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Direct Comparisons Between the Genres
By: Paul Smith
Texas Country seems to have stemmed from Western Swing. According to the Country Music Hall of Fame, during the depression era, Western Swing was "born in the dusty dance halls of Texas and Oklahoma" (Styles). It was a combination of cowboy country and big-band jazz. Texas country then took a turn (some would say for the better) when a few artists left Nashville to break from the Nashville sound. The "Nashville Sound" was what turned country music into a multimillion-dollar industry and focused on the popularity aspect of music (Country Music). Artists such as Waylon Jennings, Kris Kristofferson and Willie Nelson helped start "Outlaw Country." This style ventured back to the days of "rugged individualism" which was what had been a necessity of country before Nashville popularity (Styles).
Nowadays, the difference between the two is most likely noticed with Nashville Country sounding more like pop music and Texas Country sounding more traditional. "With an added emphasis on electric guitars and drums, the sound can be closer to rock/pop than pure country" (Styles). Also, branching from Nashville came Alternative Country, which has loud, edgy sounding electric guitars. Many "crossover artists" become successful in Nashville. "Pop" artists such as Olivia Newton-John, John Denver, and more recently Taylor Swift have found success and have been recognized as award-winning country music artists. These artists would not even be recognized as country in Texas.
On the whole, Texas County is more traditional and does not have as heavy lead guitar and modulation as Nashville Country does. Nashville country can sometimes be characterized as pop music. The difference main between the two is the pop music nature of Nashville and the more traditional nature of Texas Country.
"Country Music: Origin, History and Background Information." Genres Country Music. Audials, n.d.
Web. 18 Nov. 2012.
"Styles of Country Music." Country Music Hall of Fame and Museum. Country Music Foundation,
Inc., n.d. Text. 20 Nov. 2012.
Taylor Swift is a pop-country crossover artist. She is most widely recognized as a pop-music artist but has been recognized in the Nashville Country music world for her music.
This song represents the "rigged individualism" of Outlaw Country, early beginnings of Texas Country.
Wade Bowen is a Texas Country Music artist. His music features strong acoustic lead guitar and simple drum beats.

subset: commoncrawl


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My Nonprofit Reviews
Review for Minutes for Memories Foundation, Brookline, MA, USA
Minutes for Memories is a foundation with a thoughtful and important cause. It is run by a group of devoted and enthusiastic individuals, whose goal is to bring smiles to the faces of children in need (as well as their families). It's apparent that the employees/volunteers truly care about the kids they work with and they strive to create a unique experience that's well-matched with the interests of each individual. I'm also impressed by how the foundation successfully reinforces the notion of overcoming life's challenges. Keep up the good work!
More Feedback
Will you volunteer or donate to this organization?
How much of an impact do you think this organization has?
A lot
When was your last experience with this nonprofit?


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Senate Committee On Mental Health To Consider Civil Confinement Legislation
The Senate Committee on Mental Health and Developmental Disabilities, Chaired by Senator Tom Morahan (R-C, New City), will hold a committee meeting on Monday, March 5, 2007 to consider the Sex Offender Management and Treatment Act (S3318), a bill which establishes comprehensive reforms to enhance public safety by allowing the State to continue managing sex offenders upon the expiration of their criminal sentences, either by civilly confining the most dangerous recidivistic sex offenders, or by permitting strict and intensive parole supervision of offenders who pose a lesser risk of harm. Treatment is mandated during both criminal and civil confinement and during the period of strict supervision. It also creates a new crime of a "Sexually Motivated Felony," and provides for enhanced terms of post-release supervision for all persons who commit felony sex offenses. The meeting will be held at 9:45 am in Room 801 of the Legislative Office Building.
"Sexual predators prey on the innocent --they are among the most dangerous criminals, and recidivism rates for these offenders are especially high. Almost half will end up back in prison from a parole violation or for committing a new crime. This is important new legislation which must be supported with funding for separate and secure facilities to house and treat these individuals. Under no circumstances should they be co-mingled with mental health patients with non-criminal behavior," said Senator Morahan.


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Hammacher Schlemmer Introduces The French Cuff Bottle Openers
Jul 15, 2014, 11:20 ET from Hammacher Schlemmer
NEW YORK, July 15, 2014 /PRNewswire/ -- Continuing its 166-year history of offering the Best, the Only and the Unexpected, Hammacher Schlemmer introduces The French Cuff Bottle Openers, cufflinks that open beer bottles as easily as they fasten French button cuffs.
Unlike typical cufflinks that only serve as ornamentation, The French Cuff Bottle Openers are ideal for the gentleman who believes form should always follow function.
"The French Cuff Bottle Openers appear to be classic, formal cufflinks suitable for accessorizing a business suit but once they are removed from cuffs they fit around caps and can be used to pry bottles open," explained Fred Berns, Hammacher Schlemmer's General Manager.
Made from polished stainless steel that complements business attire, the cufflinks have built-in rigid teeth that easily remove bottle caps from a bottle-conditioned imperial pale ale or a barrel-aged milk stout. The cufflinks' swivel bars secure them to a shirt cuff and provide ideal leverage for prying caps from craft beer bottles.
The French Cuff Bottle Openers are available from Hammacher Schlemmer for $49.95. For more information about this product, please visit www.hammacher.com or contact Trish Hammond at (847) 581-8987 or via e-mail at email@example.com .
About Hammacher Schlemmer
Hammacher Schlemmer is America's longest running catalog, offering the Best, the Only and the Unexpected since 1848. The company provides unique products that solve problems or represent the only one of their kind, backing all products with The Hammacher Schlemmer Lifetime Guarantee. Hammacher Schlemmer's innovative offerings are available through its catalog, website, and its famed landmark store at 147 E. 57th Street in New York City.
SOURCE Hammacher Schlemmer


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Analysis / Secular Conversions Begin Cautiously
The founding document of the pluralistic conversion forum contains two main innovations. 1. It marks the beginning of secular conversions to Judaism. 2. Moderate Orthodox organization are willing to try to break the Chief Rabbinate's monopoly on conversion. In addition, converts who choose this path are not expected to encounter problems with the recognition of their Judaism by the state: In 2002 the High Court of Justice ordered the Interior Ministry to register as Jewish anyone who converts in the framework of a Jewish community that is recognized in Israel.
Despite the revolutionary nature of these ideas, they are only the beginning. The idea behind the secular conversion initiative is that most of those classified as being without-religion in Israel are secular, and thus there is no reason for someone in this category to be obligated to join a religious stream in order to become a secular Jew. It must be noted that while both Reform and Conservative Judaism are open and liberal they are still religious streams. In order for secular conversions to become a mass movement, one of two things must occur: Either a powerful secular organization with deep pockets, such as the kibbutz movement, must take on the project, or the Reform movement must win its High Court of Justice case demanding state funding for pluralistic conversions, too.
At first glance, the road to Orthodox conversion seems much easier. All the Ne'emanei Torah Ve'Avodah movement needs is to have three rabbis to convert those who have completed their training. The challenge of this moderate Orthodox organization is to get over the psychological barrier of rebelling against the Chief Rabbinate. Everyone knows the Chief Rabbinate has become Haredi and not Zionist. But it is very difficult for the national-religious to get used to this idea, and to take action.
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Unemployed fed up, heading to school: group
People suffering chronic unemployment area heading back to school, says the Canadian Labour Congress. (FILE PHOTO)
Frustration with underemployment may be sending more people to the post-secondary classroom this fall, according to the Canadian Labour Congress. Senior economist Angela MacEwen says the labour market is flat even though statistics show unemployment is down. She points out employment data doesn't take into account people who stop looking for work, or are forced to take low-paying part-time jobs and unpaid internships.
Dave Pinton with the B.C. Institute of Technology says they've seen an enrolment increase of 5% this year, but it may not be related to the job market. Earlier this summer, BCIT received funding for 272 extra seats in popular trades programs like welding and industrial electricians.
"Enrolment for September 2014 is slightly higher than 2013 because of trade programs that are in high demand," says Pinton, adding all of the trades associated with liquefied natural gas have more students enrolled.
Meanwhile, a representative from Simon Fraser University says its enrolment is generally the same as last year, but final numbers won't be calculated until the third week of September. Like BCIT, SFU also doesn't track the reason students are enrolling.
Unemployed workers seeking additional education isn't a bad thing for the labour force, according to MacEwen, especially in trade programs with high job prospects upon graduation. However, she says strengthening the B.C. workforce would happen a lot quicker if employers create better training programs on the job.


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Chest freezer converted into a cooler for corny kegs of beer.
Gaps mended with wood filler, collar sanded with 120 then 220 grit sandpaper, ready to stain.
First coat of black stain applied to the face.
Detail of the grain on the front of the collar after the first coat of stain is complete.
Wrapping the foam brush for stain application in a used, inside-out nitrile glove allows it to be saved for later.
Tape marking out the drill locations for the shanks.
Drilled holes for the shanks. I probably should have done this before staining.
General Finishes' Arm-R-Seal and Country Colors Black were used to finish the wood, and FIX Wood Filler was used to repair blemishes.
Frost King Rubber Foam Weatherseal in 1 1/4" wide and 7/16" thick is to be applied to the bottom of the collar to keep it in place and sealed.
Weather stripping applied to the bottom of the collar.
Screws on the back of the collar so the lid can fit nicely in place.
Apparantly I marked two of the lid retention holes in the wrong place. Whoops.
Hinge cover piece back in place.
Metal strap holding the collar to the body of the chest freezer
Chest freezer back in its original location and awaiting the installation of faucets.
Metal drywall mud tray fitted with wooden blocks and magnets recycled from old hard drives sitting flat while epoxy cures. This will serve as a drip tray.


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Hi, just wondering if somebody can explain to me why, when Honda(the manufacturer of my bike) has done an assesment of the vehicle, what they have said cannot be used in court?
My insurers assigned an engineer who produced wildly different figures which im arguing paints the wrong picture of my bike, wrong repair values, wrong sale values etc etc...they tried to charge me to get a new report done so I said F* off and now they're trying to assign one for free, which then wasn't able to arrange anything and expected me(as a renter who rents alone in a house accessed by other people) to just drop my job at some random point in the day to go back(at a cost of lost hours and i can't come back the parking charges make it pointless), or leave my bike out in public all day...told them to F* off again now they're trying to get somebody else...
Why am I having to go through all this when Honda has already done an assesment(at my request, via the insurers as I told them it's my right), if it did get repaired(doubt it) I'm only having Honda do it...so why can't their assesment be used?? Nobody else is touching my bike.
P.S. I'm Non fault...so my insurers won't even be footing the bill!!


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Welcome to Fall 2016 in the Education Library. Try out the new iMac in 184. Sit in the new bean bag chairs you requested.
Watch and read!
The Book Thief, Ender's Game, Hunger Games series, Twilight series and more....
The Instructional Resource Center (IRC) is located on the 1st Floor of the Rev. Gregory F. Lucey, S.J. Administration Center. The IRC includes the Teacher Education Library, computer lab, classroom and media production room.
Our primary mission is to assist teacher education majors in the development of curriculum by selecting, providing access to, and instructing educators in the use of instructional resources and technologies.
On this website, you'll find library guides and resources corresponding with your classes and assignments.
The IRC supports the Division of Teacher Education curriculum with a collection of high-quality books, media and resources appropriate for pre-school through secondary education.
Curriculum materials come in a variety of formats: children's and young adult literature, professional literature, K-12 textbooks and courses of study, and non-print materials including kits, games, manipulatives, educational software, and sound and video recordings.
NEW!!! The TumbleBookLibrary is a collection of TumbleBooks (animated, talking picture books) with fiction, non-fiction and foreign language titles, Read-Alongs (chapter books with sentence highlighting and narration but no animation), TumbleTV which consists of pre-set playlists of a sequence of books, Tumble Puzzles & Games, and TumbleResources for teachers and students. TumbleBooks are created from existing picture books which we have licensed from children's book publishers and converted to the TumbleBook format.
Overview of resources in the Teacher Education Library.
IRC hours are Monday through Thursday from 8:30 to 6:00 p.m. and Friday from 8:30 to 4:30. Hours may vary. Please feel free to schedule an appointment with Mrs. Heim email@example.com, 251-380-3481.
21 days


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First Place Bank
First Place Bank, The Ravenna Savings Bank Branch
999 East Main Street
Ravenna, OH 44266
Portage County
Phone: Phone number not supplied
Sponsored Links
Details of First Place Bank, The Ravenna Savings Bank Branch, a branch is located at Ravenna, Ohio 44266.
|Sunday - Closed
|Branch Hours:
|Monday to Thursday - 9:00 A.M. - 5:00 P.M.
Friday - 9:00 A.M. - 6:00 P.M.
Saturday - 9:00 A.M. - 12:00 P.M.
Sunday - Closed
The bank hours are subject to change. Please let us know the opening hours.
|Office Name:
|The Ravenna Savings Bank Branch
|This is branch of First Place Bank
|Identification for Branch:
|# 43389
|Branch Deposit:
|$ 49,156 (in thousands of dollars)
|Established Date:
|Sun, 01 Jan 2023
|Run Date:
|Thu, 16 Aug 2012
|Branch County:
|Full Service Brick and Mortar Office
|Institution Name:
|First Place Bank
|Institution FDIC Certificate:
|# 34657
|Institution Class:
|Savings associations, state or federal charter, supervised by the Office of Thrift Supervision
Map & Driving Directions
You can also find First Place Bank locations on usbank101.com with main office and bank branches list.
Bank Nearby:
- First Place Bank The Ravenna Savings Bank Branch (0 mi)
- U.S. Bank Ravenna Giant Eagle (0.14 mi)
- PNC Bank Ravenna Branch (0.68 mi)
- Hometown Bank Ravenna Branch (0.94 mi)
- Key Bank Ravenna Downtown Branch (0.95 mi)
- The Huntington National Bank The Ravenna Branch (0.99 mi)
- Jpmorgan Chase Bank Ravenna Branch (1.01 mi)


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A Kimberly Kubus fangame, made with good intentions. Johnny lives forever!!!
For more games go to:
A marker game sequel to Cave Sporey.
A flickgame adaptation of The Abandoned Sandal. Apologies to terrytheplatypus for the numerous scenes omitted due to space constraints (but hopefully you're down with me making this in the first place).
I used hugs' mod to dither a few of the later frames (but the first two frames were hand-dithered, horrifyingly enough). I also experimented with an alternative colour palette, but ultimately decided against this. When I put forward the idea to fellow flickgamer Matthew Gatland, he suggested it might not be a flickgame any more if I changed the palette, which concerned me more than it should have.
and we lived to see another day
Kind of a response to some of the comments in Pineapple.
Edit Sunday, August 9th: I changed the end of the wall swimming area and added a few more save points.
Yo, what's up Glorious Trainwrecks?!
So, there was that "Klik and Play Marathon: The Final Laps" event.
FirecatFG and I made 42 short games!
Each of these games were made in about 15 or so minutes!
This exe has all the games that were posted in Klik and Play Marathon.
It also has a few games that I wanted to save for this huge file.
There's an interactive overworld for selecting all the games!
There's a password screen!
There's a huge text file with all the controls for each game and different hints.
Ask us questions if you want!
This is a fan game of Matt Thorson's "Jumper" (http://www.mattmakesgames.com/). It is very difficult and a little bit strange.
This game was made with Game Maker 8.0, so it only runs on Windows, and is prone to crashing on Windows 8.
Happy Klikmas, Nuuup! Enjoy FUNGILLUMINATI! :D
I can honestly say this is the most unusual game I've ever developed. At the same time, it's a fitting tribute to SON SON, one of my favourite classic arcade games developed by Capcom in the 80's.
Use the ARROW KEYS to select a menu option. Press SHIFT to make your choice.
Move your mushroom with the ARROW KEYS. You can also jump with the UP ARROW or SHIFT key. Drop down to the next lower level by pressing the DOWN key. You constantly shoot, so there's no need to press any buttons or keys to do that.
To win, shoot anything that moves, and collect anything that doesn't. Avoid the lava at the bottom of the screen, as it will hurt your sometimes.
Here's Nuuup's wishlist:
-Weird potatoes flying around the screen
-A tortoise that won' t SHUT UP
-A talking piece of poo that talks like a busy New Yorker
-A player that is a yellow mushroom
-A crudely drawn naked girl that is the Illuminati Top Model
-A drunken werewolf that wants to eat your face
-An agressive Totoro plush toy
I'm working on the Flash version of the game, but there are some bugs to work out first.
Everyone have fun. :)
EDIT: Last update 3 January 2015. Level restart bug and audio bugs now fixed, and now the player can jump with the UP ARROW key.
(my tradition of continually updating and fixing small issues after the initial release continues in full force...)
I edited the demo to make it into a full version, so making the release of the full version of my novel.
This game contains 2 more macros used than in the demo version.
I know this game is 70% short, i couldn't do it longer. Here's the node map: https://www.dropbox.com/s/c3ruyudk3ok93yu/CK-TWOTTnodemap.png
The story goes: Keen gets his brother Jeem while the really evil characters named the Tongies goes to brainwash Jeem into a monster.
A fan sequel to hugs' stanley melberg: enchanted accountant! Took me several more hours than I was expecting.
Again, I made both EXE and HTML5 versions. I think the EXE is slightly better.
Spacebar = start game
Left and right arrow keys = move
F4 = fullscreen
A spin-off based on a few of the rooms in Healy's Oh Man Go Time Gaiden, which was itself a spin-off of my level Oh Man Go Time. Angry Sonata, also by Healy, was another source of inspiration.
Basically, I wanted to submit three games in a row with gaiden in the title.
Special thanks to Fabien Porée's mysterious friend for making the data corrupter I used for some of the graphics.
Originally made for Klik of the Month Klub #57, but transplanted into Pirate Kart V.


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|October 30, 2000, 10:09 AM
Senior Member
Join Date: December 1, 1999
Location: Statsboro
Posts: 159
Was making plans to either build/buy a 1911 in 9x23. Since there isn't alot of commercial loads was thinking about reloading. What all do I need and what's good that won't cost an arm and a leg?
thanks, Cyric
|October 30, 2000, 01:48 PM
Join Date: April 8, 2000
Location: Upwind of Albuquerque, NM USA
Posts: 81
You'll hear many opinions, but if you're only loading for one caliber and don't want to spend a lot of $$$, I feel the best option is to get a Rockchucker Combo by RCBS. Yeah, you'll hear the Dillon folks beating their drum (it's the greatest thing since sliced bread, it slices/dices/juliennes...) BUT, for most shooters who shoot less than 500-1000 rounds per month, the Rockchucker is perfect. I think the retail is around $300 and includes most all of the basic tools you need to get started. Buy the dies you need, some bullets, primers and powder, and your're ready to rock.
Even though I do shoot >500 rnds/months, and usually use a RCBS P2K for most of my reloading tasks, I still keep my 20+ yr old Rockchucker set up for use with match grade loads and experimental stuff.
Gunrunner to the Stars
|October 30, 2000, 07:14 PM
Junior member
Join Date: October 2, 1999
Location: AZ
Posts: 1,759
well I guess a dillon nut has to post.300 will get you a sq deal in one caliber.Get a scale and you are in business and will load faster and you will have DILLON.
The dillon nut has spoken.
ps.If you are going to shoot a lot think about a 550 B.You can load 500 rds a hr with no problem and quality is match grade.
Bob--- Age and deceit will overcome youth and speed.
I'm old and deceitful.
|October 30, 2000, 07:49 PM
Senior Member
Join Date: July 16, 2000
Posts: 222
Start with the RCBS Rockchucker! You will be glad you did!
Regards! DaMan
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Get the Best Priced Mazda Rotary Pickup Brake Shoes
- Fast Shipping
- 30-Day Return Policy
- Low Prices
Mazda Rotary Pickup Replacement Brake Shoes Information
Search our online brake shoes catalog and find the lowest priced discount auto parts on the web. We sell wholesale to the public. We offer high quality new, OEM, aftermarket and remanufactured Mazda Rotary Pickup Brake Shoes parts. We specialize in a wide-variety of high-quality car parts and accessories for your car, truck or SUV. Call toll free to order or place your order online via our secure checkout system. Our online parts catalog uses real-time inventory, so you can be assured the parts you buy are in stock at the time of ordering. Most orders are shipped the same day. They are available for the following Mazda Rotary Pickup years: 1977, 1976, 1975, 1974, 77, 76, 75, 74. This part is also sometimes called Mazda Rotary Pickup Brake Drum Shoe. We stock brake shoes parts for most Mazda models including Protege, Tribute, MPV, RX7, B2600, 626, B2200, B2300, 2, B4000, B3000, B2000, Millenia, CX9, B1600, B2500, MX3, Navajo, CX7, 323, GLC, 929, Protege5, RX4, MX6, RX3, 808, R100, B1800 and Mizer.
We stock these Brake Shoes brands for the Mazda Rotary Pickup: Centric.
Click to Enlarge (Read reviews)
Our List Price: $21.08
Product SKU: 111.04880
Product Note: Premium Brake Shoes-Preferred -- Rear
Position of Product: Rear
Inventory: In Stock
Condition: New
Shipping Options:
- 77 1977 Mazda Rotary Pickup Brake Drum Rear Centric
- 75 1975 Mazda Rotary Pickup Brake Hose Front Centric
- 74 1974 Mazda Rotary Pickup Brake Pad Set Front Centric
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- 74 1974 Mazda Rotary Pickup Brake Shoe Set Rear Centric
- 74 1974 Mazda Rotary Pickup Wheel Cylinder Rear Left Dorman
Dealer wanted $200 for hood struts installed for my 02' Acura TL. Found them at Parts geek for $54/pr. They arrived quickly, well packaged and I installed them myself in minutes.
My order arrived earlier than expected and the cabin filter replacement was a perfect match. I plan to use them again. thanks


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A Madison County man was killed Saturday evening in a wreck on Sanford Road near Hull.
Claude Lollis, 70, of Hull pulled his SUV onto Sanford Road from Crabapple Hollow Road directly into the path of a van traveling south. Lollis died on scene, according to the Georgia State Patrol.
Witnesses said Lollis might have been unable to see the oncoming van because the bright setting sun, said Madison County Coroner Michelle Cleveland.
The driver of the van was taken to Athens Regional Medical Center for treatment of his injuries, which did not appear to be life-threatening, and one of three children who were passengers in the van received minor injuries, the state patrol said.
© 2017. All Rights Reserved. | Contact Us


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offers few opportunities for new leaders to emerge, build their own independent political base, and legitimately vie for power.
That closed and controlled system is now teetering after tens of thousands of Russians marched in the streets of Russian cities in December to reject Mr. Putin's penchant for bureaucratic manipulation, media control, and vote-rigging.
Fresh leaders are emerging without the Kremlin's approval and finding their voices. The following are seven to watch in coming months.
This post originally appeared at The Christian Science Monitor


text:
share:Remind Me
powered by AFI
Brief Synopsis
The famous Native American athlete fights prejudice in his pursuit of sports stardom.
Jim Thorpe, a young boy born on the Sac and Fox Indian reservation in Oklahoma, rejects his father's repeated attempts to place him in school because he is unaccustomed to the confines of a classroom. No sooner does his father drop him off at a new school than Jim rushes home, running the entire twelve-mile distance and arriving before his father. Although running is Jim's passion, his father tries to instill the value of a good education in Jim so that he can find a better life off the reservation. In time, Jim fulfills the promise he made to his father and attends the Carlisle Indian School in Pennsylvania. There he captures the attention of Glenn S. "Pop" Warner, the Director of Athletics, who sees Jim run and realizes that he can be an asset to the school track team. Pop's assessment of Jim's skills proves true when he leads the Carlisle team to many victories. While Jim makes fast friends with students Ed Guyac and Little Boy, he also stirs the interest of Margaret Miller, a fellow student who takes pleasure in sewing Jim's college letter onto his sweater. Realizing that he must vie with the captain of the football team to win Margaret's affection, Jim decides to go out for football and show off his prowess. Pop attempts to dissuade Jim from playing football because he fears that Jim's precious running legs might be injured, but Jim insists on joining. Game after game, Jim finds himself relegated to the bench, until the day of the game against Harvard, when Pop sends him onto the field. With the game tied, Jim manages to score a seemingly impossible touchdown, winning the game for Carlisle. From then on, Jim leads the team to one victory after another. As the football season comes to a close, Jim decides that his life ambition is to be a football coach, and that he wants to marry Margaret. However, Margaret does not return the following term because she is not an Indian, and is ashamed that she let Jim assume that she was. When Pop sees how despondent Jim is over losing Margaret, he gets her a job in the school infirmary, and the couple reunite, declaring that their love is more important than their different backgrounds. Jim continues his athletic success at Carlisle but is unable to get the coaching job he so desperately wants. To further prove his prowess, Jim enters the 1912 Olympic games in Stockholm, where he wins two gold medals. Soon after returning to the United States and marrying Margaret, Jim is accused by the Olympic Committee of breaking the rules and accepting money for playing on a minor league baseball team during one summer. Although he was unaware of the rule, Jim is stripped of his gold medals and, because of the resultant bad publicity, his career as an amateur is ruined. Jim then turns professional and enjoys careers in both baseball and football. He is devoted to his young son, and the boy's unexpected death sends Jim into a deep depression. Unable to endure Jim's drinking and aimless wandering from team to team, Margaret finally leaves him. Years pass, and in 1932, Pop gives Jim a ticket to the Los Angeles Olympics. Attending the event reminds Jim of his earlier ambitions and gives his life new meaning. On his way home, Jim accidentally drives over a football, and when he goes to return it to the neighborhood boys, he suddenly finds himself doing what he loves most, coaching. Many years later, Jim is honored by the American press as the greatest athlete in the first half of the century.
Cast & Crew
Additional Details
|MPAA Ratings:
|Premiere Info:
|New York opening: 24 Aug 1951
|Release Date:
|Production Date:
|Black and White
|Distributions Co:
|Warner Bros. Pictures, Inc.
|Mono (RCA Sound System)
|Production Co:
|Warner Bros. Pictures, Inc.
|United States
|not available
Leonard Maltin Ratings & Review
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Inspiring Bio Movie!
Jill 2013-11-09
This movie about Jim Thorpe, the famous Native American sports hero who rose to the top against many odds only to have all the glory taken away on a... MORE>
Jim Thorpe All-American - Great Bio Movie!
Jill Maguire 2013-11-09
I remember loving this movie as a kid back in the 50s. It's so inspiring and I wish all young people today would watch it to see what real American... MORE>
Role Model
Alice 2012-11-02
I am astonished at so few reviews on this magnificent film. This is the type of film that should be a "must-see", not only for all young people,... MORE>


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"We had a motto before the game, just basically coming into the game was let's live 'til tomorrow, find a way to get to tomorrow night and not be satisfied with getting there. But, from this point on, boy it's one game at a time. You can't look forward two or three games down the road."
Related quotes
"Life was given to us to be happy and to be what we want to be. Enough of letting the unknown force to decide our fate or every move we make! Is time to take control. We must stop living like we are going to live for 1000 years! We got to Live for the now, live for today!"
"Enough of being a dreamer! Be an achiever! I don't know if you have realized this, that time is passing by and the time you lose YOU CAN'T get back!..."


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What constitutes a good day for you? A paycheque? A Canucks win against the Leafs (or vice versa)? Good hair? For my part, I know it has been a good day if it involves Champagne. I suspect I drink more Champagne (or sparkling wine, to speak more generally) than most people. I toast small victories, such as fixing the drip in the kitchen faucet or remembering how to switch from TV to digital video recorder on the remote. Why wait for New Year's Eve or a birthday to pop the cork of happiness?
Champagne producers, ever the shrewd marketers, a few years ago came up with something called Champagne Day to help sell more of their luxury sparkling wine. It's like Earth Day, only instead of encouraging people to turn the lights off for an hour they want us to haul out those dusty flutes at the back of the cupboard to clink glasses on a date other than a birthday, anniversary or New Year's. This year, it took place on Oct. 25. Coincidentally, I reviewed a bunch of bubblies in my column two days prior, on Oct. 23, and chose to ignore the entreaties from Champagne folks to promote the big fete. I don't believe in Champagne Day. I would rather support Champagne Every Day.
Perrier-Jouët Grand Brut (France)
Perrier-Jouët is famous for its $200 vintagedated Belle Époque Champagne, the one in the iconic Art Nouveau bottle painted with images of Japanese anemone flowers. That design dates back to 1902, but the house had been well-known for almost a century by then. Oscar Wilde is reputed to have asked for the brand from jail. Being Oscar Wilde, he had the gall and good taste to specify the 1874 vintage. The house takes pride in what it promotes as a "floral" style. I get the flower part if I put my mind to it when tasting. I also get lots more out of this non-vintage gem. Though delicate, it manages to weave together much of what makes true-blue Champagne special. There's lemon-curd, fresh bread dough, honey, a whisper of vanilla and, yes, that uplifting floral component. I especially like the very dry character and chalky-mineral verve. $66.99 in B.C.
Bollinger Special Cuvée Brut Champagne (France)
Among the larger brands of bona-fide Champagne, Bollinger enjoys a particularly avid connoisseur following. The wines are robust, pair well with food and develop interesting complexity with a few years in the cellar. Even this entry-level Special Cuvée – admittedly not cheap for a nonvintage Champagne – enjoys a reputation for longevity. It has pronounced biscuit, lemon pastry and bread dough flavours along with nuances of earth and mineral in a blend that is already starting to show some attractive, nutty-oxidative evolution. $76.99 in B.C., $71.08 in Man., $70.25 in Que., $69.99 in N.B., $69.99 in N.S., $69.55 in PEI.
Domaine Chandon Étoile Brut (California)
The luxury goods people at Moët & Chandon in France founded this satellite brand in Napa Valley more than 30 years ago. This is the top-of-the-line flagship, where the winemakers get carte blanche each year to blend in the best fruit. It's expensive, but at the above Ontario price it's still slightly cheaper than the $40 (U.S.) price at the winery. It's crafted in a rich style, with a pronounced yeasty, creamy character that comes with extended aging on the lees or spent yeast cells. Think fresh baguette topped with lemon curd and baked apples. Available in Ontario.
Tarlant Zero Brut Nature Champagne (France)
This wine gets no dosage, the added spike of sugar prior to final corking, which, in most sparkling wines, counterbalances the high natural acidity. So this is about as bone-dry and tangy as they come. Yet it shows good depth of flavour, with lemony brioche, a toastynutty quality and honey. $49.25 in Que.
De Chanceny Excellence Brut Vouvray 2010 (France)
Vouvray, an appellation of the Loire Valley, produces a wide variety of whitewine styles, from dry to sweet, still to sparkling. Based on the chenin blanc grape, this dry bubbly is marvellous for the money. I get a hit of quarry dust off the nose, which carries through on the palate. Light and lively, it comes across with apple, honey, stones and flowers, with excellent extract that makes you want to chew. Available in Ontario.
Road 13 Sparkling Chenin Blanc 2010 (British Columbia)
It's sealed with a humble crown cap, like beer, but don't let that spoil your impression. This is serious wine. Crown caps ensure freshness and a growing number of exacting producers are turning to the unpretentious closure to do just that. Chenin blanc, the white champion of the Loire Valley, is a racy grape and its highstrung acidity comes through here – in a good way. Tart, with juicy fruit flavours of green apple and citrus, this Okanagan sparkler progresses with secondary nuances of bread dough, mineral and toasted nuts. It is beautifully made. Available direct from the winery (www.road13vineyards.com).
Vitteaut-Alberti Blanc Brut Crémant de Bourgogne (France)
If dry sparkling wine can be smooth, this qualifies. Creamy, with good midpalate density, it offers hints of cherry and baked apple supported by a tangy finish. Made in the Champagne style in Burgundy. Available in Ontario.
Château des Charmes Brut (Ontario)
Refermented in bottle, just as is done in Champagne and everywhere else that takes bubbles seriously, this is well crafted for the money. Fresh, lively and round, it delivers a soupçon of sweetness in the mid-palate before turning zippy on the finish, with notes of apple and stone fruit, citrus and toasted bread. Available at Ontario LCBO stores, the winery's Toronto and Ottawa boutiques and online through www.chateaudescharmes.com.


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Meat couture enthusiast Lady Gaga is being sued by a former assistant and friend for being such a demanding bitch. The lawsuit claims that in the time Jennifer O'Neill worked for lady freakshow she basically had no life and wasn't paid overtime for being at the star's fucking beck and call 24/7. She had to sleep in the same bed as Lady Gaga just in case she needed anything in the middle of the night. This has got to be tough as I imagine Lady Gaga sleeps in some weird places like in a cocoon of bear placentas or upsidedown like a bat. O'Neil says she didn't know it was going to be like that. Really? You didn't know stars can demand all of your fucking time? Lady Gaga says,
"You don't get a schedule. You don't get a schedule that is like you punch in and you can play ... at your desk for four hours and then you punch out at the end of the day. This is when I need you, you're available."A fair point. As fucking ridiculous as caring fo the needs of one of these pampered twats is, you have to know what you're getting yourself into when you go to work for them. Especially for someone as fucking weird as Lady Gaga. You are going to end up making butter sculptures of Valdimir Putin and getting hemeroid cream for fat drag queens at 5am.


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It's A Daddy Thing 2Favorites [+]
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Running Time: 131 minutes
Released: 08/2006
Studio Name: Elegant Angel Productions
Series: It's A Daddy Thing
Director: Patrick Collins
Categories: Small Tits Teen All Sex
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Written on: 21/08/2006 by Reviewer100 (25 reviews written)
Good Points
For when you've lost some weight on your stomach and just need to firm up.
Bad Points
Replacement pads can be expensive. Can be boring if you use it too often.
General Comments
The Slendertone Flex Max is purely for trimming and toning your stomach and does work very well indeed. I felt a difference within a few sessions of using it. Be under no illusion, toning equipment does not help you loose weight, but they do help to trim your 'love handles' and 'beer belly'. I would strongly recommend that you don't use it every day, say 2-3 days a week as in a short period of time, you'll become bored wearing it. Ideal if you can devote 15-30 minutes every other day or so. I was very sceptical about these things as you don't get anything for nothing. Providing your stomach muscles feel a bit tired after you have used it, you know you have achieved something. Well worth a go. I used it as I can do sit-ups with relative ease, but even doing it correctly hurt my back. Using the Flex Max doesn't hurt a bit. However READ THE INSTRUCTIONS BEFORE USE!!!!


text:
Fabrics Nature & Wildlife Fleece RealTree Hiddens Animals Allover Fleece
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text:
DENVER (CBS4) – Still reeling from a hail storm that damaged dozens of planes Wednesday night, more than 100 flights were canceled at Denver International Airport on Friday.
The situation was similar to Thursday at the airport, when about the same number of flights were also canceled.
Frontier was among the airlines canceling flights. Eight Frontier Airlines airbus planes will have to go to repair facilities out of state, according to a spokesman.
Frontier says passengers should check Frontier's website if you have a questions abut an upcoming flight.
Officials with Frontier said they are waving all change fees for passengers until the airline gets back up to speed.


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FALLBROOK – Lula Hedrick, long time Fallbrookian, just celebrated her 102nd birthday on Oct. 22. Born in 1910, she and her husband moved to Fallbrook in 1936. Fallbrook's Main St. was a dirt road, the train still came through town and women had their babies at home. Mrs. Hedrick knows this all too well as her first born son was born at home. She is spry and happy. She has a lot of family in Fallbrook who celebrated her birthday on Oct. 21.
Senior care advocates Shaun Lemon and Irene Escobedo visited her to celebrate and honor this wonderful woman, full of life! They said she is "a delight" and remembers a lot of history about Fallbrook and its growth.
Mrs. Hedrick is no stranger to the Foundation for Senior Care. After giving up driving sometime around age 90, she was excited when the Care Van became available in 2004. She could now go out with the Care Van and not depend as much on others. As she got older, she found out about the Senior Care Advocacy program and learned how it could help her to remain independent.
Foundation director Dotty Metcalf said, "We are blessed to know Lula Hedrick and wish her many more healthy years!"
For more information on how the Foundation for Senior Care can help local seniors, call (760) 723-7570.


text:
The book, published in Italy by Rizzoli and the Vatican Publishing House, will be released simultaneously in several languages (Italian, German, Croatian, French, English, Polish, Portuguese and Spanish) and in fifty countries; the worldwide print run of the first edition will be more than a million copies. In the coming months, the book will be translated into twenty languages for publication in seventy-two countries.
Third book, eh? I'm really looking forward to Episode IV: A New Pope.


text:
|Número de publicación
|Tipo de publicación
|Número de solicitud
|Fecha de publicación
|28 Nov 1995
|Fecha de presentación
|20 May 1994
|Fecha de prioridad
|20 May 1994
|También publicado como
|Número de publicación
|Bruce E. Gnade, Chih-Chen Cho, Douglas M. Smith
|Cesionario original
|Texas Instruments Incorporated
|Exportar cita
|BiBTeX, EndNote, RefMan
|Citas de patentes (8), Otras citas (2), Citada por (160), Clasificaciones (42), Eventos legales (4)
|Enlaces externos: USPTO, Cesión de USPTO, Espacenet
This invention relates generally to the fabrication of dielectrics on semiconductor devices, and more particularly to methods for reducing capacitive coupling on a semiconductor device using electrical insulators made of porous dielectric materials.
Semiconductors are widely used in integrated circuits for electronic devices such as computers and televisions. These integrated circuits typically combine many transistors on a single crystal silicon chip to perform complex functions and store data. Semiconductor and electronics manufacturers, as well as end users, desire integrated circuits which can accomplish more in less time in a smaller package while consuming less power. However, many of these desires are in opposition to each other. For instance, simply shrinking the feature size on a given circuit from 0.5 microns to 0.25 microns can increase power consumption by 30%. Likewise, doubling operational speed generally doubles power consumption. Miniaturization also generally results in increased capacitive coupling, or crosstalk, between conductors which carry signals across the chip. This effect both limits achievable speed and degrades the noise margin used to insure proper device operation.
One way to diminish power consumption and crosstalk effects is to decrease the dielectric constant of the insulator, or dielectric, which separates conductors. Probably the most common semiconductor dielectric is silicon dioxide, which has a dielectric constant of about 3.9. In contrast, air (including partial vacuum) has a dielectric constant of just over 1.0. Consequently, many capacitance-reducing schemes have been devised to at least partially replace solid dielectrics with air.
U.S. Pat. No. 4,987,101, issued to Kaanta et al., on Jan. 22, 1991, describes a method for fabricating gas (air) dielectrics, which comprises depositing a temporary layer of removable material between supports (such as conductors), covering this with a capping insulator layer, opening access holes in the cap, extracting the removable material through these access holes, then closing the access holes. This method can be cumbersome, partially because it requires consideration of access hole locations in the design rules and alignment error budget during circuit design, as well as requiring extra processing steps to create and then plug the holes. This method may also create large void areas which have essentially no means of handling mechanical stress and heat dissipation.
U.S. Pat. No. 5,103,288, issued to Sakamoto, on Apr. 7, 1992, describes a multilayered wiring structure which decreases capacitance by employing a porous dielectric with 50% to 80% porosity (porosity is the percentage of a structure which is hollow) and pore sizes of roughly 5 nm to 50 nm. This structure is typically formed by depositing a mixture of an acidic oxide and a basic oxide, heat treating to precipitate the basic oxide, and then dissolving out the basic oxide. Dissolving all of the basic oxide out of such a structure may be problematic, because small pockets of the basic oxide may not be reached by the leaching agent. Furthermore, several of the elements described for use in the basic oxides (including sodium and lithium) are generally considered contaminants in the semiconductor industry, and as such are usually avoided in a production environment. Creating only extremely small pores (less than 10 nm) may be difficult using this method, yet this requirement will exist as submicron processes continue to scale towards a tenth of a micron and less.
Another method of forming porous dielectric films on semiconductor substrates (the term "substrate" is used loosely herein to include any layers formed prior to the conductor/insulator level of interest) is described in U.S. Pat. No. 4,652,467, issued to Brinker et al., on Mar. 24, 1987. This patent teaches a sol-gel technique for depositing porous films with controlled porosity and pore size (diameter), wherein a solution is deposited on a substrate, gelled, and then cross-linked and densified by removing the solvent through evaporation, thereby leaving a porous dielectric. This method has as a primary objective the densification of the film, which teaches away from low dielectric constant applications. Dielectrics formed by this method are typically 15% to 50% porous, with a permanent film thickness reduction of at least 20% during drying. The higher porosities (e.g. 40%-50%) can only be achieved at pore sizes which are generally too large for such microcircuit applications. These materials are usually referred to as xerogels, although the final structure is not a gel, but an open-pored (the pores are generally interconnected, rather than being isolated cells) porous structure of a solid material.
The present invention provides a method for forming highly porous, finely pored (pore diameter of less than 80 nm and preferably of 2 nm to 25 nm), low dielectric constant (k less than 3.0 and preferably less than 2.0) dielectric films for use as semiconductor insulators. Surprisingly, the methods of this invention can provide an extremely low dielectric constant insulation structure, formed from a wet gel with controlled shrinkage, without employing exotic production techniques or incurring disadvantages found in other low dielectric constant methods.
A previously unrecognized problem in the application of dried gel dielectrics to microcircuits recognized herein is the shrinkage typically observed during gel drying, which may cause mechanical imperfections such as large voids, cracks, powdering, loose dielectric fragments, and stresses in surrounding structure, as well as densification (and increased dielectric constant) of the dielectric layer itself. Mechanical imperfections are particularly undesirable (and likely) when the porous material is required to fill a high-aspect ratio (height greater than width) gap between adjacent conductors, such as those commonly found on submicron integrated circuits, as shrinkage in such gaps may pull the dielectric loose from the bottom and/or sides of the trench. The primary underlying cause of xerogel shrinkage during drying has now been recognized as resulting from capillary pressure created at the boundary between liquid and vapor solvent in the pores during drying. The methods of this invention provide a novel solution for controlling densification and other shrinkage effects, which can be easily applied to semiconductor fabrication, resulting in a substantially undensified, highly porous rigid structure which can be formed even in high aspect ratio geometries.
Some of the other advantages possible with the present invention are: the processing can be done at atmospheric pressure, which not only simplifies processing but allows the construction of multiple porous layers on the same device; the solvents can be removed essentially completely from the porous film; the materials used in the process are not harmful to semiconductor devices; the porous structure can be made hydrophobic (water repelling); high temperatures are not required at any stage in the application; the dried porous structure has adequate structural strength to allow deposition of other layers on top of it; and, importantly, the pores formed in the dielectric can be made small enough to allow this method to be used with device feature sizes in the 0.5 to 0.1 micron range, or even smaller.
The present invention can provide a method for forming a porous dielectric film on a semiconductor device for the primary purpose of decreasing unwanted capacitive coupling between conductors on the semiconductor device. The method can include providing a layer containing at least two patterned conductors formed on a substrate and depositing a thin film on the substrate from a non-gelled solution which may then be gelled on the substrate to form a wet, open-pored porous gel (in the wetted state, the pores of the gel are filled with liquid). Gelation is preferably accomplished by hydrolysis and condensation of metal alkoxides, gelling of particulate or colloidal metal oxides, gelation of organic precursors, or a combination of these approaches. The method can further comprise aging the wet gel for a predetermined period of time under controlled temperature conditions. The method can further comprise performing a solvent exchange on the wet gel to remove substantially all water from the gel structure. The method can further comprise reacting the wet gel with a surface modification agent. This reaction preferably causes the replacement of at least 15% (and more preferably, at least 30%) of highly reactive groups (e.g. hydroxyl or alkoxyl groups) present on the internal pore surfaces with more stable surface groups or ions (e.g. organic, fluorine, fluorocarbon), thereby at least partially preventing condensation reactions between neighboring groups on the internal pore surfaces during drying, and thereby controlling densification. The surface modification may also substantially increase the pore fluid contact angle within the pores of the wet gel, thereby reducing capillary pressure during non-supercritical drying. The surface modification may also render the porous structure hydrophobic. The method can further comprise preferably drying the gelled film at one or more sub-critical pressures (from vacuum to near-critical) and more preferably, at atmospheric pressure, or alternately (but not preferably) drying the gelled film under supercritical conditions.
This invention, including various features and advantages thereof, can be best understood by reference to the following drawings, wherein:
FIG. 1 shows a block diagram of the steps in a typical embodiment of the invention;
FIGS. 2A-2D show cross-sectional illustrations of a solvent-filled pore, before and during solvent evaporation;
FIGS. 3A-3D show cross-sections of a portion of a semiconductor device, illustrating several steps in the application of an embodiment of the invention to a typical device;
FIGS. 4A-4C show cross-sections of another semiconductor device, illustrating two separate applications of the present invention;
FIG. 5 shows a cross-section of another structure formed with the methods of the current invention, with a relatively thick porous dielectric and a relatively thin non-porous dielectric;
FIG. 6A-6H show cross-sections of yet another semiconductor device with a non-porous dielectric formed by two sublayers;
FIG. 7 shows a cross-section of a semiconductor device containing a passivation layer which isolates a porous dielectric layer from direct contact with the conductors; and
FIGS. 8A-8D show cross-sections of a semiconductor device with dielectric spacers affixed to the tops of conductors.
Typical embodiments of the invention may be comprised of the steps shown in FIG. 1, although not all steps shown may be required in a given embodiment. Furthermore, materials may be substituted in several of the steps to achieve various effects, and processing parameters such as times, temperatures, pressures, and relative concentrations of ingredients may be varied over broad ranges. In FIG. 1, various precursor solutions (some of which are described in detail in the specific examples) may be mixed, and then applied to a substrate upon which a layer of patterned conductors has been formed. The method of application may be, for example, a spin-on technique in a controlled atmosphere which limits solvent evaporation. The object of the application in at least one embodiment is to form a layer of the precursor which will at least substantially fill the gaps between adjacent conductors. The precursor solution is allowed to gel on the substrate, a process which typically takes from 1 minute to 12 hours, depending on the solution and method of gelling. The wet gel can be allowed time to age, generally about a day (although it may be much shorter), at one or more controlled temperatures. If the wet gel contains water, one or more washing steps can be used to perform a solvent exchange on the gel, thereby removing the water but leaving the gel in a wet state. The solvent may be either a protic (e.g. ethanol) or an aprotic (e.g. acetone or hexane) solvent. The wet gel may then be reacted with a surface modification agent (the effects of the surface modification step will be explained below) by a method such as immersing the structure in a mixture containing the surface modification agent and a solvent in which the modification agent is soluble. This solvent must also be miscible with the solvent already present in the wet gel. Another solvent exchange may be subsequently used to remove excess surface modification agent from the structure. The solvent is allowed to evaporate out of the gel, leaving a porous dielectric structure. If the film is substantially undensified during drying, the dried gel exhibits essentially the same structure as the wet gel (the dried film thickness is substantially the same as the wet gel film thickness). The porous dielectric may finally be capped with a non-porous insulation layer, as detailed in the specific examples.
Referring to FIG. 2A, a cross-section of a single pore 12 in a wet gel structure 10 is shown, with a liquid pore fluid 14 filling pore 12. FIG. 2B shows the same pore undergoing evaporation of the pore fluid. A phase change (from liquid to vapor) is illustrated by the formation of a meniscus 18, which is shown as a crescent-shaped boundary between liquid pore fluid 14 and vapor 16 formed during evaporation. The meniscus is an indication of the surface tension of the pore fluid exerting an inward (usually, although some fluids can exert outward) pressure on the walls of the pore. This capillary pressure P can be related to the pore fluid surface tension Ts, the contact angle q (the angle at which the fluid meniscus contacts the surface of the pore), and the pore radius r, by the equation ##EQU1## The difficulty in maintaining the integrity of extremely small pores (small r) during drying is evident from this equation, since every halving of radius r doubles the pressure on the pore walls. Unfortunately, a porous dielectric suitable for use between conductors should contain pores at least an order of magnitude smaller than the interconductor gap (r approximately 10 nanometers for a 0.2 micron gap, for example). Adjusting pore size upwards to relieve capillary pressure is therefore a limited option for microelectronic applications. On the other hand, simply allowing pores to collapse from the capillary pressure results in excessive shrinkage, with the corresponding densification of the dielectric defeating the primary purpose of the method (reducing dielectric constant) as well as preventing good surface adhesion.
To circumvent the capillary pressure problem in monolithic xerogel synthesis, the aerogel technique has been developed. Generally, this variation of the xerogel technique removes a solvent from a wet gel under supercritical pressure and temperature conditions. By removing the solvent in the supercritical region, vaporization of the liquid solvent does not take place; instead, the fluid undergoes a constant change in density during the operation, changing from a compressed liquid to a superheated vapor with no distinguishable state boundary. This technique avoids the capillary pressure problem entirely, since no state change boundaries ever exist in the pores. Adapting the aerogel technique to semiconductor fabrication appears to be problematic and expensive; typical solvent candidates have high critical pressures (e.g. ethanol, 924 psi, carbon dioxide, 1071 psi) which make application difficult in most circumstances. For instance, these pressures may tend to crush previous layers or porous dielectric capped under atmospheric pressure or force the wet gel into the pores of previous porous dielectric layers left uncapped, and may require containment of the wet gel at the edges of the water to prevent the gel from being squeezed off the wafer before the gel can be dried. Nevertheless, a highly porous, finely pored dielectric structure may be formed by this process under some conditions, making this supercritical technique possibly useful in the practice of the present invention.
As an alternative to this, the present invention includes a group of novel techniques which may be applied at a range of pressures from vacuum to near-critical, with atmospheric pressure being preferable due to ease of handling and compatibility with previous porous layers. One similarity in these techniques is that a surface modification step is performed on the wet gel, replacing a substantial number of the molecules on the pore walls with those of another species. This surface modification typically replaces reactive surface groups such as hydroxyls and alkoxyls with more stable surface groups such as methyl groups, thereby controlling undesirable condensation reactions (and shrinkage effects) during gel drying. FIG. 2C shows a cross-section of a pore after the surface modification step; portions of gel 10 which are on the surface of pore 12 (labeled as region 20) now contain a different species. It has been discovered that by controlling the percentage of reactive surface groups replaced during the surface modification, the final shrinkage may be adjusted from the large shinkage typical of an unmodified xerogel (with uncontrolled shrinkage) to a shrinkage of only a few percent, heretofore only achievable with an aerogel technique. Typically, approximately 30% of the reactive surface groups must be replaced to substantially alleviate densification. Furthermore, the replacement surface species may be chosen because of its wetting properties in combination with specific pore fluids; thus in FIG. 2D, meniscus 18 is significantly flatter than that of FIG. 2B, resulting in a pore fluid contact angle closer to 90 degrees. As the fluid contact angle approaches 90 degrees, the cosine of the contact angle q goes to 0, and the capillary pressure P of Equation 1 is reduced proportionally. It is believed that the surface modification prevents surface condensation reactions, and may also reduce capillary pressure by changing pore fluid contact angle, thereby allowing pores in the surface modified gel to better survive drying. This novel technique can produce a dielectric layer, at atmospheric pressure, with average pore diameter, porosity, and overall shrinkage resembling those of supercritically-dried aerogels.
An additional benefit of the surface modification can be hydrophobicity. It has been found that, for example, replacing only 15% of the reactive surface groups with methyl groups may be sufficient to cause the structure to be hydrophobic. This is an important feature for any material used in semiconductor processing, but particularly so for porous materials. If the porous surfaces are left hydrophilic (water-wanting), the structure is in many ways analagous to a common household sponge, which may hold many times its weight in water. However, the extremely small pore sizes allow a hydrophilic porous dielectric to rapidly gather water out of the surrounding air, the prevention of which would be an added difficulty during device fabrication. By making the pores hydrophobic before the gel is dried, these types of difficulties may be avoided.
In accordance with the present invention, FIGS. 3A-3D show cross-sections of a semiconductor device at various stages during fabrication. During the description of the embodiments, use of the word wafer will imply a wafer as used in conventional semiconductor processing, with at least the illustrated semiconductor device incorporated therein. In FIG. 3A, three patterned conductors 24 (e.g. of aluminum alloyed with a small amount of copper) are shown formed on an insulating layer 22, which may contain vias or through holes (not shown) for providing electrical contact between conductors 24 and lower layers of the device. A precursor solution 26 is shown disposed between conductors 24, after application to the wafer, for example, by a spin-on technique. The precursor may be prepared, for example, by the following 2-step process. First, TEOS stock, a mixture of tetraethylorthosilicate (TEOS), ethanol, water, and HCl, in the approximate molar ratio 1:3:1:0.0007, is prepared by stirring these ingredients under constant reflux at 60 degrees C. for 1.5 hours. Secondly, 0.05 M ammonium hydroxide is added to the TEOS stock, 0.1 ml for each ml of TEOS stock. Since the addition of the ammonium hydroxide to the stock greatly increases gelation rate, the solution must be quickly applied to the wafer (it may be possible to switch the order of these two steps). After the solution is applied to the wafer, care should be taken to insure that the thin film does not dry prematurely; preferably, the wafer containing the solution/gel remains immersed either in liquid or in a saturated atmosphere at all times prior to the drying stage. Gelation and aging may preferably be accomplished by letting the device sit in a saturated ethanol atmosphere for approximately 24 hours at about 37 degrees C. Next, the water may be removed from the wet gel, preferably by immersing the wafer in pure ethanol. The surface modification step may then be performed, preferably by immersing the wafer in a hexane solution containing about 10% by volume trimethylchlorosilane (TMCS). After a brief reaction time, the unreacted surface modification compound is usually removed by immersing the wafer in an aprotic solvent (e.g. acetone, hexane) and allowing excess solvent to drain. After this solvent exchange, solvent is finally allowed to evaporate from the wet gel 26. This may produce a structure similar to that of FIG. 3B, which illustrates the dried gel now forming a porous dielectric layer 28, and also illustrates the few percent shrinkage typical of this method (the dried porous film thickness is only slightly less than the wet gel thickness). One advantage of this and similar embodiments is that the surface-modified porous dielectric layer is hydrophobic, whereas an otherwise similar supercritically-dried aerogel (without surface modification) tends to be hydrophilic unless subsequently treated.
It is preferable to, as shown in FIG. 3C, cap porous layer 28 with a substantially non-porous dielectric layer 30 to seal the open-pored structure, mechanically reinforce the device, and to provide a non-porous layer for via etching and constructing further metal/dielectric layers. This layer may be comprised of silicon dioxide, silicon nitride, a composite layer having silicon dioxide and silicon nitride sublayers, silicon oxynitride, an organic insulator, or similar materials, applied by a method such as chemical vapor deposition (CVD) or as a spin-on glass (SOG). FIG. 3D shows a via etched through non-porous layer 30 and filled with a conducting material to provide a metal-filled via 32, thereby providing a means for electrical connection between a conductor 24 and a second layer of patterned conductors 34, one of which is shown. The non-porous layer in this embodiment forms the majority of the interlayer dielectric. Although the solid dielectric may provide little or no reduction in layer-to-layer capacitance, excellent interlayer mechanical properties are maintained. This is preferred, because it achieves low intralayer capacitance and, at the same time, generally retains mechanical properties of a completely solid intra/interlayer dielectric. This recognizes that intralayer capacitance reduction is much more important than interlayer capacitance reduction.
FIGS. 4A-4C show a second embodiment with a different dielectric configuration. FIG. 4A shows a structure similar to that of FIG. 3C, with the one exception being that non-porous dielectric layer 30 is too thin to form the interlayer dielectric. Referring to FIG. 4B, a second porous dielectric layer 36 is created, for example, by coating non-porous dielectric layer 30 with a non-gelled precursor solution and repeating the steps of FIG. 1. A cap layer 38 may be deposited over second porous layer 36, as shown in FIG. 4C. Cap layer 38 may be formed, for instance, using similar materials and processes as those used to create non-porous layer 30. This embodiment can provide a substantially lower interlayer dielectric constant than the previous embodiment, possibly at the expense of some structural strength. However, the non-porous and cap layers can help control via formation, and the cap layer can provide a solid foundation for additional conducting layers.
FIG. 5 illustrates an embodiment with only one porous and one non-porous dielectric layer, but with the intralayer and most of the interlayer dielectric generally formed by the porous layer. Porous dielectric layer 28 is preferably formed by increasing the deposited depth of the coating solution to completely cover the conductors to about the depth (measured from substrate 22) required to form the interlayer dielectric. This process may require depositing and gelling solution several times to build the required insulator thickness. Porous dielectric layer 28 may then be dried in accordance with one of the methods of the invention. A non-porous layer 30 may be applied over porous layer 28, for instance, using similar materials and processes as those used to form non-porous layers in the previous embodiments.
FIGS. 6A-6F show cross-sections of a device construction useful for porous intralayer dielectrics. FIG. 6A again shows patterned conductors 24 on a substrate 22. By a method such as those disclosed above, for example, a porous dielectric layer 28 is constructed to fill gaps between and cover conductors 24, with the dried structure possibly resembling FIG. 6B. FIG. 6C shows the structure after removal of a top portion of porous layer 28 to preferably expose the tops of conductors 24. The material removal may be accomplished, for example, by a controlled chemical etch, such as HF plasma etching, with concentrations and etch times strongly dependent on the dielectric porosity. Alternately, the material removal may be done with a mechanical polisher, using, for example, an aqueous colloidal suspension of silica. This recognizes that it may be easier (and therefore preferable) to deposit a thicker porous layer and etch it back than to more precisely deposit the porous layer only in the gaps between conductors. FIG. 6D shows a step of depositing, preferably by a chemical vapor deposition (CVD) technique, a conformal sublayer 56, of silicon dioxide for example, directly over the porous dielectric layer 28 and the conductors 24. A dry-processed CVD layer, which would primarily deposit near the top of the porous layer, may be preferable to spin-on glass (SOG), which may contain solvents capable of wetting the pores in porous layer 28. However, CVD is not particularly planarizing, and is a relatively slow method for forming a thick dielectric. FIG. 6E illustrates how a non-porous dielectric 30 may be applied over conformal sublayer 56, for example as an SOG oxide, to quickly complete a planarized interlayer dielectric.
FIG. 6F shows the structure after deposition and patterning of a photoresist mask 50. This prepares the water for the etch of via 52 through layers 30 and 56, as shown in FIG. 6G. An advantage of this embodiment is that via 52 does not pass through porous dielectric 28, which may be a difficult material to pattern precisely. Finally, FIG. 6H shows a metal-filled via 32 and one of a second layer of patterned conductors 34, electrically connected by metal-filled via 32 to one of patterned conductors 24. This embodiment of the invention can provide excellent intralayer capacitance reduction, a good mechanical bond between porous and non-porous dielectrics, a straightforward construction technique with largely conventional via formation, and a planarized, non-porous interlayer dielectric with good mechanical and heat transfer characteristics.
FIG. 7 is included to illustrate an embodiment wherein porous dielectric layer 28 is isolated from conductors 24 by a relatively thin conformal passivation layer 54, which may be formed, for example, of a CVD silicon dioxide. This layer may be advantageous in several embodiments. In an embodiment such as that of FIG. 6, layer 54 may be removed from the tops of conductors 24 during etchback of porous dielectric 28.
FIGS. 8A-SD illustrate an additional embodiment which includes dielectric spacers. In FIG. 8A, conductors 24 are patterned with dielectric spacers 58 on top of them. The spacers are preferably formed of the same material used in non-porous layer 30 (shown on FIG. 8D). This may be accomplished by depositing a conducting layer, overlaying this with a dielectric layer of a material such as silicon dioxide, and patterning both with one mask. In FIG. 8B, a porous dielectric layer 28 has been formed to preferably cover spacers 58, as shown. FIG. 8C shows the device after a top portion of porous dielectric 28 has been removed. This step preferably exposes the tops of the spacers, and, as FIG. 8C illustrates, in practice a top portion of spacers 58 will probably be removed as well. Finally, FIG. 8D shows the device after non-porous dielectric 30 has been deposited over the structure to complete the interlayer dielectric. An advantage of this embodiment is that the addition of the spacers allows the removal of a top portion of the porous dielectric, without the possibility of removing a portion of the conductors. This structure may also result in lower crosstalk, as compared to the embodiment of FIG. 6.
The following table provides an overview of some embodiments cross-referenced to the drawings.
______________________________________Drawing Preferred or Generic Other AlternateElement Specific Examples Term Examples______________________________________22 Previous Substrate Previously-formed interlayer layers of a semicon- dielectric ductor device24,34 AlCu alloy Conductors Al, Cu, Mo, W, Ti, and/or refractory and alloys of these metal Polysilicon, silicides, nitrides, carbides26 TEOS stock Precursor Solution of particulate solution or colloidal silicon, germanium, titanium, aluminum silicate ratioed TEOS/ MTEOS (methyl- triethoxysilane) stock, ratioed TEOS/ BTMSE (1,2-Bis (trimethoxysilyl) ethane) stock28,36 Surface-modified Porous Supercritically-dried dried gel dielectric aerogel, other fine- layer pored porous dielectrics30,38 Silicon dioxide Non-porous Other oxides, B or dielectric P-doped SiO.sub.2, silicon layer nitride, silicon oxynitride Parylene, polyimides, organic- containing oxide32 AlCu alloy Metal-filled Same as conductors and/or refractory via above metal50 Photoresist54 Silicon dioxide Passivation Silicon nitride, silicon layer oxynitride56 Silicon dioxide Conformal Silicon nitride, silicon sublayer oxynitride, organic- containing oxide58 Silicon dioxide Dielectric Same as non-porous spacers dielectric layer______________________________________
The invention is not to be construed as limited to the particular examples described herein, as these are to be regarded as illustrative, rather than restrictive. The invention is intended to cover all processes and structures which do not depart from the spirit and scope of the invention. For example, one skilled in the an could apply one of the many other published methods of initially forming a wet gel from an appropriate precursor to this invention. Alternately, one could substitute organics for a portion of the silica while, for example, still having a material which was principally silica (less than 50 atom percent of the silicon being replaced). Properties of some of the specific examples may be combined without deviating from the nature of the invention.
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