs is becoming more and more important for manufacturers. Thus, how to reduce manufacturing costs has become the focus of attention.
The speaker box as a voice play device has become a key component of the above mobile electronic equipment, which has a great impact on the manufacturing costs. A speaker box in the related art includes a housing, a speaker unit, and a flexible circuit board. The flexible circuit board includes two pads which are respectively located on opposite sides of the flexible circuit board.
However, an end of the flexible circuit board of the related art which is located inside of the housing needs to be bent 180 degrees during assembly, so that the pad on the end of the flexible circuit board is exposed to the outside of the housing for being electrically connected to the external circuit. Due to limitation of the structure of the housing, sometimes it is impossible to bend the flexible circuit board 180 degrees to cause one end of the flexible circuit board to reach the outside of the housing. Furthermore, bending 180-degree not only makes the manufacturing process complicated, but also weakens the overall strength of the flexible circuit board and increases the manufacturing cost.
Therefore, it is desired to provide an improved speaker box which can overcome at least one of the above problems.


Provided are a live detection method and apparatus for a high-voltage switch cabinet. The live detection apparatus for a high-voltage switch cabinet includes a robot body and a back-end server. The robot body includes a host module, a power module, a detection module and a motion module. The power module is electrically connected to the host module and the motion module. The host module is communicably connected to the motion module and the detection module. The detection module includes a visible light camera, an infrared thermal imager, an non-contacting ultrasonic sensor and an ultrahigh-frequency sensor. The motion module includes a horizontal motion module, a vertical motion module and a rotating motion module. The horizontal motion module includes a motor-driven carrier and a laser navigation system. The vertical motion module is secured to the motor-driven carrier.

High-voltage switch cabinets are used for directly supplying power to users, but most power consumer lines are difficult to configure according to the N-1 reliability principle as is done for power transmission lines. The reliability of switch cabinet directly determines the reliability of power supply to users. The large quantity and low manufacturing costs of high-voltage switch cabinets and the high costs of monitoring equipment make it impossible for switch cabinets to use an on-line monitoring apparatus which is used for monitoring a transformer or a Gas Insulated Switch cabinet (GIS) to achieve comprehensive and real-time on-line monitoring.
According to China Electric Power Research Institute's research on types of failures that switch equipment with voltage classes below 40.5 kV underwent from 1989 to 1997 and in 2004, insulation and current-carrying failures (including obstacles) account for 30%-53%. Jiangxi Electric Power Corporation's statistical result of types of failures that switch cabinets underwent from 2010 to 2015 shows that the proportion of insulation and current-carrying failures is as high as 53%.
Insulation and current-carrying failures are characterized by partial discharge or heating in the beginning. Therefore, the partial discharge detection and infrared thermographic detection of switch cabinets have an important and positive effect on reducing the fault rate of the switch cabinets. Live detection of a switch cabinet is performed according to different detection items by an operator carrying a partial discharge live detector and an infrared thermographic detector. This involves a large amount of detection work and takes a long time.

Live detection method and apparatus for a high-voltage switch cabinet


Pure water 3 is made to pass through a carbon dioxide contact mechanism, to become carbonated water, and is supplied to an ozone gas and hydrogen gas generation section, so that the concentration of generated ozone gas becomes stable. As a result, the concentration of the generated ozone gas is high and stable, and a high concentration can be maintained.

1. Field of the Invention
The present invention relates to an electrolytic gas generation method and electrolytic gas generation device for generating ozone gas by electrolysis, and more specifically, relates to an electrolytic gas generation method and electrolytic gas generation device for making ozone generation more stable and for generating high concentration ozone gas.
2. Description of the Related Art
Generation of ozone gas by electrolyzing water has been performed from more than 100 years. Formerly, dissolution and electrolysis for electrolyzing a solution including an anion having a high electronegativity to generate ozone was used. However, with the recent development of solid polyelectrolytes, an ozone generation device which uses electrolysis of water using the solid polyelectrolyte has been produced and put on the market.
Electrolysis of water using a so-called zero cap method, in which a perfluorocarbon sulfonate type cation-exchanger membrane is used as a solid electrolyte, and an anode and a cathode are closely arranged on the opposite sides thereof, has a simple structure and is easy to handle, having no corrosiveness except in the case of the ozone gas. Therefore, this method becomes dominant in the recent ozone generation by the electrolysis of water.
The concentration of ozone gas is about 20%, with the remainder being oxygen gas containing saturated vapor, and hence the ozone gas is a mixed gas of ozone and oxygen and hardly contains impurities.
Therefore, the use of ozone has been widely spread not only in the field of sterilization but also in the field of washing semiconductors recently. There is a disadvantage in that the power consumption slightly increases, as compared with a silent discharge method in which ozone is generated by using oxygen as a raw material, and applying a high frequency voltage thereto, but since the ozone gas concentration is high, its solubility in ultrapure water is high, giving an advantage in that high purity and high concentration ozone can be easily produced.
However, as the density of a semiconductor increases, microfabrication is required and, particularly, requests for washing accuracy has increased recently.
Moreover, the water quality of ultrapure water is improved with microfabrication, and ultrapure water without containing metals or organic matter at all has been generated and used.
In ozone generation by electrolysis, a change in the water quality of pure water, being, still now, a raw material, affects the ozone gas generation, thereby causing a change in a bath voltage, and a fluctuation in the ozone gas concentration.
Particularly, a fluctuation in the ozone gas concentration causes an instability in washing, and becomes a cause of insufficient washing. Therefore, stability in the ozone gas concentration has been strongly demanded (for example, see Japanese Patent Publication No. 2002-166279, pp 1 to 5, FIGS. 1 to 2).

Electrolytic gas generation method and electrolytic gas generation device


A liquid crystal compound represented by the following formula; ##STR1## wherein R.sup.1 and R.sup.2 each represents an alkyl group having 3-20 carbon atoms, and X represents a group ##STR2## or --O--, or a single bond, and a liquid crystal composition exhibiting optically tristable states comprising the liquid crystal compound represented by the above formula and an antiferroelectric liquid crystal compound.

As electrooptical devices comprising liquid crystals, electrooptical devices comprising nematic liquid crystals such as those of DSM, TN, G-H or STN types have been developed and put to practical use. These electrooptical devices comprising the nematic liquid crystals have a defect of a very slow response in the range from several milliseconds to several ten milliseconds and thus are limited in their applications. The slow response of devices utilizing a nematic liquid crystal is attributed to the fact that the torque for moving molecules is based on the anisotropy of dielectric constant and thus the power is not strong. Among these backgrounds, a ferroelectric liquid crystal which exhibits spontaneous polarization (Ps) and a strong torque based on Ps.times.E (E: applied electric field) and is capable of a high speed response in the range of several .mu. sec to several ten .mu. sec has been developed by Meyer et al. (Le Journal de Physique, 36, 1975, L-69). Furthermore, there is disclosed a ferroelectric liquid crystal in Japanese Patent Laid-Open Publication No. 307837/1988, there have already been proposed several high speed electrooptical devices comprising ferroelectric liquid crystals.
A typical example includes a device in which the helical structure is released by the force of wall faces and the two molecular alignments parallel to the wall faces is changed by the polarity of an applied electric field (see, for example, U.S. Pat. No. 4,367,924).
The aforementioned device is composed on the assumption of the presence of a compound which exhibits such an ideal bistable states as is shown by a field response wave pattern in FIG. 1. However, no compound which exhibits such an ideal bistable states as described above has been found, and bistable liquid crystal s synthesized hitherto show a field response wave pattern in FIG. 2 but not field response wave pattern in FIG. 1. It is the present state that if a device which exhibits a response wave pattern as shown in FIG. 2 is intended to be used for a switching circuit of light, such a pattern has a profile that transmittance varies gradually with the variation of an applied voltage from the minus side to the plus side and thus the object cannot be accomplished sufficiently with such a simple change of applied voltage as "on" and "off". Moreover, a bistable state liquid crystal having been synthesized is hard to form a monodomain structure as an ideal molecular alignment in the stage of an S*c phase at no electric field, and it causes disclination (defect) or twist which is the disturbance of the molecular alignment. It is thus difficult to realize the aforementioned ideal bistable alignment in a large area. Furthermore, it has a low threshold value (voltage at which the brightness varies at a predetermined extent), so that the dynamic drive of it may cause the lowering of contrast or the decrease of the range of viewing angle. The bistable state liquid crystal hitherto synthesized has no memory effect, since it cannot exhibit a hysteresis as shown in FIG. 1 but exhibits only a hysteresis as shown in FIG. 2. Thus, it is necessary to impress continuously a voltage at v.sub.3 in FIG. 2 or to apply a high frequency in order to maintain a stable response in the S*c phase in the liquid crystal, and it cannot avoid a large energy loss.
Eventually, it is the present state that many problems remain unsolved in conventional ferroelectric liquid crystal electrooptical devices notwithstanding the earnest desire of a high speed liquid crystal electrooptical device which takes advantage effectively of an applied field and a bond having a strong molecular alignment obtained in a ferroelectric liquid crystal.
Thus, there have been conducted researches on liquid crystal compounds exhibiting tristable states, characterized in that the liquid crystal compound realizes a stable molecular alignment having a distinct light-dark contrast depending on electric field applied, generates a distinct threshold property and a distinct hysteresis as shown in FIG. 3, realizes easily dynamic drive and is capable of a high speed response.
As a result, there have been proposed livid crystal compounds having tristable states as disclosed in Japanese Patent Laid-Open Publications Nos. 316367/1989, U.S. Pat. No. 5 171 471 and U.S. Pat. No. 4 973 738.
However, the liquid crystal compounds represented by the formulae: ##STR3## which are liquid crystal compounds exhibiting tristable states, have defects in their preparation processes that they are required for optical resolution and thus result in the expensive preparation costs because they are asymmetric compounds. As one of the methods for improving tile defects without diminishing the tristable states, there is a method for dilution and extending by adding other organic compounds. There is also another problem in this case that the tristable states are diminished by the addition of the other organic compounds in an amount of 20% or more, in some cases 10% or more.

Liquid crystal compounds and liquid crystal compositions containing them


An electrosurgical system includes an electrosurgical instrument with a pair of opposing first and second jaw members (2), (3). A first sealing electrode (9) is located on the first jaw member (2), while a second sealing electrode (10) is located on the second jaw member (3). One or both of the sealing electrodes are provided with electrically conductive stop members (12), the one or more stop members maintaining a predetermined spacing between the first and second sealing electrodes when the jaw members are in their closed position. One or more insulating members (14), (17), (19) are present to prevent the conductive stop members from causing an electrical short between the first and second sealing electrodes when the jaw members are in their closed position. An electrosurgical generator (20) includes a controller (22) capable of supplying a sensing voltage between one or more of the conductive stop members (12) and a return electrode (9), (10), (18) present on one or other of the jaw members, the controller measuring the impedance between the one or more stop members and the return electrode in order to measure a parameter of the tissue grasped between the jaws of the instrument.

It is known to provide an electrosurgical instrument in which the sealing of tissue is effected by means of a pair of jaw elements. U.S. Pat. Nos. 7,473,253 & 8,241,284 are two examples of this kind of instrument. These two patents describe the provision of one or more non-conductive stop members, in order to regulate the spacing between the jaws when tissue is held therebetween.


A method and/or system and/or apparatus providing deception and/or execution alteration in an information system. In specific embodiments, deceptions and/or protections are provided by intercepting and/or modifying operation of one or more system calls of an operating system.

The discussion of any work, publications, sales, or activity anywhere in this submission, including in any documents submitted with this application, shall not be taken as an admission that any such work constitutes prior art. The discussion of any activity, work, or publication herein is not an admission that such activity, work, or publication existed or was known in any particular jurisdiction.
In the history of conflict, providing deceptive information to adversaries has been a cornerstone of successful offense and defense. Information protection has included such examples of deception for defense as honey pots to gain insight on attacker behavior, lightning rods to draw fire, and program evolution as a technique for defending against automated attacks on operating systems. Long before computers existed, information protection through deception was widely demonstrated, however this history also demonstrates that deception is used far more by attackers than defenders.
Protecting information systems from various forms of attack has long been of concern to practitioners in the field. Some forms of protection are built into operating systems, such as user and/or password authentication. Other forms of protection include various software and sometimes hardware strategies. A very commonly used form of protection is anti-virus software. Inventor Fred Cohen, as early as 1988, proposed and implemented an integrity shell, which was a program that run in an operating system kernel space and used a modified execution system call to verify a check sum over every program before executing that program. Such a modified system call allowed the system to protect against viruses that hid within executable components, because the presence of such viruses would change the checksum of those executable components. Further information about this work is available at http://all(.)net/books/integ/vmodels.html.
It is believed to be generally known to modify parts of an operating system, including parts of kernel system calls, for various reasons. In some cases, modified system calls will preserve original system calls in order to remove modifications or in order to run original system calls after the modified portion is run. For example, such techniques are discussed in "The Linux Kernel Module Programming Guide" by Ori Pomerantz, believed available 1999-05-19. (see www(.)tldp(.)org/LDP/lkmpg/node20.html.)
Various strategies used in computer systems have at times included providing some type of misinformation. Some logic modules, for example, are designed to hide themselves from various operating system functions, such as process viewing functions, and thus can cause functions to provide a list of processes and/or files and/or users, for example, that are not complete. One use of such a strategy is mentioned in the context of a program referred to as the Kernel Intrusion System. This program is described as a kernel level rootkit that, among other things, makes modifications to the kernel to get some privileges, and hides itself from system administrators. Further information is available at www(.)packetstormsecurity(.)org/UNIX/penetration/rootkits/kis-0.9.tar.gz.
Inventor Fred Cohen has previously proposed using deceptions in the context of networked computers to direct attackers, for example, away from a protected system and into emulation systems or other systems in a network. Such work is discussed in, inter alia, U.S. utility patent application Ser. No. 09/696,893 claiming priority from Ser. No. 60/165,581 and U.S. provisional patent application 60/380,824.
Though limited modifications of operating systems and limited misinformation has been previously known in information systems, generalizable and/or modifiable techniques for providing deception and/or other altered behavior at an operating system level are not available.

Method and apparatus providing deception and/or altered execution of logic in an information system


An organic light-emitting diode display includes an organic light-emitting display device including a first electrode, an intermediate layer including an organic emission layer, and a second electrode; a first inorganic encapsulation layer on the second electrode; a second inorganic encapsulation layer on the first inorganic encapsulation layer; and an organic encapsulation layer on the second inorganic encapsulation layer. A refractive index of the first inorganic encapsulation layer is higher than a refractive index of the second inorganic encapsulation layer. The first inorganic encapsulation layer has an extinction coefficient of 0.02 to 0.07 and a refractive index of 2.1 to 2.3 at a blue wavelength.

1. Field
One or more exemplary embodiments relate to an organic light-emitting diode display and a manufacturing method thereof.
2. Description of the Related Art
Display apparatuses are apparatuses for displaying images. Among the display apparatuses, an organic light-emitting diode display has recently drawn much attention.
Unlike a liquid crystal device, the organic light-emitting diode display has self-emitting characteristics and, thus, may be thinner and lighter weight, as an additional light source is not needed. Also, the organic light-emitting diode display has high-quality characteristics, e.g., low power consumption, high brightness, high response speed, etc.

This patent is subject to a terminal disclaimer.


An AC/DC cylindrical magnetron with a drive system that absorbs large variations in the rotation of the target tube, an efficient high capacity electrical transfer system, and improved electrical isolation.

The cylindrical magnetron is used in a large coating machine for coating very large sheets of glass or other materials. One application where these sheets of glass are used is in construction of curtain wall buildings where a single glass sheet can be up to 15 feet wide by about 20 plus feet high. The sheets are run through the coating machine shortly after the glass is manufactured. Thus, these are large-scale machines which must rapidly and evenly coat glass as quickly as it can be manufactured. In addition to the quality of the coating the magnetron deposits upon the glass, dependability and serviceability of the magnetron is of the utmost importance.
This is not an easy task taking into account the constraints of the process that is involved. A cylindrical magnetron sputters material from a rotating target tube onto the glass as it is transported past the target. In order to coat such a large piece of glass the target tube can be up to 15 feet in length and 6 inches in diameter and can weigh 1700 pounds. Another complication is that the sputtering actually erodes the target tube during the sputtering process, so the target tube is constantly changing shape during its serviceable lifetime. The sputtering process can require that an extremely high AC or DC power (800 Amps DC, 150 kW AC) be supplied to the target. This power transfer creates extreme heat in the target tube and the surrounding components, which must be cooled in order assure proper performance and to avoid catastrophic failure of the magnetron. Thus, water is pumped through the center of the rotating target tube at high pressure and flow rate. Efficient and effective sputtering also requires that the process take place in a vacuum or a reduced pressure relative to atmosphere. Thus the rotating target must have a very robust sealing system to prevent the high pressure water from leaking into the vacuum environment.
Rotating such a large target tube in such an environment is a difficult task. FIG. 1A depicts magnetron 100 for illustrative purposes. FIG. 1B shows magnetron 100 integrated into a large glass coating system 130. Glass coating system 130 may be several hundred feet long and contain many magnetrons. Target tube 106 is supported by two end blocks 104 and 108 as glass sheet 109 passes by. The end blocks 104 and 108 generally supply cooling water, support and rotate the target tube, support a stationary magnetic array within the rotating target tube, and transfer the large amounts of electricity needed for the sputtering process. Effectively transferring electrical power to a rotating target tube is also a complex problem. Maintaining electrical isolation in a sputtering process is also crucial to continually laying down a uniform coating on the glass. If the drive system is not properly electrically isolated from the sputtering process, it will affect the quality of coating deposited upon the glass. The sputtered material may in fact also coat the drive and electrical components of the magnetron itself rather than the glass if they are not properly isolated. Aside from resulting in a poor coating, this has many other ramifications on the continuous reliable operation of the magnetron. For further information please refer to xe2x80x9cCoated Glass Application and Marketsxe2x80x9d by Russell J. Hill and Steven J. Nadel, The BOG Group, 1999 (ISBN #0-914289-01-02).
The process of sputter deposition occurs at a high electrical potential, typically in an environment of a vacuum (relative to ambient pressure), with or without the addition of a gas to that environment. This potential is attained in DC operations between distinct anodes and cathodes. Typically the target having the material to be deposited functions as the cathode in DC applications. In the case of AC operations which are achieved by the use of dual rotational targets the targets constantly alternate potential and each provides the other the function of anode and cathode to complete the electrical circuit. For electron transfer between the anode and cathode to occur they must be and remain physically and electrically isolated from each other. The present invention transfers electrical power to and from the rotating target tubes in either DC or AC mode at the high power levels required.
Additionally the materials sputtered are often times conductive of themselves. Highly conductive metals such as silver, gold, copper, nickel, chromium and titanium may be applied. These materials differ depending upon the type (color, reflectivity, etc. . . . ) of film desired. Stray material can and does collect within the operational environment surfaces. If this stray material collection is not managed it can accumulate to an extent that it can lead to the failure of the electrical isolation of the cathode and anode resulting in a short between them or the formation of conductive paths that compromise the electrical isolation of other components within the area. This will lead to poor and uneven film quality and will require that the magnetron be disassembled and cleaned, both extremely undesirable consequences. Downtime of the magnetron, and thus the glass making process, is extremely costly and inconvenient for the glass manufacturer.
In either the case of DC or AC operation there are substantial voltages and currents applied to achieve rapid deposition rates to achieve increased production. This electrical energy needs to be carefully managed to have a controllable process that is efficient and safe. To achieve this several unique and novel features have been designed into the magnetron and its endblocks.
To transfer DC or AC electrical power to or from the target tube there are several particular aspects of each form of electrical power that need to be addressed that are not readily apparent. First, in DC operation current flow is through the cross section of the conductor or interface. Second, in the AC frequency range used for sputter deposition, typically referred to as the mid-frequency range (about 30 to 80 kHz or higher), the current flow occurs along the surface, or skin, of the conductor or interface. Penetration of the current into the conductor is minimal and not an easily modeled theoretical calculation. It is dependent upon the material from which the conductor is formed and upon the frequency of the alternating current. As the frequency increases the penetration into the conductor decreases. Third, in AC operation as current, voltage and frequency increase, a phenomenon known as an inductive heating effect can occur in various electrically conductive materials. The inductive depth and magnitude of the inductive heating varies with the shape, orientation and location of the materials relative to the current path of the AC circuit. The inductive phenomenon in this sputtering application is not well understood and there is little literature or documentation available describing its effects and mitigations for practical application. What is known is that metallic conductors can be inductively heated and that the effect increases in a non-linear manner the closer the secondary material is to the AC circuit path.
Inductive heating only occurs in AC operation. As the AC frequency increases the effect increases for a given voltage and current. Inductive heating occurs when high frequency alternating current travels from one point to another through a conductor. Physical contact with the conductor is not necessary for inductive heating to occur. The alternating current induces alternating electromagnetic flux fields around the conductor. These flux fields induce circular electron flow within electrically conductive materials in the vicinity of the fields. The induced circular electron flows are termed eddy currents. The heating of materials within the alternating flux fields is dependent on physical location, material conductivity, coupling, frequency, and power density. Heating of the material increases as the material comes closer to the conductor, as the material magnetic permeability increases, as the frequency increases, and as the power density increases.
FIG. 2A illustrates a cross section of an ideal target tube. Target tube 110 has opposing faces 110a and 110b. In ideal conditions face 110a and 110b will be parallel to each other and perpendicular to the centerline 110c, the axis of rotation of target tube 110. Ideally, the inner diameter at face 110a will be concentric with the outer diameter at face 110a. Likewise, the inner diameter at face 110b will ideally be concentric with the outer diameter at face 110b, and the inner diameter of the tube will be concentric with the outer diameter anywhere along the length of the tube. In reality, this is rarely true because it is not only difficult to manufacture such a tube, but also to inspect the tube throughout its entire length, and thereafter reject it as out of spec. Furthermore, as discussed earlier, the tube actually changes shape during normal operation as material is sputtered from the tube. Face 110a and 110b may not be parallel in one or often multiple axis of reference, as shown in FIGS. 2B-2D. FIG. 2B illustrates a simple sag of the target tube. FIG. 2C illustrates warpage of the target tube above and below the axis of rotation. FIG. 2C illustrates complex warpage of the target tube wherein the warping occurs in more than one plane. The net result is eccentric rotation of the target tube. The length of target tubes can also vary due to machining variations and also from elongation of the tube as it heats up. This elongation is an additional stress in a rigid support system.
Therefore there must be some allowable tolerance for the variation and imperfection in shape of the target tube. Additionally, improved electrical and thermal isolation is needed to prevent costly downtime of the magnetron and the other machines involved in the manufacturing and coating process.
The endblocks of the cylindrical magnetron provide a unique solution to the problems associated with the operational functions required for sputter deposition of materials utilizing a cylindrical target in DC and AC applications, particularly when high current levels are required for increased rates of deposition.
The present invention adapts to a greater amount of target tube manufacturing and process related variations with angularly compliant mechanisms at each end. The mechanisms also accommodate growth or variations in length of the target tube along the axis. This compliance reduces the transmission of stress within the structure of the magnetron and allows for more consistent and reliable operation.
The invention also simplifies operational alignment, installation, compatibility for retrofit to pre-existing installation sites, assembly, and servicing characteristics.
Electrical isolation is another aspect of the invention. Redundant isolation areas are included to prevent grounding of the device and maintain the floating electrical isolation during operation both initially and over extended periods of usage without maintenance.
Another aspect of the invention are thermal systems to control and minimize the effects of heat generated at static locations where electrical power is provided to the device and at dynamic locations where electrical power is transferred within the device to rotating components. Control and minimization of AC inductive heating is achieved by material selection, construction and geometry taking into account constraints of the sputter deposition process.
Another aspect of the invention incorporates dual water and vacuum sealing to handle the dynamic flow of water through a rotating target in vacuum conditions. The dynamic water seals operate in a primary/secondary set with an unobstructed draining of the interseal area which provides a conditional alarm function while precluding the pressurization of the secondary seal, thereby increasing its operational reliability. The dynamic vacuum seals operate in a primary/secondary set with a differentially pumped interseal area between the primary and secondary seals to provide an effective initial vacuum seal engagement while also providing a backup seal and monitoring between the seals as an added feature for process operations.
Yet another aspect of the invention is the use of chromium oxide surfaces that have been diamond polished to provide wear resistant seal surfaces for both the water and vacuum rotational sealing areas.

Cylindrical AC/DC magnetron with compliant drive system and improved electrical and thermal isolation


During a sEEG (stereo-electroencephalography) intervention into the skull of a patient, there is requirement to drill a large number of trajectories. Typically, instrument stabilisation platforms and robots for protocols requiring only one or two trajectories are rigidly fixed to the skull using surgical anchor members fixed into the skull around the one or two trajectories. However, because sEEG interventions require a large number of trajectories, an impractical number of surgical anchor members need to be fixed into the skull resulting in patient discomfort. Attachment of an intervention platform to all surgical anchor members is not required at once. Accordingly, it is proposed to search for intersection points of the maximum extent of an intervention platform between at least two trajectory entry points on an object of interest of patient, so that at least one surgical anchor member can be shared when the intersection point is at first and the second trajectories. Any reduction in the number of surgical anchor members inserted into a patient reduces risk and discomfort. The positioning of the shared anchor members can be optimised to enable good mechanical stability, and/or optical registration performance. Furthermore, the number of surgical anchor members required for intervention can be reduced. Because the surgical anchor members are sterilised and made from high quality metal, a cost for performing the procedure can also be reduced.

In the field of surgical cranial intervention, there is often a need to place an intervention device inside the cranial cavity of a patient using surgical tools such as electrodes for the purpose of epilepsy treatment, interventions in the regions of the cochleae, or the treatment of cancerous objects inside the skull. For example, stereo-electroencephalography (sEEG) or deep brain stimulation (DBS) require placement of such electrodes along a placement trajectory.
Historically, such surgical cranial interventions have been performed using a "head clamp" fixed directly into the bone of a patient's skull. Such head clamps provide a stable reference mount to a patient that can be used for mounting tool guides and the like during an intervention, and are still widely used. An example of a head clamp (patient support frame) is the "Mayfield frame".
More recently, partially automated cranial intervention procedures have been proposed. In particular, partially automated robotic approaches use a large articulated robot to access the target point, whilst the patient's skull is fixed in a head clamp. Another approach involves the mounting (fixation) of a movable robotic device platform directly onto a patient's skull.
However, improvements to the approaches used in such partially automated cranial intervention procedures are still possible. The present invention has the object of improving the approaches applied to partially automated cranial intervention procedures.
Aspects of the present invention, examples and exemplary steps and their embodiments are disclosed in the following. Different exemplary features of the invention can be combined in accordance with the invention wherever technically expedient and feasible.

Planning of surgical anchor placement location data


In accordance with embodiments of the present disclosure, an information handling system may include a network interface and a processor. The network interface may include a plurality of physical ports, each physical port configured to be coupled to a corresponding switch interfacing between the physical port and a switching fabric comprising one or more virtual local area networks. The processor may be configured to receive workload requirements defining operational parameters for one or more virtual network interface controllers and automatically assign each of the one or more virtual network interface controllers to a partition of one of the plurality of physical ports based on the operational parameters.

As the value and use of information continues to increase, individuals and businesses seek additional ways to process and store information. One option available to users is information handling systems. An information handling system generally processes, compiles, stores, and/or communicates information or data for business, personal, or other purposes thereby allowing users to take advantage of the value of the information. Because technology and information handling needs and requirements vary between different users or applications, information handling systems may also vary regarding what information is handled, how the information is handled, how much information is processed, stored, or communicated, and how quickly and efficiently the information may be processed, stored, or communicated. The variations in information handling systems allow for information handling systems to be general or configured for a specific user or specific use such as financial transaction processing, airline reservations, enterprise data storage, or global communications. In addition, information handling systems may include a variety of hardware and software components that may be configured to process, store, and communicate information and may include one or more computer systems, data storage systems, and networking systems.
A network interface controller (NIC) (also known as a network interface card, network adapter, local area network adapter, and other terms) is a physical hardware component that communicatively couples an information handling system to a network of one or more other information handling systems. In some cases, it is desirable or useful for a network administrator or other user to provision one or more virtual NICs for an information handling system. A virtual NIC is an abstract virtualized representation of an information handling system network interface that may or may not correspond directly to a physical network interface. The virtual NIC may appear to an operating system as a full-fledged NIC (e.g., an Ethernet NIC), complete with its own Media Access Control (MAC) address. The NIC emulation can be coupled to a host operating system in at least two ways. First, it may be bridged to the same physical network as a physical NIC. Second, it may be coupled to a virtual network created on the host operating system.
Traditionally, a virtual NIC is provisioned manually, wherein a user identifies the workload requirements (e.g., bandwidth, priority, redundancy, connectivity, etc.) for the virtual NIC and associates it with one or more partitions of a physical NIC in order to implement the virtual NIC. Such manual provisioning is cumbersome and can often lead to error.

Systems and methods for automating virtual network interface controller configuration during workload provisioning


Isolated nucleic acid molecules comprising a gene segment from a rhesus rotavirus (RRV) or from one of three rhesus: human reassortant viruses are disclosed, including isolated nucleic acid molecules having a sequence selected from the group consisting of: SEQ ID NO: 1-14, inclusive, and isolated nucleic acid molecules encoding a protein having a sequence selected from the group consisting of SEQ ID NO: 15-28, inclusive, as well as variants of the isolated nucleic acid molecules.

Rotavirus is a segmented, double-stranded RNA virus that is the major cause of severe gastroenteritis in infants and young children. Profound fluid and electrolyte loss often leads to hospitalization for life-saving rehydration therapy. Where access to medical care is limited or unavailable, volume depletion, shock and death can occur. Annually, nearly one million childhood deaths in developing countries have been ascribed to inadequately treated rotavirus gastroenteritis. In the industrialized world, more than 30% of the children admitted to hospitals with acute gastroenteritis have rotavirus infections.

Sequence analysis of the tetravalent rotavirus vaccine

The United States of America as represented by the Department of Health and Human Services


The present invention includes methods, apparatuses, systems, platforms and associated software applications for facilitating semi-automatic or automatic trading of Financial Assets based on the past or present trading activities of other traders (e.g. “Social Trading”, optionally implemented as a “Linked Account Trading System”).

Traders (Forex, stocks, commodities etc') may now rely on automatic tools ("algo-trading"). In electronic financial markets, algorithmic trading or automated trading, also known as "algo-trading", "black-box trading" or "robo-trading", is the use of computer programs for generating and executing trading orders, with the computer algorithm deciding on aspects of the order such as the timing, price, or quantity of the order, or in many cases initiating the order without human intervention. The investment decision and implementation may be augmented at any stage with algorithmic support or may operate completely automatically ("on auto-pilot").
A considerable amount of financial trading is now performed via the Internet, using one of many trading websites to facilitate trading. It has been suggested to data-mine the trading transactions performed via such websites, in order to detect market trends and to allow a novice trader to follow such trends.
Similarly, software has been developed that rates the trading success of individual traders, and upon detection of a "master trader" ranked with a high financial success rate, the software allows other traders to automatically copy future trades performed by such "master traders". While some websites maintain the anonymity of the master trader, others allow such master traders to expose their identity and, for instance, chat with other traders online.
The inventors have developed one such social trading website which allows users to follow trades performed by other users, and allows users to view ranking of "master traders". This website has the URL: http://openbook.etoro.com.
Once a user has requested to automatically copy a "master trader", the software will blindly follow any trading actions taken by the master trader.
The disadvantage of such automatic copying of a "master trader" lies in human fallacy, namely, even though a specific master trader has been ranked as being successful over a given amount of time, this does not ensure that he will notice sudden or subtle changes in market trends. A master trader may, for instance, be out for a weeklong illness during which he performs no trades, and his automatic "blind followers" may lose significant sums if the market takes a sudden turn.
The need exists for trading software that allows detection of "master traders", allowing others to follow their trading transactions only in such cases where these trades are predicted to be profitable. The need exists for software that analyzes trades performed by master traders, and algorithmically checks whether the market conditions support this trade. In such cases where the algorithms suggest otherwise, the software will override the "automatic" following of the master-trader and will instruct the novice trader to disregard the master-trader's transaction. Additionally, the need exists for software that utilizes data mining to detect market trends unnoticed by a predefined master trader, and that informs a trader that trades should be performed that the master trader has overlooked.

Social based automatic trading of currencies, commodities, securities and other financial instruments


Provided herein are methods and compositions for controlling auxin responses in plants.

Plant hormones have been known and studied for years. Auxins, primarily indole-3-acetic acid (IAA) promote both cell division and cell elongation, and maintain apical dominance. Auxins also stimulate secondary growth in the vascular cambium, induce the formation of adventitious roots and promote fruit growth. Primary auxin activities are simulation of cell growth and elongation.
The most common naturally occurring auxin is indole-3-acetic acid (IAA). Synthetic auxins include indole-3-butyric acid (IBA); naphthalene acetic acid (NAA); 2,4-dichlorophenoxy acetic acid (2,4-D); and 2,4,5-trichlorophenoxy acetic acid (2,4,5-T or agent orange). Many of these synthetic auxins have been employed for decades as herbicides, producing accelerated and exaggerated plant growth followed by plant death.
Cytokinins, e.g., zeatin, are produced primarily in the roots of plants. Cytokinins stimulate growth of lateral buds lower on the stem, promote cell division and leaf expansion and retard plant aging. Cytokinins also enhance auxin levels by creating new growth from meristematic tissues in which auxins are synthesized.
The ratio of auxin to cytokinin can control differentiation of plant cells. Auxin is synthesized in the shoot apex, while cytokinin is synthesized mostly in the root apex. Thus, the ratio of auxin to cytokinin is normally high in the shoots, while it is low in the roots. If the ratio of auxin to cytokinin is altered by increasing the relative amount of auxin, root growth is stimulated. On the other hand, if the ratio of auxin to cytokinin is altered by increasing the relative amount of cytokinin, shoot growth is stimulated.
Plants require a certain ratio of auxin, e.g., IAA, to cytokinin for cell division. While the ratios may vary, the ratio of IAA to cytokinin must be much greater for cell division in the apical meristem tissue than the ratio in the meristem tissue of the roots. Each part of a plant may require a different IAA to cytokinin ratio for cell division. For example, different ratios may be required for cell division in the stem, fruit, grain and other plant parts. The ratio for apical meristem cell division may be considerably more, as much as 1000 times greater, than the ratio necessary for root cell division.
Shade is a key environmental cue that elicits rapid biosynthesis of auxin to promote elongated stem and petiole growth and accelerated reproduction (Tao et al. (2008) Cell 133:164). Inhibiting auxin perception can reduce shade-induced elongation of plant structures.
Auxin is also involved in plant resistance to insects and disease. In the 21-30° C. temperature range, plants produce sufficient amounts of auxins, particularly IAA, to maintain normal growth. Outside of these temperatures, auxin production declines for most plants, and microorganisms and insects are better able to multiply and feed on the plant. Pathogens can also exploit spatial auxin variations, e.g., those that can tolerate greater levels of IAA can attack the upper plant tissues, while those that require lower IAA levels attack the roots. By controlling the level of auxins in plant tissues, the ability of plants to resist attack by both pathogens and pests can be increased.
Auxin signaling is primarily mediated by three protein families: the AUXIN RESPONSE FACTOR (ARF) family of transcription factors that is responsible for the regulation of auxin-inducible gene expression, the auxin/indole-3-acetic acid (AUX/IAA) transcriptional inhibitors that interact with the ARFs and prevent their action, and F-box proteins that are part of the ubiquitin protein ligase SCFTIR1 complex and control the rapid ubiquitin-mediated degradation of the AUX/IAA in response to auxin (Leyser (2006) Curr. Biol. 16:R424). TIR1 and related F-box proteins act as auxin receptors; binding of auxin strongly enhances their interaction with AUX/IAA and ultimately leads to degradation of AUX/IAA inhibitors (Dharmasiri et al. (2005) Nature 435:441; Kepinski & Leyser (2005) Nature 435:446).
Ethylene (C2H4) is a gaseous plant hormone that affects developmental processes and fitness responses in plants, such as germination, flower and leaf senescence, fruit ripening, leaf abscission, root nodulation, programmed cell death, and responsiveness to stress and pathogen attack (Johnson and Ecker (1998) Annu Rev Genet. 32, 227-254). Another effect of ethylene on plant growth is the so-called triple response of etiolated dicotyledoneous seedlings. This response is characterized by the inhibition of hypocotyl and root cell elongation, radial swelling of the hypocotyl, and exaggerated curvature of the apical hook.
Genetic screens based on the triple response phenotype have identified more than a dozen genes involved in the ethylene response in plants. Genetically-modified and naturally-occurring mutants in ethylene-related genes are commonly used in agriculture and commercially, as well as for study of plant processes. These mutants can be divided into categories: constitutive triple response mutants (e.g., eto1, eto2 and eto3, ctr1 and ran1/ctr2); ethylene insensitive mutants (e.g., etr1, etr2, ein2, ein3, ein4, ein5, and ein6); and tissue-specific ethylene insensitive mutants (e.g., hls1, eir1, and several auxin resistant mutants). Bleecker and Kende (2000) Annu. Rev. Cell Dev. Biol. 16:1 provides a review of ethylene signaling and loss-of-function mutants.
Ethylene and auxin signaling pathways are relatively well characterized. One interaction mode occurs at the hormone biosynthesis level: Auxin induces ethylene biosynthesis by upregulation of 1-aminocyclopropane-1-carboxylate (ACC) synthase, the key enzyme in ethylene production (Abel et al. (1995) J. Biol. Chem. 270:26020). Ethylene influences auxin levels by regulating the expression of two WEAK ETHYLENE INSENSITIVE (WEI2 and WEI7) genes that encode subunits of anthranilate synthase, a rate-limiting enzyme in Trp biosynthesis (Stepanova et al. (2005) Plant Cell 16:2230), from which pathway auxin is at least partially derived (Woodward & Bartel (2005) Ann. Bot. 95:707).
Synergistic effects of auxin and ethylene have been well defined in the regulation of hypocotyl elongation (Vandenbussche et al. (2003) Plant Physiol. 133:517), root hair growth and differentiation (Pitts et al. (1998) Plant J. 16:553), apical hook formation (Li et al. (2004) Dev. Cell 7:193), root gravitropism (Buer et al. (2006) Plant Physiol. 140:1384), and root growth (Rahman et al. (2001) Plant Cell Physiol. 42:301), showing that these two signaling pathways also interact at the molecular level. Auxin and ethylene also have synergistic effects on shade avoidance. In shade, auxin and ethylene biosynthesis rapidly increases. Moreover, exogenous ethylene escalates auxin biosynthesis and addition of auxin enhances ethylene production (Abel et al. (1995) J. Biol. Chem. 270:19093; Stepanova et al. (2005) Plant Cell 17:2230).

The Regents of the University of California


Systems and methods are disclosed for pressure-sensitive, electrophoretic displays, which may optionally include haptic feedback. A display may comprise a first conductive layer having a pressure-sensitive conductivity and an electrophoretic layer positioned adjacent to the first conductive layer, wherein the electrophoretic layer is in electrical communication with the first conductive layer and is configured to locally change state based on a pressure applied to the first conductive layer. Local and global writing and erasing of the display can also be achieved.

This invention relates to electro-optic displays. More specifically, this invention relates to systems and methods for pressure-sensitive electrophoretic displays or pressure-sensitive magnetoelectrophoretic displays. In some embodiments, the displays include haptic feedback. The described displays can be manufactured inexpensively and can be used for writing and drawing, or they may be incorporated into surfaces, touch panels, etc.
Haptic feedback is increasingly used in the electronic device industry. Most of these feedback schemes rely on sensing the force applied in some context and then relaying that force to the user via actuators, such as piezoelectric, acoustic etc. Passive haptic feedback mechanisms are also known in the art. These mechanisms require no additional control circuitry or additional mechanical relays. Any system with a spring or stiffness is an excellent example of this idea. As the spring is compressed/extended, the restoring force, which is exerted by the spring to the surface it is attached to, grows. As long as the user compressing/extending the spring is paying attention, the stiffness of the spring provides haptic feedback.
Recently, passive haptic feedback has been incorporated into various displays in order to provide increased feedback and control to the user of the display. Such passive haptic feedback is often incorporated into interfaces that allow users to write on the display and produce a change in the state of the display. For example, touch panel displays on appliances may include both optical and tactile feedback to indicate that a button or function has been activated. Such dual feedback systems are especially important in home appliances because there is such a variety in visual and auditory health among the users. For example, a visually impaired user needs the haptic feedback to know a she has successfully programmed the microwave.
As used herein, "display" includes both visual displays in which the output image is rendered using a pixelated backplane (typically addressed as either an active or a passive matrix) as well as those in which the entire module is a single "pixel". In the former instance, writing on a display may include a stylus that interacts with a digitizer combined with active reproduction of the strokes by mapping the digitized stylus motions to the pixels of the display. Alternatively, especially in the latter single pixel displays, a writing implement may directly interact with the medium, causing some physical change that manifests directly as a local change in the optical property. This direct interaction is sometimes described as direct writing.
Displays of the latter category include the Fisher Price MAGNA DOODLE and that Kent Displays BOOGIE BOARD. In the instance of the MAGNA DOODLE, a magnetic stylus pulls magnetic particles to a viewing surface, thereby showing as writing. In the BOOGIE BOARD, a local change in pressure (caused by writing with a hard-plastic stylus tip) gives rise to a change in the state of a cholesteric liquid crystalline material that leads to scattering of light above a black background. In the BOOGIE BOARD, the applied image can be erased by application of an electric field across the whole display. When this is done, the entire display reverts to a dark state; thus, this kind of an erasing procedure is referred to as "global" erasing. However, in the currently available BOOGIE BOARD products, it is not possible to "locally" erase the writing; that is, the user can erase the whole writing or drawing, but not only part of it.
In view of the above, a display that is capable of both local and global writing and erasing using a true change in state would provide an improved, natural writing experience to a user. If this writing functionality were additionally available with haptic feedback, the experience would be further improved.

Pressure-sensitive writing media comprising electrophoretic materials


A flip-chip package for implementing a fine solder ball, and a flip-chip packaging method using the same. The flip-chip package includes a first wafer having a first electrode and a first under bump metal (UBM) formed on the first electrode and electrically connected to the first electrode; and second wafer opposing the first wafer and having a second electrode located in a position corresponding to the first electrode, and a second UBM formed on the second electrode and electrically connected to the second electrode. The first wafer has a depression formed on one or more areas adjacent to the first UBM, which depression partly receives a solder ball that connects the first and the second UBMs upon flip-chip bonding of the first and second wafers. Since the UBM is formed as an embossing pattern, a fine solder ball can be implemented. Additionally, the reliability of the package can be improved.

1. Field of the Invention
The present invention relates to a semiconductor flip-chip package. More particularly, the present invention relates to an under bump metal (UBM) for implementing a fine pitch solder ball, and a flip-chip packaging method using the same.
2. Description of the Related Art
As the speed and integration of semiconductor chips has been improved, semiconductor chip elements have become finer, and the number of I/Os has increased. Methods for packaging a semiconductor chip in a minimum space, such as a ball grid array package and a chip scale package, have recently been introduced. The semiconductor chip is packaged using diverse electric connections such as wire bonding, tape automated bonding (TAB), and flip-chip bonding. Flip-chip bonding is most effective for a high-speed, intelligent and high-density package, in which an electrode arranged on the semiconductor chip and a wafer connection terminal are directly connected.
FIGS. 1A and 1B illustrate a package using conventional flip-chip bonding. Referring to FIG. 1A, solder bumps 31 and 32, as a connection medium, are deposited on a connection terminal (not shown) on a wafer 10. The solder bumps 31 and 32 take on the shape of a sphere by a reflow process, and a semiconductor chip pad 40 is bonded thereto to assume the shape 31a, 32a. The solder bumps 31 and 32 are hereinafter referred to as solder balls 31 and 32.
To enable the solder balls 31 and 32 to easily adhere to the semiconductor chip pad 40, under bump metal (UBM) 21, 22, 41 and 42 is formed on a bonding area between the wafer 10 and the semiconductor chip pad 40. The UBM 21, 22, 41 and 42 is formed by evaporation-depositing or etching a metal such as Cr, Au, Ti and Cu, so as to enhance wettability of the solder balls 31 and 32. The UBM also prevents diffusion of the solder so that the solder component cannot penetrate into the semiconductor chip.
As electronic products are miniaturized, more attention is being paid to package size. Therefore, fine pitch solder bumps have been developed. However, in forming fine pitch solder bumps, problems often occur in reliability of the package. Especially when the semiconductor chip pad 40 is bonded onto the solder balls 31 and 32, a shear stress is applied to the solder balls 31 and 32 by pressure from the wafer 10 and the pad 40, as shown in FIG. 2B. The pitch between solder balls 31 and 32 is determined according to the size of the solder balls, temperature, and force applied to the solder balls. In the prior art, the solder balls 31 and 32 are transversely deformed by the shear stress, thereby limiting the pitch between solder balls. As a result, a fine pitch pattern is hard to achieve.

UBM for fine pitch solder ball and flip-chip packaging method using the same


A method of manufacturing a semiconductor device is provided. The method includes: (A) forming an insulating film with a porous structure on a substrate; (B) forming a trench in the insulating film, the trench being used for forming an interconnection; (C) depositing a metal layer over the insulating film such that the trench is filled in with the metal layer; (D) forming the interconnection by removing an excess metal layer outside the trench; (E) modifying a surface of the insulating film to form a modified layer on the insulating film; and (F) forming a metal film selectively on the interconnection by using plating solution after the (E) modifying process.

1. Field of the Invention
The present invention relates to a method of manufacturing a semiconductor device.
2. Description of the Related Art
In a semiconductor device of the 65 nm node generation and thereafter, decrease in device size and increase in device speed strengthen the following tendencies: (1) a copper (Cu) interconnection is adopted; and (2) an insulating film having a porous structure is used for an interlayer insulating film.
Japanese Laid-Open Patent Application JP-P2005-79116 discloses a method of manufacturing a semiconductor device whose object is to prevent barrier metal or interconnection material such as Cu or the like from diffusing into an interlayer insulating film. The manufacturing method includes: a process of forming a thin film made of insulating material; a process of punching a hole in the thin film; a process of exposing the thin film to an atmosphere of noble gas plasma; and a process of depositing conductive material to fill in the hole. It is described in the patent document that the diffusion of the barrier metal or the interconnection material into the interlayer insulating film can be thereby prevented reliably and easily.
Japanese Laid-Open Patent Application JP-P2002-43315 discloses a technique of forming a layer containing cobalt on a surface of a copper interconnection through an immersion plating method by the use of metal catalyst.
Japanese Laid-Open Patent Application JP-P2000-200832 discloses a technology for increasing adhesiveness of an inorganic barrier film with respect to a copper interconnection or a copper barrier which exists in an interconnecting structure such as a dual damascene structure in a semiconductor device. For that purpose, a reduction plasma treatment process using gas selected from H2, N2, NH3, noble gas, and mixture of these gases is employed.

Method of manufacturing semiconductor device


The image dot gain that normally occurs in a printing press is controllably simulated as a separate step in the process of producing accurate color proofs. The simulation is attained by placing a diffuser plate between a high-intensity light source and a color-separated image master along with its corresponding image receptor. By varying the position of the diffuser plate the percentage of image dot gain is accurately controlled as an independent variable without the need to alter the exposure time.

1. Field of the Invention
This invention relates to color proofing, and more particularly to the production of color proofs that include independent simulation of the expected image dot gain of a color printing press.
2. Description of the Prior Art
Modern color printing of high-definition accurate-color pictures is accomplished by a four-step printing process comprising sequential application of standardized ink colors to a print medium in a uniform pattern location but with varying pattern size. FIG. 1(a) shows a typical grid containing colored dots of equal size thereon. On an actual printed picture the dots are present but the grid lines are not; the grid lines are shown only for the purpose of explanation. A multiplicity of equal-sized dot patterns as shown in FIG. 1(a) printed on a white page would produce a grey-looking region as viewed by the human eye. Therein, Y means yellow, B means black, M means magenta, and C means cyan. It is to be understood that the dots are very small in size, so as to be indistinguishable to the unaided human eye. Large regions of such sets of dots are integrated by the human eye into a continuous-looking image of some shade of grey depending on what percentage of the grid the equal-sized dots fill.
In order to obtain varying hues, as opposed to just varying shades of grey, the different-colored dots are varied in size with respect to each other as shown in FIG. 1(b). The grid section shown would produce a tiny region with a greenish look to the human eye. By combining many thousands of grid sections of varying dot sizes, a multi-colored print is produced in accordance with a desired pattern (i.e., a colored picture). The dot sizes and their relative magnitudes must be controlled very accurately, since a mere 2% variation in relative dot size can produce a humanly discernible change in color.
In standard practice, the colored picture printing process starts with the separation of a colored photographic image into four separate image maps containing appropriate variable weightings (i.e. dot sizes) of yellow, black, magenta, and cyan respectively.
Samples of small sectors of such maps are shown in FIGS. 2 (a-d); again, the grid lines are shown only for the purpose of explanation--they do not actually appear on the maps. These separate-colored image maps are referred to as "separations", the preparation of which has been standardized in the half-tone printing industry. Once the form separations have been made for a particular picture, they are used to generate four corresponding master printing plates by well-known optical exposure techniques. By observing close mechanical tolerances, the printing plates are then inked and sequentially applied to the same carefully-aligned print paper. The result is a high-quality multicolored print corresponding closely to the original photograph.
There are a variety of variables that must be controlled accurately in order to produce high-quality prints using the approach described above, e.g.: (1) "dot range" (i.e. the relative extremes of dot size); (2) the "solid density" (i.e. the color density of a solid patch); and (3) "dot gain" (i.e. the small increase in dot size from the original separations to the final print due to normal ink spreading during printing).
Before a printing run is done, it is usually desirable to produce a "proof" print from the four separations using photographic techniques. Since the object of a proof is to predict closely what the final prints will look like, it is necessary to simulate the dot gain phenomenon during the proof making process. The currently-used technique for simulating dot gain comprises exposing the proof photographic paper to the combined separation patterns for a longer-than-necessary time, thus causing the respective re-imaged dots to "bleed" outwardly to diameters somewhat larger than those of the original separation. Unfortunately, exposure time has a markedly nonlinear effect on photographic receptors with regard to various factors such as image development process grain size, color density (i.e., color shade), and even to some degree color hue. Thus, increasing exposure time to obtain the desired dot gain similation can adversely affect other factors that impact the clarity and fidelity of the resulting proof photograph. Some compromise of proof quality must therefore be accepted using currently-known techniques.
It is therefore an object of the instant invention to provide a method and apparatus for simulating dot gain during the process of making photographic proofs without unnecessarily altering the photographic exposure time of the proof film.
In the related art, U.S. Pat. No. 4,708,459, issued to Cowan et al. on Nov. 24, 1987, discloses at Column 12, line 29 through column 15, line 15, known techniques for accomplishing some control over dot gain, including exposure control, working voltage control, and use of a transparent spacer, but the independent dot gain control technique of the instant invention is not shown or suggested.
U.S. Pat. No. 4,229,097 issued to H. N. Vulmiere et al. on Oct. 21, 1980, describes a system for creating enlarged half-tone or continuous-tone negatives for four-color printing. This system, as summarized at column 2, line 26 through column 3, line 26, utilizes various individual lenses, a condensor, an auxiliary light source, frosted discs, and other apparatus in combination. Nowhere therein is there disclosed or suggested the apparatus or method of the instant invention.
U.S Pat. No. 4,239,385, issued to Hujer on Dec. 16, 1980, discloses, at column 3, line 28 through column 4, line 56, an optical system for controlling exposure employing a liquid crystal element array. The instant invention is not shown or suggested therein.
U.S. Pat. No. 4,025,189 issued to Pugsley on May 24, 1977, discloses apparatus to control the intensity of light used for reproducing half-tone images. This system, as detailed at column 5, lines 1 through 60, employs a PLZT modulator placed between crossed polarizers for the purpose of controlling light transmission. The instant invention is not disclosed or suggested therein.

Adjustable dot gain simulation for color proofing


A vibrating member (412) adapted for use in a vibrating densitometer (400) includes a base (407) and a vibrating tube portion (405) affixed to the base (407). The vibrating tube portion (405) includes a first arcuate portion (430a), a second arcuate portion (430b), a first non-arcuate portion (432a), and a second non-arcuate portion (432b). The first and second non-arcuate portions (432a, 432b) are located between the first and second arcuate portions (430a, 430b). The vibrating tube portion (405) is formed with an oblong cross-sectional shape having a major axis dimension that is greater than a minor axis dimension. The oblong cross-sectional shape increases a frequency separation between vibration modes in the vibrating tube portion (405).

1. Field of the Invention
The present invention relates to a vibrating densitometer, and more particularly, to a vibrating member of a vibrating densitometer.
2. Statement of the Problem
Densitometers are generally known in the art and are used to measure a density of a fluid. The fluid may comprise a liquid, a gas, a liquid with suspended particulates and/or entrained gas, or a combination thereof.
Vibrating densitometers can comprise a vibrating member, such as a cylinder that is exposed to a fluid under test. One example of a vibrating densitometer comprises a cylindrical conduit that is cantilever-mounted, with an inlet end coupled to an existing pipeline or other structure and with the outlet end free to vibrate. The conduit can be vibrated and a resonant frequency can be measured. As is generally known in the art, the density of the fluid under test can be determined by measuring a resonant frequency of the conduit in the presence of a flow fluid. According to well-known principles, the resonant frequency of the conduit will vary inversely with the density of the fluid that is contacting the conduit.
FIG. 1 shows a prior art vibrating cylinder of a vibrating gas densitometer. Such vibrating cylinder elements are useful in determining the density of gases, since gases have low densities. The prior art round vibrating cylinder may be vibrated at or near to a natural (i.e., resonant) frequency. By measuring a resonant frequency of the cylinder in a presence of a gas, the density of the gas can be determined. The prior art vibrating cylinder may be formed of metal and is desirably of a uniform thickness so that variations and/or imperfections in the cylinder wall do not affect the resonant frequency of the vibrating cylinder.
In theory, a cylinder having a perfectly round and uniform cross-sectional shape will result in only one three-lobed frequency mode shape. However, real world asymmetries caused by tolerance differences and other irregularities or imperfections will result in a supposedly circular tube producing two vibration mode shapes that are very close together in frequency (see FIG. 3). This is problematic, as it may be practically impossible to distinguish between the two vibration modes. As a result, the prior art vibrating densitometer may generate a resonant frequency value that is a mixture or combination of the two vibration modes, introducing error into the density measurement.
FIG. 2 shows a prior art densitometer. The prior art densitometer includes a cylindrical vibrating member located at least partially within a housing. The housing or the vibrating member may include flanges or other members for operatively coupling the densitometer to a pipeline or similar fluid delivering device in a fluid-tight manner. In the example shown, the vibrating member is cantilever mounted to the housing at an inlet end. The opposite end is free to vibrate. The vibrating member includes a plurality of fluid apertures that allow fluid to enter the densitometer and flow between the housing and the vibrating member. Therefore, the fluid contacts the inside as well as the outside surfaces of the vibrating member. This is particularly helpful when the fluid under test comprises a gas, as a greater surface area is exposed to the gas. In other examples, apertures may be provided in the housing and the vibrating member apertures may not be required.
A driver and a vibration sensor are positioned within a cylinder. The driver receives a drive signal from a meter electronics and vibrates the vibrating member at or near a resonant frequency. The vibration sensor detects the vibration of the vibrating member and sends the vibration information to the meter electronics for processing. The meter electronics determines the resonant frequency of the vibrating member and generates a density measurement from the measured resonant frequency.
To obtain accurate density measurements, the resonant frequency must be very stable. One prior art approach to achieve the desired stability is to vibrate the vibrating member in a radial vibration mode. In a radial vibration mode, the longitudinal axis of the vibrating member remains essentially stationary while at least a part of the vibrating member's wall translates and/or rotates away from its rest position. Radial vibration modes are preferred in straight conduit densitometers because radial vibration modes are self-balancing and thus, the mounting characteristics of the vibrating member are not as critical compared to some other vibration modes.
FIG. 3 shows the motion of a wall of a vibrating member exhibiting a first radial vibration mode and a second radial vibration mode. This is an example of a radial vibration mode that comprises a three-lobed radial vibration shape.
The key design criterion for a gas density cylinder is to separate the vibration mode shapes so that the mode shapes can be easily and accurately discriminated. If the vibrating member has a perfectly round cross-sectional shape and has a perfectly uniform wall thickness, there is only one three-lobed radial vibration mode. However, due to design tolerances, this is usually not achievable. Consequently, when a manufacturer attempts to make a perfectly round vibrating member with a perfectly uniform wall thickness, small imperfections result in two three-lobed radial vibrations that vibrate at two vibration modes that are very close to one another in frequency. The frequency separation between the two modes is typically very small and may be less than one Hertz, for example. With the two frequencies close together, a density determination may be difficult or impossible.
In some prior art densitometers, this problem is addressed by tuning the vibrating member so that it possesses a minimum frequency separation between the radial vibration modes. The tuning can be accomplished according to a variety of techniques, including forming lengthwise thicker and thinner regions in the vibrating member's wall in axially aligned strips. However, this prior art thickness tuning still requires extremely tight tolerances and results in manufacturing difficulties and high costs.
Therefore, there exists a need for a vibrating densitometer with increased vibration mode separation.

Vibrating member for a vibrating densitometer


Embodiments of the disclosure provide for hierarchically distributed voltage regulation and power flow optimization in a power distribution network. According to one embodiment, a regional coordinator system may determine power flow for an autonomous grid (AG) representing a portion of the distribution network based on a set of voltage parameters from nodes in the AG. The set of voltage parameters my include a current voltage magnitude. The regional coordinator system may provide, to a central controller system of the distribution network, one or more power flow parameters based on the determined power flow for the AG.

The increasing penetration of distributed energy resources (DERs)—such as rooftop photovoltaic systems, electric vehicles, battery energy storage systems, thermostatically controlled loads, and other controllable loads—has not only provided enormous potential control flexibility, but also imposed challenging tasks of optimally coordinating a large number of networked endpoints to satisfy system-wide objectives and constraints such as demand response and voltage regulation. Distributed algorithms have been developed to facilitate the scalable control of large networks of dispatchable DERs by distributing the computational burden. Such burden distribution is either coordinated by a (logically) central controller or among neighboring agents without a central controller. In both cases, the computational loads increase as the system gets larger, making it more difficult to realize fast, real-time control. Intermittent renewable energy resources especially demand fast control paradigms considering their deepening penetration in the distribution networks causes large and rapid fluctuations in power injections and voltages. Hence, there is a need for improved methods and systems for voltage regulation in a distribution network.

Hierarchical distributed voltage regulation

The Regents of the University of Colorado, a body corporate


The present disclosure discloses a temperature adjustment method including: obtaining a required power for temperature adjustment on a battery; obtaining an actual power for temperature adjustment on the battery; and adjusting a temperature of the battery according to the required power for temperature adjustment and the actual power for temperature adjustment. The present disclosure may precisely control a temperature adjustment time of the battery, and the actual power for temperature adjustment on the battery is adjustable in real time, so that a heating power and a cooling power of the vehicle-mounted battery may be precisely controlled according to an actual status of the vehicle-mounted battery, thereby adjusting the temperature of the vehicle-mounted battery when the temperature is excessively high or excessively low, maintaining the temperature of the vehicle-mounted battery within a preset range, and avoiding a case of affecting performance of the vehicle-mounted battery because of the temperature.

Currently, performance of a vehicle-mounted battery of an electric vehicle is affected by a climatic environment greatly, and an excessively high or excessively low ambient temperature affects the performance of the vehicle-mounted battery. Therefore, a temperature of the vehicle-mounted battery needs to be adjusted, so that the temperature of the vehicle-mounted battery is maintained within a preset range.
Currently, for a region whose climatic environment is hot, a battery cooling system needs to be added to an electric vehicle, so as to reduce a temperature of a vehicle-mounted battery when the temperature of the vehicle-mounted battery is excessively high; and for a region whose climatic environment is cold, a battery heating system needs to be added to the electric vehicle, so as to increase the temperature of the vehicle-mounted battery when the temperature of the vehicle-mounted battery is excessively low.
However, for a region that is hot in summer and cold in winter, the foregoing method cannot resolve both of problems of the excessively high temperature and the excessively low temperature of the vehicle-mounted battery, and a method for adjusting a temperature of a vehicle-mounted battery is relatively crude, and a heating power and a cooling power of the vehicle-mounted battery cannot be precisely controlled according to an actual situation of the vehicle-mounted battery. Consequently, it cannot be ensured that the temperature of the vehicle-mounted battery is maintained within a preset range.

Temperature adjustment method and temperature adjustment system for vehicle-mounted battery


A fluid controller is disclosed, having a body unit, a fluid controlling valve, pressure sensors, and a casing. The fluid controlling valve is attached to a component part attachment face of the body unit. The pressure sensors are attached to the component part attachment face so that the pressure sensing surfaces thereof are positioned substantially perpendicular to the component part attachment face and substantially parallel to the longitudinal direction. On the lateral walls of the casing, the inner surfaces thereof are arranged to be uneven, so that such sections facing the fluid controlling valve and the pressure sensors are arranged to be thin sections, whereas at least a part of such a section that does not face the fluid controlling valve and the pressure sensors is arranged to be a thick section that is thicker than the thin sections.

As indicated in Patent Document 1, as a pressure sensor used in a flow rate measuring mechanism or a mass flow controller of this type, a pressure sensor is known that is configured to receive the pressure of fluid on a pressure sensing surface provided on a diaphragm or the like and to measure the fluid pressure on the basis of a positional change of the pressure sensing surface. For pressure sensors using this method, the larger the area of the pressure sensing surface of the pressure receiving member is, the higher the level of sensitivity is.
Examples of conventional mass flow controllers include one in which a pressure sensor and a flow rate adjusting valve are attached to a body that has formed therein a flow path through which a control-target fluid flows. In recent years, in particular, to meet the demand to arrange a plurality of mass flow controllers side by side in a compact manner, a mass flow controller 100′ has been developed, as illustrated in FIG. 15, so as to have an oblong body 1′, while a face thereof extending parallel to the longitudinal direction thereof is designated as a component part attachment face 1x′, so that pressure sensors 2′ and a flow rate adjusting valve 4′ are attached to the component part attachment face 1x′ in series along the longitudinal direction. The mass flow controller 100′ is designed to keep the width-direction dimension of the entire mass flow controller compact.
However, in conventional mass flow controllers, because the pressure sensors are positioned so that the pressure sensing surfaces thereof extend parallel to the component part attachment face of the body, if we try to further reduce the width-direction dimension of the entire mass flow controller, the areas of the pressure sensing surfaces become smaller, which may lead to a decrease in the sensitivity. This is a bottleneck in the endeavor to make mass flow controllers compact and, especially, to reduce the size in the width direction.
Further, in order to provide a magnetic shield for, and to provide a protection against dust for, component parts such as the pressure sensor and the flow rate controlling valve attached to the body and in order to facilitate handling of the flow rate controller, the flow rate controller is provided with a casing that houses therein component parts such as the pressure sensor and the flow rate controlling valve. To reduce the dimension of the flow rate controller in the width direction, it is necessary to reduce the dimension of the casing in the width direction, too.
To reduce the width dimension of the casing, it is possible to thin a metal plate by performing a sheet metal process, in the same manner as conventional casings have been produced. However, this method has a problem where it is difficult to achieve a sufficiently high level of precision in the processing and where the casing is easily damaged due to an insufficient mechanical strength thereof.


A video system includes a camera, at least one magnet providing a magnetic field, a magnetometer, and a processing system. The magnetometer is configured to measure the magnetic field to generate a magnetometer readout. The magnetic field is altered when a lens cap blocks a view of the camera. The processing system is configured to detect, based on the magnetometer readout of the magnetic field, whether the lens cap is blocking the view of the camera.

When using a camera system, users may occasionally want to prevent the camera system from acquiring image data, for example, for privacy reasons. To some users, electronically disabling the camera may feel insufficient. Accordingly, camera systems may be equipped with a physical lens cap that blocks the view of the camera system.


The vehicle interior security apparatus ensures the security of living beings within the confines of an auto or other enclosure in which they might reside or temporarily reside. The apparatus importantly provides for automatic emergency alert as well as manually triggered emergency alert. The apparatus can therefore safely guard even animals, babies, and others unable to fend for themselves. The apparatus provides for power generation so that existing power, such as that of a vehicle, need not be fully relied upon. The solar grid can power the apparatus and can also recharge existing electrical systems as well as operate the apparatus. The apparatus provides multiple components for audio, visual, and airwave warnings.

There exist various devices for attempting to ensure the safety of vehicle occupants when for some reason those occupants are trapped in a vehicle. Occupants may be trapped due to age limitations. Occupants may become trapped due to extreme temperature conditions. Occupants may even become trapped through the actions of others. Some devices provide for using existing ventilation systems to relieve temperature extremes. Some vehicles use existing communication devices within a vehicle in effort to signal for assistance. Some devices wire into a vehicle's electrical system to assist in unlocking locks, lowering windows or performing other functions. Most rely totally on the vehicle's existing power supply, a shortcoming that might cost a life. In short, of the various devices, none provide the security offered by the current apparatus in ensuring a vehicle occupant's safety.

Vehicle occupant emergency communication apparatus


The present invention relates to a cooling circuit for a work machine that provides increased cooling capacity of a radiator without increasing the physical size of the radiator. The cooling circuit includes a jacket water pump, a jacket water portion of an engine and a radiator fluidly coupled to the circuit. A first powertrain oil cooler is fluidly coupled to the cooling circuit between the jacket water pump and the jacket water portion. A second powertrain oil cooler is fluidly coupled to the cooling circuit between the jacket water portion and the radiator. Positioning of the powertrain oil coolers in this manner increases the temperature differential between ambient air and coolant entering the radiator, therefore increasing cooling capacity of the radiator.

This invention relates generally to a work machine and more specifically to a work machine having a powertrain oil cooler positioned in the coolant system between the engine and the radiator.
Work machines such as track type tractors and the like include numerous systems that are cooled by heat exchangers and radiator coolant. A typical work machine may include a liquid cooled internal combustion engine, a powertrain having a coolant-to-oil heat exchanger and a coolant-to-engine oil heat exchanger. Coolant is pumped by a jacket water pump to the heat exchangers, through the engine to a radiator and back to the pump. Typically the powertrain oil is at the hottest temperature, thus requiring the most cooling. Therefore the coolant from the coolant pump goes to the powertrain oil heat exchanger and engine oil heat exchanger prior to going to the engine water jacket.
Most engine manufacturers are redesigning their internal combustion engines to have lower exhaust emissions. The new engines require a higher cooling capacity. To achieve the higher cooling capacity a larger radiator is normally required. Most work machines don""t have extra space to accommodate the larger radiator without major redesign.
It is desirable to provide a work machine having improved engine cooling without redesigning the entire machine to accommodate a larger radiator.
In an embodiment of the present invention a cooling circuit for an engine and a powertrain is provided. The cooling circuit includes a jacket water pump to circulate coolant through a jacket water portion of an engine and a radiator. A first powertrain oil cooler is fluidly coupled to the cooling circuit between said jacket water pump and said jacket water portion. A second powertrain oil cooler is fluidly coupled to the cooling circuit between said jacket water portion and the radiator.
In another embodiment of the present invention a method of increasing the cooling capacity of a work machine is provided. The work machine includes an engine and a powertrain. The method includes the step of providing a cooling circuit having a jacket water pump, an engine jacket water portion and a radiator. Next a first powertrain oil cooler fluidly coupled to the cooling circuit at a position between the jacket water pump and the jacket water portion is provided. Lastly, a second powertrain oil cooler fluidly coupled to the cooling circuit at a position between jacket water portion and the radiator.
In another embodiment of the present invention a cooling circuit for an engine and a powertrain is provided. The cooling circuit includes a jacket water pump to circulate coolant through a jacket water portion of an engine and a radiator. An engine oil cooler is fluidly coupled to the cooling circuit between said jacket water pump and said jacket water portion.

Increased capacity cooling system for a work machine


A stage assembly for positioning a device includes: (i) a stage that retains the device; (ii) a base; (iii) a mover assembly that moves the stage along a first axis, along a second axis, and along a third axis relative to the base; (iv) a magnetic sensor system that monitors the movement of the stage along the first, second and third axes, the magnetic sensor system generating a magnetic sensor signal; (v) a second sensor system that monitors the movement of the stage along the first, second and third axes, the second sensor system generating a second sensor signal; and (vi) a control system that controls the mover assembly using at least one of the magnetic sensor signal and the second sensor signal.

Exposure apparatuses are commonly used to transfer images from a reticle onto a semiconductor wafer during semiconductor processing. A typical exposure apparatus includes an illumination source, a reticle stage assembly that retains and positions a reticle, a lens assembly, a wafer stage assembly that retains and positions a semiconductor wafer, and a measurement system that monitors the position or movement of the reticle and the wafer.

Magnetic sensor calibration and servo for planar motor stage