The illuminating optical system is divided into a first portion including movable blades moving during exposure, and a second portion not containing a movable portion moving over the movable blade during exposure. The second portion is installed on the exposure main portion, and the first portion, separately from the exposure main portion. The frames configuring the first and the second optical units, the second optical unit having optical elements of a smaller movable amount than the movable amount of the movable blades, are relatively displaceably connected via the bellows-shaped member. The frames configuring the second optical units are fixed to each other via the O-ring suppressing relative displacement. As a result, the effect of vibration of the illuminating optical system during exposure on the main portion can be reduced. Upon purging nitrogen gas or the like in the space interior of the frame and the space between adjacent frames, the degree of air-tightness and chemical cleanliness is improved, consequently improving the exposure accuracy.

1. Field of the Invention
The present invention relates to an illuminating optical apparatus and the making method thereof, an exposure apparatus and the making method thereof, and device manufacturing method. More specifically, the invention relates to an illuminating optical apparatus suitable for application to an exposure apparatus used in a lithographic process for manufacturing semiconductor devices or liquid crystal display devices (liquid crystal devices) and the making method of the optical apparatus, an exposure apparatus comprising this illuminating optical apparatus and a making method of the exposure apparatus, and a manufacturing method of devices using this exposure apparatus in the lithographic process. The illuminating optical apparatus of the invention is suitable for illuminating an object by the use of an energy beam having a short wavelength, for example, not longer than 300 nm.
2. Description of the Related Art
When forming fine patterns on electronic devices such as semiconductor devices (such as integrated circuits) and liquid crystal displays, conventionally, the patterns to be formed were proportionally enlarged four to five times on a photomask or a reticle (hereinafter collectively referred to as a xe2x80x9creticlexe2x80x9d), and then transferred onto a substrate to be exposed such as a wafer. The exposure was performed, in reduced magnification, with a reduction projection exposure apparatus such as a stepper.
With the projection exposure apparatus used for transferring such a pattern, the exposure wavelength has shifted to a smaller wavelength to cope with the tendency toward finer semiconductor integrated circuits. Currently, a wavelength of 248 nm in a KrF excimer laser is widely used, and the use of a shorter wavelength of 193 nm in an ArF excimer laser is becoming practical. Projection exposure apparatus employing a shorter wavelength of 157 nm in a F2 laser and 126 nm in an Ar2 laser are now being proposed.
Light with the wavelength from 120 to 200 nm is a vacuum ultraviolet light beam. Since a light flux within this wavelength band is poor in transmittance through an optical glass, materials for lenses and reticles capable of being used in a VUV exposure apparatus using vacuum ultraviolet (VUV) light for exposure are limited to crystals of fluorite, magnesium fluoride and lithium fluoride. Also, energy absorption by oxygen, water vapor or hydrocarbon gas (hereinafter from time to time referred to as xe2x80x9cabsorptive gasesxe2x80x9d) is extremely large. Therefore, it becomes necessary to alter the gas in the optical path portion with a gas which energy absorption of the exposure light is smaller (low-absorptive gas) in order to exclude oxygen from the optical path.
The amount of vacuum ultraviolet light beams absorbed by oxygen gas is very large. In order to avoid absorption by oxygen, therefore, it is necessary to limit the concentration of oxygen gas in the optical path so that it does not exceed 1 ppm of the average concentration of oxygen gas in the optical path. Particularly, in the illuminating optical system where the light illuminated from the light source proceeds to the reticle through the optical system, the total distance of the optical path is long, so the concentration of oxygen is required to be limited to a smaller value than described above.
FIG. 10 schematically illustrates an example of the illuminating optical system (illuminating optical unit) which configures a conventional exposure apparatus using an excimer laser beam.
This illuminating optical system shown in FIG. 10 comprises a first fly-eye lens system 202, a folded mirror 204, a second fly-eye lens system 206, an illuminating system diaphragm plate (diaphragm revolver) 208, a first relay lens system 210, a reticle blind 212, a second relay lens system 214, a folded mirror 216, and a condenser lens 218, sequentially arranged along the optical path of the exposure light in a predetermined positional relationship. The first fly-eye lens system 202 and the illuminating system diaphragm plate 208 are rotatably-driven by actuators 220 and 222. Movable blinds configuring the first relay lens system 210 and the reticle blind 212 are driven by actuators 224 and 226, respectively in predetermined directions. Sensors S1, S2, S3 and S4 for detecting the position or displacement are respectively provided on these movable portions. In this illuminating optical system, the above-mentioned optical members, the actuators and the sensors are in general, covered with a cover 230, and the interiors were purged with nitrogen (N2) gas, one of low-absorptive gases.
In this conventional illuminating optical system, the optical members configuring the illuminating optical system, the actuators, and the sensors are covered with a cover, therefore, the actuators and the sensors are located in the same space as the lenses and the mirrors. Consequently, adhesives, sealers and paints used for the actuators and the sensors, and gases emitted from these component members themselves have become the cause of chemical pollution sources of the optical devices such as lenses and mirrors.
In the above-mentioned conventional illuminating optical system, the shape of the cover has caused difficulty to completely cut off the air in the cover interior from open air outside the cover, and has allowed the chemically polluted open air containing oxygen to be mixed with the cover interior. This causes the problem of absorption of the illuminating light by the ozone generated from oxygen or photochemical reactions between oxygen and the illuminating light. Also, chemical pollution decreases the transmittance of the lenses and reflectivity of the mirrors, due to clouding substances adhered and deposited on the surfaces of the optical elements.
With an exposure apparatus, all these cases have caused a decrease in exposure accuracy resulting from a shortage in the amount of exposure light irradiated onto the wafer.
In the lithographic process for manufacturing semiconductor devices, conventionally, a stationary type exposure apparatus such as a reduction projection exposure apparatus (known as a stepper) employing a step-and-repeat method has been mainstream. However, along with the recent tendency toward a higher degree of integration of semiconductor devices and a larger wafer size, the scanning exposure apparatus employing a so-called slit scanning method and the step-and-scan method are becoming more popular. With these apparatus, a rectangular or arcuated illuminating areas on a reticle having a pattern formed are illuminated with an illuminating light, and the reticle and substrate such as a wafer are synchronously moved in a linear direction, thereby sequentially transferring the pattern onto the substrate.
With this apparatus, a movable blade (also called a xe2x80x9cmovable blindxe2x80x9d) is arranged for limiting the illuminating area on the reticle so as to avoid unnecessary exposure of a portion outside the pattern area on the reticle during exposure. This blind is a movable member, which moves during exposure. It has been arranged in the illuminating optical system, which illuminates the reticle R by an illuminating light from a light source, and is driven synchronously with the reticle during exposure (refer to Japan Patent Laid Open No. 04-196513 and the corresponding U.S. Pat. No. 5,473,410).
Semiconductor devices are formed, by depositing multiple layers of circuit patterns with respect to one another in a predetermined positional relationship onto a wafer. For this reason, in an exposure apparatus used for manufacturing semiconductor devices or the like, it is necessary to accurately overlay the patterns formed on the reticle and conduct transferring.
In the conventional scanning type exposure apparatus, however, as described above, in the illuminating optical system the movable member is arranged and moves during exposure, causing vibration in the illuminating optical system. This, in turn, causes an adverse effect on the main portion of the exposure apparatus in which the illuminating optical system is incorporated. The main portion of the exposure apparatus include a reticle stage holding the reticle R, a projection optical system projecting the pattern of the reticle R onto the wafer, and a wafer stage holding the wafer. It also includes a main portion column holding the reticle stage, projection optical system, wafer stage and the illuminating optical system, and a laser interferometer is arranged on the main portion column for measuring the positions of the both stages. The vibration described above in the illuminating optical system during exposure, especially, the residual vibration during exposure, affects the accuracy of synchronous movement between the reticle stage and the wafer stage. It also affects the positional relationship between the projection optical system and the two stages, and the values measured by the interferometer, resulting in reducing the exposure accuracy of the scanning type exposure apparatus.
If there is vibration in the illuminating optical system during exposure, the vibration similarly affects the exposure accuracy also in the stationary exposure apparatus employing the step-and-repeat method.
The present invention was developed in view of the circumstances as described above, and has a first object to provide an illuminating optical apparatus, which improves the degree of chemical cleanliness of the interior thereof.
A second object of the invention is to provide an exposure apparatus, which improves the exposure accuracy.
A third object of the invention is to provide a device manufacturing method, which improves the productivity of high-integrity microdevices.
According to a first aspect of the invention, there is provided an illuminating optical apparatus to illuminate an object with an energy beam from a light source, comprising at least one of a first optical unit which includes at least one of a drivable first optical member, and a first frame holding the first optical member, at least one of a second optical unit which has at least one of a second optical member of which a movable amount is smaller than a movable amount of the first optical member, and a second frame holding the second optical member, and a first connecting member which displaceably connects the first frame in respect to the second frame.
The expression xe2x80x9ca movable amount smaller than the movable amount of the first optical memberxe2x80x9d is a concept covering a movable amount of null. Accordingly, the second optical unit may comprise only a non-movable optical member as the optical member.
According to the above, the frame structuring the first optical unit which has the first optical member being drivable, and the frame structuring the second optical unit which has the second optical member having a movable amount smaller than the movable amount of the first optical member, are displaceably connected via the first connecting member in respect to each other. As described above, in between frames requiring respective displacement to some extent, first connecting member suitable for the purpose is used. This improves air-tightness in the space within the frame and the space in between adjacent frames. Therefore, in the illuminating optical apparatus of the present invention, air-tightness is improved upon purging the low-absorptive gas such as nitrogen gas in the internal space of the frame and the space in between the adjacent frames, making it possible to improve the degree of chemical cleanliness in the interior space. The optical units having the frames can be easily replaced, since it is possible to separate the frames by simply removing the first connecting member.
In this case, for example, the first connecting member can be a freely expansible bellows-shaped member of which an inner surface is chemically cleaned. The chemical cleaning process may be, for example, the bellows-shaped member having an inner surface coated with fluoropolymers.
Or, the first connecting member may comprise a secondary vulcanized fluororubber. The secondary vulcanized fluororubber, which is in itself, a chemically clean material, may be used as a material for the first connecting member.
In the first illuminating optical apparatus of the present invention, a plurality of the second optical units are provided, and may further comprise a second connecting member which connects the second frame so as to suppress a displacement among the second frames. The second frames structure a part of the second optical units. In such a case, as described above, the frame configuring the first optical unit and the frame configuring the second optical unit are connected relatively displaceably via the first connecting member, while the frames configuring the second optical unit are connected (fixed) to each other via the second connecting member so as to suppress relative displacement. Frames which requiring relative displacement to some extent, and frames not requiring relative displacement are connected via different connecting members respectively suitable, thus improving air-tightness of the space interior of the frames and the space in between thereof.
In this case, for example, the second connecting member can be an O-ring which has at least a surface chemically cleaned. In this case, similar to the case above, the O-ring can comprise a resin, and can have the surface coated with fluoropolymers.
Or, the second connecting member, for example the, O-ring, may comprise a secondary vulcanized fluororubber. That is, as the material of the second connecting member, for example, the O-ring, a secondary vulcanized fluororubber, which is a chemically clean material, may be used.
Furthermore, the second connecting member may be an O-ring formed of a tube. In such a case, the O-ring becomes easily crushable by providing a larger crushing margin of the O-ring, thus improving operability of the connecting operation between frames using the O-ring.
The first illuminating optical apparatus of the present invention may further comprise an actuator which is arranged outside the first frame, and drives the first optical member held by the frame. In such a case, since the actuator is arranged outside the frame holding the drivable first optical member, the actuator is not the source of pollution for the frame and its interior, thus reducing the degree of the optical elements to be clouded by the pollution.
According to a second aspect of the invention, there is provided an illuminating optical apparatus to illuminate an object with an energy beam from a light source, comprising: a plurality of optical members arranged in a predetermined positional relationship, at least one of the plurality of optical members is a movable member; and an illuminating system housing disposed around the plurality of optical members to house the plurality of optical members to isolate the interiors thereof from the open air; an actuator which is arranged outside the illuminating system housing, and respectively drives the movable member; and a sensor which is arranged on the outside of the illuminating system housing, and measures a position or a displacement of at least one of the movable members.
With this apparatus, actuators for driving the movable members, respectively, are arranged outside the illuminating system housing containing at least a movable members, housing a plurality of optical members arranged in a predetermined positional relationship, and keeping the interiors thereof isolated from the open air in an sealed state. The actuators, therefore, are not the source of pollution for the interior of the illuminating system housing. So, in the second illuminating optical apparatus of the present invention, the degree of chemical cleanliness in the interior can be improved by purging a low-absorption gas such as nitrogen gas in the illuminating system housing, since the actuators do not act as a pollution source.
In this case, as with the actuators, the sensors are not the source of pollution in the interior of the illuminating system housing. The sensors, therefore, do not cause a decrease in the degree of chemical cleanliness in the illuminating system housing, and furthermore can control the actuators at a high accuracy based on the sensor output, allowing highly accurate positional control of the drivable optical member.
With the second illuminating optical apparatus of the invention, it is preferable that at least one of the movable members is a rotatable member which rotates around a predetermined rotation shaft, and a bearing section which supports the rotation shaft arranged in the illuminating system housing, and a magnetic fluid seal is provided between the bearing section and the rotation shaft. In this case, a magnetic liquid serving as lubricant oil enters in to a gap between the rotation shaft and the bearing. The air-tightness of the bearing section can be improved, as well as smoothing the rotation of the rotation shaft.
In this case, a fluorine contained oil may be used for the magnetic fluid seal. By using the fluorine contained oil which is a chemically clean substance, it is possible to suppress a decrease in the degree of chemical cleanliness.
According to a third aspect of the invention, there is provided an exposure apparatus for transferring a mask pattern onto a substrate, comprising an illuminating optical apparatus of the present invention, which illuminates the mask with an energy beam.
With this exposure apparatus, since the first illuminating optical apparatus of the present invention is used as an illuminating apparatus for illuminating a mask by an energy beam, it is possible to improve chemical cleanliness of the interior of the illuminating optical apparatus. This can effectively suppress the decrease in transmittance of optical elements in the illuminating optical apparatus, even when using an energy-beam for exposure having a wavelength of not longer than 300 nm. Accordingly, it is possible to prevent a decrease in the amount of exposure light irradiated onto the substrate surface, so as to achieve a highly accurate (high-resolution) exposure by the short-wave energy beam, as well as improve the throughput by shortening the exposure time.
According to a fourth aspect of the invention there is provided a second exposure apparatus of transferring a mask pattern onto a substrate, comprising a second illuminating optical apparatus which illuminates the mask with an energy beam.
With this exposure apparatus, the second illuminating optical apparatus of the present invention is used as an illuminating apparatus illuminating a mask by an energy beam. This makes it possible to improve the degree of chemical cleanliness of the interior of the illuminating optical apparatus. As a result, even when using an energy beam for exposure having a wavelength not longer than 300 nm, it is possible to effectively prevent a decrease in transmittance of the optical elements in the illuminating optical apparatus. The decrease in the amount of exposure light irradiated onto the substrate surface can also be suppressed, so as to achieve a highly accurate (high-resolution) exposure by the short-wave energy beam, as well as improve the throughput by shortening the exposure time.
According to a fifth aspect of the invention, there is provided an exposure apparatus of transferring a mask pattern onto a substrate by exposing the substrate with the energy beam via the mask, comprising: an illuminating optical system which has a first illuminating system housing which isolates a first partial optical system containing a first movable section which is movable during exposure from open air and keeps the first partial optical system in a sealed state, and a second illuminating system housing which isolates a second partial optical system physically separated from the first partial optical system containing an optical member of which the movable amount during the exposure is smaller than the movable amount of the first movable section from the open air and keeps the second partial optical system in the sealed state; and a main portion for exposure on which the second illuminating system housing is provided, including at least a substrate stage which holds the substrate exposed by the energy beam outgoing the mask; a connecting section which isolates from the open air a space between the first illuminating system housing and the second illuminating system housing and keeps the space in a sealed state, and connects the first illuminating system housing and the second illuminating system housing so as to limit the amount of vibration which travels between the two housings.
With this exposure apparatus, the illuminating optical system has a first illuminating system housing which comprises a first partial optical system with a first movable section which is movable during exposure isolated and kept sealed from the open air. The exposure apparatus also has a second illuminating system housing which comprises a second partial optical system physically separate from the first partial optical system and which has only optical members with a movable amount during exposure smaller than the movable amount of the first movable section (that is, does not contain optical members having a movable amount of over that of the first movable section), and isolates and keeps sealed. That is, the first partial optical system and the second partial optical system each have illuminating system housings to isolate the interior from the open air, so as to prevent the open air to mix with the interior and become the source of pollution. The second illuminating system housing is installed in the main portion for exposure containing at least a substrate stage holding the substrate exposed by the energy beam emitted from the mask. As a result, even when the first movable section moves largely during exposure causing vibration in the first illuminating optical system and residual vibration remains during exposure, the second partial optical system and the main portion for exposure incorporating the second partial optical system is almost free from the adverse effect of vibration. Furthermore, the connecting section connects the first illuminating system housing configuring the first partial optical system and the second illuminating system housing configuring the second partial optical system by isolating the space between them from the open air into an air-tight condition. Therefore, it is possible to prevent the open air from flowing into the space between the first illuminating system housing and the second illuminating system housing, and from becoming a pollution source. The connecting section also connects the first illuminating system housing and the second illuminating system housing while limiting the transfer of vibration between the two systems. So even if the vibration of the first illuminating system housing during exposure is transferred to the second illuminating system housing and the main portion for exposure, it hardly affects the accuracy of exposure.
According to the third exposure apparatus of the invention, therefore, it is possible to alleviate the effect of vibration of the illuminating optical system during exposure on the exposure main portion, and consequently to improve exposure accuracy.
Accordingly, the third exposure apparatus of the present invention can reduce the vibration caused by the illuminating optical system during exposure, while effectively preventing the open air to mix into the illuminating path, and as a result improving the accuracy of exposure.
In this case, the second partial optical system may comprise optical members that are stationary during the exposure, i.e., non-movable optical members, or optical members movable (displaceable) only during the non-exposure state, or the second partial optical system may include a second movable section movable in an amount smaller than that of the first movable section during exposure. Even in the latter case, vibration of the second partial optical system and the main portion of exposure during exposure is obviously reduced compared with vibration of the conventional exposure apparatus, in which residual vibration of the first partial optical system had been directly transferred to the second partial optical system and the exposure main portion.
In the third exposure apparatus of the present invention, nitrogen (N2) gas or helium (He) gas having an oxygen mixture of less than a predetermined value, or preferably less than 1 ppm may be purged as a low-absorptive gas into the illuminating system housings. In such a case, it is possible to suppress absorption of the energy beam by an absorptive gas (oxygen, water vapor, hydrocarbon gas) in the first partial optical system and the second partial optical system. Accordingly, for example, an energy beam having a wavelength not longer than 300 nm (such as KrF excimer laser beam having a wavelength of 248 nm, ArF excimer laser beam having a wavelength of 193 nm, or the like) may be used. Even with the usage of such energy beams, it is possible to perform an exposure (transfer of a mask pattern onto the substrate) with high accuracy.
The third exposure apparatus of the present invention, a low-absorptive gas may be purged into the space between the first and second illuminating system housings and the interiors of the respective illuminating system housings. In such a case, the low-absorptive gas is purged in the space between the first and second illuminating system housings and the interiors of these illuminating system housings, therefore, a chemically clean state can be maintained. The energy beam can be a vacuum ultraviolet light beam, and a wavelength thereof is not longer than 200 nm (for example, F2 laser beam having a wavelength of 157 nm, Kr2 laser beam having a wavelength of 146 nm, or Ar2 laser beam having a wavelength of 126 nm). Since it is possible to suppress absorption of the energy beam by the absorptive gas in the space between the first and second illuminating system housings and the interiors of these illuminating system housings, exposure of a higher accuracy can be performed by using an energy beam of the vacuum ultraviolet region.
In the third exposure apparatus of the invention, the connecting section which isolates the space between the first illuminating system housing and the second illuminating system housing into a sealed state, and connects the first illuminating system housing and the second illuminating system housing while limiting transfer of vibration between these housings may comprise, for example, an expansible bellows-shaped member.
In the third exposure apparatus of the invention, the first partial optical system may include: an optical integrator, and a diaphragm plate of the illuminating system having at least one of a diaphragm arranged near an emitting surface of the optical integrator, and an iris diaphragm; and the first movable section further has a switching unit which positions at least one of diaphragm and the iris diaphragm, on the emitting surface of the optical integrator.
In the third exposure apparatus of the present invention, the first movable section may be a movable blade, which limits the irradiation area on the mask during exposure with the energy beam.
According to a sixth aspect of the invention, there is provided a method of making an exposure apparatus for transferring a mask pattern onto a substrate by exposing the substrate with the energy beam via the mask, comprising: providing a main portion of exposure with a substrate stage incorporated, the substrate stage holding the substrate; providing a first illuminating system housing which isolates a first partial optical system containing a first movable section which is movable during exposure from open air and keeps the first partial optical system in a sealed state; and installing a second illuminating system housing which isolates a second partial optical system physically separated from the first partial optical system containing an optical member of which the movable amount during exposure is smaller than the movable amount of the first movable section from the open air and keeps the second partial optical system in the sealed state, to the main portion for exposure; and connecting the first illuminating system housing and the second illuminating system housing so as to limit the amount of vibration which travels between the two housings by a connecting section, and isolate from the open air a space between the first illuminating system housing and the second illuminating system housing and keeps the space in a sealed state.
According to the seventh aspect of the present invention, there is provided a making method of an illuminating optical apparatus to illuminate an object with an energy beam from a light source, which comprises: providing at least one of a first optical unit which includes at least one of a drivable first optical member; and a first frame holding the first optical member, providing at least one of a second optical unit which has at least one of a second optical member of which a movable amount is smaller than a movable amount of the first optical member, and a second frame holding the second optical member; and connecting the first frame structuring the first optical unit and the second frame structuring the second optical unit with a first connecting member which displaceably connects the first frame in respect to the second frame.
In the lithographic process, by using the first, second and third exposure apparatus of the present invention, a pattern can be formed on the substrate with high accuracy, and hence high-integrity microdevices can be manufactured at a satisfactory yield. Therefore, according to still another aspect of the invention, there is provided a device manufacturing method using any of the first to third exposure apparatuses of the invention.

Illuminating optical apparatus and making method thereof, exposure apparatus and making method thereof, and device manufacturing method


A technique for enhancing a gray-scale image to improve conversions of the image to binary employs fuzzy reasoning. In the technique, pixels in the image are analyzed by comparing the pixel's gray scale value, which is indicative of its relative brightness, to the values of pixels immediately surrounding the selected pixel. The degree to which each pixel in the image differs in value from the values of surrounding pixels is employed as the variable in a fuzzy reasoning-based analysis that determines an appropriate amount by which the selected pixel's value should be adjusted to reduce vagueness and ambiguity in the image and improve retention of information during binarization of the enhanced gray-scale image.

1. Field of the Invention
The present invention relates in general to a method and system for converting gray-scale images to binary images which employs fuzzy reasoning to enhance a gray-scale image before the image is converted to a binary image. When the enhanced gray-scale image is converted to a binary image, the binary image retains more of the detailed information that was contained in the original gray-scale image.
2. Description of the Background Art
Binarization of a gray-scale/color image is a fundamental tool for image processing since a binary image (1-bit image) can be processed with very fast logical (Boolean) operators and also be used to digitize text and numbers originally contained in gray-scale/color images (typically 8-bit images). The binary digitization of text and numbers contained in gray-scale images has a wide application that includes, but is not limited to, Object Character Recognition (OCR). In a binary digital image, a binary one value indicates that the pixel belongs to the image foreground, which may represent an object in the image, while a binary zero value indicates that the pixel is darker and belongs to the image's background. Since most image display systems and software employ gray-scale images of 8 or more bits per pixel, the binarization of these images usually takes 2 extreme gray tones, black and white, which are ordinarily represented by 0 or 255, respectively, in an 8-bit gray-scale display environment.
One of the key goals of performing binarization of gray-scale images is to be able to digitize text and numbers contained in a gray-scale image acquired outdoors where the image acquisition conditions (lighting, camera/video stabilization, weather, etc.) are uncontrolled. Due to the physical properties of the imaging devices and due to the image transmission, these uncontrolled conditions can result in the degradation of the gray-scale images such that they have poor contrast, are corrupted with different kinds of noise or are blurred. As a result, it is often more difficult to binarize the text and numbers contained in such images; for example, the binarization and final digitization of a car's license tag numbers face these problems, thus making their binarization/digitization unfeasible or unreliable.
Various Image enhancement techniques are available that are utilized to increase the contrast, smooth the regions of interest and sharpen the edges and fine structures in the images. These techniques comprise different classes of point and spatial operations and are typically selected in accordance with the ultimate purpose on the outputted image and the quality criterion (or criteria) of the original (input) image. To date, however, no known enhancement technique exists for specifically improving the binarization/digitization of a gray-scale image so that certain features, such as text or numbers, remain discernable in the image after binarization.

Image processing for binarization enhancement via fuzzy reasoning

The United States of America as represented by the Administrator of the National Aeronautics and Space Administration


A merchandise storage container includes an integrated hang tab. The hang tab is connected to the outer end panel that defines a portion of the lid of the container so that the hang tab may be use to help open the container when the user has removed the container from a display hook. The hang tab can be formed from only a single layer of material. A locking tab latches into a slot defined between an inner end panel and a rear wall of the container. The hang tab includes spaced legs disposed on either side of the locking tab. This configuration of the hang tab evenly distributes the hanging forces on either side of the locking tab.

1. Technical Field
The disclosure generally relates to merchandise storage containers and, more particularly, to merchandise storage containers hung from a hook that extends through an opening defined by a portion of the merchandise storage container. Specifically, the disclosure relates to foldable-material merchandise storage containers that have integral hanger openings.
2. Background Information
Different items of merchandise are often displayed at retail locations in a hanging configuration from a hook. One common configuration is for a plurality of the same items of merchandise to be hung from a common elongated hook. The elongated hook is disposed through an opening defined by a portion of the merchandise storage container. These openings are aligned when a plurality of the same items are disposed on a common hook. In some configurations of merchandise storage containers, the opening that receives the hook is defined by the body of the container where the merchandise is carried. Such containers have the drawback of potential merchandise damage when the containers are placed onto the hooks and repeatedly removed from and replaced back onto the hooks when potential customers browse the merchandise. Other merchandise storage containers require a hang tab to be added to the container so that the container may be displayed on a hook. This occurs when a retail merchant wishes to display merchandise disposed in containers without hook openings. These hang tabs may be adhesively connected or secured with staples. Eventually, the adhesive or staple fails and the merchandise container falls to the floor to the rack below leaving an unattractive display and clean up work for the merchant.

Merchandise container with integrated hang tab


The subject invention provides compounds having the structure:

Ginkgo biloba L., the last surviving member of a family of trees (Ginkgoacea) that appeared more than 250 million years ago, has been mentioned in the Chinese Materia Medica for more than 2,500 years (Drieu, 2000). A number of G. biloba natural products have been isolated (Hasler, 2000), the most unique being the terpene trilactones, i.e. ginkgolides A, B, C, J and M (1-5) and bilobalide (6) (FIG. 1) (Nakanishi, 1967; Okabe, 1967; Nakanishi, 1971; Weinges, 1987). The ginkgolides are diterpenes with an aesthetic cage skeleton consisting of six 5-membered rings, i.e., a spiro[4.4]nonane carbocycle, three lactones and a tetrahydrofuran. The difference between the five ginkgolides lies in the variation in the number and positions of hydroxyl groups on the spirononane framework (FIG. 1).
A standardized G. biloba extract (EGb 761) containing terpene trilactones (5-7%) and flavonoids (22-24%) has demonstrated neuromodulatory properties (DeFeudis, 2000), and several clinical studies using EGb 761 have reported positive effects on various neurodegenerative diseases (Logani, 2000; Oken, 1998; Kleijnen, 1992; Søholm, 1998; Diamond, 2000; van Dongen, 2000), including Alzheimer's disease (AD). In two studies involving a total of 549 AD patients, EGb 761 significantly slowed the loss of cognitive symptoms of dementia, with an efficacy in between donezepil (Aricept®) and rivastigmine (Exelon®), the two currently marketed drugs for treatment of AD symptoms (Le Bars, 1997; Kanowski, 1996). Moreover, a recent study by Schultz and co-workers found that EGb 761 upregulated several genes in rat hippocampus and cortex, including genes expressing proteins such as transthyretin and neuronal tyrosine/threonine phosphatase, both of which are believed to be involved in AD (Watanabe, 2001). Several recent studies on healthy volunteers have shown positive effects of EGb 761 on short-term working memory (Kennedy, 2000; Polich, 2001; Rigney, 1999; Stough, 2001) indicating that constituents of G. biloba also influence the brain under physiological conditions.
Although the molecular basis for the action of G. biloba terpene trilactone constituents on the central nervous system (CNS) is only poorly understood, it is known that the ginkgolides, particularly ginkgolide B (GB, 2), is a potent in vitro antagonist of the platelet-activating factor receptor (PAFR) (Braquet, 1985).
A number of G. biloba constituents have been isolated, including the unique terpene trilactones, i.e., ginkgolides A, B, C, J and M and bilobalide (Nakanishi, 1967; Okabe, 1967; Nakanishi, 1971; Weinges, 1987). Ginkgolides are diterpenes with a cage skeleton consisting of six 5-membered rings, the difference between the five ginkgolides being in the variation in the number and positions of hydroxyl groups on the spirononane framework. Although the molecular basis for the action of G. biloba terpene trilactone constituents in the central nervous system (CNS) is only poorly understood, it is known that ginkgolides, particularly ginkgolide B (GB, 1, FIG. 1), is a potent in vitro antagonist of the platelet-activating factor receptor (PAFR) (Braquet, 1987; Braquet, 1991). The PAFR is a potential target for neurodegenerative diseases (Singh, 2001) such as senile dementia (http://www.herbs.org/greenpapers/ginkgo.htm), stroke (Lindsberg, 1990) and nerve cell damage due to ischemia (Krieglstein, 1994).
PAF (1-O-alkyl-2-acetyl-sn-glycero-3-phosphocholine, FIG. 2) is a phospholipid mediator involved in numerous disorders. PAF (1-O-alkyl-2-acetyl-sn-glycero-3-phosphocholine) has been suggested as a retrograde messenger in long-term potentiation (LTP) (Kato, 1994), thus indicating the importance of the PAFR as a target for ginkgolides. PAF has been implicated in a number of immunological, inflammatory and vascular disorders (Chung, 1995) including asthma (Nagase, 2002) and endotoxic shock (Tsuneyuki, 1996). In the latter case, PAFR antagonists have been shown to attenuate the effects of endotoxic shock in rats. Hyperacute rejections arising from PAF-associated reactions of either xenoperfusion (Cruzado, 1997) or renal transplants (Grino, 1994) have been found to be preventable by PAFR antagonists. In a separate study, PAFR antagonists significantly prevented pulmonary edema after myocardial ischemia in dogs (Taniguchi, 1992). The role PAF plays in a broad range of physiological conditions appears well-documented given the above examples, underscoring the importance of PAFR antagonists in inhibiting their undesirable effects.
These effects are manifested through binding of PAF to the PAFR, a G protein-coupled receptor that is found in organs such as the lungs, liver, kidneys (Ishii, 2000; Prescott, 2000; Shukla, 1996), and brain (Bito, 1992; Mori, 1996). The function of PAF in the brain is still not clear, although PAF has been suggested to play a role in diseases of aging (Kroegel, 1992), and in initiating HIV-related neuropathogenesis (Perry, 1998).
With few exceptions previous structure-activity relationship (SAR) studies of terpene trilactones on the PAFR have focused almost entirely on derivatives of GB (2). In all cases the derivatives were evaluated for their ability to prevent PAF-induced aggregation of rabbit platelets. Corey et al. investigated various intermediates encountered in the total syntheses of ginkgolide A (GA, 1) (Corey, 1988), GB (2) (Corey, 1988) and bilobalide (BB, 6) (Corey, 1987), and found that although the terminal methyl-bearing lactone was not essential for activity and could be replaced by other lipophilic groups (Corey, 1989), the tert. butyl group was important for PAFR antagonism (Corey, 1991). Park et al. synthesized over 200 derivatives of GB (2), with particular focus on aromatic substituents at 10-OH, and found most of them to be more potent than the parent compound (Park, 1996). Similar derivatives recently synthesized by Hu et al. also yielded compounds more potent than GB (2) (Hu, 1999; Hu, 2000), whereas other variations in GA (1) and GB (2) led to a decrease in activity (Hu, 2000; Hu, 2001).
However, none of the cited references disclose labeled analogs of ginkgolides useful for imaging studies. The following describes the preparation of a series of ginkgolide derivatives with photoactivatable groups and fluorescent groups, as well as groups that potentially can be radiolabeled with positron emitters such as 11C or 18F. These analogs, together with the native terpene trilactones (1-6), have been assessed for their ability to displace radioligand binding to cloned PAFR.

Abstract: wherein R1 is H, OH, a photoactivatable moiety, a fluorescent moiety, or a radioactive moiety; R2 is H, OH, a photoactivatable moiety, a fluorescent moiety, or a radioactive moiety; R3 is H or OH; R4 is H, OH, a photoactivatable moiety, a fluorescent moiety, or a radioactive moiety; and wherein at least one of R1, R2, R3, or R4 is a photoactivatable moiety, a fluorescent moiety, or a radioactive moiety, or an optically pure enantiomer of the compound or wherein R1 is H or OH; R2 is H, OH, halogen, unsubstituted or substituted, straight or branched (C1-C5) alkyl group, (C2-C5) alkenyl, or a (C2-C5) alkynyl, (C1-C5) alkoxy, (C2-C5) alkenyloxy, or (C2-C5) alkynyloxy, —N3, —COR5, —CONR5R6, —CO2R5, —OCOR5, —NH(OH), —NR5R6, —NHCOR5, —N(OH)COR5, —CH2OR5, —OCH2CO2R5, —CH2SR5, —CH2NR5R6, —SR5, —OSR5, or —NR5SO2R6, where R5 and R6 are each independently hydrogen, substituted or unsubstituted (C1-C5) alkyl, (C2-C5) alkenyl, or (C2-C5) alkynyl, or a cycloalkyl or aryl group having 3 to 10 carbon atoms; R3 is H or OH; R4 is H, (C1-C10) alkyl, (C1-C10) alkenyl, (C1-C10) alkynyl, -A-Ar, -A-Z-Ar, —SO2—Ar, or -A-NR5, or —R7, where A, Z and Ar are as defined herein, and the use of the compounds for detecting or identifying a receptor which binds the compounds of the invention or for treating a PAF associated condition in a subject.

The Trustees of Columbia University in the City of New York


A power system for an aircraft includes a solid oxide fuel cell system which generates electric power for the aircraft and an exhaust stream; and a heat exchanger for transferring heat from the exhaust stream of the solid oxide fuel cell to a heat requiring system or component of the aircraft. The heat can be transferred to fuel for the primary engine of the aircraft. Further, the same fuel can be used to power both the primary engine and the SOFC. A heat exchanger is positioned to cool reformate before feeding to the fuel cell. SOFC exhaust is treated and used as inerting gas. Finally, oxidant to the SOFC can be obtained from the aircraft cabin, or exterior, or both.

The invention relates to fuel cells and, more particularly, to a solid oxide fuel cell (SOFC) system and process which is useful in connection with aircraft applications and jet fuel.
Fuel cells are a desirable alternative for use in generating electric power from hydrocarbon-based fuels more efficiently than a turbine based technology. The other advantages of having a fuel cell power the aircraft systems include, beneficial replacement of a gas turbine auxiliary power unit, reduction in the size of the main engines, reduction in emissions due to fuel cells being a cleaner technology, and reduced noise in airports due to comparatively lower number or size of rotating parts. In the case of the SOFC, the solid state technology and lower velocities of the fluid flow aid in lower noise.
Fuel cells are being considered as alternative generators for power for various applications, including power plants, motor vehicles and the like due to the higher efficiency of electrical conversion from the chemical energy of fuels like hydrogen, hydrocarbons, etc. Furthermore, it is established to be cleaner, environmentally friendly technology.
One such application is in aircraft, but use of fuel cells in aircraft applications has several advantages and disadvantages. The advantages are more efficient electrical energy generation, lesser emissions and lower noise signature. The disadvantages are the fuel cell systems tend to be heavier than their counter part gas turbine systems, with the current state of art, partly due to the need for fuel desulfurization and reformation prior to fuel cell stack input. The balance of the plant of the SOFC systems can also contribute to the weight. Additionally, the requirements for power conditioning increase the weight of the overall fuel cell based power generation unit. The other penalties of having a solid oxide fuel cell system in an aircraft may include increased drag caused by drawing air from outside, or loss in thrust due to use of air from cabin.
Jet A fuel is a typical fuel for use in aircraft applications. However, such fuel is not easily used in a fuel cell environment due to higher sulfur content and being a mixture of hydrocarbons with greater than 90% having more than 5 carbon atoms. Larger hydrocarbon molecules are not easily processed in a fuel cell, may lead to coke formation and need reformation to methane, carbon monoxide and hydrogen, which can be processed by SOFC thus minimizing the number of fuel processing reactors.
Further, in aircraft applications, redundant systems are desirable for obvious reasons.
Tight, technically sound, and beneficial integration of SOFCs into an aircraft application is therefore desirable, and is the primary object of the present invention.
It is another object of the present invention to provide a fuel cell system for aircraft applications which is effective with jet fuel, and which is efficient and reliable.
Other objects and advantages of the present invention will appear herein below.

Jet fuel based high pressure solid oxide fuel cell system


Systems, methods, and computer storage mediums are provided for collaboratively editing geographic features in a shared geographic database. An example method includes receiving a request from a first user to edit data associated with a plurality of geographic features geocoded within a first geographic area. The first geographic area is selected by the first user and defined by a first set of coordinates. The method then determines whether the first geographic area intersects a second geographic area. The second geographic area is selected by a second user and defined by a second set of coordinates. The intersection between the first and second sets of coordinates is determined by comparing the coordinates of the first and second geographic areas. When the first and second geographic areas do not intersect, the method locks the first geographic area to prevent other users from editing the geographic features geolocated within the first geographic area.

Geographic information systems allow users to download, view, and interact with geo-referenced data. The geo-referenced data may be provided to a user through a map or three-dimensional environment displayed on the user's computer system. The user may interact with the geo-referenced data by selecting geographic features, navigating around the map or through the three-dimensional environment, or selecting layers or sets of data for display. The geo-referenced data may be stored at a shared geographic database that is accessed by one or more geographic information servers. The shared geographic database may utilize a single database system or a collection of mirrored database systems.

Concurrent editing of large geographic data sets


A file (100), provided with at least a front cover (2), a back cover (3), a spine (4) and at least one arch for fastening paper and the like, wherein the front cover (2), the back cover (3) and the spine (4) are manufactured in one piece, preferably by injection molding from plastic, hinges (5, 6) being co-formed for connecting the covers with the spine (4), coupling means being provided for fastening the or each arch to one of the covers (3,4) or the spine (4).

The invention relates to a file. The invention particularly relates to a file with at least an arch for fixing paper and the like.
Files are conventionally provided with a front cover, a back cover and a spine, manufactured from cardboard, if required enclosed in a plastic coating sealed therearound. Front cover, back cover and spine are interconnected by hinges. Fixed on the back cover is an arch by means of pop rivets, blind rivets or the like, by which a fixed connection is obtained. The arch consists mainly of, for instance, two, four or twenty ring elements, which can be divided by means of an opening and closing mechanism, so that paper with perforations can be slid thereon, after which the rings are closed to fix the paper. Such files are, for instance, known as multi-ring, two-ring or four-ring files or the like.
These known files have the disadvantage that they occupy relatively much space in empty condition. In fact, the two covers cannot be folded together, because the or each arch is closed therebetween, while files in open condition, in which the front cover, the back cover and the spine are approximately in one plane, cannot be stacked, because the arches project thereabove. A further disadvantage of these known files is that their manufacture is relatively complicated, so that they are very expensive. Moreover, the metal parts can easily lead to damage to the papers to be stored in the file and to the surroundings, in particular through the metal fastening means.
The invention has for its object to \provide a file for the type described in the opening paragraph, in which the above disadvantages are avoided, while retaining the advantages thereof. To this end, a file according to the invention is characterized by a front cover, a back cover and a spine manufactured in one piece, preferably by injection molding from plastic, with hinges being co-formed for connecting the covers with the spine, and further including a coupling means having a clamping means, with which an arch can be fixed to one of the covers and/or the spine.


A seal structure that includes: a grommet with a cylindrical shape that is installed in an attachment panel, the grommet including an opposing surface facing an attachment surface of the attachment panel; and a bracket that presses the opposing surface of the grommet against the attachment surface of the attachment panel.

The present disclosure relates to a seal structure for a grommet used in a wire harness.
A known wire harness routed in a vehicle or the like is inserted in a through-hole formed in a panel of the vehicle and electrically connected to devices inside the vehicle. Such a wire harness (for example, see JP 2018-46704M is provided with a grommet for sealing the through-hole.
This type of seal structure for a wire harness is made from an elastic member and includes a cylindrical grommet into which the wire harness is inserted and a bracket that presses the grommet against a panel of a vehicle by being fasten to the panel of the vehicle. The grommet includes a cylindrical portion and a body seal portion shaped to flare from the outer circumferential surface of the cylindrical portion and to correspond to the panel. Two annular lips are disposed projecting from the surface of the body seal portion facing the panel. When the body seal portion of the grommet is pressed by the bracket, these lips are pressed against the panel of the vehicle. This forms a seal between the body seal portion and the panel.


A lock detection circuit is disclosed that is capable of detecting when a phase locked loop circuit is in a locked or unlocked condition. The invention comprises an exclusive OR gate, a deglitch unit, a gate circuit, a count lock circuit, a count unlock circuit, and a flip flop circuit. The deglitch unit outputs a clear xe2x80x9cclrxe2x80x9d signal only when UP signals and DN signals from a phase frequency detector in the phase locked loop circuit are mismatched in time by more than a predetermined period of time. Detection of a locked condition or an unlocked condition is made by processing xe2x80x9cclrxe2x80x9d signals in the count lock circuit and in the count unlock circuit.

The present invention relates generally to the field of integrated circuit technology. The present invention provides an improved lock detection circuit that indicates when an output phase is locked to an input phase in a phase locked loop circuit.
Phase locked loop circuits are well known. FIG. 1 illustrates a block diagram of a prior art frequency synthesizer charge pump phase locked loop (PLL) circuit 100. Input signal FIN is provided to input divider 110 and the output of input provider 110 is provided to a first input of phase frequency detector 120. Phase frequency detector 120 provides an xe2x80x9cupxe2x80x9d signal (designated xe2x80x9cUPxe2x80x9d) and a xe2x80x9cdownxe2x80x9d signal (designated xe2x80x9cDNxe2x80x9d) to charge pump 130. As is well known in the art, the UP signal closes a switch to cause current source 140 to provide current Iup to the output line of charge pump 130. The DN signal closes a switch to cause current source 150 to draw current IDN from the output line of charge pump 130.
The output line of charge pump 130 is coupled to loop filter 160 and to voltage controlled oscillator 170. The currents from charge pump 130 adjust the phase of the voltage controlled oscillator 170. The output signal For from voltage controlled oscillator 170 is provided to feedback divider 180. The output of feedback divider 180 is provided to a second input of phase frequency detector 120.
A charge pump PLL is a negative feedback system that insures that the phase difference as well as the frequency difference at the input of phase frequency detector 120 is near zero under steady state conditions. A PLL in such a state is said to be in a xe2x80x9clockxe2x80x9d condition or xe2x80x9clocked.xe2x80x9d The input and output frequencies are related by a fixed ratio which can be selected by choosing the values of the input divider 110 and the feedback frequency divider 180.
A charge pump PLL is typically a second order system. Therefore, any change from the steady state condition will result in a transient response that is typically characterized by the damping factor and the natural frequency of the system. The damping factor and the natural frequency of the system are dependent upon physical quantities such as the charge pump current, the effective gain of the voltage controlled oscillator 170, parameters of the loop filter 160, and properties of the phase frequency detector 120. The settling behavior of the transient response may also be governed by the comparison frequency at the input of the phase frequency detector 120.
Because some of these parameters are not constant, the time required for the PLL to acquire lock will vary. The output frequency of the PLL before it acquires lock is not stable and should therefore not be used. Because the charge pump PLL is second order system, there will be some overshoots and some undershoots in the transient response signal.
A lock detection circuit can be constructed that is capable of indicating the locked or unlocked state of the PLL circuit. Various methods exist for implementing a lock detection circuit. The implementation may be either analog or digital. Most prior art implementations rely on monitoring the activity at the output of the phase frequency detector 120 and some sort of analog filtering. For a lock detection signal to be of practical use, the signal should remain stable, should be insensitive to various mismatches in the loop, and should be tolerant to noise, and should have minimum latency.
The output of a Type IV phase frequency detector in a charge pump PLL comprises pulses at the UP output pin and at the DN output pin such that the difference in the pulse widths of the UP signal and the DN signal is equal to the input phase difference. The UP and DN signals are provided to charge pump 130. In response, charge pump 130 dumps an equivalent charge to adjust the phase of the voltage controlled oscillator 170. In a locked state, the output of phase frequency detector 120 comprises narrow pulses of equal duration on the UP output pin and on the DN output pin. The use of narrow pulses even in the locked state prevents the formation of a dead zone for small phase differences at the input of phase frequency detector 120.
There are deviations from ideal behavior in a practical system. For example, the xe2x80x9cupxe2x80x9d current Iup and the xe2x80x9cdownxe2x80x9d current IDN in charge pump 130 are not exactly equal due to the finite output impedance of current source 140 and current source 150. There can also be delay mismatches between the UP signal and the DN signal at the output of phase frequency detector 120. Leakage in loop filter 160 may also affect the operation of the charge pump PLL system.
Because the charge pump PLL system is a negative feedback system, the PLL corrects for all the non-ideal conditions by having a small phase offset at the input of the phase frequency detector 120 of an appropriate magnitude and polarity to negate these effects. This phase difference at the input of the phase frequency detector 120 is called the xe2x80x9cstatic phase error.xe2x80x9d
Random noise from individual components within the PLL circuit or from the power supply (not shown) could lead to an occasional pulse (or pulses) at the output of the phase frequency detector 120. An occurrence of such a pulse (or pulses) does not technically amount to an unlocked condition. Unless proper care is taken in designing a lock detection circuit, such a pulse (or pulses) may appear as an erroneous signal or glitch in the xe2x80x9clockxe2x80x9d signal.
It would be desirable to have a lock detection circuit in a phase locked loop circuit that is capable of detecting when an output phase is locked and is not locked to an input phase in the phase locked loop circuit.
It would also be desirable to have a lock detection circuit in a phase locked loop circuit that is capable of generating a lock signal that is stable.
It would also be desirable to have a lock detection circuit in a phase locked loop circuit that is capable of generating a lock signal that is insensitive to mismatches within individual circuit elements within the phase locked loop circuit.
It would also be desirable to have a lock detection circuit in a phase locked loop circuit that is tolerant of noise and that has minimum latency.
The present invention is directed to an apparatus and method for providing a lock detection circuit in a phase locked loop circuit that is capable of detecting when an output phase is locked to an input phase in the phase locked loop circuit, and when an output phase is not locked to an input phase in the phase locked loop circuit.
An advantageous embodiment of the present invention comprises an exclusive OR gate, a deglitch unit, a gate circuit, a count lock circuit, a count unlock circuit, and a D flip flop circuit. The exclusive OR gate receives an UP signal and a DN signal from a phase frequency detector. The exclusive OR gate filters out those portions of an UP signal and those portions of a DN signal that occur at the same time. The output of the exclusive OR gate represents either (1) a portion of an UP signal that occurs when a DN signal is not present, or (2) a portion of a DN signal that occurs when an UP signal is not present.
The deglitch unit outputs a clear xe2x80x9cclrxe2x80x9d signal pulse only when the UP and DN signals are mismatched in time by more than a predetermined period of time. The delay time is equal to (or slightly greater than) the estimated static phase error of the PLL when it is locked.
The detection of a locked or an unlocked state within the PLL is made by processing xe2x80x9cdclrxe2x80x9d l signal pulses. The xe2x80x9cclrxe2x80x9d signal pulses are coupled to a first input of gate circuit and also are coupled to a count unlock circuit. When the PLL is not in a locked condition, the gate circuit passes each xe2x80x9cclrxe2x80x9d signal pulse to a count lock circuit to reset a counter within the count lock circuit that is counting clock cycles. In the absence of a xe2x80x9cclrxe2x80x9d signal pulse for a fixed number of clock cycles, the count lock circuit determines that the PLL is locked. The count lock circuit then outputs a ready xe2x80x9crdyxe2x80x9d signal to a D flip flop that sets a xe2x80x9clockxe2x80x9d signal. The xe2x80x9clockxe2x80x9d signal is coupled to a second input of the gate circuit.
After the PLL is in a locked condition, the lock detection circuit of the present invention looks for an unlocked condition. The gate circuit blocks any xe2x80x9cclrxe2x80x9d signal pulses from resetting the counter in the count lock circuit. The count lock circuit now counts clock cycles and outputs a reset xe2x80x9crstxe2x80x9d signal pulse to the count unlock circuit after the count lock circuit counts a predetermined number of clock cycles.
The count unlock circuit counts the number of xe2x80x9cclrxe2x80x9d signal pulses received from the deglitch unit between two xe2x80x9crstxe2x80x9d signal pulses received from the count lock circuit. When the number of xe2x80x9cclrxe2x80x9d signal pulses received exceeds a predetermined number between two xe2x80x9crstxe2x80x9d signal pulses, the count unlock circuit then outputs an xe2x80x9cunlockxe2x80x9d signal to clear the D flip flop. This causes the xe2x80x9clockxe2x80x9d signal to go low indicating that the PLL is in an unlocked condition.
The lock detection circuit of the present invention operates by cycling back and forth between searching for the occurrence of an unlocked condition when the PLL is locked, and searching for the occurrence of a locked condition when the PLL is unlocked.
It is an object of the present invention to provide an apparatus and method for providing a lock detection circuit for a phase locked loop circuit that is capable of generating a lock signal that is stable.
It is another object of the present invention to provide an apparatus and method for providing a lock detection circuit for a phase locked loop circuit that is capable of generating a lock signal that is insensitive to mismatches within individual circuit elements within the phase locked loop circuit.
It is also an object of the present invention to provide an apparatus and method for providing a lock detection circuit for a phase locked loop circuit that is tolerant of noise and that has minimum latency.
It is another object of the present invention to provide an apparatus and method for providing a lock detection circuit for a phase locked loop circuit that is capable of ignoring one or more pairs of occasionally mismatched UP signals and DN signals from a phase frequency detector when the phase locked loop circuit is in a locked condition.
The foregoing has outlined rather broadly the features and technical advantages of the present invention so that those skilled in the art may better understand the Detailed Description of the Invention that follows. Additional features and advantages of the invention will be described hereinafter that form the subject matter of the claims of the invention. Those skilled in the art should appreciate that they may readily use the conception and the specific embodiment disclosed as a basis for modifying or designing other structures for carrying out the same purposes of the present invention. Those skilled in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the invention in its broadest form.
Before undertaking the Detailed Description of the Invention, it may be advantageous to set forth definitions of certain words and phrases used throughout this patent document: The terms xe2x80x9cincludexe2x80x9d and xe2x80x9ccomprisexe2x80x9d and derivatives thereof, mean inclusion without limitation, the term xe2x80x9corxe2x80x9d is inclusive, meaning xe2x80x9cand/orxe2x80x9d; the phrases xe2x80x9cassociated withxe2x80x9d and xe2x80x9cassociated therewith,xe2x80x9d as well as derivatives thereof, may mean to include, be included within, interconnect with, contain, be contained within, connect to or with, couple to or with, be communicable with, cooperate with, interleave, juxtapose, be proximate to, to bound to or with, have, have a property of, or the like; and the term xe2x80x9ccontroller,xe2x80x9d xe2x80x9cprocessor,xe2x80x9d or xe2x80x9capparatusxe2x80x9d means any device, system or part thereof that controls at least one operation. Such a device may be implemented in hardware, firmware or software, or some combination of at least two of the same. It should be noted that the functionality associated with any particular controller may be centralized or distributed, whether locally or remotely. Definitions for certain words and phrases are provided throughout this patent document. Those of ordinary skill should understand that in many instances (if not in most instances), such definitions apply to prior, as well as future uses of such defined words and phrases.

Lock detection circuit for a phase locked loop circuit


Disclosed herein are a resin composition comprising 5 to 95% by weight of a vinylidene chloride resin and 5 to 95% by weight of a polyamide resin having a low crystalline melting point of not higher than 210.degree. C. and a molded product of said resin composition.. The molded product of the present invention shows a molded product excellent in gas-barrier property and impact strength at low temperature, particularly a film, sheet or container.. Among the resin compositions of the present invention, since the composition having 60 to 95% by weight of vinylidene chloride resin is particularly rich in gas-barrier property, it is suitable for packaging foods, and since the composition having more than 40% by weight and not more than 95% by weight of polyamide resin is excellent particularly in impact strength at low temperature, it is suitable as the packaging material for use at an extremely low temperature. Moreover, the gas-barrier property and the transparency of the latter molded product which is rich in polyamide resin can be improved by stretching the product so that the dispersed particle of vinylidene chloride resin is made to be flat.

The present invention relates to a resin composition consisting of 5 to 95% by weight of vinylidene chloride resin (hereinafter referred to as PVDC) and 5 to 95% by weight of a polyamide resin of low melting temperature with a crystalline melting point of not higher than 210.degree. C. and to a molded product excellent in gas-barrier property and impact strength at low temperature comprising the above-mentioned composition.
PVDC is a resin which has excellent gas-barrier property and can be processed into films or bottles excellent in heat-sealing property, heat shrinkability and transparency, and is suitable for food-packaging. However, in the case of using PVDC only, the impact strength thereof at low temperature is small, and accordingly, several methods have been proposed for improving the mechanical strength of PVDC at low temperature.
For instance, a method of combining a liquid plasticizer with PVDC or a method of laminating PVDC and polyolefin, etc. has been carried out. However, the addition of a large amount of the liquid plasticizer makes the gas-barrier property poor and there is a possibility of permeating of the liquid plasticizer to the foods, and for producing the laminated molded products, it is necessary to provide a plurality of extrudes and the operation becomes complicated.
In order to reduce the amount used of the plasticizer, there is a technique of blending a chlorinated polymer with PVDC [refer to Japanese patent applications Laid-Open Nos. 53-58553 (1978), 53-136054 (1978) and 54-74848 (1979)]. Although the above-mentioned technique can prevent the deterioration of the gas-barrier property, the improvement of the impact strength at low temperature is not sufficient.
Moreover, the improvement of the impact strength of PVDC at low temperature is carried out by mixing a small amount of rubbery or elastic substance with PVDC [refer to Japanese Patent Publication No. 40-16141 (1965)]. However, there are cases where the molded product obtained by this method can not fulfill the impact strength at low temperature and the oxygen-barrier property at the same time.
On the other hand, polyamide resin is industrially utilized in the field of the melt-extruding molded products because of the excellent toughness, heat-resistance, cold-resistance, oil-resistance, transparency, etc. thereof, as the resin for single film, sheet or the resin for forming a layer of making laminated products (EPO139,888, GB2,035,198). However, since polyamide resin shows a large oxygen-Permeability coefficient and water vapor transmission rate at a high humidity, the range of utilization of polyamide resin has been limited.
Since polyamide resin is a structurally hydrophilic resin, it absorbs moisture in the atmosphere of high humidity, and it is plasticized by the thus absorbed water molecules resulting in the deterioration of the barrier property to oxygen, water, etc.
In the case where there is a moisture-dependency of the barrier property, not only the humidity of the outside atmosphere but also the water content of the packaged product itself must be considered, and accordingly, in the case of packaging the material containing a large amount of water, the gas-barrier property of polyamide resin becomes insufficient.
In general, to reduce the oxygen-permeability coefficient of polyamide resin, there is a method of mixing a saponified product of ethylene-vinylacetate copolymer [refer to Japanese patent application Laid-Open No. 62-7761 (1987)].
However, the oxygen-permeability under high moisture is still large, and there are problems of the occurrence of cross-linked gels at the time of melt-extruding, etc.
It has been desired to improve the hitherto-known defects of polyamide resin, namely (1) poor oxygen-barrier property under the atmosphere of high humidity and (2) large water vapor transmission rate under the atmosphere of high humidity, together with the problems of inability of maintaining the moldability, the gas-barrier property and the impact strength at low temperature in the case of mixing the polyamide with another resin for dissolving the above-mentioned defects, to a practically sufficient level at the same time.
As mentioned above, although PVDC and polyamide resin are respectively excellent resins, each of them has its own defects and a resin provided with both a practical gas-barrier property and an excellent impact strength at low temperature has been desired particularly in the field of food-packaging materials.
In order to solve the above-mentioned problem, a method of laminating a layer of PVDC and a layer of polyamide resin has been proposed [U.S. Pat. No. 4,112,182 and Japanese patent application Laid-Open No. 62-273849 (1987)]. However, since the adhesive power of each other of them is not sufficient, it is necessary to use a special adhesive and using a plurality of extrudes has a weak point of complicated operation.
As a result of the present inventors' earnest studies for obtaining a resin composition excellent in gas-barrier property and impact strength at low temperature and well balanced, they have found that a resin composition obtained by mixing PVDC and a polyamide resin having a crystalline melting point of not higher than 210.degree. C. has an excellent impact strength at low temperature and practical gas-barrier property, and on the basis of this finding, the present inventors have completed the present invention.
Further, the gas-barrier property in the present invention means the barrier property to oxygen and water vapour.

Resin composition and molded products thereof


Provided is a disc storage apparatus that includes a case including an opening on an upper surface of the case and capable of storing N rows of stacked M disc-shaped recording media (N and M each indicate a positive integer of two or greater), a tray cover that slides from a rear end of the case and cover the opening, and a locking mechanism that locks a state of the opening being covered.

An archive apparatus that uses high-capacity optical discs (hereinafter referred to as "discs") has been in practical use. Examples of a storage apparatus in a data center include a storage apparatus that uses magnetic tapes as media. The discs are suitable for a cold archive aimed at long-term storage as compared with the magnetic tapes. For example, the following PTL 1 describes an archive apparatus capable of storing 12 discs in a magazine and handling the discs in units of magazines.
As described in PTL 1, storing 12 discs in one magazine has advantages in that the number of discs that can be accessed at a time increases and it is possible to record or reproduce a large amount of data at a time as compared with the case where discs are mounted in drives one by one. However, it is desired that a larger amount of data is recorded or reproduced in the data center.
The applicant of the present application has previously proposed a disc medium storage apparatus (hereinafter referred to as a disc tray as appropriate) in which a larger number of discs are stored in a case. This disc tray is capable of storing 64 (=4 rows×16) discs in the case with an upper surface thereof opened. The case has a box shape and is made of a synthetic resin. A large number of such disc trays are stored in a storage rack. A tray conveying robot takes out a predetermined disc tray from the storage rack and conveys the disc tray to disc drives so that the disc drives simultaneously record or reproduce data on/from the plurality of discs.
Normally, a disc tray once stored in the storage rack of the disc archive apparatus is not taken out from the rack. This is because there is a possibility that dust or the like enters into the storage rack from the outside. However, there may be a disc whose capacity has become full, a disc that has become defective, or a disc tray that has hardly been accessed and only needs to be stored off-line, for example. In consideration of this point, a dedicated storage rack is provided to take out a disc tray or mount a disc tray in a space of the storage rack from which a disc tray has been taken out. It is noted that although one possible consideration is to take out an unnecessary disc tray from a maintenance hatch provided in the storage rack, there is a risk that the internal discs jump out and scatter when the disc tray is tilted while being taken out.

Disc storage apparatus and disc archive apparatus

SONY SEMICONDUCTOR SOLUTIONS CORPORATION


The present invention relates to a process of oxidizing copper in a copper etching solution by using oxygen gas and/or air as an oxidizing agent, the process comprising the steps of: a) introducing the oxidizing agent into an acidic reduced copper etching solution comprising Cl− and Cu+, b) stirring the solution obtained in step a), and thereby allowing the reaction 2Cu++½O2 (aq)+2H+→2Cu2++H2O to occur, thereby producing an oxidized copper etching solution comprising less Cu+ than the reduced copper etching solution. An advantage of the present invention is that it provides an improved process at least in terms of the speed of the oxidation and the quality of the etching.

Etching is today a commonly used technique in the production of printed circuit boards. In the production of a printed circuit board, a substrate such as a plastic laminate is coated with a layer of conducting material such as copper. On top of the copper layer, a protective layer of e.g. an organic polymer is provided photochemically to selectively cover certain parts of the copper layer. The coated substrate is etched in an etching machine in which the coated substrate is exposed to a continuous flow of copper etching solution, thereby etching away at least a portion of the copper layer not covered by the protective layer, leaving the protected portions of the copper layer non-etched to produce the conductive layer of the printed circuit board.
In a conventional etching process an oxidizing agent, such as for example hydrogen peroxide, sodium chlorate or gas comprising ozon or chlorine gas, is used for reoxidizing the used copper etching solution in the etching machine. Such oxidizing agents are, however, considered aggressive chemical compounds which negatively affect the working environment and the environment in a broader perspective.
EP 0048381 B1 teaches an alternative process for regeneration of hydrochloric acid copper chloride copper etching solution, wherein etching and regenerating is effected in separate devices between which the copper etching solution is circulated. The copper etching solution is sucked from the etching machine and sprayed into a bell comprising oxygen gas.
Despite of the alternative process in EP 0048381 B1, there is still a need in the art for improved processes of regenerating copper in a copper etching solution.

Oxidation of copper in a copper etching solution by the use of oxygen and/or air as an oxidizing agent


There is disclosed an attachment for facilitating positioning of a pliable or flexible line such that said line extends over at least one object, the attachment being removably attachable to a free end of said line and being able, when so attached, to be thrown so as to carry the end over the object(s) whereby said positioning is effected.

Securing of a load against a flat bed or tray floor of a vehicle typically involves tying the load down against the bed or floor using a pliable or flexible line, consisting of rope, strapping or the like. Generally speaking, the rope or strapping is positioned so as to extend across the tray or bed and over the load, and is tightly fastened at opposite sides of the tray or bed so as to secure the load. Positioning the rope or strapping over the load can be difficult, particularly where the load is bulky or tall.

Attachment for facilitating securing of a load with a strap, rope or the like


A fender mountable to a vehicle having a wheel. The fender includes a mounting bracket mountable to the vehicle, a suspension component mechanically coupled to the mounting bracket and a shield component mechanically coupled to the suspension component so as to be positionable substantially adjacent the wheel. The suspension component includes a deformable portion extending between the mounting bracket and the shield component. Upon a biasing force being exerted onto the shield component, the biasing force deforms the deformable portion so as to move the shield component relatively to the mounting bracket.

As is well known in the art, the tires of automotive vehicles are provided with a configured tread portion including a plurality of grooves and raised rubber ridges that provide driving traction with the ground. Although various tread designs are provided by the various tire manufactures, typically, all of these tread designs or configurations are adapted to provide an optimal compromise of tire wear, traction, stopping and nonskid capabilities and the like.
Larger vehicles such as trucks, tractors, trailers, semi-trailers and the like are typically correspondingly provided with relatively large tires. Such relatively large tires are, in turn, typically provided with relatively large grooves of such a size that appreciably sized stones, rocks or the like may potentially be readily embedded into these grooves. The potential for embedding appreciably sized stones or the like is compounded by the fact that these vehicles are typically relatively heavy and, hence, the tires grooves are compressed when they contact the roadway.
As the tires rotate during motion of the vehicle, the tire grooves dilate as they leave the roadway hence freeing the stones. Accordingly, as the tires rotate, the formerly embedded stones are freed to be hurled relatively violently. Although stones are considered to be more dangerous, the tires of relatively large vehicles may also hurl mud, clots of dirt and water in a similar manner.
Typically, the rocks, mud or other material is hurled in a generally upward and backward direction and, in the case of relatively large vehicles, relatively large objects may impact the surrounding environment including other vehicles, potentially breaking windshields, injuring drivers, deforming car bodies or the like.
When water is hurled, so-called "tread throw" is thrown from the rotating tires and may impact against surfaces of the vehicle, causing the throw droplets to fragment into smaller droplets of spray. This spray may potentially impair the visibility of drivers of these and other vehicles during wet conditions. This may potentially result in erratic directional control by drivers of following cars and trucks which are enveloped in this spray, especially from the large commercial trucks and tractor-trailer combinations which are moving ahead of them or beside them as they travel on the wet roadway. Drivers of these large vehicles also have difficulties seeing, via their rearview mirror, through the spray generated by their own vehicles, which occasionally causes accidents as they change lanes.
Furthermore, the hurling may also occur at the top of the tire, hence potentially hurling stones in a forward direction. Impinging stones may contact the tractor tanks and other equipment and potentially damage the latter.
In view of the potential hazards caused by hurling of different materials by relatively large vehicles, laws and regulations have been implemented in some regions requiring a protective safety device for intercepting hurled stones and the like. Accordingly, the prior art has shown some examples of impingement shields also called mudguards, splash guards or fenders.
A conventional impingement shield widely used takes the form vertically supported sheets of substantially resilient material such as rubber that hangs in the form of a curtain behind the tires of the relatively large vehicles for the purpose of intercepting such hurled objects. While such impingement shields have been widely accepted, they nevertheless suffer from numerous drawbacks. One such drawback is that they do not provide any shielding action for stones or objects that may be projected or hurled in an upward and/or forward direction. Furthermore, they may prove to be less than satisfactory for tread throw.
Typically, relatively large vehicles such as trucks, tractors, trailers, semi-trailers or the like are not provided with metallic fenders or mudguards for a variety of technical reasons. One such reason relates to the fact that the truck's chassis is usually manufactured by a different manufacturer than the one who makes the truck's body. Hence, it is generally difficult to know in advance the size of the tires that will be used, the location of the wheels relative to the truck's body, the problems associated with changing the large tires, etc.
Another main problem associated with the use of conventional metallic fenders on large vehicles such as trucks, trailers and the like relates to the fact that these conventional fenders may relatively easily be damaged when subjected to various impact stresses such as when the wheels move vertically as a result of a bump or other irregularity in the roadway or when the fender contacts stationary obstacles such as a sidewalk curb or the like. With the tight tolerances found in modern streamlined vehicles such as the heavy-duty trucks, there is little if any extra space between the tire and fender, hence compounding the risk of potentially damaging impacts on the fender.
The potential for damaging conventional fenders is particularly important in situations wherein, for example, a semi-trailer is being mechanically coupled to its tractor truck. In such instances, the forward portion of the trailer van or the like typically contacts the fender as the tractor truck back up to position its coupling section including the hitch adjacent or underneath the trailer van.
Accordingly, there exists a need for an improved fender mountable to a vehicle. It is a general object of the present invention to provide such an improved fender mountable to a vehicle.


A foldable aquatic stepper includes: a foldable frame device, and a stepping device mounted on the frame device having a pair of paddling pedals reciprocatively and alternatively stepped upon for a smooth aquatic stepping exercise.

U.S. Pat. No. 5,868,649 disclosed an aquatic exerciser device which is to be used in a pool having an element engaged by the foot or hand of an individual, which element is linked to a piston-cylinder combination so that as the user engagement element is moved by the user, the piston rides in the cylinder, thereby performing aquatic exercise.
However, such a prior art has the following drawbacks:    1. The user should sit down on the seat (20) for treadling the pedals (36). It is not suitable for an upright aquatic exercise when the user stands up.    2. The production or assembly for making the piston-cylinder combination may be complex, thereby increasing production cost and maintenance problems.    3. It is not foldable for reducing its volume, being inconvenient for the handling and storage.
The present inventor has found the drawbacks of the prior art and invented the present foldable aquatic stepper.


A sheet binding device includes a first binding unit that performs a first binding process of binding a sheet bundle having a first thickness or less without using a staple, and a second binding unit that performs a second binding process of binding the sheet bundle having a second thickness or less exceeding the first thickness using a staple, the first binding process by the first binding device is preferentially executed when the thickness of the sheet bundle is the first thickness or less, and the second binding process by the second binding unit is executed when the thickness of the sheet bundle exceeds the first thickness and is equal to or less than the second thickness.

The present disclosure relates to a sheet binding device capable of performing two types of binding processing and an image forming apparatus.
Some image forming apparatuses include a sheet binding device capable of selectively performing, between binding processing without using a staple and binding processing using a staple, with respect to the sheet after the image formation is performed.
Generally, the staple binding processing can bind a larger number of sheets than the staple-free binding processing.
However, the number of sheets that can be stapled by the staple-free binding processing and the staple binding processing varies depending on the thickness of the sheet.
Therefore, it is known that the number of sheets that can be stapled by the staple-free binding processing is set for each type of sheet, and whether or not to execute the staple-free binding processing is controlled according to the type of sheet and the number of sheets to be processed.

Sheet binding device and image forming apparatus


The invention relates to our energy conversion system for converting the kinetic energy possessed by the wind into mechanical energy. The objective is to produce a controlled, tornado like, turbulence around a turbine. This is accomplished by using a deflector to channel the air over a main body made up of five rotating wings which in turn deflect the air into small turbine rotatably connected to the wings.

The present invention relates to an improved assembly for converting kinetic energy of the atmosphere such as blowing wind, into machine motion (rotation) which can then be utilized for the production of electricity or other proposes. The wind is uniquely deflected and channeled over a series of foils in such a way so as to increase its density and accelerate its flow. This controlled channel of air or controlled turbulence is directed onto a turbine blade specifically designed so as to rotate in the turbulence.


A connector includes: a cylindrical terminal; an internal terminal; and a housing. The cylindrical terminal has an engagement portion of its one edge portion and its opposite other edge portion. The one edge portion has a first reduced thickness portion at its circumferential end portion. The first reduced thickness portion has a first protrusion protruding inwardly in a radial direction and extending in an axial direction. The other edge portion has a second reduced thickness portion. The second reduced thickness portion has a second protrusion protruding outwardly in the radial direction and extending in the axial direction. The engagement portion is configured by overlapping the first reduced thickness portion and the second reduced thickness portion and further by locating the first protrusion and the second protrusion to face each other in the circumferential direction to allow an engagement between them in the circumferential direction.

In the related art, there is proposed a connector that has a high shielding property and is used for the purpose of being connected to a coaxial cable or the like. For example, in a connector in the related art, a periphery of a terminal portion is covered with a metal tube, so that electromagnetic waves emitted from an outside of the connector toward the terminal portion and electromagnetic waves emitted from the terminal portion to the outside are shielded (collected). The metal tube has a structure in which a metal plate member is bent into a cylindrical shape so that one and the other edge portions of the plate member are overlapped with each other. The edge portions overlapped with each other in this manner, so as to prevent a decrease in shielding performance at a joint of the edge portions.
As for details of the above connector, refer to JP 2011-113858 A.
The connector in the related art as described above has a stepped shape that protrudes radially outward at the joint described above due to the overlapping of the edge portions of the plate member. Therefore, when the metal tube is actually assembled to a housing, for example, it is required to provide a recess or the like corresponding to the above-described stepped shape on an inner wall surface of an insertion hole provided in the housing. In other words, a structure of a mold or the like for manufacturing the housing is complicated, and it is difficult to improve productivity of the housing (and the connector). In this manner, it is difficult to achieve both the shielding performance and the productivity of the connector in the related art.


A network processing device identifies call requests that require secure media connections and that also require transport over both a packet switched network and a circuit switched network. The network processing device establishes an IP link over the circuit switched network and directs endpoints for the media connection to use Internet Protocol (IP) media encryption. The same IP encrypted media is then transported end-to-end over both the packet switched network and the IP link in the circuit switched network.

Many mechanisms exist to encrypt voice over a Public Switched Telephone Network (PSTN). For example, customers can deploy devices in front of Private Branch Exchanges (PBXs) that encrypt calls made over the PSTN. These devices detect the presence of a similar encryption device on a far end of the call and then establish an encrypted call with the far end device. These encryption mechanisms are used for example by the military and defense contractors.
Secure Real-time Transport Protocol (SRTP) is a standard used for encrypting real-time media, such as voice or video, in an Internet Protocol (IP) network. The SRTP encryption scheme is used to protect voice or video sent over the IP network. Other legacy encryption equipment is then used to protect the same voice or video stream when transported over the PSTN.
For example, a Voice Over IP (VoIP) call is encrypted into SRTP packets and then transported over an IP network. If the VoIP call needs to travel over a PSTN network, the media in SRTP packets is decrypted and decoded. The decrypted and decoded media is then re-encrypted by a PSTN encryption device prior to being transported over the PSTN. On the opposite end of the PSTN connection, the PSTN encrypted media is decrypted and decoded. The decrypted media is then re-encoded and re-encrypted back into SRTP packets for transport over the IP network to a final destination endpoint.
This multi-stage encryption process breaks end-to-end encryption and requires additional jitter buffers and codecs that add significant delay and adversely affect voice quality.

Method and apparatus for transporting encrypted media streams over a wide area network